Wafer storage cabinet

Abstract

The utility model discloses a wafer storage cabinet which is characterized in that the top of a cabinet body is provided with a pick-and-place table communicated with the left end of the interior of the cabinet body, the top of the inner side of the pick-and-place table is slidably provided with a top cover, the front side and the rear side of the interior of the cabinet body are respectively provided with a plurality of groups of second sliding rails in an equidistant vertical array mode, and storage plates are slidably installed between the second sliding rails respectively; according to the wafer storage cabinet, an automatic storage and taking-out mechanism is adopted, the efficiency and convenience of wafer storage are greatly improved, meanwhile, the wafer storage cabinet is convenient to use, the wafer storage efficiency is improved, and the wafer storage efficiency is improved. The high-purity nitrogen environment can be effectively maintained, the optimal storage condition is provided for wafers, the wafers are ensured not to be affected by the external environment by accurately controlling entering and discharging of nitrogen and monitoring the nitrogen concentration in the storage bin in real time, and therefore the service life of the wafers is prolonged, and the performance stability of the wafers is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer storage, in particular to a wafer storage cabinet. Background Art

[0002] In the field of semiconductor manufacturing, wafers are key materials, and their quality and stability play a vital role in the entire production process. However, wafers are extremely sensitive to oxygen and moisture in the external environment. Slight contamination may cause their performance to degrade or be damaged. Therefore, during the storage of wafers, a low-oxygen and low-humidity environment must be created to ensure the quality and stability of the wafers.

[0003] In order to maintain such an environment, the industry usually adopts nitrogen flushing or nitrogen atmosphere to protect wafers. The purity of nitrogen is usually required to be no less than 99.99% to ensure its effective protection of wafers. However, existing wafer storage cabinets have many deficiencies in design and operation. For example, nitrogen inside the cabinet is easy to leak, resulting in an unstable storage environment; the nitrogen supply and exhaust system cannot be precisely controlled, making it difficult to maintain the nitrogen concentration in the storage bin at a constant level; in addition, wafers are also easily contaminated by the external environment during the placement process. Therefore, we propose a wafer storage cabinet. Utility Model Content

[0004] In view of the problems existing in the prior art, the utility model discloses a wafer storage cabinet, the technical solution adopted is that it includes a cabinet body, the top of the cabinet body is provided with a pick-up and placement table connected with the left end of the interior thereof, a top cover is slidably installed on the inner top of the pick-up and placement table, a plurality of groups of second slide rails are equidistantly arranged in a vertical array on the front and rear sides of the interior of the cabinet body, storage plates are slidably installed between the second slide rails, support blocks are fixedly installed in the middle of the upper surface of the storage plate, second electric telescopic rods are respectively provided at the front and rear ends of the right front of the storage plate, the second electric telescopic rods are respectively fixedly installed on the right side of the interior of the cabinet, the telescopic ends of the second electric telescopic rod are respectively fixedly connected to the left ends of the grooves arranged at the front and rear ends of the storage plate, the storage plates are respectively located in storage bins equidistantly arranged on the right end of the interior of the cabinet, and the right sides of the storage bins The ends are respectively communicated with the air intake components arranged at the right end outside the cabinet, the rear end of the storage bin is respectively communicated with the exhaust components arranged at the rear end outside the cabinet, the left end of the storage bin is provided with a sealed barrier assembly, and the left end inside the cabinet is provided with a pick-and-place unit, the pick-and-place unit consists of a motor, a threaded rod, a first slide rail, a lifting frame and a pick-and-place fork plate, the motor is fixedly installed at the left end of the inner bottom of the cabinet, the output shaft end of the motor is fixedly installed with a threaded rod, the top of the threaded rod is rotatably connected to the inner top of the cabinet through a bearing, the lifting frame is threadedly installed on the threaded rod, and the lifting frame is an "L"-shaped structure, the left end of the lifting frame is slidably connected to the first slide rail arranged on the left side inside the cabinet, and the pick-and-place fork plates are fixedly installed at the front and rear ends of the top of the lifting frame, and the pick-and-place fork plates are located directly below the slot connecting the pick-and-place platform and the left end of the cabinet.

[0005] As a preferred technical solution of the utility model, the air intake assembly consists of an air intake pipe, a diverter pipe, a first solenoid valve and a first connecting pipe. The air intake pipe is arranged at the bottom of the cabinet, and the right end of the air intake pipe is connected to the diverter pipe arranged on the right side outside the cabinet. Several first connecting pipes are equidistantly arranged on the left side of the diverter pipe, and the first connecting pipes are respectively connected to the interior of the storage bin, and the first solenoid valves are fixedly installed on the first connecting pipes.

[0006] As a preferred technical solution of the utility model, the exhaust assembly consists of an exhaust pipe, a second connecting pipe and a second solenoid valve. The exhaust pipe is arranged on the outer rear side of the cabinet. Second connecting pipes are arranged in an equidistant array on the exhaust pipe. The second connecting pipes are respectively connected to the interior of the storage bin, and second solenoid valves are fixedly installed on the second connecting pipes.

[0007] As a preferred technical solution of the utility model, the sealed gate assembly consists of a gate, a sealing plate and a first electric telescopic rod. There are several gates, and the gates are respectively arranged inside the left end of the storage bin. The first electric telescopic rods are fixedly installed at the front and rear ends of the gate, and the telescopic ends of the first electric telescopic rod are fixedly installed with sealing plates, and the sealing plates are slidably installed in the gates, and the bottoms of the sealing plates are slidably inserted in the sealing grooves arranged at the left end of the inner bottom of the storage bin.

[0008] As a preferred technical solution of the utility model, it also includes a gas concentration detector, and a plurality of gas concentration detectors are provided. The gas concentration detectors are respectively fixedly installed on the inner top of the storage bin, and the gas concentration detector is a nitrogen gas concentration detector.

[0009] As a preferred technical solution of the utility model, it also includes a controller, which is fixedly installed on the right end of the front top of the cabinet, and the output end of the controller is electrically connected to the input ends of the motor, the first electric telescopic rod, the second electric telescopic rod, the first solenoid valve and the second solenoid valve, and the input end of the controller is electrically connected to the output end of the gas concentration detector and the external power supply.

[0010] The beneficial effects of the utility model are as follows: the utility model drives the threaded rod to rotate by a motor, so that the lifting frame drives the pick-and-place fork plate and the wafer to move along the first slide rail to the front end of the selected storage bin. When the pick-and-place fork plate falls to the top surface of the storage plate, since the height of the support block is greater than the thickness of the pick-and-place fork plate, the wafer falls steadily on the top of the support block, the second electric telescopic rod controls the storage plate to retract into the storage bin, and the first electric telescopic rod pushes the sealing plate to move downward, so as to seal the storage bin, thereby completing the sealed environment storage of the wafer;

[0011] By opening the first solenoid valve on the first connecting pipe correspondingly connected to the storage bin, the air inlet pipe transports the external nitrogen to the storage bin through the shunt pipe, and then opening the second solenoid valve on the second connecting pipe correspondingly connected to the storage bin, the gas in the storage bin is discharged to the outside, until the gas concentration detector detects that the nitrogen gas concentration in the storage bin reaches the storage standard, the controller closes the first solenoid valve and the second solenoid valve to complete the nitrogen environment storage of the wafer;

[0012] In summary, the wafer storage cabinet adopts an automated storage and retrieval mechanism, which greatly improves the efficiency and convenience of wafer storage. At the same time, the wafer storage cabinet can effectively maintain a high-purity nitrogen environment, providing the best storage conditions for wafers. By precisely controlling the entry and exhaust of nitrogen and real-time monitoring of the nitrogen concentration in the storage bin, it ensures that the wafers are not affected by the external environment, thereby extending the service life and performance stability of the wafers. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0014] Figure 2 This is a schematic diagram of the structure of the utility model when viewed from above;

[0015] Figure 3 This is a schematic diagram of the cross-sectional structure of the utility model;

[0016] Figure 4 This is a schematic diagram of the partial cross-section structure of the utility model. Figure 1 ;

[0017] Figure 5 This is a schematic diagram of the partial cross-section structure of the utility model. Figure 2 .

[0018] In the figure: 1 cabinet, 2 pick-and-place table, 3 controller, 4 top cover, 5 pick-and-place unit, 51 motor, 52 threaded rod, 53 first slide rail, 54 lifting frame, 55 pick-and-place fork plate, 6 storage bin, 7 air intake assembly, 71 air intake pipe, 72 shunt pipe, 73 first solenoid valve, 74 first connecting pipe, 8 exhaust assembly, 81 exhaust pipe, 82 second connecting pipe, 83 second solenoid valve, 9 sealed gate assembly, 91 gate, 92 sealing plate, 93 first electric telescopic rod, 10 storage plate, 11 second electric telescopic rod, 12 support block, 13 second slide rail, 14 gas concentration detector. DETAILED DESCRIPTION

[0019] Example 1

[0020] like Figures 1 to 5As shown, the utility model discloses a wafer storage cabinet, which adopts the technical solution of comprising a cabinet body 1, a pick-up and placement table 2 connected to the left end of the interior of the cabinet body 1 is arranged on the top of the cabinet body 1, a top cover 4 is slidably installed on the inner top of the pick-up and placement table 2, a plurality of groups of second slide rails 13 are equidistantly arranged in a vertical array on the front and rear sides of the interior of the cabinet body 1, storage plates 10 are slidably installed between the second slide rails 13, support blocks 12 are fixedly installed in the middle of the upper surface of the storage plate 10, second electric telescopic rods 11 are respectively arranged at the front and rear ends of the storage plate 10, the second electric telescopic rods 11 are respectively fixedly installed on the right side of the interior of the cabinet body 1, the telescopic ends of the second electric telescopic rod 11 are respectively fixedly connected to the left ends of the grooves arranged at the front and rear ends of the storage plate 10, and the storage plate 10 are respectively located in the storage bin 6 which is equidistantly arranged at the right end of the interior of the cabinet 1, and the right end of the storage bin 6 is respectively communicated with the air intake assembly 7 which is arranged at the right end of the exterior of the cabinet 1, and the air intake assembly 7 is composed of an air intake pipe 71, a shunt pipe 72, a first solenoid valve 73 and a first connecting pipe 74. The air intake pipe 71 is arranged at the bottom of the cabinet 1, and the right end of the air intake pipe 71 is communicated with the shunt pipe 72 which is arranged on the right side of the exterior of the cabinet 1, and a plurality of first connecting pipes 74 are respectively equidistantly arranged on the left side of the shunt pipe 72, and the first connecting pipes 74 are respectively communicated with the interior of the storage bin 6, and the first solenoid valves 73 are respectively fixedly installed on the first connecting pipes 74, and the first solenoid valves 73 on the first connecting pipes 74 which are correspondingly communicated with the storage bin 6 are opened, so that the air intake pipe 71 passes the external nitrogen through The shunt pipe 72 is transported to the storage bin 6, and the rear end of the storage bin 6 is respectively connected with the exhaust assembly 8 arranged at the rear end of the outside of the cabinet 1. The exhaust assembly 8 is composed of an exhaust pipe 81, a second connecting pipe 82 and a second solenoid valve 83. The exhaust pipe 81 is arranged on the rear side of the outside of the cabinet 1, and the second connecting pipes 82 are arranged in an equidistant array on the exhaust pipe 81. The second connecting pipes 82 are respectively connected to the inside of the storage bin 6, and the second solenoid valves 83 are respectively fixedly installed on the second connecting pipes 82. It also includes a gas concentration detector 14. The gas concentration detector 14 is provided with a plurality of gas concentration detectors. The gas concentration detector 14 is respectively fixedly installed on the inner top of the storage bin 6. The gas concentration detector 14 is a nitrogen gas concentration detector. By opening the corresponding second connected pipes on the storage bin 6, the gas concentration detector 14 is connected to the storage bin 6. The second solenoid valve 83 on the connecting pipe 74 discharges the gas in the storage bin 6 to the outside until the gas concentration detector 14 detects that the nitrogen gas concentration in the storage bin 6 reaches the storage standard. The controller 3 closes the first solenoid valve 73 and the second solenoid valve 83 to complete the nitrogen environment storage of the wafer. A sealed gate assembly 9 is provided at the left end of the storage bin 6. The sealed gate assembly 9 consists of a gate 91, a sealing plate 92 and a first electric telescopic rod 93. There are several gates 91, which are respectively arranged inside the left end of the storage bin 6. The first electric telescopic rod 93 is fixedly installed at the front and rear ends of the gate 91, and the telescopic end of the first electric telescopic rod 93 is fixedly installed with a sealing plate 92, and the sealing plate 92 is slidably installed in the gate 91.The bottom of the sealing plate 92 is respectively slidably inserted into the sealing groove provided at the left end of the bottom of the inner side of the storage bin 6, and the sealing plate 92 is pushed downward by the first electric telescopic rod 93 to seal the storage bin 6. Conversely, the sealing plate 92 can be retracted into the gate 91, so that the second electric telescopic rod 11 can push the storage plate 10 to the inner left end of the cabinet 1. The inner left end of the cabinet 1 is provided with a pick-and-place unit 5, which is composed of a motor 51, a threaded rod 52, a first slide rail 53, a lifting frame 54 and a pick-and-place unit. The fork plate 55 is fixedly installed at the left end of the inner bottom of the cabinet 1. The output shaft end of the motor 51 is fixedly installed with a threaded rod 52. The top of the threaded rod 52 is rotatably connected to the inner top of the cabinet 1 through a bearing. A lifting frame 54 is threadedly installed on the threaded rod 52. The lifting frame 54 is an "L"-shaped structure. The left end of the lifting frame 54 is slidably connected to the first slide rail 53 set on the left side of the cabinet 1. The front and rear ends of the top of the lifting frame 54 are respectively fixedly installed with a pick-up and place fork plate 55, and the pick-up and place fork plate 55 Located directly below the slot connecting the pick-and-place table 2 and the left end of the cabinet 1, the motor 51 drives the threaded rod 52 to rotate, so that the lifting frame 54 drives the pick-and-place fork plate 55 and the wafer to move along the first slide rail 53 to the front end of the selected storage bin 6. When the pick-and-place fork plate 55 falls to the top surface of the storage plate 10, since the height of the support block 12 is much greater than the thickness of the pick-and-place fork plate 55, the wafer falls steadily on the top of the support block 12, and the second electric telescopic rod 11 controls the storage plate 10 to retract into the storage bin 6. The first electric telescopic rod 93 pushes the sealing plate 92 to move downward, thereby sealing the storage bin 6, thereby completing the sealed environment storage of the wafer, and also includes a controller 3, which is fixedly mounted on the right end of the top front side of the cabinet 1, and the output end of the controller 3 is electrically connected to the input end of the motor 51, the first electric telescopic rod 93, the second electric telescopic rod 11, the first solenoid valve 73 and the second solenoid valve 83, and the input end of the controller 3 is electrically connected to the output end of the gas concentration detector 14 and the external power supply.

[0021] The working principle of the utility model is as follows: when in use, the top cover 4 on the pick-and-place table 2 is opened, and then the wafers to be stored are placed on the pick-and-place fork plate 55. Then the staff selects the vacant storage bin 6 to be stored through the controller 3. At this time, the sealing gate assembly 9 on the storage bin 6 is opened, and at the same time, the second electric telescopic rod 11 pushes the storage plate 10 to the left end of the inner part of the cabinet 1, and the storage plate 10 slides smoothly along the second slide rail 13. Then, the motor 51 is controlled by the controller 3, so that the motor 51 drives the threaded rod 52 to move forward. The lifting frame 54 drives the pick-and-place fork plate 55 and the wafer to move along the first slide rail 53 to the front end of the selected storage bin 6. When the pick-and-place fork plate 55 falls to the top surface of the storage plate 10, the height of the support block 12 is much greater than the thickness of the pick-and-place fork plate 55, so that the wafer falls steadily on the top of the support block 12. Then the second electric telescopic rod 11 controls the storage plate 10 to retract into the storage bin 6. At this time, the first electric telescopic rod 93 pushes the sealing plate 92 to move downward, thereby sealing the storage bin 6. By opening the storage bin 6, the first electric telescopic rod 93 pushes the sealing plate 92 to move downward, thereby sealing the storage bin 6. The first solenoid valve 73 on the first connecting pipe 74 connected to the storage bin 6 is opened, so that the air inlet pipe 71 delivers the external nitrogen to the storage bin 6 through the shunt pipe 72. At the same time, the second solenoid valve 83 on the second connecting pipe 74 connected to the storage bin 6 is opened to discharge the gas in the storage bin 6 to the outside until the gas concentration detector 14 detects that the nitrogen gas concentration in the storage bin 6 reaches the storage standard. The controller 3 then closes the first solenoid valve 73 and the second solenoid valve 83. When the wafers stored in the cabinet 1 are taken out, The motor 51 is controlled by the controller 3 so that the motor 51 drives the threaded rod 52 to move the lifting frame 54 and the pick-and-place fork plate 55 to a suitable pick-and-place position, and then the sealing gate assembly 9 is controlled to open so that the first electric telescopic rod 93 brings the sealing plate 92 back into the gate 91, and then the second electric telescopic rod 11 is controlled to push the storage plate 10 outward, so that the wafer stored on the support block 12 moves to just above the pick-and-place fork plate 55, and then the lifting frame 54 is controlled to move upward, so that the staff can take out the wafer at the slot of the pick-and-place table 2.

[0022] The circuit connection involved in the utility model is a common means used by those skilled in the art, and technical inspiration can be obtained through a limited number of experiments, and it belongs to the widely used existing technology.

[0023] Components not described in detail herein are prior art.

[0024] Although the specific embodiments of the present invention are described in detail above, the present invention is not limited to the above embodiments. Various changes can be made within the knowledge of ordinary technicians in the field without departing from the purpose of the present invention, and modifications or deformations without creative labor are still within the scope of protection of the present invention.

Claims

1. A wafer storage cabinet, comprising a cabinet body (1), It is characterized in that The top of the cabinet (1) is provided with a pick-up and placement platform (2) connected to the left end thereof, a top cover (4) is slidably mounted on the inner top of the pick-up and placement platform (2), a plurality of groups of second slide rails (13) are equidistantly arranged in a vertical array on the front and rear sides of the cabinet (1), storage plates (10) are slidably mounted between the second slide rails (13), support blocks (12) are fixedly mounted in the middle of the upper surface of the storage plates (10), and second slide rails are respectively arranged on the front and rear ends of the right front of the storage plates (10). The electric telescopic rod (11) is fixedly mounted on the right side of the interior of the cabinet (1), and the telescopic ends of the second electric telescopic rod (11) are fixedly connected to the left ends of the grooves arranged at the front and rear ends of the storage plate (10), and the storage plates (10) are respectively located in storage bins (6) arranged at equal distances at the right end of the interior of the cabinet (1), and the right ends of the storage bins (6) are respectively connected to the air intake components (7) arranged at the right end of the exterior of the cabinet (1), and the rear ends of the storage bins (6) are respectively connected to the cabinet (1). 1) is connected to an exhaust assembly (8) arranged at the rear end of the outside, a sealing gate assembly (9) is arranged at the left end of the storage bin (6), a pick-and-place unit (5) is arranged at the left end of the inside of the cabinet (1), the pick-and-place unit (5) is composed of a motor (51), a threaded rod (52), a first slide rail (53), a lifting frame (54) and a pick-and-place fork plate (55), the motor (51) is fixedly mounted at the left end of the inner bottom of the cabinet (1), the output shaft end of the motor (51) is fixedly mounted with a threaded rod (52), the threaded rod (53) is fixedly mounted at the output shaft end of the motor (51), and the threaded rod (52) is fixedly mounted at the output shaft end of the motor (51). The top of the threaded rod (52) is rotatably connected to the top of the cabinet (1) via a bearing. A lifting frame (54) is threadedly mounted on the threaded rod (52). The lifting frame (54) is an "L"-shaped structure. The left end of the lifting frame (54) is slidably connected to a first slide rail (53) arranged on the left side of the cabinet (1). A pick-up and placement fork plate (55) is fixedly mounted at the front and rear ends of the top of the lifting frame (54), and the pick-up and placement fork plate (55) is located directly below a slot connecting the pick-up and placement platform (2) and the left end of the cabinet (1).

2. A wafer storage cabinet according to claim 1, Features: The air intake assembly (7) is composed of an air intake pipe (71), a flow divider pipe (72), a first solenoid valve (73) and a first connecting pipe (74); the air intake pipe (71) is arranged at the bottom of the cabinet (1); the right end of the air intake pipe (71) is connected to the flow divider pipe (72) arranged on the right side of the outside of the cabinet (1); a plurality of first connecting pipes (74) are arranged at equal distances on the left side of the flow divider pipe (72); the first connecting pipes (74) are respectively connected to the inside of the storage bin (6); and the first solenoid valves (73) are respectively fixedly mounted on the first connecting pipes (74).

3. A wafer storage cabinet according to claim 1, Features: The exhaust assembly (8) is composed of an exhaust pipe (81), a second connecting pipe (82) and a second solenoid valve (83); the exhaust pipe (81) is arranged on the rear side of the exterior of the cabinet (1); second connecting pipes (82) are arranged in an array at equal distances on the exhaust pipe (81); the second connecting pipes (82) are respectively connected to the interior of the storage bin (6); and second solenoid valves (83) are respectively fixedly mounted on the second connecting pipes (82).

4. A wafer storage cabinet according to claim 1, Features: The sealed gate assembly (9) is composed of a gate (91), a sealing plate (92) and a first electric telescopic rod (93). A plurality of gates (91) are provided. The gates (91) are respectively provided inside the left end of the storage bin (6). The first electric telescopic rods (93) are respectively fixedly installed at the front and rear ends inside the gate (91). The sealing plates (92) are fixedly installed at the telescopic ends of the first electric telescopic rod (93), and the sealing plates (92) are respectively slidably installed in the gate (91). The bottoms of the sealing plates (92) are respectively slidably inserted in the sealing grooves provided at the left end of the bottom inside the storage bin (6).

5. The wafer storage cabinet according to claim 1, Features: It also includes a gas concentration detector (14), wherein a plurality of gas concentration detectors (14) are provided and the gas concentration detectors (14) are respectively fixedly mounted on the inner top of the storage bin (6), and the gas concentration detectors (14) are nitrogen gas concentration detectors.

6. The wafer storage cabinet according to claim 1, Features: The cabinet (1) further comprises a controller (3), wherein the controller (3) is fixedly mounted at the right end of the top front side of the cabinet (1), wherein the output end of the controller (3) is electrically connected to the input ends of the motor (51), the first electric telescopic rod (93), the second electric telescopic rod (11), the first solenoid valve (73) and the second solenoid valve (83), and the input end of the controller (3) is electrically connected to the output end of the gas concentration detector (14) and the external power supply.

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