A pre-deposition detection method, system and apparatus

Abstract

The application discloses a pre-deposition detection method, system and device, relates to the technical field of thin film preparation process detection, and the application drives an electrode rod to establish stable electric contact with a graphite boat load through an adjustable electrode rod device after completing a process boat operation; the graphite boat load is detected for pre-discharge in a normal pressure environment, and discharge characteristic parameters in the pre-discharge process are collected; the load state is judged by analyzing the discharge characteristic parameters; if the load state is normal, a formal film plating process is executed; if the load state is abnormal, an alarm is triggered and boat-out inspection is executed; after the load state is adjusted through the boat-out inspection, a cycle recheck is constructed until the load state is judged to be normal; and the application realizes fast and accurate matching of dynamic impedance between a power supply and a load.

Description

Technical Field

[0001] This invention relates to the field of thin film preparation process detection technology, specifically a pre-deposition detection method, system, and device. Background Technology

[0002] In the field of thin film preparation and surface engineering, in order to obtain stable thin film nucleation and adhesion, and control the uniformity and repeatability of the film layer, impedance matching is usually required to form a closed-loop control. Existing known technologies generally include: In radio frequency plasma processes, the load exhibits an equivalent impedance that fluctuates with changes in temperature, pressure, gas composition and surface state. In order to improve power coupling efficiency and reduce reflected power, impedance matching is often performed in conjunction with a matching network to make the energy transfer between the power supply and the load more stable. At the technical implementation level: 1. Traditional technologies rely on the average values ​​of voltage, current, and power for feedback. When the duty cycle is small, feedback lag is likely to occur, making it difficult to capture dynamic fluctuations in load impedance in real time, failing to achieve accurate impedance matching, resulting in low energy coupling efficiency and poor discharge stability. 2. The electrode rod and the hole of the graphite boat adopt a fixed contact method, which lacks trajectory and pressure constraints. Due to problems such as assembly tolerance, thermal deformation, and impact of falling boat, the contact resistance fluctuates and the load impedance changes suddenly, which can induce arcing and trigger radio frequency high-frequency alarms, posing a safety hazard to the equipment. 3. The existing process lacks a pre-deposition inspection step, and load abnormalities can only be exposed during the formal deposition process, which can easily lead to downtime and rework, resulting in low efficiency and yield, making it difficult to meet the high requirements of the photovoltaic industry for thin film quality and process efficiency. Summary of the Invention

[0003] The purpose of this invention is to provide a pre-deposition detection method, system, and device to solve the problems raised in the prior art.

[0004] To achieve the above objectives, the present invention provides the following technical solution: A pre-deposition detection method, comprising the following steps: S1. After completing the process of launching the boat, the adjustable electrode rod device is used to drive the electrode rod to establish a stable electrical contact with the graphite boat load. S2. Under normal pressure, perform pre-discharge detection on the graphite boat load and collect discharge characteristic parameters during the pre-discharge process; S3. Determine the load status of the graphite boat based on the discharge characteristic parameters; if the load status is normal, proceed with the formal coating process; if the load status is abnormal, trigger an alarm and perform a boat unloading inspection. S4. After adjusting the load status during the boat inspection, repeat steps S1-S3 to build a loop re-inspection until the load status is judged to be normal. S5. In the formal coating process, the power supply and load are matched and controlled in real time by setting an impedance matching model.

[0005] It should be noted that pre-deposition testing refers to the pre-discharge testing of the graphite boat load under normal pressure conditions after the boat placement process is completed and before the actual deposition begins. By collecting and analyzing characteristic parameters such as voltage, current, power, and load impedance during the pre-discharge process, the load status of the graphite boat is screened in advance. The purpose is to expose potential load anomalies in advance, avoiding abnormal loads from directly entering the formal deposition stage and causing problems such as arcing, power drift, or current deviation, thereby improving the stability of the entire coating process and reducing power supply operation risks.

[0006] Furthermore, the discharge characteristic parameters include current, voltage, power, and impedance data.

[0007] It should be noted that power includes incident power and reflected power; impedance data includes power supply impedance and load impedance.

[0008] Furthermore, discharge characteristic parameters were retrieved, and safe operating reference values ​​Pr for each parameter were determined. i ; Set the safety tolerance value Δp for each discharge characteristic parameter during pre-discharge operations. i Used to determine the safe operating range for each parameter [Pr] i -Δp i Pr i +Δp i ]; If P i ∉[Pr i -Δp i Pr i +Δp i Then determine the discharge characteristic parameter P. i An operational deviation has occurred, indicating an abnormal load condition. If P i ∈[Pr i -Δp i Pr i +Δp i Then determine the discharge characteristic parameter P. i The operation is normal, and the load status is normal. Where i is the label of the discharge characteristic parameter; P i Pr is the i-th discharge characteristic parameter; i Δp is the safe operating reference value for the i-th discharge characteristic parameter; i This is the safety tolerance value for the i-th discharge characteristic parameter.

[0009] It should be noted that the safety reference values ​​for each parameter can be adjusted and set by the management personnel according to the actual testing needs, or set by the system based on the average value and other data provided by historical testing data; Similarly, the safety tolerance values ​​of each parameter can be set by management personnel according to actual testing needs, or by the system based on the fluctuation data of historical testing data.

[0010] Furthermore, the adjustment of the load state includes: when the load state is abnormal, controlling the electrode rod to retract and performing a boat exit check, and adjusting at least one of the following: the graphite boat positioning state, the alignment state of the electrode head and the graphite boat hole, the electrode head insertion depth, and the contact pressure.

[0011] Furthermore, the impedance matching model analysis steps are as follows: T1. Retrieve the incident power P of the load from the discharge characteristic parameters. inc and reflected power P ref ; T2, incident power P based on load inc and reflected power P ref The reflection coefficient Γ of the load is calculated as follows: T3, passing the preset threshold value Γ min The reflection coefficient Γ of the load is compared and analyzed. If |Γ| < Γ min If so, then it is determined that the load impedance matches the power supply impedance; If |Γ|≥Γ min If so, it can be determined that the load impedance and the power supply impedance are mismatched.

[0012] T4. When the load impedance and the power supply impedance do not match, recalculate and adjust the matching network parameters according to the Smith chart until the load impedance and the power supply impedance are matched again.

[0013] Specifically, when the load impedance matches the power supply impedance, the power signal collected is monitored in real time. When the load impedance does not match the power supply impedance, the corresponding matching network parameters are quickly calculated based on the Smith chart, and the values ​​of passive components in the matching network are immediately adjusted through the control module to rematch the system impedance.

[0014] It should be noted that impedance matching is a state; when impedance is matched, the load can obtain maximum power, minimum reflected power, and the highest energy transmission efficiency. Conversely, when impedance mismatch occurs, reflected power can damage transmission lines and electrical equipment, and introduce uncertain electromagnetic interference, thereby interfering with the system.

[0015] It should be noted that the Smith chart is a graphical calculation tool used in the field of radio frequency and microwave engineering; it is used to establish the mapping relationship between the reflection coefficient and the impedance matching network parameters, so as to quickly calculate the target parameters of the adjustable capacitor and inductor in the impedance matching network based on the real-time reflection coefficient.

[0016] A fast matching system for impedance measurement and calculation: The system includes an RF power supply, an automatic impedance matching device, and a load; The automatic impedance matching device is electrically connected to the RF power supply and the load.

[0017] Furthermore, the automatic impedance matching device includes a power detection module, a control module, and an impedance matching network; The power detection module is used to acquire the power signal of the load in real time; the power signal includes incident power and reflected power; The impedance matching network consists of a first adjustable capacitor C1, a second adjustable capacitor C2, and an inductor, and is used to achieve impedance matching and maximum energy transfer between the RF power supply and the load. The control module analyzes the reflection coefficient of the load based on the load power signal data collected by the power detection module, and makes a matching judgment between the load impedance and the power supply impedance based on the analysis data; according to the impedance matching judgment result between the load and the power supply, the control impedance matching network realizes the rematching processing of the load impedance and the power supply impedance.

[0018] It should be noted that in order to achieve maximum power transfer from the power source to the load, a device capable of impedance variation must be placed between the power source and the load to meet the impedance matching condition, i.e., an impedance matching network.

[0019] An adjustable electrode rod device: The device includes a horizontal guide rail, a vertical guide rail, an electrode introduction mechanism, an electrode rod, and an electrode head assembly; Driven by the electrode introduction mechanism, the electrode rod moves forward or backward along a preset guide direction, realizing the controllable insertion and withdrawal of the electrode head assembly and the hole in the graphite boat. The horizontal and vertical guide rails are used to constrain the movement trajectory of the electrode rod and adjust the insertion position, as well as to compensate for the boat loading tolerance, assembly deviation, and thermal deformation.

[0020] Furthermore, in terms of process boat placement control, the device decouples the electrode rod insertion action from the boat placement action in terms of timing. It prioritizes completing the placement and positioning of the graphite boat, and only after the attitude of the graphite boat is stable, it drives the electrode rod to be inserted into the hole of the graphite boat.

[0021] It should be noted that abnormal contact usually refers to abnormal discharge caused by poor contact between the electrode and the graphite boat, mainly manifested in the tightness and misalignment of the electrode head after it is inserted into the hole of the graphite boat.

[0022] The tightness of the contact directly affects the contact pressure and effective contact area. Improper contact can cause coaxiality deviation, localized point contact, or even scratching and jamming. This instability in contact conditions often leads to fluctuations in contact resistance, which in turn causes a sudden change in the load's equivalent impedance, resulting in abnormal deviations in voltage, current, and power. It may also induce localized strong discharge or arcing, thereby triggering a high-frequency alarm from the RF power supply.

[0023] Therefore, improving the contact stability and consistency between the electrode head and the graphite boat holes is a crucial foundation for reducing high-frequency alarms and enhancing coating stability. This invention proposes a cylinder-driven adjustable electrode rod design to control the alignment and contact pressure between the electrode head and the graphite boat holes within a stable range, structurally reducing contact issues.

[0024] Furthermore, the device is applicable to both single-electrode mode and dual-electrode mode.

[0025] It should be noted that through multi-mode compatibility, the stable discharge requirements of different graphite boat structures and different process conditions can be met.

[0026] Compared with the prior art, the beneficial effects of the present invention are: It achieves fast and accurate dynamic impedance matching; by real-time detection of incident power and reflected power and calculation of reflection coefficient, and by using the Smith chart to quickly adjust the matching network parameters, it can quickly restore matching when the load impedance fluctuates and stabilize energy transmission. Stable electrode contact is achieved, reducing high-frequency alarms; by using adjustable electrode rods, combined with guide rail constraints and timing decoupling of the boat dropping and electrode insertion actions, the coaxiality and contact pressure of the electrodes are kept stable, contact resistance fluctuations are suppressed, arcing and high-frequency alarms are reduced, and process stability is ensured. Pre-deposition screening ensures process stability; pre-deposition detection of load anomalies and cyclic re-inspection prevent anomalies from occurring during formal deposition, thereby improving process stability and production efficiency. Attached Figure Description

[0027] Figure 1 This is a schematic flowchart of a pre-deposition detection method according to the present invention; Figure 2 This is a schematic diagram of the structure of a pre-deposition detection system according to the present invention; Figure 3 This is a schematic diagram of the structure of a pre-deposition detection device according to the present invention. Detailed Implementation

[0028] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0029] Example 1: As Figure 1 As shown, the present invention provides a technical solution: A pre-deposition detection method, comprising the following steps: S1. After completing the process of launching the boat, the adjustable electrode rod device is used to drive the electrode rod to establish a stable electrical contact with the graphite boat load. S2. Under normal pressure, perform pre-discharge detection on the graphite boat load and collect discharge characteristic parameters during the pre-discharge process; S3. Determine the load status of the graphite boat based on the discharge characteristic parameters; if the load status is normal, proceed with the formal coating process; if the load status is abnormal, trigger an alarm and perform a boat unloading inspection. S4. After adjusting the load status during the boat inspection, repeat steps S1-S3 to build a loop re-inspection until the load status is judged to be normal. S5. In the formal coating process, the power supply and load are matched and controlled in real time by setting an impedance matching model.

[0030] It should be noted that pre-deposition testing refers to the pre-discharge testing of the graphite boat load under normal pressure conditions after the boat placement process is completed and before the actual deposition begins. By collecting and analyzing characteristic parameters such as voltage, current, power, and load impedance during the pre-discharge process, the load status of the graphite boat is screened in advance. The purpose is to expose potential load anomalies in advance, avoiding abnormal loads from directly entering the formal deposition stage and causing problems such as arcing, power drift, or current deviation, thereby improving the stability of the entire coating process and reducing power supply operation risks.

[0031] In this embodiment, to verify the effectiveness of pre-deposition detection screening, this function sets two evaluation indicators: false positive rate and false negative rate.

[0032] Among them, misjudgment refers to the determination of an abnormal load in the pre-deposition step and the triggering of the abnormal handling process, but no obvious arcing phenomenon occurs in the subsequent first formal deposition step, and the power or current does not show significant deviation. A missed detection refers to a situation where the load is determined to be normal in the pre-deposition step, but obvious arcing or a significant deviation in power / current characteristics occurs in the first formal deposition step.

[0033] Since there are usually long transition steps such as constant temperature, vacuum, and constant pressure between pre-deposition and actual coating, which may cause changes in the load on the graphite boat, in principle, false judgments should be eliminated and false judgments should be minimized so that the screening results have higher consistency and usability for subsequent deposition steps. Specifically, before the process officially begins, the system first uses a cylinder to drive the adjustable electrode rod forward, so that the electrode rod is inserted into the graphite boat and a stable contact is established, ensuring that the two are in a reliable and continuous electrical connection state.

[0034] Once contact has stabilized, the system initiates pre-discharge detection and assesses the load status. Simultaneously, it activates the load impedance anomaly alarm handling logic: if the detection result indicates a normal load, the system passes the pre-deposition screening process and enters the normal coating process; if the detection result indicates an abnormal load, the system directly enters the alarm process and executes protection measures, while simultaneously performing a boat removal inspection. After completing the boat removal inspection and adjusting the load status, the graphite boat can re-enter the pre-deposition detection screening process, forming a re-inspection closed loop, until the detection results meet the conditions for entering the formal coating process.

[0035] Through the aforementioned pre-deposition detection and screening process, the system can proactively identify and isolate abnormal loads on the graphite boat at the initial stage of the process. In case of abnormalities, it enables controllable shutdown and protection, reducing the risk of arcing caused by high-frequency discharge and power supply overload, thereby ensuring the safety and operational stability of the semiconductor coating power supply during the manufacturing process. Simultaneously, pre-deposition detection and screening effectively reduces high-frequency alarms, frequent rework, and repeated process executions caused by abnormal loads during the actual coating process, mitigating the adverse risks associated with process fluctuations. It also leads to comprehensive improvements in production efficiency and material consumption, achieving cost reduction and efficiency enhancement in the coating process.

[0036] Furthermore, the discharge characteristic parameters include current, voltage, power, and impedance data.

[0037] It should be noted that power includes incident power and reflected power; impedance data includes power supply impedance and load impedance.

[0038] Furthermore, discharge characteristic parameters were retrieved, and safe operating reference values ​​Pr for each parameter were determined. i ; Set the safety tolerance value Δp for each discharge characteristic parameter during pre-discharge operations. i Used to determine the safe operating range for each parameter [Pr] i -Δp i Pr i +Δp i ]; If P i ∉[Pr i -Δp i Pr i +Δpi Then determine the discharge characteristic parameter P. i An operational deviation has occurred, indicating an abnormal load condition. If P i ∈[Pr i -Δp i Pr i +Δp i Then determine the discharge characteristic parameter P. i The operation is normal, and the load status is normal. Where i is the label of the discharge characteristic parameter; P i Pr is the i-th discharge characteristic parameter; i Δp is the safe operating reference value for the i-th discharge characteristic parameter; i This is the safety tolerance value for the i-th discharge characteristic parameter.

[0039] It should be noted that the safety reference values ​​for each parameter can be adjusted and set by the management personnel according to the actual testing needs, or set by the system based on the average value and other data provided by historical testing data; Similarly, the safety tolerance values ​​of each parameter can be set by management personnel according to actual testing needs, or by the system based on the fluctuation data of historical testing data.

[0040] Furthermore, the adjustment of the load state includes: when the load state is abnormal, controlling the electrode rod to retract and performing a boat exit check, and adjusting at least one of the following: the graphite boat positioning state, the alignment state of the electrode head and the graphite boat hole, the electrode head insertion depth, and the contact pressure.

[0041] Furthermore, the impedance matching model analysis steps are as follows: T1. Retrieve the incident power P of the load from the discharge characteristic parameters. inc and reflected power P ref ; T2, incident power P based on load inc and reflected power P ref The reflection coefficient Γ of the load is calculated as follows: T3, passing the preset threshold value Γ min The reflection coefficient Γ of the load is compared and analyzed. If |Γ| < Γ min If so, then it is determined that the load impedance matches the power supply impedance; If |Γ|≥Γ min If so, it can be determined that the load impedance and the power supply impedance are mismatched.

[0042] T4. When the load impedance and the power supply impedance do not match, recalculate and adjust the matching network parameters according to the Smith chart until the load impedance and the power supply impedance are matched again.

[0043] Specifically, when the load impedance matches the power supply impedance, the power signal collected is monitored in real time. When the load impedance does not match the power supply impedance, the corresponding matching network parameters are quickly calculated based on the Smith chart, and the values ​​of passive components in the matching network are immediately adjusted through the control module to rematch the system impedance.

[0044] It should be noted that impedance matching is a state; when impedance is matched, the load can obtain maximum power, minimum reflected power, and the highest energy transmission efficiency. Conversely, when impedance mismatch occurs, reflected power can damage transmission lines and electrical equipment, and introduce uncertain electromagnetic interference, thereby interfering with the system.

[0045] It should be noted that the Smith chart is a graphical calculation tool used in the field of radio frequency and microwave engineering; it is used to establish the mapping relationship between the reflection coefficient and the impedance matching network parameters, so as to quickly calculate the target parameters of the adjustable capacitor and inductor in the impedance matching network based on the real-time reflection coefficient.

[0046] Example 2, as Figure 2 As shown, the present invention provides another technical solution: A fast matching system for impedance measurement and calculation: The system includes an RF power supply, an automatic impedance matching device, and a load; The automatic impedance matching device is electrically connected to the RF power supply and the load.

[0047] In this embodiment, an automatic impedance matching device is connected between the RF power module and the load, and it includes a power detection module, a control module, and an impedance matching network.

[0048] The impedance matching network selected is an L-shaped matching network, which is simple in structure, low in power consumption, and high in transmission efficiency, and is widely used in matching networks for RF power sputtering coating. This L-shaped matching network consists of a first adjustable capacitor C1, a second adjustable capacitor C2, and an inductor.

[0049] Furthermore, the automatic impedance matching device includes a power detection module, a control module, and an impedance matching network; The power detection module is used to acquire the power signal of the load in real time; the power signal includes incident power and reflected power; The impedance matching network consists of a first adjustable capacitor C1, a second adjustable capacitor C2, and an inductor, and is used to achieve impedance matching and maximum energy transfer between the RF power supply and the load. The control module analyzes the reflection coefficient of the load based on the load power signal data collected by the power detection module, and makes a matching judgment between the load impedance and the power supply impedance based on the analysis data; according to the impedance matching judgment result between the load and the power supply, the control impedance matching network realizes the rematching processing of the load impedance and the power supply impedance.

[0050] It should be noted that in order to achieve maximum power transfer from the power source to the load, a device capable of impedance variation must be placed between the power source and the load to meet the impedance matching condition, i.e., an impedance matching network.

[0051] Specifically, in this embodiment, the plasma impedance of the radio frequency ion source is affected by many factors, such as air intake pressure, radio frequency coil temperature, and Faraday cylinder shielding, so the impedance usually changes. When the load impedance changes, the system's reflected impedance changes. The power detection module collects the power signal in real time. The collected power signal is divided into two parts: incident power and reflected power. The current signal collected by the induction coil wound on the magnetic ring is selected by a diode and coupled with the voltage signal through a medium before being transmitted to the detection circuit.

[0052] The signal is processed and then transmitted to the control module. The control module adjusts the capacitance values ​​of the first adjustable capacitor C1 and the second adjustable capacitor C2 according to the changed impedance to ensure impedance matching between the RF power supply module and the load. At the same time, the matching degree can be optimized by fine-tuning the power supply frequency to achieve fast impedance matching and maximum energy transfer.

[0053] Example 3, as Figure 3 As shown, the present invention provides another technical solution: An adjustable electrode rod device: The device includes a horizontal guide rail, a vertical guide rail, an electrode introduction mechanism, an electrode rod, and an electrode head assembly; Driven by the electrode introduction mechanism, the electrode rod moves forward or backward along a preset guide direction, realizing the controllable insertion and withdrawal of the electrode head assembly and the hole in the graphite boat. The horizontal and vertical guide rails are used to constrain the movement trajectory of the electrode rod and adjust the insertion position, as well as to compensate for the boat loading tolerance, assembly deviation, and thermal deformation.

[0054] In this embodiment, the entire adjustable electrode rod insertion device is located inside the cavity. An external power supply is connected to the electrode rod via a connecting wire. The connecting wire passes through the bottom bracket, the gap in the middle of the vertical guide rail, and the gap in the middle of the horizontal guide rail in sequence, and finally connects to the electrode rod to supply power. The electrode introduction mechanism can be driven linearly by a cylinder. The thrust output by the cylinder drives the electrode rod to move forward or backward along a preset guide direction, so as to realize the controllable insertion and withdrawal of the electrode head and the hole in the graphite boat. Compared with the traditional fixed insertion method, this device ensures the movement trajectory of the electrode rod through guide constraints, avoiding obvious lateral swaying during the insertion process. On the other hand, the insertion position can be adjusted by means of vertical and horizontal guide rails, so that the electrode head can still be aligned with the hole even when there are boat loading tolerances, assembly deviations or thermal deformations, thereby reducing point contact, rubbing, jamming and uneven tightness caused by poor alignment.

[0055] Furthermore, in terms of process boat placement control, the device decouples the electrode rod insertion action from the boat placement action in terms of timing. It prioritizes completing the placement and positioning of the graphite boat, and only after the attitude of the graphite boat is stable, it drives the electrode rod to be inserted into the hole of the graphite boat.

[0056] It should be noted that abnormal contact usually refers to abnormal discharge caused by poor contact between the electrode and the graphite boat, mainly manifested in the tightness and misalignment of the electrode head after it is inserted into the hole of the graphite boat.

[0057] The tightness of the contact directly affects the contact pressure and effective contact area. Improper contact can cause coaxiality deviation, localized point contact, or even scratching and jamming. This instability in contact conditions often leads to fluctuations in contact resistance, which in turn causes a sudden change in the load's equivalent impedance, resulting in abnormal deviations in voltage, current, and power. It may also induce localized strong discharge or arcing, thereby triggering a high-frequency alarm from the RF power supply.

[0058] Therefore, improving the contact stability and consistency between the electrode head and the graphite boat holes is a crucial foundation for reducing high-frequency alarms and enhancing coating stability. This invention proposes a cylinder-driven adjustable electrode rod design to control the alignment and contact pressure between the electrode head and the graphite boat holes within a stable range, structurally reducing contact issues.

[0059] In this embodiment, since positional deviations, instantaneous impacts, or lateral friction are unavoidable during the boat-dropping process, if the electrode rod is inserted prematurely or in a semi-inserted state, it is susceptible to lateral pushing or bending torques, leading to electrode rod deformation and insertion deviation, ultimately resulting in poor contact between the electrode head and the hole. By arranging the insertion only after the boat-dropping process is completed, adverse loads on the electrode rod during the boat-dropping process can be effectively avoided, thereby ensuring more stable and consistent coaxiality, insertion depth, and contact pressure after the electrode head is inserted, reducing the risk of abnormal discharge caused by poor contact. With the aforementioned structure and operation, the contact state between the electrode head and the graphite boat aperture is more controllable, contact resistance fluctuations are suppressed, and the probability of sudden changes in load equivalent impedance is significantly reduced, thereby reducing abnormal voltage / current / power deviations and the risk of arcing. When operating with an RF power supply, it can effectively reduce the frequency of high-frequency alarms and improve the stability of the discharge process and the repeatability of the coating process.

[0060] Meanwhile, due to the reduction of uneven wear, scraping and impact during the insertion process, the wear rate of the electrode head and graphite boat holes is reduced, which helps to extend the service life of the electrode head and graphite boat and reduce maintenance and replacement costs. Furthermore, the device is applicable to both single-electrode mode and dual-electrode mode.

[0061] It should be noted that through multi-mode compatibility, the stable discharge requirements of different graphite boat structures and different process conditions can be met.

[0062] In this embodiment, in the single-electrode mode, stable insertion and reliable withdrawal of the single-loop electrode rod can be achieved; in the dual-electrode mode, the insertion position and contact state of the two loop electrodes can be adjusted and consistently controlled to meet the stable discharge requirements of different graphite boat structures and different process conditions.

[0063] By stabilizing the contact links, this device also provides a more reliable electrical connection basis for subsequent pre-deposition detection and screening, reducing the risk of misjudgment and missed judgment caused by contact factors.

[0064] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the invention can be implemented in other specific forms without departing from its spirit or essential characteristics. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of the invention is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within the present invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. A pre-deposition detection method, characterized in that: The method includes the following steps: S1. After completing the process of launching the boat, the adjustable electrode rod device is used to drive the electrode rod to establish a stable electrical contact with the graphite boat load. S2. Under normal pressure, perform pre-discharge detection on the graphite boat load and collect discharge characteristic parameters during the pre-discharge process; S3. Determine the load status of the graphite boat based on the discharge characteristic parameters; if the load status is normal, proceed with the formal coating process; if the load status is abnormal, trigger an alarm and perform a boat unloading inspection. S4. After adjusting the load status during the boat inspection, repeat steps S1-S3 to build a loop re-inspection until the load status is judged to be normal. S5. In the formal coating process, the power supply and load are controlled in real time by setting an impedance matching model.

2. The pre-deposition detection method based on impedance matching analysis according to claim 1, characterized in that: The discharge characteristic parameters include current, voltage, power, and impedance data.

3. The pre-deposition detection method based on impedance matching analysis according to claim 1, characterized in that: Retrieve discharge characteristic parameters and determine the safe operating reference value Pr for each parameter. i ; Set the safety tolerance value Δp for each discharge characteristic parameter during pre-discharge operations. i Used to determine the safe operating range for each parameter [Pr] i -Δp i Pr i +Δp i ]; If P i ∉[Pr i -Δp i Pr i +Δp i Then determine the discharge characteristic parameter P. i An operational deviation has occurred, indicating an abnormal load condition. If P i ∈[Pr i -Δp i Pr i +Δp i Then determine the discharge characteristic parameter P. i The operation is normal, and the load status is normal. Where i is the label of the discharge characteristic parameter; P i Pr is the i-th discharge characteristic parameter; i Δp is the safe operating reference value for the i-th discharge characteristic parameter; i This is the safety tolerance value for the i-th discharge characteristic parameter.

4. The pre-deposition detection method based on impedance matching analysis according to claim 1, characterized in that: The adjustment of the load state includes: when the load state is abnormal, controlling the electrode rod to retract and performing a boat exit check, and adjusting at least one of the following: the graphite boat positioning state, the alignment state of the electrode head and the graphite boat hole, the electrode head insertion depth, and the contact pressure.

5. The pre-deposition detection method based on impedance matching analysis according to claim 1, characterized in that: The impedance matching model analysis steps are as follows: T1. Retrieve the discharge characteristic parameters, including the incident power P of the load. inc and reflected power P ref ; T2, incident power P based on load inc and reflected power P ref The reflection coefficient Γ of the load is calculated as follows: ; T3, passing the preset threshold value Γ min The reflection coefficient Γ of the load is compared and analyzed. If |Γ| < Γ min If so, then it is determined that the load impedance matches the power supply impedance; If |Γ|≥Γ min If so, it is determined that the load impedance and the power supply impedance are mismatched; T4. When the load impedance and the power supply impedance do not match, recalculate and adjust the matching network parameters according to the Smith chart until the load impedance and the power supply impedance are matched again.

6. A fast matching system for impedance measurement and calculation, characterized in that: The system includes an RF power supply, an automatic impedance matching device, and a load; The automatic impedance matching device is electrically connected to the RF power supply and the load.

7. The impedance measurement and calculation fast matching system according to claim 6, characterized in that: The automatic impedance matching device includes a power detection module, a control module, and an impedance matching network; The power detection module is used to acquire the power signal of the load in real time; the power signal includes incident power and reflected power; The impedance matching network consists of a first adjustable capacitor C1, a second adjustable capacitor C2, and an inductor, and is used to achieve impedance matching and maximum energy transfer between the RF power supply and the load. The control module analyzes the reflection coefficient of the load based on the load power signal data collected by the power detection module, and makes a matching judgment between the load impedance and the power supply impedance based on the analysis data; according to the impedance matching judgment result between the load and the power supply, the control impedance matching network realizes the rematching processing of the load impedance and the power supply impedance.

8. An adjustable electrode rod device, characterized in that: The device includes a horizontal guide rail, a vertical guide rail, an electrode introduction mechanism, an electrode rod, and an electrode head assembly; Driven by the electrode introduction mechanism, the electrode rod moves forward or backward along a preset guide direction, realizing the controllable insertion and withdrawal of the electrode head assembly and the hole in the graphite boat. The horizontal and vertical guide rails are used to constrain the movement trajectory of the electrode rod and adjust the insertion position, as well as to compensate for the boat loading tolerance, assembly deviation, and thermal deformation.

9. An adjustable electrode rod device according to claim 8, characterized in that: In terms of process boat placement control, the device decouples the electrode rod insertion action from the boat placement action in terms of timing. It prioritizes completing the placement and positioning of the graphite boat, and only after the attitude of the graphite boat is stable does it drive the electrode rod to be inserted into the hole of the graphite boat.

10. An adjustable electrode rod device according to claim 8, characterized in that: The device is applicable to both single-electrode and dual-electrode modes.

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