Exposure machine multi-physical field compensation method and system

Abstract

The invention provides a multi-physical field compensation method and system for an exposure machine, and the method comprises the following steps: constructing a dynamic error transfer model, and obtaining a coupling parameter based on the output of a coupling function; carrying out eigenvalue decomposition on the coupling parameters, screening principal component vectors to obtain a mapping matrix, modulating the mapping matrix through a thermal weight matrix to obtain a modulation matrix, and carrying out space-time weight reconstruction based on the modulation matrix to obtain a four-dimensional compensation parameter matrix; the control parameters of the air supply pressure of the air floating guide rail, the deflection angle of the DMD micromirror and the power of the laser are adjusted. A dynamic error transfer model containing mechanical-thermal-optical coupling characteristics is constructed, a vibration spectrum, temperature field distribution and light intensity energy data are fused in real time, compensation parameters are subjected to space-time weight reconstruction to obtain a four-dimensional compensation parameter matrix, the real-time performance of matching correction is improved, and therefore the parameter compensation effect and the machining precision are improved.

Description

Technical Field

[0001] The present invention relates to the technical field of exposure machines, and in particular to a multi-physical field compensation method and system for an exposure machine. Background Art

[0002] Current exposure machine parameter compensation technology mainly uses a single sensor (such as an accelerometer or temperature sensor) to independently collect data, and performs step-by-step compensation for mechanical vibration, temperature drift or light intensity deviation based on static or quasi-static models (such as linear superposition, empirical formula).

[0003] In the existing technology, local control is achieved through table lookup or low-dimensional parameter mapping, which makes it difficult to effectively characterize the spatiotemporal coupling effects of multiple physical fields under high-speed dynamic conditions. In addition, the compensation parameter dimension is limited and cannot cover the complex scenarios of nonlinear interactions in the lithography process. Summary of the Invention

[0004] In view of the shortcomings of the existing technology, the purpose of the present invention is to provide an exposure machine multi-physical field compensation method and system, aiming to solve the technical problem of poor parameter compensation effect in the existing technology.

[0005] In order to achieve the above objectives, in a first aspect, the present invention provides an exposure machine multi-physical field compensation method, comprising the following steps: The exposure platform vibration spectrum, temperature field distribution and light intensity energy distribution data are collected synchronously through a three-axis accelerometer, an infrared thermal imager and a CCD light intensity sensor; A dynamic error transfer model incorporating mechanical-thermal-optical coupling characteristics is constructed to establish a coupling function representing the nonlinear mapping relationship between vibration acceleration, temperature gradient, and light intensity deviation. The coupling parameters are then output based on the exposure stage vibration spectrum, temperature field distribution, and light intensity energy distribution data. Performing eigenvalue decomposition on the coupling parameters and screening the principal component vectors to obtain a mapping matrix, then modulating the mapping matrix by a thermal weight matrix to obtain a modulation matrix, and performing spatiotemporal weight reconstruction based on the modulation matrix to obtain a four-dimensional compensation parameter matrix including spatial coordinates and time variables; According to the four-dimensional compensation parameter matrix solved in real time, the control parameters of the air supply pressure of the air-floating guide rail, the deflection angle of the DMD micromirror and the laser power are adjusted synchronously.

[0006] According to one aspect of the above technical solution, the calculation expression of the dynamic error transfer model is: ; ; Where F is the coupling function, is the coupling parameter, is the partial derivative, is the response time of the mechanical structure characteristics, is the thermal-optical coupling coefficient, is the vibration acceleration, For the current moment, For historical moments, is the temperature change rate, is the discretized distance corresponding to the temperature change rate, is the light intensity deviation, represents the vibration acceleration in the i-th direction, represents the temperature gradient in the jth direction, represents the light intensity deviation of the kth type, represents the time decay factor, is the exposure wavelength.

[0007] According to one aspect of the above technical solution, the steps of performing eigenvalue decomposition on the coupling parameters and screening the principal component vectors to obtain a mapping matrix specifically include: Performing dimension normalization and symmetry processing on the coupling parameters in sequence to obtain a symmetric tensor; The symmetric tensor is expanded based on the energy density to obtain a modal matrix, the modal matrix is ​​subjected to eigenvalue decomposition, and the principal component vector is screened to obtain a mapping matrix.

[0008] According to one aspect of the above technical solution, the conditional expression for screening the principal component vector is: ; Where, is the residual error of the nth order principal component, is the kernel tensor after eigenvalue decomposition, is the maximum singular value of the modal matrix after eigenvalue decomposition, corresponding to the main energy distribution direction in the data, is the sensitivity coefficient, is the effective length of the air-bearing guide rail, and NA is the numerical aperture of the objective lens.

[0009] According to one aspect of the above technical solution, the calculation expression of the modulation matrix is: ; ; ; Where, is the modulation matrix, is the thermal weight matrix, is the mapping matrix, 、 、 are the error response vectors corresponding to the three-axis accelerometer, infrared thermal imager and CCD light intensity sensor, respectively. is the vibration suppression factor of temperature drift, is the thermal expansion compensation factor, is the coefficient of thermal expansion, is the refractive index temperature compensation factor, represents a diagonal function.

[0010] According to one aspect of the above technical solution, the steps of performing spatiotemporal weight reconstruction based on the modulation matrix to obtain a four-dimensional compensation parameter matrix including spatial coordinates and time variables specifically include: The spatial weight function is calculated based on the center coordinates of the current exposure area and the light intensity diffusion radius, and the time weight function is calculated based on the material characteristic time constant and the raster scanning period; Expanding the modulation matrix to four dimensions based on the spatial weight function and the temporal weight function to obtain a four-dimensional matrix including spatial coordinates and time variables; The corresponding four-dimensional compensation parameter matrix is ​​calculated for each spatiotemporal unit based on the sensor data.

[0011] According to one aspect of the above technical solution, the expression of the four-dimensional compensation parameter matrix is: ; ; ; Where, is the spatial weight function, is the time weight function, represents the outer product of the tensor, (x c ,y c ) is the center coordinate of the current exposure area, a x , a y The standard deviation of the Gaussian distribution controls the light intensity diffusion radius in the x and y directions respectively. is the wavenumber modulation factor, represents the first-order Bessel function used to describe the amplitude distribution caused by laser diffraction, z is the axial position of the optical axis, is the system response time constant, is the sinusoidal modulation amplitude, is the raster scanning period.

[0012] According to one aspect of the above technical solution, the steps of synchronously adjusting the control parameters of the air supply pressure of the air bearing guide rail, the deflection angle of the DMD micromirror, and the laser power according to the four-dimensional compensation parameter matrix calculated in real time specifically include: Based on the calibration coefficients corresponding to the air supply pressure of the air-floating guide rail, the deflection angle of the DMD micromirror and the laser power, a control signal is decomposed from the four-dimensional compensation parameter matrix corresponding to each space-time unit. The control parameters of the air supply pressure of the air-floating guide rail, the deflection angle of the DMD micromirror and the laser power are adjusted based on the control signal.

[0013] According to one aspect of the above technical solution, the calculation expression of the control parameter is: ; ; ; ; ; ; Where, is the valve opening of the air float guide rail, , , They are the control channels corresponding to the air supply pressure of the air-floating guide rail, the deflection angle of the DMD micromirror, and the laser power in the four-dimensional compensation parameter matrix. , , , are the calibration coefficients of the air supply pressure of the air-floating guide rail, the deflection angle of the DMD micromirror and the laser power, 、 The maximum and minimum working pressures allowed for the air float guide rail are: is the voltage conversion coefficient, is the temperature compensation coefficient, is the DMD micromirror driving voltage, is the temperature change value, is the laser power, is the initial calibration current, is the modulation coefficient, is the life attenuation coefficient, is the rated life cycle of the laser.

[0014] In a second aspect, the present application further provides an exposure machine multi-physics field compensation system, comprising: The data module is used to synchronously collect the exposure platform vibration spectrum, temperature field distribution and light intensity energy distribution data through a three-axis accelerometer, an infrared thermal imager and a CCD light intensity sensor; The coupling module is used to construct a dynamic error transfer model that includes mechanical-thermal-optical coupling characteristics, establish a coupling function that represents the nonlinear mapping relationship between vibration acceleration, temperature gradient, and light intensity deviation, and obtain coupling parameters based on the exposure stage vibration spectrum, temperature field distribution, and light intensity energy distribution data output; A compensation module is configured to perform eigenvalue decomposition on the coupling parameters, screen the principal component vectors to obtain a mapping matrix, modulate the mapping matrix using a thermal weight matrix to obtain a modulation matrix, and perform spatiotemporal weight reconstruction based on the modulation matrix to obtain a four-dimensional compensation parameter matrix containing spatial coordinates and time variables; The control module is used to synchronously adjust the control parameters of the air supply pressure of the air floating guide rail, the deflection angle of the DMD micromirror and the laser power according to the four-dimensional compensation parameter matrix solved in real time.

[0015] According to one aspect of the above technical solution, the compensation module is specifically used to: Performing dimension normalization and symmetry processing on the coupling parameters in sequence to obtain a symmetric tensor; The symmetric tensor is expanded based on the energy density to obtain a modal matrix, the modal matrix is ​​subjected to eigenvalue decomposition, and the principal component vector is screened to obtain a mapping matrix.

[0016] According to one aspect of the above technical solution, the compensation module is further configured to: calculate a spatial weight function based on the center coordinates of the current exposure area and the light intensity diffusion radius, and calculate a time weight function based on the material characteristic time constant and the raster scanning period; Expanding the modulation matrix to four dimensions based on the spatial weight function and the temporal weight function to obtain a four-dimensional matrix including spatial coordinates and time variables; The corresponding four-dimensional compensation parameter matrix is ​​calculated for each spatiotemporal unit based on the sensor data.

[0017] According to one aspect of the above technical solution, the control module is specifically used to: Based on the calibration coefficients corresponding to the air supply pressure of the air-floating guide rail, the deflection angle of the DMD micromirror and the laser power, a control signal is decomposed from the four-dimensional compensation parameter matrix corresponding to each space-time unit. The control parameters of the air supply pressure of the air-floating guide rail, the deflection angle of the DMD micromirror and the laser power are adjusted based on the control signal.

[0018] Compared with the existing technology, the beneficial effects of the present invention are: by constructing a dynamic error transfer model that includes mechanical-thermal-optical coupling characteristics, the vibration spectrum, temperature field distribution and light intensity energy data are integrated in real time, thereby solving the error accumulation problem of asynchronous or isolated collection of multi-physical field data in the existing technology; by reconstructing the compensation parameters by time and space weights, the real-time performance of matching correction is improved, thereby improving the parameter compensation effect and processing accuracy; the platform displacement caused by vibration is compensated by adjusting the pressure of the air-floating guide rail; the thermally induced optical path offset and vibration residual error are corrected by DMD micromirror deflection control; and the uniformity of light intensity distribution is ensured by power modulation of the laser. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 Flowchart of the multi-physical field compensation method for an exposure machine in the first embodiment of the present invention; Figure 2 This is a structural block diagram of a multi-physical field compensation system for an exposure machine in a second embodiment of the present invention; The following specific embodiments will further illustrate the present invention in conjunction with the above-mentioned drawings. DETAILED DESCRIPTION

[0020] To facilitate understanding of the present invention, the present invention will be described more fully below with reference to the accompanying drawings. The drawings illustrate several embodiments of the present invention. However, the present invention may be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided to provide a more thorough and comprehensive understanding of the present invention.

[0021] It should be noted that when an element is referred to as being "fixed to" another element, it may be directly on the other element or there may be an intermediate element. When an element is referred to as being "connected to" another element, it may be directly connected to the other element or there may be an intermediate element. The terms "vertical," "horizontal," "left," "right," and similar expressions used herein are for illustrative purposes only.

[0022] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one skilled in the art to which this invention pertains. The terms used in this specification of the present invention are for the purpose of describing specific embodiments only and are not intended to limit the present invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0023] Example 1 See also Figure 1 , which shows a multi-physical field compensation method for an exposure machine in a first embodiment of the present invention. As shown in the figure, the method includes the following steps: In step S100, a three-axis accelerometer, an infrared thermal imager, and a CCD light intensity sensor are used to synchronously collect the exposure stage's vibration spectrum, temperature field distribution, and light intensity energy distribution data. Specifically, in this embodiment, vibration can cause the stage to shift, affecting exposure accuracy. The exposure stage vibration spectrum is used to capture the stage's mechanical vibrations. Temperature changes can cause material expansion or contraction, leading to structural deformation and, in turn, affecting the optical path and mechanical positioning. The temperature field distribution is used to monitor temperature changes in various parts of the exposure stage. Uneven intensity can lead to inconsistent exposure doses, affecting pattern quality. The light intensity energy distribution data is used to detect light intensity uniformity during exposure.

[0024] In step S200, a dynamic error transfer model including mechanical-thermal-optical coupling characteristics is constructed to establish a coupling function of the nonlinear mapping relationship between vibration acceleration, temperature gradient, and light intensity deviation, so as to obtain coupling parameters based on the exposure stage vibration spectrum, temperature field distribution, and light intensity energy distribution data output.

[0025] Preferably, in this embodiment, the calculation expression of the dynamic error transfer model is: ; ; Where F is the coupling function, is the coupling parameter, is the partial derivative, is the response time of the mechanical structure characteristics, is the thermal-optical coupling coefficient, is the vibration acceleration, For the current moment, For historical moments, is the temperature change rate, is the discretized distance corresponding to the temperature change rate, is the light intensity deviation, represents the vibration acceleration in the i-th direction, represents the temperature gradient in the jth direction, represents the light intensity deviation of the kth type, represents the time decay factor, is the exposure wavelength.

[0026] In step S300, the coupling parameters are subjected to eigenvalue decomposition, and the principal component vectors are screened to obtain a mapping matrix. The mapping matrix is ​​then modulated by a thermal weight matrix to obtain a modulation matrix. The spatiotemporal weights are reconstructed based on the modulation matrix to obtain a four-dimensional compensation parameter matrix containing spatial coordinates and time variables.

[0027] Preferably, in this embodiment, the steps of performing eigenvalue decomposition on the coupling parameters and screening the principal component vectors to obtain the mapping matrix specifically include: Performing dimension normalization and symmetry processing on the coupling parameters in sequence to obtain a symmetric tensor; The symmetric tensor is expanded based on the energy density to obtain a modal matrix, the modal matrix is ​​subjected to eigenvalue decomposition, and the principal component vector is screened to obtain a mapping matrix.

[0028] Preferably, in this embodiment, the conditional expression for screening the principal component vector is: ; Where, is the residual error of the nth order principal component, is the kernel tensor after eigenvalue decomposition, is the maximum singular value of the modal matrix after eigenvalue decomposition, corresponding to the main energy distribution direction in the data, is the sensitivity coefficient, is the effective length of the air-bearing guide rail, and NA is the numerical aperture of the objective lens.

[0029] The calculation expression of the above modulation matrix is: ; ; ; Where, is the modulation matrix, is the thermal weight matrix, is the mapping matrix, 、 、 are the error response vectors corresponding to the three-axis accelerometer, infrared thermal imager and CCD light intensity sensor, respectively. is the vibration suppression factor of temperature drift, is the thermal expansion compensation factor, is the coefficient of thermal expansion, is the refractive index temperature compensation factor, represents a diagonal function.

[0030] Furthermore, the steps of performing spatiotemporal weight reconstruction based on the modulation matrix to obtain a four-dimensional compensation parameter matrix including spatial coordinates and time variables specifically include: The spatial weight function is calculated based on the center coordinates of the current exposure area and the light intensity diffusion radius, and the time weight function is calculated based on the material characteristic time constant and the raster scanning period; Expanding the modulation matrix to four dimensions based on the spatial weight function and the temporal weight function to obtain a four-dimensional matrix including spatial coordinates and time variables; The corresponding four-dimensional compensation parameter matrix is ​​calculated for each spatiotemporal unit based on the sensor data.

[0031] Preferably, in this embodiment, the expression of the four-dimensional compensation parameter matrix is: ; ; ; Where, is the spatial weight function, is the time weight function, represents the outer product of the tensor, (x c ,y c) is the center coordinate of the current exposure area, a x , a y The standard deviation of the Gaussian distribution controls the light intensity diffusion radius in the x and y directions respectively. is the wavenumber modulation factor, represents the first-order Bessel function used to describe the amplitude distribution caused by laser diffraction, z is the axial position of the optical axis, is the system response time constant, is the sinusoidal modulation amplitude, is the raster scanning period.

[0032] Step S400, synchronously adjusting the control parameters of the air supply pressure of the air bearing rail, the deflection angle of the DMD micromirror, and the laser power according to the four-dimensional compensation parameter matrix calculated in real time. Preferably, in this embodiment, the step of synchronously adjusting the control parameters of the air supply pressure of the air bearing rail, the deflection angle of the DMD micromirror, and the laser power according to the four-dimensional compensation parameter matrix calculated in real time specifically includes: Based on the calibration coefficients corresponding to the air supply pressure of the air-floating guide rail, the deflection angle of the DMD micromirror and the laser power, a control signal is decomposed from the four-dimensional compensation parameter matrix corresponding to each space-time unit. The control parameters of the air supply pressure of the air-floating guide rail, the deflection angle of the DMD micromirror and the laser power are adjusted based on the control signal.

[0033] Preferably, in this embodiment, the calculation expression of the control parameter is: ; ; ; ; ; ; Where, is the valve opening of the air float guide rail, , , They are the control channels corresponding to the air supply pressure of the air-floating guide rail, the deflection angle of the DMD micromirror, and the laser power in the four-dimensional compensation parameter matrix. , , , are the calibration coefficients of the air supply pressure of the air-floating guide rail, the deflection angle of the DMD micromirror and the laser power, 、 The maximum and minimum working pressures allowed for the air float guide rail are: is the voltage conversion coefficient, is the temperature compensation coefficient, is the DMD micromirror driving voltage, is the temperature change value, is the laser power, is the initial calibration current, is the modulation coefficient, is the life attenuation coefficient, is the rated life cycle of the laser.

[0034] In summary, the multi-physical field compensation method for the exposure machine in the above-mentioned embodiment of the present invention solves the error accumulation problem of asynchronous or isolated collection of multi-physical field data in the prior art by constructing a dynamic error transfer model including mechanical-thermal-optical coupling characteristics, and integrating the vibration spectrum, temperature field distribution and light intensity energy data in real time. By reconstructing the compensation parameters by time and space weights, the real-time performance of the matching correction is improved, thereby improving the parameter compensation effect. The platform displacement caused by vibration is compensated by adjusting the pressure of the air-floating guide rail, and the thermally induced optical path offset and vibration residual error are corrected by the DMD micromirror deflection control. The uniformity of the light intensity distribution is ensured by power modulation of the laser.

[0035] Example 2 The second embodiment of the present application further provides an exposure machine multi-physics field compensation system, which is used to implement the embodiments and preferred implementations described above, and will not be repeated here. As used below, the terms "module," "unit," "sub-unit," etc. may refer to a combination of software and / or hardware that implements a predetermined function. Although the systems described in the following embodiments are preferably implemented in software, implementation using hardware, or a combination of software and hardware, is also possible and contemplated.

[0036] like Figure 2 As shown, the system includes: a data module 100, a coupling module 200, a compensation module 300, and a control module 400; The data module 100 is used to synchronously collect the exposure platform vibration spectrum, temperature field distribution and light intensity energy distribution data through a three-axis accelerometer, an infrared thermal imager and a CCD light intensity sensor; The coupling module 200 is used to construct a dynamic error transfer model that includes mechanical-thermal-optical coupling characteristics, establish a coupling function that represents the nonlinear mapping relationship between vibration acceleration, temperature gradient, and light intensity deviation, and obtain coupling parameters based on the exposure stage vibration spectrum, temperature field distribution, and light intensity energy distribution data output; A compensation module 300 is configured to perform eigenvalue decomposition on the coupling parameters, filter the principal component vectors to obtain a mapping matrix, modulate the mapping matrix using a thermal weight matrix to obtain a modulation matrix, and perform spatiotemporal weight reconstruction based on the modulation matrix to obtain a four-dimensional compensation parameter matrix containing spatial coordinates and time variables; The control module 400 is used to synchronously adjust the control parameters of the air supply pressure of the air-floating guide rail, the deflection angle of the DMD micromirror and the laser power according to the four-dimensional compensation parameter matrix calculated in real time. Preferably, in this embodiment, the compensation module 300 is specifically used to: Performing dimension normalization and symmetry processing on the coupling parameters in sequence to obtain a symmetric tensor; The symmetric tensor is expanded based on the energy density to obtain a modal matrix, the modal matrix is ​​subjected to eigenvalue decomposition, and the principal component vector is screened to obtain a mapping matrix.

[0037] Preferably, in this embodiment, the compensation module 300 is further configured to: The spatial weight function is calculated based on the center coordinates of the current exposure area and the light intensity diffusion radius, and the time weight function is calculated based on the material characteristic time constant and the raster scanning period; Expanding the modulation matrix to four dimensions based on the spatial weight function and the temporal weight function to obtain a four-dimensional matrix including spatial coordinates and time variables; The corresponding four-dimensional compensation parameter matrix is ​​calculated for each spatiotemporal unit based on the sensor data.

[0038] Preferably, in this embodiment, the control module 400 is specifically used to: Based on the calibration coefficients corresponding to the air supply pressure of the air-floating guide rail, the deflection angle of the DMD micromirror and the laser power, a control signal is decomposed from the four-dimensional compensation parameter matrix corresponding to each space-time unit. The control parameters of the air supply pressure of the air-floating guide rail, the deflection angle of the DMD micromirror and the laser power are adjusted based on the control signal.

[0039] It should be noted that each module can be a functional module or a program module, and can be implemented by software or hardware. For modules implemented by hardware, each module can be located in the same processor; or each module can be located in different processors in any combination.

[0040] The technical features of the above-described embodiments can be combined arbitrarily. To make the description concise, not all possible combinations of the technical features in the embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0041] The above-described embodiments merely represent several implementation methods of the present application. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the present invention. It should be noted that a person skilled in the art could make various modifications and improvements without departing from the spirit of the present application, all of which fall within the scope of protection of the present application. Therefore, the scope of protection of the present patent application shall be determined by the appended claims.

Claims

1. A multi-physical field compensation method for an exposure machine, characterized in that include: The exposure platform vibration spectrum, temperature field distribution and light intensity energy distribution data are collected synchronously through a three-axis accelerometer, an infrared thermal imager and a CCD light intensity sensor; A dynamic error transfer model incorporating mechanical-thermal-optical coupling characteristics is constructed to establish a coupling function representing the nonlinear mapping relationship between vibration acceleration, temperature gradient, and light intensity deviation. The coupling parameters are then output based on the exposure stage vibration spectrum, temperature field distribution, and light intensity energy distribution data. Performing eigenvalue decomposition on the coupling parameters and screening the principal component vectors to obtain a mapping matrix, then modulating the mapping matrix by a thermal weight matrix to obtain a modulation matrix, and performing spatiotemporal weight reconstruction based on the modulation matrix to obtain a four-dimensional compensation parameter matrix including spatial coordinates and time variables; According to the four-dimensional compensation parameter matrix solved in real time, the control parameters of the air supply pressure of the air-floating guide rail, the deflection angle of the DMD micromirror and the laser power are adjusted synchronously.

2. The exposure machine multi-physical field compensation method according to claim 1, characterized in that: The calculation expression of the dynamic error transmission model is: ； ； Where F is the coupling function, is the coupling parameter, is the partial derivative, is the response time of the mechanical structure characteristics, is the thermal-optical coupling coefficient, is the vibration acceleration, For the current moment, For historical moments, is the temperature change rate, is the discretized distance corresponding to the temperature change rate, is the light intensity deviation, represents the vibration acceleration in the i-th direction, represents the temperature gradient in the jth direction, represents the light intensity deviation of the kth type, represents the time decay factor, is the exposure wavelength.

3. The exposure machine multi-physical field compensation method according to claim 2, characterized in that: The steps of performing eigenvalue decomposition on the coupling parameters and screening the principal component vectors to obtain a mapping matrix specifically include: Performing dimension normalization and symmetry processing on the coupling parameters in sequence to obtain a symmetric tensor; The symmetric tensor is expanded based on the energy density to obtain a modal matrix, the modal matrix is ​​subjected to eigenvalue decomposition, and the principal component vector is screened to obtain a mapping matrix.

4. The exposure machine multi-physical field compensation method according to claim 3, characterized in that: The conditional expression for screening the principal component vector is: ； Where, is the residual error of the nth order principal component, is the kernel tensor after eigenvalue decomposition, is the maximum singular value of the modal matrix after eigenvalue decomposition, corresponding to the main energy distribution direction in the data, is the sensitivity coefficient, is the effective length of the air-bearing guide rail, and NA is the numerical aperture of the objective lens.

5. The exposure machine multi-physical field compensation method according to claim 1, characterized in that: The calculation expression of the modulation matrix is: ； ； ； Where, is the modulation matrix, is the thermal weight matrix, is the mapping matrix, 、 、 are the error response vectors corresponding to the three-axis accelerometer, infrared thermal imager and CCD light intensity sensor, respectively. is the vibration suppression factor of temperature drift, is the thermal expansion compensation factor, is the coefficient of thermal expansion, is the refractive index temperature compensation factor, represents a diagonal function.

6. The exposure machine multi-physical field compensation method according to claim 1, characterized in that: The steps of performing spatiotemporal weight reconstruction based on the modulation matrix to obtain a four-dimensional compensation parameter matrix including spatial coordinates and time variables specifically include: The spatial weight function is calculated based on the center coordinates of the current exposure area and the light intensity diffusion radius, and the time weight function is calculated based on the material characteristic time constant and the raster scanning period; Expanding the modulation matrix to four dimensions based on the spatial weight function and the temporal weight function to obtain a four-dimensional matrix including spatial coordinates and time variables; The corresponding four-dimensional compensation parameter matrix is ​​calculated for each spatiotemporal unit based on the sensor data.

7. The exposure machine multi-physical field compensation method according to claim 6, characterized in that: The expression of the four-dimensional compensation parameter matrix is: ； ； ； Where, is the spatial weight function, is the time weight function, represents the outer product of the tensor, (x c ,y c ) is the center coordinate of the current exposure area, a x , a y The standard deviation of the Gaussian distribution controls the light intensity diffusion radius in the x and y directions respectively. is the wavenumber modulation factor, represents the first-order Bessel function used to describe the amplitude distribution caused by laser diffraction, z is the axial position of the optical axis, is the system response time constant, is the sinusoidal modulation amplitude, is the raster scanning period.

8. The exposure machine multi-physical field compensation method according to claim 6, characterized in that: The steps of synchronously adjusting the control parameters of the air supply pressure of the air bearing guide rail, the deflection angle of the DMD micromirror, and the laser power according to the four-dimensional compensation parameter matrix calculated in real time include: Based on the calibration coefficients corresponding to the air supply pressure of the air-floating guide rail, the deflection angle of the DMD micromirror and the laser power, a control signal is decomposed from the four-dimensional compensation parameter matrix corresponding to each space-time unit. The control parameters of the air supply pressure of the air-floating guide rail, the deflection angle of the DMD micromirror and the laser power are adjusted based on the control signal.

9. The exposure machine multi-physical field compensation method according to claim 8, characterized in that: The calculation expression of the control parameter is: ； ； ； ； ； ； Where, is the valve opening of the air float guide rail, , , They are the control channels corresponding to the air supply pressure of the air-floating guide rail, the deflection angle of the DMD micromirror, and the laser power in the four-dimensional compensation parameter matrix. , , , are the calibration coefficients of the air supply pressure of the air-floating guide rail, the deflection angle of the DMD micromirror and the laser power, 、 The maximum and minimum working pressures allowed for the air float guide rail are: is the voltage conversion coefficient, is the temperature compensation coefficient, is the DMD micromirror driving voltage, is the temperature change value, is the laser power, is the initial calibration current, is the modulation coefficient, is the life attenuation coefficient, is the rated life cycle of the laser.

10. An exposure machine multi-physics field compensation system, characterized in that: include: The data module is used to synchronously collect the exposure platform vibration spectrum, temperature field distribution and light intensity energy distribution data through a three-axis accelerometer, an infrared thermal imager and a CCD light intensity sensor; The coupling module is used to construct a dynamic error transfer model that includes mechanical-thermal-optical coupling characteristics, establish a coupling function that represents the nonlinear mapping relationship between vibration acceleration, temperature gradient, and light intensity deviation, and obtain coupling parameters based on the exposure stage vibration spectrum, temperature field distribution, and light intensity energy distribution data output; A compensation module is configured to perform eigenvalue decomposition on the coupling parameters, screen the principal component vectors to obtain a mapping matrix, modulate the mapping matrix using a thermal weight matrix to obtain a modulation matrix, and perform spatiotemporal weight reconstruction based on the modulation matrix to obtain a four-dimensional compensation parameter matrix containing spatial coordinates and time variables; The control module is used to synchronously adjust the control parameters of the air supply pressure of the air floating guide rail, the deflection angle of the DMD micromirror and the laser power according to the four-dimensional compensation parameter matrix solved in real time.

Images