Automatic feeding and discharging equipment for microwave chip production

Abstract

The invention discloses automatic feeding and discharging equipment for microwave chip production, relates to the technical field of feeding and discharging, and aims to solve the technical problems that tiny dust particles are easily generated when parts in a mechanical arm move, and the dust particles easily cause short circuit, open circuit or reduction of insulation performance of chips. A wafer grabbing assembly is arranged at the executing end of the mechanical arm body and composed of a vacuum suction cup assembly, an outer-layer air curtain dust blocking assembly, an inner-layer cyclone dust cleaning assembly, a dust suction assembly and a functional column, the top of the vacuum suction cup assembly is connected with the executing end of the mechanical arm body through the functional column, and the outer-layer air curtain dust blocking assembly is arranged above the vacuum suction cup assembly. The inner-layer cyclone dust cleaning assembly is arranged at the bottom of the vacuum suction cup assembly, and the dust suction assembly is arranged above the outer-layer air curtain dust blocking assembly. The vacuum chuck assembly has the advantages that the double-layer protection effect is achieved through double-layer airflow, and the cleanliness of the environment below the vacuum chuck assembly is greatly improved.

Description

Technical Field

[0001] This invention relates to the field of loading and unloading technology, and more specifically, to an automated loading and unloading device for microwave chip production. Background Technology

[0002] Microwave chips typically refer to microwave radio frequency integrated circuit chips, which are electronic components that integrate microwave and radio frequency technologies onto a tiny chip. They have wide applications in wireless communication, radar, satellite communication, and other fields. The photolithography process in microwave chip production is a key step in the entire manufacturing process. Its main purpose is to transfer the designed microwave chip circuit pattern to the surface of a semiconductor wafer. Photolithography technology can accurately form various complex pattern structures, such as transistors, capacitors, inductors, interconnects, and other microwave circuit elements, on the semiconductor substrate or dielectric layer of the chip according to the pre-designed layout, thereby determining the basic circuit architecture and functional layout of the chip. In large-scale microwave chip production, the photolithography process requires handling a large number of wafers. Vacuum chuck-type loading and unloading devices are typically used for loading and unloading operations. The vacuum chuck generates negative pressure to adsorb the wafers, and a robotic arm removes the wafers from the previous process equipment and places them on the worktable of the photolithography equipment for processing. After processing, the silicon wafers are removed and transferred to the next process. The robotic arm can perform automated loading and unloading operations according to a preset program, ensuring the continuity and stability of the production process.

[0003] The photolithography process in microwave chip manufacturing requires a dust-free environment. Even tiny dust particles falling onto the wafer surface can cause defects in the photolithographic pattern, such as short circuits or open circuits, affecting chip performance and yield. However, during the loading and unloading operations of vacuum chuck-type loading and unloading devices, the movement of components within the robotic arm generates friction, which easily produces tiny dust particles. If these particles detach and adhere to the wafer surface, they can create defects during photolithography, potentially causing short circuits, open circuits, or reduced insulation performance. Therefore, we propose an automated loading and unloading device for microwave chip manufacturing. Summary of the Invention

[0004] The purpose of this invention is to provide an automated loading and unloading device for microwave chip production, in order to solve the technical problem that tiny dust particles are easily generated when the components inside the robotic arm move, which can easily cause short circuits, open circuits or reduce the insulation performance of the chip.

[0005] To solve the above-mentioned technical problems, the present invention provides the following technical solution: an automated loading and unloading device for microwave chip production, comprising a robotic arm body, wherein a wafer gripping assembly is arranged at the execution end of the robotic arm body; wherein the wafer gripping assembly consists of a vacuum suction cup assembly, an outer air curtain dust blocking assembly, an inner cyclone dust removal assembly, a dust suction assembly, and a functional column; the top of the vacuum suction cup assembly is connected to the execution end of the robotic arm body through the functional column, the outer air curtain dust blocking assembly is arranged above the vacuum suction cup assembly, the inner cyclone dust removal assembly is arranged at the bottom of the vacuum suction cup assembly, and the dust suction assembly is arranged at the bottom of the inner air curtain dust blocking assembly. Above the outer air curtain dust blocking assembly; the vacuum suction cup assembly is used to cooperate with the robotic arm body to perform automated loading and unloading operations on wafers; the outer air curtain dust blocking assembly is used to continuously blow high-speed airflow around the vacuum suction cup assembly to form an air curtain-like protective layer, preventing external dust particles from entering below the vacuum suction cup assembly; the inner cyclone dust cleaning assembly is used to continuously blow swirling airflow below the vacuum suction cup assembly to form a cyclone-like protective layer, cleaning the dust particles below the vacuum suction cup assembly; the dust suction assembly is used to suction out dust particles generated during the movement of the robotic arm body above.

[0006] Preferably, the vacuum suction cup assembly includes a fixed circular plate connected to the bottom of the functional column. Four suction cup bodies are arranged on the bottom surface of the fixed circular plate, and the four suction cup bodies are arranged in a four-corner orientation. The top of the suction cup bodies penetrates the top surface of the fixed circular plate. A main air pipe is arranged above the fixed circular plate. One end of the main air pipe is connected to an external vacuum generator through an external hose. The other end of the main air pipe is connected to two symmetrically arranged branch air pipes. The output ends of the branch air pipes are connected to two symmetrically arranged suction cup air pipes, and the output ends of the suction cup air pipes are connected to the top of the suction cup body.

[0007] Preferably, the functional column is provided with a first transfer chamber and a second transfer chamber, the first transfer chamber is arranged above the second transfer chamber, and the bottom of the second transfer chamber is connected to the inner cyclone dust removal component.

[0008] Preferably, the outer air curtain dust-blocking assembly includes an air blowing pipe communicating with the inner cavity of the first transfer chamber. The air inlet end of the air blowing pipe is connected to an external air supply system via an external hose. A guide plate is connected to the outer circumference of the functional column. A flow divider is connected below the guide plate. Multiple connecting pipes are connected to the bottom of the flow divider. An air blowing ring plate is connected to the output end of the connecting pipe. The inner sidewall of the flow divider is connected to the inner sidewall of the air blowing ring plate via multiple fixing brackets. The bottom surface of the fixing brackets is connected to the top surface of the fixing circular plate. The inner cavity of the guide plate communicates with the inner cavity of the first transfer chamber. The inner cavity of the guide plate communicates with the inner cavity of the flow divider. The inner cavity of the flow divider communicates with the inner cavity of the connecting pipe. The inner cavity of the connecting pipe communicates with the inner cavity of the air blowing ring plate.

[0009] Preferably, the guide plate is composed of multiple trapezoidal plates and a ring frame. The multiple trapezoidal plates are arranged in a ring array on the top of the ring frame. The inner cavity of the first transfer chamber is connected to the inner cavity of the ring frame through the inner cavities of the multiple trapezoidal plates. The inner cavity of the ring frame has a circular ring structure. The top of the diverter plate is arranged in the inner cavity of the ring frame. The diverter plate has multiple diverting channels inside. The inner cavity of the ring frame is connected to the inner cavity of the connecting pipe through the multiple diverting channels. The sidewall of the air blowing ring plate is set as an inclined surface. The air blowing ring plate has multiple air blowing channels inside that are connected to the inner cavity of the connecting pipe. The air blowing channels have an inclined trapezoidal structure.

[0010] Preferably, the inner cyclone dust removal assembly includes a second air blowing pipe communicating with the inner cavity of the second transfer chamber, and the air inlet end of the second air blowing pipe is connected to an external air supply system through an external hose; the inner cyclone dust removal assembly also includes an air hood rotatably connected to the bottom of the functional column, the air hood having multiple vortex blades arranged inside, the top of the multiple vortex blades being connected to a conical block, an airflow channel being formed between every two vortex blades, and an arc-shaped air blowing pipe being connected to the output end of the airflow channel, the arc-shaped air blowing pipe being arranged on the bottom surface of the air hood.

[0011] Preferably, a support ring plate is connected to the outer circumferential wall at the bottom of the functional column. A groove is formed on the top surface of the support ring plate, and multiple rolling balls are arranged in the groove. A movable groove is formed on the inner side wall of the air hood, which is in clearance fit with the support ring plate. The support ring plate is arranged in the movable groove. A groove is formed on the top surface of the movable groove, which is symmetrical to the structure of the first groove. The rolling balls are arranged in the second groove. The air hood rotates with the support ring plate through the multiple rolling balls.

[0012] Preferably, the arc-shaped air blowing pipe is an arc-shaped pipe, and there are multiple arc-shaped air blowing pipes arranged in a circular array on the bottom surface of the air cover. The inner cavity of the arc-shaped air blowing pipe has a constricted structure towards the output end.

[0013] Preferably, the dust collection assembly includes a dust collection hood connected to the circumferential sidewall of the frame, a guide hood connected to the inner sidewall of the dust collection hood, a dust inlet channel formed between the dust collection hood and the guide hood, an air suction pipe connected to the outer sidewall of the dust collection hood, the inner cavity of the air suction pipe communicating with the inner cavity of the dust inlet channel, and the other end of the air suction pipe being connected to an external dust collection device via an external hose.

[0014] Preferably, the main air pipe is arranged between the two trapezoidal plates and extends above the dust collection assembly, the first air blowing pipe is arranged above the dust collection assembly, and the second air blowing pipe is arranged between the other two trapezoidal plates and extends above the dust collection assembly.

[0015] Compared with the prior art, the beneficial effects of the present invention are: 1. This invention creates a dual-layer airflow effect for the vacuum suction cup assembly by designing an outer air curtain dust-blocking component and an inner cyclone dust-removing component. The outer air curtain dust-blocking component continuously blows out high-speed airflow around the vacuum suction cup assembly, forming an air curtain-like protective layer that prevents external dust particles from entering below the vacuum suction cup assembly. The inner cyclone dust-removing component continuously blows out swirling airflow below the vacuum suction cup assembly, forming a cyclone-like protective layer that provides clean air below the vacuum suction cup assembly and helps remove any small amount of dust particles that may enter below the vacuum suction cup assembly. The dual-layer airflow effect reduces the probability of tiny dust particles that may be generated when the components inside the robotic arm move and fall onto the wafer below the vacuum suction cup assembly, greatly improving the cleanliness of the environment below the vacuum suction cup assembly.

[0016] 2. This invention further designs the guide plate as multiple trapezoidal plates and frames arranged in a ring array. When the high-speed airflow is blown into the inner cavity of the guide plate from the first transfer chamber, the airflow can be evenly distributed by the inner cavities of the multiple trapezoidal plates arranged in a ring array. This makes the airflow more uniform after flowing into the inner cavity of the frame, and then evenly blown into the multiple diversion channels of the diversion plate through the inner cavity of the frame. The airflow is then transported to the corresponding connecting pipes and blowing channels through the diversion channels. The airflow is blown out through the blowing channels. The airflow is limited by the inclined trapezoidal structure of the blowing channels, which makes the airflow diffuse after being blown out of the blowing channels. Furthermore, the airflow blown out by each two adjacent blowing channels intersects with each other, so that the airflow blown out by all the blowing channels forms a conical airflow layer with respect to the outer circumference of the fixed circular plate. This creates an enveloping effect on the fixed circular plate, effectively preventing external dust particles from approaching the bottom of the fixed circular plate, and further improving the dust isolation effect of the outer air curtain dust blocking component.

[0017] 3. The present invention also delivers high-speed airflow into the second air blowing pipe through an external air supply system. The high-speed airflow is blown into the air hood through the inner cavity of the second transfer chamber. The high-speed airflow impacts multiple vortex blades, exerting a force on the vortex blades and driving them to rotate. This further drives the air hood to rotate around the bottom of the functional column, causing the arc-shaped air blowing pipe to rotate accordingly. At the same time, the high-speed airflow is blown into the arc-shaped air blowing pipe through the airflow channel and blown out through the output port of the rotating arc-shaped air blowing pipe, forming a swirling airflow. The swirling airflow can sweep and push the wafer surface below the inner cyclone dust removal component, sweeping away any dust particles that may be present and maintaining the cleanliness of the wafer surface.

[0018] 4. The present invention also designs the inner cavity of the arc-shaped air blowing pipe as a constricted structure towards the output end, so that when the high-speed airflow blows out of the inner cavity of the arc-shaped air blowing pipe towards the output port, the channel gradually narrows. Under the condition that the airflow rate remains unchanged, the gas flow velocity blown out of the arc-shaped air blowing pipe will be accelerated, so that the swirling airflow formed has a strong flow velocity, which further enhances the sweeping and pushing force on the wafer surface below the inner cyclone dust removal component, and can effectively clean up any dust particles that may be present.

[0019] 5. The present invention also continuously sucks air from the suction pipe through an external dust collection device. The suction pipe sucks air from the dust collection hood and guide hood through the dust inlet channel, so that dust particles that may be generated when the main body of the robotic arm moves above the dust collection component are sucked away by the dust inlet channel, achieving a self-cleaning effect and further ensuring a high degree of cleanliness of the environment during the loading and unloading process of the main body of the robotic arm. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the overall structure of the present invention; Figure 2 This is a schematic diagram of the wafer gripping component structure of the present invention; Figure 3 This is a schematic diagram of the disassembled structure of the wafer gripping component of the present invention; Figure 4 This is a schematic diagram of the vacuum suction cup assembly structure of the present invention; Figure 5 This is a schematic diagram of the outer air curtain dust-blocking component structure of the present invention; Figure 6 This is a cross-sectional view of the outer air curtain dust-blocking component of the present invention; Figure 7 This is a schematic diagram of the cross-sectional structure of the first transfer chamber and the second transfer chamber of the present invention; Figure 8 This is a schematic diagram of the cross-sectional structure of the air-blowing ring plate of the present invention; Figure 9 This is a schematic diagram of the inner cyclone dust removal component structure of the present invention; Figure 10This is a cross-sectional view of the inner cyclone dust removal component of the present invention; Figure 11 This is a schematic diagram of the disassembled structure of the air cover and support ring plate of the present invention; Figure 12 This is a schematic diagram of the dust collection component structure of the present invention.

[0021] Explanation of the labels in the diagram: 1. Robotic arm body; 2. Wafer gripping assembly; 3. Vacuum suction cup assembly; 4. Outer layer air curtain dust blocking assembly; 5. Inner layer cyclone dust removal assembly; 6. Dust collection assembly; 7. Functional column; 301. Fixed circular plate; 302. Suction cup body; 303. Main air pipe; 304. Branch air pipe; 305. Suction cup air pipe; 401. Air blowing pipe 1; 402. Guide plate; 4021. Trapezoidal plate; 4022. Ring frame; 403. Diverter plate; 4031. Diverter channel; 404. Connecting pipe; 405. Air blowing ring plate; 4051. Air blowing channel; 406. Fixing frame; 501. Air blowing pipe II; 502. Air hood; 5021. Movable groove; 503. Vortex blade; 504. Conical block; 505. Arc-shaped air blowing pipe; 601. Dust collection hood; 602. Guide hood; 603. Dust inlet channel; 604. Suction pipe; 701. First transfer chamber; 702. Second transfer chamber; 703. Support ring plate; 704. Rolling ball. Detailed Implementation

[0022] Example 1, as Figures 1 to 12 As shown, the present invention relates to an automated loading and unloading equipment for microwave chip production, including a robotic arm body 1, and a wafer gripping component 2 arranged at the execution end of the robotic arm body 1. The robotic arm body 1 is an existing automated loading and unloading mechanical device in the example, which will not be described in detail.

[0023] In an embodiment of the present invention, the wafer gripping assembly 2 comprises a vacuum suction cup assembly 3, an outer air curtain dust blocking assembly 4, an inner cyclone dust removal assembly 5, a dust collection assembly 6, and a functional column 7. The top of the vacuum suction cup assembly 3 is connected to the execution end of the robotic arm body 1 via the functional column 7. The outer air curtain dust blocking assembly 4 is arranged above the vacuum suction cup assembly 3, the inner cyclone dust removal assembly 5 is arranged at the bottom of the vacuum suction cup assembly 3, and the dust collection assembly 6 is arranged above the outer air curtain dust blocking assembly 4. The vacuum suction cup assembly 3 is used to cooperate with the robotic arm body 1 to perform automated loading and unloading operations on wafers. The outer air curtain dust blocking assembly 4 is used to continuously blow high-speed airflow around the vacuum suction cup assembly 3 to form an air curtain-like protective layer, preventing external dust particles from entering below the vacuum suction cup assembly 3. The inner cyclone dust removal assembly 5 is used to continuously blow swirling airflow below the vacuum suction cup assembly 3 to form a cyclone-like protective layer, cleaning dust particles below the vacuum suction cup assembly 3. Component 6 is used to vacuum up dust particles generated during the movement of the upper robotic arm body 1. This invention creates a double-layer airflow effect for the vacuum suction cup assembly 3 by designing an outer air curtain dust blocking component 4 and an inner cyclone dust removal component 5. The outer air curtain dust blocking component 4 continuously blows out high-speed airflow around the vacuum suction cup assembly 3 to form an air curtain-like protective layer, preventing external dust particles from entering below the vacuum suction cup assembly 3. The inner cyclone dust removal component 5 continuously blows out swirling airflow below the vacuum suction cup assembly 3 to form a cyclone-like protective layer, providing clean air below the vacuum suction cup assembly 3 and helping to remove small amounts of dust particles that may enter below the vacuum suction cup assembly 3. The double-layer protection effect formed by the double-layer airflow reduces the probability of tiny dust particles that may be generated when the internal components of the robotic arm move and fall onto the wafer below the vacuum suction cup assembly 3, greatly improving the cleanliness of the environment below the vacuum suction cup assembly 3.

[0024] In an embodiment of the present invention, the vacuum suction cup assembly 3 includes a fixed circular plate 301 connected to the bottom of the functional column 7. Four suction cup bodies 302 are arranged on the bottom surface of the fixed circular plate 301. The suction cup bodies 302 are existing technology in this embodiment. The four suction cup bodies 302 are arranged in a four-corner configuration, and the top of each suction cup body 302 penetrates the top surface of the fixed circular plate 301. A main air pipe 303 is arranged above the fixed circular plate 301. One end of the main air pipe 303 is connected to an external vacuum generator via an external hose. The external hose can be movably arranged via an external support frame to avoid affecting the movement of the robotic arm body 1. The external vacuum generator is an existing technology product in this embodiment and will not be described in detail. The other end of the main air pipe 303 is connected to two symmetrically arranged branch air pipes 304, which output... The device has two symmetrically arranged suction cup air pipes 305 connected to its end. The output end of the suction cup air pipes 305 is connected to the top of the suction cup body 302. The invention uses the operation of the robotic arm body 1 to move the fixed circular plate 301 toward the top surface of the wafer, so that the four suction cup bodies 302 on the bottom surface of the fixed circular plate 301 contact the top surface of the wafer. Then, the external vacuum generator operates, and the external vacuum generator extracts the air from the suction cup body 302 through the external hose, main air pipe 303, branch air pipe 304 and suction cup air pipes 305, so that a negative pressure environment is formed inside the suction cup body 302. Since the internal pressure of the suction cup body 302 is lower than the external atmospheric pressure, under the action of atmospheric pressure, the suction cup body 302 will tightly adhere to the top surface of the wafer, pick up the wafer, and cooperate with the robotic arm body 1 to perform loading and unloading operations.

[0025] In another embodiment of the present invention, the functional column 7 is provided with a first transfer chamber 701 and a second transfer chamber 702. The first transfer chamber 701 is arranged above the second transfer chamber 702, and the bottom of the second transfer chamber 702 is connected to the inner cyclone dust removal assembly 5.

[0026] In another embodiment of the present invention, the outer air curtain dust-blocking assembly 4 includes an air blowing pipe 401 communicating with the inner cavity of the first transfer chamber 701. The air inlet end of the air blowing pipe 401 is connected to an external air supply system via an external hose. The external hose can be movably arranged via an external support frame to avoid the external hose affecting the movement of the robotic arm body 1. The external air supply system is a prior art product in this example and will not be described in detail. A guide plate 402 is connected to the outer circumference of the functional column 7. A diverter plate 403 is connected below the guide plate 402. Multiple connecting pipes 404 are connected to the bottom of the diverter plate 403. An air blowing ring plate 405 is connected to the output end of the connecting pipe 404. The inner side wall of the diverter plate 403 is connected to the inner side wall of the air blowing ring plate 405 via multiple fixing brackets 406 for fixing. The bottom surface of the frame 406 is connected to the top surface of the fixed circular plate 301; the inner cavity of the guide plate 402 is connected to the inner cavity of the first transfer chamber 701, the inner cavity of the guide plate 402 is connected to the inner cavity of the diverter plate 403, the inner cavity of the diverter plate 403 is connected to the inner cavity of the connecting pipe 404, and the inner cavity of the connecting pipe 404 is connected to the inner cavity of the blowing ring plate 405; the present invention delivers high-speed airflow to the blowing pipe 401 through an external air supply system, the high-speed airflow flows evenly into the guide plate 402 through the first transfer chamber 701, flows into the diverter plate 403 and the connecting pipe 404 through the guide plate 402, and finally blows out high-speed airflow continuously around the vacuum suction cup assembly 3 through the blowing ring plate 405, forming an air curtain-type protective layer to prevent external dust particles from entering below the vacuum suction cup assembly 3.

[0027] In another embodiment of the present invention, the guide plate 402 is composed of multiple trapezoidal plates 4021 and a ring frame 4022. The multiple trapezoidal plates 4021 are arranged in a ring array on the top of the ring frame 4022. The inner cavity of the first transfer chamber 701 is connected to the inner cavity of the ring frame 4022 through the inner cavities of the multiple trapezoidal plates 4021. The inner cavity of the ring frame 4022 has a circular ring structure. The top of the diverter plate 403 is arranged in the inner cavity of the ring frame 4022. The diverter plate 403 has multiple diverter channels 4031 inside. The inner cavity of 022 is connected to the inner cavity of the connecting pipe 404 through multiple diversion channels 4031; the side wall of the air blowing ring plate 405 is set as an inclined surface, and multiple air blowing channels 4051 connected to the inner cavity of the connecting pipe 404 are opened inside the air blowing ring plate 405. The air blowing channels 4051 are inclined trapezoidal structures; by designing the guide plate 402 as multiple trapezoidal plates 4021 and ring frames 4022 arranged in a ring array, high-speed airflow is blown into the guide plate 402 from the first transfer chamber 701. When the airflow is in the inner cavity, it can be evenly distributed by the inner cavities of multiple trapezoidal plates 4021 arranged in a ring array, so that the airflow is relatively uniform after flowing into the inner cavity of the frame 4022. Then, it is evenly blown into the multiple diversion channels 4031 of the diversion plate 403 through the inner cavity of the frame 4022, and then transported to the corresponding connecting pipe 404 and the blowing channel 4051 through the diversion channel 4031. The airflow is blown out through the blowing channel 4051. The airflow is limited by the inclined trapezoidal structure of the blowing channel 4051, so that the airflow blown out of the blowing channel 4051 forms a diffusion effect. Furthermore, the airflow blown out by each two adjacent blowing channels 4051 intersects with each other, so that the airflow blown out by all the blowing channels 4051 forms a conical airflow layer with respect to the outer circumference of the fixed circular plate 301, forming an enveloping effect on the fixed circular plate 301, effectively preventing external dust particles from approaching the bottom of the fixed circular plate 301, and further improving the dust isolation effect of the outer air curtain dust blocking component 4.

[0028] In another embodiment of the present invention, the inner cyclone dust removal assembly 5 includes a second air blowing pipe 501 communicating with the inner cavity of the second transfer chamber 702. The air inlet end of the second air blowing pipe 501 is connected to an external air supply system through an external hose. The inner cyclone dust removal assembly 5 also includes an air cover 502 rotatably connected to the bottom of the functional column 7. A support ring plate 703 is connected to the circumferential outer wall of the bottom end of the functional column 7. A groove is provided on the top surface of the support ring plate 703, and a plurality of rolling balls 704 are arranged in the groove. The rolling balls 704 are conventional bearing internal spheres. The inner side wall of the air cover 502 is provided with a groove that connects to the support ring plate. The movable groove 5021 with clearance fit is provided. The support ring plate 703 is arranged in the movable groove 5021. The top surface of the movable groove 5021 has a groove two that is symmetrical to the structure of the groove one. The rolling ball 704 is arranged in the groove two. The air cover 502 is rotatably engaged with the support ring plate 703 through multiple rolling balls 704. Multiple vortex blades 503 are arranged inside the air cover 502. The vortex blades 503 are turbine blades. The top of the multiple vortex blades 503 are connected to a conical block 504. The conical block 504 is used to guide the high-speed airflow to impact each vortex blade 503 evenly. An airflow channel is formed between every two vortex blades 503, and an arc-shaped air blowing pipe 505 is connected to the output end of the airflow channel. The arc-shaped air blowing pipe 505 is arranged on the bottom surface of the air hood 502. The main air pipe 303 is arranged between two trapezoidal plates 4021 and extends above the dust collection assembly 6. Air blowing pipe one 401 is arranged above the dust collection assembly 6, and air blowing pipe two 501 is arranged between two other trapezoidal plates 4021 and extends above the dust collection assembly 6. The present invention delivers high-speed airflow into air blowing pipe two 501 through an external air supply system. The high-speed airflow is blown into the air hood through the inner cavity of the second transfer chamber 702. Inside 502, high-speed airflow impacts multiple vortex blades 503, exerting force on the vortex blades 503 and driving them to rotate. This further drives the air hood 502 to rotate around the bottom of the functional column 7, causing the arc-shaped air blowing pipe 505 to rotate as well. At the same time, high-speed airflow is blown into the arc-shaped air blowing pipe 505 through the airflow channel and blown out through the outlet of the rotating arc-shaped air blowing pipe 505, forming a swirling airflow. The swirling airflow can sweep and push the wafer surface below the inner cyclone dust removal component 5, sweeping away any dust particles that may be present and maintaining the cleanliness of the wafer surface.

[0029] In another embodiment of the present invention, the arc-shaped air blowing pipe 505 is an arc-shaped pipe. There are multiple arc-shaped air blowing pipes 505, which are arranged in a circular array on the bottom surface of the air cover 502. The inner cavity of the arc-shaped air blowing pipe 505 is constricted towards the output end. By designing the inner cavity of the arc-shaped air blowing pipe 505 to be constricted towards the output end, the channel gradually narrows when the high-speed airflow blows out of the inner cavity of the arc-shaped air blowing pipe 505 towards the output port. Under the condition that the airflow rate remains unchanged, the flow rate of the gas blown out from the arc-shaped air blowing pipe 505 will be accelerated, so that the swirling airflow formed has a strong flow rate, which further enhances the sweeping and pushing force on the wafer surface below the inner cyclone dust removal component 5, and can effectively clean up any dust particles that may be present.

[0030] In another embodiment of the present invention, the dust collection assembly 6 includes a dust collection hood 601 connected to the circumferential sidewall of the frame 4022. A guide cover 602 is connected to the inner sidewall of the dust collection hood 601, forming a dust inlet channel 603 between the dust collection hood 601 and the guide cover 602. An air suction pipe 604 is connected to the outer sidewall of the dust collection hood 601. The inner cavity of the air suction pipe 604 communicates with the inner cavity of the dust inlet channel 603. The other end of the air suction pipe 604 is connected to an external dust collection device through an external hose. The external hose can be movably arranged through an external support frame to avoid the external hose from being... The external dust collection device, which affects the movement of the robotic arm body 1, is an existing technology product in this example and will not be described in detail. The external dust collection device continuously sucks air from the suction pipe 604, which in turn sucks air from the dust collection hood 601 and the guide hood 602 through the dust inlet channel 603. This allows dust particles that may be generated when the robotic arm body 1 moves above the dust collection component 6 to be sucked away by the dust inlet channel 603, achieving a self-cleaning effect and further ensuring a high level of cleanliness in the environment during the loading and unloading process of the robotic arm body 1.

[0031] Example 2: This example provides a method for using an automated loading and unloading equipment for microwave chip production, including the following steps: S1. Loading and unloading operation: The robotic arm body 1 works to move the fixed circular plate 301 towards the top surface of the wafer, so that the four suction cup bodies 302 on the bottom surface of the fixed circular plate 301 contact the top surface of the wafer. Then, the external vacuum generator works to remove the air from the suction cup body 302 through the external hose, main air pipe 303, branch air pipe 304 and suction cup air pipe 305, so that a negative pressure environment is formed inside the suction cup body 302. Since the internal pressure of the suction cup body 302 is lower than the external atmospheric pressure, the suction cup body 302 will tightly adhere to the top surface of the wafer under the action of atmospheric pressure, and pick up the wafer. In conjunction with the robotic arm body 1, loading and unloading operation is performed. S2. The outer air curtain type protective dust blocking operation is carried out by delivering high-speed airflow into the air blowing pipe 401 through the external air supply system. The high-speed airflow flows evenly into the guide plate 402 through the first transfer chamber 701, and then flows into the diverter plate 403 and the connecting pipe 404 through the guide plate 402. Finally, the high-speed airflow is continuously blown out around the vacuum suction cup assembly 3 through the air blowing ring plate 405 to form an air curtain type protective layer to prevent external dust particles from entering below the vacuum suction cup assembly 3. S3. The inner layer cyclone airflow dust removal operation delivers high-speed airflow into the second air blowing pipe 501 through the external air supply system. The high-speed airflow is blown into the air hood 502 through the inner cavity of the second transfer chamber 702. The high-speed airflow impacts multiple vortex blades 503, exerting force on the vortex blades 503 and driving them to rotate. This further drives the air hood 502 to rotate around the bottom of the functional column 7, causing the arc-shaped air blowing pipe 505 to rotate as well. At the same time, the high-speed airflow is blown into the arc-shaped air blowing pipe 505 through the airflow channel and blown out through the output port of the rotating arc-shaped air blowing pipe 505, forming a cyclone airflow. The cyclone airflow can sweep and push the wafer surface below the inner layer cyclone dust removal component 5, sweeping away any dust particles that may be present and maintaining the cleanliness of the wafer surface. S4. Vacuuming operation: The external vacuuming device continuously sucks air from the suction pipe 604. The suction pipe 604 sucks air from the dust collection hood 601 and the guide hood 602 through the dust inlet channel 603, so that dust particles that may be generated when the robotic arm body 1 above the vacuuming assembly 6 moves are sucked away by the dust inlet channel 603, achieving a self-cleaning effect.

[0032] The embodiments disclosed in this invention are preferred embodiments, but are not limited thereto. Those skilled in the art can easily understand the spirit of this invention based on the above embodiments and make different extensions and variations, but as long as they do not depart from the spirit of this invention, they are all within the protection scope of this invention.

Claims

1. An automated loading and unloading device for microwave chip manufacturing, characterized in that, Includes a robotic arm body (1), and a wafer gripping assembly (2) is arranged at the execution end of the robotic arm body (1); The wafer gripping assembly (2) consists of a vacuum suction cup assembly (3), an outer air curtain dust blocking assembly (4), an inner cyclone dust removal assembly (5), a dust suction assembly (6), and a functional column (7). The top of the vacuum suction cup assembly (3) is connected to the execution end of the robotic arm body (1) through the functional column (7). The outer layer air curtain dust blocking assembly (4) is arranged above the vacuum suction cup assembly (3). The inner layer cyclone dust cleaning assembly (5) is arranged at the bottom of the vacuum suction cup assembly (3). The dust suction assembly (6) is arranged above the outer layer air curtain dust blocking assembly (4). The vacuum suction cup assembly (3) is used in conjunction with the main body of the robotic arm (1) to perform automated loading and unloading operations on the wafers; The outer air curtain dust blocking component (4) is used to continuously blow out high-speed airflow around the vacuum suction cup component (3) to form an air curtain protective layer and prevent external dust particles from entering below the vacuum suction cup component (3). The inner cyclone dust removal component (5) is used to continuously blow out a cyclone airflow under the vacuum suction cup component (3) to form a cyclone protective layer and clean the dust particles under the vacuum suction cup component (3). The dust collection component (6) is used to collect dust particles generated during the movement of the upper robotic arm body (1).

2. The automated loading and unloading equipment for microwave chip manufacturing according to claim 1, characterized in that, The vacuum suction cup assembly (3) includes a fixed circular plate (301) connected to the bottom of the functional column (7). Four suction cup bodies (302) are arranged on the bottom surface of the fixed circular plate (301). The four suction cup bodies (302) are arranged in a four-corner orientation. The top of the suction cup body (302) penetrates the top surface of the fixed circular plate (301). A main air pipe (303) is arranged above the fixed circular plate (301). One end of the main air pipe (303) is connected to an external vacuum generator through an external hose. The other end of the main air pipe (303) is connected to two symmetrically arranged branch air pipes (304). The output end of the branch air pipes (304) is connected to two symmetrically arranged suction cup air pipes (305). The output end of the suction cup air pipes (305) is connected to the top of the suction cup body (302).

3. The automated loading and unloading equipment for microwave chip production according to claim 2, characterized in that, The functional column (7) is provided with a first transfer chamber (701) and a second transfer chamber (702). The first transfer chamber (701) is arranged above the second transfer chamber (702), and the bottom of the second transfer chamber (702) is connected to the inner cyclone dust removal assembly (5).

4. The automated loading and unloading equipment for microwave chip production according to claim 3, characterized in that, The outer air curtain dust-blocking assembly (4) includes an air blowing pipe (401) that communicates with the inner cavity of the first transfer chamber (701). The air inlet end of the air blowing pipe (401) is connected to an external air supply system through an external hose. A guide plate (402) is connected to the outer circumference of the functional column (7). A diversion plate (403) is connected below the guide plate (402). Multiple connecting pipes (404) are connected to the bottom of the diversion plate (403). An air blowing ring plate (405) is connected to the output end of the connecting pipe (404). The inner side wall of the diversion plate (403) is connected to the inner side wall of the air blowing ring plate (405) through multiple fixing brackets (406). The bottom surface of the fixing bracket (406) is connected to the top surface of the fixing circular plate (301). The inner cavity of the guide plate (402) is connected to the inner cavity of the first transfer chamber (701), the inner cavity of the guide plate (402) is connected to the inner cavity of the diverter plate (403), the inner cavity of the diverter plate (403) is connected to the inner cavity of the connecting pipe (404), and the inner cavity of the connecting pipe (404) is connected to the inner cavity of the air blowing ring plate (405).

5. The automated loading and unloading equipment for microwave chip production according to claim 4, characterized in that, The guide plate (402) is composed of multiple trapezoidal plates (4021) and a ring frame (4022). The multiple trapezoidal plates (4021) are arranged in a ring array on the top of the ring frame (4022). The inner cavity of the first transfer chamber (701) is connected to the inner cavity of the ring frame (4022) through the inner cavities of the multiple trapezoidal plates (4021). The inner cavity of the ring frame (4022) has a circular ring structure. The top of the diversion plate (403) is arranged in the inner cavity of the ring frame (4022), and multiple diversion channels (4031) are opened inside the diversion plate (403). The inner cavity of the ring frame (4022) is connected to the inner cavity of the connecting pipe (404) through the multiple diversion channels (4031). The side wall of the air blowing ring plate (405) is set as an inclined surface, and the air blowing ring plate (405) has multiple air blowing channels (4051) that communicate with the inner cavity of the connecting pipe (404). The air blowing channels (4051) are inclined trapezoidal structures.

6. The automated loading and unloading equipment for microwave chip production according to claim 5, characterized in that, The inner cyclone dust removal assembly (5) includes an air blowing pipe (501) that communicates with the inner cavity of the second transfer chamber (702). The air inlet end of the air blowing pipe (501) is connected to an external air supply system through an external hose. The inner cyclone dust removal component (5) also includes an air hood (502) rotatably connected to the bottom of the functional column (7). The air hood (502) has multiple vortex blades (503) arranged inside. The top of the multiple vortex blades (503) is connected to a conical block (504). An airflow channel is formed between every two vortex blades (503). The output end of the airflow channel is connected to an arc-shaped air blowing pipe (505). The arc-shaped air blowing pipe (505) is arranged on the bottom surface of the air hood (502).

7. An automated loading and unloading equipment for microwave chip manufacturing according to claim 6, characterized in that, The outer circumferential wall of the bottom end of the functional column (7) is connected to a support ring plate (703). The top surface of the support ring plate (703) is provided with a groove, and multiple rolling balls (704) are arranged in the groove. The inner wall of the air hood (502) is provided with a movable groove (5021) that is in clearance fit with the support ring plate (703). The support ring plate (703) is arranged in the movable groove (5021). The top surface of the movable groove (5021) is provided with a groove two that is symmetrical to the groove one structure. The rolling ball (704) is arranged in the groove two. The air hood (502) rotates and engages with the support ring plate (703) through multiple rolling balls (704).

8. An automated loading and unloading equipment for microwave chip manufacturing according to claim 7, characterized in that, The arc-shaped air blowing pipe (505) is an arc-shaped pipe. There are multiple arc-shaped air blowing pipes (505). The multiple arc-shaped air blowing pipes (505) are arranged in a circular array on the bottom surface of the air cover (502). The inner cavity of the arc-shaped air blowing pipe (505) has a contraction structure towards the output end.

9. An automated loading and unloading device for microwave chip manufacturing according to claim 8, characterized in that, The dust collection assembly (6) includes a dust collection hood (601) connected to the circumferential sidewall of the frame (4022). A guide hood (602) is connected to the inner sidewall of the dust collection hood (601). A dust inlet channel (603) is formed between the dust collection hood (601) and the guide hood (602). An air suction pipe (604) is connected to the outer sidewall of the dust collection hood (601). The inner cavity of the air suction pipe (604) is connected to the inner cavity of the dust inlet channel (603). The other end of the air suction pipe (604) is connected to an external dust collection device through an external hose.

10. An automated loading and unloading device for microwave chip manufacturing according to claim 9, characterized in that, The main air pipe (303) is arranged between the two trapezoidal plates (4021) and extends above the dust collection assembly (6). The first air pipe (401) is arranged above the dust collection assembly (6), and the second air pipe (501) is arranged between the other two trapezoidal plates (4021) and extends above the dust collection assembly (6).

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