Method for enhancing image contrast of color filter film in photosensitive element

Abstract

The invention provides a method for enhancing image contrast of a color filter film in a photosensitive element, which mainly utilizes the characteristic that the material of the RGB color filter film reacts with X-ray or ultraviolet light, and utilizes the qualitative change of the color filter film after the irradiation of the X-ray or ultraviolet light, so that the color filter films of different RGB dyes can be clearly distinguished during SEM (scanning electron microscope) observation. According to the invention, the color filter films of different RGB dyes can be clearly distinguished during SEM observation by utilizing the characteristic that the material of the RGB color filter film reacts with X-rays or ultraviolet light and the qualitative change generated after the color filter film is irradiated by the X-rays or the ultraviolet light. According to the method, the SEM analysis quality in material analysis is effectively improved, the comparison of different color filter film materials on an SEM image is increased in actual use, although the color filter film materials are subjected to qualitative change, the morphology of the color filter film materials is not influenced, and the analysis result is not influenced.

Description

Technical Field

[0001] The invention relates to the field of semiconductor test piece preparation, and in particular to a method for enhancing the image contrast of a color filter film in a photosensitive element. Background Art

[0002] The existing method for analyzing the color filter in the photosensitive element is to first prepare the test piece into a cross-section form using FIB, and then observe it using a high-resolution SEM.

[0003] There are three types of color filter films. According to the dyes added, they can allow red (R), blue (B), and green (G) wavelengths of light to pass through. The light that passes through the photodiode is detected by the detector. The quality of the color filter film, especially the film morphology, is an important factor that directly affects the performance of the photosensitive element. Currently, R&D engineers use cross-sectional FIB analysis to obtain information on the color filter film morphology. However, since the main components of the three color filter films are polymers and the components are quite similar, it is difficult to distinguish the differences between RGB in SEM image comparison, especially at the interface, which can easily cause R&D engineers to misjudge and affect the R&D schedule. Summary of the invention

[0004] The purpose of the present invention is to solve the shortcomings of the prior art and to propose a method for enhancing the image contrast of a color filter film in a photosensitive element.

[0005] To achieve the above-mentioned purpose, the present invention adopts the following technical solution: a method for enhancing the image contrast of a color filter film in a photosensitive element, wherein the specific steps of the method are as follows: S1: Prepare the photosensitive element test piece: The photosensitive element test piece is a chip with RGB color filters arranged in a specific pattern; RGB color filters are generally made of polymer materials and achieve color selectivity through specific dye molecules; S2: Cut the test piece, put it into a specific cavity, and irradiate it: Using focused ion beam technology to cut the photosensitive element test piece in step S1; placing the cut photosensitive element test piece in a specific cavity, and irradiating the photosensitive element test piece in the cavity with X-rays or ultraviolet light; Through precise ion beam scanning, micron-level or even nanometer-level cross-sections can be cut, and the cross-section needs to stay on the surface of the color filter film; S3: Produce tautomerism and qualitative change effect: In step S1, after the carbonyl group in the dye molecule is irradiated by X-rays or ultraviolet light in step S2, tautomerism will occur, which will cause the carbonyl group in the dye molecule to be converted into an enol structure; Since different dye molecules have different carbonyl contents, they will undergo different degrees of tautomerism under the same excitation conditions, resulting in changes in the material properties of the dye molecules within the color filter film; S4: SEM imaging and comparison: Since different dye molecules generate different numbers of secondary electrons after being irradiated by X-rays or ultraviolet light and then irradiated by electron beams in step S2, the resulting SEM image can show the contrast between different color filters; S5: Data analysis and results interpretation: Based on the SEM images formed by the difference in the number of secondary electrons in step S4, the reaction mechanism and degree of the dye molecules under different irradiation conditions of X-rays or ultraviolet light are obtained; By comparing the responses of different color filters to X-rays and UV light, we can provide guidance for improving the contrast of color filters in SEM analysis and achieve more accurate material analysis of photosensitive components.

[0006] Preferably, in step S1, the size of the photosensitive element test piece is less than 20 mm; the photosensitive element test piece has a plurality of RGB color filters; and the RGB color filters respectively contain different specific dye molecules.

[0007] Preferably, in step S2, the X-ray energy range is 100-150 KeV, and the irradiation time is 20-30 seconds; the ultraviolet light wavelength range is 100-250 nm, and the irradiation time is 60 seconds.

[0008] Preferably, the specific cavity is not limited to a stainless steel vacuum cavity, or any cavity that allows the photosensitive element test piece to freely enter and exit and can firmly fix the photosensitive element test piece.

[0009] Preferably, in step S3, the change in the optical properties of the dye molecules in the RGB color filter film will cause a qualitative change in the color, light transmittance, etc. of the filter film; different dye types and molecular structures may show different physical or chemical reactions after being irradiated.

[0010] Preferably, in step S4, in the SEM image, different RGB color filters have different responses to the electron beam due to different degrees of qualitative changes in the dye molecules, so the number of secondary electrons generated will also be different; by analyzing the intensity of the secondary electron emission signal, the morphological changes of the color filter film are obtained.

[0011] Preferably, in step S5, the difference in the reaction degree of different RGB color filters will appear as an obvious contrast difference in the image, thereby helping to analyze the morphology of different dye molecules.

[0012] Compared with the prior art, the present invention has the following beneficial effects: the present invention utilizes the characteristics of the RGB color filter film material reacting with X-rays or ultraviolet light, and utilizes the qualitative change of the color filter film after being irradiated with X-rays or ultraviolet light, so that color filters of different RGB dyes can be clearly distinguished during SEM observation. The method of the present invention effectively improves the quality of SEM analysis in material analysis, and in actual use, not only increases the contrast of different color filter film materials on SEM images, but also, although the color filter film material undergoes a qualitative change, it does not affect its morphology, and will not affect the analysis results. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 This is a cross-sectional view of a photosensitive element test piece, which contains several different RGB color filter materials; Figure 2 This is a cross-sectional view of the photosensitive element specimen after FIB preparation, with the color filter material exposed on the surface; Figure 3 A cross-sectional view of a photosensitive element specimen subjected to XRAY or ultraviolet light irradiation; Figure 4 This is a cross-sectional view of a photosensitive element specimen after being exposed to XRAY or UV light. Different color filter materials undergo different degrees of qualitative changes. DETAILED DESCRIPTION

[0014] In order to provide a further understanding of the purpose, structure, features, and functions of the present invention, the following detailed description is given in conjunction with the embodiments.

[0015] Please refer to Figures 1 to 4 The present invention provides a method for enhancing the image contrast of a color filter film in a photosensitive element, and the specific steps of the method are as follows: S1: Prepare the photosensitive element test piece: Photosensitive element test piece (if attached) Figure 1 ) is a thin film with several RGB color filters; RGB color filters are generally made of polymer materials and achieve color selectivity through specific dye molecules; The dye molecules have light-absorbing properties and can absorb and reflect light within a specific spectral range, providing a color filtering effect; at the same time, the size of the photosensitive element test piece is less than 20mm, which is suitable for delicate operations.

[0016] The dye molecules in the RGB color filter are distributed according to red (R), green (G) and blue (B).

[0017] Each color filter contains different specific dye molecules, which strongly absorb light in a specific wavelength range, thus affecting the color of the final filter. The distribution and concentration of dye molecules have a significant impact on the optical properties of the final filter.

[0018] S2: Cut the test piece, put it into a specific cavity, and irradiate it: Using focused ion beam technology to cut the photosensitive element test piece in step S1; placing the cut photosensitive element test piece in a specific cavity, and irradiating the photosensitive element test piece in the cavity with X-rays or ultraviolet light; Through precise ion beam scanning, micron-level or even nanometer-level cross-sections can be cut, and the cross-section needs to stay on the surface of the color filter film.

[0019] FIB technology can cut micron-level or even nanometer-level cross sections through precise ion beam scanning. The cross section needs to stay on the surface of the color filter film (such as the attached Figure 2 ), so that the subsequent irradiation experiments can better observe the changes in the dye molecules.

[0020] The photosensitive element specimen is cut using a focused ion beam (FIB) to obtain a cross section that should remain on the surface of the color filter for subsequent analysis. The FIB device can precisely control the cutting position and depth to ensure that the obtained specimen cross section accurately reflects the structural characteristics of the color filter.

[0021] Place the prepared photosensitive element test piece in a specific chamber (such as a stainless steel vacuum chamber or other appropriate container). This chamber can ensure the stability of the test piece and allow the test piece to be irradiated without external interference. The environment in the chamber should have conditions suitable for X-ray or ultraviolet light irradiation, and it is necessary to ensure that the test piece can enter and exit freely.

[0022] The specimen is exposed to X-rays of a specific energy range (100-150 keV) in the chamber. This energy range can excite the carbonyl group of the dye molecule and trigger tautomerism. The exposure time is set to 20 to 30 seconds to ensure that the reaction occurs fully. The exposure of X-rays changes the electronic state of the dye molecule, triggering the formation of the enol structure.

[0023] The wavelength range of UV irradiation is 100-250 nm, and the irradiation time is set to 60 seconds. The excitation of UV light can also cause electronic transitions inside the dye molecule, also triggering tautomerism. The combination of UV light and X-rays provides a multi-dimensional excitation mechanism, which can more comprehensively observe the spectral response of the dye molecule.

[0024] S3: Produce tautomerism and qualitative change effect: In step S1, after the carbonyl group in the dye molecule is irradiated by X-rays or ultraviolet light in step S2, tautomerism will be stimulated, which will cause the carbonyl group in the dye molecule to be converted into an enol structure; this transformation may affect the optical properties of the dye molecule, such as color, light absorption characteristics, etc.

[0025] Since different dye molecules have different carbonyl contents, they will undergo different degrees of tautomerism under the same excitation conditions, resulting in changes in the optical properties of the dye molecules in the color filter.

[0026] This change will cause the color and light transmittance of the filter film to change qualitatively ( Figure 4 ). Different dye types and molecular structures may exhibit different physical or chemical reactions after irradiation, which provides rich contrast for subsequent observation and analysis.

[0027] S4: SEM imaging and comparison: Since different dye molecules produce different numbers of secondary electrons after being irradiated by an electron beam, the resulting SEM image can show the contrast between different color filters.

[0028] These contrasts reflect the chemical and physical changes of dye molecules under different irradiation conditions. By comparing the secondary electron signal intensity of different dye areas, the effect of dye molecules on the performance of photosensitive elements can be quantitatively or qualitatively analyzed.

[0029] After the irradiation is completed in step S3, the test piece is put back into the FIB or scanning electron microscope (SEM) equipment for observation; the FIB or SEM can scan the sample surface by electron beam, generate secondary electron signals, and provide a surface morphology image of the sample.

[0030] The chemical reactions of different dye molecules will cause the surface morphology of the color filter to change; since different dye molecules have different degrees of tautomerism after excitation, the number of secondary electrons they generate under the scanning electron microscope will also be different.

[0031] S5: Data analysis and results interpretation: Based on the contrast in the SEM image formed in step S4 and the difference in the number of secondary electrons, the reaction mechanism and degree of the dye molecules under different irradiation conditions are obtained; By comparing the responses of different color filters to X-rays and UV light, we can provide guidance for improving the contrast of color filters in SEM analysis and achieve more accurate material analysis of photosensitive components.

[0032] Specific implementation: The present invention mainly utilizes the characteristics of the color filter film material reacting with X-rays or ultraviolet light. The color filter film is mainly composed of polymers and specific dyes. After the polymer is irradiated by X-rays or ultraviolet light, some functional groups inside will be destroyed and a qualitative change will occur. This qualitative change will not cause a change in the morphology of the color filter film. However, during electron beam observation and analysis, the secondary electrons generated by the deteriorated color filter film will be different from those of the original color filter film, and the deterioration caused by the color filter film with different dyes will also be different. Therefore, the color filter film with different dyes can be distinguished by SEM observation. In the working process, the test piece is first prepared into a cross-section form by using FIB, and the cross section stops at the interface of the color filter film to be analyzed. The test piece is placed in a specific cavity and irradiated by XRAY or ultraviolet light. After irradiation, it returns to the SEM device and uses an electron beam to complete the image analysis work.

[0033] The present invention has been described by the above-mentioned relevant embodiments, however, the above-mentioned embodiments are only examples for implementing the present invention. It must be pointed out that the disclosed embodiments do not limit the scope of the present invention. On the contrary, changes and modifications made without departing from the spirit and scope of the present invention are all within the scope of patent protection of the present invention.

Claims

1. A method for enhancing the image contrast of a color filter film in a photosensitive element, characterized in that: The specific steps of the method are as follows: S1: Prepare the photosensitive element test piece: The photosensitive element test piece is a chip with RGB color filters arranged in a specific pattern; RGB color filters are generally made of polymer materials and achieve color selectivity through specific dye molecules; S2: Cut the test piece, put it into a specific cavity, and irradiate it: Using focused ion beam technology to cut the photosensitive element test piece in step S1; placing the cut photosensitive element test piece in a specific cavity, and irradiating the photosensitive element test piece in the cavity with X-rays or ultraviolet light; Through precise ion beam scanning, micron-level or even nanometer-level cross-sections can be cut, and the cross-section needs to stay on the surface of the color filter film; S3: Produce tautomerism and qualitative change effect: In step S1, after the carbonyl group in the dye molecule is irradiated by X-rays or ultraviolet light in step S2, tautomerism will occur, which will cause the carbonyl group in the dye molecule to be converted into an enol structure; Since different dye molecules have different carbonyl contents, they will undergo different degrees of tautomerism under the same excitation conditions, resulting in changes in the material properties of the dye molecules within the color filter film; S4: SEM imaging and comparison: Since different dye molecules generate different numbers of secondary electrons after being irradiated by X-rays or ultraviolet light and then irradiated by electron beams in step S2, the resulting SEM image can show the contrast between different color filters; S5: Data analysis and results interpretation: Based on the SEM images formed by the difference in the number of secondary electrons in step S4, the reaction mechanism and degree of the dye molecules under different irradiation conditions of X-rays or ultraviolet light are obtained; By comparing the responses of different color filters to X-rays and UV light, we can provide guidance for improving the contrast of color filters in SEM analysis and achieve more accurate material analysis of photosensitive components.

2. A method for enhancing the image contrast of a color filter film in a photosensitive element as claimed in claim 1, characterized in that: In the step S1, the size of the photosensitive element test piece is less than 20 mm; the photosensitive element test piece has RGB color filters arranged in a specific pattern; and the RGB color filters respectively contain different specific dye molecules.

3. The method for enhancing the image contrast of a color filter film in a photosensitive element according to claim 1, characterized in that: In step S2, the X-ray energy range is 100-150 KeV, and the irradiation time is 20-30 seconds; the ultraviolet light wavelength range is 100-250 nm, and the irradiation time is 60 seconds.

4. The method for enhancing the image contrast of a color filter film in a photosensitive element as claimed in claim 1, characterized in that: The specific cavity is not limited to a stainless steel vacuum cavity, or any cavity that allows the photosensitive element test piece to freely enter and exit and can firmly fix the photosensitive element test piece.

5. The method for enhancing the image contrast of a color filter film in a photosensitive element as claimed in claim 1, characterized in that: In step S3, the change in the optical properties of the dye molecules in the RGB color filter film will cause a qualitative change in the color, light transmittance, etc. of the filter film; different dye types and molecular structures may show different physical or chemical reactions after being irradiated.

6. A method for enhancing the image contrast of a color filter in a photosensitive element as claimed in claim 1, characterized in that: In step S4, in the SEM image, different RGB color filter films have different responses to the electron beam due to different degrees of qualitative changes in the dye molecules, so the number of secondary electrons generated will also be different; by analyzing the intensity of the secondary electron emission signal, a comparison of the images of different color filter films is obtained.

7. A method for enhancing the image contrast of a color filter in a photosensitive element as claimed in claim 1, characterized in that: In step S5, the difference in the reaction degree of different RGB color filters will appear as an obvious contrast difference in the image, thereby helping to analyze the tautomerism effect of dye molecules and its influence on the properties of polymer materials.

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