Variable-emissivity optical lens target calibration and measurement method and system
By establishing an emissivity-temperature mapping database and iterative calculations, the problem that traditional infrared thermometry cannot accurately measure the temperature of variable emissivity optical lenses has been solved, achieving high-precision non-contact temperature measurement, which is suitable for online monitoring in fields such as semiconductor manufacturing and optical coating.
Patent Information
- Application Number
- CN202511974469.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-12-25
- Publication Date
- 2026-03-17
AI Technical Summary
Traditional infrared thermometry cannot accurately measure the temperature of variable emissivity optical lenses, and contact methods can damage the lenses, thus failing to meet the needs of online monitoring.
By establishing an emissivity-temperature mapping database, optical lenses are calibrated in a temperature-controlled environment using an infrared thermometer and a contact temperature sensor. Iterative calculations are then performed to determine the true temperature, and the true temperature of the optical lenses is measured in a non-contact manner.
It achieves high-precision non-contact temperature measurement of variable emissivity optical lenses, avoiding lens damage and meeting the cleanliness and online monitoring requirements of high-end manufacturing fields.
Smart Images
Figure CN121677951A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of infrared thermal imaging and non-contact temperature measurement technology, and in particular to a method and system for calibrating and measuring targets with variable emissivity optical lenses. Background Technology
[0002] In high-end manufacturing and scientific research fields such as semiconductor manufacturing, crystal growth, and optical thin film coating, it is often necessary to perform precise temperature measurement and control on workpieces that are optical components themselves (such as wafers and lenses). These materials are usually semi-transparent in the infrared band, and their effective emissivity is not only low, but also changes significantly with their own temperature.
[0003] Traditional single-band infrared thermometry relies heavily on the accurate setting of the emissivity of the object being measured. Inaccurate emissivity settings directly lead to significant temperature measurement errors. For optical lens targets, emissivity values are difficult to obtain from manuals and change dynamically with temperature, making traditional methods almost unusable. While contact methods such as attaching thermocouples can be used, these can contaminate or damage delicate optical surfaces and are unsuitable for online monitoring during production processes.
[0004] Therefore, there is an urgent need for a non-contact, high-precision temperature measurement method that can specifically address optical lens targets with variable emissivity characteristics. Summary of the Invention
[0005] This invention provides a method and system for calibrating and measuring a variable emissivity optical lens target, in order to overcome the deficiencies in the prior art and achieve accurate acquisition of the true emissivity of a specific optical lens target at different temperatures.
[0006] On one hand, the present invention provides a method for calibrating and measuring a variable emissivity optical lens target, the method comprising: Acquire calibration data, which includes the blackbody temperature of the blackbody radiation source collected at different temperature points, the apparent temperature of the target obtained by the infrared temperature measuring camera of the optical lens target, and the actual temperature of the target obtained by the contact temperature sensor. Based on the calibration data, an emissivity-temperature mapping database is established; Iterative calculations are performed based on the target apparent temperature and emissivity-temperature mapping database to determine the true temperature of the optical lens target; the iterative calculations include: calculating a current temperature estimate based on the current emissivity, querying an updated emissivity from the emissivity-temperature mapping relationship based on the current temperature estimate, and repeating the calculation with the updated emissivity until the target estimated temperature value meets the convergence condition.
[0007] According to the calibration and measurement method for the variable emissivity optical lens target, the step of establishing an emissivity-temperature mapping database based on the calibration data includes: Based on the infrared radiation equation, the effective emissivity of the optical lens target at each temperature point is calculated by inversion based on the calibration data. The target true temperature corresponding to each temperature point is associated with the effective emissivity, and an emissivity-temperature mapping relationship is established through data fitting to obtain an emissivity-temperature mapping database.
[0008] According to the calibration and measurement method of the variable emissivity optical lens target, the optical lens target to be measured and the blackbody radiation source are placed side by side in a temperature-controlled environment. A contact temperature sensor is installed on the non-critical area of the optical lens target, and an infrared temperature measurement camera is enabled to be aimed at the optical lens target and the blackbody radiation source respectively. According to the aforementioned method for calibrating and measuring targets using variable emissivity optical lenses, ; in, For infrared thermography cameras, the apparent temperature displayed or output when directly measuring the target object with an optical lens is used. The effective emissivity of the optical lens target at the current temperature. This is a reference value for the true temperature of the optical lens target, measured on the lens surface using a contact temperature sensor. The apparent temperature displayed or output by an infrared thermometer when directly measuring a blackbody radiation source.
[0009] According to the aforementioned method for calibrating and measuring the target of a variable emissivity optical lens, the estimated current temperature is calculated based on the current emissivity, including:
[0010] in, The apparent temperature measurement value obtained by directly measuring the target optical lens using an infrared thermography camera. This is an estimated value for the current temperature. This represents the current emission rate.
[0011] On the other hand, the present invention also provides a calibration and measurement system for a variable emissivity optical lens target, the system comprising: Environmental test chambers are used to provide a temperature-controlled calibration environment for optical lens targets; Blackbody radiation sources are arranged side by side in the environmental test chamber to provide controllable background radiation. The set temperature of the blackbody radiation sources is close to the set temperature value of the environmental test chamber. An optical lens target, as the object to be tested, is set in the environmental test chamber and arranged adjacent to the blackbody radiation source. The optical lens target is equipped with a contact temperature sensor during the calibration phase. An infrared temperature measurement camera is configured to be aimed at the optical lens target and the blackbody radiation source respectively, for synchronously acquiring the target apparent temperature signal of the optical lens target and the blackbody temperature signal of the blackbody radiation source at the same temperature point; The contact temperature sensor is used to measure the true temperature of the optical lens target during the calibration phase and output the true temperature signal of the target.
[0012] According to the calibration and measurement method for the variable emissivity optical lens target, the system further includes: The data acquisition and processing unit is communicatively connected to the contact temperature sensor and the infrared temperature measurement camera, respectively, and is used to receive the target's real temperature signal, the target's apparent temperature signal and the blackbody temperature signal, and to calculate the effective emissivity of the optical lens target at each temperature point based on the infrared radiation equation, thereby establishing an emissivity-temperature mapping relationship.
[0013] According to the calibration and measurement method for the variable emissivity optical lens target, the system further includes: Storage unit for storing the emissivity-temperature mapping relationship; The processing unit, connected to the infrared temperature measurement camera and the storage unit, is used to execute the iterative calculation steps, calculate and output the true temperature of the optical lens target based on the target apparent temperature and the emissivity-temperature mapping relationship.
[0014] According to the calibration and measurement method for the variable emissivity optical lens target, the contact temperature sensor is installed in a non-critical area of the optical lens target.
[0015] The present invention also provides a non-transitory computer-readable storage medium having a computer program stored thereon, which, when executed by a processor, implements the steps of the calibration and measurement method for a variable emissivity optical lens target as described above.
[0016] The present invention provides a method for calibrating and measuring a target using a variable emissivity optical lens, which has the following technical advantages: (1) By acquiring calibration data, an emissivity-temperature mapping database is established based on the calibration data. This mapping relationship associates the actual temperature of the target at each temperature point with the calculated effective emissivity, forming a unique temperature-emissivity characteristic database for a specific optical lens target. Iterative calculations are performed based on the target apparent temperature and the emissivity-temperature mapping database to determine the true temperature of the optical lens target. The iterative calculation includes: calculating the current temperature estimate based on the current emissivity, querying the updated emissivity from the emissivity-temperature mapping relationship based on the current temperature estimate, and repeating the calculation with the updated emissivity until the target estimated temperature value meets the convergence condition. Each iteration uses the pre-stored mapping relationship to correct the emissivity estimate, making the emissivity parameter continuously approach the true value, thereby driving the temperature calculation result to converge to the true value. This ensures the numerical stability and repeatability reliability of the final result and effectively suppresses the influence of the initial assumption deviation. This adaptive iterative mechanism can dynamically track the emissivity change characteristics with temperature, and can maintain measurement accuracy even in process scenarios with rapidly changing temperatures. It fundamentally eliminates the systematic error caused by the fixed emissivity setting in traditional infrared thermometry, and significantly improves the temperature measurement accuracy for optical lens targets with variable emissivity.
[0017] (2) By placing the optical lens target and the blackbody radiation source side-by-side in a temperature-controlled environment, ensuring that both are under identical background radiation conditions, the interference of the ambient temperature gradient on radiation measurement is eliminated. Installing a contact temperature sensor on the optical lens target provides a reliable real temperature reference value for subsequent inversion calculations, solving the technical challenge of obtaining the true temperature of variable emissivity semi-transparent materials directly through non-contact methods. The infrared temperature measurement camera's structural design, which allows for separate alignment with the lens and blackbody source, makes it possible to simultaneously acquire target and background radiation data under the same environmental conditions, ensuring consistency of data sources in the spatiotemporal dimension and laying the hardware foundation for accurate calculations. The true temperature of the optical lens target is obtained entirely through a non-contact infrared temperature measurement camera, eliminating the need for contact temperature sensors and avoiding contamination, scratches, or damage to the precision optical surface. This meets the stringent requirements for cleanliness and surface integrity in high-end manufacturing fields such as semiconductor manufacturing and optical coating, providing a precise, non-contact, and online-deployable temperature measurement solution suitable for optical lens targets. Attached Figure Description
[0018] To more clearly illustrate the technical solutions in this invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.
[0019] Figure 1This invention provides a schematic diagram of the structure of a calibration and measurement system for a variable emissivity optical lens target; Figure 2 This invention provides a schematic flowchart of a method for calibrating and measuring a variable emissivity optical lens target. Figure 3 This is a schematic diagram of an optional target lens emissivity-true temperature relationship curve provided for an embodiment of the present invention. Detailed Implementation
[0020] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this invention. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without creative effort are within the scope of protection of this invention.
[0021] The terms "comprising" and "having," and any variations thereof, in the specification, claims, and accompanying drawings of this application are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or apparatus that includes a series of steps or modules is not limited to the steps or modules listed, but may optionally include steps or modules not listed, or may optionally include other steps or modules inherent to such process, method, product, or apparatus.
[0022] It should be noted that the terms "first" and "second" used in this invention merely distinguish similar objects and do not represent a specific ordering of objects. It is understood that "first" and "second" can be interchanged in a specific order or sequence where permissible. It should be understood that the objects distinguished by "first" and "second" can be interchanged where appropriate so that the embodiments of the invention described herein can be implemented in orders other than those described or illustrated herein.
[0023] Figure 1 This embodiment provides a schematic diagram of the structure of an optional variable emissivity optical lens target calibration and measurement system, as shown below. Figure 1 As shown, this embodiment of the invention provides a calibration and measurement system for a variable emissivity optical lens target. The system includes: Environmental test chamber 1 is used to provide a temperature-controlled calibration environment for optical lens targets; Blackbody radiation source 2 is arranged side by side in environmental test chamber 1 to provide controllable background radiation. The set temperature of the blackbody radiation source 2 is close to the set temperature value of the environmental test chamber 1. The optical lens target 3, as the test object, is set in the environmental test chamber 1 and arranged adjacent to the blackbody radiation source 2. The optical lens target is equipped with a contact temperature sensor during the calibration stage. Infrared temperature measurement camera 4 is configured to be aimed at the optical lens target and the blackbody radiation source 2 respectively, and is used to synchronously collect the target apparent temperature signal of the optical lens target and the blackbody temperature signal of the blackbody radiation source 2 at the same temperature point. The contact temperature sensor 5 is used to measure the true temperature of the optical lens target during the calibration phase and output the true temperature signal of the target.
[0024] The contact temperature sensor 5 is installed in a non-critical area of the optical lens target.
[0025] Optionally, the system further includes a data acquisition and processing unit 6, which is communicatively connected to the contact temperature sensor 5 and the infrared temperature measurement camera 4, respectively, for receiving the target's real temperature signal, the target's apparent temperature signal and the blackbody temperature signal, and calculating the effective emissivity of the optical lens target at each temperature point based on the infrared radiation equation, thereby establishing an emissivity-temperature mapping relationship.
[0026] Optionally, the system further includes a storage unit for storing the emissivity-temperature mapping relationship; and a processing unit connected to the infrared temperature measuring camera 4 and the storage unit for executing the iterative calculation steps, calculating and outputting the true temperature of the optical lens target based on the target apparent temperature and the emissivity-temperature mapping relationship.
[0027] It is worth noting that the processing unit can be, for example, an embedded processor or host computer software, and this hardware architecture can ensure the stability and ease of deployment of the entire temperature measurement solution.
[0028] Optical lenses can be made of germanium, silicon, or calcium fluoride, and can take the form of lenses, windows, or substrates (such as 4-inch diameter semiconductor wafers). The semi-transparent nature of these materials in the infrared band results in low effective emissivity that varies significantly with temperature, making traditional infrared thermometry methods difficult to apply. However, this invention, by establishing a precise mapping relationship and iterative solution mechanism, enables non-contact, high-precision temperature monitoring of such high-value optical components.
[0029] In one embodiment, such as Figure 2 As shown, this invention provides a schematic flowchart of a method for calibrating and measuring a variable emissivity optical lens target, including: S102, Obtain calibration data.
[0030] The calibration data includes the blackbody temperature of the blackbody radiation source 2 collected at different temperature points, the apparent temperature of the target obtained by the infrared temperature measuring camera 4 from the optical lens target, and the actual temperature of the target obtained by the contact temperature sensor 5. In this embodiment, a temperature-controlled calibration environment is first constructed: the optical lens target to be tested is placed side by side with a high-precision blackbody radiation source 2 inside the environmental test chamber 1, ensuring that the infrared temperature measuring camera 4 can image both the optical lens target and the blackbody radiation source 2. The apparent temperature of the optical lens target is measured, and a high-precision contact temperature sensor 5 is installed in a non-critical area of the optical lens target to obtain the target's true temperature, which is the true temperature reference value of the optical lens target. It should be noted that the blackbody radiation source 2 is preferably placed inside the environmental test chamber 1 adjacent to the optical lens target to simulate the background radiation conditions in the actual measurement environment.
[0031] Then, calibration is performed based on a temperature-controlled calibration environment by controlling the temperature of the environmental test chamber 1 to stabilize it at multiple different temperature points. For example, the temperature can be increased from 100°C to 500°C and a temperature point can be set every 50°C.
[0032] Three sets of key data were collected simultaneously at each temperature point: the blackbody temperature was obtained through the temperature control system of the blackbody radiation source 2 itself. The apparent temperature of the target is obtained by measuring the optical lens target using an infrared thermometer camera 4. The actual temperature of the target is obtained by measuring the temperature using a contact temperature sensor 5. .
[0033] Preferably, the blackbody temperature Set to a temperature close to that of environmental test chamber 1, for example, when the temperature of environmental test chamber 1 is 400°C, the blackbody temperature is... The corresponding temperature was set to 400°C to realistically simulate the background radiation environment. In a specific example, when environmental test chamber 1 stabilized at 400°C, the blackbody temperature was measured. The target actual temperature is 400°C. The apparent temperature of the target measured by infrared thermography camera 4, under the default emissivity setting, was 399.5°C. The temperature is 365.2°C.
[0034] The emissivity inversion step processes the data collected at each temperature point based on the infrared radiation equation, which is expressed as follows: ,in, The infrared temperature measuring camera 4 displays or outputs the apparent temperature when directly measuring the target on the optical lens. The effective emissivity of the optical lens target at the current temperature. This is the true temperature reference value of the optical lens target measured on the lens surface by the contact temperature sensor 5. This refers to the apparent temperature displayed or output by the infrared thermography camera 4 when directly measuring the blackbody radiation source 2. For example... Figure 3 As shown, this invention provides a schematic diagram of the emissivity-true temperature relationship curve of an optional target lens.
[0035] Convert the aforementioned example data to Kelvin temperature and then insert it into the equation: Solving for the effective emissivity of the optical lens target at 399.5°C yields the result. It is approximately 0.63. The above calculation was repeated for all temperature points to obtain a series of data pairs between the target's true temperature and effective emissivity.
[0036] S104. Based on the calibration data, establish an emissivity-temperature mapping database.
[0037] In this embodiment, a continuous emissivity-temperature mapping relationship is constructed by fitting the aforementioned data pairs using a data fitting method, which can be exemplarily obtained as follows: The linear functional relationship, where The measurement unit is Celsius; or a high-resolution lookup table can be established to accurately characterize the effective emissivity as a function of the target's true temperature. This mapping reflects the temperature-dependent emissivity curve of a specific optical lens target and forms the basis for subsequent accurate non-contact measurements.
[0038] Based on the above embodiments, the method for calibrating and measuring a variable emissivity optical lens target provided by this invention includes establishing an emissivity-temperature mapping database based on the calibration data, comprising: Based on the infrared radiation equation, the effective emissivity of the optical lens target at each temperature point is calculated by inversion based on the calibration data. The target true temperature corresponding to each temperature point is associated with the effective emissivity, and an emissivity-temperature mapping relationship is established through data fitting to obtain an emissivity-temperature mapping database.
[0039] S106, perform iterative calculations based on the target apparent temperature and emissivity-temperature mapping database to determine the true temperature of the optical lens target.
[0040] The iterative calculation specifically includes: calculating the current temperature estimate based on the current emissivity, querying the updated emissivity from the emissivity-temperature mapping relationship based on the current temperature estimate, and repeating the calculation with the updated emissivity until the target estimated temperature value meets the convergence condition.
[0041] In this embodiment, iterative calculations are performed based on the target apparent temperature and emissivity-temperature mapping database to determine the true temperature of the optical lens target. The iterative calculations include: calculating a current temperature estimate based on the current emissivity, querying an updated emissivity from the emissivity-temperature mapping relationship based on the current temperature estimate, and repeating the calculation with the updated emissivity until the target estimated temperature value meets the convergence condition.
[0042] After calibration, the actual measurement steps are applied to the production site. At this point, the contact temperature sensor 5 is removed, and only the infrared temperature camera 4 measures the optical lens target in a non-contact manner to obtain the target's apparent temperature. For example, during the annealing process of germanium wafers, the apparent temperature of the target wafer is measured by infrared thermography camera 4. The temperature is 375.0°C.
[0043] The iterative solution step performs iterative calculations based on the target apparent temperature obtained from the actual measurement step and the emissivity-temperature mapping relationship established in the mapping relationship establishment step. Specifically, it includes: first, setting an initial emissivity estimate. For example, it can be set to 0.6; then according to the formula:
[0044] Calculate the target temperature estimate under the current emissivity assumption. ,when Calculated when it is 0.6 The temperature was approximately 392.1°C; subsequently, the emissivity was updated by querying the emissivity-temperature mapping relationship based on this temperature estimate. Substituting into the aforementioned linear relationship, we get Approximately 0.628; As a new Repeat the calculation, and obtain the result in the second iteration. Approximately 387.2°C, corresponding to Approximately 0.627; obtained in the third iteration The temperature is approximately 387.4°C. The difference between this estimate and the result from the previous iteration is less than the preset tolerance of 0.2°C, and the iteration convergence stops. The temperature estimate obtained at this point is the true temperature of the optical lens target. (387.4°C), corresponding emissivity (0.627) represents the true emissivity at the current temperature. Without the compensation of this invention, directly reading the target apparent temperature of 375°C would result in a significant temperature measurement error of 12.4°C.
[0045] In an optional embodiment, the iterative calculation step is automatically executed by a processing unit integrated inside or outside the infrared temperature measurement camera 4, and the actual temperature and corresponding emissivity of the optical lens target are output in real time. This automated execution mechanism requires no manual intervention and achieves real-time and continuous temperature monitoring through the high-speed calculation of the processing unit, making it particularly suitable for online monitoring scenarios in industrial production lines.
[0046] In this invention, the true temperature of the optical lens target is obtained entirely through an infrared thermometer camera in a non-contact manner during the actual measurement process, eliminating the need for contact temperature sensors. This truly non-contact characteristic avoids contamination, scratches, or damage to the precision optical surface by the sensor, meeting the stringent requirements for cleanliness and surface integrity in high-end manufacturing fields such as semiconductor manufacturing and optical coating, and enabling continuous online monitoring of the production process without interrupting the workflow.
[0047] On the other hand, the present invention also provides a computer program product, the computer program product comprising a computer program stored on a non-transitory computer-readable storage medium, the computer program comprising program instructions, which, when executed by a computer, enable the computer to execute a calibration and measurement method for a variable emissivity optical lens target provided by the above methods, comprising the steps of: acquiring calibration data, the calibration data including the blackbody temperature of a blackbody radiation source collected at different temperature points, the apparent temperature of the optical lens target measured by an infrared thermometer, and the true temperature of the target measured by a contact temperature sensor; establishing an emissivity-temperature mapping database based on the calibration data; performing iterative calculations based on the apparent temperature of the target and the emissivity-temperature mapping database to determine the true temperature of the optical lens target; the iterative calculations comprising: calculating a current temperature estimate based on the current emissivity, querying an updated emissivity from the emissivity-temperature mapping relationship based on the current temperature estimate, and repeating the calculation with the updated emissivity until the target estimated temperature value meets the convergence condition.
[0048] In another aspect, the present invention also provides a non-transitory computer-readable storage medium storing a computer program thereon. When executed by a processor, the computer program implements a calibration and measurement method for a variable emissivity optical lens target provided by the methods described above, comprising the steps of: acquiring calibration data, the calibration data including the blackbody temperature of a blackbody radiation source collected at different temperature points, the apparent temperature of the optical lens target measured by an infrared thermometer, and the true temperature of the target measured by a contact temperature sensor; establishing an emissivity-temperature mapping database based on the calibration data; performing iterative calculations based on the apparent temperature of the target and the emissivity-temperature mapping database to determine the true temperature of the optical lens target; the iterative calculations include: calculating a current temperature estimate based on the current emissivity, querying an updated emissivity from the emissivity-temperature mapping relationship based on the current temperature estimate, and repeating the calculation with the updated emissivity until the target estimated temperature value meets the convergence condition.
[0049] The device embodiments described above are merely illustrative. The units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the modules can be selected to achieve the purpose of this embodiment according to actual needs. Those skilled in the art can understand and implement this without any creative effort.
[0050] Through the above description of the embodiments, those skilled in the art can clearly understand that each embodiment can be implemented by means of software plus necessary general-purpose hardware platforms, and of course, it can also be implemented by hardware. Based on this understanding, the above technical solutions, in essence or the part that contributes to the prior art, can be embodied in the form of a software product. This computer software product can be stored in a computer-readable storage medium, such as ROM / RAM, magnetic disk, optical disk, etc., and includes several instructions to cause a computer device (which may be a personal computer, server, or network device, etc.) to execute the methods described in the various embodiments or some parts of the embodiments.
[0051] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.
Claims
1. A method for calibrating and measuring a target using a variable emissivity optical lens, characterized in that, The method comprises: acquiring calibration data, the calibration data comprising blackbody temperatures of a blackbody radiation source collected at different temperature points, target apparent temperatures of an optical lens target measured by an infrared temperature measurement camera, and target true temperatures measured by a contact temperature sensor; based on the calibration data, establishing an emissivity-temperature mapping database; based on the target apparent temperature and the emissivity-temperature mapping database, performing iterative calculation to determine the true temperature of the optical lens target; the iterative calculation comprises: calculating a current temperature estimate according to a current emissivity, querying an updated emissivity from the emissivity-temperature mapping relationship according to the current temperature estimate, and repeating the calculation with the updated emissivity until the target estimated temperature value meets the convergence condition.
2. The method of claim 1, wherein: The method further comprises: based on the calibration data, calculating the effective emissivity of the optical lens target at each temperature point by inversion calculation according to the infrared radiation equation; correlating the target true temperature corresponding to each temperature point with the effective emissivity, and establishing an emissivity-temperature mapping relationship by data fitting to obtain the emissivity-temperature mapping database.
3. The calibration and measurement method of the variable emissivity optical lens target according to claim 1, before the acquiring calibration data, further comprising: placing the optical lens target to be measured and the blackbody radiation source side by side in a controllable temperature environment, installing a contact temperature sensor on a non-critical area of the optical lens target, and enabling an infrared temperature measurement camera to be aligned with the optical lens target and the blackbody radiation source respectively.
4. The calibration and measurement method of the variable emissivity optical lens target according to claim 2, wherein the infrared radiation equation is specifically as follows: ； wherein an apparent temperature displayed or output by the infrared thermography camera for the optical lens object directly measured by the infrared thermography camera, an effective emissivity of the optical lens object at the current temperature, a real temperature reference value of the optical lens object measured on the lens surface by a contact temperature sensor, an apparent temperature displayed or output by the infrared thermography camera for the black body radiation source directly measured by the infrared thermography camera.
5. The calibration and measurement method of the variable emissivity optical lens target according to claim 4, wherein the calculation of the current temperature estimate according to the current emissivity comprises: ； wherein, Tapp is the apparent temperature measurement obtained by the infrared thermographic camera directly measuring the optical lens target, Tcurr is the current temperature estimate, εcurr is the current emissivity.
6. A system for calibrating and measuring a variable-emissivity optical lens target, the system comprising: A system for performing the calibration and measurement method of the variable emissivity optical lens target according to any one of claims 1-5, the system comprising: an environmental test chamber for providing a controllable temperature calibration environment for the optical lens target; a blackbody radiation source arranged side by side in the environmental test chamber for providing controllable background radiation, the setting temperature of the blackbody radiation source being close to the set temperature value of the environmental test chamber; an optical lens target arranged adjacent to the blackbody radiation source in the environmental test chamber, the optical lens target being provided with a contact temperature sensor during the calibration stage; an infrared temperature measurement camera configured to be aligned with the optical lens target and the blackbody radiation source respectively, for synchronously collecting target apparent temperature signals of the optical lens target and blackbody temperature signals of the blackbody radiation source at the same temperature point; the contact temperature sensor for measuring the true temperature of the optical lens target during the calibration stage and outputting a target true temperature signal.
7. The method of claim 6, wherein: The system further comprises: A data acquisition and processing unit is in communication with the contact temperature sensor and the infrared temperature camera, respectively, for receiving the target real temperature signal, the target apparent temperature signal and the blackbody temperature signal, and for calculating the effective emissivity of the optical lens target at each temperature point based on an infrared radiation equation, and for establishing an emissivity-temperature mapping relationship.
8. The method of claim 7, wherein: The system further comprises: A storage unit for storing the emissivity-temperature mapping relationship; A processing unit connected to the infrared temperature camera and the storage unit, for performing the iterative calculation step, and for calculating and outputting the real temperature of the optical lens target based on the target apparent temperature and the emissivity-temperature mapping relationship.
9. The method of claim 6, wherein: The contact temperature sensor is installed at a non-critical area of the optical lens target. 10.A non-transitory computer-readable storage medium having stored thereon a computer program, characterized in that, The computer program, when executed by a processor, implements the steps of the method according to any one of claims 1 to 5.