Terahertz sensor array design optimization method based on metasurface enhancement

Abstract

The invention relates to the technical field of terahertz, in particular to a terahertz sensor array design optimization method based on metasurface enhancement, which improves the performance of the terahertz sensor array in the aspects of sensitivity, resolution, frequency response and the like through multi-dimensional optimization design, obtains initial parameters of the array based on a physical model, and improves the accuracy of the design of the terahertz sensor array. By optimizing the structure and the arrangement mode of the metasurface unit and combining electromagnetic simulation analysis, the transmission efficiency and the phase regulation and control capability of terahertz waves are improved, the performance change of the sensor under high-temperature and high-stress conditions is evaluated through thermal effect and stress field simulation, the stability and the reliability of the sensor in a complex environment are ensured, and the application range of the sensor is widened. Based on laboratory testing, data of key performance indexes such as sensitivity, resolution and response time are fed back, design parameters are adjusted, and iterative optimization is completed; according to the invention, through combination of multi-dimensional simulation and experimental feedback, the performance and environmental adaptability of the terahertz sensor array are significantly improved, and the terahertz sensor array is suitable for wide terahertz detection application.

Description

Technical Field

[0001] The present invention relates to the field of terahertz technology, and in particular to a terahertz sensor array design optimization method based on metasurface enhancement. Background Art

[0002] Terahertz technology has broad application prospects in biomedical imaging, nondestructive testing, security, communications, and spectral analysis due to its unique advantages in non-ionization, high penetration, and high resolution. Terahertz sensor arrays can efficiently detect terahertz waves and achieve accurate detection of complex targets. As an artificially designed nanostructure, metasurface technology has the ability to precisely control the phase, amplitude, and polarization state of electromagnetic waves. When combined with terahertz sensor arrays, it can significantly improve detection performance, especially in terms of sensitivity, resolution, and frequency response. Therefore, the design of terahertz sensor arrays based on metasurface enhancement has become one of the current research focuses.

[0003] However, the existing terahertz sensor array technology based on metasurface enhancement still faces many challenges in multi-dimensional information detection, stability in complex environments, and design optimization. First, existing designs usually find it difficult to maintain high sensitivity and good frequency response over a wide frequency band, especially under different incident angles and polarization conditions, where performance fluctuates greatly. In addition, sensor arrays are prone to performance degradation due to thermal expansion or mechanical stress in high temperature and high stress environments, affecting their reliability. Finally, existing technologies lack effective experimental verification and feedback mechanisms, and the optimization of design parameters often relies on simulations, lacking data support under actual working conditions, resulting in a deviation between the final design results and actual performance. Summary of the invention

[0004] The present invention provides a terahertz sensor array design optimization method based on supersurface enhancement.

[0005] The terahertz sensor array design optimization method based on metasurface enhancement includes the following steps:

[0006] S1, initial parameter collection for terahertz sensor array design: by building a physical model, the structural parameters and material properties of the terahertz sensor array are obtained, including the array unit size, spacing, refractive index and transmittance of the material. Combined with the required application scenarios, the design goals are initially selected, including sensitivity, resolution and detection range;

[0007] S2, metasurface unit design and simulation: Based on the selected design goals, the metasurface unit structure is optimized, including the geometric shape, size, arrangement and material properties of the unit cell, and electromagnetic simulation analysis is performed. The simulation process uses the finite difference time domain method to calculate the propagation of terahertz waves in complex structures, and the overall performance parameters of the metasurface unit and the terahertz sensor array are obtained, including sensitivity and frequency response;

[0008] S3, optimization of coupling between metasurface and sensor array: By analyzing the electromagnetic field distribution of the coupling between metasurface units and sensor array, the interaction between metasurface and sensor array is optimized to ensure that terahertz waves can effectively enhance sensor response under different incident angles and polarization states. The performance of the overall array structure is evaluated using the transfer matrix method to further adjust the matching degree between metasurface units and sensor array.

[0009] S4, multi-physics field simulation optimization: Based on electromagnetic field simulation, thermal effect and stress field simulation are added to evaluate the performance degradation of the metasurface due to temperature and mechanical stress factors in the actual working environment, and the design structure is optimized based on the results;

[0010] S5, experimental verification and data feedback: Samples are manufactured based on the optimized design structure, and performance tests are carried out in the laboratory to test the sensitivity, resolution and response time indicators of the terahertz sensor array. The test results are fed back to S1 to S4 to further adjust the design parameters and complete the final optimization.

[0011] Optionally, the S1 specifically includes:

[0012] S11, establishment of physical model: According to the structural characteristics and material properties of the terahertz sensor array, a physical model is established to describe the propagation characteristics of terahertz waves in the sensor array, including the refraction, reflection, diffraction and scattering behavior of electromagnetic waves;

[0013] S12, determining the geometric dimensions of the array unit: determining the geometric dimensions of the sensor array unit based on the physical model, the geometric dimensions including the width, height and spacing of the sensor array unit;

[0014] S13, Selection of material properties: Analyze and select the material properties for the terahertz frequency band, including the refractive index and transmittance of the material;

[0015] S14, Determination of design goals: Based on the actual application scenarios, preliminarily determine the design goals of the terahertz sensor array.

[0016] Optionally, S2 includes:

[0017] S21, metasurface cell geometry design: Determine the geometry of the metasurface cell according to the determined design goals (sensitivity, resolution and detection range);

[0018] S22, optimization of cell size: design the size (width, height) of the cell to match the target wavelength;

[0019] S23, Design of cell arrangement: Based on the designed cell geometry and size, design the cell arrangement, considering periodic or non-periodic arrangement.

[0020] Optionally, S2 further includes:

[0021] S24, electromagnetic simulation model establishment: Based on the optimized metasurface unit structure, an electromagnetic simulation model is established to simulate the propagation path of terahertz waves on the metasurface unit, including diffraction, scattering and phase control effects;

[0022] S25, finite-difference time-domain simulation: The finite-difference time-domain method is used to simulate the propagation of terahertz waves in complex structures;

[0023] The finite-difference time-domain simulation calculates the electromagnetic field changes of the terahertz wave through discretized grids to obtain the electromagnetic response of the metasurface unit. The simulation results include electric field distribution, phase change and frequency response.

[0024] S26: Performance parameter calculation: Based on the simulation results of the finite-difference time-domain method, calculate the performance parameters of the metasurface unit and the terahertz sensor array as a whole, including sensitivity and frequency response.

[0025] Optionally, the S3 includes:

[0026] S31, electromagnetic field distribution analysis: The electromagnetic field distribution between the metasurface unit and the sensor array is analyzed through electromagnetic field simulation. During the simulation process, the propagation path and interaction of terahertz waves under different incident angles and polarization states are considered;

[0027] S32, Coupling effect optimization: Based on the results of electromagnetic field distribution analysis, the coupling effect between the metasurface unit and the sensor array is optimized. Under different incident angles and polarization states, the terahertz wave effectively enhances the response of the sensor. By adjusting the position and arrangement of the metasurface unit, the electromagnetic coupling effect is maximized, thereby improving the detection performance of the overall array.

[0028] S33, response analysis under polarization states: simulate and analyze the response of terahertz waves under different polarization states (such as linear polarization and circular polarization) to ensure that the metasurface and sensor array have good electromagnetic response performance under various polarization conditions, and further optimize the material and arrangement of the metasurface unit according to the response changes under different polarization conditions.

[0029] Optionally, S3 further includes:

[0030] S34, Transfer Matrix Method Performance Evaluation: The performance of the overall structure of the metasurface and sensor array is evaluated using the transfer matrix method;

[0031] The transmission matrix method is used to describe the propagation and reflection of electromagnetic waves in each layer structure and calculate the transmission efficiency and phase change;

[0032] S35, matching degree optimization: further adjusting the matching degree between the metasurface unit and the sensor array according to the evaluation result of the transfer matrix method;

[0033] S36, Frequency Response Tuning: Tune the frequency response of the sensor array to match the sensitivity and frequency response range in the design target by changing the geometric dimensions and material properties of the metasurface units.

[0034] Optionally, the S4 includes:

[0035] S41, thermal effect simulation: Based on the electromagnetic field simulation, thermal effect simulation is added to evaluate the performance changes of the metasurface and sensor array at different working temperatures;

[0036] Thermal effects cause the expansion or contraction of materials, which in turn affects the transmission and response of terahertz waves. By establishing a heat conduction equation, the temperature distribution of the sensor array is calculated, and the thermal expansion coefficient of the material is calculated using the linear thermal expansion formula. The temperature change of the sensor array when absorbing or releasing heat is expressed as:

[0037] Q = mcΔT;

[0038] Where Q is the heat absorbed by the sensor array, m is the mass of the array, c is the specific heat capacity of the material, and ΔT is the temperature change;

[0039] By simulating and analyzing the temperature distribution of the sensor array, we can predict the impact of temperature changes on the electromagnetic properties of the sensor array (such as sensitivity, frequency response, etc.).

[0040] S42, thermal expansion effect evaluation: Based on thermal effect simulation, further evaluate the impact of the expansion of the metasurface unit under high temperature conditions (over 100 degrees is considered a high temperature condition) on the phase regulation and frequency response of the terahertz wave, and optimize the material selection and geometric dimensions of the metasurface unit in view of the performance degradation caused by expansion.

[0041] Optionally, S4 further includes:

[0042] S43, stress field simulation: stress field simulation is added to evaluate the structural stability of the sensor array under different mechanical stress conditions;

[0043] S44, Mechanical stability optimization: Based on the stress field simulation results, optimize the structure of the metasurface unit and sensor array, adjust the material and geometric design, enhance the mechanical stability in high stress environment (stress greater than 100MPa is a high stress environment), and ensure that the array can still maintain excellent detection performance under long-term vibration and pressure.

[0044] Optionally, the S5 includes:

[0045] S51, sample fabrication: fabricate samples based on the optimized metasurface and terahertz sensor array design;

[0046] S52, performance test: laboratory performance index test of manufactured samples, test indexes include sensitivity, resolution and response time;

[0047] S53, Test data collection: During the performance test, all key performance indicator data are collected to ensure that the data on sensitivity, resolution and response time are detailed enough to facilitate subsequent feedback and optimization.

[0048] Optionally, S5 further includes:

[0049] S54, Data Analysis and Modeling: Perform data analysis based on the performance index data obtained from laboratory performance tests, build a performance model based on the experimental results, and analyze the relationship between performance indicators (such as sensitivity, resolution, response time) and structural parameters and material properties;

[0050] S55, feedback and design parameter adjustment: feedback the performance index data obtained from the laboratory performance test to the aforementioned steps of the design (S1 to S4), and further adjust the design parameters according to the analysis results of the performance model;

[0051] S56, design optimization iteration: Based on the feedback of performance indicator data and analysis results of the performance model, design iteration is carried out, the optimized design scheme is updated, and a new round of sample manufacturing and testing is prepared until the performance indicators meet the expected requirements.

[0052] Beneficial effects of the present invention:

[0053] The present invention significantly improves the sensitivity of the sensor by adjusting the geometric shape, size and arrangement of the metasurface unit, combining electromagnetic simulation and coupling optimization, especially maintaining efficient response under different frequency and polarization conditions, and combining the transmission matrix method with the finite difference time domain method for coupling analysis to ensure efficient frequency response within a wide frequency band. At the same time, the optimization of the metasurface unit arrangement and structural design ensures the spatial resolution of the terahertz sensor array under complex working conditions. This multi-dimensional design optimization greatly improves the overall performance of the sensor array.

[0054] The present invention effectively evaluates the stability and reliability of the terahertz sensor array under high temperature and high stress environments through thermal effect simulation and stress field simulation. Thermal effect simulation optimizes the metasurface material and structural design by calculating the temperature distribution of the sensor, thereby controlling thermal expansion at high temperature and reducing the impact of temperature changes on electromagnetic performance. Stress field simulation analyzes the structural deformation under different stress conditions, and ensures that the sensor maintains mechanical stability under long-term high stress or vibration conditions by optimizing the Young's modulus and structural design of the material. This multi-physics field simulation optimization significantly improves the reliability of the sensor array in harsh environments such as high temperature and high pressure, enabling it to operate stably under complex working conditions.

[0055] The present invention ensures the continuous improvement of the design scheme in practical applications through a closed-loop design optimization process of experimental verification and data feedback. The key performance indicator data such as sensitivity, resolution and response time collected in the experiment are fed back to the aforementioned design steps through analysis to ensure the continuous optimization of design parameters. The feedback mechanism of experimental data combined with modeling analysis promotes the iterative optimization of the design scheme, ensuring that the terahertz sensor array can adapt to different application requirements under changing working conditions. This design process that is continuously optimized through experimental feedback not only improves system performance, but also enhances the adaptability and stability of the sensor array under complex working conditions. BRIEF DESCRIPTION OF THE DRAWINGS

[0056] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings in the following description are only for the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0057] Figure 1 A schematic diagram of a method flow chart of an embodiment of the present invention;

[0058] Figure 2 Schematic diagram of S3 process of an embodiment of the present invention. DETAILED DESCRIPTION

[0059] The present invention is described in detail below in conjunction with the accompanying drawings and specific embodiments. At the same time, it is explained here that in order to make the embodiments more detailed, the following embodiments are the best and preferred embodiments, and those skilled in the art may also adopt other alternatives to implement some known technologies; and the accompanying drawings are only for more specific description of the embodiments, and are not intended to specifically limit the present invention.

[0060] It should be noted that the references to "one embodiment", "an embodiment", "an exemplary embodiment", "some embodiments" and the like in the specification indicate that the embodiments described may include specific features, structures or characteristics, but not every embodiment may include the specific features, structures or characteristics. In addition, when a specific feature, structure or characteristic is described in conjunction with an embodiment, it should be within the knowledge of a person skilled in the art to implement such feature, structure or characteristic in conjunction with other embodiments (whether or not explicitly described).

[0061] In general, a term can be understood, at least in part, from its use in context. For example, depending, at least in part, on the context, the term "one or more" as used herein can be used to describe any feature, structure, or characteristic in the singular sense, or can be used to describe a combination of features, structures, or characteristics in the plural sense. Additionally, the term "based on" can be understood as not necessarily intended to convey an exclusive set of factors, but can instead, depending, at least in part, on the context, allow for the presence of other factors that are not necessarily explicitly described.

[0062] like Figure 1-Figure 2 As shown, the design optimization method of terahertz sensor array based on metasurface enhancement includes the following steps:

[0063] S1, initial parameter collection for terahertz sensor array design: by building a physical model, the structural parameters and material properties of the terahertz sensor array are obtained, including the array unit size, spacing, refractive index and transmittance of the material. Combined with the required application scenarios, the design goals are initially selected, including sensitivity, resolution and detection range;

[0064] S2, metasurface unit design and simulation: Based on the selected design goals, the metasurface unit structure is optimized, including the geometric shape, size, arrangement and material properties of the unit cell, and electromagnetic simulation analysis is performed. The simulation process uses the finite difference time domain method to calculate the propagation of terahertz waves in complex structures, and the overall performance parameters of the metasurface unit and the terahertz sensor array are obtained, including sensitivity and frequency response;

[0065] S3, optimization of coupling between metasurface and sensor array: By analyzing the electromagnetic field distribution of the coupling between metasurface units and sensor array, the interaction between metasurface and sensor array is optimized to ensure that terahertz waves can effectively enhance sensor response under different incident angles and polarization states. The performance of the overall array structure is evaluated using the transfer matrix method to further adjust the matching degree between metasurface units and sensor array.

[0066] S4, multi-physics field simulation optimization: Based on electromagnetic field simulation, thermal effect and stress field simulation are added to evaluate the performance degradation of the metasurface due to temperature and mechanical stress factors in the actual working environment, and the design structure is optimized based on the results to ensure the stability and reliability of the sensor array in complex environments;

[0067] S5, experimental verification and data feedback: Samples are manufactured based on the optimized design structure, and performance tests are carried out in the laboratory to test the sensitivity, resolution and response time indicators of the terahertz sensor array. The test results are fed back to S1 to S4 to further adjust the design parameters and complete the final optimization.

[0068] S1 specifically includes:

[0069] S11, establishment of physical model: According to the structural characteristics and material properties of the terahertz sensor array, a physical model is established to describe the propagation characteristics of terahertz waves in the sensor array, including the refraction, reflection, diffraction and scattering behavior of electromagnetic waves. The physical model equation is expressed as:

[0070]

[0071] Where n(λ) is the refractive index of the terahertz wave, ∈ r (λ) is the dielectric constant of the material, and λ is the wavelength. This model is designed to determine the optical response of the material in the terahertz band;

[0072] S12, determination of the geometric dimensions of the array unit: Based on the physical model, determine the geometric dimensions of the sensor array unit. The geometric dimensions include the width, height and spacing of the sensor array unit. The geometric dimensions affect the scattering and reflection characteristics of the terahertz wave and are directly related to the sensitivity and resolution of the array. The diffraction efficiency of the sensor array unit is calculated as:

[0073]

[0074] Where η is the diffraction efficiency, I d is the diffracted light intensity, I0 is the incident light intensity, and the unit size is optimized to maximize the diffraction efficiency;

[0075] S13, selection of material properties: Analyze and select the material properties for the terahertz frequency band, including the refractive index and transmittance of the material. Obtain the electromagnetic response of different materials in the terahertz frequency band through experiments or simulations. The transmittance is calculated as:

[0076]

[0077] Where T is the transmittance of the material, I tis the transmitted light intensity, and I0 is the incident light intensity. Select materials with high refractive index and moderate transmittance to achieve high sensitivity of the sensor;

[0078] S14, Determination of design goals: Combined with actual application scenarios, preliminarily determine the design goals of the terahertz sensor array. The design goals include sensitivity, resolution and detection range. The design goals are determined by the following performance indicator formula:

[0079] Sensitivity: Where S is the sensitivity, ΔI is the detected signal change, and ΔP is the power change of the terahertz wave;

[0080] Resolution: Depends on the cell size and wavelength of the sensor array;

[0081] Detection range: Determined by the design of materials and structures, ensuring that the sensor has sufficient signal strength within the target detection distance;

[0082] By establishing a physical model, determining geometric dimensions, selecting material properties, and clarifying design goals, the initial parameter collection of the terahertz sensor array is ensured to be sufficiently accurate, providing a solid foundation for subsequent design and simulation optimization.

[0083] S2 includes:

[0084] S21, metasurface cell geometry design: According to the determined design goals (sensitivity, resolution and detection range), determine the geometry of the metasurface cell. The cell geometry includes square, circular, elliptical or other composite structures. The choice of geometry affects the diffraction and scattering characteristics of terahertz waves. By optimizing the geometry, ensure that the cell has the best phase control capability for terahertz waves.

[0085] S22, Optimization of cell size: Design the size of the cell (width, height) to match the target wavelength. The design of the cell size affects the sensitivity and frequency response. The effect of the cell size on phase control is calculated as:

[0086]

[0087] Where φ represents the phase change, d is the cell size, and λ is the terahertz wavelength;

[0088] Optimizing cell size to maximize sensor sensitivity and frequency response;

[0089] S23, design of cell arrangement: based on the designed cell geometry and size, design the cell arrangement, considering periodic or non-periodic arrangement. The cell arrangement directly affects the frequency selectivity and spatial resolution of the array. By changing the spacing and arrangement pattern between cells, the sensor's response to different frequencies can be adjusted.

[0090] By designing the geometric shape, size and arrangement of the cells, the structure of the metasurface unit is optimized to ensure that it can effectively control the phase of the terahertz wave, thereby improving the sensitivity and frequency response of the terahertz sensor array.

[0091] S2 also includes:

[0092] S24, electromagnetic simulation model establishment: Based on the optimized metasurface unit structure, an electromagnetic simulation model is established to simulate the propagation path of terahertz waves on the metasurface unit, including diffraction, scattering and phase control effects. The simulation model considers terahertz waves with different incident angles and polarization states;

[0093] S25, finite-difference time-domain simulation: The finite-difference time-domain method is used to simulate the propagation of terahertz waves in complex structures;

[0094] The finite-difference time-domain simulation calculates the electromagnetic field changes of the terahertz wave through discretized grids to obtain the electromagnetic response of the metasurface unit. The simulation results include electric field distribution, phase change and frequency response.

[0095] S26: Performance parameter calculation: According to the simulation results of the finite-difference time-domain method, the overall performance parameters of the metasurface unit and the terahertz sensor array are calculated, including sensitivity and frequency response. The sensitivity is calculated as:

[0096]

[0097] Among them, S is the sensitivity, ΔE is the change in electric field, and ΔP is the change in input power. The frequency response is evaluated by analyzing the transmittance and reflectivity of terahertz waves at different frequencies;

[0098] Through electromagnetic simulation models and time-domain finite-difference simulation, the propagation process of terahertz waves in the metasurface unit was accurately simulated, and key performance parameters such as sensitivity and frequency response were obtained, providing data support for further optimization of the design.

[0099] S3 includes:

[0100] S31, electromagnetic field distribution analysis: The electromagnetic field distribution between the metasurface unit and the sensor array is analyzed through electromagnetic field simulation. During the simulation, the propagation path and interaction of terahertz waves at different incident angles and polarization states are considered. The electric field strength is calculated as:

[0101]

[0102] Where E is the electric field intensity, V is the potential difference, and d is the distance between the metasurface unit and the sensor array;

[0103] S32, Coupling effect optimization: Based on the results of electromagnetic field distribution analysis, the coupling effect between the metasurface unit and the sensor array is optimized. Under different incident angles and polarization states, the terahertz wave effectively enhances the response of the sensor. By adjusting the position and arrangement of the metasurface unit, the electromagnetic coupling effect is maximized, thereby improving the detection performance of the overall array.

[0104] S33, response analysis under polarization state: simulate and analyze the response of terahertz waves under different polarization states (such as linear polarization and circular polarization) to ensure that the metasurface and sensor array have good electromagnetic response performance under various polarization conditions. According to the response changes under different polarization conditions, further optimize the material and arrangement of the metasurface unit;

[0105] By analyzing the electromagnetic field distribution and optimizing the coupling effect, we ensure good interaction between the metasurface and the sensor array at different incident angles and polarization states, thereby improving the sensor's responsiveness under changing conditions.

[0106] S3 also includes:

[0107] S34, Transfer Matrix Method Performance Evaluation: The performance of the overall structure of the metasurface and sensor array is evaluated using the transfer matrix method;

[0108] The transmission matrix method is used to describe the propagation and reflection of electromagnetic waves in each layer structure and calculate the transmission efficiency and phase change. The expression of the transmission matrix is:

[0109] T=T1×T2×…×T n ;

[0110] Where T is the transmission matrix, T1, T2, …, T n are the transmission matrices between each layer of metasurface units and the array;

[0111] Through transmission matrix analysis, the influence of each layer structure on the transmission and reflection of terahertz waves is evaluated;

[0112] S35, matching optimization: According to the evaluation results of the transmission matrix method, the matching degree between the metasurface unit and the sensor array is further adjusted. The matching degree optimization aims to ensure that the sensor can effectively respond in a wide frequency band, especially to maintain high transmission efficiency and low loss in the multi-frequency band range of terahertz waves;

[0113] S36, frequency response adjustment: By changing the geometric size and material properties of the metasurface unit, the frequency response of the sensor array is adjusted to match the sensitivity and frequency response range in the design target, ensuring that the sensor can maintain efficient operation within the target frequency band;

[0114] Through performance evaluation and matching optimization using the transfer matrix method, efficient response of the metasurface and the sensor array in different frequency bands is ensured, further improving the detection performance and working stability of the sensor.

[0115] S4 includes:

[0116] S41, thermal effect simulation: Based on the electromagnetic field simulation, thermal effect simulation is added to evaluate the performance changes of the metasurface and sensor array at different working temperatures;

[0117] Thermal effects cause the expansion or contraction of materials, which in turn affects the transmission and response of terahertz waves. By establishing a heat conduction equation, the temperature distribution of the sensor array is calculated, and the thermal expansion coefficient of the material is calculated using the linear thermal expansion formula. The temperature change of the sensor array when absorbing or releasing heat is expressed as:

[0118] Q = mcΔT;

[0119] Where Q is the heat absorbed by the sensor array, m is the mass of the array, c is the specific heat capacity of the material, and ΔT is the temperature change;

[0120] By simulating and analyzing the temperature distribution of the sensor array, we can predict the impact of temperature changes on the electromagnetic properties of the sensor array (such as sensitivity, frequency response, etc.).

[0121] S42, thermal expansion effect evaluation: Based on thermal effect simulation, further evaluate the effect of the expansion of the metasurface unit under high temperature conditions (over 100 degrees is considered a high temperature condition) on the phase control and frequency response of the terahertz wave. In view of the performance degradation caused by the expansion, optimize the material selection and geometric dimensions of the metasurface unit to ensure stable performance under high temperature working environment;

[0122] Through thermal effect simulation and thermal expansion effect evaluation, the stability and performance reliability of the metasurface and sensor array under high temperature conditions are ensured, and the design structure is optimized to reduce performance degradation caused by temperature changes.

[0123] S4 also includes:

[0124] S43, stress field simulation: Add stress field simulation to evaluate the structural stability of the sensor array under different mechanical stress conditions. Mechanical stress may come from external pressure or vibration, causing deformation or performance degradation of the sensor array. The strain of the sensor array under stress is calculated as:

[0125]

[0126] Where ∈ is the strain, σ is the applied stress, and E is the Young's modulus of the material;

[0127] Through stress field simulation, the deformation of the metasurface and array under different stress conditions is predicted, and its impact on terahertz wave transmission is evaluated;

[0128] S44, Mechanical stability optimization: Based on the stress field simulation results, optimize the structure of the metasurface unit and sensor array, adjust the material and geometric design, enhance the mechanical stability in high stress environment (stress greater than 100MPa is a high stress environment), and ensure that the array can still maintain excellent detection performance under long-term vibration and pressure;

[0129] Through stress field simulation and mechanical stability optimization, the stability and durability of the metasurface and sensor array under mechanical stress are ensured, and the material and structural design are optimized to reduce performance degradation caused by stress.

[0130] S5 includes:

[0131] S51, Sample fabrication: Fabricate samples based on the optimized metasurface and terahertz sensor array design. The fabrication process includes micro-nano processing technology, material deposition, etching, and construction of metasurface units to ensure that the structure and material properties of the samples are consistent with the design simulation results.

[0132] S52, Performance Test: Perform laboratory performance test on the manufactured samples. The test indicators include sensitivity, resolution and response time. The details are as follows:

[0133] Sensitivity: Evaluate the sensor array's ability to respond to weak terahertz wave signals. The sensitivity is calculated by measuring the output changes under different signal strengths.

[0134] Resolution: The resolution is calculated by testing the detection accuracy of the sensor array for different space targets. The test process uses a multi-point excitation source or a hierarchical test method.

[0135] Response time: By testing the dynamic response of the sensor, the time required for the sensor to receive a signal and generate a valid output signal is calculated;

[0136] S53, Test data collection: During the performance test, all key performance indicator data are collected to ensure that the data on sensitivity, resolution and response time are detailed enough to facilitate subsequent feedback and optimization.

[0137] The S5 also includes:

[0138] S54, Data Analysis and Modeling: Based on the performance index data obtained from the laboratory performance test, data analysis is performed, and a performance model based on the experimental results is constructed to analyze the relationship between the performance index (such as sensitivity, resolution, response time) and the structural parameters and material properties. The model expression is as follows:

[0139] P opt=f(S,R,T);

[0140] Among them, P opt is the optimized performance model, S is sensitivity, R is resolution, T is response time, and function f describes the relationship between these performance parameters and design variables;

[0141] S55, feedback and design parameter adjustment: Feedback the performance index data obtained from the laboratory performance test to the above steps of the design (S1 to S4), and further adjust the design parameters according to the analysis results of the performance model. The adjustment content includes:

[0142] Material selection: Based on the test results, adjust the refractive index and transmittance of the material to further optimize the sensitivity;

[0143] Geometry: Fine-tune the geometry and arrangement of the metasurface units based on the resolution test results;

[0144] Matching optimization: Adjust the matching degree of the system by optimizing the coupling effect between the sensor array and the metasurface unit;

[0145] S56, design optimization iteration: Based on the feedback of performance indicator data and analysis results of performance model, design iteration is carried out, the optimized design scheme is updated, and a new round of sample manufacturing and testing is prepared until the performance indicators meet the expected requirements;

[0146] Through feedback and modeling analysis of experimental data, key parameters in the sensor array design were adjusted, the final design optimization was completed, and a basis was provided for further improving system performance.

[0147] The present invention covers any substitution, modification, equivalent method and scheme made on the essence and scope of the present invention. In order to make the public have a thorough understanding of the present invention, specific details are described in detail in the following preferred embodiments of the present invention, but those skilled in the art can fully understand the present invention without the description of these details. In addition, in order to avoid unnecessary confusion about the essence of the present invention, well-known methods, processes, procedures, components and circuits are not described in detail.

[0148] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principle of the present invention. These improvements and modifications should also be regarded as the scope of protection of the present invention.

Claims

1. A terahertz sensor array design optimization method based on metasurface enhancement, characterized in that: The following steps are involved: S1, initial parameter collection for terahertz sensor array design: by building a physical model, the structural parameters and material properties of the terahertz sensor array are obtained, including the array unit size, spacing, refractive index and transmittance of the material. Combined with the required application scenarios, the design goals are initially selected, including sensitivity, resolution and detection range; S2, metasurface unit design and simulation: Based on the selected design goals, the metasurface unit structure is optimized, including the geometric shape, size, arrangement and material properties of the unit cell, and electromagnetic simulation analysis is performed. The simulation process uses the finite difference time domain method to calculate the propagation of terahertz waves in complex structures, and the overall performance parameters of the metasurface unit and the terahertz sensor array are obtained, including sensitivity and frequency response; S3, optimization of coupling between metasurface and sensor array: By analyzing the electromagnetic field distribution of the coupling between metasurface units and sensor array, the interaction between metasurface and sensor array is optimized to ensure that terahertz waves can enhance sensor response at different incident angles and polarization states. The performance of the overall array structure is evaluated using the transfer matrix method to adjust the matching degree between metasurface units and sensor array. S4, multi-physics field simulation optimization: Based on electromagnetic field simulation, thermal effect and stress field simulation are added to evaluate the performance degradation of the metasurface due to temperature and mechanical stress factors in the actual working environment, and the design structure is optimized based on the results; S5, experimental verification and data feedback: Samples are manufactured based on the optimized design structure, and performance tests are carried out in the laboratory to test the sensitivity, resolution and response time indicators of the terahertz sensor array. The test results are fed back to S1 to S4 to further adjust the design parameters and complete the final optimization.

2. The method for designing and optimizing a terahertz sensor array based on supersurface enhancement according to claim 1, characterized in that: The S1 specifically includes: S11, establishment of physical model: According to the structural characteristics and material properties of the terahertz sensor array, a physical model is established to describe the propagation characteristics of terahertz waves in the sensor array, including the refraction, reflection, diffraction and scattering behavior of electromagnetic waves; S12, determining the geometric dimensions of the array unit: determining the geometric dimensions of the sensor array unit based on the physical model, the geometric dimensions including the width, height and spacing of the sensor array unit; S13, Selection of material properties: Analyze and select the material properties for the terahertz frequency band, including the refractive index and transmittance of the material; S14, Determination of design goals: Based on the actual application scenarios, preliminarily determine the design goals of the terahertz sensor array.

3. The method for designing and optimizing a terahertz sensor array based on supersurface enhancement according to claim 2, characterized in that: The S2 includes: S21, design of the geometric shape of the hypersurface cell: determine the geometric shape of the hypersurface cell according to the determined design goal; S22, optimization of cell size: design the size of the cell to match the target wavelength; S23, Design of cell arrangement: Based on the designed cell geometry and size, design the cell arrangement, considering periodic or non-periodic arrangement.

4. The method for designing and optimizing a terahertz sensor array based on supersurface enhancement according to claim 3, characterized in that: The S2 further includes: S24, electromagnetic simulation model establishment: Based on the optimized metasurface unit structure, an electromagnetic simulation model is established to simulate the propagation path of terahertz waves on the metasurface unit, including diffraction, scattering and phase control effects; S25, finite-difference time-domain simulation: The finite-difference time-domain method is used to simulate the propagation of terahertz waves in complex structures; The finite-difference time-domain simulation calculates the electromagnetic field changes of the terahertz wave through discretized grids to obtain the electromagnetic response of the metasurface unit. The simulation results include electric field distribution, phase change and frequency response. S26: Performance parameter calculation: Based on the simulation results of the finite-difference time-domain method, calculate the performance parameters of the metasurface unit and the terahertz sensor array as a whole, including sensitivity and frequency response.

5. The method for designing and optimizing a terahertz sensor array based on supersurface enhancement according to claim 4, characterized in that: The S3 includes: S31, electromagnetic field distribution analysis: The electromagnetic field distribution between the metasurface unit and the sensor array is analyzed through electromagnetic field simulation. During the simulation process, the propagation path and interaction of terahertz waves under different incident angles and polarization states are considered; S32, Coupling effect optimization: Based on the results of electromagnetic field distribution analysis, the coupling effect between the metasurface unit and the sensor array is optimized. Under different incident angles and polarization states, the terahertz wave effectively enhances the response of the sensor. By adjusting the position and arrangement of the metasurface unit, the electromagnetic coupling effect is maximized. S33, Response analysis under polarization states: Simulate and analyze the response of terahertz waves under different polarization states, and optimize the materials and arrangement of metasurface units according to the response changes under different polarization conditions.

6. The method for designing and optimizing a terahertz sensor array based on supersurface enhancement according to claim 5, characterized in that: The S3 further includes: S34, Transfer Matrix Method Performance Evaluation: The performance of the overall structure of the metasurface and sensor array is evaluated using the transfer matrix method; The transmission matrix method is used to describe the propagation and reflection of electromagnetic waves in each layer structure and calculate the transmission efficiency and phase change; S35, matching degree optimization: adjusting the matching degree between the metasurface unit and the sensor array according to the evaluation result of the transfer matrix method; S36, Frequency Response Tuning: Tune the frequency response of the sensor array to match the sensitivity and frequency response range in the design target by changing the geometric dimensions and material properties of the metasurface units.

7. The method for designing and optimizing a terahertz sensor array based on supersurface enhancement according to claim 6, characterized in that: The S4 includes: S41, thermal effect simulation: Based on the electromagnetic field simulation, thermal effect simulation is added to evaluate the performance changes of the metasurface and sensor array at different working temperatures; Thermal effects cause the expansion or contraction of materials, affecting the transmission and response of terahertz waves. By establishing a heat conduction equation, the temperature distribution of the sensor array is calculated, and the thermal expansion coefficient of the material is calculated using the linear thermal expansion formula. The temperature change of the sensor array when absorbing or releasing heat is expressed as: Q = mcΔT; Where Q is the heat absorbed by the sensor array, m is the mass of the array, c is the specific heat capacity of the material, and ΔT is the temperature change; By simulating and analyzing the temperature distribution of the sensor array, the impact of temperature changes on the electromagnetic performance of the sensor array can be predicted; S42, thermal expansion effect evaluation: Based on thermal effect simulation, evaluate the impact of the expansion of the metasurface unit under high temperature conditions on the phase regulation and frequency response of the terahertz wave, and optimize the material selection and geometric dimensions of the metasurface unit to address the performance degradation caused by the expansion.

8. The method for designing and optimizing a terahertz sensor array based on supersurface enhancement according to claim 7, characterized in that: The S4 further comprises: S43, stress field simulation: stress field simulation is added to evaluate the structural stability of the sensor array under different mechanical stress conditions; S44, Mechanical stability optimization: Based on the stress field simulation results, optimize the structure of the metasurface unit and sensor array, adjust the material and geometric design, and enhance the mechanical stability in high stress environments.

9. The method for designing and optimizing a terahertz sensor array based on supersurface enhancement according to claim 8, characterized in that: The S5 includes: S51, sample fabrication: fabricate samples based on the optimized metasurface and terahertz sensor array design; S52, performance test: laboratory performance index test of manufactured samples, test indexes include sensitivity, resolution and response time; S53, test data collection: during the performance test, collect performance indicator data.

10. The method for designing and optimizing a terahertz sensor array based on supersurface enhancement according to claim 9, characterized in that: The S5 further includes: S54, Data Analysis and Modeling: Based on the performance index data obtained from laboratory performance tests, data analysis is performed, a performance model based on the experimental results is constructed, and the relationship between the performance index and the structural parameters and material properties is analyzed; S55, feedback and design parameter adjustment: feedback the performance index data obtained from the laboratory performance test to the above-mentioned design steps, and adjust the design parameters according to the analysis results of the performance model; S56, design optimization iteration: Based on the feedback of performance indicator data and analysis results of the performance model, design iteration is carried out, the optimized design scheme is updated, and a new round of sample manufacturing and testing is prepared until the performance indicators meet the expected requirements.

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