Flow, temperature and pressure interlocking control system of anti-disproportionation device

Abstract

The utility model relates to the technical field of polycrystalline silicon production, in particular to a flow, temperature and pressure interlocking control system of an anti-disproportionation device. A feeding pipeline I and a feeding pipeline II are respectively communicated with a material inlet I of a heat exchanger; a flow measuring device I arranged on the feeding pipeline I is connected with a flow valve I; a flow measuring device II arranged on the feeding pipeline II is connected with a flow valve II; a material inlet of the anti-disproportionation device is communicated with a first material outlet of the heat exchanger; a second material inlet of the heat exchanger is communicated with a material outlet of the anti-disproportionation device through a communication pipeline; a total flux valve and a flux valve are arranged on the communicating pipeline; a second material outlet of the heat exchanger is connected with a second material output pipeline; the communicating pipeline is communicated with a material II output pipeline through a bypass pipeline; and a bypass valve is arranged on the bypass pipeline. By adopting the anti-disproportionation device disclosed by the utility model, the self-regulation of the feeding flow of the anti-disproportionation device can be realized, the reaction temperature and pressure are kept stable, and the reaction efficiency and quality are improved; energy is saved, consumption is reduced, and potential safety hazards are reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of polysilicon production, in particular to a flow, temperature and pressure interlocking control system of an anti-disproportionation device. Background Art

[0002] In the process of polysilicon production using the modified Siemens method, the anti-disproportionation device plays a very important role. The current anti-disproportionation device mainly operates by mixing silicon tetrachloride and dichlorodihydrosilane, and then entering the anti-disproportionation adsorption column for anti-disproportionation reaction. However, since the feed amount of the two materials needs to be controlled by the operator based on experience, it is easy to cause fluctuations in the feed amount; moreover, the heat medium flow or temperature of the heat exchanger is prone to fluctuations, which will cause the temperature of the material in the anti-disproportionation device and the pressure in the anti-disproportionation device to be unstable, and then cause the anti-disproportionation device to be unable to be stably controlled. The disproportionation reaction is a reversible reaction. When the parameters are unstable, it will affect the conversion rate of the material, and then affect the efficiency of the anti-disproportionation reaction and the safety and stability of the operation of the anti-disproportionation device. Utility Model Content

[0003] In view of this, the utility model provides a flow, temperature, and pressure interlock control system for an anti-disproportionation device, the main purpose of which is to achieve self-regulation of the feed flow of the anti-disproportionation device, maintain the stability of the reaction temperature and pressure, improve the reaction efficiency and quality, save energy and reduce consumption, and reduce safety hazards.

[0004] In order to achieve the above purpose, the utility model mainly provides the following technical solutions:

[0005] The embodiment of the utility model provides a flow, temperature, and pressure interlock control system of an anti-disproportionation device, comprising: an anti-disproportionation device, a heat exchanger, a feed pipeline 1, and a feed pipeline 2;

[0006] The feed pipeline 1 is connected to the material inlet 1 of the heat exchanger; the feed pipeline 1 is provided with a flow measuring device 1; the feed pipeline 1 is provided with a flow valve 1; the flow measuring device 1 is connected to the flow valve 1 for control;

[0007] The feed pipeline 2 is connected to the material inlet 1 of the heat exchanger; the feed pipeline 2 is provided with a flow measuring device 2; the feed pipeline 2 is provided with a flow valve 2; the flow measuring device 2 is connected to the flow valve 2 for control;

[0008] The material inlet of the anti-disproportionation device is connected to the material outlet of the heat exchanger;

[0009] The second material inlet of the heat exchanger is connected to the material outlet of the anti-disproportionation device through a connecting pipeline; a total flux valve and a flux valve are arranged on the connecting pipeline;

[0010] The material second outlet of the heat exchanger is connected to the material second output pipeline; the connecting pipeline is connected to the material second output pipeline through a bypass pipeline; the connection point between the bypass pipeline and the connecting pipeline is located between the total flux valve and the flux valve; a bypass valve is arranged on the bypass pipeline;

[0011] The anti-disproportionation device is provided with a pressure measuring device 1 and a pressure measuring device 2;

[0012] The anti-disproportionation device is provided with a temperature measuring device 1 and a temperature measuring device 2;

[0013] The temperature measuring device 1 and the temperature measuring device 2 are respectively connected to the flow valve 1, the flow valve 2, the flux valve, and the bypass valve to perform interlocking control;

[0014] The pressure measuring device 1 and the pressure measuring device 2 are respectively connected to the flow valve 1, the flow valve 2 and the total flux valve to perform interlocking control.

[0015] Further, the feed pipeline 1 is connected with a side passage pipe 1; the two ends of the side passage pipe 1 are respectively located upstream and downstream of the flow valve 1; the side passage pipe 1 is provided with a control valve 1;

[0016] The second feed pipeline is connected to a second side passage pipe; the two ends of the second side passage pipe are respectively located upstream and downstream of the second flow valve; the second side passage pipe is provided with a second control valve;

[0017] The connecting pipeline is connected to a side passage pipe 3; the two ends of the side passage pipe 3 are respectively located upstream and downstream of the flux valve; the side passage pipe 3 is provided with a control valve 3;

[0018] The connecting pipeline is connected to a side passage pipe 4; the two ends of the side passage pipe 4 are respectively located upstream and downstream of the total flux valve; the side passage pipe 4 is provided with a control valve 4;

[0019] The bypass pipeline is connected to a side passage pipe five; two ends of the side passage pipe five are respectively located upstream and downstream of the bypass valve; and a control valve five is arranged on the side passage pipe five.

[0020] Furthermore, opening and closing valves are provided upstream and downstream of the flow valve 1, the flow valve 2, the flux valve, the bypass valve and the total flux valve.

[0021] Furthermore, the bypass valve is linked with the flux valve for control; the opening of the bypass valve is adjusted according to the opening of the flux valve.

[0022] Further, the opening ratio of the bypass valve is equal to 100% minus the opening ratio of the flux valve.

[0023] By means of the above technical solution, the flow, temperature and pressure interlocking control system of the anti-disproportionation device of the utility model has at least the following advantages:

[0024] It can realize self-regulation of the feed flow of the anti-disproportionation device, maintain the stability of reaction temperature and pressure, improve reaction efficiency and quality, save energy and reduce consumption, and reduce safety hazards.

[0025] The above description is only an overview of the technical solution of the utility model. In order to more clearly understand the technical means of the utility model and implement it according to the contents of the specification, the following is a detailed description of the preferred embodiments of the utility model in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 A schematic diagram of a flow, temperature, and pressure interlocking control system for an anti-disproportionation device provided in an embodiment of the utility model.

[0027] As shown in the figure:

[0028] 1 is an anti-disproportionation device, 2 is a heat exchanger, 3 is a feed pipeline 1, 4 is a feed pipeline 2, 5 is a connecting pipeline, 6 is a bypass pipeline, and 7 is a material 2 output pipeline. DETAILED DESCRIPTION

[0029] In order to further explain the technical means and effects adopted by the utility model to achieve the predetermined utility model purpose, the specific implementation methods, structures, features and effects of the utility model application are described in detail below in conjunction with the accompanying drawings and preferred embodiments. In the following description, different "one embodiment" or "embodiment" does not necessarily refer to the same embodiment. In addition, specific features, structures, or characteristics in one or more embodiments may be combined in any suitable form.

[0030] like Figure 1 As shown, on the one hand, the embodiment of the utility model provides a flow, temperature, and pressure interlock control system of an anti-disproportionation device 1, comprising: an anti-disproportionation device 1, a heat exchanger 2, a feed pipeline 1 3, and a feed pipeline 2 4; the feed pipeline 1 3 is connected to the material 1 inlet of the heat exchanger 2; a flow measuring device 1 is provided on the feed pipeline 1 3, which is used to measure the actual flow value of dichlorodihydrosilane. A flow valve 1 is provided on the feed pipeline 1 3, which is used to adjust the flow of dichlorodihydrosilane; the flow measuring device 1 is connected to the flow valve 1 for control.

[0031] The feed pipeline 2 4 is connected to the material inlet 1 of the heat exchanger 2; the feed pipeline 2 4 is provided with a flow measuring device 2 for measuring the actual flow value of silicon tetrachloride; the feed pipeline 2 4 is provided with a flow valve 2 for adjusting the flow of silicon tetrachloride; the flow measuring device 2 is connected to the flow valve 2 for control;

[0032] The material inlet of the anti-disproportionation device 1 is connected with the material outlet 1 of the heat exchanger 2, so that the heated material enters the anti-disproportionation device 1; the material inlet 2 of the heat exchanger 2 is connected with the material outlet of the anti-disproportionation device 1 through the connecting pipeline 5, so that the material after the anti-disproportionation reaction can be used as a heat source to heat the material entering the anti-disproportionation device 1 through the heat exchanger 2; the connecting pipeline 5 is provided with a total flux valve and a flux valve; the total flux valve controls the total flow of the connecting pipeline 5; the flux valve controls the material flow of the connecting pipeline 5 entering the heat exchanger 2. The material outlet 2 of the heat exchanger 2 is connected with the material output pipeline 2 7; the connecting pipeline 5 is connected with the material output pipeline 2 7 through the bypass pipeline 6; the connection point between the bypass pipeline 6 and the connecting pipeline 5 is located between the total flux valve and the flux valve; the bypass pipeline 6 is provided with a bypass valve; the bypass valve controls the material flow of the connecting pipeline 5 output to the material output pipeline 2 7. Furthermore, the bypass valve is linked to the flux valve for control; the opening of the bypass valve is adjusted according to the opening of the flux valve to adjust the material flow entering the heat exchanger 2, thereby controlling the temperature of the heat exchanger 2 so that the temperature of the material entering the anti-disproportionation device 1 through the heat exchanger 2 is within a preset range. Furthermore, the opening ratio of the bypass valve is equal to 100% minus the opening ratio of the flux valve, so that the sum of the openings of the flux valve and the bypass valve reaches 100% of the flow rate.

[0033] The anti-disproportionation device 1 is provided with a pressure measuring device 1 and a pressure measuring device 2 for measuring the pressure value in the anti-disproportionation device 1; the anti-disproportionation device 1 is provided with a temperature measuring device 1 and a temperature measuring device 2 for measuring the temperature value in the anti-disproportionation device 1; the temperature measuring device 1 and the temperature measuring device 2 are respectively connected to the flow valve 1, the flow valve 2, the flux valve, and the bypass valve for interlocking control; according to the set interlocking temperature value of the anti-disproportionation device 1, the actual temperature value 1 and the actual temperature value 2 measured by the temperature measuring device 1 and the temperature measuring device 2; when the actual temperature value 1 and the actual temperature value 2 simultaneously reach or exceed the interlocking temperature value, the interlocking closes the flow valve 1 and the flow valve 2, cuts off the reaction material, and avoids overheating.

[0034] The pressure measuring device 1 and the pressure measuring device 2 are respectively connected to the flow valve 1, the flow valve 2 and the total flux valve for interlock control. According to the set interlock pressure value of the anti-disproportionation device 1, the actual pressure value 1 and the actual pressure value 2 measured by the pressure measuring device 1 and the pressure measuring device 2; when the actual pressure value 1 and the actual pressure value 2 simultaneously reach or exceed the interlock pressure value, the interlock closes the flow valve 1 and the flow valve 2, cuts off the reaction material, and avoids overpressure.

[0035] The embodiment of the utility model provides a flow, temperature, and pressure interlock control system for the anti-disproportionation device, which can realize self-regulation of the feed flow of the anti-disproportionation device 1, maintain the stability of the reaction temperature and pressure, improve the reaction efficiency and quality, save energy and reduce consumption, and reduce safety hazards.

[0036] The embodiment of the utility model provides a flow, temperature, and pressure interlocking control system for a deproportionation device, which overcomes the disadvantages of manually adjusting the flow ratio of dichlorosilane and silicon tetrachloride in the deproportionation device 1, and can automatically adjust the flow ratio of silicon tetrachloride according to the ratio setting requirements; at the same time, the utility model utilizes the heat generated by the deproportionation exothermic reaction to heat the deproportionation feed material, thereby achieving the purpose of saving the amount of heat medium used in the deproportionation reaction and reducing energy consumption.

[0037] The embodiment of the utility model provides a flow, temperature, and pressure interlock control system for an anti-disproportionation device, which adjusts the anti-disproportionation temperature by adjusting the amount of material entering and exiting the heat exchanger 2 of the anti-disproportionation device 1, thereby achieving the purpose of stable temperature control; the anti-disproportionation pressure is adjusted by automatically adjusting and limiting the outlet flow of the anti-disproportionation device 1; and the two groups of remote thermometers and two groups of remote pressure gauges installed on the top of the anti-disproportionation device 1 are connected to the DCS control, so as to achieve the purpose of interlocking and cutting off the anti-disproportionation feed when the temperature and pressure are too high, thereby ensuring safe operation.

[0038] The embodiment of the utility model provides a flow, temperature, and pressure interlock control system of the anti-disproportionation device, which can automatically prevent the equipment from over-pressure and over-temperature operation, and avoid the resin in the anti-disproportionation device 11 from needing to be post-processed after over-temperature and over-pressure, which increases the difficulty of processing and poses a safety risk.

[0039] As a preferred embodiment of the above embodiment, a side passage pipe 1 is connected to the feed pipeline 3; the two ends of the side passage pipe 1 are respectively located upstream and downstream of the flow valve 1; and a control valve 1 is provided on the side passage pipe 1 to continue to maintain the material flow of the feed pipeline 3 when the flow valve 1 is repaired or replaced.

[0040] A side passage pipe 2 is connected to the feed pipeline 2 4; the two ends of the side passage pipe 2 are respectively located upstream and downstream of the flow valve 2; a control valve 2 is arranged on the side passage pipe 2; so that when the flow valve 2 is repaired or replaced, the material flow of the feed pipeline 2 4 can continue to be maintained.

[0041] The connecting pipeline 5 is connected with a side passage pipe 3; the two ends of the side passage pipe 3 are respectively located upstream and downstream of the flux valve; the side passage pipe 3 is provided with a control valve 3 so that when the flux valve is repaired or replaced, the material flow of the connecting pipeline 5 can continue to be maintained.

[0042] A side passage pipe 4 is connected to the connecting pipeline 5; both ends of the side passage pipe 4 are respectively located upstream and downstream of the total flux valve; a control valve 4 is provided on the side passage pipe 4 so that when the total flux valve is repaired or replaced, the material flow of the connecting pipeline 5 can continue to be maintained.

[0043] The bypass line 6 is connected to a side passage pipe 5; both ends of the side passage pipe 5 are respectively located upstream and downstream of the bypass valve; a control valve 5 is provided on the side passage pipe 5 to continue to maintain the material flow of the bypass line 6 when the bypass valve is repaired or replaced.

[0044] As a preferred embodiment of the above embodiment, opening and closing valves are provided upstream and downstream of flow valve 1, flow valve 2, flux valve, bypass valve and total flux valve to facilitate replacement and maintenance of flow valve 1, flow valve 2, flux valve, bypass valve and total flux valve.

[0045] The embodiment of the utility model provides a flow, temperature, and pressure interlock control system of an anti-disproportionation device 1, which operates through the following steps:

[0046] Preset the flow setting value of dichlorosilane; measure the actual flow value of dichlorosilane; calculate the position value of flow valve 1 through a closed-loop feedback control algorithm using the flow setting value of dichlorosilane and the actual flow value of dichlorosilane to control the flow of dichlorosilane passing through flow valve 1;

[0047] The flow setting value of silicon tetrachloride is preset or the flow value of silicon tetrachloride is calculated by the actual flow value of dihydrogen dichlorosilane according to the set ratio; further, the flow setting value of silicon tetrachloride is preset or the flow value of silicon tetrachloride is calculated by the actual flow value of dihydrogen dichlorosilane according to the set ratio, which can be selected according to needs. The flow of silicon tetrachloride can be set manually, or it can be controlled according to the set ratio based on the actual flow value of dihydrogen dichlorosilane, which can ensure that the anti-disproportionate feed ratio meets the process requirements in production. Measure the actual flow value of silicon tetrachloride; calculate the position value of flow valve two through the closed-loop feedback control algorithm of the flow setting value of silicon tetrachloride or the calculated flow value of silicon tetrachloride and the actual flow value of silicon tetrachloride to control the flow of silicon tetrachloride through flow valve two.

[0048] The operating temperature of the anti-disproportionation device 1 is preset; the actual temperature value 1 and the actual temperature value 2 of the anti-disproportionation device 1 are measured by the temperature measuring instrument 1 and the temperature measuring instrument 2, and the average temperature value is calculated; the average temperature value = (actual temperature value 1 + actual temperature value 2) / 2

[0049] After the operation of the anti-disproportionation device 1, the anti-disproportionation is an exothermic reaction, and the outlet material temperature is higher than the inlet temperature. According to the preset temperature of the anti-disproportionation device 1 and the actual average temperature value obtained, the position value of the flux valve passing through the heat exchanger 2 is calculated through a closed-loop feedback control algorithm, and the opening of the bypass valve position value is adjusted according to the opening of the flux valve to control the material flow through the flux valve, thereby controlling the temperature in the anti-disproportionation device 1. Further, the opening ratio corresponding to the position value of the bypass valve is equal to 100% minus the opening ratio corresponding to the position value of the flux valve.

[0050] Preset the pressure value of the anti-disproportionation device 1; measure the actual pressure value 1 and the actual pressure value 2 of the anti-disproportionation device 1; and calculate the average pressure value; the average pressure value = (actual pressure value 1 + actual pressure value 2) / 2

[0051] According to the average pressure value and the preset pressure value of the anti-distribution device 1, the position value of the total flux valve of the flow through the anti-distribution is calculated through a closed-loop feedback control algorithm to automatically control the pressure of the anti-distribution device 1 at the pressure setting value;

[0052] According to the set interlocking temperature of the anti-disproportionation device 1 and the measured actual temperature value 1 and actual temperature value 2; when the actual temperature value 1 and the actual temperature value 2 are both greater than or equal to the interlocking temperature, the flow valve 1 and the flow valve 2 are closed;

[0053] According to the set interlocking pressure of the anti-disproportionation device 1 and the measured actual pressure value 1 and actual pressure value 2; when the actual pressure value 1 and the actual pressure value 2 are both greater than or equal to the interlocking pressure, the flow valve 1 and the flow valve 2 are closed.

[0054] The embodiment of the utility model provides a flow, temperature, and pressure interlocking control system for an anti-disproportionation device. Even if the anti-disproportionation feed flow rate is frequently adjusted and fluctuated, the reaction efficiency will not be reduced, the control accuracy and production efficiency are improved, and the energy consumption and material consumption are reduced; and when the real-time temperature and pressure data on the anti-disproportionation device 1 are abnormal, the DCS alarms and sends a closing signal to the flow valve 1 and the flow valve 2 to cut off the feed, thereby realizing interlocking self-locking safety protection, which greatly improves the safety and stability of the anti-disproportionation operation.

[0055] Further explanation, although the terms first, second, etc. can be used to describe various elements in this article, these terms should not limit these elements. These terms are only used to distinguish one element from another element. For example, the first element can be called the second element, and, similarly, the second element can be called the first element, and these terms are only used to distinguish one element from another element. This does not depart from the scope of exemplary embodiments. Similarly, element one and element two do not represent the order of elements, and these terms are only used to distinguish one element from another element. As used herein, the term "and / or" includes any combination and all combinations of one or more associated listed items.

[0056] In the description of the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0057] The standard parts used in the utility model can all be purchased from the market, and special-shaped parts can be customized according to the instructions and the drawings. The specific connection methods of each part adopt the conventional means such as mature bolts, rivets, welding, etc. in the existing technology. The machinery, parts and equipment all adopt the conventional models in the existing technology, and the circuit connection adopts the conventional connection method in the existing technology, which will not be described in detail here.

[0058] The above is only a preferred embodiment of the present invention and does not constitute any form of limitation to the present invention. Any simple modification, equivalent changes and modifications made to the above embodiments based on the technical essence of the present invention still fall within the scope of the technical solution of the present invention.

Claims

1. A flow, temperature and pressure interlocking control system for an anti-disproportionation device, characterized in that: include: anti-disproportionation device, heat exchanger, feed line 1 and feed line 2; The feed pipeline 1 is connected to the material inlet 1 of the heat exchanger; the feed pipeline 1 is provided with a flow measuring device 1; the feed pipeline 1 is provided with a flow valve 1; the flow measuring device 1 is connected to the flow valve 1 for control; The feed pipeline 2 is connected to the material inlet 1 of the heat exchanger; the feed pipeline 2 is provided with a flow measuring device 2; the feed pipeline 2 is provided with a flow valve 2; the flow measuring device 2 is connected to the flow valve 2 for control; The material inlet of the anti-disproportionation device is connected to the material outlet of the heat exchanger; The second material inlet of the heat exchanger is connected to the material outlet of the anti-disproportionation device through a connecting pipeline; a total flux valve and a flux valve are arranged on the connecting pipeline; The material second outlet of the heat exchanger is connected to the material second output pipeline; the connecting pipeline is connected to the material second output pipeline through a bypass pipeline; the connection point between the bypass pipeline and the connecting pipeline is located between the total flux valve and the flux valve; a bypass valve is arranged on the bypass pipeline; The anti-disproportionation device is provided with a pressure measuring device 1 and a pressure measuring device 2; The anti-disproportionation device is provided with a temperature measuring device 1 and a temperature measuring device 2; The temperature measuring device 1 and the temperature measuring device 2 are respectively connected to the flow valve 1, the flow valve 2, the flux valve, and the bypass valve to perform interlocking control; The pressure measuring device 1 and the pressure measuring device 2 are respectively connected to the flow valve 1, the flow valve 2 and the total flux valve to perform interlocking control.

2. The flow, temperature and pressure interlocking control system of the anti-disproportionation device according to claim 1 is characterized in that: The feed pipeline is connected to a side passage pipe; the two ends of the side passage pipe are respectively located upstream and downstream of the flow valve; the side passage pipe is provided with a control valve; The second feed pipeline is connected to a second side passage pipe; the two ends of the second side passage pipe are respectively located upstream and downstream of the second flow valve; the second side passage pipe is provided with a second control valve; The connecting pipeline is connected to a side passage pipe 3; the two ends of the side passage pipe 3 are respectively located upstream and downstream of the flux valve; the side passage pipe 3 is provided with a control valve 3; The connecting pipeline is connected to a side passage pipe 4; the two ends of the side passage pipe 4 are respectively located upstream and downstream of the total flux valve; the side passage pipe 4 is provided with a control valve 4; The bypass pipeline is connected to a side passage pipe five; two ends of the side passage pipe five are respectively located upstream and downstream of the bypass valve; and a control valve five is arranged on the side passage pipe five.

3. The flow, temperature and pressure interlocking control system of the anti-disproportionation device according to claim 2 is characterized in that: The upstream and downstream of the flow valve 1, the flow valve 2, the flux valve, the bypass valve and the total flux valve are all provided with opening and closing valves.

4. The flow, temperature and pressure interlocking control system of the anti-disproportionation device according to claim 1 is characterized in that: The bypass valve is controlled in linkage with the flux valve; the opening of the bypass valve is adjusted according to the opening of the flux valve.

5. The flow, temperature and pressure interlocking control system of the anti-disproportionation device according to claim 4 is characterized in that: The opening ratio of the bypass valve is equal to 100% minus the opening ratio of the flux valve.

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