High-purity water energy storage rapid heating automatic control device and cleaning machine

Abstract

The utility model belongs to the technical field of heating devices, and discloses a high-purity water energy storage rapid heating automatic control device which comprises an off-peak electricity energy storage heating water heater which comprises a circulating pump, a first heat exchange liquid tank, a second heat exchange liquid tank, an inner heating assembly and a three-way proportional valve. The input end of the circulating pump is connected with one end of the first heat exchange channel, the output end of the circulating pump is communicated with the first heat exchange liquid tank through a backflow pipe, the inner heating assembly is used for heating the second heat exchange liquid tank, and the other end of the three-way proportional valve is communicated with the other end of the first heat exchange channel. According to the valley electricity energy storage heating water heater, an accurate heat exchange liquid temperature regulation and control system is arranged, heat exchange liquid can be regulated and controlled in real time, the heat exchange liquid flows through the first heat exchange channel and exchanges heat with RO water flowing through the second heat exchange channel, RO water heating is achieved, and the temperature rise thermal inertia of a heated object is reduced.

Description

Technical Field

[0001] The utility model belongs to the technical field of heating devices, and in particular relates to a high-purity water energy storage rapid heating automatic control device and a cleaning machine. Background Art

[0002] Currently, the existing high-purity water heating devices for wafer cleaning on the market generally use traditional electric heating technology. Traditional electric heating uses resistance wire to generate instant heat, and the electrical energy is converted into heat energy by the resistance wire and then transmitted to the object to be heated.

[0003] The defects of traditional electric heating include being affected by the material of the resistance wire itself and the heat exchange area, and the large thermal inertia of the temperature rise of the heated object. Therefore, there is an urgent need to provide an automatic control device for high-purity water energy storage and rapid heating of wafer cleaning to solve the above problems. Utility Model Content

[0004] In order to solve the above technical problems, the utility model provides a high-purity water energy storage rapid heating automatic control device and a cleaning machine to solve the defects of traditional electric heating mentioned in the above background technology, such as being affected by the material of the resistance wire itself and the heat exchange area, and the large thermal inertia of the temperature rise of the heated object.

[0005] In order to achieve the above object, the technical solution of the utility model is as follows:

[0006] A high-purity water energy storage rapid heating automatic control device includes a valley power energy storage heating water heater, the valley power energy storage heating water heater includes a circulation pump, a first heat exchange liquid tank, a second heat exchange liquid tank, an internal heating component and a three-way proportional valve, the input end of the circulation pump is connected to one end of a first heat exchange channel, the output end of the circulation pump is connected to the first heat exchange liquid tank through a reflux pipe, the first heat exchange liquid tank and the second heat exchange liquid tank are connected through an overflow pipe, the internal heating component is used to heat the second heat exchange liquid tank, the three-way proportional valve is connected to the first heat exchange liquid tank and the second heat exchange liquid tank through a first heat exchange liquid delivery pipe and a second heat exchange liquid delivery pipe respectively, and the other end of the three-way proportional valve is connected to the other end of the first heat exchange channel.

[0007] A cleaning machine includes a valley electricity energy storage heating water heater, wherein the valley electricity energy storage heating water heater is arranged at one end of a heat exchanger, and a second heat exchange channel is arranged at the other end of the heat exchanger, one end of the second heat exchange channel is connected to an RO water tank through a connecting pipe, and the other end of the second heat exchange channel is connected to a cleaning pool through a hot water delivery pipe.

[0008] As a further improvement to the present invention, a cold water delivery pipe is further provided between the RO water tank and the cleaning pool.

[0009] As a further improvement to the utility model, a heater is provided on one side of the cleaning pool.

[0010] As a further improvement to the utility model, the top end of the cleaning tank is also connected to a dosing pipe, and the bottom end of the cleaning tank is provided with a drainage pipe.

[0011] Through the above technical solution, the beneficial effects of the technical solution of the utility model are:

[0012] The utility model provides a valley power energy storage heating water heater with a circulation pump, a first heat exchange liquid tank, a second heat exchange liquid tank, an internal heating component and a three-way proportional valve, forming an accurate heat exchange liquid temperature control system, which can control the heat exchange liquid in real time. The heat exchange liquid flows through the first heat exchange channel and exchanges heat with the RO water flowing through the second heat exchange channel, thereby heating the RO water and reducing the thermal inertia of the temperature rise of the heated object.

[0013] The cleaning machine of the utility model can quickly control the temperature by adding high-temperature RO water and low-temperature RO water in different proportions, and a heater is also arranged on one side of the cleaning pool to perform real-time heating to ensure that the temperature of the composed cleaning liquid is accurate and stable. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0015] Figure 1 This is a schematic diagram of the working principle of a silicon wafer cleaning machine.

[0016] Figure 2 It is a structural schematic diagram of the utility model.

[0017] Explanation of the symbols in the schematic diagram:

[0018] 1. RO water tank; 2. Connecting pipe; 3. Heat exchanger; 31. First heat exchange channel; 32. Second heat exchange channel; 4. Valley power energy storage heating water heater; 41. Circulation pump; 42. Reflux pipe; 43. First heat exchange liquid tank; 44. Second heat exchange liquid tank; 45. Internal heating component; 46. Overflow pipe; 47. Three-way proportional valve; 48. First heat exchange liquid delivery pipe; 49. Second heat exchange liquid delivery pipe; 5. Hot water delivery pipe; 6. Cleaning tank; 7. Cold water delivery pipe; 8. Dosing pipe; 9. Heater; 10. Drain pipe. DETAILED DESCRIPTION

[0019] The following will be combined with the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0020] See also Figure 1-2 , the utility model provides the following embodiments:

[0021] A high-purity water energy storage rapid heating automatic control device includes a valley power energy storage heating water heater 4, the valley power energy storage heating water heater 4 includes a circulation pump 41, a first heat exchange liquid tank 43, a second heat exchange liquid tank 44, an internal heating component 45 and a three-way proportional valve 47, combined with Figure 2 The input end of the circulation pump 41 is connected to one end of the first heat exchange channel 31, and the output end of the circulation pump 41 is connected to the first heat exchange liquid tank 43 through the reflux pipe 42. The circulation pump 41 plays a role in circulating the heat exchange liquid. The first heat exchange liquid tank 43 is connected to the second heat exchange liquid tank 44 through the overflow pipe 46. After the heat exchange liquid in the first heat exchange liquid tank 43 is filled, the excess heat exchange liquid enters the overflow pipe 46. The internal heating component 45 is used to heat the second heat exchange liquid tank 44. The three-way proportional valve 47 is connected to the first heat exchange liquid tank 43 and the second heat exchange liquid tank 44 through the first heat exchange liquid delivery pipe 48 and the second heat exchange liquid delivery pipe 49 respectively. The two heat exchange liquids with a temperature difference are delivered in proportion, thereby realizing the temperature control of the heat exchange liquid in the first heat exchange channel 31 and reducing the influence of thermal inertia of temperature rise. The other end of the three-way proportional valve 47 is connected to the other end of the first heat exchange channel 31.

[0022] A cleaning machine includes a valley electricity energy storage heating water heater 4, which is arranged at one end of a heat exchanger 3, and a second heat exchange channel 32 is arranged at the other end of the heat exchanger 3. One end of the second heat exchange channel 32 is connected to an RO water tank 1 through a connecting pipe 2, and the other end of the second heat exchange channel 32 is connected to a cleaning tank 6 through a hot water delivery pipe 5. The RO water in the RO water tank 1 enters the cleaning tank 6 after heat exchange in the heat exchanger 3.

[0023] As another preferred embodiment of the present invention, a cold water delivery pipe 7 is further provided between the RO water tank 1 and the cleaning pool 6, so that low-temperature RO water can be added to the cleaning pool 6 separately.

[0024] As another preferred solution of the present invention, a heater 9 is provided on one side of the cleaning tank 6 for real-time heating of the cleaning liquid in a single cleaning tank 6 .

[0025] As another preferred embodiment of the present invention, the top of the cleaning tank 6 is also connected to a dosing pipe 8, and the bottom of the cleaning tank 6 is provided with a drain pipe 10 for adding cleaning agents and discharging the final cleaning liquid.

[0026] The above description of the disclosed embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A high-purity water energy storage rapid heating automatic control device, characterized in that: The invention comprises a valley electricity energy storage heating water heater (4), wherein the valley electricity energy storage heating water heater (4) comprises a circulation pump (41), a first heat exchange liquid tank (43), a second heat exchange liquid tank (44), an internal heating component (45) and a three-way proportional valve (47); the input end of the circulation pump (41) is connected to one end of the first heat exchange channel (31); the output end of the circulation pump (41) is connected to the first heat exchange liquid tank (43) through a reflux pipe (42); the first heat exchange liquid tank (43) and the second heat exchange liquid tank (44) are connected through an overflow pipe (46); the internal heating component (45) is used to heat the second heat exchange liquid tank (44); the three-way proportional valve (47) is connected to the first heat exchange liquid tank (43) and the second heat exchange liquid tank (44) through a first heat exchange liquid delivery pipe (48) and a second heat exchange liquid delivery pipe (49) respectively; the other end of the three-way proportional valve (47) is connected to the other end of the first heat exchange channel (31).

2. A cleaning machine, comprising the high-purity water energy storage rapid heating automatic control device as claimed in claim 1, characterized in that: The valley electricity energy storage heating water heater (4) is arranged at one end of the heat exchanger (3), and the other end of the heat exchanger (3) is provided with a second heat exchange channel (32), one end of the second heat exchange channel (32) is connected to the RO water tank (1) via a connecting pipe (2), and the other end of the second heat exchange channel (32) is connected to the cleaning pool (6) via a hot water delivery pipe (5).

3. The cleaning machine according to claim 2, characterized in that: A cold water delivery pipe (7) is also provided between the RO water tank (1) and the cleaning tank (6).

4. The cleaning machine according to claim 2, characterized in that: A heater (9) is provided on one side of the cleaning pool (6).

5. The cleaning machine according to claim 2, characterized in that: The top end of the cleaning tank (6) is also connected to a dosing pipe (8), and the bottom end of the cleaning tank (6) is provided with a drainage pipe (10).

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