Thermoelectric module

Abstract

A thermoelectric module for controlling the temperature of an object to be controlled, the thermoelectric module being provided with: a plurality of thermoelectric elements provided between a substrate disposed facing the object to be controlled in a first direction and the object to be controlled; and a plurality of electrodes which are respectively provided on the substrate side and the object side of the thermoelectric elements, and which electrically connect the thermoelectric elements adjacent to each other in a second direction intersecting the first direction, the electrodes having: two electrode bases which are separated from each other in the second direction, and which are respectively connected to the corresponding thermoelectric elements; and a connection part connecting the two electrode base parts, the connection part being provided with: a hole part penetrating in the first direction; constricted portions provided on both sides in the second direction with the hole portion therebetween, the constricted portions entering the inside in a third direction intersecting the first direction and the second direction; and a displacement absorbing portion formed along the outer shape of the connecting portion and the outer shape of the hole portion.

Description

Technical Field

[0001] The present invention relates to thermoelectric modules.

[0002] This application claims priority to Japanese Patent Application No. 2022-143642 filed in Japan on September 9, 2022, and the contents are incorporated herein by reference. Background Art

[0003] In a thermoelectric module (Peltier module), the end faces of multiple thermoelectric elements arranged on a substrate are connected to electrodes, and the adjacent thermoelectric elements are electrically connected to each other through the electrodes. When current is passed through the thermoelectric module, the electrode is cooled due to heat absorption on one side of the thermoelectric module, and heated due to heat dissipation on the other side. The temperature of the temperature control object mounted in the thermoelectric module can be controlled by the heat absorption and heat dissipation phenomena.

[0004] However, when the thermoelectric module is used for temperature adjustment, a temperature difference is generated between the electrode on one side of the thermoelectric module and the electrode on the other side. As a result, for example, the electrode on one side is thermally expanded or contracted with respect to the electrode on the other side. On the other hand, since the electrode on the other side is fixed on the substrate, a load caused by thermal stress is generated at the connection between the electrode on one side and the thermoelectric element. By repeatedly adjusting the temperature, thermal stress is repeatedly applied to the connection, so the connection may eventually break.

[0005] As a countermeasure, for example, a meandering portion is provided in the electrode in Patent Document 1. The meandering portion absorbs expansion and contraction of the electrode during temperature control, thereby alleviating thermal stress acting on the connection portion between the electrode and the thermoelectric element.

[0006] Prior Art Literature

[0007] Patent Literature

[0008] Patent Document 1: Japanese Patent Application Laid-Open No. 11-68175 Summary of the invention

[0009] -Problems to be solved by the invention-

[0010] However, in Patent Document 1, the width of the electrode increases due to the meandering portion, and the thermoelectric elements cannot be densely arranged, which may reduce the output of the thermoelectric module.

[0011] The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to provide a thermoelectric module that can alleviate the thermal stress acting on electrodes and avoid a decrease in output.

[0012] -Methods for solving problems-

[0013] In order to solve the above-mentioned problems, the thermoelectric module involved in the present invention controls the temperature of a temperature control object, and the thermoelectric module comprises: a plurality of thermoelectric elements, which are arranged between a substrate and the temperature control object, and the substrate is arranged opposite to the temperature control object in a first direction; and a plurality of electrodes, which are respectively arranged on the substrate side and the temperature control object side of the thermoelectric elements, and electrically connect the thermoelectric elements adjacent to each other in a second direction intersecting the first direction, and the electrode comprises: two electrode bases, which are separated in the second direction and are respectively connected to the corresponding thermoelectric elements; and a connecting portion, which connects the two electrode bases, and the following parts are arranged in the connecting portion: a hole portion, which passes through in the first direction; a neck portion, which is arranged on both sides of the second direction with the hole portion clamped, and enters the inner side of a third direction intersecting the first direction and the second direction; and a displacement absorbing portion, which is formed along the outer shape of the connecting portion and the outer shape of the hole portion.

[0014] -Effects of the Invention-

[0015] According to the present invention, it is possible to alleviate the thermal stress acting on the electrodes and avoid a decrease in the output of the thermoelectric module. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a diagram showing the thermoelectric unit according to the first embodiment of the present invention as viewed from the side.

[0017] Figure 2 It is a plan view showing the arrangement of the second electrode according to the first embodiment of the present invention.

[0018] Figure 3 It is a plan view of the second electrode according to the first embodiment of the present invention.

[0019] Figure 4 It is a plan view of a second electrode according to a modification example of the first embodiment of the present invention.

[0020] Figure 5 It is a plan view of a second electrode according to a second embodiment of the present invention.

[0021] Figure 6 It is a plan view of a second electrode according to a third embodiment of the present invention.

[0022] Figure 7 It is a plan view of a second electrode according to a fourth embodiment of the present invention. DETAILED DESCRIPTION

[0023] <First embodiment>

[0024] (Structure of thermoelectric unit)

[0025] Below, refer to Figures 1 to 3 The thermoelectric unit 1 including the thermoelectric module 10 according to the first embodiment of the present invention will be described. Figure 1 As shown, the thermoelectric unit 1 includes a temperature control target 2 , a substrate 3 , a thermoelectric module 10 , a heat transfer member 4 , and lead wires 5 .

[0026] (Temperature control object)

[0027] The temperature control object 2 widely includes an object whose temperature changes. Examples of the temperature control object 2 include a wafer stage of a semiconductor manufacturing device.

[0028] (Substrate)

[0029] The substrate 3 is arranged to face the temperature control target object 2 .

[0030] Hereinafter, the facing direction of the temperature control target object 2 and the substrate 3 is referred to as a “first direction D1 ”.

[0031] The substrate 3 extends in a plane direction substantially perpendicular to the first direction D1. The substrate 3 is a heat sink that dissipates heat from the thermoelectric module 10. In the substrate 3, a plurality of pipes 3a are provided on the entire substrate 3. Cooling water flows through the pipes 3a. The cooling water absorbs heat from the thermoelectric module 10.

[0032] (Thermoelectric module)

[0033] The thermoelectric module 10 controls the temperature of the temperature control object 2. The detailed structure of the thermoelectric module 10 will be described later.

[0034] (Heat transfer components)

[0035] The heat transfer member 4 is provided between the thermoelectric module 10 and the temperature control target 2. The heat transfer member 4 thermally connects the thermoelectric module 10 and the temperature control target 2. Examples of the heat transfer member 4 include grease and the like.

[0036] (lead)

[0037] The lead wires 5 electrically connect the thermoelectric module 10 to an external power source (not shown) to energize the thermoelectric module 10. At least one pair of lead wires 5 is provided in the thermoelectric module 10.

[0038] (Structure of thermoelectric module)

[0039] Next, the structure of the thermoelectric module 10 will be described.

[0040] The thermoelectric module 10 includes thermoelectric elements 11 and electrodes 20 .

[0041] (Thermoelectric element)

[0042] The plurality of thermoelectric elements 11 are provided between the substrate 3 and the temperature control target 2 .

[0043] (Connection)

[0044] The connection parts 12 are provided at both end surfaces in the first direction D1 of the thermoelectric element 11. The connection parts 12 connect the thermoelectric element 11 and the electrode 20 electrically and thermally.

[0045] (electrode)

[0046] The electrodes 20 are provided on the substrate 3 side and the temperature control target object 2 side of the thermoelectric element 11. The electrodes 20 electrically connect two adjacent thermoelectric elements 11 to each other.

[0047] Hereinafter, among the plurality of electrodes 20 , the electrode 20 located on the substrate 3 side in the first direction D1 is referred to as a “first electrode 20 a ”, and the electrode 20 located on the temperature control object 2 side in the first direction D1 is referred to as a “second electrode 20 b ”.

[0048] (First electrode)

[0049] A plurality of first electrodes 20a are provided on the substrate 3. The plurality of first electrodes 20a are thermally connected to the substrate 3. Each first electrode 20a electrically connects adjacent thermoelectric elements 11 to each other.

[0050] (Second electrode)

[0051] The plurality of second electrodes 20b are disposed on the opposite side of the first electrode 20a in the first direction D1, sandwiching the thermoelectric element 11. The plurality of second electrodes 20b are thermally connected to the temperature control object 2 via the heat transfer member 4. Each second electrode 20b electrically connects adjacent thermoelectric elements 11 connected to different first electrodes 20a.

[0052] The thermoelectric elements 11 are electrically connected via a plurality of first electrodes 20a and second electrodes 20b. The lead wires 5 are electrically connected to the first electrodes 20a located at both ends of a unit of the electrically connected thermoelectric elements 11, the first electrodes 20a, and the second electrodes 20b.

[0053] In addition, if Figure 2 As shown, the plurality of second electrodes 20 b are densely arranged along the surface of the substrate 3 .

[0054] Hereinafter, for a second electrode 20b among the multiple second electrodes 20b, the opposing direction of two thermoelectric elements 11 connected by the second electrode 20b in the surface direction approximately perpendicular to the “first direction D1” is referred to as the “second direction D2”, and the direction approximately perpendicular to the “first direction D1” and the “second direction D2” in the surface direction approximately perpendicular to the “first direction D1” is referred to as the “third direction D3”.

[0055] like Figure 3 As shown, the second electrode 20b is formed into a symmetrical shape in the second direction D2 and the third direction D3 when viewed from the first direction D1. Furthermore, the outer edge of the second electrode 20b is formed into a smooth curved shape. The second electrode 20b has an electrode base 21 and a connecting portion 22.

[0056] (Electrode base)

[0057] A pair of electrode bases 21 are provided to be separated from each other in the second direction D2. The electrode bases 21 are connected to the corresponding thermoelectric elements 11. The outer edges of the electrode bases 21 are formed in an arc shape when viewed from the first direction D1.

[0058] (Connection)

[0059] The connecting portion 22 connects the two electrode bases 21. The connecting portion 22 is formed integrally with the electrode base 21. The outer edge of the connecting portion 22 is formed to be smoothly curved when viewed from the first direction D1, and is smoothly connected to the outer edge of the electrode base 21. The connecting portion 22 is provided with a hole portion 23, a constricted portion 24, a protrusion 25, and a displacement absorbing portion 26.

[0060] (Hole)

[0061] The hole portion 23 penetrates the center portion of the connection portion 22 in the first direction D1. The hole portion 23 is formed by punching, for example.

[0062] (Neck shrinkage)

[0063] The constricted portion 24 is provided on both sides of the second direction D2 sandwiching the hole portion 23. The constricted portion 24 is formed to enter the inner side in the third direction D3. The outer edge of the constricted portion 24 is formed in a curved shape to enter the inner side in the third direction D3 when viewed from the first direction D1, and is smoothly connected to the outer edge of the electrode base 21.

[0064] The constricted portion 24 is formed by, for example, cutting.

[0065] (Protrusion)

[0066] The protrusion 25 is provided outside the hole 23 in the third direction D3. The protrusion 25 protrudes in the third direction D3. The outer edge of the protrusion 25 is formed in a curved shape so as to extend outward in the third direction D3 as viewed from the first direction D1, and is smoothly connected to the outer edge of the constricted portion 24.

[0067] The hole portion 23 of the present embodiment expands in the third direction D3 in accordance with the protrusion 25 .

[0068] (Displacement absorbing part)

[0069] The displacement absorbing portion 26 is formed along the outer shape of the connecting portion 22 and the outer shape of the hole portion 23. More specifically, the displacement absorbing portion 26 is formed along the outer shapes of the hole portion 23, the constricted portion 24, and the protruding portion 25. The displacement absorbing portion 26 extends along the second direction D2.

[0070] (Size of the second electrode)

[0071] Next, the dimensions of the second electrode 20 b will be described.

[0072] Hereinafter, the width of the constricted portion 24 of the second electrode 20b in the third direction D3 is referred to as “first width W1”. Furthermore, the width of the protruding portion 25 of the second electrode 20b in the third direction D3 is referred to as “second width W2”, and the width of the hole 23 in the third direction D3 is referred to as “third width W3”.

[0073] At this time, the second electrode 20 b is formed so that the relationship shown in the following formula holds.

[0074] W1<W3<W2

[0075] (Operation of the thermoelectric module)

[0076] Next, the operation of the thermoelectric module 10 will be described.

[0077] Hereinafter, a case where the temperature of the temperature regulation target object 2 generating heat is maintained constant will be described as an example.

[0078] First, the unit of the plurality of thermoelectric elements 11, the first electrode 20a, and the second electrode 20b connected to an external power source (not shown) is energized through the lead wire 5. Then, the second electrode 20b absorbs heat from the temperature control object 2. In addition, the first electrode 20a dissipates the heat of the temperature control object 2 toward the substrate 3. The heat dissipated from the first electrode 20a is transferred to the cooling water flowing through the pipe 3a in the substrate 3, and is dissipated to the outside.

[0079] At this time, a temperature difference is generated at the two end faces of the thermoelectric element 11 in the first direction D1. The first electrode 20a is fixed on the substrate 3, while the second electrode 20b is not fixed on the temperature control object 2. Therefore, the second electrode 20b is more susceptible to the thermal stress caused by the temperature difference of the thermoelectric element 11 than the first electrode 20a. It is assumed that the second electrode 20b is to be thermally expanded / contracted in the second direction D2 due to the thermal stress. Due to the thermal expansion / contraction of the second electrode 20b, the joint between the second electrode 20b and the thermoelectric element 11 (the connecting portion 12 on the side of the temperature control object 2 in the example shown in the figure) may be damaged, so it is necessary to alleviate the thermal stress acting on the second electrode 20b.

[0080] The second electrode 20b of the present embodiment is provided with a displacement absorbing portion 26. When thermal stress acts on the second electrode 20b, the displacement absorbing portion 26 expands and contracts in the second direction D2, thereby relieving the thermal stress.

[0081] <Effect>

[0082] The thermoelectric module 10 of the first embodiment described above can achieve the following effects.

[0083] In the present embodiment, the thermoelectric module 10 includes a plurality of thermoelectric elements 11 and a plurality of electrodes 20. The plurality of thermoelectric elements 11 are arranged between a substrate 3 and a temperature control object 2, wherein the substrate 3 is arranged opposite to the temperature control object 2 in a first direction D1. The plurality of electrodes 20 are respectively arranged on the substrate 3 side and the temperature control object 2 side of the thermoelectric element 11, and electrically connect the thermoelectric elements 11 adjacent to each other in a second direction D2 intersecting the first direction D1. Further, the electrode 20 has two electrode bases 21 and a connecting portion 22. The two electrode bases 21 are separated in the second direction D2 and are respectively connected to the corresponding thermoelectric elements 11. The connecting portion 22 connects the two electrode bases 21. Further, a hole portion 23, a neck portion 24 and a displacement absorbing portion 26 are provided in the connecting portion 22. The hole portion 23 penetrates in the first direction D1. The constricted portions 24 are provided on both sides of the hole 23 in the second direction D2 and extend inward in the third direction D3 intersecting the first direction D1 and the second direction D2. The displacement absorbing portion 26 is formed along the outer shapes of the connecting portion 22 and the hole 23.

[0084] According to the above structure, the displacement absorbing portion 26 is formed into a wave shape that is displaced in the third direction D3 and extends in the second direction D2. Therefore, when the thermal stress in the second direction D2 acts on the second electrode 20b, the displacement absorbing portion 26 expands and contracts in the second direction D2, which can alleviate the thermal stress. Furthermore, the displacement absorbing portion 26 is arranged on both sides of the third direction D3 with the hole portion 23 sandwiched therebetween. As a result, the thermal stress acts equally on the two displacement absorbing portions 26, which can prevent the generation of a torsional force at the junction of the second electrode 20b and the thermoelectric element 11.

[0085] In addition, since the wave shape of the displacement absorbing portion 26 is formed according to the hole portion 23 and the constricted portion 24, it is possible to prevent the displacement absorbing portion 26 from being greatly extended outward in the third direction D3. Thus, the second electrodes 20b can be densely arranged along the substrate 3. Therefore, since the thermoelectric elements 11 can be densely arranged on the substrate 3, the output of the thermoelectric module 10 can be fully ensured.

[0086] As described above, according to the present embodiment, it is possible to alleviate the thermal stress acting on the second electrode 20 b and avoid a decrease in the output of the thermoelectric module 10 .

[0087] In this embodiment, the second electrode 20b has a protrusion 25. The protrusion 25 is provided outside the hole 23 in the third direction D3 and protrudes in the third direction D3. The hole 23 expands in the third direction D3 in accordance with the protrusion 25.

[0088] Thus, the displacement absorbing portion 26 becomes longer, and a greater amount of expansion and contraction in the second direction D2 of the displacement absorbing portion 26 can be ensured. Therefore, the thermoelectric module 10 can relieve thermal stress more effectively through expansion and contraction of the displacement absorbing portion 26 .

[0089] In the first embodiment described above, the second electrode 20b has the protrusion 25. Figure 4 As shown, the second electrode 20 b does not necessarily need to have the protrusion 25 .

[0090] In addition, the outer edge of the second electrode 20b does not necessarily need to be curved. Figure 4 As shown, the outer edge of the second electrode 20b may also be formed in a straight line shape.

[0091] <Second embodiment>

[0092] Next, refer to Figure 5 A thermoelectric unit 201 including a thermoelectric module 210 according to a second embodiment of the present invention will be described. In the second embodiment, the same components as those in the above-described embodiment are denoted by the same reference numerals, and detailed descriptions thereof will be omitted.

[0093] The thermoelectric unit 201 of the present embodiment includes a temperature control target 2 , a substrate 3 , a thermoelectric module 210 , a heat transfer member 4 , and lead wires 5 .

[0094] The thermoelectric module 210 includes a plurality of thermoelectric elements 11 and a plurality of electrodes 220. The plurality of electrodes 220 include a plurality of first electrodes 20a and a plurality of second electrodes 220b.

[0095] like Figure 5 As shown, the second electrode 220b is formed asymmetrically in the second direction D2.

[0096] The second electrode 220 b includes an electrode base portion 21 and a connecting portion 222 .

[0097] The connecting portion 222 includes a hole portion 223 , a constricted portion 224 , a protruding portion 25 , and a displacement absorbing portion 226 .

[0098] The hole portion 223 is provided close to the thermoelectric element 11 on the second direction D2 side among the two electrically connected thermoelectric elements 11 .

[0099] Of the constricted portions 224 on both sides of the second direction D2 sandwiching the hole 223 , the constricted portion 224 on the other side in the second direction D2 is further inward in the third direction D3 than the constricted portion 224 on one side in the second direction D2 .

[0100] Therefore, among the first widths W1 of the constricted portion 224 , the first width W1 b of the constricted portion 224 on the other side in the second direction D2 is smaller than the first width W1 a of the constricted portion 224 on one side in the second direction D2 .

[0101] <Effect>

[0102] The thermoelectric module 210 of the second embodiment described above can achieve the following effects.

[0103] In this embodiment, the hole 223 is provided close to the thermoelectric element 11 on the second direction D2 side of the two electrically connected thermoelectric elements 11. The constricted portion 224 on the other side of the second direction D2 is further inward in the third direction D3 than the constricted portion 224 on the second direction D2 side.

[0104] Thus, the displacement absorbing portion 226 becomes longer, and a greater amount of expansion and contraction in the second direction D2 of the displacement absorbing portion 226 can be ensured. Therefore, the thermoelectric module 210 can relieve thermal stress more effectively through the expansion and contraction of the displacement absorbing portion 226 .

[0105] Furthermore, since the width of the connection portion 222 in the second direction D2 corresponding to the constricted portion 224 on the inner side can be ensured, the process of forming the constricted portion 224 becomes easy.

[0106] <Third embodiment>

[0107] Next, refer to Figure 6 A thermoelectric unit 301 including a thermoelectric module 310 according to a third embodiment of the present invention will be described. In the third embodiment, the same components as those in the above-described embodiments are denoted by the same reference numerals, and detailed descriptions thereof will be omitted.

[0108] The thermoelectric unit 301 of the present embodiment includes a temperature control target 2 , a substrate 3 , a thermoelectric module 310 , a heat transfer member 4 , and lead wires 5 .

[0109] The thermoelectric module 310 includes a plurality of thermoelectric elements 11 and a plurality of electrodes 320. The plurality of electrodes 320 include a plurality of first electrodes 20a and a plurality of second electrodes 320b.

[0110] like Figure 6 As shown, the second electrode 320b is formed asymmetrically in the second direction D2.

[0111] The second electrode 320 b includes an electrode base portion 21 and a connecting portion 322 .

[0112] The connecting portion 322 includes a hole portion 323 , a constricted portion 224 , a protruding portion 25 , and a displacement absorbing portion 326 .

[0113] The hole portion 323 is enlarged to protrude toward the thermoelectric element 11 on the other side of the second direction D2 of the two electrically connected thermoelectric elements 11. In more detail, the hole portion 323 has: a main body hole 323a, which is arranged close to the thermoelectric element 11 on the second direction D2 of the two electrically connected thermoelectric elements 11; and a protruding hole 323b, which is continuously arranged on the other side of the second direction D2 of the main body hole 323a, and the main body hole 323a extends along the third direction D3.

[0114] <Effect>

[0115] The thermoelectric module 310 of the third embodiment described above can produce the following effects.

[0116] In the present embodiment, the hole 323 is enlarged so as to protrude toward the thermoelectric element 11 on the other side in the second direction D2 among the two electrically connected thermoelectric elements 11 .

[0117] Thus, the displacement absorbing portion 326 becomes longer, and a greater amount of expansion and contraction in the second direction D2 of the displacement absorbing portion 326 can be ensured. Therefore, the thermoelectric module 310 can relieve thermal stress more effectively through the expansion and contraction of the displacement absorbing portion 326 .

[0118] <Fourth embodiment>

[0119] Next, refer to Figure 7 A thermoelectric unit 401 including a thermoelectric module 410 according to a fourth embodiment of the present invention will be described. In the fourth embodiment, the same components as those in the above-described embodiments are denoted by the same reference numerals, and detailed descriptions thereof will be omitted.

[0120] The thermoelectric unit 401 of the present embodiment includes a temperature control target 2 , a substrate 3 , a thermoelectric module 410 , a heat transfer member 4 , and lead wires 5 .

[0121] The thermoelectric module 410 includes a plurality of thermoelectric elements 11 and a plurality of electrodes 420. The plurality of electrodes 420 include a plurality of first electrodes 20a and a plurality of second electrodes 420b.

[0122] like Figure 7 As shown, the second electrode 420 b is formed in a shape symmetrical in the second direction D2 and the third direction D3 when viewed from the first direction D1 .

[0123] The second electrode 420 b includes an electrode base portion 21 and a connecting portion 422 .

[0124] The connecting portion 422 includes a hole portion 423 , a constricted portion 24 , a protruding portion 25 , and a displacement absorbing portion 426 .

[0125] The hole portion 423 is formed along the outer shape of the connecting portion 422 .

[0126] <Effect>

[0127] The thermoelectric module 410 according to the fourth embodiment described above can produce the following effects.

[0128] In the present embodiment, the hole portion 423 is formed along the outer shape of the connection portion 422 .

[0129] Thus, the displacement absorbing portion 426 becomes longer, and a greater amount of expansion and contraction in the second direction D2 of the displacement absorbing portion 426 can be ensured. Therefore, the thermoelectric module 410 can relieve thermal stress more effectively through the expansion and contraction of the displacement absorbing portion 426 .

[0130] As mentioned above, the embodiment of the present invention has been described with reference to the drawings, but the specific structure is not limited to the embodiment, and design changes within the scope not departing from the gist of the present invention are also included. For example, in the above embodiment, the second electrode 20b, 220b, 320b, 420b on the temperature control object 2 side has the hole portion 23, 223, 323, 423, the constricted portion 24, 224, the protrusion 25, and the displacement absorbing portion 26, 226, 326, 426. However, not only the second electrode 20b, 220b, 320b, 420b, but also the first electrode 20a on the substrate 3 side may have the same structure as the second electrode 20b, 220b, 320b, 420b, such as the hole portion 23, 223, 323, 423, the constricted portion 24, 224, the protrusion 25, and the displacement absorbing portion 26, 226, 326, 426.

[0131] In the above embodiment, the second electrode 20b is on the heat absorbing side and the first electrode 20a is on the heat dissipating side. However, the second electrode 20b may be on the heat dissipating side and the first electrode 20a may be on the heat absorbing side.

[0132] Industrial Applicability

[0133] According to the present invention, it is possible to alleviate the thermal stress acting on the electrodes and avoid a decrease in the output of the thermoelectric module.

[0134] -Explanation of Reference Numerals-

[0135] 1 ... Thermoelectric unit 2 ... Temperature control object 3 ... Substrate 4 ... Heat transfer member 5 ... Lead wire 3 a ... Pipe 10 ... Thermoelectric module 11 ... Thermoelectric element 12 ... Connecting portion 20 ... Electrode 20 a ... First electrode 20 b ... Second electrode 21 ... Electrode base 22 ... Connecting portion 23 ... Hole 24 ... Narrow portion 25 ... Protrusion 26 ... Displacement absorbing portion 201 ... Thermoelectric unit 210 ... Thermoelectric module 220 ... Electrode 220 b ... Second electrode 222 ... Connecting portion 223 ... Hole 224 ... Narrow portion 226 ... Displacement absorbing portion 3 01…Thermoelectric unit 310…Thermoelectric module 320…Electrode 320b…Second electrode 322…Connecting portion 323…Hole portion 323a…Main body hole 323b…Protruding hole 326…Displacement absorbing portion 401…Thermoelectric unit 410…Thermoelectric module 420…Electrode 420b…Second electrode 422…Connecting portion 423…Hole portion 426…Displacement absorbing portion D1…First direction D2…Second direction D3…Third direction W1, W1a, W1b…First width W2…Second width W3…Third width

Claims

1. A thermoelectric module for regulating the temperature of a temperature-regulated object, characterized in that: have: a plurality of thermoelectric elements disposed between a substrate and the temperature control object, wherein the substrate is arranged to face the temperature control object in a first direction; and A plurality of electrodes are provided on the substrate side and the temperature control object side of the thermoelectric element, respectively, and electrically connect the thermoelectric elements adjacent to each other in a second direction intersecting the first direction. The electrode has: two electrode bases, separated in the second direction and respectively connected to corresponding thermoelectric elements; and A connecting portion connecting the two electrode bases, The connecting portion is provided with: a hole portion extending in the first direction; a constricted portion, which is disposed on both sides of the second direction with the hole sandwiched therebetween, and which enters the inner side of a third direction intersecting the first direction and the second direction; and The displacement absorbing portion is formed along the outer shape of the connecting portion and the outer shape of the hole portion.

2. The thermoelectric module according to claim 1, characterized in that: The electrode has a protrusion, which is arranged outside the hole in the third direction and protrudes along the third direction. The hole portion and the protrusion portion expand in the third direction accordingly.

3. The thermoelectric module according to claim 1 or 2, characterized in that: The hole is provided close to the thermoelectric element on the second direction side of the two electrically connected thermoelectric elements. The constricted portion on the other side in the second direction is further inward in the third direction than the constricted portion on the one side in the second direction.

4. The thermoelectric module according to claim 1 or 2, characterized in that: The hole portion is enlarged so as to protrude toward the thermoelectric element on the other side in the second direction among the two electrically connected thermoelectric elements.

5. The thermoelectric module according to claim 1 or 2, characterized in that: The hole portion is formed along the outer shape of the connecting portion.

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