Method and system for automatically controlling and correcting concentration of liquid medicine

Through the sensor array and chemical balance model combined with proportion-integral control algorithm, the concentration of the medicine liquid is dynamically adjusted, solving the problems of fluctuations in the concentration of traditional Chinese medicine liquids and slow response speed of semiconductor manufacturing, achieving accurate control and uniform distribution of the medicine liquid, and improving the cleaning effect.

CN120386394APending Publication Date: 2025-07-29江苏凯迪微技术股份有限公司
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Patent Information

Application Number
CN202510509212.0
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-04-22
Publication Date
2025-07-29

AI Technical Summary

Technical Problem

The prior art has problems such as large fluctuations in the concentration control of traditional Chinese medicine liquids, slow response speed, and insufficient detection of liquid level and concentration in semiconductor manufacturing, resulting in unstable cleaning effect and affecting the reliability and consistency of semiconductor cleaning.

Method used

Multi-point concentration and temperature data are collected through sensor arrays, real-time monitoring results are recorded using high-frequency sampling technology, dynamic adjustment is performed by combining chemical balance model and proportional-integral control algorithm, temperature compensation factors are introduced, drug liquid distribution is optimized, uniformity is evaluated using liquid level detection device, and control accuracy and response speed are continuously optimized through feedback cycle mechanism.

Benefits of technology

It realizes precise control and uniform distribution of the concentration of the drug liquid, improves the cleaning efficiency and quality, and ensures the stability and consistency of the drug liquid in the cleaning tank.

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Abstract

The invention relates to a liquid medicine concentration automatic control correction method and system in the technical field of semiconductor manufacturing, and the method comprises the steps: if the concentration deviation exceeds a preset threshold value, comparing real-time monitoring data with a chemical equilibrium model, obtaining the offset of a reaction rate, and judging the specific parameters of the liquid supplementing amount and the adjustment time; a proportional-integral control algorithm is combined with a trigger condition and a liquid supplementing parameter, the liquid medicine concentration is dynamically adjusted, a compensation factor is introduced for temperature fluctuation, and an adjusted concentration control instruction is obtained; liquid level distribution data in the cleaning tank are synchronously collected through a liquid level detection device, and whether the uniformity of the liquid medicine in the tank reaches a preset standard or not is judged in combination with the adjusted concentration control instruction; and continuously acquiring a stable distribution result, comparing the stable distribution result with an initial data set, judging the optimization degree of the control precision and the response speed, and obtaining a concentration fluctuation range and a uniformity index after dynamic adjustment.
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