Macro-cell architecture for heat exchange in epitaxial growth processing apparatus

Abstract

An epitaxial growth process chamber is described having a component with a macro cell support structure configured with an interconnected solid support defining a fluid communication aperture. A component configured for use in an epitaxial growth processing chamber is also described, the component having a macro cell support structure configured with an interconnected solid support defining a fluid communication aperture. The component is a bottom plate, an exhaust cover, an injection ring, an injection cover, a lower reflector, an upper reflector, a lower heat shield, an upper heat shield, a conical reflector or a combination thereof. In some cases, the component may further include an inlet flow port. In some other cases, the component may further include an inlet flow port, an outlet flow port, and a fluid flow wall, and optionally a fluid flow baffle, and optionally a reflective surface.

Description

Technical Field

[0001] The embodiments described herein are generally related to equipment used in semiconductor manufacturing, and more specifically to substrate processing systems having a macrocell architecture for heat exchange. Background Technology

[0002] Semiconductor substrates are processed for various applications, including the fabrication of integrated devices and microdevices. During manufacturing, various parameters affect the functionality of small-sized features formed on the substrate. For example, the temperature uniformity of the substrate or the temperature of the processing chamber components can affect the chamber production yield.

[0003] In epitaxial growth chambers used to form integrated circuits on substrates, a set of quartz pads arranged between the substrate edge and the chamber wall provides a measure of thermal shielding for other chamber components. However, with advancements in semiconductor processing, improved temperature control is required. Summary of the Invention

[0004] An epitaxial growth processing chamber includes a component with a macrocell support structure configured with interconnecting solid supports defining fluid connection orifices. The component also has an inlet fluid flow port configured to provide fluid communication between the macrocell support structure and the outside of the epitaxial growth processing chamber. The component may be a substrate, an vent cap, an injection ring, an injection cap, a lower reflector, an upper reflector, a lower heat shield, an upper heat shield, a conical reflector, or a combination thereof.

[0005] A component configured for an epitaxial growth processing chamber has a macrocell support structure with interconnecting solid supports defining fluid communication orifices. The component also has an inlet fluid flow port configured to provide fluid communication between the macrocell support structure and the exterior of the component. The component may be a substrate, an vent cap, an injection ring, an injection cap, a lower reflector, an upper reflector, a lower heat shield, an upper heat shield, a conical reflector, or a combination thereof. Attached Figure Description

[0006] To gain a more detailed understanding of the features described herein, reference may be made to one or more embodiments for a more specific description of the disclosure, some of which are illustrated in the accompanying drawings. However, it should be noted that the drawings show only one or more of several embodiments; therefore, the one or more embodiments provided in the drawings should not be considered as limiting the interpretation of the widest possible scope of the description. Other effective embodiments described in the implementation can be considered as part of the contemplated scope of the description.

[0007] Figure 1A schematic drawing of a cross-sectional side view of an epitaxial growth processing chamber according to one or more embodiments.

[0008] Figures 2A to 2F A schematic cross-sectional view of a macrocell support structure configuration according to one or more embodiments.

[0009] Figures 3A to 3C This is a schematic drawing of a representation component in a sandwich configuration having an alternative fluid flow path configuration according to one or more embodiments.

[0010] Figure 4A A top view schematic drawing of the epitaxial growth processing chamber body according to one or more embodiments.

[0011] Figure 4B According to one or more embodiments along Figure 4A Cross-sectional view of the centerline AA.

[0012] Figure 5A This is a schematic diagram of the exhaust cover of an epitaxial growth processing chamber according to one or more embodiments.

[0013] Figure 5B According to one or more embodiments along Figure 5A Cross-sectional view of the centerline BB.

[0014] Figure 6A This is a schematic perspective view of an injection ring according to one or more embodiments.

[0015] Figure 6B According to one or more embodiments along Figure 6A A schematic cross-sectional view of the centerline CC.

[0016] Figure 7A This is a schematic perspective view of a reflector according to one or more embodiments.

[0017] Figure 7B , Figure 7C and Figure 7D All are based on one or more embodiments along Figure 7A A schematic cross-sectional view of the centerline DD.

[0018] Figure 8A , Figure 8B and Figure 8C These are schematic perspective views, side views, and top views of a heat shield according to one or more embodiments.

[0019] Figure 8D and Figure 8E Each according to one or more embodiments along Figure 8B A schematic cross-sectional view of the centerline EE.

[0020] Figure 9A , Figure 9B and Figure 9C These are schematic drawings of top, bottom, and side views of a cone reflector according to one or more embodiments.

[0021] Figure 9D and Figure 9E Each according to one or more embodiments Figure 9C A schematic cross-sectional view of the centerline FF.

[0022] In this disclosure, the terms "top," "bottom," "side," "above," "below," "up," "down," "upward," "downward," "horizontal," "vertical," etc., do not indicate absolute direction. Rather, these terms refer to directions relative to a non-specific reference plane. This non-specific reference plane may be vertical, horizontal, or have other angular orientations.

[0023] To facilitate understanding and better comprehend the scope described herein, in some cases, the same or related reference numerals are used to designate the same or similar elements commonly used in the drawings. Those skilled in the art will understand that elements and features of one embodiment may be advantageously incorporated into one or more other embodiments without further description. Detailed Implementation

[0024] In the following disclosure, one or more embodiments may be referred to. However, those skilled in the art will understand that this disclosure is not limited to the specifically described embodiments. Rather, any combination of features and elements, whether or not related to different embodiments, is contemplated as implementing and practicing one or more embodiments provided in this disclosure. Furthermore, while one or more embodiments presented in this disclosure may achieve advantages over other possible solutions, prior art (if any), and combinations thereof, whether a given embodiment achieves a particular advantage is not limited by this disclosure. The aspects, features, embodiments, and advantages provided are illustrative only. Unless expressly stated in one or more claims in the claims of the appended claims, these aspects, features, embodiments, and advantages should not be considered as elements or limitations of the appended claims. Similarly, those skilled in the art should not interpret references to "this disclosure" as a generalization of any disclosed subject matter.

[0025] This disclosure relates to alternative compositions for various components of epitaxial growth processing chambers, which provide improved heat transfer and radiation shielding compared to previously known materials and configurations. In the microprocessor manufacturing industry, substrate temperature inhomogeneity can occur during the use of epitaxial growth processing chambers. Inhomogeneity and non-compliant temperatures can lead to decreased product yield due to material defects. Insufficient heat removal or transfer from parts of the processing container, particularly along the heated sections, can result in inadequate component cooling after service interruptions. Failure to control heat dissipation, allowing for excessively slow heat loss / gain, can subject components to stress due to thermal degradation, thus shortening their operational life. Increased processing chamber maintenance, due to downtime for repairs and component replacements, reduces overall product yield.

[0026] The use of components including macrocell support structures, which are interconnected networks of voids defined by solid supports, represents a previously overlooked method for heat dissipation in this field. By using interconnected solid supports and support plates or internal solid materials made of metal, ceramic, or polymer, not only is the ability to absorb electromagnetic (EM) energy in the form of light and heat provided, but also the ability to transmit this energy to cooling fluids or the external environment, thereby eliminating energy and reducing heat retention in certain components. Furthermore, configurations exist in which interconnected solid supports and reflective layers redirect EM energy to redistribute energy that was initially not absorbed by the substrate being treated, thus saving energy.

[0027] Metallic, ceramic, and polymer macrocell structures exhibit high permeability and a significant overall porosity. It is believed that integrating or replacing certain components of a processing chamber with this architecture not only affects the energy management of the processing chamber but also impacts the efficiency of the process itself due to its ability to remove heat from certain high-energy regions.

[0028] Figure 1 This is a schematic cross-sectional side view of the epitaxial growth processing chamber 100. The processing chamber 100 is an epitaxial deposition chamber. This processing chamber 100 is used to grow an epitaxial film on a substrate 102. The processing chamber 100 generates cross-flow of precursors across the entire top surface 150 of the substrate 102.

[0029] The processing chamber 100 includes an upper body 156, a lower body 148 disposed below the upper body 156, and a base plate 112 disposed between the upper body 156 and the lower body 148. The upper body 156, the base plate 112, and the lower body 148 form the chamber body. Positioned within the chamber are a substrate support 106, an upper viewing window 108 such as an upper dome, a lower viewing window 110 such as a lower dome, a plurality of upper lights 141, and a plurality of lower lights 143. The lower viewing window 110, having a lower dome axis 117, also extends downward, with an axis 118 extending through it. Figure 1As shown, the base plate 112 couples the upper body 156 and the lower body 148 together via the upper viewing window 108 and the lower viewing window 110, respectively, to form an airtight sealed volume. The controller 120 communicates with the processing chamber 100. The controller is used to control processes and methods, such as the operation of the epitaxial growth processing chamber.

[0030] The substrate support 106 is positioned between the upper viewing window 108 and the lower viewing window 110. The substrate support 106 includes a support surface 123 that supports the substrate 102.

[0031] Multiple upper lights 141 are arranged between the upper viewing window and the cover 154. The multiple upper lights 141 form part of the upper light module 155. The cover 154 includes multiple sensors (not shown) for measuring the temperature inside the processing chamber 100. The upper viewing window 108 is an upper dome and is formed of a transmissive material such as quartz.

[0032] Multiple upper lights 141 form a series of concentric rings, such as two, three or more sets of upper lights 141 rings, as part of the upper light module 155. Figure 1 The upper lamp module 155 includes several annular reflectors having concave reflective surfaces 181 positioned between a pair of adjacent concentric rings of the upper lamp 141, or between the concentric rings of the upper lamp 141 and the upper body 156. The upper lamp module 155 also includes a reflector having a flat reflective surface 182 positioned between a pair of adjacent concentric rings of the upper lamp 141, or within the rings of the upper lamp 141. Each of the concave reflective surface 181 and the flat reflective surface 182 has a reflective surface configured to reflect EM radiation downwards onto a specific area of ​​the substrate 102.

[0033] In the processing chamber 100, the upper lamp module 155 has a heat shield 190 located around the outer circumference of the outermost concentric ring of the upper lamp 141. The heat shield 190 has a coating to reflect EM radiation back into the upper lamp module 155. The heat shield 190 helps protect the upper lamp module 155 from rapid temperature changes. The heat shield 190 should provide a gradual temperature rise and fall to reduce thermal shock to the components of the upper lamp module 155, which can extend the operational life of the components of the upper lamp module 155. The upper lamp module may have more than one heat shield, including heat shields located between each concentric ring of the lamp module. In this case, each heat shield may be configured to protect the lower part of the lamp module in a similar manner.

[0034] Multiple lower lights 143 are located between the lower viewing window 110 and the base plate 152 of the processing chamber 100. The multiple lower lights 143 form part of the lower light module 145. The lower viewing window 110 is formed of a transmissive material, such as quartz.

[0035] Multiple lower lights 143 form a series of concentric rings, such as two, three or more sets of lower lights 143 rings, as part of the lower light module 145. Figure 1 The lower lamp module 145 includes several reflectors with concave reflective surfaces 185 located between a pair of adjacent concentric rings of the upper lamp 141, or between the concentric rings of the lower lamp 143 and the lower body 148. The lower lamp module 145 also includes a reflector with a flat reflective surface 186 located between a pair of adjacent concentric rings of the lower lamp 143, or within the rings of the lower lamp 143. Each reflective surface 185, 186 has a surface configured to reflect EM radiation upwards back into the processing chamber 100.

[0036] In the processing chamber 100, the lower lamp module 145 has a heat shield 192 located around the outer circumference of the outermost concentric ring of the lower lamp 143. In some cases, the heat shield may have an external coating to reflect EM radiation back into the lower lamp module. The heat shield 192 assists in redirecting the radiation back into the processing chamber 100, thus protecting the lower lamp module 145 from rapid temperature changes. Similar to the upper lamp module, the lower lamp module may have more than one heat shield.

[0037] The lower lamp module 145 in the processing chamber 100 also shows a conical reflector 194. The conical reflector 194 is positioned around the outer circumference of axis 118, close to the innermost ring of the lower lamp 143. The conical reflector 194 is configured on an outward-facing surface, i.e., a reflective surface, to reflect any EM radiation from the innermost lower lamp 143 outwards and upwards. The conical reflector 194 is configured to prevent rapid thermal transitions on this portion of the lower window 110 during operation of the lower lamp 143, thus reducing the severe thermal gradient that forms along axis 118 and upwards on the lowermost portion of the lower window 110 when the lower lamp 143 is started / stopped. The conical reflector also reduces cyclic thermal stresses formed in the lower window material, which is typically made of quartz, by slowing down the heating and cooling processes.

[0038] A processing volume 136 and a purification volume 138 are defined between the upper viewing window 108 and the lower viewing window 110. The processing volume 136 and the purification volume 138 are part of a larger internal volume defined at least partially by the upper viewing window 108, the lower viewing window 110, and one or more pads. The processing chamber 100 includes a lower pad 111 aligned at least partially below the substrate support 106 and an upper pad 113 aligned at least partially above the substrate support 106. Figure 1 The upper liner 113 and lower liner 111 shown are positioned along the inner surface of the base plate 112 to protect the base plate 112 from reactive gases introduced and used during deposition operations, cleaning operations, or both.

[0039] The internal volume further includes a substrate support 106. The substrate support 106 includes an upward support surface 123 on which the substrate 102 is positioned. The substrate support 106 is coupled or connected to a shaft 118. The shaft 118 is coupled or connected to a motion assembly 121. The motion assembly may include one or more actuators and / or adjustment devices that provide movement, adjustment, or both for the shaft and / or substrate support within the processing volume.

[0040] The substrate support 106 includes one or more lifting pin holes 107. The lifting pin holes 107 are configured to receive lifting pins 132 for lifting the substrate 102 from the support surface 123 of the substrate support 106 before or after the deposition process. The stop 104 includes a plurality of arms 105a, 105b, each arm including a lifting pin stop on which the lifting pin 132 rests during descent.

[0041] The base plate 112 includes one or more gas inlets 114, one or more purified gas inlets 164, and one or more gas outlets 116. One or more gas inlets 114 and one or more purified gas inlets 164 are positioned on the side of the base plate 112 opposite to the one or more gas outlets 116. The gas inlets 114 and purified gas inlets 164 are each positioned such that gas flows parallel to the top surface 150 of the base plate 102 located within the processing volume 136. Gas inlets 114 are fluidly connected to one or more processing gas sources 151 and one or more clean gas sources 153. Purified gas inlets 164 are fluidly connected to one or more purified gas sources 162. One or more gas outlets 116 are fluidly connected to an exhaust pump 157.

[0042] One or more processing gases supplied using one or more processing gas sources 151 include: one or more reactive gases, such as silicon-containing gases, phosphorus-containing gases, and germanium-containing gases; one or more carrier gases, such as nitrogen (N2) and hydrogen (H2), or a combination thereof. One or more purification gases supplied using one or more purification gas sources 162 may include one or more inert gases, such as argon (Ar), helium (He), and nitrogen (N2). One or more cleaning gases supplied using one or more clean gas sources 153 may include one or more hydrogen (H) and chlorine (Cl). One or more processing gases may include silicon phosphide (SiP), phosphine (PH3), silane, or a combination thereof. One or more cleaning gases may include hydrochloric acid (HCl). The epitaxial growth processing chamber is configured to process these materials internally without significant degradation and with operator presence to observe normal operation.

[0043] One or more gas exhaust outlets 116 are further coupled or connected to an exhaust cap 178. The exhaust cap 178 fluidly connects one or more gas exhaust outlets 116 to an exhaust pump 157. The exhaust cap 178 assists in the deposition of a layer on the substrate 102 by regulating the pressure differential within the epitaxial growth processing chamber, thereby affecting gas flow across the entire substrate surface and thus the deposition rate. The exhaust cap 178 is positioned on the opposite side of the processing chamber 100 relative to the base plate 112.

[0044] In one or more embodiments that can be combined with other embodiments, the epitaxial growth processing chamber is configured with one or more components, including macrocell support structures. In one or more embodiments that can be combined with other embodiments, the components configured for the epitaxial growth processing chamber include macrocell support structures. Figures 2A to 2F Non-limiting examples of this macrocell support structure are provided.

[0045] Figures 2A to 2F It is a schematic cross-sectional view of a macrocell support structure configuration according to one or more embodiments. Figure 2A This is a schematic drawing of a cross-sectional view of a freestanding macrocell support structure shown in rectangle 200. The macrocell support structure 201, such as that shown in rectangle 200, has interconnecting solid supports 202 forming a three-dimensional (3D) interconnection network; a lattice or matrix. The spaces or gaps between the interconnecting solid supports 202 define a plurality of voids or pores 204. In the case of an “open” macrocell support structure, if not the majority (i.e., greater than 90%), the majority (i.e., greater than 50%) of the pores 204 are fluidly connected to each other (this will be described further), allowing fluids (such as gas or liquid) to flow through the macrocell support structure 201 in any axial direction.

[0046] In one or more embodiments that can be combined with other embodiments, the interconnecting entity supports of the macrocell support structure are configured as a mesh, i.e., random or variable configuration, such as... Figure 2A The interconnection entity support 202 of the macrocell support structure 201 is configured as shown. Figure 2B This is a schematic drawing of a cross-sectional view of the second independent macrocell support structure, shown as rectangle 210. In one or more embodiments that can be combined with other embodiments, the interconnecting entity supports are configured as a regular or repeating structure, such as... Figure 2B Rectangle 210 is shown in the diagram. As seen in the macrocell support structure 211, the interconnecting solid supports 212 and the pores 214 are uniformly, repeatedly, and regularly distributed throughout the structure. Given a uniform arrangement of the macrocell support structure, this configuration provides predictability not only for fluid flow but also for heat transfer.

[0047] Interconnected solid supports provide greater internal strength and distortion resistance. The macrocell support structure is load-bearing and maintains its shape under high temperature conditions and stress. In one or more embodiments that can be combined with other embodiments, the available macrocell support structure does not thermally degrade or decompose within a temperature range from about 0°C to about 1000°C, such as from about 0°C to about 100°C, 200°C, 300°C, 400°C, 500°C, 600°C, 700°C, 800°C, 900°C, and 1000°C (including all range combinations and including endpoint values). "Temperature degrade or decomposition" means that the material undergoes a chemical reaction in which chemical bonds break between bonded atomic pairs, or a chemical reaction that transforms the material into another material, such as oxidation, making the resulting material more likely to lose its solid integrity on a macroscopic scale. In one or more embodiments that can be combined with other embodiments, the available macrocell support structure is configured to be exposed to 1 × 10 -5 Pressures from atmospheric pressure to approximately 1.5 atmospheres, such as 0.00001, 0.0001, 0.001, 0.01, and 0.1 atmospheres to approximately 0.2, 0.3, 0.5, 0.7, 0.8, 0.9, 1.0, 1.1, 1.2, 1.3, 1.4, and 1.5 atmospheres, including all range combinations and including endpoint values. Pressure values ​​below atmospheric pressure are considered “partial vacuum”.

[0048] In one or more embodiments that can be combined with other embodiments, the interconnecting entity supports of the macrocell support structure include metals such as aluminum, aluminum alloys, iron, iron alloys, nickel, nickel alloys, copper, copper alloys, or combinations thereof. An example of a usable aluminum alloy is 6061 aluminum. An example of a usable iron alloy is stainless steel, such as 316L stainless steel. An example of a usable nickel alloy is Hastelloy. An example of a usable copper alloy is brass.

[0049] In one or more embodiments that may be combined with other embodiments, the interconnecting entity support of the macrocell support structure includes ceramic or glass materials, such as reticulated vitreous / glassycarbon (RVC); silicon carbide coated RVC; silicon carbide; silicon nitride; quartz, such as black quartz; carbon fiber products, such as carbon fiber fabric; or combinations thereof.

[0050] In one or more embodiments that can be combined with other embodiments, the interconnecting entity support of the macrocell support structure comprises a polymer material. In one or more embodiments that can be combined with other embodiments, the polymer material is a thermosetting polymer. In one or more embodiments that can be combined with other embodiments, the polymer is a thermoplastic material. Polymers suitable for this type of process are polymers having a glass transition temperature (Tg) greater than about 350°C. In one or more embodiments that can be combined with other embodiments, the polymer may be a thermosetting polymer, poly(ethyl ether ketone); PEEK, polyimide, or a combination thereof.

[0051] A characteristic of the macrocell support structure is the size of its pores relative to the total volume of the structure. In one or more embodiments that may be combined with other embodiments, the pore volume or porosity percentage of the macrocell support structure is from about 70% to about 98% of the structural volume, such as 70%, 75%, 80%, 85%, and 90% to about 91%, 92%, 93%, 94%, 95%, 96%, 97%, and 98% of the structural volume, including all range combinations and including endpoint values.

[0052] In one or more embodiments that may be combined with other embodiments, the width of the average void or pore within the macrocell support structure is from about 20 to about 5000 micrometers, such as widths of 20, 30, 40, 50, 60, 70, 80, 90, 100, 150, 200, 250, 300, 400, 500, 600, 700, 800, 900, 1000, 1250, 1500, 1750 and 2000 to 2250, 2500, 2750, 3000, 3250, 3500, 3750, 4000, 4250, 4500, 4750 and 5000 micrometers, including all range combinations and including endpoint values. "Width" refers to the measurable distance between two interconnected solid supports on opposite sides of a defined void or pore volume shape (such as a void defined as a repeating cube (opposite diagonal corners) or a sphere (diameter).

[0053] Compared to traditional processing chamber components, the increased number of pores throughout the structure not only reduces component weight but also provides significant thermal flexibility and stress distribution. Unlike more robust components, components incorporating macrocell support structures are less likely to fail due to thermal stress caused by thermal gradients formed during heating and cooling. The macrocell support structure not only distributes stress across the entire interconnected solid support structure (which can bend and twist in response to repeated heating and cooling) but is also configured to transfer heat to any fluid contained within and traveling through the pores. This ability to more easily release such stress avoids long-term exposure problems such as stress-based failures or cracking.

[0054] Another characteristic of the macrocell support structure is its permeability. The permeability of the macrocell support structure makes the macrocells relatively "open"—this openness allows fluid to flow between the interconnected solid supports, receiving heat and transferring energy outside the structure, thereby cooling it. In one or more embodiments that can be combined with other embodiments, the macrocell support structure has a permeability greater than about 70% to 100%, such as greater than about 70%, 75%, 80%, 85%, and 90% to about 91%, 92%, 93%, 94%, 95%, 96%, 97%, 98%, 99%, 99.9%, 99.99%, 99.999%, about 100%, and 100%, including all range combinations and including endpoint values. The permeability of the macrocell support structure is reflected in the number of pores that are not isolated from other pore fluids; that is, there is at least some fluid connectivity between the pores, allowing fluid to flow from one side of the structure to the opposite side or the other. The permeability between interconnected solid supports allows fluids (such as gases, such as nitrogen, argon, helium, other inert gases, and other gases that are generally inert to materials) to flow naturally or be forced through the macrocell support structure, such as by using pressurized fluids or mass drives (such as fans or compressors).

[0055] While in some cases not all pores or voids are fluidly connected to other pores—that is, some pores are closed, fluid-isolated, or "dead"—this is not necessarily a deficiency or defect in the macrocell structure configuration. A few pores ("dead" pores) in the macrocell support structure lack permeability; these pores act as confined "heat sinks" by absorbing energy transferred via the interconnecting entity supports. This allows for a degree of slower heating and cooling compared to macrocell support structures without such isolating voids or pores. In one or more embodiments that can be combined with other embodiments, closed voids are located close to or in contact with the interior of surfaces, such as the inner surface of a support plate, sandwich panel, or a portion of a closed surface. As previously mentioned, such sealed voids act as temperature buffers. Sealed voids also provide additional mechanical coupling or connectivity at the coupling or connection points between the surface and the interconnecting entity supports by increasing the amount of material coupling or contacting the surface at one or more points at the interface.

[0056] The components configured for use in the epitaxial growth processing chamber are at least partially made of macrocell support structures having one or more solid configurations. Previously shown Figure 2A and Figure 2B A cross-sectional view of a freestanding macrocell support structure is shown. In one or more embodiments, the component comprises only the macrocell support structure; this component is a freestanding macrocell support structure. Macrocell support structures 201 and 211 each represent components without any external covering, mounting, shielding, surface, or protection to prevent fluid from entering the structure. Unless the surface is surface-sealed with a film or layer, fluid can pass freely through the macrocell support structure without obstruction, except for the presence of interconnecting solid supports and any portions containing closed orifices.

[0057] Figure 2C This is a schematic cross-sectional view of a polymer-filled freestanding macrocell support structure, shown in rectangle 220. In one or more embodiments that can be combined with other embodiments, the component is configured such that it has a freestanding macrocell support structure whose pores are filled with a second solid material. In this configuration of the polymer-filled freestanding macrocell support structure 221, the second solid material (such as second solid material 223) is completely contained within the pores 224. The second solid material 223 is different from the material of the interconnecting entity support 222 of the freestanding macrocell support structure 201. Figure 2C In the middle, the configuration of rectangle 220 is similar to that of... Figure 2A and Figure 2B Rectangles 200 and 210; however, the internal porous structure 224 is completely filled with the second solid material 223. In one or more embodiments that may be combined with other embodiments, the second solid material is a polymer, such as a thermosetting polymer, PEEK, polyimide, or a combination thereof.

[0058] The expansion or contraction rate of the second solid material in a “solid polymer-filled” configuration should not differ significantly from that of the interconnected solid support under temperature changes. Significant differences in the rate or amount of expansion / contraction between the two materials will cause solid stress in the macrocell support structure. Significant differences will ultimately degrade the entire composite structure. Even under extreme conditions, the second solid material should not melt, liquefy, degrade, or decompose under the normal or predictable operating conditions of the component or epitaxial growth chamber. The second solid material may soften at elevated temperatures, as is known with thermosetting polymers that soften upon absorbing energy, and its crosslinks extend within the polymer matrix; however, the second solid material should not otherwise lose the solid integrity of its shape or expand beyond the expected amounts of expansion and contraction.

[0059] Figure 2D A schematic cross-sectional view of the plate-supported macrocell support structure is shown in rectangle 230. In one or more embodiments that can be combined with other embodiments, the component is configured such that it is in a plate-supported configuration. Rectangle 230 represents the component "plate-supported". In one or more embodiments, the support plate 235 is coupled to an interconnecting entity support member in another freestanding macrocell support structure. In one or more embodiments that can be combined with other embodiments, the support plate is connected to the interconnecting entity support member. Coupling includes, but is not limited to, an intermediate coupling layer (not shown), such as an adhesive layer, which joins the inner surface of the support plate 235 to external contacts along the outer surface of the macrocell support structure. The connection is made directly using known connection techniques, such as, but not limited to, welding, brazing, diffusion bonding, and mechanical fastening, such as by bolting or clamping.

[0060] In one or more embodiments that can be combined with other embodiments, portions of the plate support component comprise different materials. For example, an interconnecting solid support member of a macrocell support structure made of a first material and a support plate made of a second material. In one or more embodiments where the plate support component comprises different materials that can be combined with other embodiments, the coefficients of thermal expansion of the different materials of the plate support component differ from each other within ±10%. This composite material reflects the numerous benefits of composite materials.

[0061] In one or more embodiments that can be combined with other embodiments, portions of the plate support configuration component comprise the same material. Where portions of the plate support configuration component comprise the same material, in one or more embodiments, the plate support component is a monolithic component. That is, there are no seams, separations, gaps, or breaks at the outer surface of the macrocell support structure where the interconnected solid support members are coupled along the support plate and the support plate needs to be coupled or connected; the component is a single, uniform object. Such a component is manufactured using known processes, such as, but not limited to: additive manufacturing, such as three-dimensional (3D) printing; subtractive manufacturing; compression molding; injection molding; and casting.

[0062] In one or more embodiments that can be combined with other embodiments, the outward-facing surface of the support plate has a modified surface. In some cases, the outward-facing surface is modified mechanically or chemically to directly alter its properties, such as through scribing, matting, etching, polishing, oxidation, and acid or alkali treatment. In this modification, the properties of the material including the support plate are enhanced to perform certain functions, such as bonding with another material or reflecting electromagnetic (EM) radiation. In some other cases, the outward-facing surface is modified by coupling or attaching an outer layer to the outward-facing surface. For example, a reflective film or mirror is adhered to or coated on the outward-facing surface to reflect EM radiation. Other such modifications to the outward-facing surface of the support plate are understood and contemplated.

[0063] Figure 2E A schematic drawing of a cross-sectional view of the mezzanine macrocell support structure is shown in rectangle 240. In one or more embodiments that can be combined with other embodiments, the component is configured such that it is in a mezzanine configuration. Rectangle 240 represents a component in a mezzanine configuration 241 having a first plate 246 and a second plate 247 located on different surfaces of another freestanding macrocell support structure 201. Figure 2E As shown, plates 246 and 247 are positioned relative to each other. However, alternative configurations have plates that are not directly relative to each other, such as being adjacent to each other. This configuration is similar to a plate support structure, except that there are two or more plates on opposite or different surfaces, rather than just a single support plate. In one or more embodiments that can be combined with other embodiments, the first and second plates are coupled or connected to the interconnecting entity support members of the macrocell support structure.

[0064] In one or more embodiments that can be combined with other embodiments, portions of the components in the mezzanine configuration 241 comprise different materials, for example, the first plate 246 comprises a first material and the second plate 247 comprises a second material. In one or more embodiments where portions of the mezzanine components comprise different materials, for example, the first material and the second material are different, and the coefficients of thermal expansion of the different portions of the mezzanine components differ from each other within ±10%. In one or more embodiments that can be combined with other embodiments, portions of the mezzanine components comprise the same material, for example, the first material and the second material are the same. In cases where portions of the mezzanine components comprise the same material, for example, the first plate, the second plate, and the interconnecting entity support comprise the same material, the mezzanine configuration component is a monolithic component. In one or more embodiments that can be combined with other embodiments, one or both of the outward-facing surfaces of the first plate and / or the second plate have modified surfaces. An example of such a mezzanine configuration component includes: the first plate having an outward-facing surface that is etched to promote adhesion, and the second plate having an outward-facing surface that is finely polished to reflect EM radiation.

[0065] Figure 2F A schematic cross-sectional view of a surface-sealed macrocell support structure configuration 251 is shown in rectangle 250. In one or more embodiments that can be combined with other embodiments, the component is configured in a surface-sealed configuration. Rectangle 250 represents the component in the surface-sealed configuration, wherein a covering surface 258 surrounds all the outer sides of another freestanding macrocell support structure 201. The material included in the covering surface 258 may be different from the material of the interconnecting entity support. Alternatively, the covering surface 258 may include the same material as the interconnecting entity support. This surface-sealed macrocell support structure configuration 251 does not allow fluids such as gases, liquids, or supercritical fluids to move back and forth within the macrocell support structure; instead, the structure and any fluid contained within the pores of the freestanding macrocell support structure 201 are fluid-sealed within the structure. Fluids move within the structure based on internal permeability, such as through the physical movement of the component or uneven heat distribution. In one or more embodiments that can be combined with other embodiments, the interconnecting entity support is surface-coupled or connected to the macrocell support structure.

[0066] In one or more embodiments that can be combined with other embodiments, portions of the surface sealing component comprise different materials. In one or more embodiments where portions of the surface sealing component comprise different materials, the coefficients of thermal expansion of the different portions of the surface sealing component differ from each other within ±10%. In one or more embodiments that can be combined with other embodiments, portions of the surface sealing component comprise the same material. Where portions of the surface sealing component comprise the same material, in one or more embodiments that can be combined with other embodiments, the surface sealing configuration component is a one-piece component. In one or more embodiments that can be combined with other embodiments, one, some, or all of the outward-facing sides of the sealing surface are modified surfaces.

[0067] When a surface-sealing component is present, the pores of the macrocell support structure are filled with a gas, such as nitrogen, argon, helium, other inert gases, and other gases that are generally non-reactive with the component, or a combination thereof. During processing, the gas within the surface-sealing component is at or below atmospheric pressure, as determined at room temperature. This allows the gas pressure trapped within the surface-sealing component to increase when the surface-sealing component is exposed to the heat of the epitaxial deposition process. In one or more embodiments that may be combined with other embodiments, the gas pressure within the surface-sealing component, measured at room temperature, is approximately 1 × 10⁻⁶. -5 Atm to about 1.0 atm, such as 0.00001, 0.0001, 0.001, 0.01 and 0.1 atm to about 0.2, 0.3, 0.5, 0.7, 0.8, 0.9 and 1.0 atm, including all range combinations and including endpoint values.

[0068] Figures 3A to 3C This is a schematic diagram of a representation component 300 in a mezzanine configuration having an alternative fluid flow path configuration. Figure 3A This is a schematic drawing of the first component 305A with a mezzanine configuration 341 having a macrocell support structure 301, the configuration of which is similar to... Figure 2EThe macrocell support structure 241. In one or more embodiments that can be combined with other embodiments, the component is configured such that it has an inlet fluid flow port. In one or more embodiments that can be combined with other embodiments, the component is further configured to have an outlet fluid flow port paired with the inlet fluid flow port. In both cases, the port configuration provides fluid connectivity to facilitate driving heat transfer fluid through the internal freestanding macrocell support structure. The first component 305A is configured to deliver heat transfer fluid (such as gas) in a one-way flow through the freestanding macrocell support structure 301. A first plate 346 acts as the outer wall of the first component 305A, while a second plate 347 acts as the inner wall. The inlet fluid flow port 306 allows heat transfer fluid to be introduced into the first component 305A from outside the macrocell support structure 301. An outlet fluid flow port 307 also exists, which allows the opposite: heat transfer fluid to be transferred from the macrocell support structure 301 and flow out from the first component. A fluid barrier 303 exists between the inlet fluid flow port 306 and the outlet fluid flow port 307, which blocks all fluid flow through the macrocell support structure 301. Any fluid that travels from the inlet fluid flow port 306 to the outlet fluid flow port 307 must flow in a tortuous manner along the fluid flow path (arrow 308) throughout the entire interior of the macrocell support structure 301 in order to travel across it.

[0069] Effective heat transfer fluids include gases such as nitrogen, argon, helium, other inert gases, and other gases that are generally inert to the macrocell support structure.

[0070] In configurations similar to macrocell support structure 201 or macrocell support structure 211 (as shown respectively) Figure 2A and Figure 2B In the macrocell support structure 301 (shown), the heat transfer fluid does not flow around the first component 305A in a smooth curve, but rather generally follows the fluid flow path (arrow 308). Instead, even in the repeating macrocell support structure 311, the heat transfer fluid follows a tortuous path. Normally, the fluid flows from the inlet fluid flow port 306 to the outlet fluid flow port 307. Along the path from the inlet fluid flow port to the outlet fluid flow port, due to the fluid's random movement along the sideflow and downflow directions, a given amount of heat transfer fluid will be split, merge with other fluids, and re-merge with the original portion. In this way, heat is absorbed from the hot surface and transferred to the cooler surface. The physical thermodynamics and interactions between the heat transfer fluid and the macrocell support structure make this component an excellent heat transfer device.

[0071] Freestanding macrocell support structures in flat, sandwich, or enclosed configurations are cooled by fluid flow. Fluid is introduced through inlet fluid flow port 306. Figure 3AIn the case of the sandwich configuration shown, the inlet fluid flow port 306 is configured to allow fluid to be transferred from the outside of the first component 305A to the macrocell support structure 301 inside the first component 305A. Where there are no restrictive obstructions at the top and bottom of the macrocell support structure, such as in a plate or sandwich configuration, most fluid will find a tortuous flow path, flowing out of the macrocell support structure through pores that are fluidly connected to open and unfixed surfaces facing the top or bottom.

[0072] Alternatively, fluid flow obstructions may be present, such as gaskets, adjacent surfaces of processing chambers, or closed surfaces, blocking or at least significantly impeding fluid movement out of the macrocell support structure 301 through fluid-connecting pores located at the top or bottom of the macrocell support structure. Figure 3A (When viewing the first component 305A from a top-down vantage point). In a closed structure, the enclosed surface acts as an obstruction to fluid flow. In other cases, such as plate or sandwich configurations, this flow obstruction is provided through coupling or connection to other processing chamber components. Fluid entering the inlet fluid flow port 306 is guided away from the fluid flow obstruction 303, flows in a tortuous manner through the fluid flow path (arrow 308) present around the first component 305A in the macrocell support structure 301, and exits from the first component 305A at the outlet fluid flow port 307. In effect, using this flow configuration, the first component 305A becomes a single-pass heat exchanger.

[0073] Figure 3B This is a schematic drawing of the second component 305B of the macrocell support structure 301, which has a sandwich configuration 341. The second component 305B has a similar configuration to the first component 305A, except that it is configured as a dual single-pass or "half-pass" heat exchanger. A first fluid flow barrier 303A and a second fluid flow barrier 303B, arranged on opposite sides of the second component 305, divide the macrocell support structure 301 into two semi-rings, preventing fluid flow across more than half of the macrocell support structure 301. Each "half" has an inlet fluid flow port (306A / B) and an outlet fluid flow port (307A / B), and is configured such that the heat transfer fluid in one half flows in the opposite direction to the other half. This configuration is more suitable for maintaining a constant temperature on the inward-facing surface of the second plate 347 or for heat removal.

[0074] Figure 3CThis is a schematic drawing of the third component 305C of the macrocell support structure 301, which has a sandwich configuration 341. The third component 305C has a similar configuration to the second component 305B, except that the fluid flow path (arrow 308') is further modified (becomes more tortuous) by incorporating multiple fluid flow baffles 309 within the macrocell support structure 301. The presence of one or more fluid flow baffles increases the effective length of the fluid flow path (arrow 308') by forcing the heat transfer fluid to partially traverse in a direction generally perpendicular to some paths within its flow path. Forcing the heat transfer fluid to flow perpendicular to the general flow direction increases the tortuous nature of the fluid flow and the residence time of the heat transfer fluid within the component. The fluid flow baffles 309 also make it more likely that more heat transfer fluid will contact the inward-facing surfaces of the first plate 346 and the second plate 347 by reducing the "flow channel effect" at the center of the macrocell support structure. This flow dynamic will cause the heat transfer fluid to absorb more heat from the hotter surfaces and transfer heat more efficiently to the cooler surfaces.

[0075] In one or more embodiments that can be combined with other embodiments, the component further includes an inlet fluid flow port. The inlet fluid flow port is configured to provide fluid communication between the macrocell support structure and the exterior of the component. In one or more embodiments that can be combined with other embodiments, the component further includes an outlet fluid flow port. The outlet fluid flow port is configured to provide fluid communication between the macrocell support structure and the exterior of the component. In one or more embodiments that can be combined with other embodiments, the component further includes a fluid flow barrier. In one or more embodiments that can be combined with other embodiments, the component further includes a fluid flow baffle.

[0076] Figure 4A A schematic top view of the main body of the epitaxial growth processing chamber (400). Figure 4B It is along Figure 4A Cross-sectional view of centerline AA. The outer base plate 412 has the same... Figure 1 The bottom plate 112 of the intermediate processing chamber 100 has a similar configuration. Figure 4B The illustration points to the side of the base plate 412 defining the substrate groove 413 and away from one or more gas exhaust outlets 416. Figure 4A and Figure 4B In the diagram, the base plate 412 is shown having several features, including a substrate groove 413 defining the solid boundary of the base plate 412, an outer surface 403, and an inner surface 405. The inner surface 405 also defines a cylindrical volume 408 within the base plate 412, which is at least a portion of the processing volume of the processing chamber 100, previously... Figure 1The cylinder is described as having a processing volume of 136. The cylindrical shape, with a volume of 408 and an inner surface 405, has a diameter "D" between relative points. The base plate 412 also has a uniform height "H". By using... Figure 4B The inner surface (indicated by line 405) at the line of sight and the inner surface around the semi-circular surface in the view (indicated by underline 405), which also includes the view of the substrate groove 413. At the point shown in Figure AA, the internal structure 409 of the substrate 412 is shown as having a thickness "Tb", which indicates the thickness of the substrate at that line of sight. Those skilled in the art will understand that the substrates of the embodiments also include substrates with similar or different overall dimensions, such as, but not limited to, the perimeter and diameter of the internal processing volume; the thickness, width, and length of the substrate; the size and configuration of the substrate groove; and the number, location, and type of gas exhaust outlets, which are suitable for proper operation in a chamber used as an epitaxial growth processing chamber.

[0077] In one or more embodiments that can be combined with other embodiments, the base plate is configured in a mezzanine macrocell support structure configuration. For example... Figure 4B As shown along line of sight AA, the mezzanine configuration 441 of the macrocell support structure 401 is illustrated by a structure similar to... Figure 2E The mezzanine macrocell support structure 241 is made of a macrocell support structure and has a volume of internal structure 409 with a thickness Tb. (The text abruptly ends here, likely due to an incomplete sentence or a formatting error.) Figure 4A As can be seen, the sandwich configuration 441 of the macrocell support structure 401 is visible, particularly in the region of the macrocell support structure 401 between the first plate 446 and the second plate 447. Although no "plate" is formed in this case (which would result in an image of a flat surface), those skilled in the art will understand that the term is consistent with the previously described and Figure 2E The example of the rectangular 240 associated with the mezzanine macrocell support structure configuration is consistent with that in this and other embodiments. This example also shows an inlet fluid flow port 406 and an outlet fluid flow port 407 to support the introduction and removal of cooling fluid via the interior of the freestanding macrocell support structure 401.

[0078] like Figure 4BAs shown, the entire macrocell support structure 401 is contained between a first plate 446 and a second plate 447, where the first plate 446 acts as the outward-facing plate of the base plate 412, and the second plate 447 acts as the inward-facing plate of the base plate 412. The first plate has a thickness (Te); the second plate has a thickness (Ti). In one or more embodiments that may be combined with other embodiments, the thickness of the first plate (Te) is from about 0.05 to about 5 millimeters, such as from 0.05, 0.07, 0.1, 0.2, 0.3, 0.5, 0.7, 0.9, and 1.0 to about 1.5, 2.0, 2.5, 3.0, 3.5, 4.0, 4.5, and 5.0 millimeters (mm), including all range combinations and including endpoint values. In one or more embodiments that can be combined with other embodiments, the thickness (Ti) of the second plate is from about 0.05 to about 5 mm, such as from 0.05, 0.07, 0.1, 0.2, 0.3, 0.5, 0.7, 0.9, and 1.0 to about 1.5, 2.0, 2.5, 3.0, 3.5, 4.0, 4.5, and 5.0 mm, including all range combinations and including endpoint values. In one or more embodiments that can be combined with other embodiments, the first plate and the second plate have the same or similar thickness. In one or more embodiments that can be combined with other embodiments, the thickness of the first plate is greater than the thickness of the second plate. In one or more embodiments that can be combined with other embodiments, the thickness of the first plate is less than the thickness of the second plate. Due to various reasons, there may be a thickness difference between the two plates, including but not limited to the overall mechanical strength of the base plate and the safety and containment of the fluid handled during operation. Therefore, the thickness of the macrocell support structure will be determined as the base plate thickness (Tb) minus the sum of the thicknesses of the two plates (Ti + Te). Those skilled in the art should understand that the thickness of the first and second plates varies depending on the observation position, and therefore varies from one value to another within the range based on the measurement position.

[0079] In this mezzanine configuration of the macrocell support structure, the interconnecting entity supports of the macrocell support structure are made of metal. In one or more embodiments that can be combined with other embodiments, the first plate and the second plate are made of metal. In one or more embodiments that can be combined with other embodiments, both the first plate and the second plate are made of the same material as the interconnecting entity supports. It is also conceivable that one or both of the first plate and the second plate are made of a different metal material than the interconnecting entity supports.

[0080] Figure 5A Schematic diagram 500 of the exhaust cover for the epitaxial growth treatment chamber. Figure 5B It is along Figure 5ACross-sectional view of the centerline BB. In the illustration, inlet port 502 is defined by coupling flange 513 and is typically in fluid communication with a processing chamber (such as processing chamber 100) during coupling or connection. Inlet port 502 allows fluid access to interior 508, primarily defined by inner surface 505. Outer surface 503... Figure 5A and Figure 5B As can be seen in the middle, it serves as the top of the exhaust cover 578. Figure 5B The internal structure 509 of the exhaust cover 578 is also shown. The outlet port 515 allows fluid access to the interior 508 and allows gas to escape from the exhaust cover 578. Several dimensions are used to describe aspects of the exhaust cover of the embodiment. "Hi" is defined as the height between relative points along the lower and upper inner surfaces 505 of the exhaust cover 578. "Li" is defined as the length or depth between the inlet port 502 and the opposite side of the exhaust cover 578, such as the length or depth along line of sight BB. "Tc" is the surface thickness of the exhaust cover 578, such as the thickness of the internal structure 509. Those skilled in the art will understand that the exhaust cover of the embodiment also includes other exhaust covers with different overall body dimensions, such as, but not limited to, thickness, width, height, volume, outlet port location and diameter, coupling or connection means to the base plate, dimensions suitable for proper operation within the epitaxial growth processing chamber.

[0081] In this case, an inlet fluid flow port 506 is also shown paired with the outlet fluid flow port 507 to support the introduction and removal of cooling fluid via the internal structure of the independent macrocell support structure 501.

[0082] In one or more embodiments that can be combined with other embodiments, the vent cover is configured to be located in a macrocell support structure interlayer configuration. For example... Figure 5B As shown along line of sight BB, the mezzanine configuration 541 of the macrocell support structure 501 is illustrated by a structure similar to... Figure 2E The mezzanine macrocell support structure 241 is made of a macrocell support structure and has a volume of internal structure 509 with thickness Tc. The region of macrocell support structure 501 is between the first plate 546 and the second plate 647.

[0083] like Figure 5BAs shown, the entire macrocell support structure 501 is contained between a first plate 546 and a second plate 547, where the first plate 546 acts as the outward-facing plate of the exhaust cap 578, and the second plate 547 acts as the inward-facing plate of the exhaust cap 578. The first plate has a thickness (Te); the second plate has a thickness (Ti). In one or more embodiments that may be combined with other embodiments, the thickness of the first plate (Te) is from about 0.05 to about 5 millimeters, such as from 0.05, 0.07, 0.1, 0.2, 0.3, 0.5, 0.7, 0.9, and 1.0 to about 1.5, 2.0, 2.5, 3.0, 3.5, 4.0, 4.5, and 5.0 millimeters (mm), including all range combinations and including endpoint values. In one or more embodiments that can be combined with other embodiments, the thickness (Ti) of the second plate is from about 0.05 to about 5 mm, such as from 0.05, 0.07, 0.1, 0.2, 0.3, 0.5, 0.7, 0.9, and 1.0 to about 1.5, 2.0, 2.5, 3.0, 3.5, 4.0, 4.5, and 5.0 mm, including all range combinations and including endpoint values. In one or more embodiments that can be combined with other embodiments, the first plate and the second plate have the same or similar thickness. In one or more embodiments that can be combined with other embodiments, the thickness of the first plate is greater than the thickness of the second plate. In one or more embodiments that can be combined with other embodiments, the thickness of the first plate is less than the thickness of the second plate. As mentioned above, there may be a thickness difference between the two plates for various reasons. Therefore, the thickness of the macrocell support structure will be determined as the exhaust cap thickness (Tc) minus the sum of the thicknesses of the two plates (Ti + Te). As can be understood by a person of ordinary skill, the thickness of the first and second plates can vary depending on the observation position, and thus vary from one value to another within the range based on the measurement position.

[0084] In this mezzanine configuration of the macrocell support structure, the interconnecting entity supports of the macrocell support structure are made of metal. In one or more embodiments that can be combined with other embodiments, the first plate and the second plate are made of metal. In one or more embodiments that can be combined with other embodiments, both the first plate and the second plate are made of the same material as the interconnecting entity supports. It is conceivable that one or both of the first plate and the second plate are made of a different metallic material than the interconnecting entity supports.

[0085] Figure 6A A schematic perspective view of the injection ring at 600°. Figure 6B It is along Figure 6A A schematic cross-sectional view of line CC in the diagram. (See attached diagram.) Figure 6A In one or more embodiments that can be combined with other embodiments, the components including the macrocell support structure for the epitaxial growth processing chamber include an injection ring, such as injection ring 680. In one or more embodiments that can be combined with other embodiments, Figure 6A The document also provides and illustrates components coupled to the injection ring 680, including components of the macrocell support structure used with the epitaxial growth processing chamber, such as an injection cap, like an injection cap 690. Although in Figure 6A The illustration shows an injection ring and an embodiment of an injection cap, but those skilled in the art will understand that embodiments of the injection cap or injection ring may have similar or different overall dimensions, such as, but not limited to, thickness, width, circumference, number of injection holes, manner and means of coupling the injection cap and injection ring to each other, or whether they are integral workpieces, and diameter, which are suitable for proper operation in a chamber used as an epitaxial growth processing chamber.

[0086] In this case, an inlet fluid flow port 606 connected to the top of the injection cap 690 and a paired outlet fluid flow port 607 connected to the side of the injection ring 680 are also shown. Having an inlet fluid flow port mounted on one component and an outlet fluid flow port mounted on a second component (where the two components share a common fluid flow path and are coupled, connected, or integrated) is contemplated to support the introduction and removal of cooling fluid through the interior of the independent macrocell support structure 601.

[0087] One or more macrocell support structures can be used to configure an injection ring for use in the epitaxial growth processing chamber. In one or more embodiments that can be combined with other embodiments, the injection ring is configured to be located in a mezzanine configuration of the macrocell support structure. Figure 6B As shown along line of sight CC, the mezzanine configuration 641 of the macrocell support structure 601 is illustrated by a structure similar to... Figure 2E The mezzanine macrocell support structure 241 is composed of a macrocell support structure and has a volume of internal structure 609 with thickness. Figure 6A and Figure 6B In the middle, the sandwich configuration 641 of the macrocell support structure 601 is visible, especially in the region of the independent macrocell support structure 601 between the first plate 646 and the second plate 647, the first plate 646 being the inner surface of the injection ring 680 and the second plate 647 being the outer surface of the injection ring 680.

[0088] like Figure 6BAs shown, the entire macrocell support structure 601 is contained between a first plate 646 and a second plate 647, with the first plate 646 acting as the inward-facing side and the second plate 647 acting as the outward-facing side. The first plate has a thickness, and the second plate has a thickness. In one or more embodiments that can be combined with other embodiments, the thickness of the first plate is from about 0.05 to about 5 millimeters, such as from 0.05, 0.07, 0.1, 0.2, 0.3, 0.5, 0.7, 0.9, and 1.0 to about 1.5, 2.0, 2.5, 3.0, 3.5, 4.0, 4.5, and 5.0 millimeters (mm), including all range combinations and including endpoint values. In one or more embodiments that can be combined with other embodiments, the thickness of the second plate is from about 0.05 to about 5 mm, such as from 0.05, 0.07, 0.1, 0.2, 0.3, 0.5, 0.7, 0.9, and 1.0 to about 1.5, 2.0, 2.5, 3.0, 3.5, 4.0, 4.5, and 5.0 mm, including all range combinations and including endpoint values. In one or more embodiments that can be combined with other embodiments, the first plate and the second plate have the same or similar thickness. In one or more embodiments that can be combined with other embodiments, the thickness of the first plate is greater than the thickness of the second plate. In one or more embodiments that can be combined with other embodiments, the thickness of the first plate is less than the thickness of the second plate. Due to various reasons, there may be a thickness difference between the two plates, including but not limited to the overall mechanical strength of the base plate and the safety and containment of the fluid handled during operation. Therefore, the thickness of the macrocell support structure will be determined as the injection ring thickness minus the sum of the thicknesses of the two plates. Those skilled in the art should understand that the thickness of the first and second plates varies depending on the observation position, and therefore varies from one value to another within the range based on the measurement position.

[0089] In this mezzanine configuration of the macrocell support structure, the interconnecting entity supports of the macrocell support structure are made of metal. In one or more embodiments that can be combined with other embodiments, the first plate and the second plate are made of metal. In one or more embodiments that can be combined with other embodiments, both the first plate and the second plate are made of the same material as the interconnecting entity supports. It is also conceivable that one or both of the first plate and the second plate are made of a different metal material than the interconnecting entity supports.

[0090] Injection cap (such as) Figure 6A The injection cap 690 has similar features and aspects to the aforementioned injection ring (such as injection ring 680), including the configuration, composition, and arrangement of the macrocell support structure in the embodiments. This is to minimize the amount of operational difference when the injection ring and injection cap are coupled or connected together during operation.

[0091] Figure 7A This is a schematic perspective view of the reflector, 700°. Figure 7B , Figure 7C and Figure 7D Each of them is along Figure 7A A schematic cross-sectional view of line DD in the diagram. Figure 7A The image shows reflector 783. In one or more embodiments that can be combined with other embodiments, components including an open microcell support structure for use with an epitaxial growth processing chamber include lamp reflectors, such as a reflector with a concave reflective surface 181 for the upper lamp module 155, a reflector with a flat reflective surface 182 for the upper lamp module 155, a reflector with a concave reflective surface 185 for the lower lamp module 145, and a reflector with a flat reflective surface 186 for the lower lamp module 145, such as... Figure 1 As shown. In one or more embodiments that can be combined with other embodiments, reflector 783 is configured as an upper reflector; in another or more embodiments, reflector 783 is configured as a lower reflector. In one or more embodiments that can be combined with other embodiments, reflector 783 further includes a reflective surface. In one or more embodiments that can be combined with other embodiments, the reflective surface is made of one or more of gold, gold alloys, silver, silver alloys, chromium, chromium alloys, aluminum, aluminum alloys, and combinations thereof. Although Figure 7A The lamp reflector shown is presented as having a distributed concave reflective surface 781 and a flat reflective surface 782. However, those skilled in the art will understand that the lamp reflector of the embodiments also includes other reflectors with different overall solid dimensions, such as, but not limited to, thickness, inner and outer circumferences, inner and outer diameters, distribution of reflector types, reflection angle and concavity, which are suitable for proper operation in a chamber used as an epitaxial growth processing chamber.

[0092] Although not shown for simplicity, in one or more embodiments that may be combined with other embodiments, reflector 783 is configured with an inlet fluid flow port. In one or more embodiments that may be combined with other embodiments, reflector 783 is configured to have both an inlet fluid flow port and an outlet fluid flow port. In both cases, the two-port configuration provides fluid connectivity to facilitate the driving of cooling fluid through the internal freestanding macrocell support structure.

[0093] One or more macrocell support structures can be used to configure reflectors used in the epitaxial growth processing chamber. In one or more embodiments that can be combined with other embodiments, reflector 783 is configured to be located in a polymer-filled, freestanding macrocell support structure configuration. In one or more embodiments that can be combined with other embodiments, lower reflector is configured to be located in a polymer-filled, freestanding macrocell support structure configuration. In one or more embodiments that can be combined with other embodiments, upper reflector is configured to be located in a polymer-filled, freestanding macrocell support structure configuration. Figure 7B As shown along the line of sight DD, the polymer-filled freestanding macrocell support structure configuration 721 illustrates a structure similar to... Figure 2C The polymer-filled independent macrocell support structure configuration 221 is composed of a macrocell support structure 701 and has a volume of internal structure 709A with thickness.

[0094] like Figure 7B As shown, the entire macrocell support structure 701 is filled with a second solid material, which is designated as second solid material 223 in Figure 2C. Figure 7B As shown, a flat reflective surface 782 is located on the inward-facing side of the polymer-filled freestanding macrocell support structure 721. In one or more embodiments that can be combined with other embodiments, the flat reflective surface is coupled or connected to the inward-facing side of the polymer-filled freestanding macrocell support structure. For example, the reflective surface is a mirror or a reflective film.

[0095] In this polymer-filled freestanding macrocell support structure configuration, the interconnecting solid supports of the macrocell support structure are made of metal. In one or more embodiments that can be combined with other embodiments, the second solid material is made of polymer.

[0096] In one or more embodiments that can be combined with other embodiments, the reflector is configured to be located in the macrocell support structure plate support configuration. In one or more embodiments that can be combined with other embodiments, the lower reflector is configured to be located in the macrocell support structure plate support configuration; in one or more embodiments that can be combined with other embodiments, the upper reflector is configured to be located in the macrocell support structure plate support configuration. Figure 7C As shown along view line DD, the plate-supported macrocell support structure 731 is illustrated by a structure similar to... Figure 2D The plate supports the macro unit support structure configuration 231, which is composed of a macro unit support structure with a volume of 709B having a thickness of internal structure.

[0097] like Figure 7C As shown, the entire macrocell support structure 701 is supported by a support plate 735, which acts as an inward-facing plate. The support plate 735 faces inward toward the process; the macrocell support structure is away from the process. Figure 7C As shown, the outward-facing side of the support plate 735 is a flat reflective surface 782. In one or more embodiments, the flat reflective surface is coupled or connected to the outer side of the support plate. For example, the reflective surface 782 is a mirror or a reflective film. In one or more embodiments that can be combined with other embodiments, the outward-facing side of the support plate is configured (e.g., through chemical treatment or mechanical polishing) such that the outward-facing side has EM reflective properties. In this case, the support plate and the reflective surface are the same; that is, a single piece of workpiece.

[0098] The support plate has a thickness. In one or more embodiments that can be combined with other embodiments, the thickness of the support plate is from about 0.05 to about 5 millimeters, such as from 0.05, 0.07, 0.1, 0.2, 0.3, 0.5, 0.7, 0.9, and 1.0 to about 1.5, 2.0, 2.5, 3.0, 3.5, 4.0, 4.5, and 5.0 millimeters (mm), including all combinations of ranges and including endpoint values. The thickness of the support plate can vary for various reasons, including but not limited to the overall mechanical strength of the reflector and the safety and confinement of the fluid handled during operation. Therefore, the thickness of the macrocell support structure will be determined as the reflector thickness minus the support plate thickness. Those skilled in the art will understand that the support plate thickness varies depending on the observation position and therefore varies from one value to another within a range based on the measurement position.

[0099] In this macrocell support structure plate configuration, the interconnecting entity supports of the macrocell support structure are made of metal. In one or more embodiments, the support plate is made of metal. In one or more embodiments that can be combined with other embodiments, the support plate is made of the same material as the interconnecting entity supports. It is also conceivable that one or both of the support plate and the interconnecting entity supports are made of different metals.

[0100] In one or more embodiments that can be combined with other embodiments, the reflector is configured to be located in the macrocell support structure mezzanine configuration. In one or more embodiments that can be combined with other embodiments, the lower reflector is configured to be located in the macrocell support structure mezzanine configuration; in one or more embodiments that can be combined with other embodiments, the upper reflector is configured to be located in the macrocell support structure mezzanine configuration. Figure 7D As shown along the line of sight DD, the mezzanine configuration 741 of the macrocell support structure 701 is illustrated by a structure similar to... Figure 2E The mezzanine macrocell support structure 241 is composed of a macrocell support structure and has a volume of internal structure 709C with thickness.

[0101] like Figure 7D As shown, the entire macrocell support structure 701 is contained between a first plate 746 and a second plate 747. The first plate 746 acts as an outward-facing plate, while the second plate 747 acts as an inward-facing plate. The second plate 747 faces inward toward the process area. Figure 7DIn this embodiment, a flat reflective surface 782 is present on the outward-facing side of the second plate 747. In one or more embodiments that can be combined with other embodiments, the flat reflective surface is coupled or connected to the outer side of the second plate. For example, the reflective surface 782 is a mirror or a reflective film. In one or more embodiments that can be combined with other embodiments, the outward-facing side of the second plate is configured (e.g., through chemical treatment or mechanical polishing) such that the outward-facing side has EM reflective properties. In this case, the second plate and the reflective surface are the same; that is, a single integrated workpiece.

[0102] The first plate has a thickness, and the second plate has a thickness. In one or more embodiments that can be combined with other embodiments, the thickness of the first plate is from about 0.05 to about 5 millimeters, such as from 0.05, 0.07, 0.1, 0.2, 0.3, 0.5, 0.7, 0.9, and 1.0 to about 1.5, 2.0, 2.5, 3.0, 3.5, 4.0, 4.5, and 5.0 millimeters (mm), including all range combinations and including endpoint values. In one or more embodiments that can be combined with other embodiments, the thickness of the second plate is from about 0.05 to about 5 millimeters, such as from 0.05, 0.07, 0.1, 0.2, 0.3, 0.5, 0.7, 0.9, and 1.0 to about 1.5, 2.0, 2.5, 3.0, 3.5, 4.0, 4.5, and 5.0 millimeters (mm), including all range combinations and including endpoint values. In one or more embodiments that can be combined with other embodiments, the first plate and the second plate have the same or similar thickness. In one or more embodiments that can be combined with other embodiments, the thickness of the first plate is greater than the thickness of the second plate. In one or more embodiments that can be combined with other embodiments, the thickness of the first plate is less than the thickness of the second plate. Thickness differences may exist between the two plates for various reasons, including but not limited to the overall mechanical strength of the reflector and the safety and confining properties of the fluids handled during operation. Therefore, the thickness of the macrocell support structure will be determined as the reflector thickness minus the sum of the thicknesses of the two plates. Those skilled in the art will understand that the thicknesses of the first and second plates vary depending on the observation position, and therefore vary from one value to another within a range based on the measurement position.

[0103] In this mezzanine configuration of the macrocell support structure, the interconnecting entity supports of the macrocell support structure are made of metal. In one or more embodiments that can be combined with other embodiments, the first plate and the second plate are made of metal. In one or more embodiments that can be combined with other embodiments, both the first plate and the second plate are made of the same material as the interconnecting entity supports. It is also conceivable that one or both of the first plate and the second plate are made of a different metal material than the interconnecting entity supports.

[0104] In one or more embodiments that can be combined with other embodiments, the lower reflector and the upper reflector have the same macrocell support structure configuration. In one or more embodiments that can be combined with other embodiments, the lower reflector and the upper reflector have different configurations. In a non-limiting example of the latter, the upper reflector is in a polymer-filled freestanding macrocell support structure configuration, while the lower reflector is in a sandwich macrocell support structure configuration. As will be understood by those skilled in the art, the selection of configuration for a given component faces numerous unique technical or financial reasons in a given situation.

[0105] Figure 8A , Figure 8B and Figure 8C These are schematic perspective views, side views, and top views of the heat shield, respectively (800). Figure 8D and Figure 8E Each is along Figure 8B A schematic cross-sectional view of line EE in the diagram. Figure 8A The image shows a heat shield 890. In one or more embodiments that can be combined with other embodiments, components including an open microcell support structure for use with an epitaxial growth processing chamber include heat shields, such as heat shield 890, which are similar to... Figure 1 The heat shield 190 of the upper lamp module 155 or the heat shield 192 of the lower lamp module 145 is shown. In one or more embodiments that can be combined with other embodiments, the heat shield is configured as an upper heat shield; in another or more embodiments, the heat shield is configured as a lower heat shield. Also shown relative to the heat shield 890 in this particular configuration is a heat shield similar to... Figure 7A The reflective surface 883 of the reflector 783. Figure 8A The illustrated embodiment of the heat shield 890 is presented as having a reflector 888 positioned along the outer surface of a cylindrical housing 891 on the top side of a bottom 894. Figure 8A and Figure 8C In this configuration, the interior 893 of the heat shield is defined by the inner surface of the housing 891. Those skilled in the art will understand that the heat shield also includes heat shields with different overall dimensions and configurations, such as, but not limited to, the cylindrical housing thickness, bottom width, circumference of the cylindrical housing and bottom, and various diameters when the reflector is positioned within the shaft hole, dimensions suitable for proper operation within a chamber used as an epitaxial growth processing chamber.

[0106] Although not shown for simplicity, in one or more embodiments that can be combined with other embodiments, the reflector is configured with an inlet fluid flow port. In one or more embodiments that can be combined with other embodiments, the reflector is configured to have both an inlet fluid flow port and an outlet fluid flow port. In both cases, the two-port configuration provides fluid connectivity to facilitate the driving of cooling fluid through the internal freestanding macrocell support structure.

[0107] One or more macrocell support structures are available for configuring heat shields used in epitaxial growth chambers. In one or more embodiments that can be combined with other embodiments, the heat shield is configured within a plate support configuration of the macrocell support structure. In one or more embodiments that can be combined with other embodiments, a lower heat shield is configured within a plate support configuration of the macrocell support structure. In one or more embodiments that can be combined with other embodiments, an upper heat shield is configured within a plate support configuration of the macrocell support structure. Figure 8D Along the middle Figure 8B As shown in the line of sight EE, the plate-supported macrocell support structure 831 is shown to be composed of similar components. Figure 2D The plate supports the macro unit support structure configuration 231, which is composed of a macro unit support structure with a volume of 809A of internal structure thickness.

[0108] like Figure 8D As shown, the entire macrocell support structure 801 is supported by a support plate 835, which acts as an outward-facing plate. The support plate 835 points inward relative to the process; the macrocell support structure is away from the process. Figure 8D As shown, a reflective surface 883 is located on the outward-facing side of the support plate 835. In one or more embodiments that can be combined with other embodiments, the reflective surface is coupled or connected to the outer side of the support plate. For example, the reflective surface 883 is a mirror or a reflective film. In one or more embodiments that can be combined with other embodiments, the outward-facing side of the support plate is configured (e.g., through chemical treatment or mechanical polishing) to have EM reflective properties. In this case, the support plate 835 and the reflective surface 883 are the same; i.e., a single piece.

[0109] The support plate has a thickness. In one or more embodiments that can be combined with other embodiments, the thickness of the support plate is from about 0.05 to about 5 millimeters, such as from 0.05, 0.07, 0.1, 0.2, 0.3, 0.5, 0.7, 0.9, and 1.0 to about 1.5, 2.0, 2.5, 3.0, 3.5, 4.0, 4.5, and 5.0 millimeters (mm), including all combinations of ranges and including endpoint values. The thickness of the support plate varies for various reasons, including but not limited to the overall mechanical strength of the reflector and the safety and confinement of the fluid handled during operation. Therefore, the thickness of the macrocell support structure will be determined as the reflector thickness minus the support plate thickness. Those skilled in the art will understand that the support plate thickness varies depending on the observation position and therefore varies from one value to another within a range based on the measurement position.

[0110] In this macrocell support structure plate configuration, the interconnecting entity support members of the macrocell support structure are made of metal. In one or more embodiments that can be combined with other embodiments, the support plate is made of metal. In one or more embodiments that can be combined with other embodiments, the support plate is made of the same material as the interconnecting entity support members. It is conceivable that one or both of the support plate and the interconnecting entities are made of different materials.

[0111] In one or more embodiments that can be combined with other embodiments, the heat shield is configured to be located in the macrocell support structure interlayer configuration. In one or more embodiments that can be combined with other embodiments, the lower heat shield is configured to be located in the macrocell support structure interlayer configuration; in one or more embodiments that can be combined with other embodiments, the upper heat shield is configured to be located in the macrocell support structure interlayer configuration. Figure 8E As shown along the line of sight EE, the mezzanine configuration 841 of the macrocell support structure 801 is illustrated by a structure similar to... Figure 2E The mezzanine macro-unit support structure 241 is composed of a macro-unit support structure and has a volume of internal structure 809B with thickness.

[0112] like Figure 8E As shown, the entire macrocell support structure 801 is contained between a first plate 846 and a second plate 847. The first plate 846 acts as an outward-facing plate, while the second plate 847 acts as an inward-facing plate. The first plate 846 points inward relative to the process. Figure 8E In this embodiment, a reflective surface 883 is present on the outward-facing side of the first plate 846. In one or more embodiments that can be combined with other embodiments, the reflective surface is coupled or connected to the outer side of the first plate. For example, the reflective surface 883 is a mirror or a reflective film. In one or more embodiments that can be combined with other embodiments, the outward-facing side of the first plate is configured (e.g., through chemical treatment or mechanical polishing) such that the outward-facing side has EM reflective properties. In this case, the first plate and the reflective surface are the same; that is, a single piece of workpiece.

[0113] The first plate has a thickness, and the second plate has a thickness. In one or more embodiments that can be combined with other embodiments, the thickness of the first plate is from about 0.05 to about 5 millimeters, such as from 0.05, 0.07, 0.1, 0.2, 0.3, 0.5, 0.7, 0.9, and 1.0 to about 1.5, 2.0, 2.5, 3.0, 3.5, 4.0, 4.5, and 5.0 millimeters (mm), including all range combinations and including endpoint values. In one or more embodiments that can be combined with other embodiments, the thickness of the second plate is from about 0.05 to about 5 millimeters, such as from 0.05, 0.07, 0.1, 0.2, 0.3, 0.5, 0.7, 0.9, and 1.0 to about 1.5, 2.0, 2.5, 3.0, 3.5, 4.0, 4.5, and 5.0 millimeters (mm), including all range combinations and including endpoint values. In one or more embodiments that can be combined with other embodiments, the first plate and the second plate have the same or similar thickness. In one or more embodiments that can be combined with other embodiments, the thickness of the first plate is greater than the thickness of the second plate. In one or more embodiments that can be combined with other embodiments, the thickness of the first plate is less than the thickness of the second plate. Thickness differences may occur between the two plates for various reasons, including but not limited to the overall mechanical strength of the reflector and the safety and confining properties of the fluids handled during operation. Therefore, the thickness of the macrocell support structure will be determined as the reflector thickness minus the sum of the thicknesses of the two plates. Those skilled in the art will understand that the thicknesses of the first and second plates vary depending on the observation position, and therefore vary from one value to another within a range based on the measurement position.

[0114] In this mezzanine configuration of the macrocell support structure, the interconnecting entity supports of the macrocell support structure are made of metal. In one or more embodiments that can be combined with other embodiments, the first plate and the second plate are made of metal. In one or more embodiments that can be combined with other embodiments, both the first plate and the second plate are made of the same material as the interconnecting entity supports. It is conceivable that one or both of the first plate and the second plate are made of a different metal material than the interconnecting entity supports.

[0115] In one or more embodiments, the lower and upper thermal shields may have the same macrocell support structure configuration; in another or more embodiments, the lower and upper thermal shields may have different constructions. As will be understood by those skilled in the art, the selection of configuration for a given component faces numerous unique technical or financial reasons, which are unique to the given situation.

[0116] Figure 9A , Figure 9B and Figure 9C These are schematic drawings of the top view, bottom view, and side view 900 of the cone reflector, respectively. Figure 9D and Figure 9EThey are along Figure 9C A schematic cross-sectional view of line FF in the diagram. Figures 9A to 9C The image shows a conical reflector. In one or more embodiments that can be combined with other embodiments, components including an open microcell support structure for use with an epitaxial growth processing chamber include conical reflectors, such as conical reflector 994, which is similar to... Figure 1 The conical reflector 194 is shown. The conical reflector has a bottom 1094, the upper surface of which has a flat reflective surface 982 for reflecting EM radiation upwards into the epitaxial growth chamber. The outward-facing sides of the neck 1096 and top 1097 reflect EM radiation back into the epitaxial growth chamber. The top 1097, neck 1096, and bottom 1094 define an axial aperture 1093 along their inner surfaces, a portion of the lower viewing window (such as...) Figure 1 The lower viewing window 110 shown passes through the shaft hole 1093. Although Figures 9A to 9C The illustrated embodiment of the conical reflector is presented as a combination of a heat shield and a reflector; however, those skilled in the art will understand that the embodiment of "conical reflector" is one or both of the heat shield and the reflector, and the embodiment also includes conical reflectors with different overall dimensions and configurations, such as, but not limited to, various heights and shapes of the neck and top, and various diameters of the bottom when only a portion of the outer surface is reflective, dimensions suitable for proper operation in a chamber used as an epitaxial growth processing chamber.

[0117] Although not shown for simplicity, in one or more embodiments that can be combined with other embodiments, the conical reflector is configured with an inlet fluid flow port. In one or more embodiments that can be combined with other embodiments, the conical reflector is configured to have both an inlet fluid flow port and an outlet fluid flow port. In both cases, the two-port configuration provides fluid connectivity to facilitate the driving of cooling fluid through the internal freestanding macrocell support structure.

[0118] One or more macrocell support structures can be used to configure a conical reflector for use in an epitaxial growth processing chamber. In one or more embodiments that can be combined with other embodiments, the conical reflector is configured within a plate support configuration of the macrocell support structure. In one or more embodiments that can be combined with other embodiments, the conical reflector is configured within a plate support configuration of the macrocell support structure; in one or more embodiments that can be combined with other embodiments, an upper thermal shield is configured within a plate support configuration of the macrocell support structure. Figure 8D Along the middle Figure 9C As shown in the line of sight FF, the plate-supported macrocell support structure 931 shows the volume of the internal structure 909A, which has a volume similar to that of the internal structure 909A. Figure 2DThe thickness of the macro-unit support structure configured with plate support macro-unit support structure 231.

[0119] like Figure 9D As shown, the entire macrocell support structure 901 is supported by a support plate 935, which acts as an inward-facing plate. The support plate 935 faces inward toward the process; the macrocell support structure points toward the shaft hole 1093. Figure 9D As shown, the outward-facing side of the support plate 935 is a reflective surface 983. In one or more embodiments that can be combined with other embodiments, the reflective surface may be coupled or connected to the outer side of the support plate. For example, the reflective surface is a mirror or a reflective film. In one or more embodiments that can be combined with other embodiments, the outward-facing side of the support plate is configured (e.g., through chemical treatment or mechanical polishing) such that the outward-facing side has EM reflective properties. In this case, the support plate and the reflective surface are the same; that is, a single piece of workpiece.

[0120] The support plate has a thickness. In one or more embodiments that can be combined with other embodiments, the thickness of the support plate is from about 0.05 to about 5 millimeters, such as from 0.05, 0.07, 0.1, 0.2, 0.3, 0.5, 0.7, 0.9, and 1.0 to about 1.5, 2.0, 2.5, 3.0, 3.5, 4.0, 4.5, and 5.0 millimeters (mm), including all combinations of ranges and including endpoint values. The thickness of the support plate varies for various reasons, including but not limited to the overall mechanical strength of the reflector and the safety and confinement of the fluid handled during operation. Therefore, the thickness of the macrocell support structure will be determined as the reflector thickness minus the support plate thickness. Those skilled in the art will understand that the support plate thickness varies depending on the observation position and therefore varies from one value to another within a range based on the measurement position.

[0121] In this plate support configuration of the macrocell support structure, the interconnecting entity support members of the macrocell support structure are made of metal. In one or more embodiments that can be combined with other embodiments, the support plate is made of metal. In one or more embodiments that can be combined with other embodiments, the support plate is made of the same material as the interconnecting entity support members. It is conceivable that any one or both of the support plate and the interconnecting entity support members are made of a different metallic material.

[0122] In one or more embodiments that can be combined with other embodiments, the conical reflector is configured to be located in a macrocell support structure mezzanine configuration. For example... Figure 9E As shown along the line of sight FF, the mezzanine configuration 941 of the macrocell support structure 901 is illustrated by a structure similar to... Figure 2E The mezzanine macrocell support structure 241 is composed of a macrocell support structure and has a volume of internal structure 909B with thickness.

[0123] like Figure 9E As shown, the entire macrocell support structure 901 is contained between a first plate 946 and a second plate 947. The first plate 946 acts as an inward-facing plate, while the second plate 947 acts as an outward-facing plate. The first plate 946 faces the process side; the second plate faces the shaft hole 1093. Figure 9E In this embodiment, a reflective surface 983 is present on the outward-facing side of the first plate 946. In one or more embodiments that can be combined with other embodiments, the reflective surface is coupled or connected to the outer side of the first plate. For example, the reflective surface 983 is a mirror or a reflective film. In one or more embodiments that can be combined with other embodiments, the outward-facing side of the first plate is configured (e.g., through chemical treatment or mechanical polishing) such that the outward-facing side has EM reflective properties. In this case, the first plate and the reflective surface are the same; that is, a single piece of workpiece.

[0124] The first plate has a thickness, and the second plate has a thickness. In one or more embodiments that can be combined with other embodiments, the thickness of the first plate is from about 0.05 to about 5 millimeters, such as from 0.05, 0.07, 0.1, 0.2, 0.3, 0.5, 0.7, 0.9, and 1.0 to about 1.5, 2.0, 2.5, 3.0, 3.5, 4.0, 4.5, and 5.0 millimeters (mm), including all range combinations and including endpoint values. In one or more embodiments that can be combined with other embodiments, the thickness of the second plate is from about 0.05 to about 5 millimeters, such as from 0.05, 0.07, 0.1, 0.2, 0.3, 0.5, 0.7, 0.9, and 1.0 to about 1.5, 2.0, 2.5, 3.0, 3.5, 4.0, 4.5, and 5.0 millimeters (mm), including all range combinations and including endpoint values. In one or more embodiments that can be combined with other embodiments, the first plate and the second plate have the same or similar thickness. In one or more embodiments that can be combined with other embodiments, the thickness of the first plate is greater than the thickness of the second plate. In one or more embodiments that can be combined with other embodiments, the thickness of the first plate is less than the thickness of the second plate. Thickness differences may exist between the two plates for various reasons, including but not limited to the overall mechanical strength of the reflector and the safety and confining properties of the fluids handled during operation. Therefore, the thickness of the macrocell support structure will be determined as the reflector thickness minus the sum of the thicknesses of the two plates. Those skilled in the art will understand that the thicknesses of the first and second plates vary depending on the observation position, and thus vary from one value to another within a range based on the measurement position.

[0125] As understood by those skilled in the art, one or more other components of the epitaxial growth chamber are configured using one, some, or all of the aforementioned macrocell support structures. Similarly, alternative configurations of open microcell support structures are also envisioned and anticipated.

[0126] In one or more embodiments that may be combined with other embodiments, the epitaxial growth chamber may include a component having a macrocell support structure configured with interconnecting entity supports defining one or more fluidly communicating orifices and inlet fluid flow ports configured to provide fluid communication between the macrocell support structure and the exterior of the epitaxial growth chamber.

[0127] In one or more embodiments that can be combined with other embodiments, the components of the epitaxial growth chamber are a base plate, an exhaust cap, an injection ring, an injection cap, a lower reflector, an upper reflector, a lower heat shield, an upper heat shield, a conical reflector, or a combination of the above.

[0128] In one or more embodiments that may be combined with other embodiments, the interconnecting entity support of the macrocell support structure of the epitaxial growth processing chamber component includes a metal, ceramic or glass material, a polymer material, or a combination of the above.

[0129] In one or more embodiments that may be combined with other embodiments, the porosity of the macrocell support structure of the component is configured to be from about 70% to about 98% of the volume of the macrocell support structure.

[0130] In one or more embodiments that may be combined with other embodiments, the macrocell support structure of the components of the epitaxial growth processing chamber has pores configured with an average pore size of about 20 micrometers to about 5000 micrometers.

[0131] In one or more embodiments that may be combined with other embodiments, the macrocell support structure of the components of the epitaxial growth processing chamber is configured to have a permeability of about 70% to about 100% of the porosity of the macrocell support structure.

[0132] In one or more embodiments that can be combined with other embodiments, the macrocell support structure of the component is configured as a freestanding macrocell support structure, a plate-supported macrocell support structure, a sandwich macrocell support structure, a surface-sealed macrocell support structure, and a solid polymer-filled macrocell support structure, or a combination thereof.

[0133] In one or more embodiments that can be combined with other embodiments, the components of the epitaxial growth chamber are in an integral configuration.

[0134] In one or more embodiments that may be combined with other embodiments, the components of the epitaxial growth processing chamber further include an outlet fluid flow port configured to provide fluid communication between the macrocell support structure and the external fluid flow wall.

[0135] In one or more embodiments that may be combined with other embodiments, the components of the epitaxial growth processing chamber further include a fluid flow baffle.

[0136] In one or more embodiments that can be combined with other embodiments, the components of the epitaxial growth processing chamber include a reflective surface.

[0137] In one or more embodiments that can be combined with other embodiments, the component having a macrocell support structure configuration filled with a solid polymer further includes a thermosetting polymer, poly(ethyl etherketone); PEEK, polyimide, or a combination of the foregoing.

[0138] In one or more embodiments that may be combined with other embodiments, the component having a plate support configuration includes a support plate made of a material similar to that of the interconnecting entity support.

[0139] In one or more embodiments that can be combined with other embodiments, the mezzanine configuration includes a first plate and a second plate. Each plate includes a material similar to that of the interconnecting entity support member.

[0140] In one or more embodiments that can be combined with other embodiments, the sandwich configuration includes a first plate and a second plate. The first plate and the second plate each comprise materials different from each other.

[0141] In one or more embodiments that may be combined with other embodiments, the component configured for the epitaxial growth processing chamber has a macrocell support structure configured with interconnecting entity supports that define one or more fluidly connected orifices and inlet fluid flow ports configured to provide fluid communication between the macrocell support structure and the exterior of the component.

[0142] In one or more embodiments that can be combined with other embodiments, the component is a base plate, an exhaust cap, an injection ring, an injection cap, a lower reflector, an upper reflector, a lower heat shield, an upper heat shield, a conical reflector, or a combination of the above.

[0143] In one or more embodiments that may be combined with other embodiments, the interconnecting entity support of the macrocell support structure of the component includes a metal, ceramic or glass material, a polymer material, or a combination of the above.

[0144] In one or more embodiments that may be combined with other embodiments, the porosity of the macrocell support structure of the component is configured to be from about 70% to about 98% of the volume of the macrocell support structure.

[0145] In one or more embodiments that may be combined with other embodiments, the macrocell support structure of the component has pores configured with an average pore size of about 20 micrometers to about 5000 micrometers.

[0146] In one or more embodiments that may be combined with other embodiments, the macrocell support structure of the component is configured to have a permeability of about 70% to about 100% of the porosity of the macrocell support structure.

[0147] In one or more embodiments that can be combined with other embodiments, the macrocell support structure of the component is configured as a freestanding macrocell support structure, a plate-supported macrocell support structure, a sandwich macrocell support structure, a surface-sealed macrocell support structure, and a solid polymer-filled macrocell support structure, or a combination thereof.

[0148] In one or more embodiments that can be combined with other embodiments, the components are in an integral configuration.

[0149] In one or more embodiments that may be combined with other embodiments, the component further includes an outlet fluid flow port configured to provide fluid communication between the macrocell support structure and the exterior of the component and the fluid flow wall.

[0150] In one or more embodiments that may be combined with other embodiments, the component further includes a fluid flow baffle.

[0151] In one or more embodiments that may be combined with other embodiments, the component includes a reflective surface.

[0152] In one or more embodiments that can be combined with other embodiments, the component having a macrocell support structure configuration filled with a solid polymer further includes a thermosetting polymer, poly(ethyl etherketone); PEEK, polyimide, or a combination of the foregoing.

[0153] In one or more embodiments that may be combined with other embodiments, the component having a plate support configuration includes a support plate made of a material similar to that of the interconnecting entity support.

[0154] In one or more embodiments that can be combined with other embodiments, the mezzanine configuration includes a first plate and a second plate. Each plate includes a material similar to that of the interconnecting entity support member.

[0155] In one or more embodiments that can be combined with other embodiments, the sandwich configuration includes a first plate and a second plate. The first plate and the second plate each comprise materials different from each other.

[0156] Although this specification contains numerous specific implementation details, it should not be construed as a limitation on the scope of the claims, but rather as a description of specific features of particular embodiments. Some features described in the context of individual embodiments may also be implemented in combination in a single embodiment. Conversely, multiple features described herein in the context of a single embodiment may also be implemented individually or in any suitable sub-combination in multiple embodiments. Furthermore, although the features described above may be described as functioning in certain combinations, and even initially claimed to be so, in some cases one or more features of a claimed combination may be removed from that combination, and a claimed combination may indicate a sub-combination or a variation of a sub-combination.

[0157] This document has described specific embodiments of the subject matter. It will be apparent to those skilled in the art that other embodiments, modifications, and substitutions of the described embodiments are within the scope of the appended claims. Although operations are described in a specific order in the drawings or claims, this should not be construed as meaning that these operations must be performed in the specific order or sequence shown, or that all shown operations (some operations may be considered optional) must be performed to achieve the desired result. In some cases, multiplexing or parallel processing (or a combination of multiplexing and parallel processing) may be advantageous and should be implemented as appropriate.

[0158] Furthermore, the separation or integration of various system modules and components in the aforementioned implementations should not be construed as requiring separation or integration in all implementations. It should be understood that the described program components and systems can typically be integrated together in a single software product or packaged into multiple software products.

[0159] Therefore, the foregoing examples do not limit or restrict this disclosure. Other changes, substitutions, and modifications are possible without departing from the spirit and scope of this disclosure.

[0160] Although the steps in the embodiments of the method or process are presented and described sequentially, those skilled in the art will recognize that some or all of the steps may be performed in a different order, may be combined or omitted, and some or all of the steps may be performed in parallel. These steps may be performed actively or passively. The method or process may be repeated or extended to support multiple components or multiple users in a field environment. Therefore, the scope should not be considered limited to a specific arrangement of the steps shown in the flowchart or diagram.

[0161] Unless otherwise defined, all technical and scientific terms used have the same meaning as commonly understood by one of ordinary skill in the art to which these systems, apparatuses, methods, processes and compositions pertain.

[0162] The singular forms “a,” “an,” and “the” include multiple indicators unless the context clearly specifies otherwise. In the claims, unless specifically stated otherwise, the singular form of an element does not mean “one and only one,” but rather “one or more.” Unless specifically stated otherwise, the term “some” means one or more.

[0163] Embodiments of this disclosure may be suitably “including,” “consisting of,” or “substantially composed of the disclosed limiting features,” and may be implemented without any undisclosed limiting features. As used herein and in the claims of the appended claims, the words “comprising,” “having,” and “including,” and all their grammatical variations, are intended to have an open, non-limiting meaning that does not exclude additional elements or steps.

[0164] "Optional" and "optionally" mean that the material, event, or situation described below may or may not exist or occur. The description includes both the possibility that the material, event, or situation has occurred and the possibility that it has not occurred.

[0165] The term "determine" as used encompasses a variety of actions. For example, "determine" can include calculation, operation, processing, deduction, investigation, searching (e.g., searching in a table, database, or other data structure), and ascertainment. Furthermore, "determine" can include receiving (e.g., receiving information) and accessing (e.g., accessing data in memory). Additionally, "determine" can include resolving, selecting, choosing, and establishing.

[0166] When the terms “approximately” or “about” are used, the term can indicate a difference in values ​​that can be as high as ±10%, up to 5%, up to 2%, up to 1%, up to 0.5%, up to 0.1%, or up to 0.01%.

[0167] A range can be expressed as from about one particular value to about another particular value, including those values. When expressing such a range, it should be understood that another embodiment is from one particular value to another particular value, together with all particular values ​​or combinations thereof within that range.

[0168] Terms such as “first” and “second” are used arbitrarily and are intended only to distinguish two or more components of a system, apparatus, or assembly. It should be understood that the terms “first” and “second” have no other purpose and are not part of the component names or descriptions, nor do they necessarily define the relative positions or orientations of the components. Furthermore, it should be understood that the mere use of the terms “first” and “second” does not require the presence of any “third” component, although such a possibility is considered within the scope of the various embodiments described.

[0169] Although only a few exemplary embodiments have been described in detail, those skilled in the art will readily understand that many modifications may be made to the exemplary embodiments without substantially departing from the scope of the disclosure. Therefore, all such modifications are intended to be included within the scope of this disclosure as defined in the appended claims. In the claims, the means plus function clause is intended to cover structures described as performing the function, and not only structural equivalents but also equivalent structures. For example, although nails and screws are not structurally equivalent because nails have a cylindrical surface for securing wooden parts together and screws have a helical surface, in the context of fastening wooden parts, nails and screws can be equivalent structures. The applicant’s explicit intent is not to invoke 35 USC § 112(f) to impose any limitation on any claim unless the term “means” and related function are expressly used in the claims.

[0170] The following claims are not intended to limit the embodiments provided, but are intended to provide the full scope consistent with the language used in the claims.

Claims

1. An epitaxial growth processing chamber, comprising: Components, including: Macrocell support structure, including interconnected solid support members defining fluid communication orifices; and An inlet fluid flow port is configured to provide fluid communication between the macrocell support structure and the exterior of the epitaxial growth processing chamber.

2. The epitaxial growth processing chamber as claimed in claim 1, wherein the component is a base plate, an exhaust cover, an injection ring, an injection cover, a lower reflector, an upper reflector, a lower heat shield, an upper heat shield, a conical reflector, or a combination thereof.

3. The epitaxial growth processing chamber of claim 1, wherein the interconnecting entity support of the macrocell support structure of the component comprises a metal, ceramic or glass material, a polymer material, or a combination thereof.

4. The epitaxial growth processing chamber of claim 1, wherein the porosity of the macrocell support structure of the component is about 70% to about 98% of the volume of the macrocell support structure.

5. The epitaxial growth processing chamber of claim 1, wherein the pores of the macrocell support structure of the component are configured to have an average pore size of about 20 micrometers to about 5000 micrometers.

6. The epitaxial growth processing chamber of claim 1, wherein the macrocell support structure of the component is configured to have a permeability of about 70% to about 100% of the pores of the macrocell support structure.

7. The epitaxial growth processing chamber of claim 1, wherein the configuration of the macrocell support structure of the component is a freestanding macrocell support structure configuration, a plate-supported macrocell support structure configuration, a sandwich macrocell support structure configuration, a surface-sealed macrocell support structure configuration, or a solid polymer-filled macrocell support structure configuration.

8. The epitaxial growth processing chamber as claimed in claim 7, wherein the component is a one-piece component.

9. The epitaxial growth processing chamber of claim 1, wherein the component further includes an outlet fluid flow port and a fluid flow wall.

10. The epitaxial growth processing chamber of claim 9, wherein the component further comprises a fluid flow baffle.

11. The epitaxial growth processing chamber of claim 1, wherein the component further comprises a reflective surface.

12. The epitaxial growth processing chamber of claim 1, wherein the component is configured in a solid polymer-filled macrocell support structure, the solid polymer-filled macrocell support structure comprising a thermosetting polymer, poly(ethyl ether ketone) (PEEK), polyimide, or a combination thereof.

13. The epitaxial growth processing chamber of claim 1, wherein the component is in a plate-supported configuration, the plate-supported configuration including a support plate comprising a material similar to that of the interconnecting entity support.

14. The epitaxial growth processing chamber of claim 1, wherein the component is in a sandwich configuration, the sandwich configuration comprising a first plate comprising a first material and a second plate comprising a second material, wherein each of the first material and the second material is a material similar to the material of the interconnecting entity support.

15. The epitaxial growth processing chamber of claim 1, wherein the component is in a sandwich configuration, the sandwich configuration comprising a first plate containing a first material and a second plate containing a second material, and wherein the first material and the second material are different.

16. A component configured for an epitaxial growth processing chamber, comprising: Macrocell support structure, including interconnected solid support members that define fluid communication orifices; and An inlet fluid flow port is configured to provide fluid communication between the macrocell support structure and the exterior of the component.

17. The component of claim 16, wherein the component is a base plate, an exhaust cap, an injection ring, an injection cap, a lower reflector, an upper reflector, a lower heat shield, an upper heat shield, a conical reflector, or a combination thereof.

18. The element of claim 16, wherein the configuration of the macrocell support structure of the component is a freestanding macrocell support structure configuration, a plate-supported macrocell support structure configuration, a sandwich macrocell support structure configuration, a surface-sealed macrocell support structure configuration, or a solid polymer-filled macrocell support structure configuration.

19. A component configured for an epitaxial growth processing chamber, comprising: Macrocell support structure, including interconnected solid support members that define fluid communication orifices; An inlet fluid flow port is configured to provide fluid communication between the macrocell support structure and the exterior of the component; and An outlet fluid flow port is configured to provide fluid communication between the macrocell support structure and the exterior of the component and the fluid flow wall.

20. The element of claim 19, wherein the component further comprises a fluid flow baffle.

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