Remote plasma generator

Abstract

The invention belongs to the technical field of plasmas, and provides a remote plasma generator, which comprises an ionization cavity, an ignition assembly, a magnetic core assembly and a heat dissipation assembly, and is characterized in that an air channel is formed in the ionization cavity; the ignition assembly is used for conducting excitation ignition on gas in the gas channel to form plasma. The ignition assembly comprises a dielectric sheet, a sealing structure and an ignition structure, and the dielectric sheet is attached to the ionization cavity; the sealing structure is arranged on the outer side of the dielectric sheet; the ignition structure is used for performing excitation ignition on gas; an anodic oxidation coating film is formed on the inner wall of the ionization cavity; an anodic oxidation coating film is formed on the surface of the dielectric sheet through an anodic oxidation process. The anodic oxidation coating film is formed on the surface of the dielectric sheet, the dielectric sheet serves as a dielectric material, meanwhile, the anodic oxidation coating film on the surface is tightly attached to the anodic oxidation coating film in the ionization cavity, the contact surface stress is increased, the dielectric sheet is prevented from cracking, gas corrosion caused by plasma bombardment is effectively reduced, and the service life is prolonged.

Description

Technical Field

[0001] The present invention relates to the field of plasma technology, and particularly to a remote plasma generator. Background Art

[0002] A remote plasma source is a device used to generate plasma, which is commonly used in fields such as photovoltaics, chemical engineering, and semiconductors. In the field of semiconductor manufacturing, as a core process equipment, the remote plasma generator realizes high-precision cleaning and surface treatment of the process chamber through non-contact plasma dissociation technology. This device is usually composed of a plasma source dissociation chamber, a gas transport system, an electromagnetic field coupling module, and a thermal management unit. Its core function is to ionize fluorine-containing feed gases (such as CF4, NF3, etc.) in the dissociation zone outside the chamber to generate highly reactive fluorine radicals (F*) and ions (F⁻), and then transport them to the process chamber through the synergistic action of directional airflow and electromagnetic field. During this process, the active fluorine components react with the pollutants remaining in the chamber (such as silicon oxide, silicon nitride, etc.) to form volatile products (such as SiF4), which are finally discharged from the system by the vacuum pump group, thereby achieving atomic-level surface cleaning and ensuring the uniformity and repeatability of key processes such as thin film deposition and etching.

[0003] Currently, for remote plasma generators, a gas in the chamber is excited and ionized to generate plasma through an ignition structure. The dielectric layer in the ignition structure plays an important role in aspects such as electrical isolation and uniform electric field distribution, and is generally sealed separately inside the ignition structure. However, after long-term use, the dielectric layer may crack or even break. After the dielectric layer cracks, it will cause sealing failure, leakage of plasma or reaction gases, damage to the vacuum environment, and affect process stability (such as thin film deposition / etching uniformity). After fragmentation, the fragments enter the plasma region, may be ionized or sputtered onto the substrate surface, resulting in metal contamination on the surface of semiconductor / optical devices, and seriously reducing the product yield. Summary of the Invention

[0004] Aiming at the defects in the prior art, the present invention provides a remote plasma generator to solve the problem that the dielectric layer in the ignition structure of the current remote plasma generator will crack or even break during use, affecting the service life.

[0005] A remote plasma generator provided by the present invention includes: An ionization chamber, an air passage is formed in the ionization chamber, all corners of the air passage are rounded, and the air inlet and the air outlet of the air passage are arranged diagonally; An ignition assembly, arranged on the other diagonal of the air passage, for exciting and igniting the gas in the air passage to form plasma; A magnetic core assembly, arranged between the air passages, for providing a continuous current to continuously ionize after plasma ignition; A heat dissipation component is disposed on both sides of the ionization cavity; The ignition component includes: A dielectric sheet that fits against the ionization cavity; A sealing structure is disposed outside the dielectric sheet for ensuring the airtightness between the ionization cavity and the dielectric sheet; An ignition structure for discharging the dielectric sheet to excite and ignite the gas in the air passage to form a plasma; An anodic oxidation coating is formed on the inner walls of the air inlet, the air outlet, and the air passage; an anodic oxidation coating is formed on the surface of the dielectric sheet.

[0006] As can be seen from the above technical solutions, in a remote plasma generator provided by the present invention, an anodic oxidation coating is formed on the surface of the dielectric sheet through an anodic oxidation process. The dielectric sheet serves as a dielectric material, and at the same time, the anodic oxidation coating on the surface is closely attached to the anodic oxidation coating in the ionization cavity, which can increase the contact surface stress, effectively reduce the gas corrosion caused by plasma bombardment, and extend the service life. Since the corners of the air passage are all set as smooth rounded corners, when the gas moves along the path, the probability of contact between the plasma and the inner wall of the cavity can be reduced, which is beneficial to the movement of the plasma; at the same time, the service life of the cavity is increased, the dust particles generated in the cavity are reduced, the cleaning ability is improved, and it is beneficial to the efficient dissociation of the remote plasma.

[0007] Optionally, the ionization cavity includes: A first gas cavity, the air inlet is disposed at the top of the first gas cavity, a first air passage opening is formed on the side of the first gas cavity, and a first groove is formed on the outer periphery of the first air passage opening; A second gas cavity, the air outlet is disposed at the bottom of the second gas cavity, a second air passage opening is formed on the side of the second gas cavity, a second groove is formed on the outer periphery of the second air passage opening, the first air passage opening and the second air passage opening are connected, the second groove and the second groove cooperate to form a through portion, and the magnetic core assembly is disposed in the through portion; A ceramic ring is disposed between the first air passage opening and the second air passage opening for sealing the air passage; A sealing ring is disposed in cooperation with the ceramic ring.

[0008] As can be seen from the above technical solutions, the ionization cavity includes a first gas cavity and a second gas cavity. Compared with a cavity with a multi-segment splicing structure, the airtightness of the cavity can be improved, and the clean environment inside the cavity can be further ensured; at the same time, the ceramic ring is used as a dielectric material to insulate and block the gap formed between the two gas cavities, improving the airtightness of the air passage and ensuring the clean environment.

[0009] Optionally, a third groove is formed by the ionization cavity cooperating with the ignition assembly, and a through hole communicating with the air passage is formed on the third groove; an anodic oxidation coating is formed on the inner wall of the through hole and the bottom surface of the third groove.

[0010] As can be seen from the above technical solutions, it not only ensures the sealing of the installation part of the ignition assembly, but also improves the corrosion resistance of the cavity and extends the service life.

[0011] Optionally, the heat dissipation assembly includes: A heat dissipation water tray disposed on both sides of the ionization cavity; A condenser for supplying condensed water to the heat dissipation water tray; A heat dissipation fan connected to the condenser, and the heat dissipation fan is used to cooperate with the condenser to achieve combined cooling of air cooling and water cooling.

[0012] Optionally, a water tray flow channel is provided in the heat dissipation water tray, and a plurality of flow blocking copper sheets are spaced apart in the water tray flow channel.

[0013] Optionally, the water tray flow channel includes a main flow channel and an auxiliary flow channel, the cross-sectional area of the main flow channel is larger than that of the auxiliary flow channel, and the main flow channel and the auxiliary flow channel are connected in an M shape.

[0014] Optionally, heat conducting sheets are further provided on the inner side of the heat dissipation water tray; the magnetic core assembly and the ionization cavity are both screwed to the heat dissipation water tray. The heat conducting sheets can improve the heat dissipation effect, and at the same time, the screwing method can ensure the mechanical fixing effect between the heat dissipation water tray and the magnetic core assembly and the ionization cavity, and has both heat dissipation performance.

[0015] Optionally, the heat dissipation water tray and the condenser are connected by a heat dissipation water pipe, and the heat dissipation water pipe includes a first water inlet pipe, a second water inlet pipe, a first water outlet pipe and a second water outlet pipe. One end of the first water inlet pipe is connected to a water inlet joint, and the other end is connected to the water inlet end of the condenser; One end of the second water inlet pipe is connected to the water outlet end of the condenser, and the other end is connected to the water inlet of one of the heat dissipation water trays; The first water outlet pipe is connected between the heat dissipation water trays; The second water outlet pipe leads the water in the heat dissipation water tray to a water outlet joint.

[0016] Optionally, the material of the anodic oxidation coating is alumina, magnesia or titanium oxide; The ionization cavity is made of ceramic or quartz, and the dielectric sheet is made of sapphire or quartz glass.

[0017] Adopting the above technical solutions, the present application has the following beneficial effects: In the present invention, the surface of the dielectric sheet is processed by an anodic oxidation process to form an anodic oxidation coating. The dielectric sheet itself serves as a dielectric material, and at the same time, the anodic oxidation coating on the surface is closely attached to the anodic oxidation coating in the ionization cavity, which can increase the contact surface stress, effectively reduce the gas corrosion caused by plasma bombardment, and extend the service life; For a remote plasma generator provided by the present invention, since the corners of the air passages are all set as smooth rounded corners, when the gas moves along the path, the probability of contact between the plasma and the inner wall of the cavity can be reduced, which is beneficial to the movement of the plasma; at the same time, the service life of the cavity is increased, the dust particles generated in the cavity are reduced, the cleaning ability is improved, and it is beneficial to the efficient dissociation of the remote plasma; In the present invention, the ionization cavity includes a first gas cavity and a second gas cavity. Compared with the cavity with a multi-segment splicing structure, the airtightness of the cavity can be improved, and the clean environment inside the cavity can be further guaranteed; at the same time, the ceramic ring is used as a dielectric material to insulate and block the gap formed between the two gas cavities, improving the airtightness of the air passage and ensuring the clean environment. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following will briefly introduce the drawings required for use in the description of the specific embodiments or the prior art. In all the drawings, similar elements or parts are generally identified by similar reference numerals. In the drawings, the elements or parts are not necessarily drawn to actual scale.

[0019] Figure 1 Shows a schematic diagram of a remote plasma generator provided by an embodiment of the present invention; Figure 2 Shows another schematic diagram of a remote plasma generator provided by an embodiment of the present invention; Figure 3 Shows yet another schematic diagram of a remote plasma generator provided by an embodiment of the present invention; Figure 4 Shows an exploded view of a remote plasma generator provided by an embodiment of the present invention; Figure 5 Shows a schematic diagram of the first gas cavity and the second gas cavity provided by an embodiment of the present invention; Figure 6 Shows a cross-sectional view of the ionization cavity provided by an embodiment of the present invention; Figure 7 Shows Figure 6 An enlarged view of part A; Figure 8 Shows an exploded view of the ignition device provided by an embodiment of the present invention; Figure 9 Shows a schematic diagram of the water tray flow channel provided by an embodiment of the present invention; Figure 10 It shows the surface diagram of the dielectric sheet when conducting a comparative experiment, where the dielectric sheet 210 is attached to the ionization cavity 100 but no alumina film is provided on its surface; Figure 11(a) shows the surface diagram of the dielectric sheet when conducting a comparative experiment, where the dielectric sheet is disposed inside the ignition structure and an alumina film is provided on its surface; Figure 11(b) shows the cross-sectional diagram of the dielectric sheet when conducting a comparative experiment, where the dielectric sheet is disposed inside the ignition structure and an alumina film is provided on its surface; Figure 12(a) shows the surface diagram of the dielectric sheet provided in the embodiment of the present invention when conducting a comparative experiment; Figure 12(b) shows the cross-sectional diagram of the dielectric sheet provided in the embodiment of the present invention when conducting a comparative experiment.

[0020] Reference numerals: 100 - Ionization cavity; 110 - Air passage; 111 - Air inlet; 112 - Air outlet; 120 - First gas cavity; 121 - First air passage port; 122 - First groove; 130 - Second gas cavity; 131 - Second air passage port; 132 - Second groove; 140 - Ceramic ring; 150 - Sealing ring; 160 - Third groove; 161 - Through hole; 170 - Threaded hole; 200 - Ignition assembly; 210 - Dielectric sheet; 220 - Sealing structure; 221 - Ceramic ring; 222 - Sealing ring; 230 - Ignition structure; 231 - Ignition sheet; 232 - Ignition cap; 233 - Ignition head; 240 - Fixed ring; 250 - Fixing structure; 300 - Magnetic core assembly; 310 - Copper strip; 400 - Heat dissipation assembly; 410 - Heat dissipation water tray; 411 - Heat conducting sheet; 412 - Water tray flow channel; 412a - Flow blocking copper sheet; 412b - Main flow channel; 412c - Auxiliary flow channel; 420 - Condenser; 430 - Heat dissipation fan; 440 - Heat dissipation water pipe; 441 - First water inlet pipe; 442 - Second water inlet pipe; 443 - First water outlet pipe; 444 - Second water outlet pipe. Detailed implementation manners

[0021] Hereinafter, embodiments of the technical solution of the present invention will be described in detail with reference to the drawings. The following embodiments are only used to more clearly illustrate the technical solution of the present invention, and thus are only examples and cannot be used to limit the protection scope of the present invention. It should be noted that unless otherwise specified, the technical terms or scientific terms used in this application should have the ordinary meanings understood by those skilled in the art to which the present invention belongs.

[0022] At present, the rectangular corner arc of the remote plasma source cavity is too small, so the movement arc of the plasma is small, resulting in excessive contact between the plasma and the inner wall of the cavity, reducing the service life of the cavity, causing dust particle pollution in the remote plasma source cavity and reducing the cleaning ability, resulting in a decrease in the chip production yield.

[0023] In view of the above problems, in one embodiment, as Figure 1-8 shown, a remote plasma generator is provided, including: An ionization cavity 100, in which an air passage 110 is formed. The corners of the air passage 110 are all rounded, and the air inlet 111 and the air outlet 112 of the air passage 110 are arranged diagonally; An ignition assembly 200, arranged on the other diagonal of the air passage 110, for exciting and igniting the gas in the air passage 110 to form plasma; A magnetic core assembly 300, arranged between the air passages 110, for providing a continuous current after plasma ignition to continuously ionize; A heat dissipation assembly 400, arranged on both sides of the ionization cavity 100; The ignition assembly 200 includes: A dielectric sheet 210, which fits with the ionization cavity 100; A sealing structure 220, arranged on the outside of the dielectric sheet 210, for ensuring the airtightness between the ionization cavity 100 and the dielectric sheet 210; An ignition structure 230, for discharging the dielectric sheet 210 to excite and ignite the gas in the air passage 110 to form plasma; An anodic oxidation coating is formed on the inner walls of the air inlet 111, the air outlet 112 and the air passage 110; an anodic oxidation coating is formed on the surface of the dielectric sheet 210.

[0024] The surface of the dielectric sheet 210 is processed by an anodic oxidation process to form an anodic oxidation coating. The dielectric sheet 210 not only acts as a dielectric material, but also the anodic oxidation coating formed on the surface is closely attached to the anodic oxidation coating in the ionization cavity 100, which can increase the contact surface stress, effectively reduce the gas corrosion caused by plasma bombardment, and extend the service life.

[0025] The following verifies the effect of the dielectric sheet setting method in this embodiment through a comparative experiment. The specific parameter values used in the experiment are not used to limit the protection scope of the present application. The specific test environment is: gas pressure 1 torr, 2000 sccm argon gas ignition, 1000 - cycle ignition, 1000X test with a scanning electron microscope; the dielectric sheet is made of aluminum, the thickness of the aluminum sheet is 3 mm, and the thickness of the aluminum oxide film on the surface of the aluminum sheet is 60 μm. After testing, Figure 10Figure showing the surface of the dielectric sheet 210 when it is attached to the ionization cavity 100 but without an anodized coating on the surface. Figures 11(a) and 11(b) are respectively the surface view and cross-sectional view of the dielectric sheet 210 without being attached to the cavity but with an anodized coating on the surface. Figures 12(a) and 12(b) are respectively the surface view and cross-sectional view of the dielectric sheet when it is attached to the cavity and has an anodized coating on the surface.

[0026] From the above comparison, it can be seen that in the same test environment, for the traditional method of sealing the dielectric sheet inside the ignition structure and the method of attaching the dielectric sheet to the ionization cavity without setting an anodized coating, there are certain degrees of cracking in the dielectric sheet. It can be confirmed that when the dielectric sheet 210 is attached to the ionization cavity 100 and at the same time forms an anodized coating on the surface in cooperation with the ionization cavity 100, it can effectively reduce the rupture and damage of the dielectric sheet 210 caused by gas corrosion brought by plasma bombardment. At the same time, it can increase the contact surface stress between the dielectric sheet 210 and the ionization cavity 100, avoid cracking of the dielectric sheet 210, and thus improve the service life.

[0027] At the same time, based on the corner setting of the smooth rounded corner of the air passage 110 in this embodiment, when the gas moves along the path, the probability of contact between the plasma and the inner wall of the cavity can be reduced, which is beneficial to the movement of the plasma, increases the service life of the cavity, reduces the dust particles generated in the cavity, improves the cleaning ability, and is beneficial to the efficient dissociation of remote plasma.

[0028] Optionally, the ionization cavity 100 includes: The first gas cavity 120, the air inlet 111 is arranged at the top of the first gas cavity 120, the side surface of the first gas cavity 120 forms a first air passage opening 121, and a first groove 122 is formed on the outer periphery of the first air passage opening 121; The second gas cavity 130, the air outlet 112 is arranged at the bottom of the second gas cavity 130, the side surface of the second gas cavity 130 forms a second air passage opening 131, a second groove 132 is formed on the outer periphery of the second air passage opening 131, the first air passage opening 121 and the second air passage opening 131 are connected, the second groove 132 and the second groove 132 cooperate to form a through portion, and the magnetic core assembly 300 is arranged in the through portion; The ceramic ring 140 is arranged between the first air passage opening 121 and the second air passage opening 131 for sealing the air passage 110; The sealing ring 150 is arranged in cooperation with the ceramic ring 140.

[0029] The ionization cavity 100 includes a first gas cavity 120 and a second gas cavity 130. Compared with the cavity of the multi-segment splicing structure, the airtightness of the cavity can be improved, and the clean environment inside the cavity can be further ensured. At the same time, the ceramic ring 140 is used as a dielectric material to insulate and block the gap formed between the two gas cavities, and then the sealing ring 150 is arranged to improve the sealing performance of the air duct 110 and ensure the clean environment. The gas flow direction in the air duct 110 is as Figure 6 shown.

[0030] Specifically, as Figure 6 shown, it is arranged on the other diagonal opposite to the diagonal where the air inlet 111 and the air outlet 112 are located. As Figure 8 shown, the sealing structure 220 includes a ceramic ring 221 and a sealing ring 222 to ensure the sealing performance of the air duct 110. Then a fixing ring 240 is arranged to fix the dielectric sheet 210. The ignition structure 230 includes an ignition sheet 231, an ignition cap 232 and an ignition head 233. The ignition sheet 231 is fixed on the outer side of the dielectric sheet 210 through another fixing ring 240, and then the ignition cap 232 and the ignition head 233 are installed in sequence. Finally, the fixing structure 250 is installed to complete the overall installation.

[0031] On the basis that the corners of the air duct 110 are all formed into rounded corners by the chamfering process, the cavity is made of aluminum substrate and an anodic oxidation coating is formed on the inner wall of the air duct 110, reducing the contact between the plasma and the cavity wall, reducing the bombardment of the anodic oxidation coating by the plasma, reducing the contact frequency between the plasma and the cavity wall by 50%, and increasing the overall service life by more than 30%.

[0032] Optionally, the ionization cavity 100 and the ignition assembly 200 cooperate to form a third groove 160, and a through hole 161 communicating with the air duct 110 is formed on the third groove 160. An anodic oxidation coating is formed on the inner wall of the through hole 161 and the bottom surface of the third groove 160. It not only ensures the sealing of the installation part of the ignition assembly 200, but also improves the corrosion resistance of the cavity and extends the service life.

[0033] Optionally, the material of the anodic oxidation coating is alumina, magnesia or titanium oxide; the material of the ionization cavity is ceramic or quartz, and the material of the dielectric sheet is sapphire or quartz glass.

[0034] However, existing remote plasma generators face severe thermal management challenges during long-term operation. On the one hand, the coupling effect of high-frequency alternating electric and magnetic fields causes continuous accumulation of Joule heat and induction eddy current losses in the magnetic core components and the cavity wall. On the other hand, the intense collision of gas molecules during the plasma ionization process further exacerbates the local temperature rise. Although traditional solutions use external air-cooling or liquid-cooling modules for heat dissipation, their heat conduction paths are long and the contact thermal resistance is high, making it difficult to effectively suppress the temperature gradient in the key areas of the magnetic core and the cavity. Experimental data shows that when the temperature of the dissociation cavity exceeds 150 °C, sealing materials (such as fluororubber and polyimide) will accelerate aging, leading to the risk of gas leakage. At the same time, the magnetic permeability of the magnetic core decreases significantly, resulting in a reduction in plasma ionization efficiency by more than 20%. Such thermal failure problems not only shorten the service life of the equipment, but also force the production line to stop for maintenance frequently, seriously restricting the continuous production capacity and economic benefits of semiconductor manufacturing equipment.

[0035] To address the above thermal management problems, as Figure 3 shown, in one embodiment, the heat dissipation assembly 400 includes: A heat dissipation water tray 410, disposed on both sides of the ionization cavity 100; A condenser 420, providing condensed water to the heat dissipation water tray 410; A heat dissipation fan 430, connected to the condenser 420, and the heat dissipation fan 410 is used to cooperate with the condenser 420 to achieve combined air-cooling and water-cooling for temperature reduction.

[0036] By combining the use of the condenser 420 and the heat dissipation fan 430, synchronous heat exchange between the inside and outside is achieved, thereby enhancing the heat dissipation efficiency, and contributing to the extension of the lifespan of the cavity and the sealing components, improving the overall production efficiency. Combining water-cooling and air-cooling forms an internal circulation cooling system, which quickly and efficiently dissipates the heat of the high-temperature medium to the surrounding environment, thereby maintaining the stable operating temperature of the equipment or system.

[0037] The heat dissipation water tray 410 is symmetrically disposed on both sides of the ionization cavity 100. The heat dissipation water tray 410 uses an aluminum substrate, which not only has a simple and durable structure, but also has excellent heat dissipation performance.

[0038] As Figure 9 shown, a water tray flow channel 412 is provided in the heat dissipation water tray 410, and a number of flow-blocking copper sheets 412a are spaced in the water tray flow channel 412; the flow-blocking copper sheets 412a can reduce the local water flow velocity and can dissipate heat better.

[0039] The water tray flow channel 412 includes a main flow channel 412b and an auxiliary flow channel 412c. The cross-sectional area of the main flow channel 412b is larger than that of the auxiliary flow channel 412c, and the main flow channel 412b and the auxiliary flow channel 412c are connected in an M shape. For the heat dissipation water tray 410 with an M-shaped flow channel, the main flow channel 412b and the auxiliary flow channel 412c can expand the heat exchange area as much as possible, improve the heat dissipation efficiency, and improve the reliability of the remote plasma source. After testing, after adopting the M-shaped flow channel, the heat dissipation efficiency is increased by 30%, and the cavity temperature is stabilized below 60°C. The main flow channel 412b is connected to the auxiliary flow channel 412c, and there is no overlap between the main flow channel 412b and the auxiliary flow channel 412c.

[0040] In one embodiment, heat conduction fins 411 are further provided on the inner side of the heat dissipation water tray 410; the magnetic core assembly 300 and the ionization cavity 100 are both screwed to the heat dissipation water tray 410. The heat conduction fins 411 can improve the heat dissipation effect, and at the same time, the screwing method can ensure the mechanical fixation effect between the heat dissipation water tray 410 and the magnetic core assembly 300 and the ionization cavity 100, and has both heat dissipation performance. A copper strip 310 is provided on the magnetic core assembly 300. High-frequency alternating current is applied to the copper strip 310. The copper strip 310 serves as an inductive coupling primary coil to generate a high-frequency electromagnetic field. The conductive gas forms eddy currents under the action of the magnetic field, and the conductive gas is thus ionized; a sustaining current also passes through the copper strip 310, and the electromagnetic field is sustained after high-voltage ignition.

[0041] See Figure 5 , a plurality of screw holes 170 are provided on both the first gas cavity 120 and the second gas cavity 130 for screwing to the heat dissipation water tray 410; the magnetic core assembly 300 is wrapped by copper parts and then is also screwed to the heat dissipation water tray 410, which is not specifically shown in the figure.

[0042] Specifically, the heat dissipation water tray 410 and the condenser 420 are connected by a heat dissipation water pipe 440. The heat dissipation water pipe 440 includes a first water inlet pipe 441, a second water inlet pipe 442, a first water outlet pipe 443 and a second water outlet pipe 444. One end of the first water inlet pipe 441 is connected to the water inlet joint, and the other end is connected to the water inlet end of the condenser 420; one end of the second water inlet pipe 442 is connected to the water outlet end of the condenser 420, and the other end is connected to the water inlet of a heat dissipation water tray 410; the first water outlet pipe 443 is connected between the heat dissipation water trays 410; the second water outlet pipe 444 leads the water in the heat dissipation water tray 410 to the water outlet joint.

[0043] The following provides a test process for the remote plasma generator provided in this embodiment. The test steps include: Step 1: Mount the assembled dissociation cavity on the machine table for a leak test. Install an inlet valve and an outlet valve at the inlet 111 and the outlet 112 respectively. Open the valves for testing, evacuate, and then close the outlet valve to check the air pressure change in the dissociation chamber; Step 2: Mount the assembled dissociation cavity on the machine table for a water leakage test. Install the inlet and outlet water pipes, open the outlet valve, then open the inlet valve, check for water leakage, and then close the outlet valve. Conduct a pressure holding test to see if there is water leakage during a long-term side water leakage test; Step 3: Measure the power, increase the volume of the given gas, and observe the changes in the power of the test bench, the bus voltage, and the three-phase current; Step 4: Function measurement; Step 5: Measure data.

[0044] Based on the remote plasma generator provided in this embodiment, it solves the problem of the impact damage of the plasma source on the cavity caused by the too small rectangular corner arc of the current remote plasma source cavity. The designed remote plasma source in the field of semiconductor process equipment will be a major breakthrough, which can provide a convenience and development direction for the service life and cleanliness of the remote plasma source cavity in the future. The plasma source of the present invention has fewer parts and seals, resulting in lower costs and higher reliability. At the same time, based on the heat dissipation component 400 provided in this embodiment, by combining the use of the condenser 420 and the cooling fan 430, the synchronous exchange of internal and external heat is achieved, thereby enhancing the heat dissipation efficiency and contributing to the extension of the life of the cavity and the sealing component, and improving the overall production efficiency. Combining water cooling and air cooling forms an internal circulation cooling system, which quickly and efficiently dissipates the heat of the high-temperature medium to the surrounding environment, thereby maintaining the stable operating temperature of the equipment or system.

[0045] The above embodiments only represent several implementation manners of the present application, and their descriptions are relatively specific and detailed, but they should not be construed as limiting the scope of the invention patent. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present application, several modifications and improvements can still be made, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent of the present application shall be subject to the appended claims.

Claims

1. A remote plasma generator, characterized in that, Comprising: An ionization cavity, an air passage is formed in the ionization cavity, the corners of the air passage are all rounded, and the air inlet and the air outlet of the air passage are arranged diagonally; An ignition assembly, arranged on the other diagonal of the air passage, for exciting and igniting the gas in the air passage to form plasma; A magnetic core assembly, arranged between the air passages, for providing a continuous current to continuously ionize after plasma ignition; A heat dissipation assembly, arranged on both sides of the ionization cavity; The ignition assembly includes: A dielectric sheet, which fits with the ionization cavity; A sealing structure, arranged on the outside of the dielectric sheet, for ensuring the airtightness between the ionization cavity and the dielectric sheet; An ignition structure, for discharging the dielectric sheet to excite and ignite the gas in the air passage to form plasma; An anodic oxidation coating is formed on the inner wall of the air inlet, the air outlet and the air passage; an anodic oxidation coating is formed on the surface of the dielectric sheet.

2. The remote plasma generator according to claim 1, wherein The ionization cavity includes: A first air cavity, the air inlet is arranged at the top of the first air cavity, a first air passage opening is formed on the side of the first air cavity, and a first groove is formed on the outer periphery of the first air passage opening; A second air cavity, the air outlet is arranged at the bottom of the second air cavity, a second air passage opening is formed on the side of the second air cavity, and a second groove is formed on the outer periphery of the second air passage opening. The first air passage opening and the second air passage opening are connected, and the second groove and the second groove cooperate to form a through portion, and the magnetic core assembly is arranged in the through portion; A ceramic ring, arranged between the first air passage opening and the second air passage opening, for sealing the air passage; A sealing ring, arranged in cooperation with the ceramic ring.

3. The remote plasma generator according to claim 2, wherein, The ionization cavity and the ignition assembly cooperate to form a third groove, and a through hole communicating with the air passage is formed on the third groove; an anodic oxidation coating is formed on the inner wall of the through hole and the bottom surface of the third groove.

4. The remote plasma generator according to claim 1, wherein, The heat dissipation assembly includes: A heat dissipation water tray, arranged on both sides of the ionization cavity; A condenser, providing condensed water to the heat dissipation water tray; A heat dissipation fan, connected to the condenser, and the heat dissipation fan is used to cooperate with the condenser to realize combined cooling of air cooling and water cooling.

5. The remote plasma generator according to claim 4, characterized in that, A water tray flow channel is arranged in the heat dissipation water tray, and a plurality of flow blocking copper sheets are arranged at intervals in the water tray flow channel.

6. The remote plasma generator according to claim 5, characterized in that, The water tray flow channel includes a main flow channel and an auxiliary flow channel, the cross-sectional area of the main flow channel is larger than that of the auxiliary flow channel, and the main flow channel and the auxiliary flow channel are connected in an M shape.

7. The remote plasma generator according to claim 6, characterized in that, A heat conducting sheet is further arranged on the inner side of the heat dissipation water tray; the magnetic core assembly and the ionization cavity are both screwed to the heat dissipation water tray.

8. The remote plasma generator according to claim 7, wherein The heat dissipation water tray and the condenser are connected by a heat dissipation water pipe, and the heat dissipation water pipe includes a first water inlet pipe, a second water inlet pipe, a first water outlet pipe and a second water outlet pipe, One end of the first water inlet pipe is connected to a water inlet joint, and the other end is connected to the water inlet end of the condenser; One end of the second water inlet pipe is connected to the water outlet end of the condenser, and the other end is connected to the water inlet of one of the heat dissipation water trays; The first water outlet pipe is connected between the heat dissipation water trays; The second water outlet pipe leads the water in the heat dissipation water tray to a water outlet joint.

9. The remote plasma generator according to claim 1, characterized in that, The material of the anodic oxidation coating is alumina, magnesia or titanium oxide; The material of the ionization chamber is ceramic or quartz, and the material of the dielectric sheet is sapphire or quartz glass.

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