Clamping fixture, clamping method and machining method

Abstract

The invention belongs to the technical field of semiconductor processing, and discloses a clamping fixture, a clamping method and a processing method.The clamping fixture comprises a mounting base and a plurality of fixing assemblies, the mounting base is used for bearing a to-be-processed workpiece, a plurality of annular positioning grooves are formed in the mounting base, and the annular positioning grooves are used for positioning and limiting the to-be-processed workpiece; in the radial direction of the mounting base, the fixing assembly is arranged on the mounting base in a position-adjustable mode, and the fixing assembly is arranged on the periphery of a to-be-machined part and can abut against the to-be-machined part to be arranged on the mounting base. According to the clamping fixture, the clamping difficulty is reduced, a plurality of machining positions of the to-be-machined workpiece can be machined at a time, the machining efficiency is improved, the fixing assembly is arranged on the periphery of the to-be-machined workpiece and does not interfere with the machining positions of the to-be-machined workpiece, the positions of the to-be-machined workpiece do not need to be repeatedly changed continuously, the clamping frequency is reduced, and the machining efficiency is improved. And the machining precision of the to-be-machined workpiece clamped by the clamping fixture is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor processing, and in particular to a clamping fixture, a clamping method and a processing method. Background Art

[0002] During the semiconductor processing, the ring-shaped semiconductor structure does not have a clamping position. During the processing, the semiconductor structure may shake or be unstable, resulting in large processing errors and low precision, which may seriously damage the semiconductor components. In addition, due to the large number of processing points, the installation position of the semiconductor structure needs to be constantly adjusted, which will lead to cumbersome processing of the semiconductor components, low processing efficiency, large processing errors and low yield rate.

[0003] In addition, the annular semiconductor structure also requires other operations such as opening holes in the circumferential side walls and welding external parts. In the prior art, the inner hole of the annular semiconductor structure is often fixed, which may interfere with the position of the processing tool and affect the processing accuracy.

[0004] Therefore, there is an urgent need for a clamping fixture, a clamping method and a processing method to solve the above technical problems. Summary of the invention

[0005] One object of the present invention is to provide a clamping fixture that can reduce the difficulty of clamping, improve processing efficiency, and process multiple processing surfaces at one time, reducing the number of clamping times and effectively avoiding product precision errors caused by multiple clamping.

[0006] To achieve this object, the present invention adopts the following technical solutions:

[0007] A clamping fixture is used to process the annular workpiece to be processed, and the clamping fixture includes:

[0008] A mounting base is used to carry the workpiece to be processed. The mounting base is provided with a plurality of annular positioning grooves, and the annular positioning grooves are used to position and limit the workpiece to be processed;

[0009] A plurality of fixing components are arranged on the mounting base in a radial direction thereof so as to be adjustable in position. The fixing components are arranged on the periphery of the workpiece to be processed and can press the workpiece to be processed against the mounting base.

[0010] Optionally, the outer diameter of the annular positioning groove is not greater than the inner hole diameter of the workpiece to be processed.

[0011] Optionally, the mounting base is provided with a plurality of mounting structures spaced apart along its circumference, the mounting structure comprises at least two mounting holes, at least two of the mounting holes are spaced apart along the radial direction of the mounting base, and the fixing assembly is fixedly connected to the mounting holes.

[0012] Optionally, the mounting base is further provided with a plurality of positioning holes, and the positioning holes are used to position the workpiece to be processed.

[0013] Optionally, the mounting base further comprises a plurality of fixing holes, and the fixing holes are used for fixed connection with the processing platform.

[0014] Optionally, the fixing assembly comprises:

[0015] A fixing screw, one end of which is connected to the mounting base;

[0016] A limit block is passed through the fixing screw rod, and the limit block can abut against a side of the workpiece to be processed away from the mounting base;

[0017] A fixing nut is threadedly connected to the other end of the fixing screw rod, and the fixing nut can be tightened on the fixing screw rod to tighten the limit block against the workpiece to be processed.

[0018] Optionally, a plurality of limiting members are provided in the annular positioning groove, and the limiting members are used to limit and tighten the inner hole wall of the workpiece to be processed.

[0019] Optionally, the above-mentioned limiting member is provided with one, the above-mentioned limiting member is an annular structure, and the above-mentioned limiting member is arranged in the above-mentioned annular positioning groove;

[0020] Or there are multiple limit members, the limit members are arc-shaped structures, and the multiple limit members are arranged at intervals along the circumference of the annular positioning groove.

[0021] Another object of the present invention is to provide a clamping method that can reduce the difficulty of clamping, improve processing efficiency, and process multiple processing surfaces at one time, thereby reducing the number of clamping times and effectively avoiding product precision errors caused by multiple clamping.

[0022] To achieve this object, the present invention adopts the following technical solutions:

[0023] A clamping method, using the clamping fixture described in any of the above schemes, the above clamping method comprises the following steps:

[0024] S1. Positioning the workpiece to be processed according to the annular positioning groove, and installing a limiting member in the annular positioning groove to limit the radial direction of the workpiece to be processed;

[0025] S2. Limiting the workpiece to be processed according to the positioning holes of the mounting base to limit the circumferential direction of the workpiece to be processed;

[0026] S3. The workpiece to be processed is tightly mounted on the mounting base through the fixing assembly to limit the axial position of the workpiece to be processed.

[0027] Another object of the present invention is to provide a processing method that can reduce the difficulty of clamping, improve processing efficiency, and process multiple processing surfaces at one time, thereby reducing the number of clamping times and effectively avoiding product precision errors caused by multiple clamping.

[0028] To achieve this object, the present invention adopts the following technical solutions:

[0029] A processing method, using the clamping fixture described in any of the above schemes to clamp the above-mentioned workpiece to be processed, and the above-mentioned processing method includes the following steps:

[0030] S10, installing the main body of the workpiece to be processed on the clamping fixture;

[0031] S20, machining the circumferential side wall of the main body of the workpiece to be machined along a first preset machining path and welding the subcomponents to complete the assembly of the workpiece to be machined;

[0032] S30, installing the workpiece to be processed on the clamping fixture along the first installation direction, and processing the upper surface of the workpiece to be processed along the second preset processing path;

[0033] S40, installing the workpiece to be processed on the clamping fixture along a second installation direction, and processing the lower surface of the workpiece to be processed along a third preset processing path.

[0034] Beneficial effects of the present invention:

[0035] The present invention provides a clamping fixture, a clamping method and a processing method. When installing a workpiece to be processed, the workpiece to be processed needs to be placed at a position corresponding to the annular positioning groove, and then the workpiece to be processed is limited and fixed from the periphery of the workpiece to be processed through a plurality of fixing components, so that the clamping of the workpiece to be processed can be achieved, and the clamping difficulty is reduced, so that the workpiece to be processed can be processed in multiple processing positions at one time, thereby improving the processing efficiency, and the fixing components arranged on the periphery of the workpiece to be processed will not interfere with the processing position of the workpiece to be processed, and there is no need to repeatedly change the position of the workpiece to be processed, thereby reducing the number of clamping times and improving the processing accuracy of the workpiece to be processed clamped by the clamping fixture. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] Figure 1 is an axonometric view of a clamping fixture provided in a specific embodiment of the present invention;

[0037] Figure 2is a top view of a clamping fixture provided in a specific embodiment of the present invention;

[0038] Figure 3 It is an axonometric view of a clamping fixture provided in a specific embodiment of the present invention loading a workpiece to be processed;

[0039] Figure 4 It is an axonometric view of the upper surface of the clamping fixture provided by the specific embodiment of the present invention during processing;

[0040] Figure 5 It is an axonometric view of the upper surface of the clamping fixture after machining provided by a specific embodiment of the present invention;

[0041] Figure 6 It is an axonometric view of the lower surface of the clamping fixture after processing according to the specific embodiment of the present invention.

[0042] In the figure:

[0043] 10. Mounting base; 11. Annular positioning groove; 12. Mounting hole; 13. Positioning hole; 14. Fixing hole;

[0044] 20. Fixing assembly; 21. Fixing screw; 22. Limiting block; 23. Fixing nut;

[0045] 200, workpiece to be processed; 210, annular part; 220, first boss; 230, second boss; 240, limiting hole; 300, processing platform. DETAILED DESCRIPTION

[0046] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the present invention, rather than to limit the present invention. It should also be noted that, for ease of description, only parts related to the present invention, rather than all structures, are shown in the accompanying drawings.

[0047] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0048] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0049] In the description of this embodiment, the terms "upper", "lower", "right", etc., directions or positional relationships are based on the directions or positional relationships shown in the drawings, and are only for the convenience of description and simplification of operation, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.

[0050] Refer to the following Figures 1 to 6 The invention introduces a clamping fixture, a clamping method and a processing method.

[0051] It should be noted that the workpiece 200 to be processed described in this embodiment is a ring-shaped semiconductor structure. In other embodiments, it may also be other structures, which are not specifically limited here.

[0052] Please refer to Figures 3 to 6 Specifically, the workpiece 200 to be processed includes an annular member 210, a first boss 220 and a second boss 230. The first boss 220 and the second boss 230 are respectively arranged at two ends of the annular member 210 along its own axial direction. The outer diameter of the first boss 220 is greater than the outer diameter of the second boss 230, and the outer diameter of the second boss 230 is greater than the outer diameter of the annular member 210. The workpiece 200 to be processed needs to process both surfaces of the first boss 220 and the second boss 230, and also needs to open holes on the circumferential side wall of the annular member 210, and sub-components are welded at the openings, so there are many processing positions.

[0053] In this embodiment, the clamping fixture is used to process the annular workpiece 200 to be processed, which reduces the difficulty of clamping and improves processing efficiency. Multiple processing surfaces can be processed in one go, reducing the number of clamping times and effectively avoiding product precision errors caused by multiple clamping.

[0054] Please refer to Figure 1 and Figure 2Specifically, the clamping fixture includes a mounting base 10 and a plurality of fixing components 20. The mounting base 10 is used to carry the workpiece 200 to be processed. The mounting base 10 is provided with a plurality of annular positioning grooves 11, and the annular positioning grooves 11 are used to position and limit the workpiece 200 to be processed. Along the radial direction of the mounting base 10, the fixing components 20 are adjustably arranged on the mounting base 10. The fixing components 20 are arranged on the outer periphery of the workpiece 200 to be processed and can press the workpiece 200 to be processed against the mounting base 10.

[0055] The clamping fixture in this embodiment, when installing the workpiece 200, needs to place the workpiece 200 at the position corresponding to the annular positioning groove 11, and then limit and fix the workpiece 200 from the periphery of the workpiece 200 through a plurality of fixing components 20, so as to achieve the clamping of the workpiece 200, reduce the clamping difficulty, so that the workpiece 200 can achieve one-time processing of multiple processing positions, improve the processing efficiency, and the fixing components 20 arranged on the periphery of the workpiece 200 will not interfere with the processing position of the workpiece 200, and there is no need to repeatedly change the position of the workpiece 200, which reduces the number of clamping times and improves the processing accuracy of the workpiece 200 clamped by the clamping fixture. At the same time, the position of the fixing components 20 and the mounting base 10 is adjustable, which can improve the adaptability and compatibility of the clamping fixture.

[0056] Optionally, the mounting base 10 is a square structure or a circular structure, which is not specifically limited herein. Exemplarily, the mounting base 10 is a square structure, which can increase the adjustable distance of the position of the fixing assembly 20 .

[0057] In some embodiments, the outer diameter of the annular positioning groove 11 is not larger than the inner diameter of the workpiece 200 to ensure that the annular positioning groove 11 can position the workpiece 200, that is, the inner hole of the workpiece 200 is concentric with the annular positioning groove 11.

[0058] Optionally, the outer diameter of the annular positioning groove 11 is close to the inner diameter of the workpiece 200 to be processed, so as to facilitate the positioning of the workpiece 200 to be processed.

[0059] Optionally, a plurality of annular positioning grooves 11 may be provided, and the diameters of the plurality of annular positioning grooves 11 are different, so as to achieve adaptability to workpieces 200 to be processed of various sizes.

[0060] In some embodiments, a plurality of limit members are provided in the annular positioning groove 11, and the limit members are used to limit and tighten the inner hole wall of the workpiece 200 to be processed, so that the limit members can limit the radial direction of the workpiece 200 to ensure the installation stability of the workpiece 200 to be processed, and at the same time will not affect the various installation positions of the workpiece 200 to be processed.

[0061] In some optional embodiments, a limiting member is provided, the limiting member is an annular structure, and the limiting member is arranged in the annular positioning groove 11; such an arrangement allows the limiting member to completely abut against the hole wall of the inner hole of the workpiece 200 to achieve radial limitation of the workpiece 200 to be processed.

[0062] In some optional embodiments, there are multiple limit members, each of which is an arc-shaped structure, and the multiple limit members are arranged at circumferential intervals along the annular positioning groove 11; this arrangement reduces the volume of the limit members, and can also achieve radial limitation of the workpiece 200 to be processed.

[0063] Optionally, the limiting member may be an elastic member, which can not only achieve radial limiting of the workpiece 200 to be processed, but also avoid scratching the workpiece 200 to be processed.

[0064] In some embodiments, the mounting base 10 is provided with a plurality of mounting structures arranged at intervals along its own circumference, and the mounting structures include at least two mounting holes 12, and at least two mounting holes 12 are arranged at intervals along the radial direction of the mounting base 10, and the fixing component 20 is fixedly connected to the mounting holes 12. Such a setting enables the fixing component 20 to be installed in each mounting hole 12, that is, the position of the fixing component 20 on the mounting base 10 can be adjusted on the mounting hole 12.

[0065] In some embodiments, the mounting base 10 is further provided with a plurality of positioning holes 13 , and the positioning holes 13 are used to position the workpiece 200 to be processed, thereby further realizing the limited installation of the workpiece 200 by the clamping fixture.

[0066] Specifically, a limiting hole 240 is correspondingly provided on the workpiece 200, and the limiting hole 240 is arranged in a one-to-one correspondence with the positioning hole 13. After the workpiece 200 is positioned, a positioning pin or other structure can be passed through the limiting hole 240 and the positioning hole 13 to further limit the position between the mounting base 10 and the workpiece 200 to avoid relative sliding between the two.

[0067] In some embodiments, the mounting base 10 further includes a plurality of fixing holes 14, and the fixing holes 14 are used to be fixedly connected to the processing platform 300 to achieve a fixed connection between the clamping fixture and the external processing platform 300 to ensure the stability of the installation of the clamping fixture.

[0068] Please continue to refer to Figure 1 and Figure 2In this embodiment, the fixing assembly 20 includes a fixing screw 21, a limiting block 22 and a fixing nut 23. One end of the fixing screw 21 is connected to the mounting base 10. The limiting block 22 is provided on the fixing screw 21, and the limiting block 22 can abut against the side of the workpiece 200 to be processed away from the mounting base 10. The fixing nut 23 is threadedly connected to the other end of the fixing screw 21, and the fixing nut 23 can be tightened on the fixing screw 21 to press the limiting block 22 against the workpiece 200 to be processed. When in use, the fixing screw 21 is threadedly connected to the corresponding mounting hole 12, and then the limiting block 22 is loaded so that the limiting block 22 abuts against the surface of the workpiece 200 to be processed, and then the fixing nut 23 is screwed in, so that the limiting block 22 can be tightened to the workpiece 200 to be processed against the mounting base 10.

[0069] Optionally, the limiting block 22 is provided with a waist-shaped hole, and a fixing screw 21 is passed through the waist-shaped hole. The setting of the waist-shaped hole can also make the position of the limiting block 22 adjustable, further improving the adaptability of the clamping fixture.

[0070] Please refer to Figures 1 to 3 The present embodiment also provides a clamping method, which uses the clamping fixture described in any of the above schemes, and the clamping method includes the following steps: S1, positioning the workpiece 200 to be processed according to the annular positioning groove 11, and installing a limiting member in the annular positioning groove 11 to limit the radial direction of the workpiece 200 to be processed; S2, limiting the workpiece 200 to be processed according to the positioning hole 13 of the mounting base 10 to limit the circumferential direction of the workpiece 200 to be processed; S3, tightly installing the workpiece 200 to be processed on the mounting base 10 through the fixing component 20 to limit the axial direction of the workpiece 200 to be processed.

[0071] Through the above clamping method, the installation and clamping of the annular workpiece 200 without a clamping position can be realized, which reduces the difficulty of clamping, improves the processing efficiency, and multiple processing surfaces can be processed in place at one time, reducing the number of clamping times, and effectively avoiding the accuracy error of the product caused by multiple clamping.

[0072] This embodiment further provides a processing method, which adopts the clamping fixture described in any of the above schemes to clamp the workpiece 200 to be processed. It has all the technical effects of the clamping fixture described in any of the above schemes, which will not be repeated here.

[0073] Specifically, the processing method comprises the following steps:

[0074] Please refer to Figure 3 , step S10, installing the main body of the workpiece 200 to be processed on the clamping fixture; that is, using the above-mentioned clamping method to install and fix the workpiece 200 to be processed.

[0075] Specifically, the first boss 220 or the second boss 230 may be arranged downward to ensure that the circumferential side wall can be opened from the inner hole of the workpiece 200 to be processed.

[0076] Please refer to Figure 3 and Figure 4 After step S10, step S20 is included, processing the circumferential side wall of the main body of the workpiece 200 to be processed and welding the sub-components along the first preset processing path to complete the assembly of the workpiece 200 to be processed; that is, drilling holes in the circumferential side wall of the workpiece 200 to be processed, and welding the sub-components corresponding to the positions of the holes to complete the assembly welding of the workpiece 200 to be processed.

[0077] It should be noted that the first preset processing path is set according to the actual processing requirements of the workpiece 200 to be processed, and will not be described in detail here.

[0078] Please refer to Figure 4 and Figure 5 , step S20 is followed by step S30, installing the workpiece 200 to be processed on the clamping fixture along the first installation direction, and processing the upper surface of the workpiece 200 to be processed along the second preset processing path; that is, processing the upper surface of the first boss 220 and the upper surface of the second boss 230 of the workpiece 200 to be processed.

[0079] It should be noted that the first installation direction in this embodiment is a direction in which the first boss 220 is arranged upward and the second boss 230 is arranged downward.

[0080] The second preset processing path is set according to the actual processing requirements of the workpiece 200 to be processed, and will not be described in detail here.

[0081] Please refer to Figure 6 , step S30 is followed by step S40, installing the workpiece 200 to be processed on the clamping fixture along the second installation direction, and processing the lower surface of the workpiece 200 to be processed along the third preset processing path; that is, processing the lower surface of the second boss 230 and the lower surface of the first boss 220 of the workpiece 200 to be processed.

[0082] It should be noted that the second installation direction in this embodiment is a direction in which the second boss 230 is arranged upward and the first boss 220 is arranged downward.

[0083] The third preset processing path is set according to the actual processing requirements of the workpiece 200 to be processed, and will not be described in detail here.

[0084] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. For those skilled in the art, various obvious changes, readjustments and substitutions can be made without departing from the protection scope of the present invention. It is not necessary and impossible to list all the embodiments here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention shall be included in the protection scope of the claims of the present invention.

Claims

1. A clamping fixture, characterized in that: Used for processing an annular workpiece (200) to be processed, the clamping fixture comprises: A mounting base (10) for carrying a workpiece (200) to be processed, wherein the mounting base (10) is provided with a plurality of annular positioning grooves (11), and the annular positioning grooves (11) are used to position and limit the workpiece (200) to be processed; A plurality of fixing components (20) are arranged on the mounting base (10) in a radial direction of the mounting base (10) in an adjustable manner. The fixing components (20) are arranged on the outer periphery of the workpiece (200) to be processed and can press the workpiece (200) against the mounting base (10).

2. The clamping fixture according to claim 1, characterized in that: The outer diameter of the annular positioning groove (11) is not greater than the inner hole diameter of the workpiece (200) to be processed.

3. The clamping fixture according to claim 1, characterized in that: The mounting base (10) is provided with a plurality of mounting structures spaced apart along its circumference, the mounting structure comprising at least two mounting holes (12), at least two of the mounting holes (12) being spaced apart along the radial direction of the mounting base (10), and the fixing assembly (20) being fixedly connected to the mounting holes (12).

4. The clamping fixture according to claim 1, characterized in that: The mounting base (10) is also provided with a plurality of positioning holes (13), and the positioning holes (13) are used to position the workpiece (200) to be processed.

5. The clamping fixture according to claim 1, characterized in that: The mounting base (10) further comprises a plurality of fixing holes (14), wherein the fixing holes (14) are used for being fixedly connected to the processing platform (300).

6. The clamping fixture according to claim 1, characterized in that: The fixing assembly (20) comprises: A fixing screw (21), one end of which is connected to the mounting base (10); A limit block (22) is passed through the fixing screw (21), and the limit block (22) can abut against a side of the workpiece (200) to be processed that is away from the mounting base (10); A fixing nut (23) is threadedly connected to the other end of the fixing screw (21), and the fixing nut (23) can be tightened on the fixing screw (21) to tighten the limit block (22) against the workpiece (200) to be processed.

7. The clamping fixture according to any one of claims 1 to 6, characterized in that: A plurality of limiting members are arranged in the annular positioning groove (11), and the limiting members are used to limit and tighten the inner hole wall of the workpiece (200) to be processed.

8. The clamping fixture according to claim 7, characterized in that: The limiting member is provided with one, the limiting member is an annular structure, and the limiting member is arranged in the annular positioning groove (11); Or there are multiple limit members, each of which is an arc-shaped structure, and the multiple limit members are arranged at intervals along the circumference of the annular positioning groove (11).

9. A clamping method, characterized in that: Using the clamping fixture as described in any one of claims 1 to 8, the clamping method comprises the following steps: S1. Positioning the workpiece (200) to be processed according to the annular positioning groove (11), and installing a limiting member in the annular positioning groove (11) to limit the radial direction of the workpiece (200) to be processed; S2. limiting the position of the workpiece (200) to be processed according to the positioning hole (13) of the mounting base (10) so as to limit the circumferential direction of the workpiece (200) to be processed; S3. The workpiece to be processed (200) is tightly mounted on the mounting base (10) by using the fixing assembly (20) to limit the axial position of the workpiece to be processed (200).

10. A processing method, characterized in that: The workpiece (200) to be processed is clamped by the clamping fixture as described in claims 1 to 8, and the processing method includes the following steps: S10, installing the main body of the workpiece (200) to be processed on the clamping fixture; S20, machining the circumferential side wall of the main body of the workpiece (200) to be machined along a first preset machining path and welding the subcomponents to complete the assembly of the workpiece (200); S30, installing the workpiece (200) to be processed on the clamping fixture along a first installation direction, and processing the upper surface of the workpiece (200) to be processed along a second preset processing path; S40, installing the workpiece (200) to be processed on the clamping fixture along a second installation direction, and processing the lower surface of the workpiece (200) to be processed along a third preset processing path.

Images