Grinding fluid supply device

Abstract

The invention discloses a grinding fluid supply device, and relates to the technical field of grinding equipment. The device comprises a frame body, wherein a liquid inlet pipe is mounted on the frame body; according to the technical scheme, a separation-detection-supplement closed-loop system is constructed, harmful chippings in the grinding fluid are efficiently removed, more importantly, real-time monitoring and accurate supplement of abrasive particle loss in the grinding fluid are achieved, and compared with a traditional scheme that the whole groove of grinding fluid has to be frequently replaced due to abrasive exhaustion, the grinding fluid is more accurate in detection and supplement. According to the device, a base liquid carrier of basic grinding liquid can be utilized to the maximum extent, the function of the device can be recovered only by supplementing a relatively small amount of concentrated grinding materials, the problem that a traditional device can only filter chippings and cannot supplement consumed core grinding materials is solved, it can be ensured that circulating grinding liquid always maintains the grinding material concentration meeting the technological requirement, and the grinding efficiency is improved. Therefore, remarkable and multi-aspect comprehensive benefits are brought in the aspects of guaranteeing the machining quality stability, reducing the production cost, improving the automation level and the like.

Description

Technical Field

[0001] The present invention relates to the technical field of grinding equipment, and in particular to a grinding liquid supply device. Background Art

[0002] A slurry supply system is a mechanical or electromechanical system specifically designed to continuously, stably, and controllably deliver abrasive fluid (also known as polishing slurry or grinding fluid) to the processing area (the contact area between the grinding disc / pad and the workpiece) during grinding, polishing, or other surface finishing processes. It's more than a simple "pump and piping" system; it integrates multiple functional units to ensure the effectiveness, efficiency, and consistency of the grinding process. For example, in a CMP polisher, the slurry contains hard particles (such as silica, alumina, and cerium oxide). Under the pressure and rotation of the polishing pad, these particles directly contact the wafer surface, causing micro-cutting and scraping. Furthermore, the high-speed friction between the wafer, polishing pad, and abrasive particles during polishing generates significant heat. The slurry, acting as a liquid medium, effectively absorbs and dissipates this heat as it flows across the polishing interface, preventing localized overheating that could damage the wafer, deform the polishing pad, or cause runaway chemical reactions.

[0003] Although the grinding liquid can be reused after being recovered and filtered, the abrasive particles in the grinding liquid will be consumed during the grinding process, affecting the grinding effect of the grinding liquid. Existing technologies such as CN117067093B propose a grinding liquid supply and delivery device for semiconductor grinding equipment. Although it has a filtering structure for removing debris generated by processing in the grinding liquid, it is unable to replenish the abrasive particles consumed in the grinding liquid. Moreover, the filtering structure adopted is a single filter mesh filtration, which requires timely backwashing to remove impurities in order to maintain the filtering effect. In order to reasonably improve this problem, the present invention proposes a grinding liquid supply device. Summary of the Invention

[0004] The purpose of the present invention is to solve the technical problem that although the existing grinding liquid supply device has a filtering structure for removing debris generated by processing in the grinding liquid, it is unable to replenish the abrasive particles consumed in the grinding liquid. The present invention provides a grinding liquid supply device.

[0005] In order to achieve the above-mentioned purpose, the present invention specifically adopts the following technical solutions: A grinding liquid supply device, comprising: a frame on which a liquid inlet pipe is mounted for inputting the grinding liquid to be processed; The separation mechanism is provided on the frame, and its inlet is connected to the liquid inlet pipe. The separation mechanism can separate the metal impurities in the grinding liquid by means of centrifugal force to obtain purified grinding liquid; a barrel body, connected to the outlet of the separation mechanism, and used for receiving and storing the purified grinding liquid from the separation mechanism; A detection mechanism is provided on the frame and is used to detect the loss degree of abrasive particles in the purified grinding liquid in the barrel; The feeding device is arranged on the frame and can add concentrated grinding liquid to the purified grinding liquid according to the detection result of the detection mechanism.

[0006] Furthermore, the separation mechanism includes an inverted cone cylinder rotatably mounted on the frame, the top of the inverted cone cylinder is connected to an annular plate, and covers the liquid outlet end of the liquid inlet pipe, the peripheral side of the annular plate is provided with a liquid outlet, the barrel body is hollow annular, the inverted cone cylinder is arranged on the inner side of its ring, the top of the barrel body is provided with an annular opening, and covers multiple liquid outlets on the outer side of the annular plate, the inverted cone cylinder is constructed with multiple annular protrusions, which are distributed on the inner wall of the inverted cone cylinder at intervals along the axis of the inverted cone cylinder, and inclined surfaces are constructed on both sides of the annular protrusions, a dispersion mechanism is provided in the inverted cone cylinder for dispersing the grinding liquid flowing out of the liquid inlet pipe to the inner wall of the inverted cone cylinder, the bottom end of the inverted cone cylinder is constructed with a discharge port, and a material guide trough is obliquely arranged on the frame, and its top covers the discharge port.

[0007] Furthermore, the angle between the upper inclined surfaces of the annular protrusion gradually decreases from the bottom end of the inverted cone cylinder toward the top end thereof.

[0008] Furthermore, the dispersion mechanism includes a conical sleeve, dispersion blocks are distributed in an annular manner on the outside of the conical sleeve, a rotating rod is connected to the inside of the conical sleeve, the bottom end of the rotating rod rotates through the material guide groove, and a clamping valve is provided on the liquid inlet pipe, and intermittent material discharge is achieved through the clamping valve.

[0009] Furthermore, the detection mechanism includes a pressure sensor installed on the frame, the barrel is arranged on the top of the pressure sensor, and a liquid level sensor is installed on the top surface of the barrel.

[0010] Furthermore, the feeding device includes a box body installed on the frame, which is connected to the barrel body through a hose, and the hose is provided with a first solenoid valve. The frame is connected to a liquid storage barrel, which is connected to the box body through a metering valve, and a drain port is constructed at the bottom of the box body.

[0011] Furthermore, the box body is hollow and annular, with a ring block rotatably mounted on the inner top surface, and a plurality of vertical rods distributed in an annular manner on the bottom of the ring block, the bottom ends of the vertical rods are connected to inclined plates and slidingly overlapped with the inner wall of the box body.

[0012] Furthermore, a driving motor is installed on the frame, the bottom end of the rotating rod is connected to the first bevel gear, the bottom end of the inverted cone cylinder is connected to the second bevel gear, the output end of the driving motor is connected to the third bevel gear, and is meshed with the first bevel gear and the second bevel gear. An annular block is rotatably installed on the frame, which is located on the inner side of the box ring and is magnetically connected to the annular block. The annular block is connected to the second bevel gear through a connecting plate.

[0013] Furthermore, a mounting plate is connected to the top of the frame, and the liquid inlet pipe is installed on the mounting plate. A plurality of sound transmission ports are distributed in a ring on the mounting plate, and the ring plate covers the bottom ends of the plurality of sound transmission ports. A sleeve is connected to the top of the mounting plate, and a sound-emitting component is provided in the sleeve, and the open end of the sleeve covers the top ends of the plurality of sound transmission ports.

[0014] Furthermore, the sound-generating component includes a tuning fork distributed in an annular manner in the sleeve, and a plurality of movable blocks are distributed in an annular manner on the circumferential side of the sleeve. The end of the movable block slides through the sleeve and overlaps with the end of the tuning fork. The movable block is connected to the circumferential side of the sleeve through a reset spring. A ring plate is rotatably mounted on the mounting plate, and is equipped with an annular motor for driving the ring plate to rotate. A plurality of arc-shaped convex surfaces are distributed in an annular manner on the inner side of the ring plate, and a roller is rotatably mounted on the end of the movable block and rolls and overlaps with the arc-shaped convex surface.

[0015] The beneficial effects of the present invention are as follows: In the technical solution proposed by the present invention, a closed-loop system of "separation-detection-replenishment" is constructed, which not only efficiently removes harmful debris in the grinding liquid, relies on the centrifugal structure to complete the separation of the grinding liquid and impurities, reduces maintenance and cleaning, and more importantly, realizes real-time monitoring and precise replenishment of abrasive particle loss in the grinding liquid. Compared with the traditional solution in which the entire tank of grinding liquid has to be frequently replaced due to depletion of abrasive, this device can maximize the utilization of the base liquid carrier of the basic grinding liquid, and only needs to replenish a relatively small amount of concentrated abrasive to restore its function, solving the problem that traditional devices can only filter debris but cannot replenish consumed core abrasives, and can ensure that the circulating grinding liquid maintains the abrasive concentration range that meets the process requirements, bringing significant and multi-faceted comprehensive benefits in terms of ensuring processing quality stability, reducing production costs, and improving automation levels. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a three-dimensional structural diagram of the present invention; Figure 2 This invention Figure 1 A half-section schematic diagram of the structure; Figure 3 This invention Figure 2 Front view of Figure 4 It is a schematic diagram of the frame structure of the present invention; Figure 5 This invention Figure 4 A half-section side view of the structure; Figure 6 It is a schematic structural diagram of the separation mechanism of the present invention; Figure 7 This invention Figure 6 A half-section side view of the structure; Figure 8 It is a schematic diagram of the barrel structure of the present invention; Figure 9 This invention Figure 8 A half-section side view of the structure; Figure 10 This invention Figure 1 Schematic diagram of the local structure; Figure 11 This invention Figure 10 A magnified view of the structure at center A; Figure 12 This invention Figure 10 A half-section side view of the structure; Figure 13 It is a structural diagram of the connection relationship between the present invention and the grinding liquid output pipeline.

[0017] Figure numerals: 1, frame; 2, liquid inlet pipe; 3, separation mechanism; 301, inverted cone cylinder; 302, annular plate; 303, liquid outlet; 304, annular opening; 305, annular protrusion; 306, inclined surface; 307, dispersion mechanism; 3071, cone sleeve; 3072, dispersion block; 3073, rotating rod; 308, discharge port; 309, guide trough; 4, barrel; 5, detection mechanism; 501, pressure sensor; 502, liquid level sensor; 6, feeding device; 601, box; 602, hose; 603, first solenoid valve; 604, liquid storage barrel; 605, meter Measuring valve; 7. Pinch valve; 8. Ring block; 9. Vertical rod; 10. Inclined plate; 11. Drive motor; 12. First bevel gear; 13. Second bevel gear; 14. Third bevel gear; 15. Ring block; 16. Connecting plate; 17. Mounting plate; 18. Sound transmission port; 19. Housing; 20. Sounding assembly; 2001. Tuning fork; 2002. Movable block; 2003. Return spring; 2004. Ring plate; 2005. Ring motor; 2006. Arc convex surface; 2007. Roller; 21. Baffle; 22. Magnet; 23. Drain port; 24. Output pipeline; 25. Three-way solenoid valve. DETAILED DESCRIPTION

[0018] To make the objectives, technical solutions and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention.

[0019] like Figures 1-13As shown, an embodiment of the present invention provides a grinding liquid supply device, comprising: The frame 1 is provided with a liquid inlet pipe 2, which is used to input the grinding liquid to be processed; The separation mechanism 3 is provided on the frame 1, and its inlet is connected to the liquid inlet pipe 2. The grinding liquid to be treated can enter the separation mechanism 3 through the liquid inlet pipe 2. The separation mechanism 3 separates the metal impurities in the grinding liquid with the help of centrifugal force to obtain purified grinding liquid. It should be specifically explained here that the abrasive particles and the metal impurities have different densities. The selection of the centrifugal separation filtration method can effectively separate the abrasive particles with similar particle diameters from the metal impurities, so that the concentration of the abrasive particles in the grinding liquid will not be further reduced, so that it has a basis for recycling. The barrel 4 is connected to the outlet of the separation mechanism 3 and is used to receive and store the purified grinding liquid from the separation mechanism 3; The detection mechanism 5 is provided on the frame 1 and is used to detect the loss degree of abrasive particles in the purified grinding liquid in the barrel 4. The detection mechanism 5 can monitor the loss degree of abrasive particles, a key component in the circulating grinding liquid, in real time or periodically. The feeding device 6 is provided on the frame 1. It can add concentrated grinding liquid to the purified grinding liquid according to the detection results of the detection mechanism 5. Through real-time monitoring and automatic replenishment of abrasives, the stability of the grinding liquid performance is effectively maintained, thereby ensuring the consistency and repeatability of the processing process and reducing the occurrence of defective products; The process of using the device is as follows: separation and removal of impurities, detection of abrasive concentration, and replenishment of concentrate as needed. All of the above are completed automatically within the device without the need for human operation, which can improve the automation level and operation efficiency of the production line. In the technical solution proposed in the present invention, a "separation-detection-replenishment" closed-loop system is constructed, which not only efficiently removes harmful debris in the grinding liquid, but more importantly, realizes real-time monitoring and precise replenishment of abrasive particle loss in the grinding liquid. Compared with the traditional solution in which the entire tank of grinding liquid has to be frequently replaced due to depletion of abrasive, this device can maximize the utilization of the base liquid carrier of the basic grinding liquid, and only needs to replenish a relatively small amount of concentrated abrasive to restore its function, solving the problem that traditional devices can only filter debris but cannot replenish consumed core abrasives. It can ensure that the circulating grinding liquid always maintains an abrasive concentration that meets the process requirements, thereby bringing significant and multi-faceted comprehensive benefits in terms of ensuring processing quality stability, reducing production costs, and improving the level of automation.

[0020] like Figure 2 、 Figure 3 、 Figure 7 、 Figure 9 and Figure 12As shown, in some embodiments, the separation mechanism 3 includes an inverted cone cylinder 301 rotatably mounted on the frame 1, that is, the tip faces downward, the inner wall is frosted, and the inner diameter gradually decreases from top to bottom. The top of the inverted cone cylinder 301 is connected to an annular plate 302, and the top of the annular plate 302 is constructed with a baffle 21 for intercepting the grinding liquid and covering the liquid outlet end of the liquid inlet pipe 2. The grinding liquid can enter the inverted cone cylinder 301 through the liquid inlet pipe 2, and a liquid outlet 303 is provided on the peripheral side of the annular plate 302. The barrel body 4 is hollow and annular, and the inverted cone cylinder 301 is provided on the inner side of the ring. An annular opening 304 is provided on the top of the barrel body 4, and multiple liquid outlets 303 on the outer side of the annular plate 302 are covered. The grinding liquid that separates from the inverted cone cylinder 301 from the liquid outlet 303 under the action of centrifugal force can enter the barrel body 4 through the annular opening 304, as shown in FIG. Figure 3 and Figure 9 As shown, a plurality of annular protrusions 305 are constructed on the inverted conical cylinder 301, which are spaced apart on the inner wall of the inverted conical cylinder 301 along the axis of the inverted conical cylinder 301. An inclined surface 306 is constructed on both sides of the annular protrusions 305. A dispersion mechanism 307 is provided in the inverted conical cylinder 301 for dispersing the grinding liquid flowing out of the liquid inlet pipe 2 onto the inner wall of the inverted conical cylinder 301. A discharge port 308 is constructed at the bottom end of the inverted conical cylinder 301, and a material guide trough 309 is obliquely provided on the frame 1, and its top end covers the discharge port 308. The inner wall of the inverted cone body 301 transitions to the annular protrusion 305 through an inclined surface 306. By changing the angle of the inner wall of the inverted cone body 301, it is possible to increase the difficulty of metal impurities passing through without affecting the passage of the grinding liquid. The principle here is as follows: when the inverted cone cylinder 301 is driven to rotate, the grinding liquid entering the inverted cone cylinder 301 through the liquid inlet pipe 2 can be dispersed to the inner wall of the inverted cone cylinder 301 through the dispersion mechanism 307. Due to the different qualities of the grinding liquid and the grinding particles therein and the metal impurities, under the centrifugal force generated by the rotation of the inverted cone cylinder 301, the grinding liquid and grinding particles with lighter texture that are in contact with them will form a spiral flow sliding from the bottom end to the top end on the inner wall of the inverted cone cylinder 301, and will be sequentially dispersed through the inclined surface 306. The liquid passes over the multiple annular protrusions 305 and is discharged from the inverted conical cylinder 301 into the barrel 4 through the multiple liquid outlets 303 on the annular plate 302. However, the metal impurities with higher density will stay at the transition between the lower inclined surface 306 of the multiple annular protrusions 305 and the inner wall of the inverted conical cylinder 301 due to the combined effects of their own gravity, the resistance of the frosted inner wall, and the resistance of the inclined surface 306 of the annular protrusions 305. After the inverted conical cylinder 301 stops rotating, it moves toward the discharge port 308 until it falls on the guide trough 309. It should be specifically explained here that the design of the dispersion mechanism 307 can, on the one hand, block the grinding liquid and prevent it from directly entering the discharge port 308. On the other hand, by dispersing the grinding liquid through the dispersion mechanism 307, the grinding liquid and metal impurities can be preliminarily separated before contacting the inverted cone cylinder 301, and the contact between the grinding liquid and the inner wall of the inverted cone cylinder 301 can be made more uniform, thereby improving the separation effect of centrifugal force on the grinding liquid and metal impurities.

[0021] like Figure 2 、 Figure 3 、 Figure 7 、 Figure 9 and Figure 12 As shown, in some embodiments, the angle between the upper inclined surfaces 306 of the annular protrusion 305 gradually decreases from the bottom end of the inverted cone cylinder 301 toward the top end thereof, as shown in FIG. Figure 3 As shown, the closer the annular protrusion 305 is to the top of the inverted cone cylinder 301, the lower the angle between the lower inclined surface 306 and the axis of the inverted cone cylinder 301, that is, the closer it is to the vertical line, so that the difficulty of metal impurities passing through gradually increases from bottom to top, which can effectively suppress the "wall climbing effect" of metal impurities and solve the problem of escape of fine-grained metal impurities.

[0022] like Figure 2 and Figure 3 As shown, in some embodiments, the dispersion mechanism 307 includes a conical sleeve 3071, the tip of which is upward and is located between the liquid inlet pipe 2 and the discharge port 308. Dispersion blocks 3072 are distributed in an annular manner on the outside of the conical sleeve 3071. The dispersion blocks 3072 are strip-shaped. A rotating rod 3073 is connected to the inside of the conical sleeve 3071. The bottom end of the rotating rod 3073 rotates and passes through the material guide groove 309. By driving the rotating rod 3073 to rotate, the falling grinding liquid can be dispersed to the inner wall of the inverted cone cylinder 301 through the dispersion block 3072. A clamping valve 7 is provided on the liquid inlet pipe 2. The liquid inlet pipe 2 is a deformable hose, and intermittent unloading is achieved through the clamping valve 7. In conjunction with the conical sleeve 3071, the dispersion effect of the grinding liquid on the inner wall of the inverted cone cylinder 301 can be improved.

[0023] like Figure 12 As shown, in some embodiments, the detection mechanism 5 includes a pressure sensor 501 mounted on the frame 1, and the barrel 4 is arranged on the top of the pressure sensor 501. The pressure sensor 501 can measure the weight of the barrel 4 plus the grinding liquid, and the weight of the grinding liquid can be obtained after subtracting the weight of the barrel 4. A liquid level sensor 502 is installed on the top surface of the barrel 4. The liquid level sensor 502 can measure the liquid level of the grinding liquid in the barrel 4, and the volume of the grinding liquid can be obtained by multiplying it by the bottom area of ​​the barrel 4. The principle here is as follows: Since the density of abrasive particles is greater than the density of liquid carrier, under the premise of the same weight, the abrasive mass in high-concentration grinding liquid accounts for a large proportion, the overall density is higher at the same weight, and the volume is smaller, while the liquid carrier in low-concentration grinding liquid accounts for a large proportion, the overall density is lower at the same weight, and the volume is larger. For example, when the pressure sensor 501 detects that the weight of the grinding liquid in the barrel body 4 reaches ten kilograms, the grinding liquid level height can be measured by the liquid level sensor 502, that is, the bottom area of ​​the barrel body 4 is multiplied by the grinding liquid level height to obtain the volume of the grinding liquid, and the actual volume is compared with the volume of the grinding liquid before grinding. According to the increase in the grinding liquid volume, the degree of loss of abrasive particles in the grinding liquid can be judged. At the same time, according to the loss of abrasive particles in the grinding liquid, the volume of ten kilograms of grinding liquid can be divided into multiple loss intervals, and concentrated grinding liquid can be quantitatively added to the grinding liquid according to the interval where the detection value is located.

[0024] like Figure 2 、 Figure 3 、 Figure 6 and Figure 13 As shown, in some embodiments, the feeding device 6 includes a box 601 installed on the frame 1, which is connected to the barrel 4 through a hose 602, that is, it will not affect the measured value of the pressure sensor 501, and a first solenoid valve 603 is provided on the hose 602. When the first solenoid valve 603 is opened, the grinding liquid in the barrel 4 can enter the box 601 through the hose 602. The frame 1 is connected to a liquid storage barrel 604, which is connected to the box 601 through a metering valve 605. By controlling the opening time of the metering valve 605, the concentrated grinding liquid is quantitatively added to the box 601 and mixed with the grinding liquid in the box 601. A drain port 23 is configured at the bottom of the box 601. Only after the grinding liquid is completely mixed, the drain port 23 can be opened to discharge the grinding liquid from the box 601; It should be specified that, Figure 13 As shown, in actual use, the discharge ports 23 on the two devices can be connected to the output pipeline 24 of the grinding liquid through the three-way solenoid valve 25. By starting the two devices separately, when the box 601 on the first device mixes the grinding liquid, the grinding liquid in the box 601 on the second device is completely mixed and can be transported to the output pipeline 24. During the transportation process, the grinding liquid in the box 601 on the first device is completely mixed. After the grinding liquid in the box 601 on the second device is transported, the output pipeline 24 can be switched through the three-way solenoid valve 25 to connect it with the box 601 on the first device. By cycling the above operations, the purpose of continuously transporting the grinding liquid to the output pipeline 24 can be achieved.

[0025] like Figure 2As shown, in some embodiments, the box body 601 is hollow and annular, and an annular plate 302 is rotatably mounted on the inner top surface thereof. A plurality of vertical rods 9 are distributed in an annular manner on the bottom of the annular plate 302. The bottom ends of the vertical rods 9 are connected to inclined plates 10, which are slidably overlapped with the inner wall of the box body 601. The lower end of the inclined plate 10 is in sliding contact with the inner bottom surface of the box body 601, and the two sides of the inclined plate 10 are in sliding contact with the inner walls of the box body 601 on both sides respectively. By driving the annular plate 302 to rotate, multiple inclined plates 10 can be driven to rotate together. At this time, the contact end of the inclined plate 10 with the bottom surface of the box body 601 is its forward end. When it rotates, the grinding liquid can slide along the top surface of the inclined plate 10, so that the grinding liquid can be mixed with the supplementary concentrated grinding liquid.

[0026] like Figure 3 and Figure 7 As shown, in some embodiments, a drive motor 11 is installed on the frame 1, the bottom end of the rotating rod 3073 is connected to the first bevel gear 12, the bottom end of the inverted cone cylinder 301 is connected to the second bevel gear 13, and the output end of the drive motor 11 is connected to the third bevel gear 14, which is engaged with the first bevel gear 12 and the second bevel gear 13. When the drive motor 11 is working, the first bevel gear 12 and the second bevel gear 13 can be driven to rotate in the opposite direction through the third bevel gear 14, so that the two can apply a reverse force to the grinding liquid and the metal impurities therein, thereby further improving the separation effect. A ring block 15 is rotatably installed on the frame 1, which is located on the inner side of the ring of the box 601 and is magnetically connected to the ring block 8. A magnet 22 is provided on the outer side of the ring block 15 and the inner side of the ring block 8, so that when the ring block 15 rotates, the ring block 8 can be driven to rotate. The ring block 15 is connected to the second bevel gear 13 through the connecting plate 16. When the barrel body 4 collects the grinding liquid and the box body 601 mixes the grinding liquid, the first solenoid valve 603 is in a closed state. This design can link the inverted cone cylinder 301 with the ring block 8 to synchronously realize the separation and mixing of the grinding liquid.

[0027] like Figure 10-12 As shown, in some embodiments, a mounting plate 17 is connected to the top of the frame 1, and the liquid inlet pipe 2 is installed on the mounting plate 17. A plurality of sound transmission ports 18 are distributed in an annular manner on the mounting plate 17, and the ring block 8 covers the bottom ends of the plurality of sound transmission ports 18. A sleeve 19 is connected to the top of the mounting plate 17, and a sound generating assembly 20 is provided in the sleeve 19, and the open end of the sleeve 19 covers the top ends of the plurality of sound transmission ports 18. When the inverted cone cylinder 301 stops rotating, the sound can be emitted by driving the sound-generating component 20. The sound can enter the inverted cone cylinder 301 through the sound transmission port 18 and cause the resonance of the metal impurities on the inner wall of the inverted cone cylinder 301, so that the metal impurities can be separated from the inner wall of the inverted cone cylinder 301 and fall smoothly into the discharge port 308.

[0028] like Figure 10-12As shown, in some embodiments, the sound generating assembly 20 includes a tuning fork 2001 distributed in an annular manner within the housing 19. The tuning fork 2001 is arranged as follows: Figure 12 As shown, a plurality of movable blocks 2002 are distributed in an annular manner around the sleeve 19, and the ends of the movable blocks 2002 slide through the sleeve 19. The sliding directions of the plurality of movable blocks 2002 are perpendicular to the axis of the sleeve 19 and are in contact with and overlapped with the ends of the tuning fork 2001. The movable blocks 2002 are connected to the circumference of the sleeve 19 via a return spring 2003. A ring plate 2004 is rotatably mounted on the mounting plate 17, and is equipped with a ring motor 2005 for driving the ring plate 2004 to rotate. A plurality of arcuate convex surfaces 2006 are distributed in an annular manner on the inner side of the ring plate 2004. A roller 2007 is rotatably mounted on the end of the movable block 2002 and is in rolling contact with the arcuate convex surface 2006. The return spring 2003 is a compression spring, which is used to provide a thrust forcing the roller 2007 on the movable block 2002 to contact the arcuate convex surface 2006. When the ring motor 2005 drives the ring plate 2004 to rotate, the roller 2007 can slide on the arc-shaped convex surface 2006, thereby driving the movable block 2002 to compress the return spring 2003 and move toward the tuning fork 2001. When the roller 2007 moves to the middle of the arc-shaped convex surface 2006, the end of the movable block 2002 can collide with the end of the tuning fork 2001, causing the tuning fork 2001 to vibrate and make a sound. When the roller 2007 passes the middle of the arc-shaped convex surface 2006, the return spring 2003 is reset, and the movable block 2002 moves away from the tuning fork 2001.

[0029] The above description of the disclosed embodiments is intended to enable one skilled in the art to implement or use the present invention. Various modifications to these embodiments will be readily apparent to one skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not limited to the embodiments shown herein but is intended to conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A polishing liquid supply device, characterized in that: include: A frame (1) is provided with a liquid inlet pipe (2) mounted thereon, the liquid inlet pipe (2) being used to input the grinding liquid to be processed; A separation mechanism (3) is provided on the frame (1), the inlet of which is connected to the liquid inlet pipe (2). The separation mechanism (3) can separate metal impurities in the grinding liquid by means of centrifugal force; The barrel (4) is connected to the outlet of the separation mechanism (3) and is used to receive and store the purified grinding liquid from the separation mechanism (3); A detection mechanism (5) is provided on the frame (1) and is used to detect the degree of loss of abrasive particles in the purified grinding liquid in the barrel (4); The feeding device (6) is arranged on the frame (1) and can add concentrated grinding liquid to the purified grinding liquid according to the detection result of the detection mechanism (5).

2. The polishing liquid supply device according to claim 1, characterized in that: The separation mechanism (3) comprises an inverted cone cylinder (301) rotatably mounted on a frame (1); the top of the inverted cone cylinder (301) is connected to an annular plate (302) and covers the liquid outlet end of the liquid inlet pipe (2); a liquid outlet (303) is provided on the circumference of the annular plate (302); the barrel (4) is hollow and annular, the inverted cone cylinder (301) is provided on the inner side of the annular plate (302); an annular opening (304) is provided on the top of the barrel (4) and covers a plurality of liquid outlets (303) on the outer side of the annular plate (302); and a plurality of An annular protrusion (305) is distributed on the inner wall of the inverted cone cylinder (301) at intervals along the axis of the inverted cone cylinder (301), and inclined surfaces (306) are constructed on both sides of the annular protrusion (305). A dispersion mechanism (307) is provided in the inverted cone cylinder (301) for dispersing the grinding liquid flowing out of the liquid inlet pipe (2) onto the inner wall of the inverted cone cylinder (301), and a discharge port (308) is constructed at the bottom end of the inverted cone cylinder (301). A material guide trough (309) is obliquely arranged on the frame (1), and its top end covers the discharge port (308).

3. The polishing liquid supply device according to claim 2, characterized in that: The angle between the upper inclined surfaces (306) of the annular protrusion (305) gradually decreases from the bottom end of the inverted cone cylinder (301) toward the top end thereof.

4. The polishing liquid supply device according to claim 2, characterized in that: The dispersion mechanism (307) comprises a conical sleeve (3071), the outer side of which is provided with dispersion blocks (3072) in an annular shape, the inner side of which is connected to a rotating rod (3073), the bottom end of which rotates to penetrate the material guide trough (309), and the liquid inlet pipe (2) is provided with a pinch valve (7), and intermittent material discharge is achieved through the pinch valve (7).

5. The polishing liquid supply device according to claim 2, characterized in that: The detection mechanism (5) includes a pressure sensor (501) installed on the frame (1), the barrel (4) is arranged on the top of the pressure sensor (501), and a liquid level sensor (502) is installed on the top surface of the barrel (4).

6. The polishing liquid supply device according to claim 5, characterized in that: The feeding device (6) includes a box (601) installed on a frame (1), which is connected to the barrel (4) through a hose (602), and a first solenoid valve (603) is provided on the hose (602). The frame (1) is connected to a liquid storage barrel (604), which is connected to the box (601) through a metering valve (605). The bottom of the box (601) is configured with a liquid discharge port (23).

7. The polishing liquid supply device according to claim 6, characterized in that: The box body (601) is in a hollow ring shape, and a ring block (8) is rotatably mounted on the inner top surface thereof. A plurality of vertical rods (9) are distributed in a ring shape on the bottom of the ring block (8). The bottom ends of the vertical rods (9) are all connected to inclined plates (10) and are slidably overlapped with the inner wall of the box body (601).

8. The polishing liquid supply device according to claim 7, characterized in that: The frame (1) is provided with a driving motor (11), the bottom end of the rotating rod (3073) is connected to a first bevel gear (12), the bottom end of the inverted cone cylinder (301) is connected to a second bevel gear (13), the output end of the driving motor (11) is connected to a third bevel gear (14), and is meshed with the first bevel gear (12) and the second bevel gear (13), and an annular block (15) is rotatably provided on the frame (1), which is located on the inner side of the ring of the box (601) and is magnetically connected to the annular block (8), and the annular block (15) is connected to the second bevel gear (13) via a connecting plate (16).

9. The polishing liquid supply device according to claim 2, wherein: The top of the frame (1) is connected to a mounting plate (17), the liquid inlet pipe (2) is mounted on the mounting plate (17), a plurality of sound transmission ports (18) are distributed in an annular pattern on the mounting plate (17), the annular plate (302) covers the bottom ends of the plurality of sound transmission ports (18), the top of the mounting plate (17) is connected to a sleeve (19), a sound generating assembly (20) is provided in the sleeve (19), and the open end of the sleeve (19) covers the top ends of the plurality of sound transmission ports (18).

10. The polishing liquid supply device according to claim 9, characterized in that: The sound-generating component (20) comprises a tuning fork (2001) annularly distributed within a sleeve (19); a plurality of movable blocks (2002) annularly distributed around the circumference of the sleeve (19); an end of the movable block (2002) slides through the sleeve (19) and abuts against and overlaps the end of the tuning fork (2001); the movable block (2002) is connected to the circumference of the sleeve (19) via a return spring (2003); a ring plate (2004) is rotatably mounted on the mounting plate (17), and a ring motor (2005) is provided for driving the ring plate (2004) to rotate; a plurality of arc-shaped convex surfaces (2006) are annularly distributed on the inner side of the ring plate (2004); a roller (2007) is rotatably mounted on the end of the movable block (2002) and rolls and overlaps with the arc-shaped convex surface (2006).

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