Ultrasonic testing device and method for elastic constant and crystal orientation of single crystal material or workpiece

Through the water immersion ultrasonic detection system and image processing technology, the problem of low efficiency in the anisotropy characterization of single crystal materials has been solved, and efficient measurement of elastic constants and crystal orientation has been achieved, which is suitable for engineering automation detection.

CN120761483APending Publication Date: 2025-10-10INST OF METAL RESEARCH - CHINESE ACAD OF SCI

Patent Information

Application Number
CN202510571404.4
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-05-06
Publication Date
2025-10-10

AI Technical Summary

Technical Problem

Existing methods for characterizing the anisotropy of single crystal materials are inefficient in engineering applications and are difficult to meet the needs of automated testing. Traditional ultrasonic methods require multiple adjustments to the probe angle, are costly, and have high requirements for the surface roughness of the workpiece, making it difficult to achieve efficient determination of elastic constants and crystal orientation.

Method used

A special immersion ultrasonic testing system is used to excite surface wave signals and receive surface wave leakage waves through oblique incidence. Combined with image processing technology and inversion iterative algorithm, an omnidirectional acoustic time amplitude distribution image is constructed to achieve efficient measurement of the elastic constants and crystal orientation of single crystal materials.

Benefits of technology

It achieves efficient and convenient measurement of the elastic constants and crystal orientation of single crystal materials, simplifies the test steps, is suitable for engineering automation applications, reduces costs and improves detection efficiency.

✦ Generated by Eureka AI based on patent content.

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Patent Text Reader

Abstract

The invention discloses an ultrasonic testing device and method for the elastic constant Cij and crystal orientation of a single crystal material or workpiece. A special water immersion ultrasonic testing system used in the ultrasonic testing device comprises a manipulator, a water tank, a probe frame, a sample table and a probe, wherein the probe frame is connected with the tail end clamping device of the manipulator or the probe frame is the tail end clamping device of the manipulator; the sample table for placing a to-be-tested sample is positioned in the water tank; the probe is arranged on the probe frame; three-dimensional ultrasonic signals of various wave modes are excited in a workpiece, scanning signals of the three-dimensional ultrasonic signals are received, an omnidirectional sound time amplitude distribution image under polar coordinates is constructed according to the scanning signals, an ultrasonic anisotropic propagation actual sound field image is obtained, and ultrasonic sound velocities in all directions of a single crystal material are obtained through morphological methods such as image processing. And dual measurement of the elastic constant Cij and the crystal orientation of the single crystal material or the workpiece is realized through an inversion algorithm. According to the method, the elastic modulus and the crystal orientation of the single crystal material can be accurately and rapidly obtained on the premise that the crystal orientation does not need to be predicted, conditions and steps are simplified, and the testing time is shortened.
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Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of material mechanical property detection, and particularly relates to an ultrasonic testing device and method for elastic constants and crystal orientation of single crystal materials or workpieces. BACKGROUND

[0002] With the continuous progress of science and technology and the continuous development of society, single crystal materials have occupied an irreplaceable position in high-end fields such as aerospace, semiconductors, optics, and biomedicine due to their excellent comprehensive performance. For example, single crystal high-temperature alloys (such as nickel-based single crystal alloys) can maintain high strength in high-temperature (>1000℃) and high-pressure environments, effectively avoiding the failure of polycrystalline materials due to grain boundary sliding.

[0003] Compared with polycrystalline materials, a significant feature of single crystal materials is that they have anisotropy, that is, the mechanical properties are different along different crystal orientations. The anisotropy of the tensile, creep, fatigue, and other mechanical properties of single crystal materials is a common focus in the study of single crystal materials and is of great significance to material performance design. Existing characterization of the anisotropy of single crystal materials is mainly achieved from the following three aspects: microstructure analysis, mechanical parameter testing, and corrosion resistance testing. Among them, common methods for microstructure analysis include X-ray diffraction, neutron diffraction, transmission electron microscopy (TEM), and electron backscatter diffraction (EBSD); the mechanical parameters to be characterized include anisotropic elastic modulus, shear modulus, Poisson's ratio, tensile strength, yield strength, fatigue resistance, and creep life, and the testing methods commonly used include moire interferometry, knocking resonance, and various corresponding mechanical property testing methods. However, most of the above methods need to be tested under laboratory conditions and need to be performed in two steps: first, the crystal orientation is measured, and then the mechanical properties are tested.

[0004] Compared with the foregoing test method, the ultrasonic method is an economical and practical test technology that can be used for detection in both laboratory and engineering application process, and has the advantage of directly correlating the crystal orientation and mechanical properties through one test. Ultrasonic has achieved more practical engineering applications in characterizing the microstructure and mechanical properties of isotropic materials. However, for anisotropic materials, due to the complexity of their acoustic characteristics, there are fewer engineering practical technologies. In recent years, it has become a hot research topic for many scholars due to the competition and development of the aviation industry. For example, Liu Haibo et al. in the invention patent with publication number CN109490417 A measured the refracted longitudinal wave speed in three directions, introduced a plane anisotropy characterization factor, and realized the quantitative characterization of the plane anisotropy characteristics, but the obtained “plane anisotropy characterization factor” can only represent the difference in performance in different directions, and cannot be used for orientation determination. Zhang Jianhai et al. in the invention patent with publication number CN119000889 A proposed a multi-wave type ultrasonic nondestructive measurement device and method for material mechanical properties, which excited and received different wave type ultrasonic waves by adjusting the transmitting and receiving angle of the probe in the detection device multiple times, and then calculated the elastic constant, surface stress and hardness of the material through genetic factor algorithm based on different wave type ultrasonic signals; however, this method needs to change the probe transmitting and receiving angle multiple times to form different wave type ultrasonic signals, which leads to low detection efficiency, and on the other hand, it requires the workpiece to only make rotary motion, which limits the application scenarios and is difficult to meet the engineering detection requirements of automation. Lin Bin et al. in the invention patent with publication number CN104897578 A proposed a detection method for detecting the surface Young's modulus of anisotropic materials based on laser ultrasonic surface wave, but its disadvantages are high cost, high workpiece surface roughness requirement and difficulty in engineering application.

[0005] There is an urgent need for a single crystal material or workpiece elastic constant and crystal orientation ultrasonic testing device and method with better technical effects. SUMMARY

[0006] The present application provides a single crystal material or workpiece elastic constant and crystal orientation ultrasonic testing device and method, and the technical key is:

[0007] Surface wave signals are excited on the surface of a single crystal material workpiece by an ultrasonic transducer T in a way of oblique incidence, a surface wave leakage wave is received on the same side of the workpiece surface by an ultrasonic transducer R, a surface wave propagation sound field of the single crystal material is obtained, an omnidirectional acoustic time amplitude distribution image (OATM) is constructed by extracting a ring-shaped sound field signal in a polar coordinate, and accurate relative velocities of the single crystal material in each direction are obtained by using an image processing technology, and the elastic constant and crystal orientation of the single crystal material or workpiece are measured by inversion iteration combined with Christoffel equation. ij and a crystal orientation ultrasonic testing device and method.

[0008] The technical key of the single crystal material or workpiece elastic constant and crystal orientation ultrasonic testing device is:

[0009] It is a special water immersion ultrasonic detection system, and the special water immersion ultrasonic detection system comprises a manipulator 1, a water tank 2, a probe holder 3, a sample table 7 and a probe 8.

[0010] The single crystal material or workpiece elastic constant and crystal orientation ultrasonic testing device meets the following requirements: three-dimensional ultrasonic signals of multiple wave types are excited in the workpiece, and the scanning signals are received, an omnidirectional acoustic time amplitude distribution image in a polar coordinate is constructed, an actual sound field image of ultrasonic anisotropy propagation is obtained, ultrasonic velocities of the single crystal material in each direction are obtained through image processing and other morphological methods, and the elastic constant and crystal orientation of the single crystal material or workpiece are measured through inversion algorithm. ij and crystal orientation measurement. The method is efficient, convenient, intuitive in imaging and beneficial to realize engineering automation application, the anisotropy characterization is changed from traditional signal processing to image morphological processing and artificial intelligence recognition by processing the image containing rich anisotropy characteristics.

[0011] The single crystal material or workpiece elastic constant and crystal orientation ultrasonic testing device of the application preferably further comprises the following: the special water-immersed ultrasonic testing system further comprises a probe opening and closing motor 4, a probe deflection motor 5, a sample table rotating motor 6, and a controller; wherein: the probe opening and closing motor 4, i.e. an excitation probe opening and closing motor 4-1 and a receiving probe opening and closing motor 4-2, and the probe deflection motor 5, i.e. an excitation probe deflection motor 5-1 and a receiving probe deflection motor 5-2, both have two sets, and are used to control the spatial posture of two probes 8, i.e. an excitation probe 8-1 and a receiving probe 8-2; the sample table 7 is a rotating disc; and the controller is connected with a computer, a manipulator 1, the probe opening and closing motor 4, the probe deflection motor 5, and the sample table rotating motor 6.

[0012] The single crystal material or workpiece elastic constant and crystal orientation ultrasonic testing device of the application determines the angle of the excitation and receiving probes 8 through theoretical sound velocity calculation of the single crystal anisotropic material, and excites and receives multiple wave type ultrasonic waves at one time; under the driving of the probe opening and closing motor 4 and the probe deflection motor 5, the probes 8 and the sample 9 to be tested perform relative rotating motion, and the ultrasonic excitation receiver and the data acquisition card are used as the core of the ultrasonic testing electronic equipment, so that full direction scanning detection of the workpiece is realized.

[0013] The controller comprises a manipulator motion controller and a multi-axis motion controller; wherein: the manipulator motion controller is connected with the computer, and controls the motion of each joint shaft or end effector of the manipulator 1; the multi-axis motion controller is used to connect the computer and the motor; the motor is the probe opening and closing motor 4 or / and the probe deflection motor 5 or / and the sample table rotating motor 6; the multi-axis motion controller receives the control instruction sent by the computer, and controls the rotating speed, direction and position of the motor through pulse signals or bus communication and the like;

[0014] The receiving probe 8-2 for receiving ultrasonic waves is specifically a hydrophone and a water-immersed ultrasonic probe.

[0015] The application further claims the single crystal material or workpiece elastic constant and crystal orientation ultrasonic testing method using the single crystal material or workpiece elastic constant and crystal orientation ultrasonic testing device, which sequentially meets the following steps and content requirements:

[0016] Step 1: configuring a multiple wave type transceiving ultrasonic scanning system;

[0017] Firstly, the system structure and working mode meet the following requirements:

[0018] The structural diagram and system block diagram of the multiple wave type transceiving ultrasonic scanning system used are shown in Figure 3 and Figure 6; It consists of a mechanical scanning device and ultrasonic detection electronic equipment; the mechanical scanning device is the aforementioned "specialized water immersion ultrasonic detection system"; it is mainly composed of a manipulator 1, a manipulator motion controller, a multi-axis motion controller, a motor and a probe holder 3 under computer control; the motor specifically includes an opening and closing motor A4-1, an opening and closing motor B4-2; a deflection motor A5-1, a deflection motor B5-2 and a sample table rotation motor 6; the ultrasonic detection electronic equipment includes: an ultrasonic excitation receiver and a data acquisition card; wherein: the excitation probe (8-1) and the receiving probe 8-2 are respectively connected to the transmitting end and the receiving end of the ultrasonic excitation receiver, the output end of the ultrasonic excitation receiver is connected to the input end of the data acquisition card, the output end of the data acquisition card is connected to the computer, and the data acquisition card uploads the ultrasonic data to the computer in real time.

[0019] The manipulator 1 is used to adjust the axis of the probe holder 3 and the sample stage 7, and at the same time control the horizontal posture of the probe holder 3 and the distance between the probe holder 3 and the sample 9 to be tested. During scanning, the sample stage 7 can be kept stationary, and the manipulator 1 drives the probe holder 3 to scan around the sample 9 to be tested, or the probe holder 3 can be kept stationary, and the sample stage rotation motor 6 drives the sample stage 7 to rotate; the manipulator 1 can drive the probe holder 3 to rotate, that is, during detection, the probe holder 3 and the sample stage 7 are made to perform relative rotational motion; the deflection motor A5-1 controls the incident angle of the excitation probe 8-1 on the probe holder 3, and the deflection motor A5-1 controls the incident angle of the excitation probe 8-1 on the probe holder 3. The motor B5-2 controls the receiving angle of the receiving probe 8-2 on the probe holder 3. The opening and closing motors A4-1 and B4-2 control the stepping offset of the two probes and change the length of the test line segment. The length range d is 0-50 mm, and the stepping offset △d is 0.1-0.5 mm. The excitation probe 8-1 and the receiving probe 8-2 are connected to the transmitting end and the receiving end of the ultrasonic excitation receiver respectively. The output end of the ultrasonic excitation receiver is connected to the input end of the data acquisition card. The output end of the data acquisition card is connected to the computer. The data acquisition card uploads the data to the computer in real time.

[0020] Second, the following requirements must be met when determining the probe incident angle:

[0021] Ultrasonic waves propagating in solid media have various wave modes, such as surface longitudinal waves (SLW), Rayleigh waves, refracted longitudinal waves, refracted transverse waves, etc., depending on the scale and boundary conditions of the workpiece. When they propagate inside the workpiece, a series of complex phenomena such as reflection, refraction, scattering, diffraction and wave mode conversion will occur. Figure 2 As shown, the ultrasonic signals of various waveforms contain rich characteristic information of the workpiece. Based on the basic principle of acoustics, in order to generate and receive multi-waveform ultrasonic waves at one time to characterize the anisotropy of single crystal high-temperature alloys, the test scheme proposed is: first, according to Figure 1As shown, the axes of the sound beams of the coplanar excitation probe 8-1 and the receiving probe 8-2 are both in the same normal plane with the sample 9 to be tested (specifically, the axes of the excitation probe 8-1 and the receiving probe 8-2 are coplanar and the plane is perpendicular to the upper surface of the sample 9 to be tested); the ultrasonic wave excited by the excitation probe 8-1 is coupled with water at a certain angle α T The incident light is injected into the sample 9 to be tested, and the α T Generate multi-waveform ultrasonic waves in the sample 9, including surface longitudinal waves, Rayleigh waves, refracted longitudinal waves, and refracted shear waves; use the receiving probe 8-2 to R Receive multi-mode ultrasonic waves leaked into the water, α T The value is confirmed according to formula (1), β R Value follows α T Proper adjustment to meet α T =β R Make SLW's weight stronger;

[0022]

[0023] Where: c1 is the sound speed in water, c2max is the maximum longitudinal wave sound speed of the anisotropic material, and c2min is the minimum longitudinal wave sound speed of the anisotropic material;

[0024] Third, the multi-waveform transceiver ultrasonic scanning system meets the following requirements when performing system data acquisition: during detection, the spatial position of the manipulator 1 is adjusted so that the probe holder 3 is parallel to the sample stage 7; the angle of the excitation probe 8-1 is calculated by formula 1, and the deflection motor A5-1 and the deflection motor B5-2 respectively control the posture adjustment of the receiving probe 8-2 and the excitation probe 8-1, while the opening and closing motor A4-1 and the opening and closing motor B4-2 respectively control the radial test segment lengths of the excitation probe 8-1 and the receiving probe 8-2 to ensure that the multi-waveform ultrasonic wave can be successfully excited and received; the manipulator 1 adjusts the distance between the probe holder 3 and the sample to be tested 9 according to the focal length parameter of the probe 8, so that the probe 8 is focused on the surface of the sample to be tested 9; the probe holder 3 and the sample stage 7 perform relative rotation, and data is collected in real time during the rotation scanning process and uploaded to the computer;

[0025] Step 2: Use a multi-waveform transceiver ultrasonic scanning system to detect the sample 9 to be tested, and obtain the multi-waveform anisotropic propagation sound field and the omnidirectional sound time amplitude distribution map after wavelet transformation of all the samples 9 to be tested; further preferably, the following detailed content requirements are met in sequence:

[0026] First, prepare two isotropic material samples as comparison samples. The sound velocities of the comparison samples are known and have obvious sound velocity differences. The sound velocities of the two comparison samples are within the sound velocity fluctuation range of the single crystal material.

[0027] Second, according to Figure 1The sample 9 to be tested is placed in a manner, and the sample 9 to be tested includes: an isotropic material comparison test block and a single crystal material; one workpiece is placed each time the scan is performed;

[0028] Third, the deflection motor A5-1 is used to control the incident angle of the excitation probe 8-1, and the deflection motor B5-2 is used to control the receiving angle of the receiving probe 8-2. During the subsequent detection process, the two probes 8 must maintain the same posture, and the distance between all receiving probes 8-2 on the probe holder 3 and the workpiece surface must be consistent;

[0029] Fourthly, the test line formed by the excitation probe 8-1 and the receiving probe 8-2 is rotated around the axis (i.e., the normal line of the incident point on the sample to be tested (9)) by the normal line of the incident point on the sample to be tested 9, thus completing the detection of multiple test line directions within 360° in the XY plane. The rotation scanning step angle is After scanning, we get: different direction angles The two-dimensional array (M×L) of the time domain signal (data length L) is as follows:

[0030] Fifth, the radial propagation distance of SLW is changed by the stepping mode of the opening and closing motor A4-1 and the opening and closing motor B4-2, corresponding to Figure 1 The dotted area is scanned line by line. Each Δd data corresponds to a two-dimensional array (M×L). After N Δd steps, different radial lengths (N×Δd) and different direction angles are obtained. The three-dimensional array (N×M×L) of the time domain signal (L) below;

[0031] Sixth, the square matrix N×M is converted into a circular distribution diagram using the polar coordinate conversion formula (2), thereby obtaining various wave-type ultrasonic sound field patterns of the workpiece to be tested;

[0032]

[0033] Where: r corresponds to 1~N, Corresponding to 1~M; x, y are the coordinates of the imaging pixel;

[0034] Seventh, the three-dimensional array (N×M×L) is imaged by fixing N (e.g., taking N=1) to the two-dimensional array (M×L): the direction dimension of the array is processed into polar coordinate polar angle, the propagation time dimension is processed into polar diameter, and the time dimension is reversed (i.e., the polar diameter of the later wave is larger than that of the earlier wave) to intuitively display the speed of sound in different directions. In this way, the omnidirectional acoustic time amplitude map (OATM) of each sample is obtained;

[0035]

[0036] Where: t i Corresponding to 1~L, t is the acoustic time corresponding to the minimum radial length of the test line. Corresponding 1~M; X, Y are the coordinates of the all-directional acoustic time-amplitude image pixel points; by changing the imaging time window range, the all-directional acoustic time-amplitude images of surface longitudinal wave, surface transverse wave, Rayleigh wave, refracted longitudinal wave and refracted transverse wave can be displayed;

[0037] Step 3, after the interference noise filtering of the all-directional acoustic time-amplitude distribution image combined with the acoustic field image, image processing is carried out to obtain the relative velocity distribution curves of longitudinal and transverse waves in each direction; further preferably, the following steps are included:

[0038] Firstly, the RGB format original image of the test workpiece OATM is processed by dimension reduction, filtering and edge detection to extract the SLW wave front and SSV wave front respectively, and the appearance time t T-SLW and t T-SSV of the SLW wave and SSV wave in each direction of the workpiece are obtained.

[0039] Secondly, the appearance time t T-SLW or t T-SSV of the SLW wave or SSV wave on a test line is composed of three parts: the sound path of the incident wave in water (t T ), the sound path in the workpiece (t SLW or / and t SSV ), and the sound path of the outgoing wave (t R ); the relative velocity of longitudinal and transverse waves in each direction of the single crystal material is represented by the appearance time t T-SLW and t T-SSV :

[0040] t T-SLW =t T +t SLW +t R (3)

[0041] t T-SSV =t T +t SSV +t R (4)

[0042] Thirdly, after the processing of the isotropic material OATM image, the relative velocities of the SLW wave and SSV wave are obtained, the known velocity of the isotropic material is used to calibrate the relative velocity to obtain the velocity measurement calibration factor Q of the detection system;

[0043] Fourthly, after the processing of the single crystal material OATM image, the relative velocities of the SLW wave and SSV wave of the single crystal material, v SLW and v SSV , are obtained.

[0044] Step 4, combined with the velocity of the calibration sample, the curve fitting is carried out to obtain the velocity distribution functions of longitudinal and transverse waves in each direction and

[0045] Combined with the detection system sound velocity measurement calibration factor Q, the longitudinal and shear wave sound velocity distribution functions of the single crystal material are and Perform curve fitting to obtain the longitudinal and shear wave velocity distribution functions and

[0046]

[0047] Step 5, according to and The elastic constant C is obtained by inversion iteration using the test value and Christoffel model. ij and crystal orientation angle; further preferably further comprising the following steps:

[0048] First, the coordinate system OX'Y'Z' of the workpiece's inspected surface (001)' is regarded as the workpiece crystal coordinate system OXYZ and is obtained by Euler transformation by rotating the workpiece around the X, Y, and Z axes by angles α, β, and γ, respectively. The rotation transformation matrix M(α, β, γ) is shown in formula (7):

[0049]

[0050] Among them, let: m 11 =cosα cosγ-sinαcosβsin γ,

[0051] m 12 =-cosαsinγ-sinαcosβcosγ,m 13 =sinαsinβ,

[0052] m 21 =sinαcosγ+cosαcosβcosγ, m 22 =-sinαcosβ+cosαcosβcosγ, m 23 = -cosαsinβ, m 31 =sinβsinγ,m 32 =sinβcosγ,m 33 =cosβ

[0053] Formula (7) is simplified to:

[0054]

[0055] Secondly, the angle between the test line formed between the transmitting and receiving probes in the probe assembly and the OX' axis is Counterclockwise is positive; rotation angle Step by step Scan 0~360°, the number of steps is On the surface being tested Direction of ultrasonic propagation The direction index in the crystal coordinate system is:

[0056]

[0057] Third, use formula (10) and (11) to calculate each The Christoffel matrix determinants of the surface longitudinal wave and surface shear wave of the test line;

[0058]

[0059] Where, for cubic crystal materials, Γ ij as follows:

[0060]

[0061]

[0062] Fourth, inverse calculation: first input the elastic constant C ij The initial values ​​of the initial values ​​of the Euler transform angles α, β, and γ are optimized iteratively using the objective function of formula (12):

[0063]

[0064] Where arg represents the parameter C ij and [α, β, γ], k represents the kth iteration, M represents Number of circumferential inspections;

[0065] Fifth, output C ij The optimal solution of is the elastic constant of the single crystal material. The optimal solution of α, β, γ is obtained by Euler transformation of formula (13) and dot product operation of formula (14) to obtain the angles α', β', γ' between the axes of the coordinate system OX'Y'Z' of the workpiece under test and the axes of the crystal coordinate system OXYZ; thus, the elastic constant C of the single crystal material can be obtained in one test. ij and the crystal orientation angle of the material;

[0066]

[0067] Where: td, rd, and nd are the direction vectors of the XYZ axes of the workpiece coordinate system in the crystal coordinate system respectively;

[0068]

[0069] Where RD, TD and ND are the transverse T side normal of the detection surface, the rolling direction R normal and the angles α', β', γ' between the detection surface normal and the crystal coordinate system XYZ axis, respectively, which are the crystal orientation angles of the workpiece.

[0070] The present application is based on a variety of wave type ultrasonic sound field patterns combined with inversion algorithm for nondestructive testing of single crystal materials, and the elastic constants and crystal orientation of the single crystal material or workpiece are obtained at one time without causing any damage to the structure and without knowing the crystal orientation in advance. The present application can be used to evaluate the isotropic factor difference of isotropic materials caused by rolling process. The present application can directly obtain the actual sound field of ultrasonic waves in the material. The present application is based on the fact that defects existing in the workpiece will cause distortion of the omnidirectional sound time amplitude image, and creatively proposes that the distortion features in the image are extracted based on image morphology and artificial intelligence processing means to realize the detection of mixed crystals and other defects. The present application simplifies the test conditions and test steps in the industrial field, and shortens the test time of engineering materials. BRIEF DESCRIPTION OF DRAWINGS

[0071] Figure 1 It is a schematic diagram of a multi-wave type ultrasonic omnidirectional scanning test scheme;

[0072] Figure 2 It is a schematic diagram of multi-wave type ultrasonic formation;

[0073] Figure 3 It is a schematic diagram of the structure of a water immersion ultrasonic omnidirectional scanning detection system;

[0074] Figure 4 It is a schematic diagram of the water immersion ultrasonic omnidirectional scanning detection tool;

[0075] Figure 5 It is a schematic diagram of the water immersion ultrasonic omnidirectional scanning detection water tank;

[0076] Figure 6 It is a block diagram of a multi-wave type ultrasonic omnidirectional scanning test system;

[0077] Figure 7 It is a surface leakage wave containing only SLW sound field distribution diagram of 001 sample at a certain time;

[0078] Figure 8 It is a surface leakage wave containing SLW and SSV sound field distribution diagram of 001 sample at a certain time;

[0079] Figure 9 It is a SLW direction amplitude time chart of 001 sample at a certain time;

[0080] Figure 10 It is a SLW and SSV direction amplitude time chart of 001 sample at a certain time;

[0081] Figure 11 It is the OATM image processing result of a typical sample SLW;

[0082] Figure 12 It is a typical sample SLW direction relative velocity curve;

[0083] Figure 13 Velocity curves in various directions after SLW calibration of a typical sample;

[0084] Figure 14 is the elastic constant C of the single crystal material or workpiece ij And the main steps and contents of crystal orientation ultrasonic testing method. DETAILED DESCRIPTION

[0085] The present invention will be further described below with reference to the embodiments and the accompanying drawings, but is not limited thereto.

[0086] The meanings of the accompanying symbols are as follows: manipulator 1, water tank 2, probe holder 3; opening and closing motor 4: opening and closing motor A4-1, opening and closing motor B4-2; probe deflection motor 5: deflection motor A5-1, deflection motor B5-2; sample stage rotation motor 6, sample stage 7; probe 8: excitation probe 8-1, receiving probe 8-2; sample to be tested 9.

[0087] Figure 7 、 Figure 8 The acoustic field image of a typical sample at a representative moment (the dotted circle in the figure indicates the imaging range); Figure 9 、 Figure 10 This is an OATM image of a typical sample.

[0088] Example 1

[0089] The invention relates to an ultrasonic testing device and method for the elastic constants and crystal orientation of a single crystal material or workpiece. An ultrasonic transducer T excites a surface wave signal on the surface of a single crystal material workpiece at oblique incidence, and an ultrasonic transducer R receives a surface wave leakage wave on the same side of the workpiece surface to obtain the surface wave propagation sound field of the single crystal material. An omnidirectional acoustic time amplitude distribution image (OATM) is constructed by extracting the annular sound field signal in polar coordinates, and image processing technology is used to obtain the accurate relative velocity of the single crystal material in all directions. The elastic constants and crystal orientation of the single crystal material or workpiece are measured through inversion iteration in combination with the Christoffel equation.

[0090] The key technical aspects of the ultrasonic testing method for elastic constants and crystal orientation of single crystal materials or workpieces in this embodiment are:

[0091] It uses a special water immersion ultrasonic testing system, which includes: a manipulator 1, a water tank 2, a probe holder 3, a sample table 7, and a probe 8. The probe holder 3 is connected to the end clamp of the manipulator 1 or is itself the end clamp of the manipulator 1; the sample table 7 for placing the sample 9 to be tested is located in the water tank 2; the probe 8 is arranged on the probe holder 3;

[0092] The ultrasonic testing device for elastic constants and crystal orientation of single crystal materials or workpieces meets the following requirements: it excites three-dimensional ultrasonic signals of various waveforms in the workpiece and receives the scanning signals, thereby constructing an omnidirectional acoustic time amplitude distribution image under polar coordinates, obtaining an actual sound field image of ultrasonic anisotropic propagation, obtaining ultrasonic sound velocities in all directions of the single crystal material through morphological methods such as image processing, and realizing the elastic constant C of the single crystal material or workpiece through an inversion algorithm. ij This method is efficient and convenient, with intuitive imaging and conducive to engineering automation applications. By processing images rich in anisotropic features, it shifts anisotropy characterization from traditional signal processing to image morphological processing and artificial intelligence recognition.

[0093] The ultrasonic testing device for elastic constants and crystal orientation of single crystal materials or workpieces described in this embodiment preferably also claims protection for the following content: the specialized water immersion ultrasonic testing system further comprises: a probe opening and closing motor 4, a probe deflection motor 5, a sample stage rotation motor 6, and a controller; wherein: the probe opening and closing motor 4, namely the excitation probe opening and closing motor 4-1 and the receiving probe opening and closing motor 4-2, and the probe deflection motor 5, namely the excitation probe deflection motor 5-1 and the receiving probe deflection motor 5-2, each have two sets, respectively for controlling the spatial posture of the two probes 8, namely the excitation probe 8-1 and the receiving probe 8-2; the sample stage 7 is a rotating disk; and the controller is connected to the computer, the manipulator 1, the probe opening and closing motor 4, the probe deflection motor 5, and the sample stage rotation motor 6;

[0094] The elastic constant C of the single crystal material or workpiece ij The crystal orientation ultrasonic testing device determines the angle of the probe 8 for excitation and reception by calculating the theoretical sound velocity of single crystal anisotropic materials, and excites and receives multiple types of ultrasonic waves at one time; driven by the probe opening and closing motor 4 and the probe deflection motor 5, the probe 8 and the sample to be tested 9 perform relative rotational motion, and is equipped with ultrasonic testing electronic equipment with an ultrasonic excitation receiver and a data acquisition card as the core to achieve omnidirectional scanning and detection of the workpiece.

[0095] The controller includes a manipulator motion controller and a multi-axis motion controller; wherein: the manipulator motion controller is used to connect the computer and the manipulator 1, and the manipulator motion controller also controls the movement of each joint axis or end effector of the manipulator 1; the multi-axis motion controller is used to connect the computer and the motor; the motor is the probe opening and closing motor 4 and / or the probe deflection motor 5 and / or the sample stage rotation motor 6; the multi-axis motion controller receives control instructions sent by the computer, and controls the speed, direction and position of the motor through pulse signals or bus communication;

[0096] The receiving probe 8 - 2 for receiving ultrasonic waves is specifically a hydrophone and an immersion ultrasonic probe.

[0097] The single crystal material or workpiece elastic constant and crystal orientation ultrasonic testing method using the aforementioned single crystal material or workpiece elastic constant and crystal orientation ultrasonic testing device sequentially meets the following steps and content requirements:

[0098] Step 1, configure a multi-wave type transceiving ultrasonic scanning system;

[0099] Firstly, the system structure and working mode meet the following requirements:

[0100] The structural schematic diagram and system block diagram of the multi-wave type transceiving ultrasonic scanning system are shown in Figure 3 and Figure 6 respectively. The multi-wave type transceiving ultrasonic scanning system is composed of a mechanical scanning device and an ultrasonic detection electronic device. The mechanical scanning device is the aforementioned "special water immersion ultrasonic detection system". The ultrasonic detection electronic device includes an ultrasonic excitation receiver and a data acquisition card. The excitation probe 8-1 and the receiving probe 8-2 are respectively connected to the transmitting end and the receiving end of the ultrasonic excitation receiver. The output end of the ultrasonic excitation receiver is connected to the input end of the data acquisition card. The output end of the data acquisition card is connected to the computer. The data acquisition card uploads the ultrasonic wave data to the computer in real time. The mechanical hand 1 is used to adjust the axis of the probe holder 3 and the sample table 7 to coordinate, control the horizontal posture of the probe holder 3 and the distance between the probe holder 3 and the sample to be tested 9. During scanning, the sample table 7 can be kept stationary, the probe holder 3 is driven by the mechanical hand 1 to scan around the sample to be tested 9, or the probe holder 3 can be kept stationary, and the sample table 7 is driven by the sample table rotating motor 6 to rotate. The mechanical hand 1 can drive the probe holder 3 to rotate, that is, the probe holder 3 and the sample table 7 make relative rotational motion during detection. The deflection motor A5-1 controls the incident angle of the excitation probe 8-1 on the probe holder 3. The deflection motor B5-2 controls the receiving angle of the receiving probe 8-2 on the probe holder 3. The opening and closing motor A4-1 and the opening and closing motor B4-2 control the stepwise offset of the two probes and change the test line segment length. The length range d is 0-50mm, and the stepwise offset △d is 0.1-0.5mm. The excitation probe 8-1 and the receiving probe 8-2 are respectively connected to the transmitting end and the receiving end of the ultrasonic excitation receiver. The output end of the ultrasonic excitation receiver is connected to the input end of the data acquisition card. The output end of the data acquisition card is connected to the computer. The data acquisition card uploads the data to the computer in real time.

[0101] Secondly, when determining the probe incident angle, the following requirements are met:

[0102] The ultrasonic wave propagating in the solid medium exists in multiple wave types, such as surface longitudinal wave (SLW), Rayleigh wave, refracted longitudinal wave, refracted transverse wave, etc., depending on the size and boundary conditions of the workpiece. When they propagate in the workpiece, a series of complex phenomena such as reflection, refraction, scattering, diffraction and wave type conversion occur. Figure 2As shown, the ultrasonic signals of various waveforms contain rich characteristic information of the workpiece. Based on the basic principle of acoustics, in order to generate and receive multi-waveform ultrasonic waves at one time to characterize the anisotropy of single crystal high-temperature alloys, the test scheme proposed is: first, according to Figure 1 As shown, the axes of the sound beams of the coplanar excitation probe 8-1 and the receiving probe 8-2 are both in the same normal plane with the sample 9 to be tested (specifically, the axes of the excitation probe 8-1 and the receiving probe 8-2 are coplanar and the plane is perpendicular to the upper surface of the sample 9 to be tested); the ultrasonic wave excited by the excitation probe 8-1 is coupled with water at a certain angle α T The incident light is injected into the sample 9 to be tested, and the α T Generate multi-waveform ultrasonic waves in the sample 9, including surface longitudinal waves, Rayleigh waves, refracted longitudinal waves, and refracted shear waves; use the receiving probe 8-2 to R Receive multi-mode ultrasonic waves leaked into the water, α T The value is confirmed according to formula (1), β R Value follows α T Proper adjustment to meet α T =β R Make SLW's weight stronger;

[0103]

[0104] Where: c1 is the sound speed in water, c2max is the maximum longitudinal wave sound speed of the anisotropic material, and c2min is the minimum longitudinal wave sound speed of the anisotropic material;

[0105] Third, the multi-waveform transceiver ultrasonic scanning system meets the following requirements when performing system data acquisition: during detection, the spatial position of the manipulator 1 is adjusted so that the probe holder 3 is parallel to the sample stage 7; the angle of the excitation probe 8-1 is calculated by formula 1, and the deflection motor A5-1 and the deflection motor B5-2 respectively control the posture adjustment of the receiving probe 8-2 and the excitation probe 8-1, while the opening and closing motor A4-1 and the opening and closing motor B4-2 respectively control the radial test segment lengths of the excitation probe 8-1 and the receiving probe 8-2 to ensure that the multi-waveform ultrasonic wave can be successfully excited and received; the manipulator 1 adjusts the distance between the probe holder 3 and the sample to be tested 9 according to the focal length parameter of the probe 8, so that the probe 8 is focused on the surface of the sample to be tested 9; the probe holder 3 and the sample stage 7 perform relative rotation, and data is collected in real time during the rotation scanning process and uploaded to the computer;

[0106] Step 2: Use the probe holder 3 and sample stage 7 of the multi-waveform transceiver ultrasonic scanning system to perform relative rotational motion, rotate and scan around the normal line of a point on the detection surface of the sample 9 to be tested, and then step by step change the test line length to scan multiple circles to obtain the multi-waveform anisotropic propagation sound field and omnidirectional sound time amplitude distribution map after wavelet transformation of all samples 9 to be tested; and also meet the following detailed content requirements in sequence:

[0107] First, prepare two isotropic material samples as comparison samples. The sound velocities of the comparison samples are known and have obvious sound velocity differences. The sound velocities of the two comparison samples are within the sound velocity fluctuation range of the single crystal material.

[0108] Second, according to Figure 1 The sample 9 to be tested is placed in a manner, and the sample 9 to be tested includes: isotropic materials and single crystal materials; one workpiece is placed each time the workpiece is scanned;

[0109] Third, the deflection motor A5-1 is used to control the incident angle of the excitation probe 8-1, and the deflection motor B5-2 is used to control the receiving angle of the receiving probe 8-2. During the subsequent detection process, the two probes 8 must maintain the same posture, and the distance between all receiving probes 8-2 on the probe holder 3 and the workpiece surface must be consistent;

[0110] Fourthly, the test line formed by the excitation probe 8-1 and the receiving probe 8-2 is rotated around the axis (i.e. the normal of the incident point on the sample to be tested (9)) to complete the detection of multiple test line directions within 360° in the XY plane. The rotation scanning step angle is After scanning, we get: different direction angles The two-dimensional array (M×L) of the time domain signal (data length L) is as follows:

[0111] Fifth, the opening and closing motor A4-1 and the opening and closing motor B4-2 change the radial propagation distance of SLW in a stepping manner, corresponding to Figure 1 The dotted area is scanned point by point. Each Δd data corresponds to a two-dimensional array (M×L). After N Δd steps, different radial lengths (N×Δd) and different direction angles are obtained. The three-dimensional array (N×M×L) of the time domain signal (L) below;

[0112] Sixth, the square matrix N×M is converted into a circular distribution diagram using the polar coordinate conversion formula (2), thereby obtaining various wave-type ultrasonic sound field patterns of the workpiece to be tested;

[0113]

[0114] Where: r corresponds to 1~N, Corresponding to 1~M; x, y are the coordinates of the imaging pixel;

[0115] Seventh, the three-dimensional array (N×M×L) is imaged by fixing N (e.g., taking N=1) to the two-dimensional array (M×L): the direction dimension of the array is processed into polar coordinate polar angle, the propagation time dimension is processed into polar diameter, and the time dimension is reversed (i.e., the polar diameter of the later wave is larger than that of the earlier wave) to intuitively display the speed of sound in different directions. In this way, the omnidirectional acoustic time amplitude map (OATM) of each sample is obtained;

[0116]

[0117] Where: t i Corresponding to 1~L, t is the acoustic time corresponding to the minimum radial length of the test line. Corresponding to 1~M; X, Y are the coordinates of the imaging pixel points of the omnidirectional acoustic time amplitude map; by changing the imaging time window range, the omnidirectional acoustic time amplitude map of multiple wave types such as surface longitudinal wave, surface shear wave, Rayleigh wave, refracted longitudinal wave, and refracted shear wave can be displayed;

[0118] Step 3, combining the sound field image to filter out interference noise from the omnidirectional sound amplitude distribution diagram and perform image processing to obtain the relative sound velocity distribution curves of longitudinal and shear waves in each direction; further comprising the following steps:

[0119] First, the original RGB format image of the test workpiece OATM is processed by dimensionality reduction, filtering, and edge detection to extract the SLW wavefront and SSV wavefront respectively, and the appearance time t of the SLW wave and SSV wave in each direction of the workpiece is obtained. T-SLW and t T-SSV ;

[0120] Second, the time t when the SLW wave or SSV wave appears on a test line T-SLW or T-SSV It consists of three parts: incident wave underwater sound path (t T ), sound path t in the workpiece SLW or / and t SSV , outgoing wave acoustic path (t R ); the relative sound velocity of longitudinal and transverse waves in single crystal materials is the time t T-SLW and t T-SSV Relative representation:

[0121] t T-SLW =t T +t SLW +t R (3)

[0122] t T-SSV =t T +t SSV +t R (4)

[0123] Third, after the OATM image of the isotropic material is processed, the relative speed of the SLW wave and the SSV wave is obtained. The relative sound speed is calibrated using the known sound speed of the isotropic material to obtain the sound speed measurement calibration factor Q of the detection system.

[0124] Fourth, after completing the OATM map processing of the single crystal material, the relative velocity of the SLW wave and SSV wave of the single crystal material is obtained, v SLW and v SSV ;

[0125] Step 4, curve fitting of the sound velocity of the calibration sample to obtain the longitudinal and transverse wave anisotropic sound velocity distribution functions and

[0126] Step 4, curve fitting of the sound velocity of the calibration sample to obtain the longitudinal and transverse wave anisotropic sound velocity distribution functions and Step 4, curve fitting of the sound velocity of the calibration sample to obtain the longitudinal and transverse wave anisotropic sound velocity distribution functions and

[0127]

[0128] Step 5, according to the test values of and and the Christoffel model to obtain the elastic constant C ij and the crystal orientation angle; further comprising the following steps:

[0129] One is to regard the coordinate system OX'Y'Z' of the detected surface (001)' of the workpiece as the Euler transformation of the workpiece crystal coordinate system OXYZ rotated by angles α, β, γ around the X, Y, and Z axes respectively, and the rotation transformation matrix M(α, β, γ) is shown in formula (7):

[0130]

[0131] Where, respectively, let: m 11 = cosαcosγ-sinαcosβsinγ, m 12 =-cosαsinγ-sinαcosβcosγ, m 13 = sinαsinβ, m 21 = sinαcosγ+cosαcosβcosγ, m 22 =-sinαcosβ+cosαcosβcosγ, m 23 =-cosαsinβ, m 31 = sinβsinγ, m 32 = sinβcosγ, m 33 = cosβ

[0132] Formula (7) is simplified as:

[0133]

[0134] Secondly, the test line formed between the transceiving probes in the probe assembly and the OX' axis is at an angle of counterclockwise is positive; the rotation angle is stepped Scan 0~360°, the number of steps is On the surface being tested Direction of ultrasonic propagation The direction index in the crystal coordinate system is:

[0135]

[0136] Third, use formula (10) and (11) to calculate each The Christoffel matrix determinants of the surface longitudinal wave and surface shear wave of the test line;

[0137]

[0138] Where, for cubic crystal materials, Γ ij as follows:

[0139]

[0140] Fourth, inverse calculation: first input the elastic constant C ij The initial values ​​of the initial values ​​of the Euler transform angles α, β, and γ are optimized iteratively using the objective function of formula (12):

[0141]

[0142] Where arg represents the parameter C ij and [α, β, γ], k represents the kth iteration, M represents Number of circumferential inspections;

[0143] Fifth, output C ij The optimal solution of is the elastic constant of the single crystal material. The optimal solution of α, β, γ is obtained by Euler transformation of formula (13) and dot product operation of formula (14) to obtain the angles α', β', γ' between the axes of the coordinate system OX'Y'Z' of the workpiece under test and the axes of the crystal coordinate system OXYZ; thus, the elastic constant C of the single crystal material can be obtained in one test. ij and the crystal orientation angle of the material;

[0144]

[0145] Where: td, rd, and nd are the direction vectors of the XYZ axes of the workpiece coordinate system in the crystal coordinate system respectively;

[0146]

[0147] Where RD, TD and ND are the transverse T side normal of the detection surface, the rolling direction R normal and the angles α', β', γ' between the detection surface normal and the crystal coordinate system XYZ axis, respectively, which are the crystal orientation angles of the workpiece.

[0148] This embodiment performs non-destructive testing on single crystal materials based on multiple wave-type ultrasonic sound field patterns combined with an inversion algorithm. The elastic constants and crystal orientation of single crystal materials or workpieces are obtained at one time without causing any damage to the structure and without the need to know the crystal orientation in advance. The present invention can be used to evaluate the difference in isotropy factor of isotropic materials caused by the rolling process. The present invention can intuitively obtain the actual sound field of ultrasonic waves in the material. Based on the fact that "defects in the workpiece will cause distortion of the omnidirectional acoustic amplitude image", the present invention creatively proposes: to extract distortion features in the image based on image morphology and artificial intelligence processing methods to realize the detection of defects such as stray crystals. The present invention simplifies the test conditions and test steps in the industrial field, and shortens the testing time of engineering materials.

[0149] Example 2

[0150] Ultrasonic testing methods for elastic constants and crystal orientation of single crystal materials or workpieces, such as Figure 1 、 Figure 2 As shown;

[0151] The multi-waveform ultrasonic scanning system described in Example 1 is used to detect the elastic constants and crystal orientation of two single crystal high-temperature alloy plates. The material density is 8.78 kg / m 3 , with dimensions of 80mm×20mm×3mm, numbered as sample 001 and sample 011, respectively. <001> <100> 、 <011> <100> (The first index is the crystal direction in the longitudinal direction of the test plate, and the second index is the crystal direction in the normal direction of the side of the test plate).

[0152] The experiment uses a 10MHz water immersion focused probe with a chip diameter of 6.35mm and a focal length of 12.8mm for transmission, and a 10MHz water immersion flat probe with a chip diameter of 5mm for reception. The system sampling frequency is 125MHz.

[0153] Step 1: Configure a multi-waveform transceiver ultrasound scanning system;

[0154] The ultrasonic transmitting probe 8-1, the receiving probe 8-2 and the workpiece 9 are Figure 1 The methods shown are all placed in water so that the coplanar sound beam axes of the transmitting probe 8-1 and the receiving probe 8-2 are in the same normal plane of the sample to be tested 9, and the distance between the incident points of the transmitting probe 8-1 and the receiving probe 8-2 is d;

[0155] Step 2: The probe holder 3 and sample stage 7 of the multi-waveform transceiver ultrasonic scanning system rotate relative to each other, performing one rotation around the normal line of a point on the test surface of the workpiece (i.e., the sample 9 to be tested). The system then performs multiple rotations by incrementally varying the length of the test line to obtain the multi-waveform anisotropic propagation sound field and the omnidirectional acoustic time-amplitude distribution diagram after wavelet transformation for all the samples to be tested. This includes the following steps:

[0156] 1) Isotropic materials: Stainless steel plates and nickel plates with known sound velocity are used for sound velocity calibration of the detection system. The dimensions of the stainless steel plate are 70 mm × 50 mm × 3 mm, and the dimensions of the nickel plate are 70 mm × 18 mm × 4.6 mm.

[0157] 2) According to Figure 1 Place the workpiece to be tested in this way. The workpieces include: two single crystal high temperature alloy samples 001 and 011; two isotropic metal plates: stainless steel and nickel; place one workpiece each time for testing;

[0158] 3) The sound velocity of single crystal high temperature alloy is estimated to be in the range of 4200~6300m / s. According to formula (1), the transmitting probe α T and receiving probe β R During the inspection process, the ultrasonic probe is fixed to ensure that the water distance between the probe and all workpieces to be inspected is consistent.

[0159] 4) The test line formed by the excitation probe 8-1 and the receiving probe 8-2 is rotated around the axis (i.e. the normal of the incident point on the sample to be tested (9)) to complete the detection of multiple test line directions within 360° in the XY plane. The rotation scanning step angle is After scanning, we get: a two-dimensional array (1000×3500);

[0160] 5) Changing the SLW radial propagation distance in steps of Δd = 0.4 mm corresponds to Figure 1 The dotted area is scanned point by point. Each Δd data corresponds to a two-dimensional array (1000×3500). After N=20 Δd steps, different radial lengths (20×Δd) and different direction angles can be obtained. The three-dimensional array (20×1000×3500) of the time domain signal (L) below;

[0161] 6) The square array 20×1000 is converted into a circular distribution diagram using the polar coordinate conversion formula (2), thereby obtaining various wave-type ultrasonic sound field patterns of the single crystal material or workpiece to be tested, see Figure 7 、 Figure 8 As shown;

[0162] 7) The three-dimensional array (20×1000×3500) and the two-dimensional array (1000×3500) when N=1 are imaged. The array direction dimension is processed into polar coordinate polar angle, and the propagation time dimension is processed into polar radius to obtain the omnidirectional acoustic time amplitude map (OATM) of each workpiece. By changing the imaging time window range, the OATM displaying only SLW, SLW and SSV, and SLW+SSV and subsequent multiple waveforms can be processed as follows: Figure 9 、 Figure 10 shown.

[0163] Step 3: Combine the omnidirectional sound time amplitude distribution diagram with the sound field image, filter out interference noise, and then perform image processing to obtain the relative sound velocity distribution curves of longitudinal and shear waves in each direction. This includes the following steps:

[0164] 1) Perform dimension reduction, filtering, and edge detection on the RGB format original images of the OATM of the single crystal sample, stainless steel plate, and nickel plate. Figure 11 As shown in the figure, the SLW wavefront and SSV wavefront are extracted to obtain the SLW wave appearance time in each direction. According to formulas (3) and (4), the same terms t are removed. T -t R , get the relative sound speed of SLW and SSV Figure 12 As shown;

[0165] 2) After completing the OATM image processing of the isotropic stainless steel plate and nickel plate, the relative velocities of the SLW wave and the SSV wave are obtained. The relative sound velocity is calibrated using the known sound velocity to obtain the sound velocity measurement calibration factor Q of the detection system.

[0166] 3) Combined with the sound velocity measurement calibration factor Q of the detection system, the relative sound velocity curve of the single crystal plate is fitted to obtain the longitudinal and shear wave sound velocity distribution function and See Figure 13 shown.

[0167] 4) According to and The elastic constant C is obtained by inversion iteration using the test value and Christoffel model. ij and crystal orientation angle. The single crystal elastic constants can be obtained through the inversion algorithm.

[0168] Table 1 Ultrasonic elastic constants and crystal orientation test results of single crystal plates

[0169]

[0170] The above embodiments are intended only to illustrate the technical concepts and features of the present invention. Their purpose is to enable those skilled in the art to understand the contents of the present invention and implement them accordingly. They are not intended to limit the scope of protection of the present invention. Any equivalent changes or modifications made in accordance with the spirit of the present invention are intended to be covered by the scope of protection of the present invention.

Claims

1. Ultrasonic testing device for elastic constants and crystal orientation of single crystal materials or workpieces, characterized by: The invention relates to a special water immersion ultrasonic detection system, which comprises: a manipulator (1), a water tank (2), a probe rack (3), a sample table (7), and a probe (8); wherein: the probe rack (3) is connected to the end clamp of the manipulator (1) or is itself the end clamp of the manipulator (1); the sample table (7) for placing a sample to be tested (9) is located in the water tank (2); and the probe (8) is arranged on the probe rack (3); The ultrasonic testing device for elastic constants and crystal orientation of single crystal materials or workpieces meets the following requirements: it excites three-dimensional ultrasonic signals of various waveforms in the workpiece and receives the scanning signals, thereby constructing an omnidirectional acoustic time amplitude distribution image under polar coordinates, obtaining an actual sound field image of ultrasonic anisotropic propagation, obtaining ultrasonic sound velocity in all directions of the single crystal material through image processing morphological methods, and realizing the elastic constant C of the single crystal material or workpiece through an inversion algorithm. ij and crystal orientation dual measurement.

2. The ultrasonic testing device for elastic constants and crystal orientation of single crystal materials or workpieces according to claim 1, characterized in that: The special water immersion ultrasonic detection system further comprises: a probe opening and closing motor (4), a probe deflection motor (5), a sample stage rotation motor (6), and a controller; Wherein: the probe opening and closing motor (4), i.e., the excitation probe opening and closing motor (4-1) and the receiving probe opening and closing motor (4-2), and the probe deflection motor (5), i.e., the excitation probe rotation motor (5-1) and the receiving probe deflection motor (5-2), are each provided with two sets, and are used to control the spatial postures of the two probes (8), i.e., the excitation probe (8-1) and the receiving probe (8-2), respectively; the sample stage (7) is a rotating disk; and the controller is connected to the computer, the manipulator (1), the probe opening and closing motor (4), the probe deflection motor (5), and the sample stage rotation motor (6); The ultrasonic testing device for elastic constants and crystal orientation of single crystal materials or workpieces determines the angles of a probe (8) for excitation and reception by calculating the theoretical sound velocity of single crystal anisotropic materials, and excites and receives multiple types of ultrasonic waves at one time; under the rotational motion of the end of a manipulator (1), or under the rotational drive of a sample rotation motor (6), the probe (8) and the sample to be tested (9) perform relative rotational motion, and is combined with ultrasonic detection electronic equipment with an ultrasonic excitation receiver and a data acquisition card as the core to achieve omnidirectional scanning and detection of the workpiece.

3. The ultrasonic testing device for elastic constants and crystal orientation of single crystal materials or workpieces according to claim 2, characterized in that: The controller includes a manipulator motion controller and a multi-axis motion controller; wherein the manipulator motion controller is used to connect the computer and the manipulator (1), and the manipulator motion controller also controls the motion of each joint axis or end effector of the manipulator (1); The multi-axis motion controller is used to connect a computer and a motor; the motor is a probe opening and closing motor (4) or / and a probe deflection motor (5) or / and a sample stage rotation motor (6); the multi-axis motion controller receives control instructions sent by the computer, and controls the speed, direction and position of the motor through pulse signals or bus communication; The receiving probe (8-2) for receiving ultrasonic waves is specifically a hydrophone and an immersion ultrasonic probe.

4. A method for ultrasonically testing elastic constants and crystal orientation of a single crystal material or workpiece using the ultrasonic testing device for elastic constants and crystal orientation of a single crystal material or workpiece according to claim 1, characterized in that: The ultrasonic testing method for elastic constants and crystal orientation of single crystal materials or workpieces shall meet the following steps and content requirements in sequence: Step 1: Configure a multi-waveform transceiver ultrasound scanning system; First, the system composition and working mode meet the following requirements: The multi-waveform transceiver ultrasonic scanning system used therein is composed of a mechanical scanning device and ultrasonic detection electronic equipment; the mechanical scanning device is the aforementioned "specialized water immersion ultrasonic detection system"; the ultrasonic detection electronic equipment includes: an ultrasonic excitation receiver and a data acquisition card; wherein: the excitation probe (8-1) and the receiving probe (8-2) are respectively connected to the transmitting end and the receiving end of the ultrasonic excitation receiver, the output end of the ultrasonic excitation receiver is connected to the input end of the data acquisition card, the output end of the data acquisition card is connected to a computer, and the data acquisition card uploads the ultrasonic data to the computer in real time; The manipulator (1) is used to adjust the axis of the probe holder (3) and the sample stage (7) to coordinate, and at the same time control the horizontal posture of the probe holder (3) and the distance between the probe holder (3) and the sample to be tested (9). During scanning, the sample stage (7) can be kept stationary, and the manipulator (1) drives the probe holder (3) to scan around the sample to be tested (9), or the probe holder (3) can be kept stationary, and the sample stage rotation motor (6) drives the sample stage (7) to rotate; the manipulator (1) can drive the probe holder (3) to rotate, that is, during detection, the probe holder (3) and the sample stage (7) perform relative rotational motion; the deflection motor A (5-1) controls the excitation probe (8) on the probe holder (3) to rotate. -1), the deflection motor B (5-2) controls the receiving angle of the receiving probe (8-2) on the probe holder (3), the opening and closing motor A (4-1) and the opening and closing motor B (4-2) control the stepping offset of the two probes and change the length of the test line segment, the length range d is 0-50mm, and the stepping offset Δd is 0.1-0.5mm; the excitation probe (8-1) and the receiving probe (8-2) are respectively connected to the transmitting end and the receiving end of the ultrasonic excitation receiver, the output end of the ultrasonic excitation receiver is connected to the input end of the data acquisition card, the output end of the data acquisition card is connected to the computer, and the data acquisition card uploads the data to the computer in real time; Second, the following requirements must be met when determining the probe incident angle: First, the sound beam axes of the coplanar excitation probe (8-1) and the receiving probe (8-2) are both in the same normal plane with the sample to be tested (9); the ultrasonic wave excited by the excitation probe (8-1) is coupled with water at a certain angle α T Inject into the sample to be tested (9), control α T Generate multi-waveform ultrasonic waves including surface longitudinal waves, Rayleigh waves, refracted longitudinal waves, and refracted transverse waves in the sample to be tested (9); use a receiving probe (8-2) to transmit the ultrasonic waves at an optimal angle β R Receive multi-mode ultrasonic waves leaked into the water, α T The value is confirmed according to formula (1), β R Value follows α T Adjust to meet α T =β R Make the surface longitudinal wave SLW component stronger; Where: c1 is the sound speed in water, c2max is the maximum longitudinal wave sound speed of the anisotropic material, and c2min is the minimum longitudinal wave sound speed of the anisotropic material; Third, the multi-waveform transceiver ultrasonic scanning system meets the following requirements when performing system data acquisition: during detection, the spatial position of the manipulator (1) is adjusted so that the probe holder (3) is parallel to the sample stage (7); the angle of the excitation probe (8-1) is calculated by formula (1), the deflection motor A (5-1) and the deflection motor B (5-2) respectively control and adjust the postures of the receiving probe (8-2) and the excitation probe (8-1), and at the same time, the opening and closing motor A (4-1) and the opening and closing motor B (4-2) respectively control the radial test line segment lengths of the excitation probe (8-1) and the receiving probe (8-2) to ensure that the multi-waveform ultrasonic wave can be successfully excited and received; the manipulator (1) adjusts the distance between the probe holder (3) and the sample to be tested (9) according to the focal length parameter of the probe (8) so that the probe (8) is focused on the surface of the sample to be tested (9); the probe holder (3) and the sample stage (7) perform relative rotational motion, and data is collected in real time during the rotational scanning process and uploaded to the computer; Step 2, using a multi-waveform transceiver ultrasonic scanning system to detect the sample to be tested (9), and obtaining the multi-waveform anisotropic propagation sound field and the omnidirectional sound time amplitude distribution diagram after wavelet transformation of all the samples to be tested (9); Step 3: Combined with the sound field image, the omnidirectional sound amplitude distribution diagram is subjected to image processing after interference noise is filtered out to obtain the relative sound velocity distribution curves of longitudinal and shear waves in each direction; Step 4: Perform curve fitting based on the sound velocity of the calibration sample to obtain the longitudinal and shear wave sound velocity distribution functions. and Combined with the sound velocity measurement calibration factor Q of the detection system, the longitudinal and shear wave sound velocity distribution functions of the single crystal material are and Perform curve fitting to obtain the longitudinal and shear wave velocity distribution functions and Step 5, according to and The elastic constant C is obtained by inversion iteration using the test value and Christoffel model. ij and crystal orientation angle.

5. The ultrasonic testing method for elastic constants and crystal orientation of single crystal materials or workpieces according to claim 4, characterized in that: Step 2 of the ultrasonic testing method for elastic constants and crystal orientation of single crystal materials or workpieces shall meet the following detailed requirements in sequence: First, prepare two isotropic material samples as comparison samples. The sound velocities of the comparison samples are known and have obvious sound velocity differences. The sound velocities of the two comparison samples are within the sound velocity fluctuation range of the single crystal material. Secondly, placing a sample to be tested (9), the sample to be tested (9) including: isotropic material, single crystal material; placing a workpiece each time scanning; Third, the deflection motor A (5-1) is used to control the incident angle of the excitation probe (8-1), and the deflection motor B (5-2) is used to control the receiving angle of the receiving probe (8-2). During the subsequent detection process, the postures of the two probes (8) must be kept consistent, and the distances between all the receiving probes (8-2) on the probe holder (3) and the surface of the sample (9) to be tested must be kept consistent. Fourthly, the test line formed by the excitation probe (8-1) and the receiving probe (8-2) is rotated around the axis to complete the detection of multiple test line directions within 360° in the XY plane. The rotation scanning step angle is After scanning, we get: different direction angles The two-dimensional array (M×L) of the time domain signal (data length L) is as follows: Fifth, by opening and closing motor A (4-1) and motor B (4-2), the length of the test line segment is changed, and the radial propagation distance of the SLW is changed in a step-by-step manner of Δd, and a line-by-line scan is performed. Each Δd data corresponds to a two-dimensional array (M×L). After N Δd steps, different radial lengths (N×Δd) and different direction angles are obtained. The three-dimensional array (N×M×L) of the time domain signal (L) below; Sixth, the square matrix N×M is converted into a circular distribution diagram using the polar coordinate conversion formula (2), thereby obtaining various wave-type ultrasonic sound field patterns of the workpiece to be tested; Where: r corresponds to 1~N, Corresponding to 1~M; x, y are the coordinates of the imaging pixel; Seventh, the three-dimensional array (N×M×L) is imaged by fixing N to form a two-dimensional array (M×L): the direction dimension of the array is processed into polar coordinate polar angle, the propagation time dimension is processed into polar diameter, and the time dimension is reversed to intuitively display the speed of sound in different directions. In this way, the omnidirectional sound time amplitude diagram of each sample is obtained; Where: t i Corresponding to 1~L, t is the acoustic time corresponding to the minimum radial length of the test line. Corresponding to 1~M; X, Y are the coordinates of the imaging pixel points of the omnidirectional acoustic time amplitude map; by changing the imaging time window range, the omnidirectional acoustic time amplitude map of multiple wave types such as surface longitudinal wave, surface shear wave, Rayleigh wave, refracted longitudinal wave, and refracted shear wave can be displayed.

6. The ultrasonic testing method for elastic constants and crystal orientation of a single crystal material or workpiece according to claim 4 or 5, characterized in that: Step 3 of the ultrasonic testing method for elastic constants and crystal orientation of single crystal materials or workpieces satisfies the following steps and content requirements in sequence: First, the original RGB format image of the test workpiece OATM is processed by dimensionality reduction, filtering, and edge detection to extract the SLW wavefront and SSV wavefront respectively, and the appearance time t of the SLW wave and SSV wave in each direction of the workpiece is obtained. T-SLW and t T-SSV ; Second, the time t when the SLW wave or / and SSV wave appear on a test line T-SLW or / and t T-SSV It consists of three parts: incident wave underwater sound path (t T ), sound path t in the workpiece SLW or / and t SSV , outgoing wave acoustic path (t R ); the relative sound velocity of longitudinal and transverse waves in single crystal materials is the time t T-SLW and t T-SSV Relative representation: t T-SLW =t T +t SLW +t R (3) t T-SSV =t T +t SSV +t R (4) Third, after the OATM image of the isotropic material is processed, the relative speed of the SLW wave and the SSV wave is obtained. The relative sound speed is calibrated using the known sound speed of the isotropic material to obtain the sound speed measurement calibration factor Q of the detection system. Fourth, after completing the OATM map processing of the single crystal material, the relative velocity of the SLW wave and SSV wave of the single crystal material is obtained, v SLW and v SSV .

7. The ultrasonic testing method for elastic constants and crystal orientation of a single crystal material or workpiece according to claim 4 or 5, characterized in that: Step 5 of the ultrasonic testing method for elastic constants and crystal orientation of single crystal materials or workpieces also satisfies the following requirements in sequence: First, the coordinate system OX'Y'Z' of the workpiece's inspected surface (001)' is regarded as the workpiece crystal coordinate system OXYZ and is obtained by Euler transformation by rotating the workpiece around the X, Y, and Z axes by angles α, β, and γ, respectively. The rotation transformation matrix M(α, β, γ) is shown in formula (7): Among them, let: m 11 =cosαcosγ-sinαcosβsinγ, m 12 =-cosαsinγ-sinαcosβcosγ,m 13 =sinαsinβ, m 21 =sinαcosγ+cosαcosβcosγ,m 22 =-sinαcosβ+cosαcosβcosγ, m 23 =-cosαsinβ,m 31 =sinβsinγ,m 32 =sinβcosγ,m 33 =cosβ Formula (7) is simplified to: Secondly, the angle between the test line formed between the transmitting and receiving probes in the probe assembly and the OX' axis is Counterclockwise is positive; rotation angle Step by step Scan 0~360°, the number of steps is On the surface being tested Direction of ultrasonic propagation The direction index in the crystal coordinate system is: Third, use formula (10) and (11) to calculate each The Christoffel matrix determinants of the surface longitudinal wave and surface shear wave of the test line; Where, for cubic crystal materials, Γ ij as follows: Fourth, inverse calculation: first input the elastic constant C ij The initial values ​​of the initial values ​​of the Euler transform angles α, β, and γ are optimized iteratively using the objective function of formula (12): Where arg represents the parameter C ij and [α, β, γ], k represents the kth iteration, M represents Number of circumferential inspections; Fifth, output C ij The optimal solution of is the elastic constant of the single crystal material. The optimal solution of α, β, γ is obtained by Euler transformation of formula (13) and dot product operation of formula (14) to obtain the angles α', β', γ' between the axes of the coordinate system OX'Y'Z' of the workpiece under test and the axes of the crystal coordinate system OXYZ; thus, the elastic constant C of the single crystal material can be obtained in one test. ij and the crystal orientation angle of the material; Where: td, rd, and nd are the direction vectors of the XYZ axes of the workpiece coordinate system in the crystal coordinate system respectively; Where RD, TD and ND are the transverse T side normal of the detection surface, the rolling direction R normal and the angles α', β', γ' between the detection surface normal and the crystal coordinate system XYZ axis, respectively, which are the crystal orientation angles of the workpiece.

Citation Information

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