Vacuum chuck performance testing apparatus

Abstract

The application provides a vacuum chuck performance detection equipment, which comprises a taking and placing assembly, a storing assembly and a first detection assembly. The taking and placing assembly comprises a mounting block and a first clamping jaw. The first clamping jaw is installed on the mounting block and is used for clamping the vacuum chuck. The storing assembly comprises a fixing seat and a storing tube. The storing tube is connected to the fixing seat and is used for storing the vacuum chuck. The first detection assembly comprises a detection lens, a workbench and a driving piece. The workbench is used for placing the vacuum chuck. The detection lens is arranged opposite to the workbench and is used for detecting the vacuum chuck on the workbench. The workbench is connected to the moving end of the driving piece. The driving piece is used for driving the workbench to move the vacuum chuck. The taking and placing assembly is connected to a mechanical hand through the mounting block. The mechanical hand is used for driving the first clamping jaw to move to the storing assembly, so that the vacuum chuck in the storing tube is clamped, and is used for driving the first clamping jaw to move the clamped vacuum chuck to the workbench. The application replaces manual work with the mechanical hand, and improves the detection efficiency.

Description

Technical Field

[0001] This invention relates to the field of vacuum suction cup testing technology, and in particular to a vacuum suction cup performance testing device. Background Technology

[0002] The wafer pre-alignment device is the core component of the wafer flipping machine, and the vacuum chuck is the most critical component of the wafer pre-alignment device. Because it is in direct contact with the wafer, the requirements for the surface roughness, flatness, and uniformity of the structural adsorption force are extremely high. The roughness is generally required to be R0.2, and the flatness is generally strictly required to be within 10 micrometers. Therefore, it is essential to perform performance testing on the incoming material, i.e., the vacuum chuck. Typically, the performance testing of the vacuum chuck includes roughness testing, friction testing, and wafer deformation testing.

[0003] Roughness inspection is typically performed under a confocal microscope. Besides roughness, it also allows observation of sharp points and corners on the chuck contact area, which can damage the wafer surface. Currently, vacuum chuck inspection is done manually. First, the vacuum chuck must be manually placed under a confocal microscope for roughness testing. Due to the limited observation range of the microscope, the vacuum chuck surface must be divided into several sections, and the X and Y stages must be manually moved to inspect each section. Because the placement cannot be guaranteed to be the same each time, the observation position will vary, leading to some deviation in the analysis results. Furthermore, ensuring accurate placement of the vacuum chuck each time consumes a significant amount of time, reducing efficiency. Summary of the Invention

[0004] This invention provides a vacuum suction cup performance testing device to solve the problems of inaccurate positioning and excessive time consumption when manually handling vacuum suction cups in the prior art.

[0005] This invention provides a vacuum suction cup performance testing device, comprising: The pick-and-place assembly includes a mounting block and a first gripper, the first gripper being mounted on the mounting block and used to grip a vacuum suction cup. A storage assembly, comprising a fixed base and a storage tube, wherein the storage tube is connected to the fixed base and is used to store a vacuum suction cup; The first detection component includes a detection lens, a worktable, and a driving component. The worktable is used to place a vacuum suction cup. The detection lens is positioned facing the worktable and is used to detect the vacuum suction cup on the worktable. The worktable is connected to the movable end of the driving component, and the driving component is used to drive the worktable to move the vacuum suction cup. The robotic arm has the picking and placing component connected to it via the mounting block. The robotic arm is used to drive the first gripper to move to the storage component, thereby picking up the vacuum suction cup in the storage tube, and to drive the first gripper to pick up the vacuum suction cup and move it to the worktable.

[0006] According to the present invention, a vacuum suction cup performance testing device is provided, wherein a pick-and-place groove is provided on both sides of the storage tube along the axial direction of the storage tube, and the first gripper picks up the vacuum suction cup in the storage tube from the pick-and-place groove.

[0007] According to the present invention, a vacuum suction cup performance testing device is provided, wherein the driving component includes a first moving device and a second moving device, the first moving device being used to drive the worktable to move along a first direction, and the second moving device being used to drive the worktable to move along a second direction.

[0008] According to a vacuum suction cup performance testing device provided by the present invention, the first testing component further includes a third moving device, the testing lens is connected to the driving end of the third moving device, and the third moving device is used to drive the testing lens to move toward or away from the worktable.

[0009] According to the present invention, a vacuum suction cup performance testing device further includes a second testing component, the second testing component including an adsorption device and a scanner, the adsorption device being used to adsorb the vacuum suction cup, and the scanner being disposed directly above the adsorption device and used to scan the vacuum suction cup on the adsorption device.

[0010] According to a vacuum chuck performance testing device provided by the present invention, the pick-and-place assembly further includes a second gripper connected to the mounting block for gripping the wafer onto the vacuum chuck on the adsorption device, wherein the adsorption device is used to pick up the wafer and the vacuum chuck together.

[0011] According to the present invention, a vacuum chuck performance testing device further includes a third testing component, the third testing component including a fourth moving device and a thrust gauge, the thrust gauge being connected to the driving end of the fourth moving device, the fourth moving device being used to drive the thrust gauge to push against the wafer on the vacuum chuck.

[0012] According to a vacuum suction cup performance testing device provided by the present invention, the second testing component further includes a slide table, and the scanner is slidably connected to the slide table.

[0013] According to the present invention, a vacuum chuck performance testing device further includes a wafer fixing assembly, the wafer fixing assembly including a reference plate and a positioning block, the positioning block being fixedly connected to the reference plate and used for positioning the wafer.

[0014] According to the present invention, a vacuum chuck performance testing device is provided, wherein the side of the reference plate facing the wafer is arc-shaped and the reference plate is attached to the wafer.

[0015] This invention provides a vacuum suction cup performance testing device, comprising a first testing component that uses a testing lens to test the vacuum suction cup. Since the vacuum suction cup is stored in a storage tube within a storage component, it needs to be moved from the storage tube to the first testing component for testing. Therefore, this invention provides a pick-and-place component, in which a first gripper grips the vacuum suction cup. The first gripper is then connected to a robotic arm via a mounting block, and the robotic arm moves the first gripper. The robotic arm first moves the first gripper to the storage tube, where it grips the vacuum suction cup. After gripping the vacuum suction cup, the robotic arm moves both the first gripper and the vacuum suction cup to a worktable, where the first gripper places the vacuum suction cup on the worktable. The entire operation requires no manual intervention, achieving mechanical automation and ensuring more accurate placement of the vacuum suction cup on the worktable each time. This is also more efficient than manual handling. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in this invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0017] Figure 1 This is a schematic diagram of the vacuum suction cup performance testing device provided by the present invention.

[0018] Figure 2 This is a schematic diagram of the first detection component provided by the present invention.

[0019] Figure 3 This is a schematic diagram of the pick-and-place component provided by the present invention.

[0020] Figure 4 This is a schematic diagram of the storage tube provided by the present invention.

[0021] Figure 5 This is a schematic diagram of the second detection component provided by the present invention.

[0022] Figure 6This is a schematic diagram of the second and third detection components provided by the present invention.

[0023] Figure 7 This is a schematic diagram of the wafer fixing assembly provided by the present invention.

[0024] Figure 8 This is a schematic diagram of a vacuum suction cup provided in an embodiment of the present invention.

[0025] Figure 9 This is a schematic diagram of a vacuum suction cup provided in another embodiment of the present invention.

[0026] Figure label: 1. Pick-and-place component; 11. Mounting block; 12. First gripper; 13. Second gripper; 2. Robotic arm; 3. Vacuum suction cup; 4. Wafer fixing assembly; 41. Reference plate; 42. Positioning block; 5. First detection component; 51. Detection lens; 52. Worktable; 53. Drive unit; 531. First moving device; 532. Second moving device; 54. Third moving device; 6. Material storage assembly; 61. Fixing base; 62. Storage tube; 63. Qualified tube; 64. Picking and placing trough; 7. Second detection component; 71. Adsorption device; 72. Scanner; 73. Slide table; 8. Wafers; 9. Third detection component; 91. Fourth moving device; 92. Thrust gauge. Detailed Implementation

[0027] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this invention. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without creative effort are within the scope of protection of this invention.

[0028] The following is combined Figure 1This invention describes a vacuum suction cup performance testing device, comprising a pick-and-place assembly 1, a storage assembly 6, a first testing assembly 5, and a robotic arm 2. The pick-and-place assembly 1 includes a mounting block 11 and a first gripper 12, the first gripper 12 being mounted on the mounting block 11 and used to grip a vacuum suction cup 3. The storage assembly 6 includes a fixed base 61 and a storage tube 62, the storage tube 62 being connected to the fixed base 61 and used to store the vacuum suction cup 3. The first testing assembly 5 includes a testing lens 51, a worktable 52, and a driving component 53. The worktable 52 is used to place the vacuum suction cup 3, the testing lens 51 is positioned facing the worktable 52 and used to test the vacuum suction cup 3 on the worktable 52, and the worktable 52 is connected to the moving end of the driving component 53, the driving component 53 being used to drive the worktable 52 to move the vacuum suction cup 3. The pick-and-place assembly 1 is connected to the robot arm 2 via the mounting block 11. The robot arm 2 is used to drive the first gripper 12 to move to the storage assembly 6, thereby gripping the vacuum suction cup 3 in the storage tube 62, and to drive the first gripper 12 to grip the vacuum suction cup 3 and move it to the worktable 52.

[0029] Vacuum suction cups 3 come in various forms; please refer to them accordingly. Figure 8 and Figure 9 The two vacuum suction cups 3, apart from the air intake at their central parts, have different contact surface designs. For example... Figure 8 The contact surface of the vacuum chuck is mostly arc-shaped or annular, while Figure 9 The contact surface of the vacuum chuck 3 consists of several small convex contact surfaces and edge contact surfaces. Regardless of the contact form, strict requirements are placed on the roughness and flatness of the contact surface. Simultaneously, under a constant adsorption pressure, while ensuring the adsorption force is as uniform as possible, the wafer deformation must be within the specified design range. This can be achieved by improving the chuck diameter and contact area. The following will describe the performance requirements of the vacuum chuck 3, and the entire testing process requires no manual handling; only manual data observation is needed, greatly improving the stability and efficiency of the testing.

[0030] Please refer to the above as well. Figures 1 to 3 In this embodiment, the first detection component 5 and the storage component 6 are arranged adjacent to each other, and the robot arm 2 is located between the first detection component 5 and the storage component 6, thereby shortening the distance between the first detection component 5 and the robot arm 2 and reducing the picking and placing distance of the robot arm 2. Then, the picking and placing component 1 is installed on the robot arm 2, and the robot arm 2 drives the picking and placing component 1 to move.

[0031] The pick-and-place assembly 1 uses the first gripper 12 to grip the vacuum suction cup 3. Since the vacuum suction cup 3 is generally circular, the inner contour of the first gripper 12 is also arranged in a circular shape, making it easier for the first gripper 12 to grip the vacuum suction cup 3 and making the first gripper 12 fit the vacuum suction cup 3 more closely. The fixing base 61 is fixedly set on the plane, and the storage tube 62 is fixedly set on the fixing base 61. Since the storage tube 62 is used to store the vacuum suction cup 3, the storage tube 62 is a hollow circular tube to provide storage space. The inner diameter of the storage tube 62 corresponds to the outer diameter of the vacuum suction cup 3, so that after the vacuum suction cup 3 is placed in the storage tube 62, it can be stacked in the storage tube 62 and fit against the inner wall of the storage tube 62. In this embodiment, the vacuum suction cup 3 in the storage tube 62 can be directly gripped by the first gripper 12, or the vacuum suction cup 3 can be sucked into the storage tube 62 by the first gripper 12 and then gripped. There is no limitation here.

[0032] Once the vacuum suction cup 3 is placed in the storage tube 62, the robotic arm 2 is activated. The robotic arm 2 moves the first gripper 12 above the storage tube 62 and then activates the first gripper 12 to grasp the vacuum suction cup 3 inside the storage tube 62. After the first gripper 12 successfully grasps the vacuum suction cup 3, the robotic arm 2 moves the first gripper 12 to a position close to the first detection component 5. In this embodiment, the first detection component 5 uses the worktable 52 to place the vacuum suction cup 3. Therefore, the robotic arm 2 moves the first gripper 12 onto the worktable 52, then activates the first gripper 12 to release it, thus placing the vacuum suction cup 3 held by the first gripper 12 onto the worktable 52.

[0033] Because the first detection component 5 detects the vacuum suction cup 3 through the detection lens 51, the vacuum suction cup 3 should be placed on the worktable 52 directly opposite the detection lens 51. After setting the placement position of the vacuum suction cup 3, the fixed position information is input to the robot arm 2, so that the robot arm 2 can ensure that the placement position of the vacuum suction cup 3 is accurate every time. Similarly, after the vacuum suction cups 3 are stacked in the storage tube 62, the height of each vacuum suction cup 3 is also fixed, and the robot arm 2 can be set to the corresponding pick-up and put-down height.

[0034] Once the vacuum suction cup 3 is placed at the designated position on the worktable 52, the inspection of the vacuum suction cup 3 can begin. Because the observation range of the inspection lens 51 is limited, during the inspection of the vacuum suction cup 3, it is necessary to divide the vacuum suction cup 3 into multiple areas and then manually drive the vacuum suction cup 3 to move, so that each area of ​​the vacuum suction cup 3 can be observed through the inspection lens 51. Therefore, in this embodiment, a drive unit 53 is connected to the worktable 52, causing the drive unit 53 to drive the worktable 52 to move, thereby moving the vacuum suction cup 3 on the worktable 52. The driving sequence of the drive unit 53 is adjusted according to the actual observation sequence to ensure that the inspection lens 51 observes each part of the vacuum suction cup 3 sequentially.

[0035] Because the robotic arm 2 ensures the accurate positioning of the vacuum suction cup 3 on the worktable 52, the accurate movement of the vacuum suction cup 3 is guaranteed each time the worktable 52 is moved. In this application, the robotic arm 2 ensures the accurate placement of the vacuum suction cup 3 each time, and then the drive component 53 moves the vacuum suction cup 3, ensuring accurate movement of the vacuum suction cup 3, thereby ensuring the accurate detection position of the vacuum suction cup 3 by the detection lens 51. The entire operation is performed by mechanized equipment without manual intervention. During the detection process, only manual observation of the data detected by the detection lens 51 is required, greatly improving efficiency and accuracy.

[0036] In one embodiment, along the axial direction of the storage tube 62, there are pick-and-place slots 64 on both sides of the storage tube 62, and the first gripper 12 picks up the vacuum suction cup 3 inside the storage tube 62 from the pick-and-place slots 64.

[0037] like Figure 4 As shown, in this embodiment, the storage tube 62 is a cylindrical tube, and a pick-and-place slot 64 is provided along the axis of the storage tube 62, so that the vacuum suction cup 3 inside the storage tube 62 is exposed on the outside through the pick-and-place slot 64. Because when picking up the vacuum suction cup 3, it is necessary to pick it up from both sides of the vacuum suction cup 3 toward the center of the vacuum suction cup 3, so at least two pick-and-place slots 64 are provided in this embodiment. Correspondingly, the first gripper 12 also has at least two claws, and the two claws can move toward the center or away from the center simultaneously.

[0038] When the first gripper 12 needs to pick up the vacuum suction cup 3, the claws inside the first gripper 12 move away from the center, thus providing sufficient hollow space to hold the vacuum suction cup 3. Then, the robot arm 2 moves the first gripper 12 to the storage tube 62. Because the first gripper 12 is hollow, it can be fitted onto the storage tube 62 and moved downwards until the first gripper 12 is at the same level as the uppermost vacuum suction cup 3. At this time, the claws on the first gripper 12 are directly aligned with the vacuum suction cup 3 through the pick-and-place slot 64. Activating the first gripper 12 allows it to pick up the vacuum suction cup 3. Then, the robot arm 2 moves the first gripper 12 and the vacuum suction cup 3 to the worktable 52 for inspection.

[0039] In one embodiment, the driving member 53 includes a first moving device 531 and a second moving device 532. The first moving device 531 is used to drive the worktable 52 to move along a first direction, and the second moving device 532 is used to drive the worktable 52 to move along a second direction.

[0040] like Figure 2 As shown, the driving component 53 is located at the bottom of the worktable 52 and is connected to the worktable 52 in a transmission manner. In this application, the driving directions of the first moving device 531 and the second moving device 532 are perpendicular to each other, thereby enabling the worktable 52 to move freely in the horizontal plane. Because both the first moving device 531 and the second moving device 532 are slides in this embodiment, one of the moving devices needs to be connected to the other moving device in order to enable the worktable 52 to move in two directions. In this embodiment, taking the first moving device 531 connected to the second moving device 532 as an example, the worktable 52 is then connected to the first moving device 531.

[0041] During the testing process, if it is necessary to move the worktable 52 along the first direction, the first moving device 531 can be used to move the worktable 52 directly. If it is necessary to move the worktable 52 along the second direction, the second moving device 532 needs to drive the first moving device 531 to move, and then the first moving device 531 will move the worktable 52 together. In this embodiment, by separately controlling the movement of the worktable 52 in the two directions by the first moving device 531 and the second moving device 532, the accuracy of the movement of the worktable 52 can be maintained.

[0042] In one embodiment, the first detection component 5 further includes a third driving device 54, and the detection lens 51 is connected to the driving end of the third driving device 54. The third driving device 54 is used to drive the detection lens 51 to move toward or away from the worktable 52.

[0043] like Figure 2As shown, since the detection lens 51 is directed towards the vacuum suction cup 3 on the worktable 52 for detection, the distance between the detection lens 51 and the worktable 52 determines the detection range of the detection lens 51. Since different vacuum suction cups 3 have different sizes, the position of the detection lens 51 needs to be adjusted when facing vacuum suction cups 3 of different sizes, so that the detection lens 51 has a better observation range.

[0044] In this embodiment, the movement of the detection lens 51 is driven by a third driving device 54, which is arranged vertically. The detection lens 51 is then connected to the moving end of the third driving device 54. After the third driving device 54 is activated, the detection lens 51 can be driven to move toward or away from the worktable 52, thereby adjusting the distance between the detection lens 51 and the worktable 52.

[0045] Furthermore, in this embodiment, the detection lens 51 is driven to move in the vertical direction only by the third driving device 54, that is, to move towards or away from the worktable 52. In different embodiments, the detection lens 51 can also be driven to move in the first or second direction by the third driving device 54, thereby accommodating more vacuum chucks 3 of different sizes or with different detection requirements.

[0046] In one embodiment, a second detection component 7 is further included. The second detection component 7 includes an adsorption device 71 and a scanner 72. The adsorption device 71 is used to adsorb the vacuum suction cup 3, and the scanner 72 is located directly above the adsorption device 71 and is used to scan the vacuum suction cup 3 on the adsorption device 71. In one embodiment, the second detection component 7 also includes a slide 73, and the scanner 72 is slidably connected to the slide 73.

[0047] Please refer to the above as well. Figure 1 and Figure 5 Because it is necessary to detect not only the roughness of the vacuum suction cup 3, but also its friction force, a second detection component 7 is provided in this embodiment. Figure 1 As shown, the second detection component 7 is also arranged on the side close to the robot arm 2. After the vacuum suction cup 3 completes the detection on the first detection component 5, the robot arm 2 drives the first gripper 12 to move to the worktable 52 to grip the vacuum suction cup 3 that has completed the first detection on the worktable 52. Then, the robot arm 2 drives the first gripper 12 and the vacuum suction cup 3 to the second detection component 7. The second detection component 7 places the vacuum suction cup 3 through the adsorption device 71, so the robot arm 2 drives the first gripper 12 and the vacuum suction cup 3 to the adsorption device 71, releases the first gripper 12 so that the vacuum suction cup 3 that has completed the first detection is stably placed on the adsorption device 71.

[0048] The second inspection involves monitoring the deformation of the vacuum suction cup 3 using scanner 72, which requires the cooperation of wafer 8. Since the adsorption device 71 uses a vacuum to pick up the vacuum suction cup 3, its sealing must be ensured. Therefore, in this embodiment, the robotic arm 2 secures the vacuum suction cup 3 to the adsorption device 71 via a plug-in method, achieving a vacuum seal by squeezing the sealing ring on the adsorption device 71. Simultaneously, a pressure gauge is used to read the pressure value, confirming the proper connection between the vacuum suction cup 3 and the adsorption device 71. After connecting the vacuum suction cup 3 to the adsorption device 71, wafer 8 is placed on the vacuum suction cup 3, and the negative pressure provided by the adsorption device 71 adsorbs the vacuum suction cup 3 and wafer 8 together.

[0049] After the vacuum chuck 3 and the wafer 8 are successfully attached, the scanner 72 can be activated to scan the deformation of the wafer 8, thus reflecting the performance of the vacuum chuck 3. Similarly, because the wafer 8 is relatively large, the scanning range of the scanner 72 is limited, so the scanner 72 cannot cover the entire wafer 8 within the scanning range at once.

[0050] Therefore, this embodiment also provides a slide 73 on which the scanner 72 is mounted. The scanner 72 then slides along the slide 73 to scan the entire wafer 8. The sliding direction of the slide 73 can be determined based on the scanning range of the scanner 72 and the size of the wafer 8. Typically, the sliding direction of the slide 73 needs to be in the direction of the largest size of the wafer 8 to ensure that the scanner 72 can scan the entire wafer 8.

[0051] In one embodiment, the pick-and-place assembly 1 further includes a second gripper 13 connected to the mounting block 11, for gripping the wafer 8 onto the vacuum chuck 3 on the adsorption device 71, and the adsorption device 71 for adsorbing the wafer 8 and the vacuum chuck 3 together.

[0052] like Figure 3 As shown, a second gripper 13 is also connected to the mounting block 11. The second gripper 13 grips the wafer 8, thereby providing the wafer 8 required for the second inspection. By mounting the second gripper 13 onto the mounting block 11, a single robotic arm 2 can drive the first gripper 12 and the second gripper 13 to move together, thereby reducing the number of robotic arms 2 and reducing costs.

[0053] After the robotic arm 2 moves the first gripper 12 to pick up the vacuum chuck 3 onto the adsorption device 71, the robotic arm 2 then moves the second gripper 13 to pick up the wafer 8. The second gripper 13 carrying the wafer 8 is then moved to the adsorption device 71, and the wafer 8 is placed on the vacuum chuck 3. The adsorption device 71 is then activated to adsorb the wafer 8 and the vacuum chuck 3 together, allowing for observation of the deformation of the wafer 8 for a second inspection.

[0054] In one embodiment, a third detection component 9 is also included. The third detection component 9 includes a fourth driving device 91 and a thrust meter 92. The thrust meter 92 is connected to the driving end of the fourth driving device 91. The fourth driving device 91 is used to drive the thrust meter 92 to push against the wafer 8 on the vacuum chuck 3.

[0055] like Figure 6 As shown, this embodiment also provides a third detection component 9. After the first detection component 5 checks the roughness of the vacuum chuck 3 and the second detection component 7 checks the deformation of the wafer 8 in the vacuum chuck 3, the third detection component 9 checks the friction of the vacuum chuck 3. Thus, the three aspects of the vacuum chuck 3 are tested, thereby enabling the determination of whether the vacuum chuck 3 is qualified.

[0056] Because this embodiment requires testing the friction performance of the vacuum chuck 3, after the vacuum chuck 3 holds the wafer 8, it needs to be tested by laterally pushing against the wafer 8. The wafer 8 is attached to the upper surface of the vacuum chuck 3 through its lower surface, so pushing can be performed along a direction parallel to the contact surface between the wafer 8 and the vacuum chuck 3. In this embodiment, the fourth driving device 91 is used to push against the wafer 8. Because it is necessary to know the magnitude of the pushing force on the wafer 8 during pushing, a thrust gauge 92 is connected to the driving end of the fourth driving device 91. The fourth driving device 91 drives the thrust gauge 92 to push against the wafer 8. When the wafer 8 is just pushed, the data displayed by the thrust gauge 92 at this time is recorded, thereby determining whether the friction performance of the vacuum chuck 3 is qualified.

[0057] This completes the inspection of vacuum chuck 3, allowing us to determine if its overall performance is up to standard. After inspection, the second gripper 13 picks up wafer 8 and returns it to its original position, then the first gripper 13 picks up vacuum chuck 3 again. Figure 1 As shown, a qualification tube 63 is also provided on the fixed base 61. If the vacuum suction cup 3 passes the test, the robot arm 2 drives the first gripper 13 to pick up the vacuum suction cup 3 and place it in the qualification tube 63. Then the robot arm 2 drives the first gripper 13 to the storage tube 62 to pick up the next vacuum suction cup 3 for testing, and so on.

[0058] In one embodiment, the system further includes a wafer fixing assembly 4, which includes a reference plate 41 and a positioning block 42. The positioning block 42 is fixedly connected to the reference plate 41 and is used to position the wafer 8. In one embodiment, the side of the reference plate 41 facing the wafer 8 is arc-shaped, and the reference plate 41 is in contact with the wafer 8.

[0059] Because wafer 8 is also an auxiliary component in the testing process, it also needs to be frequently picked up and placed. Please refer to the above instructions. Figure 1 and Figure 7 In this embodiment, a wafer fixing assembly 4 is provided for the wafer 8. The wafer 8 is stored by a reference plate 41, and the wafer 8 is positioned by a positioning block 42 on the reference plate 41, thereby ensuring that the position of the wafer 8 is accurate each time it is picked up or placed.

[0060] Furthermore, since wafer 8 is typically approximately circular, its outer contour is arc-shaped. In this embodiment, the side of positioning block 42 facing wafer 8 is also arc-shaped, so that positioning block 42 can fit closely to wafer 8 when positioning wafer 8, thereby making the positioning of wafer 8 by positioning block 42 more stable and avoiding wear on wafer 8.

[0061] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A vacuum suction cup performance testing device, characterized in that, include: The pick-and-place assembly (1) includes a mounting block (11) and a first gripper (12). The first gripper (12) is mounted on the mounting block (11) and is used to grip the vacuum suction cup (3). The storage assembly (6) includes a fixed base (61) and a storage tube (62), the storage tube (62) being connected to the fixed base (61) and used to store the vacuum suction cup (3); The first detection component (5) includes a detection lens (51), a worktable (52), and a driving component (53). The worktable (52) is used to place a vacuum suction cup (3). The detection lens (51) is positioned facing the worktable (52) and is used to detect the vacuum suction cup (3) on the worktable (52). The worktable (52) is connected to the moving end of the driving component (53). The driving component (53) is used to drive the worktable (52) to move the vacuum suction cup (3). The robotic arm (2) is connected to the picking and placing component (1) via the mounting block (11). The robotic arm (2) is used to drive the first gripper (12) to move to the storage component (6) to pick up the vacuum suction cup (3) in the storage tube (62) and to drive the first gripper (12) to pick up the vacuum suction cup (3) and move it to the worktable (52).

2. The vacuum suction cup performance testing equipment according to claim 1, characterized in that, Along the axial direction of the storage tube (62), there are pick-and-place slots (64) on both sides of the storage tube (62), and the first gripper (12) picks up the vacuum suction cup (3) in the storage tube (62) from the pick-and-place slots (64).

3. The vacuum suction cup performance testing equipment according to claim 1, characterized in that, The driving component (53) includes a first moving device (531) and a second moving device (532), wherein the first moving device (531) is used to drive the worktable (52) to move along a first direction, and the second moving device (532) is used to drive the worktable (52) to move along a second direction.

4. The vacuum chuck performance testing device according to claim 1, characterized in that, The first detection component (5) further includes a third moving device (54), the detection lens (51) is connected to the driving end of the third moving device (54), and the third moving device (54) is used to drive the detection lens (51) to move toward or away from the worktable (52).

5. The vacuum chuck performance testing device according to claim 1, characterized in that, It also includes a second detection component (7), which includes an adsorption device (71) and a scanner (72). The adsorption device (71) is used to adsorb the vacuum suction cup (3), and the scanner (72) is located directly above the adsorption device (71) and is used to scan the vacuum suction cup (3) on the adsorption device (71).

6. The vacuum chuck performance testing device according to claim 5, characterized in that, The pick-and-place assembly (1) further includes a second gripper (13), which is connected to the mounting block (11) and is used to grip the wafer (8) onto the vacuum chuck (3) on the adsorption device (71). The adsorption device (71) is used to pick up the wafer (8) and the vacuum chuck (3) together.

7. The vacuum chuck performance testing device according to claim 6, characterized in that, It also includes a third detection component (9), which includes a fourth moving device (91) and a thrust gauge (92). The thrust gauge (92) is connected to the drive end of the fourth moving device (91), and the fourth moving device (91) is used to drive the thrust gauge (92) to abut against the wafer (8) on the vacuum chuck (3).

8. The vacuum chuck performance testing device according to claim 5, characterized in that, The second detection component (7) also includes a slide (73), and the scanner (72) is slidably connected to the slide (73).

9. The vacuum chuck performance testing device according to claim 1, characterized in that, It also includes a wafer fixing assembly (4), which includes a reference plate (41) and a positioning block (42). The positioning block (42) is fixedly connected to the reference plate (41) and is used to position the wafer (8).

10. The vacuum chuck performance testing device according to claim 9, characterized in that, The side of the reference plate (41) facing the wafer (8) is arc-shaped, and the reference plate (41) is attached to the wafer (8).

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