High-precision moving mirror device based on two-dimensional adjustment of compliant mechanism

Abstract

The invention discloses a high-precision moving mirror device based on two-dimensional adjustment of a compliant mechanism, and belongs to the technical field of optical beam adjustment, the high-precision moving mirror device comprises a fixed mirror seat assembly, a two-dimensional motion assembly, a driver assembly, an optical mirror assembly assembly and an optical mirror bracket assembly, the two-dimensional motion assembly comprises a two-dimensional motion seat and the compliant mechanism, the two-dimensional moving seat is connected with the fixed mirror seat assembly through a compliant mechanism, the driver assembly comprises a servo motor, a trapezoidal screw rod and a flexible connecting rod, the servo motor is arranged on the fixed mirror seat assembly, one end of the trapezoidal screw rod is connected with an output shaft of the servo motor, and the other end of the trapezoidal screw rod is connected with the two-dimensional moving seat through the flexible connecting rod. Through organic combination of the servo motor and the compliant mechanism, the requirement for the torque of the driver can be effectively lowered, the problem of stress concentration can be avoided, and then the adjusting precision and stability of the whole device are guaranteed.

Description

Technical Field

[0001] The invention relates to the technical field of optical beam adjustment, and in particular to a high-precision moving mirror device based on two-dimensional adjustment of a compliant mechanism. Background Art

[0002] In modern optical applications, precise beam pointing is critical to ensure system performance and stability, especially in environments with extremely high cleanliness requirements. Traditional adjustment devices often introduce contamination due to wear and lubrication requirements.

[0003] Traditional two-dimensional electric adjustable mirrors have clearance and motion wear, which can easily lead to a decrease in accuracy over time, reducing the overall performance of the equipment. They are not suitable for optical systems that require transmission of light beams. In high-precision optical systems, any tiny error may affect the accurate pointing of the light beam, and thus affect the overall effect of the system.

[0004] A Chinese patent document with publication number CN116594136A and publication date August 15, 2023 discloses an optical axis pointing adjustment device for an optical element, characterized in that it includes: An endoscope assembly, comprising an endoscope frame and a fixing member, wherein the endoscope frame has a first accommodating cavity for accommodating an optical element, and the fixing member is used to fix the optical element in the first accommodating cavity; An outer mirror assembly, comprising an outer mirror frame and four linear drive mechanisms, wherein the outer mirror frame has a second accommodating cavity for accommodating the inner mirror frame, the shape of the second accommodating cavity is adapted to the shape of the inner mirror frame, the four linear drive mechanisms are mounted on the outer mirror frame corresponding to four vertex positions of a predetermined first rectangle, the driving end of the linear drive mechanism is fixedly connected to the inner mirror frame, and is used to drive the inner mirror frame to deflect, and the major axis and the minor axis of the first rectangle are the symmetry axes of the optical element; A plurality of flexible membranes are provided, wherein the flexible membranes flexibly connect the inner lens frame and the outer lens frame.

[0005] The optical axis pointing adjustment device of the optical element disclosed in the patent document can realize the continuous adjustment of the posture of the optical element, ensuring that any angle position within the adjustment range does not affect the surface shape of the lens. However, the flexible diaphragm has no kinematic pair, requiring the driver to provide a very large driving force, and the flexible diaphragm has the defects of high stress and stress concentration, which affects the overall adjustment accuracy and stability of the adjustment device. Summary of the invention

[0006] In order to overcome the defects of the above-mentioned prior art, the present invention provides a high-precision moving mirror device based on two-dimensional adjustment of a compliant mechanism. The present invention can effectively reduce the requirement on the driver torque and avoid the problem of stress concentration through the organic combination of a servo motor and a compliant mechanism, thereby ensuring the adjustment accuracy and stability of the entire device.

[0007] The present invention is achieved through the following technical solutions: A high-precision moving mirror device based on two-dimensional adjustment of a compliant mechanism, comprising a fixed mirror seat assembly, a two-dimensional motion assembly, a driver assembly, an optical mirror assembly assembly and an optical mirror frame assembly, the optical mirror frame assembly is fixedly connected to the fixed mirror seat assembly, the optical mirror assembly assembly is fixedly connected to the two-dimensional motion assembly, and is characterized in that: the two-dimensional motion assembly comprises a two-dimensional motion seat and a compliant mechanism, the two-dimensional motion seat is connected to the fixed mirror seat assembly through the compliant mechanism, the driver assembly comprises a servo motor, a trapezoidal lead screw and a flexible connecting rod, the servo motor is arranged on the fixed mirror seat assembly, one end of the trapezoidal lead screw is connected to the output shaft of the servo motor, and the other end of the trapezoidal lead screw is connected to the two-dimensional motion seat through a flexible connecting rod.

[0008] The trapezoidal lead screw comprises a lead screw and a sliding block slidably connected to the lead screw.

[0009] The servo motor is driven by a trapezoidal lead screw, which converts the rotational motion of the servo motor into a linear displacement motion, thereby driving the two-dimensional motion seat to adjust the pitch axis and the azimuth axis.

[0010] There are four compliant mechanisms, and the fixed mirror seat assembly is connected to the two-dimensional motion seat through the four compliant mechanisms.

[0011] The compliant mechanism comprises a multi-section flexible hinge, on which a pitch rotation pair and an azimuth rotation pair are arranged.

[0012] There are four servo motors, which are arranged correspondingly at four corners of the fixed mirror base assembly.

[0013] The fixed mirror seat assembly comprises a fixed mirror seat, a rear cover plate and a connector. The rear cover plate and the connector are connected to the rear surface of the fixed mirror seat through threads.

[0014] The optical lens assembly component comprises an optical element, an optical lens frame and an optical lens pressing block, and the optical element is fixed in the optical lens frame by the optical lens pressing block.

[0015] The optical mirror frame assembly comprises an optical mirror frame, a grinding pad and an aperture, wherein the aperture is connected to the front surface of the optical mirror frame through screws, and the grinding pad is arranged at the bottom of the optical mirror frame.

[0016] There are three grinding pads, which are arranged in a triangle at the bottom of the optical frame.

[0017] The working principle of the present invention is as follows: When in use, the optical mirror frame is connected to the optical system by screws, and the initial adjustment is completed by grinding the grinding pad to complete the rough adjustment of the light beam pointing of the optical system. The entire moving mirror device is fixed by grinding to ensure the stability of the installation of the moving mirror device.

[0018] According to the amount of adjustment information input by the controller, the controller outputs the displacement information of the four servo motors according to the conversion algorithm. The controller issues a work instruction and the corresponding motion data of the four servo motors, and drives the four servo motors to generate rotational motion. The trapezoidal lead screw of the driver assembly converts the rotational motion of the servo motor into linear displacement, and transmits the motion to the two-dimensional motion component through the flexible connecting rod, thereby driving the optical mirror assembly component to move. The movement information is obtained through the absolute position sensor in the servo motor to form a closed-loop control, so that the optical elements in the optical mirror assembly component perform corresponding deflection motion, thereby changing the direction of the light beam.

[0019] The beneficial effects of the present invention are mainly manifested in the following aspects: 1. In the present invention, the two-dimensional motion seat is connected to the fixed mirror seat assembly through a flexible mechanism, and the driver assembly includes a servo motor, a trapezoidal lead screw and a flexible connecting rod. The servo motor is arranged on the fixed mirror seat assembly, one end of the trapezoidal lead screw is connected to the output shaft of the servo motor, and the other end of the trapezoidal lead screw is connected to the two-dimensional motion seat through a flexible connecting rod. Compared with the prior art, the organic combination of the servo motor and the flexible mechanism can effectively reduce the requirements for the driver torque, and can avoid the problem of stress concentration, thereby ensuring the adjustment accuracy and stability of the entire device.

[0020] 2. In the present invention, the trapezoidal lead screw comprises a lead screw and a slider slidably connected to the lead screw. The trapezoidal lead screw has a self-locking function, which can keep the two-dimensional motion seat self-locked in place when the power is off, ensuring that the current position of the optical element can be effectively maintained in the event of a power outage or an accident, avoiding the position shift of the optical element caused by power outage, and does not affect the optical debugging of other equipment in the optical system when the power is off.

[0021] 3. In the present invention, the compliant mechanism includes a multi-section flexible hinge, on which a pitch rotation pair and an azimuth rotation pair are arranged. The compliant mechanism provides a two-dimensional motion axis system of pitch and azimuth, which has a simpler structure than the traditional sliding and rolling axis system and achieves the same function as the traditional mechanism at a lower cost.

[0022] 4. In the present invention, the compliant mechanism adopts integrated processing without matching clearance, which avoids the problem of shaft clearance in traditional mechanisms and can achieve higher movement accuracy. The compliant mechanism has no wear and no impurities during movement and does not require lubricants. It is suitable for precision optical systems with high cleanliness requirements.

[0023] 5. Compared with the flexible diaphragm structure disclosed in the Chinese patent document with publication number CN116594136A and publication date August 15, 2023, the flexible mechanism using multi-section flexible hinges can achieve multi-degree-of-freedom movement, realize movement and posture adjustment, and reduce the requirements for the driver torque.

[0024] 6. Compared with the flexible diaphragm structure disclosed in the Chinese patent document with publication number CN116594136A and publication date August 15, 2023, the flexible mechanism using multi-section flexible hinges can disperse the load, reduce stress concentration at each joint, and extend service life.

[0025] 7. Compared with the flexible diaphragm structure disclosed in the Chinese patent document with publication number CN116594136A and publication date August 15, 2023, the flexible mechanism using multi-section flexible hinges can achieve different motion modes and load capacities by adjusting the number of sections and connection methods.

[0026] 8. In the present invention, there are four servo motors, which are respectively arranged at the four corners of the fixed mirror base assembly. By adopting a four-point drive method, coordinated adjustment can be performed in multiple directions, making the adjustment process more flexible and efficient.

[0027] 9. The present invention adopts four-point drive, and each drive point can be independently controlled. In complex environments, external disturbances may cause positioning deviations of optical elements, and the four-point drive can quickly respond to such changes, ensuring that the light beam always remains on the preset trajectory.

[0028] 10. The present invention optimizes the force transmission efficiency, especially in complex dynamic environments, and can maintain the accurate position and excellent performance of optical components, which is conducive to improving the flexibility of the entire system to adapt to more complex motion requirements and diversified application scenarios. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] The present invention will be further described in detail below with reference to the accompanying drawings and specific implementations, wherein: Figure 1 It is a structural schematic diagram of the present invention; Figure 2 This is a schematic diagram of the structure of Embodiment 2 of the present invention; Figure 3 This is a schematic diagram of the structure of Embodiment 3 of the present invention; Figure 4 This is a schematic diagram of the structure of Embodiment 4 of the present invention; Figure 5 This is a schematic diagram of the structure of Embodiment 5 of the present invention; Markings in the figure: 1. fixed mirror seat assembly, 2. two-dimensional motion assembly, 3. drive assembly, 4. optical mirror assembly assembly, 5. optical mirror frame assembly, 6. two-dimensional motion seat, 7. flexible mechanism, 8. servo motor, 9. trapezoidal lead screw, 10. flexible connecting rod, 11. lead screw, 12. slider, 13. flexible hinge, 14. fixed mirror seat, 15. rear cover, 16. connector, 17. optical element, 18. optical mirror frame, 19. optical mirror pressing block, 20. optical mirror frame, 21. grinding pad, 22. aperture; , rotation angle 1, , rotation angle 2. DETAILED DESCRIPTION

[0030] Example 1 See also Figure 1 and Figure 2 A high-precision moving mirror device based on two-dimensional adjustment of a compliant mechanism 7 comprises a fixed mirror seat assembly 1, a two-dimensional motion assembly 2, a driver assembly 3, an optical mirror assembly assembly 4 and an optical mirror frame assembly 5, the optical mirror frame assembly 5 is fixedly connected to the fixed mirror seat assembly 1, the optical mirror assembly assembly 4 is fixedly connected to the two-dimensional motion assembly 2, the two-dimensional motion assembly 2 comprises a two-dimensional motion seat 6 and a compliant mechanism 7, the two-dimensional motion seat 6 is connected to the fixed mirror seat assembly 1 through the compliant mechanism 7, the driver assembly 3 comprises a servo motor 8, a trapezoidal lead screw 9 and a flexible connecting rod 10, the servo motor 8 is arranged on the fixed mirror seat assembly 1, one end of the trapezoidal lead screw 9 is connected to the output shaft of the servo motor 8, and the other end of the trapezoidal lead screw 9 is connected to the two-dimensional motion seat 6 through the flexible connecting rod 10.

[0031] This embodiment is the most basic implementation method. The two-dimensional motion seat 6 is connected to the fixed mirror seat assembly 1 through a flexible mechanism 7. The driver assembly 3 includes a servo motor 8, a trapezoidal screw 9 and a flexible connecting rod 10. The servo motor 8 is arranged on the fixed mirror seat assembly 1. One end of the trapezoidal screw 9 is connected to the output shaft of the servo motor 8, and the other end of the trapezoidal screw 9 is connected to the two-dimensional motion seat 6 through a flexible connecting rod 10. Compared with the prior art, the organic combination of the servo motor 8 and the flexible mechanism 7 can effectively reduce the requirements on the driver torque and avoid the problem of stress concentration, thereby ensuring the adjustment accuracy and stability of the entire device.

[0032] Example 2 See also Figure 1 and Figure 2A high-precision moving mirror device based on two-dimensional adjustment of a compliant mechanism 7 comprises a fixed mirror seat assembly 1, a two-dimensional motion assembly 2, a driver assembly 3, an optical mirror assembly assembly 4 and an optical mirror frame assembly 5, the optical mirror frame assembly 5 is fixedly connected to the fixed mirror seat assembly 1, the optical mirror assembly assembly 4 is fixedly connected to the two-dimensional motion assembly 2, the two-dimensional motion assembly 2 comprises a two-dimensional motion seat 6 and a compliant mechanism 7, the two-dimensional motion seat 6 is connected to the fixed mirror seat assembly 1 through the compliant mechanism 7, the driver assembly 3 comprises a servo motor 8, a trapezoidal lead screw 9 and a flexible connecting rod 10, the servo motor 8 is arranged on the fixed mirror seat assembly 1, one end of the trapezoidal lead screw 9 is connected to the output shaft of the servo motor 8, and the other end of the trapezoidal lead screw 9 is connected to the two-dimensional motion seat 6 through the flexible connecting rod 10.

[0033] Preferably, the trapezoidal lead screw 9 includes a lead screw 11 and a slider 12 slidably connected to the lead screw 11 .

[0034] The servo motor 8 is driven by a trapezoidal lead screw 9 , which converts the rotational motion of the servo motor 8 into a linear displacement motion, thereby driving the two-dimensional motion seat 6 to adjust the pitch axis and the azimuth axis.

[0035] This embodiment is a preferred implementation scheme. The trapezoidal lead screw 9 includes a lead screw 11 and a slider 12 slidably connected to the lead screw 11. The trapezoidal lead screw 9 has a self-locking function, which can keep the two-dimensional motion seat 6 self-locked in place when the power is off, ensuring that the current position of the optical element 17 can be effectively maintained in the event of a power outage or an accident, avoiding the position shift of the optical element 17 due to power outage, and not affecting the optical debugging of other devices in the optical system when the power is off.

[0036] Example 3 See also Figure 1-Figure 3 A high-precision moving mirror device based on two-dimensional adjustment of a compliant mechanism 7 comprises a fixed mirror seat assembly 1, a two-dimensional motion assembly 2, a driver assembly 3, an optical mirror assembly assembly 4 and an optical mirror frame assembly 5, the optical mirror frame assembly 5 is fixedly connected to the fixed mirror seat assembly 1, the optical mirror assembly assembly 4 is fixedly connected to the two-dimensional motion assembly 2, the two-dimensional motion assembly 2 comprises a two-dimensional motion seat 6 and a compliant mechanism 7, the two-dimensional motion seat 6 is connected to the fixed mirror seat assembly 1 through the compliant mechanism 7, the driver assembly 3 comprises a servo motor 8, a trapezoidal lead screw 9 and a flexible connecting rod 10, the servo motor 8 is arranged on the fixed mirror seat assembly 1, one end of the trapezoidal lead screw 9 is connected to the output shaft of the servo motor 8, and the other end of the trapezoidal lead screw 9 is connected to the two-dimensional motion seat 6 through the flexible connecting rod 10.

[0037] The trapezoidal lead screw 9 includes a lead screw 11 and a slider 12 slidably connected to the lead screw 11 .

[0038] The servo motor 8 is driven by a trapezoidal lead screw 9 , which converts the rotational motion of the servo motor 8 into a linear displacement motion, thereby driving the two-dimensional motion seat 6 to adjust the pitch axis and the azimuth axis.

[0039] There are four compliant mechanisms 7 , and the fixed mirror seat assembly 1 is connected to the two-dimensional motion seat 6 via the four compliant mechanisms 7 .

[0040] The compliant mechanism 7 comprises a multi-section flexible hinge 13, on which a pitch rotation pair and an azimuth rotation pair are arranged.

[0041] This embodiment is another preferred implementation manner. The compliant mechanism 7 includes a multi-section flexible hinge 13. The flexible hinge 13 is provided with a pitch rotation pair and an azimuth rotation pair. The compliant mechanism 7 provides a two-dimensional motion axis system of pitch and azimuth. Compared with the traditional sliding and rolling axis system, it has a simpler structure and achieves the same function as the traditional mechanism at a lower cost.

[0042] The compliant mechanism 7 is processed in an integrated manner without any clearance, thus avoiding the problem of shaft clearance in traditional mechanisms and achieving higher motion accuracy. The compliant mechanism 7 has no wear and no impurities generated during movement and does not require lubricants, so it is suitable for precision optical systems with high cleanliness requirements.

[0043] Compared with the flexible diaphragm structure disclosed in the Chinese patent document with publication number CN116594136A and publication date August 15, 2023, the compliant mechanism 7 using multi-section flexible hinges 13 can achieve multi-degree-of-freedom movement, realize movement and posture adjustment, and reduce the requirements for the driver torque.

[0044] Compared with the flexible diaphragm structure disclosed in the Chinese patent document with publication number CN116594136A and publication date August 15, 2023, the compliant mechanism 7 using multi-section flexible hinges 13 can disperse the load, reduce stress concentration at each joint, and extend service life.

[0045] Compared with the flexible diaphragm structure disclosed in the Chinese patent document with publication number CN116594136A and publication date August 15, 2023, the compliant mechanism 7 using multi-section flexible hinges 13 can achieve different movement modes and load capacities by adjusting the number of sections and connection methods.

[0046] Example 4 See also Figure 1-Figure 4A high-precision moving mirror device based on two-dimensional adjustment of a compliant mechanism 7 comprises a fixed mirror seat assembly 1, a two-dimensional motion assembly 2, a driver assembly 3, an optical mirror assembly assembly 4 and an optical mirror frame assembly 5, the optical mirror frame assembly 5 is fixedly connected to the fixed mirror seat assembly 1, the optical mirror assembly assembly 4 is fixedly connected to the two-dimensional motion assembly 2, the two-dimensional motion assembly 2 comprises a two-dimensional motion seat 6 and a compliant mechanism 7, the two-dimensional motion seat 6 is connected to the fixed mirror seat assembly 1 through the compliant mechanism 7, the driver assembly 3 comprises a servo motor 8, a trapezoidal lead screw 9 and a flexible connecting rod 10, the servo motor 8 is arranged on the fixed mirror seat assembly 1, one end of the trapezoidal lead screw 9 is connected to the output shaft of the servo motor 8, and the other end of the trapezoidal lead screw 9 is connected to the two-dimensional motion seat 6 through the flexible connecting rod 10.

[0047] The trapezoidal lead screw 9 includes a lead screw 11 and a slider 12 slidably connected to the lead screw 11 .

[0048] The servo motor 8 is driven by a trapezoidal lead screw 9 , which converts the rotational motion of the servo motor 8 into a linear displacement motion, thereby driving the two-dimensional motion seat 6 to adjust the pitch axis and the azimuth axis.

[0049] There are four compliant mechanisms 7 , and the fixed mirror seat assembly 1 is connected to the two-dimensional motion seat 6 via the four compliant mechanisms 7 .

[0050] Further preferably, the compliant mechanism 7 comprises a multi-section flexible hinge 13, and the flexible hinge 13 is provided with a pitch rotation pair and an azimuth rotation pair.

[0051] There are four servo motors 8 , which are arranged at four corners of the fixed mirror base assembly 1 respectively.

[0052] This embodiment is another preferred implementation manner. There are four servo motors 8. The four servo motors 8 are respectively arranged at the four corners of the fixed mirror base assembly 1. By adopting a four-point drive method, coordinated adjustment can be performed in multiple directions, making the adjustment process more flexible and efficient.

[0053] Example 5 See also Figure 1-Figure 5A high-precision moving mirror device based on two-dimensional adjustment of a compliant mechanism 7 comprises a fixed mirror seat assembly 1, a two-dimensional motion assembly 2, a driver assembly 3, an optical mirror assembly assembly 4 and an optical mirror frame assembly 5, the optical mirror frame assembly 5 is fixedly connected to the fixed mirror seat assembly 1, the optical mirror assembly assembly 4 is fixedly connected to the two-dimensional motion assembly 2, the two-dimensional motion assembly 2 comprises a two-dimensional motion seat 6 and a compliant mechanism 7, the two-dimensional motion seat 6 is connected to the fixed mirror seat assembly 1 through the compliant mechanism 7, the driver assembly 3 comprises a servo motor 8, a trapezoidal lead screw 9 and a flexible connecting rod 10, the servo motor 8 is arranged on the fixed mirror seat assembly 1, one end of the trapezoidal lead screw 9 is connected to the output shaft of the servo motor 8, and the other end of the trapezoidal lead screw 9 is connected to the two-dimensional motion seat 6 through the flexible connecting rod 10.

[0054] The trapezoidal lead screw 9 includes a lead screw 11 and a slider 12 slidably connected to the lead screw 11 .

[0055] The servo motor 8 is driven by a trapezoidal lead screw 9 , which converts the rotational motion of the servo motor 8 into a linear displacement motion, thereby driving the two-dimensional motion seat 6 to adjust the pitch axis and the azimuth axis.

[0056] There are four compliant mechanisms 7 , and the fixed mirror seat assembly 1 is connected to the two-dimensional motion seat 6 via the four compliant mechanisms 7 .

[0057] The compliant mechanism 7 comprises a multi-section flexible hinge 13, on which a pitch rotation pair and an azimuth rotation pair are arranged.

[0058] There are four servo motors 8 , which are arranged at four corners of the fixed mirror base assembly 1 respectively.

[0059] The fixed mirror base assembly 1 comprises a fixed mirror base 14 , a rear cover plate 15 and a connector 16 . The rear cover plate 15 and the connector 16 are connected to the rear surface of the fixed mirror base 14 by threads.

[0060] The optical lens assembly 4 comprises an optical element 17 , an optical lens frame 18 and an optical lens pressing block 19 . The optical element 17 is fixed in the optical lens frame 18 via the optical lens pressing block 19 .

[0061] This embodiment is another preferred implementation method, which adopts four-point drive. Each drive point can be independently controlled. In a complex environment, external disturbances may cause the positioning of the optical element 17 to shift. The four-point drive can quickly respond to such changes and ensure that the light beam always remains on the preset trajectory.

[0062] Example 6 See also Figure 1-Figure 5A high-precision moving mirror device based on two-dimensional adjustment of a compliant mechanism 7 comprises a fixed mirror seat assembly 1, a two-dimensional motion assembly 2, a driver assembly 3, an optical mirror assembly assembly 4 and an optical mirror frame assembly 5, the optical mirror frame assembly 5 is fixedly connected to the fixed mirror seat assembly 1, the optical mirror assembly assembly 4 is fixedly connected to the two-dimensional motion assembly 2, the two-dimensional motion assembly 2 comprises a two-dimensional motion seat 6 and a compliant mechanism 7, the two-dimensional motion seat 6 is connected to the fixed mirror seat assembly 1 through the compliant mechanism 7, the driver assembly 3 comprises a servo motor 8, a trapezoidal lead screw 9 and a flexible connecting rod 10, the servo motor 8 is arranged on the fixed mirror seat assembly 1, one end of the trapezoidal lead screw 9 is connected to the output shaft of the servo motor 8, and the other end of the trapezoidal lead screw 9 is connected to the two-dimensional motion seat 6 through the flexible connecting rod 10.

[0063] The trapezoidal lead screw 9 includes a lead screw 11 and a slider 12 slidably connected to the lead screw 11 .

[0064] The servo motor 8 is driven by a trapezoidal lead screw 9 , which converts the rotational motion of the servo motor 8 into a linear displacement motion, thereby driving the two-dimensional motion seat 6 to adjust the pitch axis and the azimuth axis.

[0065] There are four compliant mechanisms 7 , and the fixed mirror seat assembly 1 is connected to the two-dimensional motion seat 6 via the four compliant mechanisms 7 .

[0066] The compliant mechanism 7 comprises a multi-section flexible hinge 13, on which a pitch rotation pair and an azimuth rotation pair are arranged.

[0067] More preferably, there are four servo motors 8 , and the four servo motors 8 are respectively arranged at four corners of the fixed mirror base assembly 1 .

[0068] The fixed mirror base assembly 1 comprises a fixed mirror base 14 , a rear cover plate 15 and a connector 16 . The rear cover plate 15 and the connector 16 are connected to the rear surface of the fixed mirror base 14 by threads.

[0069] The optical lens assembly 4 comprises an optical element 17 , an optical lens frame 18 and an optical lens pressing block 19 . The optical element 17 is fixed in the optical lens frame 18 via the optical lens pressing block 19 .

[0070] The optical mirror frame assembly 5 includes an optical mirror frame 20 , a grinding pad 21 and an aperture 22 . The aperture 22 is connected to the front surface of the optical mirror frame 20 by screws, and the grinding pad 21 is arranged at the bottom of the optical mirror frame 20 .

[0071] There are three grinding pads 21 , which are arranged in a triangle at the bottom of the optical lens frame 20 .

[0072] This embodiment is the best implementation method, which optimizes the force transmission efficiency, especially in complex dynamic environments, and can maintain the accurate position and excellent performance of the optical element 17, which is conducive to improving the flexibility of the entire system to adapt to more complex motion requirements and diversified application scenarios.

Claims

1. A high-precision moving mirror device based on two-dimensional adjustment of a compliant mechanism, comprising a fixed mirror seat assembly (1), a two-dimensional motion assembly (2), a driver assembly (3), an optical mirror assembly assembly (4) and an optical mirror frame assembly (5), wherein the optical mirror frame assembly (5) is fixedly connected to the fixed mirror seat assembly (1), and the optical mirror assembly assembly (4) is fixedly connected to the two-dimensional motion assembly (2), characterized in that: The two-dimensional motion assembly (2) comprises a two-dimensional motion seat (6) and a compliant mechanism (7); the two-dimensional motion seat (6) is connected to the fixed mirror seat assembly (1) via the compliant mechanism (7); the driver assembly (3) comprises a servo motor (8), a trapezoidal lead screw (9) and a flexible connecting rod (10); the servo motor (8) is arranged on the fixed mirror seat assembly (1); one end of the trapezoidal lead screw (9) is connected to the output shaft of the servo motor (8); and the other end of the trapezoidal lead screw (9) is connected to the two-dimensional motion seat (6) via the flexible connecting rod (10).

2. A high-precision moving mirror device based on two-dimensional adjustment of a compliant mechanism according to claim 1, characterized in that: The trapezoidal lead screw (9) comprises a lead screw (11) and a sliding block (12) slidably connected to the lead screw (11).

3. The high-precision moving mirror device based on two-dimensional adjustment of a compliant mechanism according to claim 1, characterized in that: The servo motor (8) is driven by a trapezoidal lead screw (9), which converts the rotational motion of the servo motor (8) into linear displacement motion, thereby driving the two-dimensional motion seat (6) to adjust the pitch axis and the azimuth axis.

4. The high-precision moving mirror device based on two-dimensional adjustment of a compliant mechanism according to claim 1, characterized in that: There are four compliant mechanisms (7), and the fixed mirror seat assembly (1) and the two-dimensional motion seat (6) are connected via the four compliant mechanisms (7).

5. The high-precision moving mirror device based on two-dimensional adjustment of a compliant mechanism according to claim 1, characterized in that: The compliant mechanism (7) comprises a multi-section flexible hinge (13), and a pitch rotation pair and an azimuth rotation pair are arranged on the flexible hinge (13).

6. The high-precision moving mirror device based on two-dimensional adjustment of a compliant mechanism according to claim 1, characterized in that: There are four servo motors (8), and the four servo motors (8) are arranged correspondingly at four corners of the fixed mirror base assembly (1).

7. The high-precision moving mirror device based on two-dimensional adjustment of a compliant mechanism according to claim 1, characterized in that: The fixed mirror base assembly (1) comprises a fixed mirror base (14), a rear cover plate (15) and a connector (16); the rear cover plate (15) and the connector (16) are connected to the rear surface of the fixed mirror base (14) via threads.

8. The high-precision moving mirror device based on two-dimensional adjustment of a compliant mechanism according to claim 1, characterized in that: The optical mirror assembly component (4) comprises an optical element (17), an optical mirror frame (18) and an optical mirror pressing block (19); the optical element (17) is fixed in the optical mirror frame (18) via the optical mirror pressing block (19).

9. The high-precision moving mirror device based on two-dimensional adjustment of a compliant mechanism according to claim 1, characterized in that: The optical mirror frame assembly (5) comprises an optical mirror frame (20), a grinding pad (21) and an aperture (22); the aperture (22) is connected to the front surface of the optical mirror frame (20) by means of screws, and the grinding pad (21) is arranged at the bottom of the optical mirror frame (20).

10. The high-precision moving mirror device based on two-dimensional adjustment of a compliant mechanism according to claim 9, characterized in that: There are three grinding pads (21), and the three grinding pads (21) are arranged in a triangle at the bottom of the optical lens frame (20).

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