Rotary lifting swing arm device and single wafer processing equipment

Abstract

The invention relates to a rotary lifting swing arm device and single wafer processing equipment. The rotary lifting swing arm device comprises a main plate, a lifting driving component, a rotary driving component and a swing arm component, a rotary driving mechanism of the rotary driving part and a linear guide rail are arranged on the main plate in parallel, and the linear guide rail is rotationally connected with the main plate; the rotary driving mechanism can drive the rotary shaft to rotate around the axis of the rotary shaft along with the linear guide rail; a rotary lifting frame in the lifting driving part is arranged at the lower end of the rotating shaft and is connected with the output end of the linear driving mechanism; the rotary lifting frame is rotationally connected with the rotary shaft; the linear driving mechanism can drive the rotating shaft to linearly move in the axis direction of the linear guide rail. The lower end of the swing arm component is fixedly connected with the top of the rotating shaft. The rotating action and the lifting action of the swing arm component can be achieved, operation is smooth, installation and maintenance are convenient, and the requirement for the smaller size is met.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of equipment used in wafer wet cleaning and etching process, in particular to a rotating lifting swing arm device and a single wafer processing equipment. BACKGROUND

[0002] In the wafer wet cleaning and etching process of chip manufacturing, the swing arms of the liquid spray head, gas spray head and scrubbing head in the cavity of the single wafer processing equipment need to complete specific process actions such as lifting and rotating. The existing technology mainly uses a hollow rotating swing table to realize the rotating function, and uses a combination structure of motor-screw-straight line guide rail to realize the lifting function. This combination structure is complex and large in size, and cannot meet the miniaturization requirement of the cavity of the single wafer processing equipment. SUMMARY

[0003] The purpose of the present application is to provide a rotating lifting swing arm device and a single wafer processing equipment which are small in size and convenient to install and maintain.

[0004] In a first aspect, the present application provides a rotating lifting swing arm device, comprising a main plate, a lifting driving component, a rotating driving component and a swing arm component. The rotating driving component comprises a rotating driving mechanism, a straight line guide rail, a rotating shaft and a rotating transmission mechanism. The rotating driving mechanism and the straight line guide rail are arranged side by side on the main plate, and the straight line guide rail is rotationally connected with the main plate. The rotating driving mechanism is connected with the straight line guide rail through the rotating transmission mechanism, and can drive the straight line guide rail to rotate around its axis. The rotating shaft is inserted into the straight line guide rail, and the rotating shaft can rotate with the straight line guide rail. The lifting driving component comprises a straight line driving mechanism and a rotating lifting frame. The rotating lifting frame is arranged at the lower end of the rotating shaft and connected with the output end of the straight line driving mechanism. The rotating lifting frame is rotationally connected with the rotating shaft. The straight line driving mechanism can drive the rotating shaft to move linearly along the axis of the straight line guide rail through the rotating lifting frame. The lower end of the swing arm component is fixedly connected with the top end of the rotating shaft.

[0005] In a preferred embodiment, the rotating driving component comprises a first bearing and a second bearing, and the straight line guide rail is rotationally connected with the main plate through the first bearing and the second bearing.

[0006] In a preferred embodiment, the rotating transmission mechanism comprises a first synchronous wheel fixedly connected with the straight line guide rail, a second synchronous wheel connected with the driving end of the rotating driving mechanism, and a synchronous belt connecting the first synchronous wheel and the second synchronous wheel.

[0007] In a preferred embodiment, the rotating shaft and the inner cavity of the linear guide rail are relatively fixed in the circumferential direction, so that the rotating shaft can rotate with the linear guide rail.

[0008] In a preferred embodiment, the cross section of the rotating shaft is polygonal, elliptical or irregular, and the cross section of the inner cavity of the linear guide rail matches the rotating shaft; or, A connecting key is provided on the rotating shaft, and a keyway is provided in the inner cavity of the linear guide rail.

[0009] In a preferred embodiment, the rotating lifting frame includes a main shaft connecting member and a third bearing; the main shaft connecting member is fixedly connected to the output end of the linear drive mechanism; the outer ring of the third bearing is fixedly connected to the main shaft connecting member, and the inner ring is fixedly connected to the outer wall of the rotating shaft.

[0010] In a preferred embodiment, a bearing limit plate is provided on the side wall of the main board, and a bearing limit frame is provided on the bearing limit plate; a fourth bearing assembled in the bearing limit frame is provided at one end of the main shaft connecting member, and the fourth bearing enables the main shaft connecting member to perform linear motion along the bearing limit frame.

[0011] In a preferred embodiment, the linear drive mechanism is a screw motor.

[0012] In a preferred embodiment, the swing arm component further comprises a swing arm connecting rod, a cantilever, a swing arm module adapter and a swing arm functional module connected in sequence; The lower end of the swing arm connecting rod is fixedly connected to the rotating shaft.

[0013] In a second aspect, the present application provides a single wafer processing device, including the above-mentioned rotating lifting swing arm device.

[0014] This application has the following beneficial effects: This application utilizes the coordinated installation of a rotary drive component, a lifting drive component, and a swing arm component to achieve both rotational and lifting motions of the swing arm component, providing smooth operation and meeting the requirements for low-cost, easy installation and maintenance, and a smaller size for a lifting and rotating device. Furthermore, the split design allows for the replacement of different swing arm functional modules to meet varying operating requirements, demonstrating strong adaptability. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for use in the embodiments. It should be understood that the following drawings only illustrate certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying any creative work.

[0016] Figure 1 is the overall structure schematic diagram of the rotating lifting swing arm device provided by the embodiment of the application; Figure 2 is the structure schematic diagram of the rotating lifting swing arm device (without swing arm component) provided by the embodiment of the application; Figure 3 is the front view of the rotating lifting swing arm device (without swing arm component) provided by the embodiment of the application; Figure 4 is the top view of the rotating lifting swing arm device (without swing arm component) provided by the embodiment of the application.

[0017] Figure 5 is the A-A cross-sectional view in Figure 4 ; Figure 6 is the B-B cross-sectional view in Figure 3 ; Figure label: 1-rotating shaft; 2-linear guide rail; 3-first synchronous wheel; 4-belt wheel bearing inter-block; 5-first bearing; 6-main plate; 7-bearing inter-outer spacer; 8-rotating bearing seat; 9-lifting module mounting plate; 10-bearing inter-inner spacer; 11-second bearing; 12-bearing limiting plate; 13-bearing end cover; 14-third bearing; 15-first shaft elastic block; 16-screw; 17-main shaft connecting piece; 18-lifting motor mounting plate; 19-lifting motor adjusting plate; 20-screw motor; 20a-screw; 21-fourth bearing; 22-second shaft elastic block; 23-bearing limiting plate; 23a-bearing limiting frame; 24-step servo hybrid motor; 25-lifting motor mounting plate; 26-second synchronous wheel; 27-synchronous belt; 28-swing arm connecting rod; 29-cantilever; 30-tube clamp; 31-swing arm module adapter; 32-swing arm function module; 100-lifting driving component; 200-rotating driving component; 300-swing arm component. DETAILED DESCRIPTION

[0018] To make the objectives, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions of the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some of the embodiments of the present invention, not all of them. The components of the embodiments of the present invention generally described and labeled in the drawings can be arranged and designed in a variety of different configurations.

[0019] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the invention as claimed, but rather merely represents selected embodiments of the present invention. All other embodiments derived by persons of ordinary skill in the art based on the embodiments of the present invention without inventive effort shall fall within the scope of protection of the present invention.

[0020] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined or explained in subsequent drawings.

[0021] In the description of the present invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer" and the like indicate positions or locations based on the positions shown in the accompanying drawings, or the positions or locations in which the inventive product is typically placed when in use. These terms are intended solely to facilitate the description of the present invention and to simplify the description, and are not intended to indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on the present invention. Furthermore, the terms "first," "second," and "third," etc., are used solely to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0022] Furthermore, terms such as "horizontal," "vertical," and "overhanging" do not necessarily imply that a component must be absolutely horizontal or overhanging, but rather that it can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," and does not mean that the structure must be completely horizontal, but rather that it can be slightly tilted.

[0023] In the description of the present invention, it should also be noted that, unless otherwise expressly specified or limited, the terms "disposed," "installed," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed connections, detachable connections, or integral connections; they may refer to mechanical connections or electrical connections; they may refer to direct connections or indirect connections through an intermediate medium; and they may refer to internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on the specific circumstances.

[0024] The following embodiments of the present invention are described in detail with reference to the accompanying drawings. In the absence of conflict, the following embodiments and features in the embodiments may be combined with each other.

[0025] like Figures 1 to 6 As shown, this embodiment provides a rotating and lifting swing arm device, including a main board 6, a lifting drive component 100, a rotating drive component 200 and a swing arm component 300.

[0026] The rotary drive component 200 includes a rotary drive mechanism, a rotary shaft 1, a linear guide rail 2 and a rotary transmission mechanism; the rotary drive mechanism and the linear guide rail 2 are arranged side by side on the main board 6, and the linear guide rail 2 and the main board 6 are rotationally connected; the rotary drive mechanism is connected to the linear guide rail 2 through the rotary transmission mechanism, and can drive the linear guide rail 2 to rotate around its own axis; wherein, the rotary drive mechanism adopts a stepping servo hybrid motor 24.

[0027] The rotating shaft 1 is inserted into the linear guide rail 2. The rotating shaft 1 can rotate along with the linear guide rail 2 through a limit function or a special shape.

[0028] The lifting drive component includes a linear drive mechanism and a rotating lifting frame; the rotating lifting frame is arranged at the lower end of the rotating shaft 1 and is connected to the output end of the linear drive mechanism; the rotating lifting frame and the rotating shaft 1 are rotationally connected; the linear drive mechanism can drive the rotating shaft 1 to perform linear motion along the axial direction of the linear guide rail 2 through the rotating lifting frame; wherein, the linear drive mechanism adopts a screw motor 20.

[0029] The lower end of the swing arm component 300 is fixedly connected to the top of the rotating shaft 1 by screws. The lifting function of the swing arm component 300 is realized by controlling the extension distance of the screw motor 20 of the lifting drive component 100, and the rotation function of the swing arm component 300 is realized by controlling the rotation angle of the step servo hybrid motor 24 of the rotating drive component 200.

[0030] This embodiment can realize the rotation and lifting movements of the swing arm component 300 respectively through the coordinated installation of the rotation drive component 200, the lifting drive component 100 and the swing arm component 300, and runs smoothly, meeting the requirements of low cost, easy installation and maintenance, and smaller size of the lifting and rotating device, and can meet the use requirements of single wafer processing equipment.

[0031] Specifically, the rotary drive component 200 includes a first bearing 5 and a second bearing 11 , and the linear guide rail is rotatably connected to the main board through the first bearing and the second bearing.

[0032] The rotary power transmission mechanism includes a first synchronous wheel 3 fixedly connected to the linear guide rail 2 , a second synchronous wheel 26 connected to the driving end of the step servo hybrid motor 24 , and a synchronous belt 27 connecting the first synchronous wheel 3 and the second synchronous wheel 26 .

[0033] First, install the first bearing 5 into the main board 6, use screws to fix the linear guide 2 to the first synchronous wheel 3, install the pulley bearing retaining ring 4 on the linear guide 2, and then pass through the first bearing 5 so that the upper and lower surfaces of the pulley bearing retaining ring 4 are in contact with the first synchronous wheel 3 and the first bearing 5 respectively; Install the second bearing 11 into the rotating bearing seat 8, and install the outer spacer 7 between the bearings into the rotating bearing seat 8; install the inner spacer 10 between the bearings on the linear guide 2, and then pass the linear guide 2 through the inner ring of the second bearing 11, and install the bearing limit plate 12 on the end face of the linear guide 2 by screws to realize the inner ring limitation of the second bearing 11, and then fix the rotating bearing seat 8 to the main board 6 by screws.

[0034] Fix the second synchronous wheel 26 to the step-servo hybrid motor 24 through the top screw, fix the step-servo hybrid motor 24 to the lifting motor mounting plate 25 through screws, install the synchronous belt 27 to the second synchronous wheel 26 and the first synchronous wheel 3 respectively, adjust the relative position of the lifting motor mounting plate 25 (with a long slot hole inside) on the main board 6 and fix it with screws to achieve the tension of the synchronous belt 27, and finally realize the assembly of the rotation drive component 200.

[0035] The step-servo hybrid motor 24 can be a commercially available product, and can achieve accurate rotation angle output of the second synchronous wheel 26 .

[0036] The rotating shaft 1 of the rotary drive component 200 and the inner cavity of the linear guide 2 are fixed relative to each other in the circumferential direction, so that the rotating shaft can rotate with the linear guide. For example, the cross-section of the rotating shaft 1 can be polygonal, elliptical, or irregular, and the cross-sectional shape of the inner cavity of the linear guide 2 matches the rotating shaft 1. Alternatively, a connecting key is provided on the rotating shaft 1 and a keyway is provided in the inner cavity of the linear guide rail 2, so as to achieve relative fixation between the two in the circumferential direction.

[0037] In this embodiment, the rotating shaft 1 is a square rod, and the inner cavity of the linear guide 2 is also set to a square shape. Such a design not only achieves relative fixation between the two in the circumferential direction, but also facilitates the lifting movement of the rotating shaft 1 relative to the linear guide 2.

[0038] In the lifting drive component 100, the screw motor 20 is fixed to the lifting motor adjustment plate 19 by screws, the lifting motor adjustment plate 19 is fixed to the lifting motor mounting plate 18 by screws, and then the lifting module mounting plate 9 and the bearing limit plate 23 are screwed to realize the connection between the main board 6 and the lifting motor mounting plate 18.

[0039] The bearing limiting plate 23 is provided with a bearing limiting frame 23a; the fourth bearing 21 is fixed on the main shaft connecting piece 17 through the second shaft elastic retainer 22, the fourth bearing 21 is placed in the bearing limiting frame 23a, and then the main shaft connecting piece 17 is fixed on the screw rod 20a through the screw 16. The fourth bearing 21 enables the main shaft connecting piece 17 to move linearly along the bearing limiting frame 23a.

[0040] The rotating shaft 1 is inserted into the inner hole of the linear guide rail 2, the third bearing 14 is installed in the bearing end cover 13, and then the third bearing 14 is fixed on the rotating shaft 1 through the first shaft elastic retainer 15.

[0041] The bearing end cover 13 is fixed on the main shaft connecting piece 17 through a screw, and finally the assembly of the lifting driving part 100 is realized. That is, the main shaft connecting piece 17 is fixedly connected with the screw rod 20a; the outer ring of the third bearing 14 is fixedly connected with the main shaft connecting piece 17, and the inner ring is fixedly connected with the outer wall of the rotating shaft 1.

[0042] The screw motor 20 is a commercially available product, which can realize the accurate distance extension of the screw rod 20a.

[0043] The swing arm part 300 is composed of swing arm connecting rods 28, cantilever arms 29, swing arm module adapters 31 and swing arm function modules 32 connected in sequence. The pipe clamp 30 is arranged on the cantilever arm 29.

[0044] The swing arm function module 32 is fixed on the swing arm module adapter 31 through a screw, the swing arm module adapter 31 is fixed on the cantilever arm 29 through a screw, the electric wire and the liquid pipe of the swing arm function module 32 are fixed on the cantilever arm 29 through the pipe clamp 30, and the cantilever arm 29 is fixed on the swing arm connecting rod 28 through a screw, and finally the assembly of the swing arm part 300 is realized.

[0045] The swing arm function module 32 can be a liquid spraying head, a gas spraying head or a scrubbing head, which can be replaced according to needs.

[0046] The embodiment also provides a single wafer processing device, which comprises the rotating lifting swing arm device. The rotating lifting swing arm device has various technical effects, which will not be described here.

[0047] The above is only a preferred embodiment of the present application and is not used to limit the present application. For those skilled in the art, the present application can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A rotary lifting swing arm device, characterized in that: It includes main board, lifting drive component, rotating drive component and swing arm component; The rotary drive component includes a rotary drive mechanism, a linear guide rail, a rotary shaft, and a rotary transmission mechanism; the rotary drive mechanism and the linear guide rail are arranged side by side on the main board, and the linear guide rail and the main board are rotatably connected; the rotary drive mechanism is connected to the linear guide rail through the rotary transmission mechanism, and can drive the linear guide rail to rotate around its own axis; the rotary shaft is inserted into the linear guide rail, and the rotary shaft can rotate with the linear guide rail; The lifting drive component includes a linear drive mechanism and a rotating lifting frame; the rotating lifting frame is arranged at the lower end of the rotating shaft and is connected to the output end of the linear drive mechanism; the rotating lifting frame and the rotating shaft are rotationally connected; the linear drive mechanism can drive the rotating shaft to perform linear motion along the axis direction of the linear guide rail through the rotating lifting frame; The lower end of the swing arm component is fixedly connected to the top end of the rotating shaft.

2. The rotary lifting swing arm device according to claim 1, characterized in that: The rotation driving component includes a first bearing and a second bearing, and the linear guide rail is rotatably connected to the main board through the first bearing and the second bearing.

3. The rotary lifting swing arm device according to claim 1, characterized in that: The rotary power transmission mechanism includes a first synchronous wheel fixedly connected to the linear guide rail, a second synchronous wheel connected to the driving end of the rotary drive mechanism, and a synchronous belt connecting the first synchronous wheel and the second synchronous wheel.

4. The rotary lifting swing arm device according to claim 1, characterized in that: The rotating shaft and the inner cavity of the linear guide rail are relatively fixed in the circumferential direction, so that the rotating shaft can rotate along with the linear guide rail.

5. The rotary lifting swing arm device according to claim 4, characterized in that: The cross section of the rotating shaft is polygonal, elliptical or irregular, and the cross section of the inner cavity of the linear guide rail matches the rotating shaft; or, A connecting key is provided on the rotating shaft, and a keyway is provided in the inner cavity of the linear guide rail.

6. The rotary lifting swing arm device according to claim 4, characterized in that: The rotating lifting frame includes a main shaft connecting member and a third bearing; the main shaft connecting member is fixedly connected to the output end of the linear drive mechanism; the outer ring of the third bearing is fixedly connected to the main shaft connecting member, and the inner ring is fixedly connected to the outer wall of the rotating shaft.

7. The rotary lifting swing arm device according to claim 6, characterized in that: A bearing limit plate is provided on the side wall of the main board, and a bearing limit frame is provided on the bearing limit plate; a fourth bearing assembled in the bearing limit frame is provided at one end of the main shaft connecting member, and the fourth bearing enables the main shaft connecting member to perform linear motion along the bearing limit frame.

8. The rotary lifting swing arm device according to claim 2, characterized in that: The linear drive mechanism is a screw motor.

9. The rotary lifting swing arm device according to claim 4, characterized in that: The swing arm component also includes a swing arm connecting rod, a cantilever, a swing arm module adapter and a swing arm functional module connected in sequence; The lower end of the swing arm connecting rod is fixedly connected to the rotating shaft.

10. A single wafer processing device, characterized in that: It comprises the rotating lifting swing arm device according to any one of claims 1 to 9.

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