Phosphine gas purification device

Abstract

The utility model relates to the technical field of gas purification, and particularly discloses a phosphine gas purification device which comprises a tank body, a gas chamber and a purification cavity are arranged in the tank body, a drying layer and an adsorption filter layer are fixedly mounted in the purification cavity, the adsorption filter layer is positioned between the gas chamber and the drying layer, a plurality of gas outlets are formed in the top of the gas chamber in a penetrating manner, and the gas outlets are communicated with the gas chamber. A plurality of air outlets are formed in the tank body, the air outlets are communicated with the purification cavity and the air chamber, fan blades are rotationally arranged in the air chamber, the fan blades are driven by a transmission assembly to intermittently rotate and are in sliding fit with the air outlets, the fan blades are attached to a top plate of the air chamber, and an air inlet pipe and a return pipe are inserted into the air chamber; according to the gas purification device, gas can alternately enter the purification cavity through the gas outlet, and a gas outlet path is staggered, so that the gas which is reacted with a catalyst cannot be extruded out of the adsorption filter layer by the gas which subsequently enters the purification cavity, and sufficient time for the gas to react with the catalyst is ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of gas purification, and specifically designs a phosphine gas purification device. Background Art

[0002] High-purity electronic gases are widely used in electronic information products, aerospace, high-efficiency solar cells, military industry and other fields. As an electronic gas, the current purification process of phosphine includes low-temperature vacuum separation, adsorption drying, distillation and catalyst (gallium-indium alloy, nickel catalyst) deep adsorption and other steps. The existing phosphine purification uses adsorption catalysts for adsorption, which has a short catalyst adsorption life, low phosphine gas output and high production cost.

[0003] After searching, the applicant found a Chinese utility model patent "A Gas Purification Device", whose authorization publication number is CN219462982U. The wind wheel drives the outlet pipe to rotate when discharging gas, so that the outflowing gas can better contact with the filler. After analysis by the applicant, the disadvantage of this technical solution is that the airflow direction of the return pipe conflicts with the airflow direction of the air pipe. When the return pipe re-discharges the filtered gas, the wind wheel will be affected by wind from different directions, causing the wind wheel to rotate unstably, which in turn causes the outlet path of the outlet pipe to be unstable, causing the outlet pipe to discharge a large amount of gas at one position. When these gases enter the catalyst plate, the gas that is reacting with the catalyst will be forced to be discharged, resulting in insufficient reaction. Based on this, the inventor purposefully provides a phosphine gas purification device with a stable outlet path, sufficient contact between the gas and the catalyst, and sufficient reaction time. Utility Model Content

[0004] The purpose of the utility model is to address the deficiencies of the prior art and provide a phosphine gas purification device with a stable gas outlet path, sufficient contact between the gas and the catalyst, and sufficient reaction time, so as to solve the problem that the gas outlet pipe in the prior art cannot release the gas evenly onto the catalyst and there is airflow impact.

[0005] The purpose of the utility model can be achieved through the following technical solutions:

[0006] A phosphine gas purification device comprises a tank body, wherein an air chamber and a purification cavity are arranged inside the tank body, a drying layer and an adsorption filter layer are fixedly installed in the purification cavity, the adsorption filter layer is located between the air chamber and the drying layer, a plurality of air outlets are arranged through the top of the air chamber, the plurality of air outlets are arranged in a circle, the air outlets are connected with the purification cavity and the air chamber, a fan blade is rotatably arranged inside the air chamber, the fan blade is driven by a transmission component to rotate intermittently, and is slidably matched with the air outlet, the fan blade is fitted with a top plate of the air chamber, an air inlet pipe and a return pipe are plugged into the air chamber, an exhaust pipe is plugged into the top of the tank body, and an input end of the return pipe is plugged into the exhaust pipe.

[0007] As a further optimization or improvement of this solution.

[0008] The transmission assembly includes a first gear and a second gear, which are rotatably arranged on the bottom plate of the tank body respectively, and the first gear and the second gear are meshed with each other. The first gear is fixedly installed at the bottom of the fan blade, and the second gear is driven by an external driving source.

[0009] As a further optimization or improvement of this solution.

[0010] The air chamber bottom plate is fixedly installed with an arc-shaped guide plate, the two guide plates are symmetrically arranged, and the two guide plates are arranged on both sides of the central axis of the fan blade, and the outlet ends of the air inlet pipe and the return pipe are arranged toward the arc surfaces of the two guide plates respectively.

[0011] As a further optimization or improvement of this solution.

[0012] The two guide plates are both provided with guide holes.

[0013] As a further optimization or improvement of this solution.

[0014] A valve is provided at the connection between the return pipe and the exhaust pipe, and the valve is connected to an external control box.

[0015] As a further optimization or improvement of this solution.

[0016] The diameter of the air outlet increases upward along its axial direction.

[0017] Beneficial effects of the utility model:

[0018] 1. The utility model can realize intermittent rotation of the fan blades through the transmission component, and the cooperation of the fan blades and the air outlet realizes intermittent opening and closing of the air outlet. When the fan blades are stationary, half of the air outlets are open and the other half of the air outlets are closed. At this time, the gas will enter the purification chamber from the opened air outlet and enter the adsorption filter layer along the air outlet path to react with the nickel catalyst. When the fan blades rotate for the first time, the air outlet that is currently discharging air is closed, and the closed air outlet is opened. At this time, the path of the opened air outlet is completely staggered with the air outlet path when stationary. After the second rotation, the opened air outlet is consistent with the path of the air outlet opened after the first rotation, which means that two rotations of the fan blades constitute a cycle, so that the gas can alternately enter the purification chamber through the air outlet and stagger the air outlet path, so that the gas entering the purification chamber later will not squeeze the gas that is reacting with the catalyst out of the adsorption filter layer, thereby ensuring that the gas has sufficient time to react with the catalyst.

[0019] 2. The utility model can mitigate the impact effect between the air intake pipe and the return pipe to a certain extent by installing a guide plate in the air chamber so that it faces the air intake pipe and the return pipe, which are the sources of the air flow. In addition, the arc-shaped direction design of the guide plate helps to redirect the airflow from the air intake pipe and the return pipe, thereby reducing the direct conflict between them and also contributing to the stability of the air outlet. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The utility model is further described below in conjunction with the accompanying drawings.

[0021] Figure 1 It is a schematic diagram of the overall structure of the utility model.

[0022] Figure 2 It is a schematic diagram of the tank cross-section structure.

[0023] Figure 3 This is an exploded diagram of the air chamber structure.

[0024] Figure 4 Schematic diagram of the tank bottom structure.

[0025] The figure shows:

[0026] 1. Tank body; 2. Air inlet pipe; 3. Exhaust pipe; 4. Valve; 5. Reflux pipe; 6. Air pump; 7. Air chamber; 8. Adsorption filter layer; 9. Drying layer; 10. Air outlet; 11. Fan blades; 12. First gear; 13. Guide plate; 14. Guide hole; 15. Second gear; 16. Purification chamber. DETAILED DESCRIPTION

[0027] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0028] See also Figure 1 - Figure 4A phosphine gas purification device comprises a tank body 1, wherein an air chamber 7 and a purification chamber 16 are arranged inside the tank body 1, a drying layer 9 and an adsorption filter layer 8 are fixedly installed inside the purification chamber 16, the adsorption filter layer 8 is located between the air chamber 7 and the drying layer 9, a plurality of air outlets 10 are arranged through the top of the air chamber 7, the plurality of air outlets 10 are arranged in a circle, the air outlets 10 communicate with the purification chamber 16 and the air chamber 7, a fan blade 11 is rotatably arranged inside the air chamber 7, the fan blade 11 is driven by a transmission assembly to rotate intermittently, and is slidably matched with the air outlet 10, the fan blade 11 is fitted with a top plate of the air chamber 7, an air inlet pipe 2 and a reflux pipe 5 are plugged inside the air chamber 7, an exhaust pipe 3 is plugged on the top of the tank body 1, and an input end of the reflux pipe 5 is plugged inside the exhaust pipe 3.

[0029] In a specific embodiment, an air pump 6 is provided on the reflux pipe 5, the air inlet pipe 2 is connected to the external air supply box, the adsorption filter layer 8 can be filled with a nickel catalyst or other metal oxide catalyst, and the drying layer 9 can be set to a molecular sieve. The above components are prior art, and the specific models are not disclosed, which does not affect the integrity of the solution.

[0030] The working principle of the utility model is as follows: first, the phosphine gas is transported into the air chamber 7 through the air inlet pipe 2, and the phosphine gas is released into the purification chamber 16 through the air outlet 10 on the air chamber 7, and the phosphine gas is purified by the adsorption filter layer 8 and the drying layer 9. The gas after one purification returns to the air chamber 7 through the exhaust pipe 3 and the reflux pipe 5, and is mixed and diluted with the phosphine gas input by the air inlet pipe 2, and the mixed gas is released into the purification chamber 16 through the air outlet 10 again, and the transmission component can realize the intermittent rotation of the fan blade 11, and the intermittent opening and closing of the air outlet 10 is realized by the cooperation of the fan blade 11 and the air outlet 10. When the fan blade 11 is stationary, half of the air outlets 10 are opened, and the other half of the air outlets 10 are closed. At this time, the gas will be discharged from the open air outlet 11. The air outlet 10 enters the purification chamber 16 and enters the adsorption filter layer 8 along the air outlet path to react with the nickel catalyst. When the fan blade 11 rotates for the first time, the air outlet 10 that is currently discharging air is closed, and the closed air outlet 10 is opened. At this time, the path of the opened air outlet 10 is completely staggered with the air outlet path when stationary. After the second rotation, the opened air outlet 10 is consistent with the path of the air outlet 10 opened after the first rotation, which means that two rotations of the fan blade 11 constitute a cycle, so that the gas can alternately enter the purification chamber 16 through the air outlet 10 and stagger the air outlet path, so that the gas entering the purification chamber 16 later will not squeeze the gas that is reacting with the catalyst out of the adsorption filter layer 8, thereby ensuring that the gas has sufficient time to react with the catalyst.

[0031] Specifically, the transmission assembly includes a first gear 12 and a second gear 15, which are respectively rotatably arranged on the bottom plate of the tank body 1, and the first gear 12 and the second gear 15 are meshed with each other. The first gear 12 is fixedly installed at the bottom of the fan blade 11, and the second gear 15 is driven by an external driving source.

[0032] In a specific embodiment, the external driving source can be set to a motor, and the second gear 15 is an incomplete gear. The above components are prior art, and the specific models are not disclosed, which does not affect the integrity of the solution. The second gear 15 is driven by the motor. Due to the meshing relationship, the second gear 15 will drive the first gear 12 to rotate, and the second gear 15 can only drive the first gear 12 to rotate 45 degrees after one rotation, thereby causing the fan blades 11 to rotate 45 degrees, thereby realizing intermittent opening and closing of the air outlet 10, thereby giving the gas and the catalyst sufficient reaction time.

[0033] More specifically, an arc-shaped guide plate 13 is fixedly installed on the bottom plate of the air chamber 7. The two guide plates 13 are symmetrically arranged, and the two guide plates 13 are arranged on both sides of the central axis of the fan blade 11. The outlet ends of the air inlet pipe 2 and the return pipe 5 are respectively arranged toward the arc surfaces of the two guide plates 13, which can alleviate the impact effect between the air inlet pipe 2 and the return pipe 5 to a certain extent. In addition, the arc design of the guide plate 13 helps to redirect the airflow from the air inlet pipe 2 and the return pipe 5, so that the two airflows are mixed in the air chamber 7, reducing the pressure loss caused by the direct impact of the airflow, and promoting the airflow to form a more uniform flow state inside the air chamber 7, which also helps the stability of the air outlet 10.

[0034] At the same time, it should be noted that both guide plates 13 are provided with guide holes 14, through which part of the airflow can be guided to the middle of the air chamber 7, accelerating the mixing with the airflow guided to the inner wall of the air chamber 7 by the guide plates 13, so that the gas mixing is more uniform.

[0035] More specifically, a valve 4 is provided at the connection between the return pipe 5 and the exhaust pipe 3 , and the valve 4 is connected to an external control box.

[0036] In a specific embodiment, the exhaust pipe 3 is connected to the gas collection box, the valve 4 is a three-way valve, and the external control box includes a PLC control system, a networking module, a signal transmission module, etc. The above components are prior art, and the specific models are not disclosed, which does not affect the integrity of the scheme; the purified gas can be discharged through the exhaust pipe 3, and the flow direction of the purified gas can be controlled by the valve 4. When the valve 4 controls the reflux pipe 5 to be connected with the exhaust pipe 3 and the exhaust pipe 3 is closed with the gas collection box, the purified gas will return to the tank body 1 through the reflux pipe 5 for multiple purifications, and when the reflux pipe 5 and the exhaust pipe 3 are closed and the exhaust pipe 3 is connected with the gas collection box, the purified gas will be collected.

[0037] More specifically, the diameter of the air outlet 10 increases upward along its axial direction, and the farther the position of the air outlet 10 is from the axis of the air chamber 7, the larger the opening diameter of the air inlet. The air outlet 10 is designed in an inverted cone shape, and the gas will slow down and diffuse to the surrounding area at the moment of release. On the one hand, it can expand the gas coverage range, and on the other hand, it can reduce the impact of airflow.

[0038] The above shows and describes the basic principle, main features and advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments, and the above embodiments and descriptions are only for explaining the principle of the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, and these changes and improvements fall within the scope of the utility model to be protected.

Claims

1. A phosphine gas purification device, characterized in that: The invention comprises a tank body (1), wherein an air chamber (7) and a purification chamber (16) are arranged inside the tank body (1), a drying layer (9) and an adsorption filter layer (8) are fixedly installed inside the purification chamber (16), the adsorption filter layer (8) is located between the air chamber (7) and the drying layer (9), a plurality of air outlets (10) are arranged through the top of the air chamber (7), the plurality of air outlets (10) are arranged in a circumferential manner, the air outlets (10) are connected to the purification chamber (16) and the air chamber (7), a fan blade (11) is rotatably arranged inside the air chamber (7), the fan blade (11) is driven by a transmission component to intermittently rotate, and is slidably matched with the air outlet (10), the fan blade (11) is fitted with a top plate of the air chamber (7), an air inlet pipe (2) and a return pipe (5) are plugged inside the air chamber (7), an exhaust pipe (3) is plugged into the top of the tank body (1), and the input end of the return pipe (5) is plugged into the exhaust pipe (3).

2. A phosphine gas purification device according to claim 1, characterized in that: The transmission assembly comprises a first gear (12) and a second gear (15), the first gear (12) and the second gear (15) being rotatably disposed on the bottom plate of the tank body (1), the first gear (12) and the second gear (15) being meshed with each other, the first gear (12) being fixedly mounted on the bottom of the fan blade (11), and the second gear (15) being driven by an external driving source.

3. The phosphine gas purification device according to claim 1, characterized in that: The bottom plate of the air chamber (7) is fixedly mounted with an arc-shaped guide plate (13), the two guide plates (13) are symmetrically arranged, and the two guide plates (13) are arranged on both sides of the central axis of the fan blade (11), and the air outlet ends of the air inlet pipe (2) and the return pipe (5) are arranged towards the arc surfaces of the two guide plates (13) respectively.

4. A phosphine gas purification device according to claim 3, characterized in that: The two guide plates (13) are both provided with guide holes (14).

5. The phosphine gas purification device according to claim 1, characterized in that: A valve (4) is provided at the connection between the return pipe (5) and the exhaust pipe (3), and the valve (4) is connected to an external control box.

6. The phosphine gas purification device according to claim 1, characterized in that: The diameter of the air outlet (10) increases gradually upward along its axial direction.

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