Pulse ion beam control system and method for shape modification of aspheric optical element

Abstract

The invention discloses a pulsed ion beam control system and method for shape modification of an aspheric optical element, and relates to the technical field of optical element manufacturing, temperature rise behaviors of scanning path points are predicted through simulation, temperature rise prediction data Tpk are output, a time interval is further adjusted based on the result, an optimized path control instruction set Opt is generated, and the path control instruction set Opt is used for shape modification of the aspheric optical element. In the actual shaping process, temperature rise deviation data Dev are obtained by dynamically comparing a real-time temperature rise response value Trl with the temperature rise prediction data Tpk, a thermal feedback deviation set DevSet is formed, the closed-loop verification and thermal control correction capacity of prediction and actual machining behaviors is achieved, the shaping residual image Res formed on the basis of secondary surface shape detection, and the thermal feedback deviation set DevSet is formed on the basis of secondary surface shape detection. According to the method, quantitative judgment on the modification effect is realized, and the technical problems that the thermal coupling cumulative effect is not considered, the thermal abnormal region cannot be dynamically identified and the scanning path cannot be fused with the thermal structure sensitivity in the prior art are effectively solved.

Description

Technical Field

[0001] The present invention relates to the technical field of optical element manufacturing, and in particular to a pulsed ion beam control system and method for shaping aspheric optical elements. Background Art

[0002] With the widespread application of optical systems in cutting-edge technology fields such as aerospace, astronomical observation, and laser communications, the manufacturing precision requirements for optical components are constantly increasing. In particular, in these systems, the transmission quality of the optical wavefront directly determines the imaging performance and signal processing capabilities of the overall system. Therefore, extremely stringent standards are placed on the control of the surface morphology of optical components. In this broad field of optical manufacturing, aspheric optical components are widely used in high-precision fields such as space telescopes and large-aperture infrared optical systems because they can effectively eliminate spherical aberration, improve system compactness and imaging quality. Compared with traditional spherical components, aspheric surfaces have more complex morphological features, are more difficult to manufacture, and are more sensitive to error correction, which places higher demands on the manufacturing process.

[0003] During the pulsed ion beam shaping process of aspheric components, due to the uneven distribution of the shaping area, drastic changes in curvature, and the local high-frequency characteristics of the error, it is usually necessary to perform multiple ion beam scanning and superposition in a small area, which is the so-called "local pulse stacking processing". However, most of the existing process methods scan in an equal path or fixed order, without considering the thermal coupling effect of adjacent pulses in the time and space dimensions. Since the high-energy ion beam released by each pulse will cause local energy deposition on the material at the microscopic level, even if the surface of the material does not heat up significantly, the heat accumulation effect in the micro-area cannot be ignored under the stacking of continuous pulses. The existing control strategy does not predict or adjust the evolution of the thermal field in this micro-area, resulting in the inability to fully diffuse the thermal field in certain areas during repeated irradiation, causing the emergence of "thermal hysteresis zones" or "thermal peak overlap zones".

[0004] Furthermore, the fixed scanning path results in uneven thermal field distribution during the modification process. Some areas experience elevated temperatures due to continuous processing, while others experience thermal imbalance due to the long scanning intervals. This unevenness can lead to inconsistent microstructural responses, affecting removal uniformity and even causing surface substructure disturbances. Summary of the Invention

[0005] In view of the deficiencies in the prior art, the present invention provides a pulsed ion beam control system and method for modifying aspheric optical elements, which solves the problems mentioned in the background art.

[0006] To achieve the above objectives, the present invention is implemented through the following technical solutions: A pulsed ion beam control method for modifying aspheric optical elements, comprising the following steps: S1. Performing surface shape detection on the aspheric optical element, collecting the initial surface shape error map Err and the target curvature response map Cur, and combining them to form the error and curvature feature set ErrSet; S2. Based on the error and curvature feature set ErrSet, combined with the pulsed ion beam input power parameter and the thermal diffusion characteristics of the optical element material, a heat conduction response model is established to predict the heat accumulation trend graph Tmp and the thermal response sensitive area graph Hot during the scanning process, and generate a thermal sensitive feature set HotSet; S3. Combining the curvature information in the thermal sensitive feature set HotSet and the error and curvature feature set ErrSet, constructing a regional thermal-geometric superposition priority score map Seq, and generating a scanning path control vector sequence Vec, which are combined to form a scanning planning feature set SeqSet; S4. Based on the scan planning feature set SeqSet, input to a thermal simulation module, predict the temperature rise peak value of the path points and optimize the interval adjustment, and output the path control instruction set Opt and the temperature rise prediction data Tpk to form the optimized control feature set OptSet; S5. Perform pulsed ion beam shaping operations according to the optimized control feature set OptSet, and simultaneously collect the real-time temperature rise response value Tr1 of each path point, compare and analyze it with the predicted temperature rise data Tpk, obtain temperature rise deviation data Dev, and combine them to form a thermal feedback deviation set DevSet; S6. Perform secondary surface shape detection on the aspheric optical element after modification, obtain the modified error map Epr, and compare it with the error map Err in the error and curvature feature set ErrSet to obtain the modified residual map Res, which is used to determine whether the surface shape convergence requirement is met.

[0007] Preferably, said S1 includes S11 and S12; S11. Scan the surface of the aspheric optical element to be modified using a phase-shift interferometer or other high-resolution surface detection equipment to obtain current real surface shape data of the aspheric optical element, compare the data with the theoretical target surface shape model of the aspheric surface point by point, calculate the height deviation of each point in space, and form a two-dimensional initial surface shape error map Err. The initial surface shape error map Err is used to identify the degree of local material removal required in each area. S12. Based on the surface parameter equation defined by the theoretical target surface shape model of the aspheric surface, perform local geometric structure analysis on different spatial positions of the aspheric optical element, calculate the curvature change rate at each position, and obtain a two-dimensional spatial curvature distribution reflecting the degree of local surface mutation. The two-dimensional spatial curvature distribution result is output in the form of an image, named as the target curvature response map Cur, which is used to indicate the geometric complexity and processing response sensitivity of each area on the surface of the aspheric optical element, and then integrate it with the initial surface shape error map Err to obtain the error and curvature feature set ErrSet.

[0008] Preferably, said S2 includes S21 and S22; S21. Based on the initial surface error map Err and the target curvature response map Cur contained in the error and curvature feature set ErrSet, combined with the input power parameter of the pulsed ion beam used for shaping, and the material thermal diffusion coefficient of the aspheric optical element, a two-dimensional heat conduction response model is constructed, and the instantaneous energy injection process generated by pulse scanning at each processing point is simulated by simulation. The diffusion behavior of thermal energy on the surface and near-surface area of ​​the aspheric optical element is calculated, and a heat accumulation trend map Tmp is accumulated in the time dimension to describe the local temperature rise evolution characteristics during the scanning process. S22. Based on the heat accumulation trend graph Tmp, a thermal stability threshold is set, and areas where the local temperature rise exceeds the threshold are identified in the heat accumulation trend graph Tmp. The identified high-temperature response areas are marked in the spatial dimension to form a thermal response sensitive area graph Hot, which is used to divide the thermal safety zone and the thermal coupling risk zone. The heat accumulation trend graph Tmp is combined with the thermal response sensitive area graph Hot to form a unified output result, which is named as a thermal sensitive feature set HotSet.

[0009] Preferably, said S3 includes S31 and S32; S31. Based on the thermal response sensitive area map Hot in the thermal sensitive feature set HotSet and the target curvature response map Cur in the error and curvature feature set ErrSet, a fusion analysis is performed on the surface area of ​​the aspheric optical element. The thermal response sensitivity and the degree of geometric structure mutation of the high temperature response area are comprehensively considered, and a processing priority score is assigned to each high temperature response area through a weighted combination method to form a spatially distributed regional thermal-geometric superposition priority score map Seq. S32. Based on the constructed regional thermal-geometric superposition priority score map Seq, all scanning coordinate points in the high-temperature response area marked by the thermal response sensitive area map Hot in the aspheric optical element are sorted in descending order of score values, the spatial position of each scanning coordinate point and its corresponding initial scanning time are determined, and a structured path vector sequence is generated, named as a scanning path control vector sequence Vec. The scanning path control vector sequence Vec is combined with the regional thermal-geometric superposition priority score map Seq to form a unified output set, named as a scanning planning feature set SeqSet.

[0010] Preferably, said S4 includes S41 and S42; S41. Based on the scanning path control vector sequence Vec in the scanning planning feature set SeqSet, the scanning coordinate points and their initial scanning time in each vector are input into the thermal response simulation module. Combined with the material thermal diffusion characteristics of the aspheric optical element and the pulsed ion beam input power parameters, the peak temperature rise of each scanning coordinate point during the scanning process is calculated, and the temperature rise prediction result is output, which is named temperature rise prediction data Tpk.

[0011] Preferably, S42, according to the temperature rise prediction data Tpk, the initial time of each scanning coordinate point in the scanning path control vector sequence Vec is adjusted, and for the scanning coordinate points where the temperature rise peak exceeds the preset safety threshold, the scanning interval time is dynamically increased; for the coordinate points with safe temperature rise, the original rhythm is maintained, and the adjusted time data is combined with the original spatial coordinates to generate an optimized path instruction, named as the path control instruction set Opt, and the path control instruction set Opt is combined with the temperature rise prediction data Tpk to form a unified output set, named as the optimized control feature set OptSet.

[0012] Preferably, said S5 includes S51 and S52; S51. According to the path control instruction set Opt contained in the optimization control feature set OptSet, the pulsed ion beam device is controlled to perform the shaping operation of the aspheric optical element according to the specified scanning path and scanning time sequence. During the shaping process, for each scanning coordinate point from the scanning path control vector sequence Vec, the real-time temperature response is collected through non-contact thermal field sensing means, and the actual temperature rise data of each coordinate point during the processing process is output, which is named real-time thermal response data Trl.

[0013] Preferably, S52, the real-time thermal response data Trl is compared with the temperature rise prediction data Tpk one by one according to the coordinate points, the prediction error is calculated, and a data set representing the degree of prediction deviation is generated, which is named temperature rise deviation data Dev. The real-time thermal response data Trl and the temperature rise deviation data Dev are combined to form a unified output set, which is named thermal feedback deviation set DevSet, and is used for feedback evaluation of simulation accuracy and thermal stability of the processing process.

[0014] Preferably, said S6 includes S61 and S62; S61. Perform a second surface test on the aspheric optical element after the pulsed ion beam modification using a phase-shift interferometer or other high-resolution surface detection equipment to obtain current actual surface data, and compare the actual surface data with the aspheric theoretical target surface model to form a modified error map Epr. Perform a point-by-point difference comparison between the modified error map Epr and the initial surface error map Err, and output a two-dimensional image representing the amount of surface error change, which is named a modified residual map Res. S62, analyzing the modified residual image Res, and comparing the error residual values ​​of all scanning coordinate points in the modified residual image Res, which are located in the high temperature response area marked by the thermal response sensitive area map Hot, with the set surface error convergence threshold point by point; When the error residual values ​​of all scanning coordinate points are less than the surface error convergence threshold, it is determined that the correction process meets the error convergence requirement; When the error residual value of any scanning coordinate point exceeds the surface error convergence threshold, it is determined that the error has not fully converged, and the next round of reshaping process is automatically triggered. The reshaping residual map Res is used as the new input error map to replace the original initial surface error map. The original target curvature response map Cur and the thermal response sensitive area map Hot are used in combination to regenerate the updated error and curvature feature set ErrSet.

[0015] A pulsed ion beam control system for shaping aspheric optical elements, comprising an element detection module, a thermal conduction response model construction module, a region scoring and marking module, a thermal simulation module, a shaping operation module, and a secondary shape inspection and optimization module; The component detection module performs surface shape detection on the aspheric optical component, collects the initial surface shape error map Err and the target curvature response map Cur, and combines them to form an error and curvature feature set ErrSet; The heat conduction response model building module establishes a heat conduction response model based on the error and curvature feature set ErrSet, combined with the pulsed ion beam input power parameter and the thermal diffusion characteristics of the optical element material, predicts the heat accumulation trend graph Tmp and the thermal response sensitive area graph Hot during the scanning process, and generates a thermal sensitive feature set HotSet; The regional scoring and marking module combines the curvature information in the thermal sensitive feature set HotSet and the error and curvature feature set ErrSet to construct a regional thermal-geometric superposition priority scoring map Seq, and generates a scanning path control vector sequence Vec, which are combined to form a scanning planning feature set SeqSet; The thermal simulation module predicts the temperature rise peak value of the path point and optimizes the interval adjustment based on the scan planning feature set SeqSet, and outputs the path control instruction set Opt and the temperature rise prediction data Tpk to form the optimization control feature set OptSet; The shaping operation module performs pulsed ion beam shaping operations according to the optimized control feature set OptSet, and simultaneously collects the real-time temperature rise response value Tr1 of each path point, and compares and analyzes it with the predicted temperature rise data Tpk to obtain temperature rise deviation data Dev, which are combined to form a thermal feedback deviation set DevSet; The secondary shape inspection and optimization module performs secondary surface shape inspection on the aspheric optical element after modification, obtains the error map Epr after modification, and compares it with the error map Err in the error and curvature feature set ErrSet to obtain the modified residual map Res, which is used to determine whether the surface shape convergence requirements are met.

[0016] The present invention provides a pulsed ion beam control system and method for modifying aspheric optical elements, which has the following beneficial effects: (1) The temperature rise behavior of the scanning path points is predicted by simulation, and the temperature rise prediction data Tpk is output. Based on the result, the time interval is further adjusted to generate the optimized path control instruction set Opt to control the thermal stacking behavior, thereby significantly suppressing the sub-surface stress accumulation phenomenon induced by micro-area thermal coupling. In the actual shaping process, the temperature rise deviation data Dev is obtained by dynamically comparing the real-time temperature rise response value Trl with the temperature rise prediction data Tpk, and a thermal feedback deviation set DevSet is formed, which realizes the closed-loop verification and thermal control correction capability of the prediction and actual processing behavior. Based on the shaping residual image Res formed by the secondary surface shape detection, the quantitative judgment of the shaping effect is realized, ensuring that the shaping termination judgment has the precision response capability for the thermal field abnormal area. The overall solution effectively solves the technical shortcomings of the existing technology that the thermal coupling cumulative effect is not considered, the thermal abnormal area cannot be dynamically identified, and the scanning path cannot integrate the thermal structure sensitivity, and greatly improves the stability, accuracy and process adaptability of the shaping of aspheric optical elements.

[0017] (2) By fusing the thermal response sensitive area map Hot in the thermal sensitive feature set HotSet and the target curvature response map Cur in the error and curvature feature set ErrSet, a regional thermal-geometric superposition priority score map Seq is formed through weighted calculation, which accurately expresses the comprehensive processing sensitivity of each region in the spatial dimension; then, combined with the score sorting results, a scanning path control vector sequence Vec containing coordinate position and initial time is generated, and the peak temperature rise of each scanning coordinate point is calculated to form the temperature rise prediction data Tpk; further, according to the temporal fluctuation characteristics of the temperature rise prediction data Tpk, the scanning time rhythm of the high-risk thermal point is dynamically adjusted, and a path control instruction set Opt with time-space adaptability is output, so as to realize the time avoidance and order regularization of the high-temperature coupling point in advance in the path planning stage, effectively avoid the risk of structural distortion caused by local heat focusing and accumulation, and significantly improve the thermal field uniformity and control foresight during the shaping process of aspheric optical elements.

[0018] (3) Pulsed ion beam shaping is performed on the aspheric optical element, and the temperature response value of each coordinate point from the scanning path control vector sequence Vec is collected in real time using thermal field sensing technology. The real-time thermal response data Trl is output to verify the accuracy of the simulation model and perceive the potential thermal stability anomalies in the processing process. The aspheric optical element after shaping is subjected to a second surface shape detection, and the error map after shaping Epr is output. It is compared point by point with the initial surface shape error map Err to form a shaping residual map Res, and a judgment result is generated. If the error convergence standard is met, the error map after shaping Epr is archived for detection verification and subsequent process data accumulation; if not, the next round of shaping is automatically triggered to form a closed-loop iterative process. This method significantly enhances the data-driven capability and abnormal response capability in the shaping process, realizes the dynamic coordinated judgment of the thermal behavior and error response of the processing process, and constructs an iterative, terminable, and evolvable intelligent shaping mechanism through the error tracking control model, overcoming the problems of lack of feedback, weak precision convergence control, and unquantifiable shaping effect in the existing technology. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 This is a flow chart of a pulsed ion beam control method for modifying aspheric optical elements according to the present invention; Figure 2 The figure is a schematic diagram of the steps of a pulsed ion beam control system for modifying aspheric optical elements according to the present invention. DETAILED DESCRIPTION

[0020] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention. Example 1

[0021] The present invention provides a pulsed ion beam control method for modifying aspheric optical elements. Figure 1 , including the following steps: S1. Performing surface shape detection on the aspheric optical element, collecting the initial surface shape error map Err and the target curvature response map Cur, and combining them to form the error and curvature feature set ErrSet; S2. Based on the error and curvature feature set ErrSet, combined with the pulsed ion beam input power parameter and the thermal diffusion characteristics of the optical element material, a heat conduction response model is established to predict the heat accumulation trend graph Tmp and the thermal response sensitive area graph Hot during the scanning process, and generate a thermal sensitive feature set HotSet; S3. Combining the curvature information in the thermal sensitive feature set HotSet and the error and curvature feature set ErrSet, constructing a regional thermal-geometric superposition priority score map Seq, and generating a scanning path control vector sequence Vec, which are combined to form a scanning planning feature set SeqSet; S4. Based on the scan planning feature set SeqSet, input to a thermal simulation module, predict the temperature rise peak value of the path points and optimize the interval adjustment, and output the path control instruction set Opt and the temperature rise prediction data Tpk to form the optimized control feature set OptSet; S5. Perform pulsed ion beam shaping operations according to the optimized control feature set OptSet, and simultaneously collect the real-time temperature rise response value Tr1 of each path point, compare and analyze it with the predicted temperature rise data Tpk, obtain temperature rise deviation data Dev, and combine them to form a thermal feedback deviation set DevSet; S6. Perform secondary surface shape detection on the aspheric optical element after modification, obtain the modified error map Epr, and compare it with the error map Err in the error and curvature feature set ErrSet to obtain the modified residual map Res, which is used to determine whether the surface shape convergence requirement is met.

[0022] In this embodiment, through the structured description of the surface error and geometric complexity of the aspheric optical element, the heat accumulation trend map Tmp and the thermal response sensitive area map Hot generated by the thermal conduction response modeling are incorporated for the first time before the shaping path planning, so that the scanning path formulation can dynamically adjust the scanning order based on the regional thermal-geometric superposition priority score map Seq. At the same time, the temperature rise behavior of the scanning path points is predicted by simulation, and the temperature rise prediction data Tpk is output. Based on the result, the time interval is further adjusted to generate an optimized path control instruction set Opt to control the thermal stacking behavior, thereby significantly suppressing the sub-surface stress accumulation phenomenon induced by micro-area thermal coupling. In the actual shaping process, the temperature rise deviation data Dev is obtained by dynamically comparing the real-time temperature rise response value Trl with the temperature rise prediction data Tpk, and a thermal feedback deviation set DevSet is formed, thereby realizing closed-loop verification and thermal control correction capabilities of the predicted and actual processing behaviors. Finally, this method realizes the quantitative judgment of the shaping effect based on the shaping residual image Res formed by the secondary surface detection, ensuring that the shaping termination judgment has the ability to respond accurately to the thermal field anomaly area. The overall solution effectively solves the technical shortcomings of the existing technology that does not consider the cumulative effect of thermal coupling, cannot dynamically identify thermal anomaly areas, and the scanning path cannot integrate thermal structure sensitivity, greatly improving the stability, accuracy and process adaptability of the shaping of aspheric optical elements. Example 2

[0023] This embodiment is explained in Example 1, please refer to Figure 1 , specifically: said S1 includes S11 and S12; S11. Scan the surface of the aspheric optical element to be modified using a phase-shift interferometer or other high-resolution surface detection equipment to obtain current real surface shape data of the aspheric optical element, compare the data with the theoretical target surface shape model of the aspheric surface point by point, calculate the height deviation of each point in space, and form a two-dimensional initial surface shape error map Err. The initial surface shape error map Err is used to identify the degree of local material removal required in each area. S12. Based on the surface parameter equation defined by the theoretical target surface shape model of the aspheric surface, perform local geometric structure analysis on different spatial positions of the aspheric optical element, calculate the curvature change rate at each position, and obtain a two-dimensional spatial curvature distribution reflecting the degree of local surface mutation. The two-dimensional spatial curvature distribution result is output in the form of an image, named as the target curvature response map Cur, which is used to indicate the geometric complexity and processing response sensitivity of each area on the surface of the aspheric optical element, and then integrate it with the initial surface shape error map Err to obtain the error and curvature feature set ErrSet.

[0024] Said S2 includes S21 and S22; S21. Based on the initial surface error map Err and the target curvature response map Cur contained in the error and curvature feature set ErrSet, combined with the input power parameter of the pulsed ion beam used for shaping, and the material thermal diffusion coefficient of the aspheric optical element, a two-dimensional heat conduction response model is constructed, and the instantaneous energy injection process generated by pulse scanning at each processing point is simulated by simulation. The diffusion behavior of thermal energy on the surface and near-surface area of ​​the aspheric optical element is calculated, and a heat accumulation trend map Tmp is accumulated in the time dimension to describe the local temperature rise evolution characteristics during the scanning process. S22. Based on the heat accumulation trend graph Tmp, a thermal stability threshold is set, and areas where the local temperature rise exceeds the threshold are identified in the heat accumulation trend graph Tmp. The identified high-temperature response areas are marked in the spatial dimension to form a thermal response sensitive area graph Hot, which is used to divide the thermal safety zone and the thermal coupling risk zone. The heat accumulation trend graph Tmp is combined with the thermal response sensitive area graph Hot to form a unified output result, which is named as a thermal sensitive feature set HotSet.

[0025] In this embodiment, by jointly modeling the surface error state and thermal response characteristics of aspheric optical elements, the pre-reshaping stage has the ability to recognize structural and regional processing sensitivity. The constructed initial surface error map Err accurately depicts the required distribution of removal in each area through point-by-point height deviation calculation, and the target curvature response map Cur constructed based on the aspheric theoretical target surface model reveals the degree of local geometric mutation and response sensitivity. The error and curvature feature set ErrSet after the integration of the two provides a structural priori basis for subsequent simulation and path planning. Furthermore, by integrating the error Combined with the curvature feature set ErrSet, the input power parameters of the pulsed ion beam, and the thermal diffusion coefficient of the aspheric optical element material, a two-dimensional thermal conduction response simulation model was established. This effectively simulates the thermal diffusion and temporal accumulation behavior after energy injection, outputting a quantifiable heat accumulation trend map Tmp. Based on this result, a thermal stability threshold is set, local high-temperature risk areas are identified, and a thermal response sensitive area map Hot is generated. The combination of the two constitutes the thermally sensitive feature set HotSet, which enables the proactive identification of processing risks in the two dimensions of "structural complexity" and "thermal response complexity" during the shaping preparation stage. Overall, this method significantly improves the parameter perception depth and multi-physics field prediction capabilities in the early stages of aspheric optical element processing, making subsequent path planning and thermal control not only dependent on the error size, but also equipped with a structural screening and response suppression pre-position mechanism based on thermal evolution trends, effectively avoiding the one-sided control problem of "decoupling path setting from thermal behavior" in previous solutions. Example 3

[0026] This embodiment is explained in Example 1, please refer to Figure 1 , specifically: said S3 includes S31 and S32; S31. Based on the thermal response sensitive area map Hot in the thermal sensitive feature set HotSet and the target curvature response map Cur in the error and curvature feature set ErrSet, a fusion analysis is performed on the surface area of ​​the aspheric optical element. The thermal response sensitivity and the degree of geometric structure mutation of the high temperature response area are comprehensively considered, and a processing priority score is assigned to each high temperature response area through a weighted combination method to form a spatially distributed regional thermal-geometric superposition priority score map Seq, which is used for the subsequent sequencing of scanning paths and the arrangement of processing control rhythm. S32. Based on the constructed regional thermal-geometric superposition priority score map Seq, all scanning coordinate points in the high-temperature response area marked by the thermal response sensitive area map Hot in the aspheric optical element are sorted in descending order of score values, the spatial position of each scanning coordinate point and its corresponding initial scanning time are determined, and a structured path vector sequence is generated, named as a scanning path control vector sequence Vec. The scanning path control vector sequence Vec is combined with the regional thermal-geometric superposition priority score map Seq to form a unified output set, named as a scanning planning feature set SeqSet.

[0027] Said S4 includes S41 and S42; S41. Based on the scanning path control vector sequence Vec in the scanning planning feature set SeqSet, the scanning coordinate points and their initial scanning time in each vector are input into the thermal response simulation module. Combined with the material thermal diffusion characteristics of the aspheric optical element and the pulsed ion beam input power parameters, the peak temperature rise of each scanning coordinate point during the scanning process is calculated, and the temperature rise prediction result is output, which is named temperature rise prediction data Tpk.

[0028] S42. According to the temperature rise prediction data Tpk, the initial time of each scanning coordinate point in the scanning path control vector sequence Vec is adjusted. For the scanning coordinate points where the temperature rise peak exceeds the preset safety threshold, the scanning interval time is dynamically increased; for the coordinate points with safe temperature rise, the original rhythm is maintained, and the adjusted time data is combined with the original spatial coordinates to generate an optimized path instruction, named as the path control instruction set Opt. The path control instruction set Opt is combined with the temperature rise prediction data Tpk to form a unified output set, named as the optimized control feature set OptSet.

[0029] In this embodiment, the thermal structure sensitivity of aspheric optical elements is introduced into the integrated linkage design of processing path construction and dynamic time control process, so as to establish a scanning path adaptive optimization mechanism under the triple constraints of "thermal-geometric-time". First, the thermal response sensitive area map Hot in the thermal sensitive feature set HotSet and the target curvature response map Cur in the error and curvature feature set ErrSet are integrated, and the regional thermal-geometric superposition priority score map Seq is formed by weighted calculation to accurately express the comprehensive processing sensitivity of each region in the spatial dimension; then, combined with the score sorting results, a scanning path control vector sequence Vec containing coordinate position and initial time is generated, and combined with the score map to construct a scanning planning feature set SeqSet. On this basis, the path control vector information is input into the thermal response simulation module, and combined with the material The thermal diffusion and energy input parameters of the material are used to calculate the peak temperature rise of each scanning coordinate point to form the temperature rise prediction data Tpk; further, according to the time series fluctuation characteristics of the temperature rise prediction data Tpk, the scanning time rhythm of the high-risk thermal points is dynamically adjusted, and a path control instruction set Opt with time-space adaptability is output, which is combined with the temperature rise prediction data Tpk to form an optimization control feature set OptSet. This integrated method breaks through the defects of separation of path construction and thermal simulation, and decoupling of processing rhythm and thermal stacking in traditional processing, so that the scanning path not only considers the geometric morphology, but also actively responds to the changing trend of the thermal sensitive area, thereby realizing the time avoidance and order regularization of the high-temperature coupling points in advance in the path planning stage, effectively avoiding the risk of structural distortion caused by local heat focusing and accumulation, and significantly improving the thermal field uniformity and regulation foresight in the shaping process of aspheric optical elements. Example 4

[0030] This embodiment is explained in Example 1, please refer to Figure 1 Specifically: S5 includes S51 and S52; S51. According to the path control instruction set Opt contained in the optimization control feature set OptSet, the pulsed ion beam device is controlled to perform the shaping operation of the aspheric optical element according to the specified scanning path and scanning time sequence. During the shaping process, for each scanning coordinate point from the scanning path control vector sequence Vec, the real-time temperature response is collected through non-contact thermal field sensing means, such as infrared temperature measurement and thermal radiation imaging, and the actual temperature rise data of each coordinate point during the processing process is output, which is named real-time thermal response data Trl.

[0031] S52. Compare the real-time thermal response data Trl with the temperature rise prediction data Tpk one by one according to the coordinate points, calculate the prediction error, and generate a data set representing the degree of prediction deviation, named temperature rise deviation data Dev. Combine the real-time thermal response data Trl and the temperature rise deviation data Dev to form a unified output set, named thermal feedback deviation set DevSet, which is used for feedback evaluation of simulation accuracy and thermal stability of the processing process.

[0032] Said S6 includes S61 and S62; S61. Perform a second surface test on the aspheric optical element after the pulsed ion beam modification using a phase-shift interferometer or other high-resolution surface detection equipment to obtain current actual surface data, and compare the actual surface data with the aspheric theoretical target surface model to form a modified error map Epr. Perform a point-by-point difference comparison between the modified error map Epr and the initial surface error map Err, and output a two-dimensional image representing the amount of surface error change, which is named a modified residual map Res. S62, analyzing the modified residual image Res, and comparing the error residual values ​​of all scanning coordinate points in the modified residual image Res, which are located in the high temperature response area marked by the thermal response sensitive area map Hot, with the set surface error convergence threshold point by point; When the error residual values ​​of all scanned coordinate points are less than the surface error convergence threshold, it is determined that the correction process has met the error convergence requirement, and the error map Epr after correction is archived and saved for product testing and verification, and used for processing strategy recommendation or machine learning modeling of the next similar aspheric optical component; When the error residual value of any scanning coordinate point exceeds the surface error convergence threshold, it is determined that the error has not fully converged, and the next round of reshaping process is automatically triggered. The reshaping residual map Res is used as a new input error map to replace the original initial surface error map. The original target curvature response map Cur and the thermal response sensitive area map Hot are used together to regenerate the updated error and curvature feature set ErrSet, and return to step S2 for the next round of thermal response identification and path planning.

[0033] In this embodiment, a dynamic monitoring of thermal response and a multi-round adaptive correction mechanism for surface errors in the pulsed ion beam shaping process are implemented, and a closed-loop processing model integrating simulation verification, real-time feedback and intelligent iterative control is constructed. Specifically, by executing the path control instruction set Opt contained in the optimization control feature set OptSet, the aspheric optical element is subjected to pulsed ion beam shaping, and the thermal field sensing technology is used to collect the temperature response value of each coordinate point from the scanning path control vector sequence Vec in real time, and output the real-time thermal response data Trl; then, it is compared point by point with the temperature rise prediction data Tpk generated by the simulation, and the deviation value is calculated to form the temperature rise deviation data Dev. The two are combined to output the thermal feedback deviation set DevSet, which is used to verify the accuracy of the simulation model and perceive potential thermal stability anomalies in the processing process, and to complete the shaping. The aspheric optical element after shaping is subjected to a second surface shape detection, and the error map Epr after shaping is output. It is compared point by point with the initial surface shape error map Err to form a shaping residual map Res. The system judges the error residual value and the set convergence threshold based on all scanning coordinate points in the high-temperature response area marked by the thermal response sensitive area map Hot in the shaping residual map Res, and generates a judgment result. If the error convergence standard is met, the error map Epr after shaping is archived for detection verification and subsequent process data accumulation; if not, the next round of shaping is automatically triggered, and the shaping residual map Res is used as the new input error map. The target curvature response map Cur and the thermal response sensitive area map Hot are used in combination to reconstruct the updated error and curvature feature set ErrSet and return to step S2 to form a closed-loop iterative process. This method significantly enhances the data-driven capability and abnormal response capability in the shaping process, realizes the dynamic collaborative judgment of the thermal behavior and error response of the machining process, and constructs an iterative, terminable and evolvable intelligent shaping mechanism through the error tracking control model, overcoming the problems of lack of feedback, weak precision convergence control and unquantifiable shaping effect in existing technologies. Example 5

[0034] A pulsed ion beam control system for shaping aspheric optical elements, please refer to Figure 2 Specifically, it includes component detection module, heat conduction response model construction module, area scoring and marking module, thermal simulation module, shape correction operation module and secondary shape inspection optimization module; The component detection module performs surface shape detection on the aspheric optical component, collects the initial surface shape error map Err and the target curvature response map Cur, and combines them to form an error and curvature feature set ErrSet; The heat conduction response model construction module establishes a heat conduction response model based on the error and curvature feature set ErrSet, in combination with the input power parameter of the pulsed ion beam and the thermal diffusion characteristics of the optical element material, predicts a heat accumulation trend graph Tmp and a heat response sensitive area graph Hot in the scanning process, and generates a heat sensitive feature set HotSet; The region score marking module combines the heat sensitive feature set HotSet and the curvature information in the error and curvature feature set ErrSet, constructs a region heat-geometry superposition priority score graph Seq, and generates a scanning path control vector sequence Vec, which are combined to form a scanning planning feature set SeqSet; The heat simulation module inputs the scanning planning feature set SeqSet into the heat simulation module, predicts and optimizes the temperature rise peak value of the path point and the interval, outputs a path control instruction set Opt and a temperature rise prediction data Tpk, and constitutes an optimized control feature set OptSet; The reshaping operation module performs pulsed ion beam reshaping operation according to the optimized control feature set OptSet, simultaneously collects real-time temperature rise response values Trl of each path point, and compares and analyzes the real-time temperature rise response values Trl with the predicted temperature rise data Tpk to obtain temperature rise deviation data Dev, which are combined to form a heat feedback deviation set DevSet; The secondary surface shape detection optimization module performs secondary surface shape detection on the aspheric optical element after reshaping, obtains a reshaped error graph Epr, and compares the reshaped error graph Epr with the error graph Err in the error and curvature feature set ErrSet to obtain a reshaping residual error graph Res, which is used to determine whether the surface shape convergence requirement is met.

[0035] Although the embodiments of the present application have been shown and described, it can be understood by those skilled in the art that various changes, modifications, replacements and modifications can be made to the embodiments without departing from the principles and spirits of the present application, and the scope of the present application is defined by the appended claims and their equivalents.

Claims

1. A pulsed ion beam control method for modifying aspheric optical elements, characterized by: The following steps are involved: S1. Performing surface shape detection on the aspheric optical element, collecting the initial surface shape error map Err and the target curvature response map Cur, and combining them to form the error and curvature feature set ErrSet; S2. Based on the error and curvature feature set ErrSet, combined with the pulsed ion beam input power parameter and the thermal diffusion characteristics of the optical element material, a heat conduction response model is established to predict the heat accumulation trend graph Tmp and the thermal response sensitive area graph Hot during the scanning process, and generate a thermal sensitive feature set HotSet; S3. Combining the curvature information in the thermal sensitive feature set HotSet and the error and curvature feature set ErrSet, constructing a regional thermal-geometric superposition priority score map Seq, and generating a scanning path control vector sequence Vec, which are combined to form a scanning planning feature set SeqSet; S4. Based on the scan planning feature set SeqSet, input to a thermal simulation module, predict the temperature rise peak value of the path points and optimize the interval adjustment, and output the path control instruction set Opt and the temperature rise prediction data Tpk to form the optimized control feature set OptSet; S5. Perform pulsed ion beam shaping operations according to the optimized control feature set OptSet, and simultaneously collect the real-time temperature rise response value Tr1 of each path point, compare and analyze it with the predicted temperature rise data Tpk, obtain temperature rise deviation data Dev, and combine them to form a thermal feedback deviation set DevSet; S6. Perform secondary surface shape detection on the aspheric optical element after modification, obtain the modified error map Epr, and compare it with the error map Err in the error and curvature feature set ErrSet to obtain the modified residual map Res, which is used to determine whether the surface shape convergence requirement is met.

2. The pulsed ion beam control method for modifying aspheric optical elements according to claim 1, characterized in that: Said S1 includes S11 and S12; S11. Scan the surface of the aspheric optical element to be modified using a phase-shift interferometer or other high-resolution surface detection equipment to obtain current real surface shape data of the aspheric optical element, compare the data with the theoretical target surface shape model of the aspheric surface point by point, calculate the height deviation of each point in space, and form a two-dimensional initial surface shape error map Err. The initial surface shape error map Err is used to identify the degree of local material removal required in each area. S12. Based on the surface parameter equation defined by the theoretical target surface shape model of the aspheric surface, perform local geometric structure analysis on different spatial positions of the aspheric optical element, calculate the curvature change rate at each position, and obtain a two-dimensional spatial curvature distribution reflecting the degree of local surface mutation. The two-dimensional spatial curvature distribution result is output in the form of an image, named as the target curvature response map Cur, which is used to indicate the geometric complexity and processing response sensitivity of each area on the surface of the aspheric optical element, and then integrate it with the initial surface shape error map Err to obtain the error and curvature feature set ErrSet.

3. The pulsed ion beam control method for modifying aspheric optical elements according to claim 2, characterized in that: Said S2 includes S21 and S22; S21. Based on the initial surface error map Err and the target curvature response map Cur contained in the error and curvature feature set ErrSet, combined with the input power parameter of the pulsed ion beam used for shaping, and the material thermal diffusion coefficient of the aspheric optical element, a two-dimensional heat conduction response model is constructed, and the instantaneous energy injection process generated by pulse scanning at each processing point is simulated by simulation. The diffusion behavior of thermal energy on the surface and near-surface area of ​​the aspheric optical element is calculated, and a heat accumulation trend map Tmp is accumulated in the time dimension to describe the local temperature rise evolution characteristics during the scanning process. S22. Based on the heat accumulation trend graph Tmp, a thermal stability threshold is set, and areas where the local temperature rise exceeds the threshold are identified in the heat accumulation trend graph Tmp. The identified high-temperature response areas are marked in the spatial dimension to form a thermal response sensitive area graph Hot, which is used to divide the thermal safety zone and the thermal coupling risk zone. The heat accumulation trend graph Tmp is combined with the thermal response sensitive area graph Hot to form a unified output result, which is named as a thermal sensitive feature set HotSet.

4. The pulsed ion beam control method for modifying aspheric optical elements according to claim 3, characterized in that: Said S3 includes S31 and S32; S31. Based on the thermal response sensitive area map Hot in the thermal sensitive feature set HotSet and the target curvature response map Cur in the error and curvature feature set ErrSet, a fusion analysis is performed on the surface area of ​​the aspheric optical element. The thermal response sensitivity and the degree of geometric structure mutation of the high temperature response area are comprehensively considered, and a processing priority score is assigned to each high temperature response area through a weighted combination method to form a spatially distributed regional thermal-geometric superposition priority score map Seq. S32. Based on the constructed regional thermal-geometric superposition priority score map Seq, all scanning coordinate points in the high-temperature response area marked by the thermal response sensitive area map Hot in the aspheric optical element are sorted in descending order of score values, the spatial position of each scanning coordinate point and its corresponding initial scanning time are determined, and a structured path vector sequence is generated, named as a scanning path control vector sequence Vec. The scanning path control vector sequence Vec is combined with the regional thermal-geometric superposition priority score map Seq to form a unified output set, named as a scanning planning feature set SeqSet.

5. The pulsed ion beam control method for modifying aspheric optical elements according to claim 4, characterized in that: Said S4 includes S41 and S42; S41. Based on the scanning path control vector sequence Vec in the scanning planning feature set SeqSet, the scanning coordinate points and their initial scanning time in each vector are input into the thermal response simulation module. Combined with the material thermal diffusion characteristics of the aspheric optical element and the pulsed ion beam input power parameters, the peak temperature rise of each scanning coordinate point during the scanning process is calculated, and the temperature rise prediction result is output, which is named temperature rise prediction data Tpk.

6. The pulsed ion beam control method for modifying aspheric optical elements according to claim 5, characterized in that: S42. According to the temperature rise prediction data Tpk, the initial time of each scanning coordinate point in the scanning path control vector sequence Vec is adjusted. For the scanning coordinate points where the temperature rise peak exceeds the preset safety threshold, the scanning interval time is dynamically increased; for the coordinate points with safe temperature rise, the original rhythm is maintained, and the adjusted time data is combined with the original spatial coordinates to generate an optimized path instruction, named as the path control instruction set Opt. The path control instruction set Opt is combined with the temperature rise prediction data Tpk to form a unified output set, named as the optimized control feature set OptSet.

7. The pulsed ion beam control method for modifying aspheric optical elements according to claim 6, characterized in that: Said S5 includes S51 and S52; S51. According to the path control instruction set Opt contained in the optimization control feature set OptSet, the pulsed ion beam device is controlled to perform the shaping operation of the aspheric optical element according to the specified scanning path and scanning time sequence. During the shaping process, for each scanning coordinate point from the scanning path control vector sequence Vec, the real-time temperature response is collected through non-contact thermal field sensing means, and the actual temperature rise data of each coordinate point during the processing process is output, which is named real-time thermal response data Trl.

8. The pulsed ion beam control method for modifying aspheric optical elements according to claim 7, characterized in that: S52. Compare the real-time thermal response data Trl with the temperature rise prediction data Tpk one by one according to the coordinate points, calculate the prediction error, and generate a data set representing the degree of prediction deviation, named temperature rise deviation data Dev. Combine the real-time thermal response data Trl and the temperature rise deviation data Dev to form a unified output set, named thermal feedback deviation set DevSet, which is used for feedback evaluation of simulation accuracy and thermal stability of the processing process.

9. The pulsed ion beam control method for modifying aspheric optical elements according to claim 8, characterized in that: Said S6 includes S61 and S62; S61. Perform a second surface test on the aspheric optical element after the pulsed ion beam modification using a phase-shift interferometer or other high-resolution surface detection equipment to obtain current actual surface data, and compare the actual surface data with the aspheric theoretical target surface model to form a modified error map Epr. Perform a point-by-point difference comparison between the modified error map Epr and the initial surface error map Err, and output a two-dimensional image representing the amount of surface error change, which is named a modified residual map Res. S62, analyzing the modified residual image Res, and comparing the error residual values ​​of all scanning coordinate points in the modified residual image Res, which are located in the high temperature response area marked by the thermal response sensitive area map Hot, with the set surface error convergence threshold point by point; When the error residual values ​​of all scanning coordinate points are less than the surface error convergence threshold, it is determined that the correction process meets the error convergence requirement; When the error residual value of any scanning coordinate point exceeds the surface error convergence threshold, it is determined that the error has not fully converged, and the next round of reshaping process is automatically triggered. The reshaping residual map Res is used as the new input error map to replace the original initial surface error map. The original target curvature response map Cur and the thermal response sensitive area map Hot are used in combination to regenerate the updated error and curvature feature set ErrSet.

10. A pulsed ion beam control system for aspheric optical element modification, used to implement the pulsed ion beam control method for aspheric optical element modification according to any one of claims 1 to 9, characterized in that: It includes component detection module, heat conduction response model construction module, area scoring and marking module, thermal simulation module, shape correction operation module and secondary shape inspection optimization module; The component detection module performs surface shape detection on the aspheric optical component, collects the initial surface shape error map Err and the target curvature response map Cur, and combines them to form an error and curvature feature set ErrSet; The heat conduction response model building module establishes a heat conduction response model based on the error and curvature feature set ErrSet, combined with the pulsed ion beam input power parameter and the thermal diffusion characteristics of the optical element material, predicts the heat accumulation trend graph Tmp and the thermal response sensitive area graph Hot during the scanning process, and generates a thermal sensitive feature set HotSet; The regional scoring and marking module combines the curvature information in the thermal sensitive feature set HotSet and the error and curvature feature set ErrSet to construct a regional thermal-geometric superposition priority scoring map Seq, and generates a scanning path control vector sequence Vec, which are combined to form a scanning planning feature set SeqSet; The thermal simulation module predicts the temperature rise peak value of the path point and optimizes the interval adjustment based on the scan planning feature set SeqSet, and outputs the path control instruction set Opt and the temperature rise prediction data Tpk to form the optimization control feature set OptSet; The shaping operation module performs pulsed ion beam shaping operations according to the optimized control feature set OptSet, and simultaneously collects the real-time temperature rise response value Tr1 of each path point, and compares and analyzes it with the predicted temperature rise data Tpk to obtain temperature rise deviation data Dev, which are combined to form a thermal feedback deviation set DevSet; The secondary shape inspection and optimization module performs secondary surface shape inspection on the aspheric optical element after modification, obtains the error map Epr after modification, and compares it with the error map Err in the error and curvature feature set ErrSet to obtain the modified residual map Res, which is used to determine whether the surface shape convergence requirements are met.

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