Gas concentration measuring device and method

Abstract

The invention relates to a gas concentration measuring device and method. The gas concentration measuring device comprises a gas detection cavity, a temperature sensing assembly, a pressure sensing assembly, a light source supply device and a light sensing device, and is used for measuring the gas concentration of gas (such as ozone) to be measured. The temperature sensing assembly and the pressure sensing assembly respectively measure the temperature and the pressure of the gas to be measured. The light source supply device adopts a UV-LED as an ultraviolet light source and provides a first detection light beam and a correction light beam which have different ozone absorption brightness, and then the first detection light beam and the correction light beam are respectively divided into split light passing through gas to be detected and split light not passing through the gas to be detected by a light splitting assembly. The light sensing device can respectively measure the light intensity containing ozone and the light intensity not containing ozone of the first detection light beam and the correction light beam. By comparing the light intensity, the concentration of the ozone gas can be calculated according to the Beer-Lambert Law (Beer-Lambert Law).

Description

Technical Field

[0001] The present invention relates to a measuring device and method, and in particular to a gas concentration measuring device and method. Background Art

[0002] As the industry gradually develops, various gases are often used in various industries or living environments. For example, ozone is often used in sterilization equipment and semiconductor wafer manufacturing, but the instruments used to measure ozone concentration on the market can no longer meet the requirements of accurate, stable and fast feedback of ozone concentration. Although the current ozone concentration measurement instrument uses the ultraviolet light absorption brightness method, the ultraviolet light source emits ultraviolet light to penetrate the ozone in the quartz glass tube, and uses a light sensor to measure the light sensing signal, and then calculates the ozone concentration by the Beer-Lambert Equation.

[0003] However, existing ozone concentration measuring instruments mainly use low-pressure mercury lamps as ultraviolet light sources. Although low-pressure mercury lamps can provide ultraviolet light sources close to the ozone absorption spectrum, low-pressure mercury lamp technology has the following long-standing and difficult-to-solve shortcomings: (1) It requires a long warm-up time, resulting in a period of time before measurements can be made again. (2) It requires a high-voltage power supply, resulting in energy consumption for measurements. (3) The ultraviolet light source radiates in all directions, resulting in low utilization. (4) Due to its large size, one device can only have a light source with a fixed wavelength. When the ozone concentration range varies too much, it is necessary to replace different devices. (5) The service life is short. (6) Mercury vapor is generated.

[0004] In addition, when the quartz glass tube wall is dirty or deposited during the ozone measurement process, it may cause errors in the light sensing signal measured by the light sensor. However, the existing ozone concentration measurement instrument cannot provide real-time feedback and real-time correction for this error. Therefore, it can be seen that the existing ozone concentration measurement instrument obviously does not meet the requirements of accurate, stable and fast feedback of ozone concentration. Summary of the invention

[0005] In order to solve the problems of long preheating time, high starting voltage, low light source utilization rate, and small detection concentration range caused by using a low-pressure mercury lamp as an ultraviolet light source in the traditional technology for measuring the concentration of ozone gas, and the use of a single wavelength in the traditional technology, one of the purposes of the present invention is to provide a gas concentration measuring device for measuring the gas concentration of the gas to be measured.

[0006] To achieve the aforementioned purpose, the present invention proposes a gas concentration measuring device for measuring a gas concentration of a gas to be measured, comprising at least: a gas detection chamber, the gas detection chamber being connected to a gas inlet and outlet channel so that the gas to be measured is present in a chamber of the gas detection chamber; a temperature sensing component for detecting a gas temperature of the gas to be measured; a pressure sensing component for detecting a gas pressure of the gas to be measured; a light source supply device, disposed on a first side of the gas detection chamber, comprising: at least one light source for providing a first detection beam and a correction beam, wherein an absorbance of the gas to be measured for the first detection beam is greater than an absorbance of the gas to be measured for the correction beam; and a spectroscopic component for splitting the first detection beam into a first detection spectroscopic beam and a second detection spectroscopic beam and splitting the correction beam into a first correction spectroscopic beam and a second correction spectroscopic beam. light, wherein the first detection spectrophotometry and the first correction spectrophotometry have passed through the gas detection cavity and the gas to be detected in the gas detection cavity, and the second detection spectrophotometry and the second correction spectrophotometry have not passed through the gas detection cavity and the gas to be detected in the gas detection cavity; and a light sensing device, which at least includes a first light sensing component and a second light sensing component, respectively located on a second side and the first side of the gas detection cavity, for respectively measuring a light intensity of the first detection spectrophotometry and a light intensity of the second detection spectrophotometry of the first detection light beam, so as to calculate a first detection concentration of the gas to be detected, and respectively measuring a light intensity of the first correction spectrophotometry and a light intensity of the second correction spectrophotometry of the correction light beam, so as to calculate a correction concentration of the gas to be detected, wherein the gas concentration of the gas to be detected is obtained by deducting the correction concentration from the first detection concentration.

[0007] Among them, the two ends of the gas inlet and outlet channel are respectively a channel air inlet hole and a channel air outlet hole, which are used to correspondingly introduce and export the gas to be tested. The gas detection cavity is a hollow cavity having the cavity, and the two ends of the hollow cavity are respectively provided with a detection air inlet hole and a detection air outlet hole connected to the cavity of the hollow cavity, wherein the gas to be tested continuously flows through the cavity of the hollow cavity of the gas detection cavity.

[0008] Among them, the gas concentration measuring device further includes a processing component for calculating the first detection concentration of the gas to be measured based on the gas temperature of the gas to be measured, the gas pressure of the gas to be measured, the light intensity of the first detection spectrophotometry, the light intensity of the second detection spectrophotometry, an optical path length of the gas to be measured in the chamber of the gas detection cavity and an absorption coefficient of the gas to be measured, wherein the processing component further calculates the correction concentration of the gas to be measured based on the gas temperature of the gas to be measured, the gas pressure of the gas to be measured, the light intensity of the first correction spectrophotometry, the light intensity of the second correction spectrophotometry, the optical path length of the gas to be measured in the chamber of the gas detection cavity and the absorption coefficient of the gas to be measured.

[0009] The gas to be detected is ozone, and the first detection light beam and the calibration light beam provided by the light source are ultraviolet light.

[0010] The spectroscopic component is an inclined spectroscopic plate, so that the first detection spectroscopic beam and the first correction spectroscopic beam have the same first optical path, and the second detection spectroscopic beam and the second correction spectroscopic beam have the same second optical path.

[0011] Wherein, the gas detection cavity is a quartz glass tube.

[0012] The wavelength of the first detection light beam is within an absorption wavelength range of the gas to be detected, and the wavelength of the correction light beam is outside the absorption wavelength range of the gas to be detected, so as to correct a light absorption interference error generated by the gas detection cavity.

[0013] The light source supply device further comprises a light source control component for controlling the light source of the light source supply device to alternately provide the first detection light beam and the correction light beam in a light emission mode.

[0014] The light emitting mode is a pulsed or intermittent mode to turn on and off the first detection light beam and the correction light beam.

[0015] When the gas concentration of the gas to be tested obtained by deducting the correction concentration from the first detection concentration is lower than a default value, the light source provides at least one second detection beam to replace the first detection beam, and the wavelength and / or brightness of the second detection beam are different from the wavelength and / or brightness of the first detection beam.

[0016] The light source has one or more light-emitting components for providing the first detection light beam and the correction light beam.

[0017] To achieve the aforementioned purpose, the present invention further proposes a gas concentration measurement method for measuring a gas concentration of a gas to be measured, which at least includes the following steps: providing a gas detection chamber, the gas detection chamber being connected to a gas inlet and outlet channel, so that the gas to be measured is contained in a chamber of the gas detection chamber; performing a temperature detection step to detect a gas temperature of the gas to be measured; performing a pressure detection step to detect a gas pressure of the gas to be measured; providing a first detection light beam and a correction light beam, wherein an absorbance of the gas to be measured for the first detection light beam is greater than an absorbance of the gas to be measured for the correction light beam; performing a light splitting step to split the first detection light beam into a light beam having passed through and not passed through the gas detection chamber and a light beam having passed through the gas detection chamber. A first detection spectrum and a second detection spectrum of the gas to be detected in the gas detection cavity and a first correction spectrum and a second correction spectrum of the correction beam are respectively divided into the first and second correction spectrums of the gas to be detected that have passed through and have not passed through the gas detection cavity and the gas detection cavity; a light intensity measurement step is performed to respectively measure the light intensity of the first detection spectrum and the light intensity of the second detection spectrum of the first detection beam, so as to calculate a first detection concentration of the gas to be detected; and a correction step is performed to respectively measure the light intensity of the first correction spectrum and the light intensity of the second correction spectrum of the correction beam, so as to calculate a correction concentration of the gas to be detected, wherein the gas concentration of the gas to be detected is obtained by deducting the correction concentration from the first detection concentration.

[0018] The gas to be tested continuously flows through the chamber of the gas detection chamber.

[0019] Among them, the light intensity measurement step further includes calculating the first detection concentration of the gas to be measured based on the gas temperature of the gas to be measured, the gas pressure of the gas to be measured, the light intensity of the first detection spectrophotometer, the light intensity of the second detection spectrophotometer, an optical path length of the gas to be measured in the chamber of the gas detection cavity and an absorption coefficient of the gas to be measured, and the correction step further includes calculating the correction concentration of the gas to be measured based on the gas temperature of the gas to be measured, the gas pressure of the gas to be measured, the light intensity of the first correction spectrophotometer, the light intensity of the second correction spectrophotometer, the optical path length of the gas to be measured in the chamber of the gas detection cavity and the absorption coefficient of the gas to be measured.

[0020] The gas to be detected is ozone, and the first detection light beam and the correction light beam are ultraviolet light.

[0021] The light splitting step uses a light splitting component to make the first detection light split and the first correction light split have the same first light path, and the second detection light split and the second correction light split have the same second light path.

[0022] Wherein, the gas detection cavity is a quartz glass tube.

[0023] The wavelength of the first detection light beam is within an absorption wavelength range of the gas to be detected, and the wavelength of the correction light beam is outside the absorption wavelength range of the gas to be detected, so as to correct a light absorption interference error caused by the material of the gas detection cavity.

[0024] The gas concentration measurement method further includes utilizing a light source control component to control a light source to alternately provide the first detection light beam and the calibration light beam in a light emission mode.

[0025] The light emitting mode is a pulsed or intermittent mode to turn on and off the first detection light beam and the correction light beam.

[0026] When the gas concentration of the gas to be tested obtained by deducting the correction concentration from the first detection concentration is lower than a default value, at least one second detection beam is provided to replace the first detection beam, and the wavelength and / or brightness of the second detection beam are different from the wavelength and / or brightness of the first detection beam.

[0027] The gas concentration measurement method further includes utilizing one or more light emitting components to provide the first detection light beam and the calibration light beam.

[0028] As mentioned above, the gas concentration measurement device and method of the present invention have the following effects:

[0029] (1) Compared with the conventional technology that uses a low-pressure mercury lamp as an ultraviolet light source, the gas concentration measuring device of the present invention uses a small-volume light-emitting diode component as an ultraviolet light source (UV-LED), which can respond to ozone gas in different concentration ranges, so there is no need to replace the machine.

[0030] (2) The present invention uses a light-emitting diode assembly as a UV light source and does not require a preheating time, so it can provide a UV light source in a pulsed switching manner to achieve a real-time correction effect.

[0031] (3) The present invention uses a light-emitting diode component as an ultraviolet light source to measure the gas concentration of a continuously flowing gas to be measured in real time, accurately and quickly, and does not require preheating, has a low starting voltage, contains no mercury vapor and has a long service life.

[0032] (4) The present invention can provide detection light beams of different wavelengths in real time in response to different concentration ranges of the gas to be tested, thereby providing real-time correction and feedback.

[0033] (5) The present invention can solve the problem of measurement error caused by the dirty quartz glass tube wall in traditional technology.

[0034] In order to enable you to have a further understanding and recognition of the technical features and technical effects of the present invention, preferred embodiments and detailed descriptions are provided as follows. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] Figure 1 It is a schematic diagram of the flow of the gas concentration measurement method of the present invention.

[0036] Figure 2 It is a schematic diagram of a gas concentration measuring device of the present invention, wherein a light source generates a first detection light beam.

[0037] Figure 3 It is a schematic diagram of a gas concentration measuring device of the present invention, wherein a light source generates a calibration light beam.

[0038] Figure 4 It is a schematic diagram of a gas concentration measuring device of the present invention, wherein the light source generates a second detection light beam.

[0039] Figure 5 It is a schematic diagram of the operation of the light source supply device of the gas concentration measuring device of the present invention.

[0040] Description of reference numerals:

[0041] 10: Gas inlet and outlet channels

[0042] 12: Channel air inlet

[0043] 14: Channel vent

[0044] 20: Gas detection chamber

[0045] 22: Chamber

[0046] 24: Hollow cavity

[0047] 26: Detect air intake

[0048] 28: Detect vents

[0049] 30: Temperature sensing component

[0050] 40: Pressure sensing components

[0051] 42: Pressure sensing air inlet port

[0052] 50: Light source supply device

[0053] 51: hood

[0054] 52: Light source

[0055] 52a: First light emitting diode assembly

[0056] 52b: Second light emitting diode assembly

[0057] 52c: The third light emitting diode assembly

[0058] 54: Spectral Components

[0059] 55: First detection beam

[0060] 55a: First detection spectrophotometry

[0061] 55b: Second detection spectrophotometry

[0062] 56: Correction beam

[0063] 56a: First calibration spectrometer

[0064] 56b: Second correction spectrophotometer

[0065] 57: Second detection beam

[0066] 60: Light sensing device

[0067] 62: First light sensing component

[0068] 64: Second light sensing component

[0069] 70: Processing Components

[0070] 80: Light source control component

[0071] 100: Gas concentration measuring device

[0072] 200: Gas to be tested

[0073] S10, S12, S14, S16, S18, S20, S22: Steps

[0074] t1, t2: interval DETAILED DESCRIPTION

[0075] In order to facilitate understanding of the technical features, contents and advantages of the present invention and the effects that can be achieved, the present invention is hereby described in detail in the form of embodiments in conjunction with the drawings. The drawings used therein are only for illustration and auxiliary description purposes, and may not be the actual proportions and precise configurations after the implementation of the present invention. Therefore, the proportions and configurations of the attached drawings should not be interpreted or limited to the scope of rights of the present invention in actual implementation. In addition, for ease of understanding, the same elements in the following embodiments are described with the same symbols.

[0076] In addition, the words used throughout the specification and claims generally have the ordinary meaning of each word used in this field, in the content disclosed herein, and in the specific content, unless otherwise noted. Certain words used to describe the present invention will be discussed below or elsewhere in this specification to provide additional guidance to those skilled in the art in the description of the present invention.

[0077] The use of “first”, “second”, “third”, etc. in this document does not specifically refer to the order or sequence, nor is it used to limit the present invention. It is only used to distinguish components or operations described with the same technical terms.

[0078] Secondly, the words "include", "including", "have", "contain" and the like used in this article are open terms, which mean including but not limited to.

[0079] In order to solve the problems of long preheating time, high starting voltage and low light source utilization rate caused by the use of low-pressure mercury lamps as ultraviolet light sources in the traditional technology when measuring the concentration of ozone gas, and the use of a single wavelength in the traditional technology resulting in a too small detection concentration range. The present invention proposes a gas concentration measurement device and method for measuring the gas concentration of a gas to be measured (such as continuously flowing ozone). The light source of the light source supply device of the present invention provides at least one (including) or more ultraviolet light wavelengths to accurately and quickly measure the ozone concentration. The present invention can solve the problem of the traditional technology using low-pressure mercury lamps as ultraviolet light sources, and solve the problem of measurement errors caused by dirty quartz glass tube walls in the traditional technology.

[0080] See also Figures 1 to 5 , Figure 1 is a flow chart of the gas concentration measurement method of the present invention, Figure 2 It is a schematic diagram of a gas concentration measuring device of the present invention, wherein a light source generates a first detection light beam. Figure 3 It is a schematic diagram of a gas concentration measuring device of the present invention, wherein a light source generates a calibration light beam. Figure 4 It is a schematic diagram of a gas concentration measuring device of the present invention, wherein the light source generates a second detection light beam. Figure 5 It is a schematic diagram of the operation of the light source supply device of the gas concentration measuring device of the present invention.

[0081] like Figure 1 See also Figures 2 to 5As shown, the gas concentration measurement method of the present invention comprises at least the following steps: step S10, providing a gas detection cavity, wherein the gas detection cavity is connected to the gas inlet and outlet channel, so that the gas to be detected is present in the chamber of the gas detection cavity; step S12, performing a temperature detection step to detect the gas temperature of the gas to be detected; step S14, performing a pressure detection step to detect the gas pressure of the gas to be detected; step S16, providing a first detection light beam and a correction light beam, wherein the absorbance of the gas to be detected for the first detection light beam is greater than the absorbance of the gas to be detected for the correction light beam; step S18, performing a spectroscopic step to respectively split the first detection light beam into a first detection light beam and a second detection light beam that pass through and do not pass through the gas detection cavity and the gas to be detected therein, and to respectively split the correction light beam into a first correction light beam and a second correction light beam that pass through and do not pass through the gas detection cavity and the gas to be detected therein. Step S20, a light intensity measurement step is performed to measure the light intensity of the first detection light spectrum of the first detection light beam after passing through the gas to be measured and the light intensity of the second detection light spectrum, wherein the light intensity change in the above light intensity measurement step is caused by the gas to be measured and the gas detection chamber, so as to calculate the first detection concentration of the gas to be measured; and step S22, a calibration step is performed to measure the light intensity of the first calibration light spectrum of the calibration light beam after passing through the gas to be measured and the light intensity of the second calibration light spectrum, wherein the light intensity change in the above calibration step is caused by the gas detection chamber, so as to calculate the calibration concentration of the gas to be measured (i.e., the error caused by the gas detection chamber), wherein the gas concentration of the gas to be measured can be obtained by deducting the calibration concentration from the first detection concentration. Although the present invention uses the above step sequence to illustrate the gas concentration measurement method, the present invention is not limited thereto, and any step sequence arrangement, even adding or deleting steps, as long as it can be used to obtain the gas concentration of the gas to be measured, belongs to the scope of protection requested by the present invention.

[0082] The gas concentration measuring device 100 of the present invention at least comprises a gas detection chamber 20, a temperature sensing component 30, a pressure sensing component 40, a light source supply device 50 and a light sensing device 60. The gas detection chamber 20 is connected to the gas inlet and outlet channel 10, so that the chamber 22 of the gas detection chamber 20 contains the gas 200 to be measured, so as to measure the gas concentration of the gas 200 to be measured. The two ends of the gas inlet and outlet channel 10 are respectively the channel inlet hole 12 and the channel outlet hole 14, which are used to introduce and export the gas 200 to be measured accordingly. Although the present invention uses ozone as the gas 200 to be measured to illustrate the gas concentration measuring device and method of the present invention, it is not used to limit the present invention. Any gas that is suitable for the gas concentration measuring device and method of the present invention belongs to the scope of protection requested by the present invention.

[0083] The channel inlet hole 12 of the gas inlet and outlet channel 10 is, for example, connected to a test gas supply source (not shown) so as to introduce the test gas 200 provided by the test gas supply source into the gas inlet and outlet channel 10. The channel outlet hole 14 of the gas inlet and outlet channel 10 is, for example, connected to a test gas application end (not shown), such as but not limited to a sterilization device or a semiconductor wafer processing chamber. The test gas 200, the test gas supply source and the test gas application end of the present invention are not limited to the above examples, and any supply source of the test gas and all possible applications are within the scope of protection claimed by the present invention.

[0084] The gas detection chamber 20 is connected to the gas inlet and outlet channel 10, for example, it is located between the two ends of the gas inlet and outlet channel 10, wherein the gas detection chamber 20 is, for example, a quartz glass tube including a transparent material such as quartz glass, wherein at least the upper and lower ends of the quartz glass tube are, for example, transparent materials such as quartz glass. The gas detection chamber 20 is not limited to quartz glass, and can also be other materials, as long as it has low or no absorption brightness for the detection beam and the correction beam, it can be suitable for the present invention. The gas detection chamber 20 is, for example, a hollow cavity 24 having a chamber 22, and the two ends of the hollow cavity 24 respectively have a detection air inlet 26 and a detection air outlet 28 connected to the chamber 22 of the hollow cavity 24. The gas 200 to be detected is, for example, a chamber 22 of the hollow cavity 24 that continuously flows through the gas detection chamber 20.

[0085] The temperature sensing component 30 is, for example, disposed on the gas inlet and outlet channel 10 to detect the gas temperature of the gas to be measured 200. The pressure sensing component 40 is, for example, disposed on the gas inlet and outlet channel 10, and is, for example, connected to the inside of the gas inlet and outlet channel 10 via the pressure sensing air inlet port 42 to detect the gas pressure of the gas to be measured 200 inside the gas inlet and outlet channel 10. However, the type, form and setting position of the temperature sensing component 30 and the pressure sensing component 40 are not particularly limited. In the embodiment of the present invention, the temperature sensing component 30 and the pressure sensing component 40 can be any existing commercially available components and can be, for example, disposed on the gas inlet and outlet channel 10, the gas detection chamber 20 and / or the gas supply source to be measured. As long as they can be used to detect the gas temperature and gas pressure of the gas to be measured 200, they can be applied to the present invention.

[0086] The light source supply device 50 of the gas concentration measuring device 100 of the present invention includes at least one light source 52 and a beam splitter 54. The present invention can split the light beam emitted by the light source 52 of the light source supply device 50 into two sub-beams by the beam splitter 54. The two sub-beams are respectively the gas 200 to be measured that has passed through and the gas 200 not to be measured in the gas detection chamber 20. Then, the light sensing device 60 is used to measure the intensity of the two sub-beams respectively. If the gas 200 to be measured has a higher absorption brightness for the above-mentioned light beam, the intensity difference of the two sub-beams will come from the gas 200 to be measured and the gas detection chamber 20, which means that the attenuation of the light intensity is caused by the gas 200 to be measured and the gas detection chamber 20. However, when the gas to be measured 200 has a lower absorbance for the above-mentioned light beam (the lower the absorbance, the better, or even no absorbance is better), the intensity difference between the two sub-light beams will only come from the gas detection chamber 20, which means that the attenuation of the light intensity is only caused by the gas detection chamber 20, such as the light absorption interference error caused by the dirt or sediment on the tube wall of the gas detection chamber 20. In other words, the present invention can provide two light beams of different wavelengths (i.e., with high absorbance of the gas to be measured and low absorbance of the gas to be measured or no absorbance of the gas to be measured) through the light source 52, and by deducting the light absorption interference error caused by the dirt or sediment on the tube wall of the gas detection chamber 20, the gas concentration of the gas to be measured 200 can be accurately detected.

[0087] In an embodiment of the present invention, the light source supply device 50 is, for example, disposed at the first side of the gas detection chamber 20, and is used to use the light source 52 to provide the first detection beam 55 and the correction beam 56 respectively at the first side of the gas detection chamber 20. The light source 52 is, for example, a light emitting diode component, so as to improve the problem that the conventional ultraviolet light source diverges to the surroundings, resulting in low utilization rate. The light source supply device 50, for example, but not limited to, has a cover 51 disposed at the first side of the gas detection chamber 20, and the light source 52 and the light splitting component 54 are both located inside the cover 51, but the cover 51 is not limited to having a hollow interior or a solid interior. For example, the present invention can, for example, generate the first detection beam 55 by the first light emitting diode component (LED) 52a, and generate the correction beam 56 by the second light emitting diode component 52b. However, the present invention is not limited thereto, and the present invention can also, for example, generate the first detection beam 55 and the correction beam 56 by a single light emitting diode component (LED). One of the features of the present invention is that the absorbance of the gas 200 to be measured for the first detection beam 55 is preferably greater than the absorbance of the gas 200 to be measured for the calibration beam 56, wherein the greater the difference between the two absorbances, the better. For example, the wavelength of the first detection beam 55 is within the absorption wavelength range of the gas 200 to be measured, and the wavelength of the calibration beam 56 can be within or outside the absorption wavelength range of the gas 200 to be measured. As long as the absorbance of the gas 200 to be measured for the first detection beam 55 is greater than the absorbance of the gas 200 to be measured for the calibration beam 56, it can be applied to the present invention. Among them, the wavelength of the calibration beam 56 is preferably outside the absorption wavelength range of the gas 200 to be measured, which means that when the calibration beam 56 passes through the gas 200 to be measured in the chamber 22 of the gas detection chamber 20, the calibration beam 56 will not be absorbed by the gas 200 to be measured, so the error caused by the gas detection chamber 20 can be obtained. Taking ozone as an example, the first detection beam 55 and the correction beam 56 are ultraviolet lights of different wavelengths, the wavelength range is between about 200nm and about 370nm, or the correction beam 56 is outside the above wavelength range, wherein the ultraviolet light absorption brightness of the first detection beam 55 is higher than the ultraviolet light absorption brightness of the correction beam 56. The absorption spectrum of ozone is between about 200nm and about 370nm, and the maximum absorption wavelength is about 254nm. Therefore, the present invention can, for example, select a first light-emitting diode component 52a with an ultraviolet light wavelength of 254nm, which is the maximum absorption of ozone gas, to generate the first detection beam 55, and select a second light-emitting diode component 52b with an ultraviolet light wavelength of 385nm, which is the minimum absorption of ozone gas, to generate the correction beam 56. In addition, the present invention preferably turns on and off the first light-emitting diode component 52a and the second light-emitting diode component 52b in an alternating manner (for example, in an intermittent manner such as an interlaced manner such as an interval manner or a pulse manner).Taking the pulse type as an example, the pulse width can be any value between 0.1ms and 5ms, the period can be any value between 0.1s and 1s, and the frequency can be any value between 100Hz and 1Hz. Taking the interval type as an example, the present invention can repeatedly open and close the first detection light beam 55 and the correction light beam 56 at regular time intervals. The above data are only examples and are not intended to limit the scope of the present invention. Figure 2 and Figure 5 As shown, the interval (t1) represents that the first LED component 52a is in the on state, while the second LED component 52b is in the off state. Figure 3 and Figure 5 As shown, the interval (t2) represents that the first LED component 52a is in the off state, and the second LED component 52b is in the on state. The above interval is, for example, a time interval. According to the Beer-Lambert law, the present invention can detect ozone gas in the Hartley-Huggins spectral absorption band (200nm-370nm). For example, the maximum value of the ozone gas concentration that can be detected by the present invention can be, for example, about 400g / Nm 3 , where g is grams, Nm 3 Or, for example, the ozone gas concentration that can be detected by the present invention is within a range of 1 ppm to 250 ppm.

[0088] As mentioned above, the light splitting component 54 of the present invention can split the first detection light beam 55 into a first detection light split 55a and a second detection light split 55b (such as Figure 2 As shown), and the correction beam 56 is divided into a first correction beam 56a and a second correction beam 56b (as shown Figure 3 As shown in FIG. 1 , the first detection light spectrum 55a and the first correction light spectrum 56a pass through the gas detection chamber 20 and the gas 200 to be detected therein, while the second detection light spectrum 55b and the second correction light spectrum 56b do not pass through the gas detection chamber 20 and the gas 200 to be detected therein. The light spectrum component 54 is, for example, an inclined light spectrum plate, which is disposed between the light source 52 and the second light sensing component 64 (as described later), so that the first detection light spectrum 55a and the first correction light spectrum 56a have the same first light path, and the second detection light spectrum 55b and the second correction light spectrum 56b have the same second light path.

[0089] In addition, the optical sensing device 60 of the gas concentration measuring device 100 of the present invention at least includes a first optical sensing component 62 and a second optical sensing component 64, which are respectively located at the second side and the first side of the gas detection chamber 20. The first detection light beam 55 (ultraviolet light) provided by the light source 52 of the present invention passes through the light splitting component 54, and the first detection light 55a will pass through the gas detection chamber 20 made of quartz glass along the first light path and reach the first optical sensing component 62 to establish the light intensity containing the gas 200 (ozone gas) to be detected and the gas detection chamber 20, and the second detection light 55b of the first detection light beam 55 (ultraviolet light) passes through the light splitting component 54 along the second light path and reaches the second optical sensing component 64 to establish the light intensity without the gas 200 (ozone gas) to be detected and the gas detection chamber 20. Similarly, the present invention can also establish the light intensity containing the gas 200 (ozone gas) to be tested and the gas detection cavity 20 and the light intensity excluding the gas 200 (ozone gas) to be tested and the gas detection cavity 20 for the first correction spectrum 56a and the second correction spectrum 56b of the correction beam 56 provided by the light source 52, respectively.

[0090] According to the Beer-Lambert law known to those skilled in the art, when light penetrates a gas, the light's absorbance is proportional to the absorption coefficient, the optical path length, and the gas concentration. Therefore, the present invention can calculate the first detection concentration and the calibration concentration of the gas 200 to be detected by using the Beer-Lambert law, and the gas concentration of the gas 200 to be detected can be obtained by deducting the calibration concentration from the first detection concentration.

[0091] In short, the first light sensing component 62 and the second light sensing component 64 of the light sensing device 60 of the present invention can respectively measure the light intensity of the first detection spectrophotometer 55a and the light intensity of the second detection spectrophotometer 55b of the first detection light beam 55, so as to calculate the first detection concentration of the gas 200 to be measured, and respectively measure the light intensity of the first correction spectrophotometer 56a and the light intensity of the second correction spectrophotometer 56b of the correction light beam 56, so as to calculate the correction concentration of the gas 200 to be measured, wherein the gas concentration of the gas 200 to be measured can be obtained by deducting the correction concentration from the first detection concentration.

[0092] Calculate the concentration of various gases according to the Beer-Lambert law The formula: Taking ozone as an example, the gas 200 to be tested is I, which is the value of the UV light intensity containing ozone gas (first light path), I0 is the value of the UV light intensity not containing ozone gas (second light path), α is the absorption coefficient of ozone gas, P is the gas pressure of ozone gas, T is the gas temperature of ozone gas (in degrees K), psi is the pressure (in pounds per square inch (absolute)), and l is the optical path length of ozone gas.

[0093] In detail, the gas concentration measuring device 100 of the present invention may further include a processing component 70, for example, the processing component 70 is electrically connected to the optical sensing device 60, the temperature sensing component 30 and the pressure sensing component 40, and the processing component 70 is, for example, a processing control component. The processing component 70, for example, brings the gas temperature of the gas 200 to be measured, the gas pressure of the gas 200 to be measured, the light intensity of the first detection spectrophotometer 55a, the light intensity of the second detection spectrophotometer 55b, the optical path length of the gas 200 to be measured in the chamber 22 of the gas detection chamber 20 and the absorption coefficient of the gas 200 to be measured into the calculation of the concentration of various gases disclosed by the Beer-Lambert law. The first detection concentration of the gas 200 to be tested is calculated by the formula The processing component 70 further calculates the ozone concentration by, for example, applying the gas temperature of the gas 200 to be measured, the gas pressure of the gas 200 to be measured, the light intensity of the first calibration spectrophotometer 56a, the light intensity of the second calibration spectrophotometer 56b, the optical path length of the gas 200 to be measured in the chamber 22 of the gas detection chamber 20, and the absorption coefficient of the gas 200 to the Beer-Lambert law. The calibration concentration of the gas to be tested is calculated from the formula Among them, the first detection concentration Subtract the corrected concentration Then you can get the gas concentration of the gas to be tested 200 (Right now, ).

[0094] The light source supply device 50 of the present invention further selectively includes a light source control component 80, which is used to control the light source 52 of the light source supply device 50 to alternately provide the first detection beam 55 and the correction beam 56 in a light-emitting mode. For example, the light source control component 80 is, for example, but not limited to, a UV light source pulse controller. The above-mentioned processing component 70 can be, for example, electrically connected to the light source control component 80. Among them, the above-mentioned light-emitting mode is, for example, a pulsed or intermittent opening and closing to provide the first detection beam 55 and the correction beam 56. In addition, the light source 52, for example, has one or more light-emitting components to provide the first detection beam 55 and the correction beam 56. For example, the present invention can, for example, respectively provide the first detection beam 55 and the correction beam 56 by using a plurality of light-emitting components, such as a first light-emitting diode component 52a and a second light-emitting diode component 52b. The first light-emitting diode component 52a, for example, generates the first detection beam 55, and the second light-emitting diode component 52b, for example, generates the correction beam 56. However, the present invention is not limited thereto, and since a single light emitting diode component (LED) may also contain a plurality of solid-state light emitting diode dies with different wavelengths, the present invention may also, for example, generate the first detection beam 55 and the correction beam 56 respectively by a single light emitting component (such as an LED component). In addition, the present invention may also, for example, adjust the brightness and / or wavelength of the first detection beam 55 and the correction beam 56 by a light source control component 80.

[0095] In addition, another feature of the present invention is that when the first detection concentration measured above Subtract the corrected concentration The gas concentration of the gas to be tested is 200 When the value is lower than a preset value, the light source 52 can provide at least one second detection beam 57 to replace the role of the first detection beam 55, such as Figure 4 The light splitting component 54 also splits the second detection light beam 57 into a third detection light beam 57a and a fourth detection light beam 57b, so as to obtain the first detection concentration as the first detection light beam 55. The wavelength and / or brightness of the second detection beam 57 is different from the wavelength and / or brightness of the first detection beam 55. Subtract the corrected concentration Then you can get the gas concentration of the gas to be tested 200 (Right now, ). The present invention is not limited to changing the wavelength or brightness of the detection beam in manual mode or automatic mode. Taking the automatic mode to change the wavelength of the detection beam as an example, when the gas concentration of the gas 200 to be tested (such as ozone) is detected to be lower than a certain default value, for example, lower than 10% of the default scale (for example, full scale), the light source control component 80 can, for example, control the light source 52 to provide a second detection beam 57 in real time or subsequently with a third light-emitting diode component 52c, wherein the third light-emitting diode component 52c is, for example, a low-concentration ozone absorption light source. However, the present invention is not limited to this, and the present invention can also, for example, generate a second detection beam 57 to replace the first detection beam 55 by a single light-emitting diode component (LED). The light emission pattern between the second detection beam 57 and the correction beam 56 is, for example, the same as the light emission pattern between the first detection beam 55 and the correction beam 56.

[0096] The present invention utilizes the characteristics that the same gas to be measured (such as ozone) has different absorbances for light of different wavelengths, and utilizes the characteristics that the absorbance of light of the same wavelength corresponds to the gas concentration of the gas to be measured (such as ozone), so as to accurately detect the gas concentration of the gas to be measured in real time. Although the present invention uses ozone as an example of the gas to be measured, the present invention is not limited to this. As long as any gas has different absorbances for different light wavelengths, the gas concentration of this gas can be measured using the gas concentration measurement device and method of the present invention. The present invention can not only be used to measure and calibrate the gas to be measured in a flowing or non-flowing state, but can even be used to measure and calibrate the gas to be measured in a continuous flow, for example, it can be used to feed back the gas supply source to be measured (such as an ozone generator or sterilization equipment) to generate ozone gas of sufficient concentration. For example, if the gas supply source to be measured supplies the gas to be measured in a continuous flow, the present invention can also achieve the effect of measuring the gas concentration of the continuously flowing gas to be measured in real time, accurately and quickly, and can, for example, replace the detection light beam with the corresponding wavelength in real time according to the gas to be measured in different concentration ranges, and can also provide the effect of real-time correction. The gas concentration measuring device and method of the present invention can be applied to sterilization equipment, semiconductor wafer manufacturing or ozone generators, etc., where a device capable of accurately, stably and quickly feeding back ozone concentration is required for the gas application end to be measured.

[0097] In summary, the gas concentration measurement device and method of the present invention have the following effects:

[0098] (1) Compared with the conventional technology that uses a low-pressure mercury lamp as an ultraviolet light source, the gas concentration measuring device of the present invention uses a small-volume light-emitting diode component as an ultraviolet light source, which can respond to ozone gas in different concentration ranges, so there is no need to replace the machine.

[0099] (2) The present invention uses a light-emitting diode assembly as a UV light source and does not require a preheating time, so it can provide a UV light source in a pulsed switching manner to achieve a real-time correction effect.

[0100] (3) The present invention uses a light-emitting diode component as an ultraviolet light source to measure the gas concentration of a continuously flowing gas to be measured in real time, accurately and quickly, and does not require preheating, has a low starting voltage, contains no mercury vapor and has a long service life.

[0101] (4) The present invention can provide detection light beams of different wavelengths in real time in response to different concentration ranges of the gas to be tested, thereby providing real-time correction and feedback.

[0102] (5) The present invention can solve the problem of measurement error caused by the dirty quartz glass tube wall in traditional technology.

[0103] The above description is for illustrative purposes only and is not intended to be limiting. Any equivalent modifications or changes made thereto without departing from the spirit and scope of the present invention shall be included in the appended claims.

Claims

1. A gas concentration measuring device, characterized in that: The method is used to measure a gas concentration of a gas to be tested, and at least comprises: A gas detection chamber, the gas detection chamber is connected to a gas inlet and outlet channel, so that the gas to be detected is contained in one chamber of the gas detection chamber; A temperature sensing component, used for detecting a gas temperature of the gas to be tested; A pressure sensing component for detecting a gas pressure of the gas to be tested; A light source supply device, disposed on a first side of the gas detection chamber, comprises: At least one light source, for providing a first detection light beam and a calibration light beam, wherein an absorbance of the gas to be detected to the first detection light beam is greater than an absorbance of the gas to be detected to the calibration light beam; and A spectroscopic component, for splitting the first detection light beam into a first detection light beam and a second detection light beam, and splitting the correction light beam into a first correction light beam and a second correction light beam, wherein the first detection light beam and the first correction light beam pass through the gas detection cavity and the gas to be detected in the gas detection cavity, and the second detection light beam and the second correction light beam do not pass through the gas detection cavity and the gas to be detected in the gas detection cavity; and A light sensing device, which at least includes a first light sensing component and a second light sensing component, which are respectively located on a second side and the first side of the gas detection chamber, and are used to respectively measure a light intensity of the first detection spectrum of the first detection light beam and a light intensity of the second detection spectrum, so as to calculate a first detection concentration of the gas to be detected, and to respectively measure a light intensity of the first correction spectrum of the correction light beam and a light intensity of the second correction spectrum, so as to calculate a correction concentration of the gas to be detected, wherein the gas concentration of the gas to be detected is obtained by deducting the correction concentration from the first detection concentration.

2. The gas concentration measuring device as claimed in claim 1, characterized in that: The two ends of the gas inlet and outlet channel are respectively a channel air inlet hole and a channel air outlet hole for correspondingly introducing and exporting the gas to be tested. The gas detection cavity is a hollow cavity having the cavity. The two ends of the hollow cavity are respectively provided with a detection air inlet hole and a detection air outlet hole connected to the cavity of the hollow cavity, wherein the gas to be tested continuously flows through the cavity of the hollow cavity of the gas detection cavity.

3. The gas concentration measuring device as claimed in claim 1, characterized in that: It also includes a processing component for calculating the first detection concentration of the gas to be measured based on the gas temperature of the gas to be measured, the gas pressure of the gas to be measured, the light intensity of the first detection spectrophotometry, the light intensity of the second detection spectrophotometry, an optical path length of the gas to be measured in the chamber of the gas detection chamber, and an absorption coefficient of the gas to be measured, wherein the processing component further calculates the correction concentration of the gas to be measured based on the gas temperature of the gas to be measured, the gas pressure of the gas to be measured, the light intensity of the first correction spectrophotometry, the light intensity of the second correction spectrophotometry, the optical path length of the gas to be measured in the chamber of the gas detection chamber, and the absorption coefficient of the gas to be measured.

4. The gas concentration measuring device as claimed in claim 1, characterized in that: The gas to be detected is ozone, and the first detection light beam and the calibration light beam provided by the light source are ultraviolet light.

5. The gas concentration measuring device as claimed in claim 1, characterized in that: The light splitting component is an inclined light splitter, so that the first detection light splitting and the first correction light splitting have the same first light path, and the second detection light splitting and the second correction light splitting have the same second light path.

6. The gas concentration measuring device as claimed in claim 1, characterized in that: The gas detection cavity is a quartz glass tube.

7. The gas concentration measuring device as claimed in claim 1, characterized in that: The wavelength of the first detection light beam is within an absorption wavelength range of the gas to be detected, and the wavelength of the correction light beam is outside the absorption wavelength range of the gas to be detected, so as to correct a light absorption interference error generated by the gas detection cavity.

8. The gas concentration measuring device as claimed in claim 1, characterized in that: The light source supply device further comprises a light source control component for controlling the light source of the light source supply device to alternately provide the first detection light beam and the correction light beam in a light emission mode.

9. The gas concentration measuring device as claimed in claim 8, characterized in that: The light emitting mode is pulsed or intermittently turned on and off to provide the first detection light beam and the correction light beam.

10. The gas concentration measuring device according to claim 1 or 8, characterized in that: When the gas concentration of the gas to be tested obtained by deducting the correction concentration from the first detection concentration is lower than a default value, the light source provides at least one second detection beam to replace the first detection beam, and the wavelength and / or brightness of the second detection beam are different from the wavelength and / or brightness of the first detection beam.

11. The gas concentration measuring device according to claim 10, characterized in that: The light source has one or more light emitting components for providing the first detection light beam and the correction light beam.

12. A method for measuring gas concentration, characterized in that: The method for measuring a gas concentration of a gas to be tested comprises at least the following steps: Providing a gas detection chamber, the gas detection chamber is connected to a gas inlet and outlet channel, so that the gas to be detected is contained in one chamber of the gas detection chamber; Performing a temperature detection step to detect a gas temperature of the gas to be detected; Performing a pressure detection step to detect a gas pressure of the gas to be tested; Providing a first detection beam and a calibration beam, wherein an absorbance of the gas to be detected to the first detection beam is greater than an absorbance of the gas to be detected to the calibration beam; Performing a light splitting step to split the first detection light beam into a first detection light beam and a second detection light beam respectively indicating that the first detection light beam has passed through and has not passed through the gas to be detected in the gas detection cavity, and to split the correction light beam into a first correction light beam and a second correction light beam respectively indicating that the first detection light beam has passed through and has not passed through the gas detection cavity and the gas to be detected in the gas detection cavity; Performing a light intensity measurement step to respectively measure a light intensity of the first detection spectra and a light intensity of the second detection spectra of the first detection light beam, so as to calculate a first detection concentration of the gas to be detected; and A calibration step is performed to respectively measure a light intensity of the first calibration spectra and a light intensity of the second calibration spectra of the calibration light beam, so as to calculate a calibration concentration of the gas to be measured, wherein the gas concentration of the gas to be measured is obtained by deducting the calibration concentration from the first detection concentration.

13. The gas concentration measurement method according to claim 12, characterized in that: The gas to be tested flows continuously through the chamber of the gas detection cavity.

14. The gas concentration measurement method according to claim 12, wherein: The light intensity measurement step further includes calculating the first detection concentration of the gas to be measured based on the gas temperature of the gas to be measured, the gas pressure of the gas to be measured, the light intensity of the first detection spectrophotometer, the light intensity of the second detection spectrophotometer, an optical path length of the gas to be measured in the chamber of the gas detection chamber, and an absorption coefficient of the gas to be measured, and the calibration step further includes calculating the calibration concentration of the gas to be measured based on the gas temperature of the gas to be measured, the gas pressure of the gas to be measured, the light intensity of the first calibration spectrophotometer, the light intensity of the second calibration spectrophotometer, the optical path length of the gas to be measured in the chamber of the gas detection chamber, and the absorption coefficient of the gas to be measured.

15. The gas concentration measurement method according to claim 12, wherein: The gas to be detected is ozone, and the first detection light beam and the calibration light beam are ultraviolet light.

16. The gas concentration measurement method according to claim 12, wherein: The light splitting step uses a light splitting component to make the first detection light split and the first correction light split have the same first light path, and the second detection light split and the second correction light split have the same second light path.

17. The gas concentration measurement method according to claim 12, characterized in that: The gas detection cavity is a quartz glass tube.

18. The gas concentration measurement method according to claim 12, wherein: The wavelength of the first detection light beam is within an absorption wavelength range of the gas to be detected, and the wavelength of the correction light beam is outside the absorption wavelength range of the gas to be detected, so as to correct a light absorption interference error caused by the material of the gas detection cavity.

19. The gas concentration measurement method according to claim 12, wherein: The method further comprises utilizing a light source control component to control a light source to provide the first detection light beam and the correction light beam alternately in a light emission mode.

20. The gas concentration measurement method according to claim 19, wherein: The light emitting mode is pulsed or intermittently turned on and off to provide the first detection light beam and the correction light beam.

21. The gas concentration measurement method according to claim 12 or 18, characterized in that: When the gas concentration of the gas to be tested obtained by deducting the correction concentration from the first detection concentration is lower than a default value, at least one second detection beam is provided to replace the first detection beam, and the wavelength and / or brightness of the second detection beam is different from the wavelength and / or brightness of the first detection beam.

22. The gas concentration measurement method according to claim 21, characterized in that: The method further comprises utilizing a light source having one or more light emitting components to provide the first detection light beam and the calibration light beam.

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