A semiconductor heating disk deformation detection device and detection method

Abstract

The application relates to the technical field of surface deformation detection equipment, in particular to a semiconductor heating disc deformation detection device and a detection method, which comprise a platform and a detection unit. The platform is in a circular structure, two clamping grooves are arranged on the platform along the radial direction of the platform, a straight line connected with the two clamping grooves passes through the center of the platform, the two clamping grooves are symmetrical about the center of the platform, the detection unit comprises a positioning unit arranged on the platform and used for positioning the heating disc, one clamping block is arranged in each clamping groove, the clamping block is in sliding fit with the clamping groove along the extension direction of the clamping groove, a clamping roller used for clamping the heating disc is vertically arranged on the upper portion of the clamping block, a first range finder is horizontally arranged on one end of each clamping groove away from the center of the platform, the detection end of the first range finder horizontally faces the clamping block, and a rotating unit is arranged on the upper portion of the platform. The application improves the detection precision and the detection efficiency.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of surface deformation detection equipment, in particular to a semiconductor heating disc deformation detection device and a detection method. BACKGROUND

[0002] In actual working conditions, the heating disc is in a high-temperature and vacuum environment. The temperature on the surface of the heating disc is not completely uniform. At the same time, the vacuum and high temperature also amplify the original manufacturing error to varying degrees. After the comprehensive influence of various factors, the surface deformation occurs not only on the concave-convex change of the heating disc surface, but also on the thickness and circumference diameter of the heating disc, such as thinning of the heating disc thickness or unevenness of the heating disc circumference diameter.

[0003] Chinese patent application CN119063646A discloses a heating disc surface deformation online detection device, characterized in that it comprises a sealing cover assembly, a transparent window for signal transmission is arranged on the top of the sealing cover assembly; a support assembly is connected to the edge of the sealing cover assembly at the bottom; a rotary table assembly is connected to the top of the support assembly; and a sensor assembly is connected to the rotary table assembly for controlled rotation of the rotary table assembly to scan and detect the heating disc located in the sealing cover assembly.

[0004] The above document realizes scanning of the surface of the heating disc, but cannot realize detection of the thickness and uniformity of the outer circumference diameter of the heating disc. Before the existing detection of the thickness and uniformity of the outer circumference diameter of the heating disc, the heating disc needs to be positioned first. Due to the large deformation of part of the heating disc after use, the heating disc cannot be normally positioned, and thus the heating disc cannot be normally detected. In addition, since the heating disc is a circular structure, part of the heating disc may appear out-of-round after use, i.e. a quasi-circular structure, and the above out-of-round condition cannot be judged by the naked eye sometimes. SUMMARY

[0005] In view of the above problems, a semiconductor heating disc deformation detection device and a detection method are provided. Two clamping grooves are arranged on the platform in the radial direction of the platform, and a clamping block is arranged in each clamping groove. The straight line between the two clamping blocks passes through the center of the platform. The two clamping rollers clamp the heating disc, and the heating disc is driven to rotate by the rotating unit, so that the roundness of the heating disc is detected.

[0006] In order to solve the prior art problems, the present application provides a kind of semiconductor heating disc shape change detection device, including platform and detection unit being arranged on platform;Platform is circular structure, two clamping grooves are opened in the radial direction of platform on platform, the straight line of two clamping grooves passes through the center of platform, and two clamping grooves are symmetrical about the center of platform, detection unit includes the positioning unit being arranged on platform and positioning heating disc, one clamping block is arranged in each clamping groove, clamping block is slidably fitted with clamping groove along the extension direction of clamping groove, clamping roller for clamping heating disc is vertically rotatably arranged on the upper portion of clamping block, a first range finder is horizontally arranged on the end of each clamping groove away from the center of platform, and the detection end of first range finder is horizontally directed to clamping block, rotating unit is arranged on the upper portion of platform, when detecting, two clamping blocks are close to each other and the outer periphery of heating disc is clamped by two clamping rollers, and rotating unit drives heating disc to rotate.

[0007] Preferably, a pulling unit is arranged on the side of clamping block towards the circular platform, for pulling clamping block to move in clamping groove, the pulling unit includes a rotating wheel rotatably arranged at the end of clamping groove close to the center of platform, a weight is movably arranged in vertical direction on the lower portion of rotating wheel, a pulling rope is arranged between weight and clamping block for connecting them, and the pulling rope is wound from the upper portion of rotating wheel.

[0008] Preferably, a winder is further arranged at the end of clamping groove away from the center of platform, a traction rope is wound in the winder, and one end of traction rope is led out from the winder and fixedly connected with clamping block.

[0009] Preferably, the positioning unit includes positioning grooves uniformly arranged around the axis of platform, the positioning grooves are opened in the radial direction of platform on platform, a positioning block is slidably arranged on the positioning groove along the extension direction of positioning groove, and a first driving unit is arranged below platform for driving all positioning blocks to synchronously move, and the positioning blocks can synchronously move towards or away from the center of platform.

[0010] Preferably, the first driving unit includes a first gear ring rotatably arranged at the lower portion of platform, the axis of first gear ring is collinear with the axis of platform, a plurality of inclined grooves are uniformly opened on the first gear ring around the axis of first gear ring, the inclined grooves correspond to the positioning grooves one by one, the included angle between the extension direction of inclined groove and the radial direction of first gear ring is an acute angle, the bottom of positioning block extends into inclined groove and slidably fits with inclined groove, a first gear wheel is engaged on one side of first gear ring, and a first rotary driver is arranged at the end of first gear wheel for driving first gear wheel to rotate.

[0011] Preferably, the rotating unit includes a pressing plate arranged above the platform and moving in the vertical direction, a linear driver for driving the pressing plate to move is provided on the upper part of the pressing plate, the pressing plate is a circular structure, and a second driving unit for driving the pressing plate to rotate around the pressing plate's own axis is provided on one side of the pressing plate. When the heating plate is driven to rotate, the bottom of the pressing plate contacts the upper end surface of the heating plate.

[0012] Preferably, a rotating disk is fixed horizontally on the output end of the linear drive, a lifting frame is provided on the outer sleeve of the rotating disk, an extension rod is fixed vertically on the upper part of the pressing plate, the extension rod passes through the rotating disk and slides with the rotating disk, there is a gap between the rotating disk and the pressing plate, a spring is vertically arranged in the gap, both ends of the spring are respectively fixed on the rotating disk and the pressing plate, and a pressure sensor for monitoring the spring elastic force is provided between the rotating disk and the spring.

[0013] Preferably, the second drive unit includes a second gear ring fixedly arranged on the periphery of the rotating disk, a second gear is meshed on one side of the second gear ring, a second rotary driver is arranged at the end of the second gear to drive the second gear to rotate, and the second rotary driver is arranged on the lifting frame.

[0014] Preferably, a plurality of rolling balls are provided on the upper portion of the platform, and the plurality of rolling balls are arranged in a circular array, the axis of the circular array is collinear with the axis of the platform, and the rolling balls roll in cooperation with the heating plate placed on the platform.

[0015] The present invention also relates to a method for detecting deformation of a semiconductor heating disk, which uses a semiconductor heating disk deformation detection device. The specific steps are as follows:

[0016] S1. Place the heating plate horizontally at the center of the platform. Then, the positioning unit positions the heating plate so that the center of the heating plate coincides with the center of the platform. Then, the rotating unit contacts the upper part of the heating plate. The positioning unit releases the heating plate.

[0017] S2. The two clamping blocks disposed in the two clamping grooves begin to approach each other. After the clamping rollers on the two clamping blocks clamp the peripheral wall of the heating plate respectively, the rotating unit drives the heating plate to rotate around the axis of the platform. The linear distance between the two clamping rollers is the actual diameter of the heating plate.

[0018] S3. The first rangefinders arranged at the ends of the two clamping slots perform real-time detection on the corresponding clamping blocks. The distance between the ends of the two clamping slots away from the center of the platform is constant. By subtracting the distance measured in real time by the first rangefinder, the actual diameter of the heating plate can be calculated, thereby completing the detection of the roundness of the heating plate.

[0019] Compared with the prior art, the present invention has the following beneficial effects:

[0020] 1. The application is characterized in that two clamping grooves are arranged along the radial direction of the platform, and a clamping block is arranged in each clamping groove, so that the straight line between the two clamping blocks passes through the center of the platform. When detecting, first place the heating disc on the platform, then start the positioning unit to position the heating disc, so that the center of the heating disc coincides with the center of the platform. After the positioning unit completes positioning of the heating disc, the rotating unit is lowered and contacts the upper part of the heating disc, then the positioning unit releases the heating disc, and the two clamping blocks arranged in the two clamping grooves move towards each other and clamp the heating disc with the two clamping rollers. The straight line distance between the two clamping rollers after clamping the heating disc is the diameter of the heating disc. The rotating unit rotates the heating disc, and the two clamping rollers clamping the heating disc drive the corresponding clamping blocks to move in the clamping groove in real time with the rotation of the heating disc. If the heating disc does not deform, the clamping blocks will not move. The first distance measuring instrument detects the clamping blocks in real time, so that the diameter of the rotating heating disc can be calculated, and the heating disc can be detected for 360 degrees. The detection accuracy is improved, and the detection efficiency is also improved.

[0021] 2. The two clamping blocks are provided with weights at one end to provide tension to the clamping blocks, so that the pressure of the clamping rollers on the heating disc is always constant when the clamping rollers contact the peripheral wall of the heating disc. Since the weights of the two clamping blocks are the same, the clamping force of the two clamping rollers on the heating disc is equal in size and opposite in direction. During the rotation of the heating disc driven by the rotating unit, the heating disc is prevented from deviating.

[0022] 3. The platform is provided with a plurality of balls arranged in a circular array, which reduces the friction coefficient between the heating disc and the platform, and also avoids wear of the heating disc during rotation. BRIEF DESCRIPTION OF DRAWINGS

[0023] Figure 1 is a three-dimensional schematic view of a semiconductor heating disc deformation detection device of the application Figure 1 .

[0024] Figure 2 is a three-dimensional schematic view of a semiconductor heating disc deformation detection device of the application Figure 1 .

[0025] Figure 3 is a three-dimensional schematic view of a semiconductor heating disc deformation detection device of the application Figure 2 .

[0026] Figure 4 is a three-dimensional schematic view of a semiconductor heating disc deformation detection device of the application Figure 3 .

[0027] Figure 5 It is a side view of a semiconductor heating disk deformation detection device of the present invention.

[0028] Figure 6 The present invention is a semiconductor heating disk deformation detection device Figure 5 Schematic cross-sectional view at CC in the middle.

[0029] Figure 7 It is a cutaway perspective schematic diagram of a semiconductor heating disk deformation detection device of the present invention.

[0030] Figure 8 The present invention is a semiconductor heating disk deformation detection device Figure 7 A local enlarged schematic diagram of point D in the middle.

[0031] Figure 9 The present invention is a semiconductor heating disk deformation detection device Figure 7 A partial enlarged schematic diagram of point E in the middle.

[0032] Figure 10 The present invention is a semiconductor heating disk deformation detection device Figure 7 A partial enlarged schematic diagram of point F in the middle.

[0033] Figure 11 The present invention is a semiconductor heating disk deformation detection device Figure 7 A local enlarged schematic diagram of point G in the middle.

[0034] Figure 12 It is a three-dimensional schematic diagram of a semiconductor heating disk deformation detection device of the present invention with the rotating unit removed.

[0035] The numbers in the figure are:

[0036] 1. Platform; 11. Clamping groove; 12. Rolling ball; 2. Detection unit; 21. Clamping block; 22. Clamping roller; 23. First distance meter; 24. Positioning unit; 241. Positioning block; 242. Positioning groove; 243. First drive unit; 2431. First rotary driver; 2432. First gear; 2433. First gear ring; 2434. Inclined groove; 25. Pulling unit; 251. Rotating wheel; 252. Pull rope; 253. Weight; 254. Guide rod; 256. Winder; 257. Pull rope; 3. Rotating unit; 31. Linear drive; 32. Pressing plate; 33. Second drive unit; 331. Second rotary driver; 332. Second gear; 333. Second gear ring; 34. Lifting frame; 35. Extension rod; 36. Spring; 37. Rotating disk; 38. Second distance meter; 4. Heating disk. DETAILED DESCRIPTION

[0037] In order to further understand the features, technical means and specific purposes and functions achieved by the present application, the present application will be further described in detail below in conjunction with the drawings and specific embodiments.

[0038] Referring to Figure 1 , Figure 2 , Figure 5 , Figure 6 , Figure 7 and Figure 11 : A semiconductor heating disc shape change detection device, comprising a platform 1 and a detection unit 2 arranged on the platform 1; the platform 1 is circular in structure, two clamping grooves 11 are formed on the platform 1 along the radial direction of the platform 1, the straight line connecting the two clamping grooves 11 passes through the center of the platform 1, and the two clamping grooves 11 are symmetrical about the center of the platform 1; the detection unit 2 comprises a positioning unit 24 arranged on the platform 1 for positioning the heating disc 4; one clamping block 21 is arranged in each clamping groove 11, the clamping block 21 is in sliding fit with the clamping groove 11 along the extension direction of the clamping groove 11, a clamping roller 22 for clamping the heating disc 4 is vertically arranged on the upper part of the clamping block 21, and a first distance measuring instrument 23 is horizontally arranged on one end of each clamping groove 11 away from the center of the platform 1, the detection end of the first distance measuring instrument 23 horizontally faces the clamping block 21; a rotating unit 3 is arranged on the upper part of the platform 1; during detection, the two clamping blocks 21 are close to each other and clamp the outer periphery of the heating disc 4 through the two clamping rollers 22, and the rotating unit 3 drives the heating disc 4 to rotate.

[0039] In the existing deformation detection of the semiconductor heating disc 4, mainly through the measurement ruler to measure, or through the visual instrument to measure, but the measurement ruler measurement has subjectivity, and the visual instrument measurement is easily affected by the external environment light and the projection light angle, thereby causing the detection result accuracy to be poor. In the prior art, a mechanical measurement method is also used to measure the heating disc 4, but after the positioning unit 24 positions the heating disc 4, the heating disc 4 cannot rotate by itself, and the clamping roller 22 cannot sweep the whole peripheral wall of the heating disc 4, because after the clamping roller 22 contacts the peripheral wall of the heating disc 4, the heating disc 4 will be subjected to a horizontal thrust, so the positioning unit 24 needs to continuously position the heating disc 4, so the worker needs to manually rotate and adjust the heating disc 4, which is a large amount of work.

[0040] In order to avoid the above situation, the detection unit 2 is redesigned, so that the heating disc 4 can automatically rotate during the detection of the size of the heating disc 4 by the detection unit 2, without human intervention, and the heating disc 4 will not be subjected to unilateral stress, avoiding the situation that the heating disc 4 deviates during detection. The specific structure and working principle of the detection unit 2 are as follows:

[0041] By opening two clamping grooves 11 on the platform 1, the two clamping grooves 11 are arranged along the radial direction of the platform 1, and a clamping block 21 is arranged in each of the two clamping grooves 11, so that the straight line between the two clamping blocks 21 passes through the center of the platform 1. During detection, first place the heating disc 4 on the platform 1, then start the positioning unit 24 to position the heating disc 4, so that the center of the heating disc 4 coincides with the center of the platform 1. It is worth noting that during the use of the heating disc 4, the heating disc 4 will deform, which will cause the heating disc 4 to become out of round. However, this cannot be observed by the naked eye and needs to be measured by measuring equipment. Due to the out-of-roundness of the heating disc 4, it is difficult to directly measure the diameter of the heating disc 4, and the error is high. Therefore, the center of the heating disc 4 is first found by the positioning unit 24, and then the heating disc 4 is detected. After the positioning unit 24 completes the positioning of the heating disc 4, the rotating unit 3 is lowered and contacts the upper part of the heating disc 4, then the positioning unit 24 releases the heating disc 4, and the two clamping blocks 21 arranged in the two clamping grooves 11 move closer to each other and clamp the heating disc 4 by the two clamping rollers 22. The straight line distance between the two clamping rollers 22 after clamping the heating disc 4 is the diameter of the heating disc 4. The rotating unit 3 rotates the heating disc 4, and the two clamping rollers 22 clamping the heating disc 4 drive the corresponding clamping blocks 21 to displace in the clamping groove 11 in real time as the heating disc 4 rotates. If the heating disc 4 has not deformed, the clamping blocks 21 will not displace. The first distance meter 23 detects the clamping blocks 21 in real time. One side of each of the two clamping blocks 21 is provided with a first distance meter 23, and the total length of the two clamping grooves 11 in the radial direction of the platform 1 is constant. Therefore, the diameter of the rotating heating disc 4 can be calculated, and the heating disc 4 can be detected for 360 degrees. The detection accuracy and efficiency are improved.

[0042] Referring to Figure 6 and Figure 9 : A pulling unit 25 is arranged on the side of the clamping block 21 facing the circle of the platform 1 to move the clamping block 21 in the clamping groove 11. The pulling unit 25 includes a rotating wheel 251 rotatably arranged at the end of the clamping groove 11 close to the center of the platform 1. A weight 253 is movably arranged in the vertical direction below the rotating wheel 251. A pulling rope 252 connecting the weight 253 and the clamping block 21 is arranged between them, and the pulling rope 252 is wound from the upper part of the rotating wheel 251.

[0043] A guide rod 254 is vertically and fixedly arranged at the bottom of the platform 1. The guide rod 254 vertically penetrates the weight 253 and slidably cooperates with the weight 253 in the vertical direction. The arrangement of the guide rod 254 can avoid the shaking of the weight 253 during movement.

[0044] After the positioning is completed and the rotating unit 3 is in contact with the upper portion of the heating disc 4, the weight 253 is released, the weight 253 is lowered in the vertical direction, the weight 253 pulls the clamping blocks 21 to slide in the clamping grooves 11 through the pull ropes 252, the two clamping blocks 21 are provided with the pulling units 25 on the side towards the center of the platform 1, the weights 253 in the two pulling units 25 are released at the same time, thus the two clamping blocks 21 are close to each other under the action of the weights 253, and the clamping rollers 22 provided on the two clamping blocks 21 can clamp the peripheral wall of the heating disc 4 respectively, so that the measurement of the diameter of the heating disc 4 is completed, and since the weights 253 in the two pulling units 25 are of the same weight, the horizontal forces of the two clamping blocks 21 on the heating disc 4 can be counteracted, so that the heating disc 4 is prevented from deviating during the clamping and measuring process of the clamping rollers 22 on the heating disc 4.

[0045] With reference to Figure 11 : A winder 256 is further provided on the end of the clamping groove 11 away from the center of the platform 1, the winder 256 is provided with a pull rope 257 wound therein, one end of the pull rope 257 is led out of the winder 256 and is fixedly connected with the clamping block 21.

[0046] The winder 256 pulls the clamping block 21 in the clamping groove 11 through the pull rope 257, when the winder 256 releases the pull rope 257, the weight 253 pulls the clamping block 21 through the pull rope 252, so that the clamping block 21 slides in the clamping groove 11. When the rotating unit 3 is in contact with the upper portion of the heating disc 4, the winder 256 releases the pull rope 257, the clamping block 21 drives the clamping roller 22 to move towards the heating disc 4 under the action of the weight 253, the clamping roller 22 clamps the peripheral wall of the heating disc 4, by controlling the speed at which the winder 256 releases the pull rope 257, the clamping roller 22 can be prevented from directly impacting on the peripheral wall of the heating disc 4. After the test is completed, the winder 256 retracts the pull rope 257, the two clamping blocks 21 move away from each other, the weight 253 rises, and the clamping roller 22 is out of contact with the heating disc 4.

[0047] With reference to Figure 12 : The positioning unit 24 comprises positioning grooves 242 uniformly arranged around the axis of the platform 1, the positioning grooves 242 are provided on the platform 1 in the radial direction of the platform 1, the positioning blocks 241 are slidably provided on the positioning grooves 242 in the extension direction of the positioning grooves 242, and the first driving unit 243 is provided below the platform 1 to drive all the positioning blocks 241 to move synchronously, so that the positioning blocks 241 can move synchronously towards or away from the center of the platform 1.

[0048] With reference to Figure 3 and Figure 10: The first driving unit 243 includes a first gear ring 2433 rotatably arranged at the lower part of the platform 1, the axis of the first gear ring 2433 is collinear with the axis of the platform 1, and a plurality of inclined grooves 2434 are evenly opened on the first gear ring 2433 around the axis of the first gear ring 2433, the inclined grooves 2434 correspond one-to-one to the positioning grooves 242, and the angle between the extension direction of the inclined grooves 2434 and the radial direction of the first gear ring 2433 is an acute angle, the bottom of the positioning block 241 extends into the inclined grooves 2434 and slides with the inclined grooves 2434, a first gear 2432 is meshed on one side of the first gear ring 2433, and a first rotation driver 2431 for driving the first gear 2432 to rotate is provided at the end of the first gear 2432.

[0049] The first rotation driver 2431 is preferably a servo motor. When the first rotation driver 2431 is started, the first rotation driver 2431 drives the first gear ring 2433 to rotate through the first gear 2432. The first gear ring 2433 guides the positioning block 241 to slide in the positioning groove 242 through the inclined groove 2434. In this way, the positioning block 241 can move synchronously toward the center of the platform 1 or move synchronously away from the center of the platform 1 at the same time.

[0050] Reference Figure 3 、 Figure 5 and Figure 6 : The rotating unit 3 includes a pressing plate 32 arranged above the platform 1 and moving in the vertical direction. A linear driver 31 is provided on the upper part of the pressing plate 32 to drive the pressing plate 32 to move. The pressing plate 32 is a circular structure. A second driving unit 33 is provided on one side of the pressing plate 32 to drive the pressing plate 32 to rotate around the axis of the pressing plate 32 itself. When the heating disk 4 is driven to rotate, the bottom of the pressing plate 32 contacts the upper end surface of the heating disk 4.

[0051] Reference Figure 8 : A rotating disk 37 is horizontally fixed on the output end of the linear drive 31, and a lifting frame 34 is provided on the outside of the rotating disk 37. An extension rod 35 is vertically fixed on the upper part of the pressing plate 32. The extension rod 35 passes through the rotating disk 37 and slides with the rotating disk 37. There is a gap between the rotating disk 37 and the pressing plate 32, and a spring 36 is vertically arranged in the gap. The two ends of the spring 36 are respectively fixed on the rotating disk 37 and the pressing plate 32, and a pressure sensor for monitoring the elastic force of the spring 36 is provided between the rotating disk 37 and the spring 36.

[0052] Reference Figure 5 、 Figure 8 and Figure 9The second driving unit 33 comprises a second gear ring 333 fixedly arranged at the periphery of the rotating disc 37, a second gear 332 engaged with one side of the second gear ring 333, and a second rotary driver 331 arranged on the lifting frame 34 and configured to drive the second gear 332 to rotate.

[0053] The second rotary driver 331 is preferably a servo motor. After positioning is completed, the linear driver 31 drives the lifting frame 34 to descend, and after the pressing plate 32 contacts the upper end of the heating disc 4, the lifting frame 34 continues to descend, the spring 36 between the rotating disc 37 and the pressing plate 32 is in a compressed state, the pressure sensor arranged between the spring 36 and the rotating disc 37 is configured to detect the spring 36 in real time, and a maximum pressure value is preset for the pressure sensor. When the pressure sensor detects that the pressure reaches the maximum pressure, the linear driver 31 stops running. Then the second rotary driver 331 is started, the second rotary driver 331 drives the second gear ring 333 to rotate through the second gear 332, the second gear ring 333 drives the rotating disc 37 to rotate, the rotating disc 37 drives the pressing plate 32 to rotate through the extension rod 35, and the lower end of the pressing plate 32 is provided with a groove for increasing the friction coefficient. In this way, the pressing plate 32 can drive the heating disc 4 to rotate. A second distance meter 38 is vertically arranged on the platform 1, the detection end of the second distance meter 38 vertically faces upward, and the second distance meter 38 is configured to measure the straight-line distance from the detection end of the second distance meter 38 in the vertical direction to the lower part of the pressing plate 32. In this way, the thickness of the heating disc 4 can be calculated.

[0054] Referring to Figure 9 A plurality of rolling balls 12 are arranged on the upper part of the platform 1 in a circular array, the axis of the circular array is collinear with the axis of the platform 1, and the rolling balls 12 are in rolling cooperation with the heating disc 4 placed on the platform 1.

[0055] Since the rotating unit 3 needs to drive the heating disc 4 to rotate, if the rolling balls 12 are not arranged on the upper part of the platform 1, the friction between the heating disc 4 and the platform 1 is relatively large, which causes the bottom of the heating disc 4 to be greatly worn against the upper end surface of the platform 1 during the process of driving the heating disc 4 to rotate by the rotating unit 3, and not only greatly affects the detection accuracy, but also greatly damages the heating disc 4 and the platform 1.

[0056] Referring to Figures 1-12 The application also relates to a semiconductor heating disc deformation detection method, and the method comprises the following steps:

[0057] S1, the heating disc 4 is horizontally placed at the center of the platform 1, and then the positioning unit 24 positions the heating disc 4, the center of the positioned heating disc 4 is coincident with the center of the platform 1, and then the rotating unit 3 contacts the upper part of the heating disc 4; and the positioning unit 24 releases the heating disc 4;

[0058] S2, two clamping blocks 21 arranged in the two clamping grooves 11 begin to approach each other, after the clamping rollers 22 on the two clamping blocks 21 clamp the peripheral wall of the heating disc 4, the rotating unit 3 drives the heating disc 4 to rotate around the axis of the platform 1, and the linear distance between the two clamping rollers 22, that is, the actual diameter of the heating disc 4;

[0059] S3, the first distance meter 23 arranged at the end of the two clamping grooves 11 detects the clamping block 21 corresponding thereto in real time, the end of the two clamping grooves 11 away from the center of the platform 1 has a constant distance, and by subtracting the distance measured by the first distance meter 23 in real time, the actual diameter of the heating disc 4 can be calculated, so as to complete the detection of the roundness of the heating disc 4.

[0060] Working principle: during detection, first, the heating disc 4 is placed on the platform 1, and then the positioning unit 24 is started, the positioning unit 24 positions the heating disc 4, so that the center of the heating disc 4 coincides with the center of the platform 1. After the positioning unit 24 completes the positioning of the heating disc 4, the rotating unit 3 is lowered and contacts the upper part of the heating disc 4, and then the positioning unit 24 releases the heating disc 4, the two clamping blocks 21 arranged in the two clamping grooves 11 approach each other and clamp the heating disc 4 through the two clamping rollers 22, the linear distance between the two clamping rollers 22 after clamping the heating disc 4 is the diameter of the heating disc 4, the rotating unit 3 rotates the heating disc 4, the heating disc 4 rotates around the axis of the platform 1, and the two clamping rollers 22 clamping the heating disc 4 drive the corresponding clamping blocks 21 to displace in the clamping grooves 11 in real time with the rotation of the heating disc 4, if the heating disc 4 does not deform, the clamping blocks 21 will not displace, the first distance meter 23 detects the clamping blocks 21 in real time, one side of the two clamping blocks 21 is provided with the first distance meter 23, and the total length of the two clamping grooves 11 in the radial direction of the platform 1 is constant, so the diameter of the rotating heating disc 4 can be calculated, and the heating disc 4 can be detected for 360 degrees of diameter.

[0061] The above embodiments only express one or several embodiments of the present application, and the description is more specific and detailed, but it cannot be understood as a limitation on the protection scope of the present application. It should be noted that for ordinary skilled persons in the art, without departing from the concept of the present application, a number of modifications and improvements can be made, which belong to the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the appended claims.

Claims

1. A semiconductor heating disk deformation detection device, comprising a platform (1) and a detection unit (2) arranged on the platform (1); It is characterized by: The platform (1) is a circular structure. Two clamping grooves (11) are provided on the platform (1) along the radial direction of the platform (1). The straight line connecting the two clamping grooves (11) passes through the center of the platform (1), and the two clamping grooves (11) are symmetrical about the center of the platform (1). The detection unit (2) includes a positioning unit (24) provided on the platform (1) for positioning the heating plate (4). A clamping block (21) is provided in each clamping groove (11). The clamping block (21) slides with the clamping groove (11) along the extension direction of the clamping groove (11). A clamping roller (22) for clamping the heating disk (4) is vertically rotated on the upper part of the clamping block (21), and a first rangefinder (23) is horizontally arranged on the end of each clamping groove (11) away from the center of the platform (1). The detection end of the first rangefinder (23) is horizontally directed toward the clamping block (21). A rotating unit (3) is arranged on the upper part of the platform (1). During detection, the two clamping blocks (21) approach each other and clamp the outer periphery of the heating disk (4) through the two clamping rollers (22), and the rotating unit (3) drives the heating disk (4) to rotate; A pulling unit (25) for pulling the clamping block (21) to move in the clamping groove (11) is provided on the circular side of the clamping block (21) facing the platform (1), the pulling unit (25) comprising a rotating wheel (251) rotatably provided at one end of the clamping groove (11) close to the center of the platform (1), a weight (253) is provided at the lower part of the rotating wheel (251) for moving in the vertical direction, a pulling rope (252) is provided between the weight (253) and the clamping block (21) to connect the two, and the pulling rope (252) is wound around the upper part of the rotating wheel (251); A reel (256) is further provided at one end of the clamping groove (11) away from the center of the platform (1), a traction rope (257) is wound around the reel (256), and one end of the traction rope (257) is led out from the reel (256) and fixedly connected to the clamping block (21).

2. A semiconductor heating disk deformation detection device according to claim 1, characterized in that: The positioning unit (24) includes positioning grooves (242) evenly arranged around the axis of the platform (1), the positioning grooves (242) are opened on the platform (1) along the radial direction of the platform (1), and positioning blocks (241) are slidably arranged on the positioning grooves (242) along the extension direction of the positioning grooves (242). A first driving unit (243) is provided below the platform (1) for driving all the positioning blocks (241) to move synchronously, and the positioning blocks (241) can synchronously approach or move away from the center of the platform (1).

3. A semiconductor heating disk deformation detection device according to claim 2, characterized in that: The first driving unit (243) includes a first gear ring (2433) rotatably arranged at the lower part of the platform (1), the axis of the first gear ring (2433) is colinear with the axis of the platform (1), a plurality of inclined grooves (2434) are evenly opened on the first gear ring (2433) around the axis of the first gear ring (2433), the inclined grooves (2434) correspond to the positioning grooves (242) one by one, the angle between the extension direction of the inclined grooves (2434) and the radial direction of the first gear ring (2433) is an acute angle, the bottom of the positioning block (241) extends into the inclined grooves (2434) and is slidably matched with the inclined grooves (2434), a first gear (2432) is meshed on one side of the first gear ring (2433), and a first rotation driver (2431) for driving the first gear (2432) to rotate is provided at the end of the first gear (2432).

4. A semiconductor heating disk deformation detection device according to claim 1, characterized in that: The rotating unit (3) includes a pressing plate (32) arranged above the platform (1) and moving in a vertical direction. A linear driver (31) for driving the pressing plate (32) to move is arranged on the upper part of the pressing plate (32). The pressing plate (32) is a circular structure. A second driving unit (33) for driving the pressing plate (32) to rotate around the axis of the pressing plate (32) is arranged on one side of the pressing plate (32). When the heating disk (4) is driven to rotate, the bottom of the pressing plate (32) contacts the upper end surface of the heating disk (4).

5. The semiconductor heating disk deformation detection device according to claim 4, characterized in that: A rotating disk (37) is fixedly provided horizontally on the output end of the linear drive (31), a lifting frame (34) is provided on the outer sleeve of the rotating disk (37), an extension rod (35) is fixedly provided vertically on the upper part of the pressing plate (32), the extension rod (35) passes through the rotating disk (37) and is slidably matched with the rotating disk (37), a gap is provided between the rotating disk (37) and the pressing plate (32), a spring (36) is vertically provided in the gap, two ends of the spring (36) are fixedly provided on the rotating disk (37) and the pressing plate (32), and a pressure sensor for monitoring the elastic force of the spring (36) is provided between the rotating disk (37) and the spring (36).

6. The semiconductor heating disk deformation detection device according to claim 5, characterized in that: The second driving unit (33) includes a second gear ring (333) fixedly arranged on the periphery of the rotating disk (37), a second gear (332) meshing on one side of the second gear ring (333), and a second rotary driver (331) driving the second gear (332) to rotate is arranged at the end of the second gear (332), and the second rotary driver (331) is arranged on the lifting frame (34).

7. The semiconductor heating disk deformation detection device according to claim 1, characterized in that: A plurality of rolling balls (12) are provided on the upper portion of the platform (1), and the plurality of rolling balls (12) are arranged in a circular array. The axis of the circular array structure formed by the rolling balls (12) is collinear with the axis of the platform (1), and the rolling balls (12) are in rolling engagement with the heating plate (4) placed on the platform (1).

8. A method for detecting deformation of a semiconductor heating disk, using a semiconductor heating disk deformation detection device according to any one of claims 1 to 7, characterized in that: The specific steps are as follows: S1. Place the heating plate (4) horizontally at the center of the platform (1), and then use the positioning unit (24) to position the heating plate (4). The center of the heating plate (4) after positioning coincides with the center of the platform (1). Then, the rotating unit (3) contacts the upper part of the heating plate (4); the positioning unit (24) releases the heating plate (4); S2, the two clamping blocks (21) arranged in the two clamping grooves (11) begin to approach each other, and after the clamping rollers (22) on the two clamping blocks (21) clamp the peripheral wall of the heating disk (4) respectively, the rotating unit (3) drives the heating disk (4) to rotate around the axis of the platform (1), and the straight-line distance between the two clamping rollers (22) is the actual diameter of the heating disk (4); S3. A first distance meter (23) provided at the ends of the two clamping grooves (11) performs real-time detection on the corresponding clamping blocks (21). The distance between the ends of the two clamping grooves (11) and the center of the platform (1) is constant. By subtracting the distance measured in real time by the first distance meter (23), the actual diameter of the heating plate (4) can be calculated, thereby completing the detection of the roundness of the heating plate (4).

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