Automatic welding equipment for machining quartz claw and welding method of automatic welding equipment

Abstract

The invention relates to the technical field of quartz product production and processing, in particular to automatic welding equipment for quartz claw products and a welding method of the automatic welding equipment. The concentric shaft clamping assembly is arranged on the rack and used for clamping a horizontally-arranged shaft rod, and the concentric shaft clamping assembly can further drive the shaft rod on the concentric shaft clamping assembly to rotate; the supporting claw clamping assembly is arranged on the rack and used for clamping the quartz claw and driving the quartz claw to get close to or get away from the direction of the front end of the shaft rod so that the supporting claw can be in butt joint with the shaft rod; and the welding gun assembly is used for welding the supporting claw and the shaft rod which are in butt joint. The device is high in universality, and production of quartz claws of different models can be achieved.

Description

Technical Field

[0001] The present invention relates to the technical field of quartz product production and processing, and more specifically, to an automatic welding device and a welding method for quartz claw products. Background Art

[0002] As a key component in semiconductor epitaxial equipment, the design, manufacturing and testing of quartz claws must meet extremely high precision standards to ensure that the wafer can maintain a relatively stable horizontal state in a complex process environment, which is crucial to ensuring product quality.

[0003] The structure of the quartz claw is mainly composed of two core parts: the shaft part and the support claw part. As the center of support and rotation, the shaft part needs to have excellent mechanical strength and meet precise dimensional tolerances; while the support claw part is responsible for carrying and fixing the wafer, and its design must fully consider the size, shape and weight distribution of the wafer to ensure balanced force and reduce vibration and deviation.

[0004] A quartz shaft product processing jig with publication number CN115557683A is mainly used for processing three-claw quartz claws as can be seen from its attached drawings. Therefore, its versatility is low and it is impossible to adapt and process quartz claws of different models. Summary of the invention

[0005] The main purpose of the present invention is to provide an automatic welding device and a welding method for processing quartz claws to solve the technical problems mentioned in the background technology.

[0006] In order to solve the above technical problems, the present invention proposes an automatic welding device for processing quartz claws, wherein the quartz claws include: a shaft and a plurality of supporting claws arranged at the ends of the shaft; wherein the automatic welding includes:

[0007] frame;

[0008] The concentric shaft clamping assembly is arranged on the frame and is used to clamp the horizontally arranged shaft rod. The concentric shaft clamping assembly can also drive the shaft rod thereon to rotate;

[0009] The support claw clamping assembly is arranged on the frame and is used to clamp the quartz claw and drive the quartz claw to move closer to or away from the front end of the shaft rod so as to dock the support claw with the shaft rod;

[0010] and a welding gun assembly, which is used for welding the butted supporting claws and the shaft rod.

[0011] In this technical solution, the concentric shaft clamping assembly can not only clamp the shaft rod stably in the horizontal direction, but also drive the shaft rod to rotate. Then, under the action of the support claw clamping assembly, the support claw and the shaft rod are precisely docked. Then, the welding gun assembly heats the welding surface to achieve welding of the shaft rod and the support claw, thereby realizing the processing of quartz claws of different models.

[0012] In the above technical solution, further, the supporting claw clamping assembly includes:

[0013] The first translation base plate is arranged vertically and is movably arranged on the frame in the horizontal direction;

[0014] A second driving unit, used for driving the first translation base plate to move;

[0015] The lifting base plate is arranged vertically and is movably arranged on the first translation base plate in the vertical direction;

[0016] The third driving unit is used to drive the lifting base plate to move;

[0017] And a supporting claw clamp is arranged on the lifting bottom plate and is used for clamping the supporting claw.

[0018] In this technical solution, it is convenient for the staff to install the supporting claw on the supporting claw clamp, and it is convenient to control the movement of the supporting claw clamp to make the supporting claw dock with the shaft rod.

[0019] In any of the above technical solutions, further, the frame or the first translation base plate has a horizontally arranged first guide rod or a first slide rail, and the first translation base plate and the frame are slidably connected via the first guide rod or the first slide rail;

[0020] The first translation bottom plate or the lifting bottom plate is provided with a second guide rod or a second slide rail arranged vertically, and the lifting bottom plate is slidably connected with the first translation bottom plate through the second guide rod or the second slide rail.

[0021] In the technical solution, the first translation base plate and the lifting plate are not easily offset when moving.

[0022] In any of the above technical solutions, further, the second driving unit is a cylinder, a hydraulic cylinder, an electric cylinder or a linear motor; the third driving unit is a cylinder, a hydraulic cylinder, an electric cylinder or a linear motor.

[0023] In this technical solution, the movement of the support claw is precisely controlled so that it can be precisely docked with the shaft rod.

[0024] In any of the above technical solutions, further, the welding gun assembly includes:

[0025] The second translation base plate is arranged vertically and is slidably connected to the frame through the first guide rod or the first slide rail;

[0026] A fourth driving unit, used for driving the second translation base plate to move;

[0027] A gun rack stand plate, arranged on the second translation bottom plate;

[0028] and a welding gun, which has two and is symmetrically arranged on the gun stand plate, and is used to heat the welding surfaces on both sides of the shaft and the supporting claw;

[0029] The fourth driving unit is arranged on the first translation base plate and the second translation base plate, and when the first translation base plate moves, the second translation base plate moves synchronously.

[0030] In the technical solution, two welding guns are provided to effectively improve the welding efficiency between the shaft rod and the supporting claws.

[0031] In any of the above technical solutions, further, the two welding guns are rotatably arranged on the gun stand plate; the welding gun assembly also includes:

[0032] The fifth driving unit is used to drive the two welding guns to rotate simultaneously; the fifth driving unit includes:

[0033] A lifting plate is movably arranged on the gun rack stand plate in a vertical direction;

[0034] There are two racks, which are arranged on both sides of the lifting plate;

[0035] There are two gears, which are respectively arranged on two welding guns;

[0036] and a power member, used for driving the lifting plate to move up and down;

[0037] Among them, the two gears are respectively meshed with the two racks; after the power member drives the lifting plate to move, the two racks respectively drive the two gears to rotate in opposite directions to adjust the flame spraying angles of the two welding guns.

[0038] In the present technical solution, the shaft rod and the supporting claws are heated by controlling the welding gun to swing up and down, so as to further improve the welding effect between the shaft rod and the supporting claws.

[0039] In any of the above technical solutions, further, it also includes:

[0040] The fine-tuning slide is arranged at the rear of the coaxial shaft clamping assembly and is used for fine-tuning the shaft rod on the coaxial shaft clamping assembly along its axial direction.

[0041] In this technical solution, the horizontal position of the shaft rod is controlled by fine-tuning the slide table so that the shaft rod and the supporting claws are precisely docked.

[0042] In any of the above technical solutions, further, it also includes:

[0043] The shaft rod anti-deviation assembly is used to prevent the front end of the shaft rod from deviating upward after the support claw is connected with the front end of the shaft rod from bottom to top; wherein the shaft rod anti-deviation assembly includes:

[0044] A runout detection unit, used to detect the runout value of the shaft;

[0045] And a limiting portion, which is used for limiting the front end portion of the shaft from moving upward.

[0046] In the present technical solution, in order to avoid unqualified raw material shaft rods and excessive upward external force applied by the supporting claws on the shaft rods when the supporting claws are docked with the shaft rods, causing the shaft rods to deviate upward, thereby causing the subsequently processed quartz claws to be scrapped, a shaft rod anti-deviation assembly is provided.

[0047] In any of the above technical solutions, further, the shaft anti-deviation assembly also includes:

[0048] A slide rail is horizontally arranged on the rack;

[0049] and a sliding seat slidably disposed on the slide rail;

[0050] The vibration detection part and the limit part are arranged on the sliding seat; the sliding direction of the sliding seat is parallel to the axis center line of the shaft on the coaxial axis clamping assembly.

[0051] In the present technical solution, the vibration detection part is set to slide to realize the vibration detection of the entire shaft rod, thereby avoiding the occurrence of unqualified products.

[0052] On the other hand, a welding method using a processed quartz claw is also provided, and the specific steps of the welding method are as follows:

[0053] S1. Arrange the shaft horizontally and clamp it through the concentric shaft clamping assembly; place the support claw on the support claw clamping assembly and clamp it;

[0054] S2, the shaft is controlled to rotate, and then the runout detection component performs a runout detection on the shaft. If the runout value is qualified, it indicates that the shaft is qualified, and then the front end of the shaft is limited by the limit part;

[0055] S3, control the support claw to move upward and abut against the bottom of the front end of the shaft;

[0056] S4, control the shaft to rotate again, and perform a runout detection on the shaft again through the runout detection component. Under the premise of ensuring that the runout value of the shaft meets the requirements, fine-tune the positions of the support claw and the limit part until the support claw is accurately docked with the shaft;

[0057] S5, starting the welding gun assembly, and heating the welding surface between the supporting claw and the shaft rod to weld the two into an integrated structure;

[0058] S6. After cooling, loosen the support claw through the support claw clamping assembly, then rotate the shaft rod to a certain angle, and then install the next support claw on the support claw clamping assembly, return to step S5, until all the support claws on the shaft rod are welded, and finally remove the welded quartz claws, and then end or return to S1.

[0059] Beneficial effects: Compared with the prior art:

[0060] 1. The product realizes automatic operation in the docking step, avoiding the dimensional error that may be caused by manual operation and improving product accuracy.

[0061] 2. The positioning surface of the support claw is consistent with the reference surface for testing, which improves the accuracy of product dimensions and avoids repeated repairs and adjustments.

[0062] 3. With the help of the concentric shaft clamping assembly and the runout detection unit, the runout detection of the shaft can be realized to avoid the mixing of unqualified shafts or product size deviation caused by clamping.

[0063] 4. By setting two welding guns and enabling them to swing, the welding efficiency of the shaft rod and the supporting claw is effectively improved.

[0064] 5. The whole equipment has high versatility and can realize the production of different types of quartz claws. BRIEF DESCRIPTION OF THE DRAWINGS

[0065] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0066] Figure 1 It is a three-dimensional structural schematic diagram of the present invention;

[0067] Figure 2 It is a schematic diagram of the three-dimensional structure of the present invention after removing the outer shell;

[0068] Figure 3 It is a schematic diagram of the structure of the concentric clamping assembly of the present invention after clamping the shaft rod;

[0069] Figure 4 It is a schematic diagram of the internal structure of the concentric clamping assembly of the present invention after clamping the shaft rod;

[0070] Figure 5 It is a schematic diagram of the exploded structure of the concentric group clamping assembly of the present invention;

[0071] Figure 6It is a schematic diagram of the connection structure between the third driving part and the lifting bottom plate of the present invention;

[0072] Figure 7 It is a three-dimensional structural schematic diagram of the welding gun assembly of the present invention;

[0073] Figure 8 It is a schematic diagram of the top view of the welding gun assembly of the present invention;

[0074] Fig. 9 It is a structural schematic diagram of the shaft rod anti-deviation assembly of the present invention.

[0075] The following are the descriptions of the reference numerals:

[0076] 100, quartz claw; 110, shaft; 120, supporting claw;

[0077] 1. Frame; 11. First guide rod;

[0078] 2. concentric shaft clamping assembly; 21. mounting frame; 211. first flange; 212. second flange; 213. connecting column; 22. concentric shaft; 23. clamping part; 231. collet; 2311. opening; 2312. annular groove; 232. nut; 24. driving part; 241. motor; 242. main gear; 243. driven gear; 244. synchronous belt;

[0079] 3. Support claw clamping assembly; 31. First translation base plate; 32. Second driving unit; 33. Lifting base plate; 331. Second slide rail; 34. Third driving unit; 35. Support claw clamp;

[0080] 4. welding gun assembly; 41. second translation bottom plate; 42. fourth driving unit; 43. gun stand plate; 44. welding gun; 45. fifth driving unit; 451. lifting plate; 452. rack; 453. gear; 454. power part;

[0081] 5. Fine-tune the slide;

[0082] 6. Shaft anti-deviation assembly; 61. Vibration detection unit; 62. Position limiting unit; 63. Slide rail; 64. Sliding seat. DETAILED DESCRIPTION

[0083] Below, the example embodiments according to the present application will be described in detail with reference to the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application, and it should be understood that the present application is not limited to the example embodiments described herein. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0084] It should be noted that, as shown in this application and claims, unless the context clearly indicates an exception, the words "a", "an", "a kind" and / or "the" do not specifically refer to the singular, but may also include the plural. Generally speaking, the terms "include" and "comprise" only indicate the inclusion of clearly identified steps and elements, and these steps and elements do not constitute an exclusive list, and the method or device may also include other steps or elements.

[0085] If the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back, etc.), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0086] In the present invention, unless otherwise clearly specified and limited, the terms "connection", "fixation", etc. should be understood in a broad sense. For example, "fixation" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0087] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present invention, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In addition, the meaning of "and / or" appearing in the full text includes three parallel schemes. Taking "A and / or B" as an example, it includes scheme A, or scheme B, or a scheme that satisfies both A and B. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in the field to implement. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0088] The quartz claw 100 is mainly composed of a shaft 110 and a supporting claw 120 arranged on the shaft 110. The shaft 110 is evenly distributed on the upper end (front end) of the shaft 110 along the circumferential direction, and is used to carry and fix the wafer. The number of supporting claws 120 is generally N, 3≤N≤6, and is selected according to different needs. Since the existing equipment for producing quartz claws 100 can only produce quartz claws 100 of the same type, the versatility is low, so it needs to be improved.

[0089] The following embodiments are used to describe in detail an automatic welding device and a welding method for processing quartz claws of the present application.

[0090] Embodiment 1:

[0091] like Figure 1 , Figure 2 As shown, in this embodiment, an automatic welding device for processing quartz claws is proposed, including: a frame 1; a coaxial shaft clamping assembly 2, which is arranged on the frame 1 and is used to clamp the horizontally arranged shaft 110, and the coaxial shaft clamping assembly 2 can also drive the shaft 110 thereon to rotate; a supporting claw clamping assembly 3, which is arranged on the frame 1 and is used to clamp the quartz claw 120 and drive the quartz claw 120 to approach or move away from the front end of the shaft 110 to dock the supporting claw 120 with the shaft 110; and a welding gun assembly 4, which is used to weld the docked supporting claw 120 and the shaft 110.

[0092] The concentric shaft clamping assembly 2 can not only stably clamp the shaft in the horizontal direction, but also drive the shaft to rotate. Then, under the action of the support claw clamping assembly 3, the support claw and the shaft are precisely docked, and then the welding gun assembly 4 heats the welding surface to achieve the welding of the shaft and the support claw. When it is necessary to weld the next support claw on the shaft, the shaft is rotated to reach a preset angle, such as 120° (three-claw quartz claw), 60° (6-claw quartz claw) or any other angle, so as to realize the processing of different types of quartz claws such as three-claw and six-claw.

[0093] Embodiment 2:

[0094] This embodiment is a further improvement made on the basis of the first embodiment.

[0095] like Figure 1-Figure 5 As shown, in this embodiment, the frame 1 is provided with a side plate; the concentric shaft clamping assembly 2 comprises: a mounting frame 21, which is provided on the side plate; a concentric shaft 22, which is a hollow structure and is horizontally provided on the mounting frame 21; a clamping portion 23, which has two groups and is respectively provided at both ends of the concentric shaft 22. After the shaft rod is embedded in the concentric shaft 22, the two groups of clamping portions 23 respectively clamp the parts of the shaft rod located at both ends of the concentric shaft 22;

[0096] The concentric shaft 22 is rotatably disposed on the mounting frame 21 with its axis as the rotation center.

[0097] First, the tail of the shaft is inserted horizontally into the concentric shaft 22; then, the clamping part 23 is operated to clamp the inserted end of the shaft. Since the concentric shaft 22 can rotate freely with its axis as the center of rotation, the shaft can be easily driven to rotate, while ensuring that the shaft is vertical to the horizontal plane, which greatly improves work efficiency and processing accuracy.

[0098] In this embodiment, it should be noted that the mounting frame 21 includes: a first flange 211; a second flange 212; and a connecting column 213 for connecting the first flange 211 and the second flange 212;

[0099] The first flange 211 and the second flange 212 are both provided with bearings in the middle, and the coaxial shaft 22 is rotatably provided on the first flange 211 and the second flange 212 through the bearings, and its two ends pass through and extend out of the first flange 211 and the second flange 212 respectively.

[0100] The first flange 211 and the second flange 212 are the main load-bearing and positioning components of the mounting frame 21, and are closely connected through the connecting column 213 to form a stable support frame. The bearing is a crucial component of the mounting frame 21, and is installed in the middle of the first flange 211 and the second flange 212, respectively, to support the concentric shaft 22 and allow it to rotate freely with the axis as the rotation center.

[0101] By adopting the ingenious combination and precise installation of the first flange 211, the second flange 212, the connecting column 213 and the bearing, it can be ensured that the coaxial shaft 22 remains stable, precise and reliable during the rotation process.

[0102] In this embodiment, conical grooves are provided at both ends of the concentric shaft 22, and the diameter of the conical grooves gradually decreases from the outside to the inside; the clamping part 23 includes: a collet 231, which has a hollow chamber for the shaft to pass through, and the outer walls of both ends are conical structures, and the outer wall of one end is adapted to the conical groove, and the end is embedded in the conical groove, and the other end is located outside the conical groove; and a nut 232, one end hole of which is a threaded hole and is threadedly connected to the outer wall of the end of the concentric shaft 22, and the other end hole is a conical hole and is adapted to the conical structure of one end of the collet 231 extending out of the concentric shaft 22;

[0103] Both ends of the collet 231 are provided with openings 2311 , so that when the collet 231 is squeezed by the nut 232 and the coaxial shaft 22 , the diameter of the hollow chamber therein can be reduced to clamp the shaft.

[0104] Through the cooperation among the concentric shaft 22, the conical groove, the collet 231 and the nut 232, the clamping portion 23 can realize effective clamping of the shaft rod. Moreover, this design is not only simple in structure but also easy to operate. The shaft rod can be clamped or loosened by rotating the nut 232, which is very suitable for the application scenario of quartz claw processing.

[0105] Specifically, after the shaft rod is inserted into the coaxial shaft 22, by rotating the nut 232, when the inner wall of the tapered hole on the nut 232 abuts against the tapered surface of the upper end of the collet 231 and an external force is applied, the collet 231 will move into the coaxial shaft 22. During the movement, the interior of the collet 231 gradually shrinks and abuts against the shaft rod, thereby clamping the shaft rod.

[0106] It should be noted that there are multiple openings 2311, which are distributed along the circumferential direction of the collet 231. By providing multiple openings 2311, the outer wall of the collet 231 can be easily deformed after being squeezed by the outside (nut 232) to clamp the shaft.

[0107] It should be noted that the outer wall of the nut 232 is provided with knurling to facilitate the staff to rotate the nut 232.

[0108] It should be noted that there is also an annular groove 2312 radially inwardly arranged on the outer wall of the collet 231, and the annular groove 2312 is located between the two conical structures. This arrangement enables the collet 231 to clamp the shaft more effectively.

[0109] It should be noted that, in order to facilitate the processing of the concentric shaft 22, it can be set to be a split type, that is, composed of two shaft parts.

[0110] Embodiment three:

[0111] This embodiment is a further improvement made on the basis of the second embodiment.

[0112] like Figure 2 , Figure 5 As shown, in this embodiment, the concentric shaft clamping assembly 2 further includes: a first driving part 24, which is used to drive the concentric shaft 22 to rotate; wherein the first driving part 24 includes: a motor 241, which is arranged on the side plate; a main gear 242, which is arranged on the output shaft of the motor 241; a driven gear 243, which is sleeved on the concentric shaft 22; and a synchronous belt 244, which is sleeved on the main gear 242 and the driven gear 243;

[0113] When the motor 241 drives the main gear 242 to rotate, the synchronous belt 244 drives the driven gear 243 to rotate, thereby driving the coaxial shaft 22 to rotate.

[0114] The motor 241 drives the main gear 242 to rotate, and then the driven gear 243 rotates under the action of the synchronous belt 244, so that the coaxial shaft 22 also rotates synchronously, so that the rotation angle of the shaft can be accurately controlled.

[0115] In this embodiment, the automatic welding equipment is optimized and further includes: a fine-tuning slide 5, which is arranged at the rear of the concentric shaft clamping assembly 2 and is used to fine-tune the shaft rod on the concentric shaft clamping assembly 2 along its axial direction.

[0116] The horizontal position of the shaft is controlled by the fine-tuning slide 5 so that the shaft and the supporting claws are precisely connected. Specifically, after adjusting the supporting claw clamping assembly 3 so that the supporting claws thereon are connected to the shaft, the two nuts 232 on the concentric shaft 22 are slightly loosened, and then the fine-tuning slide 5 is manually adjusted. The fine-tuning slide 5 moves, and the extended shaft thereon applies a thrust to the shaft to make it move slightly. After the shaft and the supporting claws are precisely connected, the nuts 232 are tightened.

[0117] Embodiment 4:

[0118] This embodiment is a further improvement made on the basis of any of the above embodiments.

[0119] like Figure 2 , Figure 6 As shown, in this embodiment, the support claw clamping assembly 3 includes: a first translation base plate 31, which is arranged vertically and is movable in the horizontal direction on the frame 1; a second driving unit 32, which is used to drive the first translation base plate 31 to move; a lifting base plate 33, which is arranged vertically and is movable in the vertical direction on the first translation base plate 31; a third driving unit 34, which is used to drive the lifting base plate 33 to move; and a support claw clamp 35, which is arranged on the lifting base plate 33 and is used to clamp the support claw.

[0120] In order to facilitate the staff to install the support claw on the support claw fixture 35, and to facilitate the control of the movement of the support claw fixture 35 so that the support claw and the shaft are docked, a first translation base plate 31 and a lifting plate 451 are provided. First, the second driving unit 32 drives the first translation base plate 31 to move away from the shaft, and then the support claw is installed on the support claw fixture 35, and then the first translation base plate 31 moves in the opposite direction to make it close to the front end of the shaft. After the support claw moves to the bottom of the front end of the shaft, the third driving unit 34 is started to move the lifting plate 451 upward, so that the support claw is docked with the bottom of the front end of the shaft, and then the support claw or the shaft is slightly adjusted to make the two accurately docked.

[0121] It should be noted that the rack 1 or the first translation bottom plate 31 has a horizontally arranged first guide rod 11 or a first slide rail 63, and the first translation bottom plate 31 and the rack 1 are slidably connected via the first guide rod 11 or the first slide rail 63;

[0122] A second guide rod or a second slide rail 331 is vertically arranged on the first translation base plate 31 or the lifting base plate 33 , and the lifting base plate 33 and the first translation base plate 31 are slidably connected via the second guide rod or the second slide rail 331 .

[0123] Through the above arrangement, the first translation bottom plate 31 and the lifting plate 451 are not easily offset during movement. For the convenience of layout, in this embodiment, the first guide rod 11 is preferably provided on the frame 1, and the second slide rail 331 is provided on the lifting bottom plate 33 to realize the movement of the first translation bottom plate 31 and the lifting bottom plate 33.

[0124] It should be noted that the second driving part 32 is a cylinder, a hydraulic cylinder, an electric cylinder or a linear motor 241; the third driving part 34 is a cylinder, a hydraulic cylinder, an electric cylinder or a linear motor 241. The second driving part 32 is used to precisely control the movement of the supporting claw, so that it can be precisely docked with the shaft.

[0125] Embodiment five:

[0126] This embodiment is a further improvement made on the basis of the fourth embodiment.

[0127] like Figure 2 As shown, in this embodiment, the welding gun assembly 4 includes: a second translation base plate 41, which is arranged vertically and is slidably connected to the frame 1 through the first guide rod 11 or the first slide rail 63; a fourth driving part 42, which is used to drive the second translation base plate 41 to move; a gun frame stand plate 43, which is arranged on the second translation base plate 41; and a welding gun 44, which has two and is symmetrically arranged on the gun frame stand plate 43, and is used to heat the welding surfaces on both sides of the shaft rod and the supporting claw;

[0128] The fourth driving part 42 is disposed on the first translation base plate 31 and the second translation base plate 41 , and when the first translation base plate 31 moves, the second translation base plate 41 moves synchronously.

[0129] In order to enable the flame on the welding gun 44 to quickly act on the entire welding surface between the shaft and the support claw, two welding guns 44 are arranged opposite to each other, and the two welding guns 44 heat both sides of the shaft and the support claw, and then the third driving part 34 drives the second translation bottom plate 41 to perform linear motion, so that the two welding guns 44 heat both sides of the shaft and the support claw back and forth in the horizontal direction, so that the two are heated evenly and welded. By setting two welding guns 44, the welding efficiency of the shaft and the support claw is effectively improved.

[0130] In order to facilitate control and improve the integration of the entire equipment, the second translation base plate 41 is slidably set on the first guide rod 11 or the first slide rail 63, and the first translation base plate 31 and the second translation base plate 41 are linked through the fourth driving unit 42. In this way, when the first translation base plate 31 moves, the second translation base plate 41 can move together, but when the second translation base plate 41 moves, the first base plate will not move, thereby facilitating the loading of the support claw clamping assembly 3.

[0131] Specifically, the fourth driving part 42 is a pneumatic cylinder, a hydraulic cylinder or an electric cylinder, and is installed on the first translation base plate 31 , and the piston rod end thereof is installed on the second translation base plate 41 .

[0132] It should be noted that the welding torch 44 uses hydrogen-oxygen flame as fuel to heat the shaft rod and the supporting claws.

[0133] Embodiment six:

[0134] This embodiment is a further improvement made on the basis of the fifth embodiment.

[0135] like Figure 2 , Figure 7 , Figure 8 As shown, in this embodiment, two welding guns 44 are rotatably arranged on the gun rack plate 43; the welding gun assembly 4 further includes: a fifth driving part 45, which is used to drive the two welding guns 44 to rotate simultaneously; the fifth driving part 45 includes: a lifting plate 451, which is movably arranged on the gun rack plate 43 in the vertical direction; two racks 452, which are arranged on both sides of the lifting plate 451; two gears 453, which are respectively arranged on the two welding guns 44; and a power member 454, which is used to drive the lifting plate 451 to move up and down;

[0136] The two gears 453 are respectively meshed with the two racks 452 ; after the power member 454 drives the lifting plate 451 to move, the two racks 452 respectively drive the two gears 453 to rotate in opposite directions to adjust the flame spraying angles of the two welding guns 44 .

[0137] In order to further improve the welding effect between the shaft rod and the supporting claws, the welding gun can be controlled to swing up and down to heat the shaft rod and the supporting claws. Specifically, this can be achieved by controlling the rotation of the welding gun.

[0138] In order to enable the two welding guns 44 to swing up and down at the same time, the gear 453 and the rack 452 are used for control. When the fifth driving part 45 drives the lifting plate 451 to move up or down, the rack 452 drives the gears 453 on both sides thereof to rotate in opposite directions, so that the rotation directions of the two welding guns 44 are opposite, thereby realizing synchronous swinging of the welding guns 44.

[0139] Embodiment seven:

[0140] This embodiment is a further improvement made on the basis of any of the above embodiments.

[0141] like Figure 1 , Figure 2 and Fig. 9 As shown, in this embodiment, it also includes: a shaft anti-deviation component 6, which is used to prevent the front end of the shaft from deviating upward after the supporting claw is connected with the front end of the shaft from bottom to top; wherein the shaft anti-deviation component 6 includes: a jump detection part 61, which is used to detect the jump value of the shaft; and a limit part 62, which is used to limit the upward movement of the front end of the shaft.

[0142] In order to avoid that the raw material shaft rod is unqualified and the support claw exerts too much upward external force on the shaft rod when it is connected with the shaft rod, causing the shaft rod to deviate upward and the quartz claws processed subsequently to be scrapped, a shaft rod anti-deviation component 6 is provided.

[0143] Specifically, after the shaft is clamped by the concentric shaft clamping assembly 2, the runout detection unit 61 is used to detect whether the shaft is qualified. If qualified, the next step is performed. Otherwise, it is necessary to check whether the shaft is offset during installation, or the shaft itself is unqualified and needs to be replaced. After the shaft is detected to be qualified, the position of the limiter 62 is adjusted, that is, the limiter 62 is against the upper part of the front end of the shaft. Thereafter, when the support claw clamping assembly 3 is moved so that the support claw on it docks with the front end of the shaft, the support claw will not be offset.

[0144] In this embodiment, it should be noted that the shaft anti-deviating assembly 6 further includes: a slide rail 63 horizontally disposed on the frame 1; and a slide seat 64 slidably disposed on the slide rail 63;

[0145] The vibration detection portion 61 and the limiting portion 62 are disposed on a sliding seat 64 ; the sliding direction of the sliding seat 64 is parallel to the axis of the shaft on the coaxial axis clamping assembly 2 .

[0146] By slidingly setting the vibration detection part 61, the vibration detection of the entire shaft can be realized to avoid the occurrence of unqualified products.

[0147] Embodiment eight:

[0148] This embodiment provides a welding method using processed quartz claws, and the specific steps of the welding method are as follows:

[0149] S1. Lay the shaft horizontally and clamp it through the concentric shaft clamping assembly 2; place the support claw on the support claw clamping assembly 3 and clamp it;

[0150] S2, the shaft is controlled to rotate, and then the runout detection unit 61 performs runout detection on the shaft. If the runout value is qualified, it indicates that the shaft is qualified, and then the front end of the shaft is limited by the limit unit 62;

[0151] S3, control the support claw to move upward and abut against the bottom of the front end of the shaft;

[0152] S4, control the shaft to rotate again, and perform the runout detection on the shaft again through the runout detection part 61, and fine-tune the positions of the support claw and the limit part 62 on the premise that the runout value of the shaft meets the requirements, until the support claw is accurately docked with the shaft;

[0153] S5, start the welding gun assembly 4, and heat the welding surface between the supporting claw and the shaft rod to weld the two into an integrated structure;

[0154] S6. After cooling, loosen the support claw through the support claw clamping assembly 3, then rotate the shaft rod a certain angle, and then install the next support claw on the support claw clamping assembly 3, return to step S5, until all the support claws on the shaft rod are welded, and finally remove the welded quartz claws, and then end or return to S1.

[0155] Through the welding method, the production and processing of quartz claws of different models can be realized, and the production efficiency is high and the qualified rate of the products produced is also high.

[0156] The embodiments of the present disclosure have been described above, and the above description is exemplary, not exhaustive, and is not limited to the disclosed embodiments. Many modifications and changes will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the described embodiments. The selection of terms used herein is intended to best explain the principles of the embodiments, practical applications, or improvements to the technology in the market, or to enable other persons of ordinary skill in the art to understand the embodiments disclosed herein.

Claims

1. An automatic welding device for processing quartz claws, the quartz claws comprising: A shaft and a plurality of supporting claws arranged at the end of the shaft; characterized in that the automatic welding comprises: Rack (1); A coaxial shaft clamping assembly (2) is arranged on the frame (1) and is used to clamp a horizontally arranged shaft rod. The coaxial shaft clamping assembly (2) can also drive the shaft rod thereon to rotate; A support claw clamping assembly (3) is arranged on the frame (1) and is used to clamp the quartz claw and drive the quartz claw to move toward or away from the front end of the shaft rod so as to dock the support claw with the shaft rod; And a welding gun assembly (4) is used for welding the butted support claws and the shaft rod.

2. The automatic welding equipment for processing quartz claws according to claim 1, characterized in that: The support claw clamping assembly (3) comprises: A first translation base plate (31) is arranged vertically and is movably arranged on the frame (1) in a horizontal direction; A second driving unit (32), used for driving the first translation base plate (31) to move; A lifting base plate (33) is arranged vertically and is movably arranged on the first translation base plate (31) in a vertical direction; A third driving unit (34), used for driving the lifting base plate (33) to move; And a support claw clamp (35) is arranged on the lifting base plate (33) and is used for clamping the support claw.

3. The automatic welding equipment for processing quartz claws according to claim 2, characterized in that: The frame (1) or the first translation base plate (31) has a first guide rod (11) or a first slide rail arranged horizontally, and the first translation base plate (31) and the frame (1) are slidably connected via the first guide rod (11) or the first slide rail; A second guide rod or a second slide rail (331) is vertically arranged on the first translation base plate (31) or the lifting base plate (33), and the lifting base plate (33) and the first translation base plate (31) are slidably connected via the second guide rod or the second slide rail (331).

4. The automatic welding equipment for processing quartz claws according to claim 2, characterized in that: The second driving part (32) is a pneumatic cylinder, a hydraulic cylinder, an electric cylinder or a linear motor; the third driving part (34) is a pneumatic cylinder, a hydraulic cylinder, an electric cylinder or a linear motor.

5. The automatic welding equipment for processing quartz claws according to claim 3, characterized in that: The welding gun assembly (4) comprises: A second translation base plate (41) is arranged vertically and is slidably connected to the frame (1) via the first guide rod (11) or the first slide rail; A fourth driving unit (42), used for driving the second translation base plate (41) to move; A gun rack stand plate (43) is arranged on the second translation bottom plate (41); and two welding guns (44), which are symmetrically arranged on the gun stand plate (43) and are used to heat the welding surfaces on both sides of the shaft and the supporting claw; The fourth driving part (42) is arranged on the first translation base plate (31) and the second translation base plate (41), and when the first translation base plate (31) moves, the second translation base plate (41) moves synchronously.

6. The automatic welding equipment for processing quartz claws according to claim 5, characterized in that: The two welding guns (44) are rotatably arranged on the gun rack stand plate (43); the welding gun assembly (4) further comprises: A fifth driving unit (45) is used to drive the two welding guns (44) to rotate simultaneously; the fifth driving unit (45) comprises: A lifting plate (451) is movably arranged on the gun rack stand plate (43) in a vertical direction; Two racks (452) are provided on both sides of the lifting plate (451); There are two gears (453), which are respectively arranged on two welding guns (44); and a power member (454) for driving the lifting plate (451) to move up and down; The two gears (453) are respectively meshed with the two racks (452); after the power member (454) drives the lifting plate (451) to move, the two racks (452) respectively drive the two gears (453) to rotate in opposite directions to adjust the flame spraying angles of the two welding guns (44).

7. The automatic welding equipment for processing quartz claws according to claim 1, characterized in that: Also includes: The fine-tuning slide (5) is arranged at the rear of the coaxial shaft clamping assembly (2) and is used to fine-tune the shaft rod on the coaxial shaft clamping assembly (2) along its axial direction.

8. The automatic welding equipment for processing quartz claws according to any one of claims 1 to 7, characterized in that: Also includes: The shaft rod anti-deviation assembly (6) is used to prevent the front end of the shaft rod from deviating upward after the support claw is connected to the front end of the shaft rod from bottom to top; wherein the shaft rod anti-deviation assembly (6) comprises: A runout detection unit (61), used for detecting the runout value of the shaft; and a limiting portion (62) for limiting the front end portion of the shaft from moving upward.

9. The automatic welding equipment for processing quartz claws according to claim 8, characterized in that: The shaft anti-deviation assembly (6) further comprises: A slide rail (63) is horizontally arranged on the frame (1); and a sliding seat (64) slidably disposed on the slide rail (63); The vibration detection part (61) and the limiting part (62) are arranged on the sliding seat (64); the sliding direction of the sliding seat (64) is parallel to the axis center line of the shaft on the coaxial axis clamping assembly (2).

10. A welding method using processed quartz claws, characterized in that: The quartz claws are welded using the automatic welding equipment as described in claim 8 or 9; the specific steps of the welding method are as follows: S1, arranging the shaft rod horizontally and clamping it through the coaxial shaft clamping assembly (2); placing the supporting claw on the supporting claw clamping assembly (3) and clamping it; S2, controlling the shaft rod to rotate, and then using the vibration detection part (61) to perform vibration detection on the shaft rod. If the vibration value is qualified, it indicates that the shaft rod is qualified, and then the front end of the shaft rod is limited by the limiting part (62); S3, control the support claw to move upward and abut against the bottom of the front end of the shaft; S4, controlling the shaft to rotate again, and performing a runout detection on the shaft again through the runout detection part (61), and fine-tuning the positions of the support claw and the limit part (62) on the premise that the runout value of the shaft meets the requirements, until the support claw and the shaft are precisely docked; S5, starting the welding gun assembly (4), the welding gun assembly (4) heats the welding surface between the supporting claw and the shaft rod, so that the two are welded into an integrated structure; S6. After cooling, loosen the support claw through the support claw clamping assembly (3), then rotate the shaft rod to a certain angle, and then install the next support claw on the support claw clamping assembly (3), return to step S5, until all the support claws on the shaft rod are welded, and finally remove the welded quartz claws, and then end or return to S1.

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