Negative pressure adsorption platform and coating device

Abstract

The utility model relates to a negative pressure adsorption platform and a coating device. The negative pressure adsorption platform comprises a platform body and a plurality of cover plates, wherein the platform body is provided with an adsorption surface and a mounting surface deviating from the adsorption surface; a plurality of strip-shaped adsorption grooves are formed in the adsorption surface, a plurality of grooves are formed in the mounting surface, and the cover plates are arranged on the side, provided with the mounting surface, of the platform body so as to seal the grooves correspondingly; the platform body is further provided with a plurality of first vent holes and a plurality of second vent holes, each groove is communicated with part of the strip-shaped adsorption grooves through part of the first vent holes, and each groove is communicated with an external negative pressure source through the corresponding second vent hole. Therefore, a plurality of slender through holes parallel to the adsorption surface are prevented from being formed in the position, close to the adsorption surface, of the platform body, so that the adverse effect on the flatness of the adsorption surface is greatly reduced, and the flatness of the adsorption surface meets the coating process requirement.

Description

Technical Field

[0001] The utility model relates to the technical field of coating equipment, in particular to a negative pressure adsorption platform and a coating device. Background Art

[0002] Solar energy is abundant in resources, green, environmentally friendly and pollution-free, and is one of the new energy sources that is expected to be widely used in the future. In the field of new solar cells, the rapid development of perovskite solar cells in recent years has attracted widespread attention from the scientific research community and the industrial community.

[0003] In the process of preparing perovskite solar cells, it is necessary to coat the perovskite slurry on the substrate (such as glass). Due to the large coating area, thin coating layer and low slurry viscosity, the coating process is difficult. Therefore, when coating the substrate, the flatness of the substrate is required to be high. In the prior art, before coating, the substrate is first fixed on the working platform by negative pressure adsorption, and then the substrate on the working platform is coated.

[0004] See also Figure 1 and Figure 2 In order to achieve negative pressure adsorption, it is necessary to drill a number of elongated through holes 101 horizontally on the working platform 100 to serve as airflow channels. However, drilling a number of elongated through holes 101 horizontally will reduce the strength and rigidity of the working platform 100, and will also generate processing stress inside, thereby causing deformation of the working platform 100, making it difficult for the surface flatness of the working platform 100 to meet the process requirements, causing serious adverse effects on the coating quality of the substrate 200. Utility Model Content

[0005] Based on this, it is necessary to provide a negative pressure adsorption platform and coating device to improve the above defects, in order to address the problem in the prior art that a number of slender through holes need to be drilled horizontally on the working platform to serve as air flow channels, which makes it difficult for the surface flatness of the working platform to meet the process requirements.

[0006] A negative pressure adsorption platform comprises a platform body and a plurality of cover plates, wherein the platform body has an adsorption surface and a mounting surface opposite to the adsorption surface;

[0007] The adsorption surface is provided with a plurality of strip-shaped adsorption grooves, the mounting surface is provided with a plurality of grooves, and each of the cover plates is arranged on a side of the platform body having the mounting surface to seal each of the grooves respectively;

[0008] The platform body also has a plurality of first ventilation holes and a plurality of second ventilation holes, each of the grooves is connected to a portion of the strip-shaped adsorption grooves through the corresponding first ventilation hole, and each of the grooves is connected to an external negative pressure source through the corresponding second ventilation hole.

[0009] In one embodiment, the width of the strip-shaped adsorption grooves located in the peripheral edge area of ​​the adsorption surface is greater than the width of the strip-shaped adsorption grooves in other areas.

[0010] In one of the embodiments, the adsorption surface includes a plurality of adsorption areas, and the plurality of adsorption areas are arranged along a first direction parallel to the adsorption surface;

[0011] The longitudinal extension direction of the strip-shaped adsorption grooves in any one of the adsorption regions intersects with the longitudinal extension direction of the strip-shaped adsorption grooves in the adjacent adsorption region.

[0012] In one of the embodiments, in any two adjacent adsorption areas, each of the strip-shaped adsorption grooves in one of the adsorption areas extends longitudinally along the first direction, and each of the strip-shaped adsorption grooves in the other adsorption area extends longitudinally along a second direction, and the second direction is perpendicular to the first direction.

[0013] In one of the embodiments, the adsorption surface includes a plurality of adsorption areas, and the strip-shaped adsorption grooves in different adsorption areas are connected to different grooves through corresponding first vent holes.

[0014] In one embodiment, each of the adsorption regions is arranged along a first direction parallel to the adsorption surface, and each of the adsorption regions includes a first sub-adsorption region and a second sub-adsorption region arranged along a second direction parallel to the adsorption surface, and the first direction intersects with the second direction;

[0015] Each of the strip-shaped adsorption grooves located in the first sub-adsorption area is connected to the same groove through the corresponding first vent hole, and each of the strip-shaped adsorption grooves located in the second sub-adsorption area is connected to another groove through the corresponding first vent hole.

[0016] In one of the embodiments, each of the first sub-adsorption areas and each of the second sub-adsorption areas corresponds one-to-one to each of the grooves, and each of the strip-shaped adsorption grooves in each of the first sub-adsorption area or the second sub-adsorption area is connected to the corresponding groove through the first vent hole.

[0017] In one of the embodiments, each of the strip-shaped adsorption grooves in any of the first sub-adsorption regions or the second sub-adsorption regions is at least partially located within the range of the orthographic projection of the corresponding groove on the adsorption surface.

[0018] In one embodiment, the platform body further comprises a first side surface and a second side surface connected between the adsorption surface and the mounting surface, and the first side surface and the second side surface are opposite to each other;

[0019] One end of some of the second ventilation holes passes through the first side surface, and the other end passes through the corresponding groove; one end of another part of the second ventilation holes passes through the second side surface, and the other end passes through the corresponding groove.

[0020] In one embodiment, the mounting surface is recessed inward along the edge of each groove to form a step surface, and the cover plate fits the step surface;

[0021] A height difference between the step surface and the mounting surface is greater than or equal to a thickness of the cover plate.

[0022] A coating device comprises a coating mechanism and a negative pressure adsorption platform as described in any of the above embodiments, wherein the coating mechanism is used for coating a substrate adsorbed and fixed on the adsorption surface.

[0023] The negative pressure adsorption platform is used to load the substrate to be coated onto the adsorption surface of the platform body. Since the negative pressure source is connected to each groove through each second vent hole, and each groove is connected to each strip adsorption groove through each first vent hole, a negative pressure is formed between each strip adsorption groove and the substrate, thereby adsorbing and fixing the substrate on the adsorption surface of the platform body.

[0024] Thus, in the present application, a strip adsorption groove is opened on the adsorption surface, a groove is opened on the mounting surface, and the groove is connected to the corresponding strip adsorption groove through the first vent hole, so that the second vent hole, the groove, the first vent hole and the strip adsorption groove are used as air flow channels, thereby avoiding the opening of several slender through holes parallel to the adsorption surface at a position close to the adsorption surface of the platform body, thereby greatly reducing the adverse effects on the flatness of the adsorption surface, so that the flatness of the adsorption surface meets the coating process requirements. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is the main view of the working platform in the prior art;

[0026] Figure 2 for Figure 1 The cross-sectional view of the working platform along the AA direction is shown;

[0027] Figure 3 This is a front view of a negative pressure adsorption platform in one embodiment of the utility model;

[0028] Figure 4 for Figure 3 A cross-sectional view of the negative pressure adsorption platform along the BB direction is shown;

[0029] Figure 5 for Figure 3 A top view of the negative pressure adsorption platform shown;

[0030] Figure 6 for Figure 5 A partial enlarged view of location C of the negative pressure adsorption platform shown;

[0031] Figure 7 for Figure 3 A bottom view of the negative pressure adsorption platform shown;

[0032] Figure 8 for Figure 3 A bottom view of the negative pressure adsorption platform is shown (the cover is omitted). DETAILED DESCRIPTION

[0033] In order to make the above-mentioned purposes, features and advantages of the utility model more obvious and easy to understand, the specific implementation methods of the utility model are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the utility model. However, the utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the utility model, so the utility model is not limited by the specific embodiments disclosed below.

[0034] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0035] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present utility model, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0036] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0037] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0038] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are for illustrative purposes only and are not intended to be the only implementation method.

[0039] The present invention provides a coating device according to an embodiment of the present invention, comprising a negative pressure adsorption platform 300 (see Figure 3 ) and a coating mechanism. The negative pressure adsorption platform 300 is used to adsorb and fix the substrate, and the coating mechanism is used to coat the substrate on the negative pressure adsorption platform 300. It should be noted that the substrate can be a glass substrate for preparing a perovskite solar cell.

[0040] See also Figures 3 to 6In this embodiment, the negative pressure adsorption platform 300 includes a platform body 31 and a plurality of cover plates 32. The platform body 31 has an adsorption surface 311 and a mounting surface 312 opposite to the adsorption surface 311. A plurality of strip-shaped adsorption grooves 321 are provided on the adsorption surface 311, and a plurality of grooves 322 are provided on the mounting surface 312. Each cover plate 32 is arranged on a side of the platform body 31 having the mounting surface 312, and seals each groove 322 respectively. The platform body 31 also has a plurality of first vents 323 and a plurality of second vents 324. Each groove 322 is connected to a portion of the strip-shaped adsorption grooves 321 through a corresponding first vent 323, and each groove 322 is connected to an external negative pressure source through a corresponding second vent 324. It can be understood that the external negative pressure source can be a vacuum generating device such as an air pump.

[0041] The negative pressure adsorption platform 300 loads the substrate to be coated onto the adsorption surface 311 of the platform body 31. Since the negative pressure source is connected to each groove 322 through each second vent hole 324, and each groove 322 is connected to each strip adsorption groove 321 through each first vent hole 323, a negative pressure is formed between each strip adsorption groove 321 and the substrate, thereby adsorbing and fixing the substrate on the adsorption surface 311 of the platform body 31.

[0042] Thus, in the present application, a strip adsorption groove 321 is opened on the adsorption surface 311, a groove 322 is opened on the mounting surface 312, and the groove 322 is connected with the corresponding strip adsorption groove 321 through the first vent hole 323, so that the second vent hole 324, the groove 322, the first vent hole 323 and the strip adsorption groove 321 are used as air flow channels, thereby avoiding the opening of a number of slender through holes parallel to the adsorption surface 311 at a position close to the adsorption surface 311 of the platform body 31, thereby greatly reducing the adverse effect on the flatness of the adsorption surface 311, so that the flatness of the adsorption surface 311 meets the coating process requirements.

[0043] It should be noted that since each groove 322 is opened on the mounting surface 312 of the platform body 31, and the second air vent 324 is used to connect the groove 322 to the external negative pressure source, each second air vent 324 can be as close to the mounting surface 312 as possible, thereby being as far away from the adsorption surface 311 as possible, thereby avoiding the adverse effect of processing each second air vent 324 on the flatness of the adsorption surface 311, that is, it is beneficial to improve the flatness of the adsorption surface 311 of the platform body 31.

[0044] Specifically in the embodiment, the width of the strip adsorption groove 321 located in the peripheral edge area of ​​the adsorption surface 311 is greater than the width of the strip adsorption groove 321 in other areas. In this way, the peripheral edge area of ​​the substrate is more warped due to the concentrated stress. When the substrate is adsorbed and fixed, the peripheral edge area of ​​the substrate and the peripheral edge area of ​​the adsorption surface 311 are opposite. In this embodiment, the strip adsorption groove 321 located in the peripheral edge area of ​​the adsorption surface 311 is widened, thereby increasing the adsorption force on the peripheral edge area of ​​the substrate, thereby improving the firmness of the adsorption of the substrate.

[0045] Specific to Figure 5 In the embodiment shown, the adsorption surface 311 is roughly rectangular, so as to have four right angles and four sides. The strip adsorption grooves 321 located at the four right angles and the strip adsorption grooves 321 at the four sides are widened, so as to increase the adsorption force on the four right angles and four sides of the substrate. Of course, in other embodiments, the adsorption surface 311 can also be other shapes, such as a positive direction or a hexagon, etc., which is not limited here.

[0046] It should be noted that in other embodiments, the number of strip-shaped adsorption grooves 321 located in the peripheral edge region of the adsorption surface 311 may be increased, thereby increasing the adsorption force on the peripheral edge of the substrate and improving the firmness of adsorption on the substrate.

[0047] See also Figure 4 Specifically, in the embodiment, each first vent hole 323 has a large diameter section 3231 and a small diameter section 3232 connected to one end of the large diameter section 3231, and the diameter of the large diameter section 3231 is greater than the diameter of the small diameter section 3232. The end of the large diameter section 3231 away from the small diameter section 3232 is connected to the corresponding groove 322, and the end of the small diameter section 3232 away from the large diameter section 3231 is connected to the corresponding strip adsorption groove 321. In this way, the first vent hole 323 is designed to include the large diameter section 3231 and the small diameter section 3232, which is conducive to reducing the processing difficulty of the first vent hole 323 and reducing the processing cost. In addition, the use of the small diameter section 3232 with a smaller diameter to connect the strip adsorption groove 321 is conducive to improving the adsorption force at the strip adsorption groove 321, thereby improving the adsorption strength of the substrate.

[0048] See also Figure 5As shown, in the embodiment of the present application, the adsorption surface 311 has a plurality of adsorption areas 3110. Each adsorption area 3110 is arranged along a first direction X parallel to the adsorption surface 311. Among them, the strip adsorption grooves 321 in any adsorption area 3110 intersect with the longitudinal extension direction of the strip adsorption grooves 321 in the adjacent adsorption area 3110. In other words, the longitudinal extension directions of the strip adsorption grooves 321 in each two adjacent adsorption areas 3110 are not parallel, but are arranged at an angle, which is conducive to improving the uniformity of the adsorption force applied to each area of ​​the substrate, thereby improving the firmness of the adsorption of the substrate.

[0049] exist Figure 5 In the illustrated embodiment, in any two adjacent adsorption regions 3110, each strip adsorption groove 321 of one adsorption region 3110 extends longitudinally along the first direction X, and each strip adsorption groove 321 of the other adsorption region 3110 extends longitudinally along the second direction Y. The first direction X and the second direction Y are both parallel to the adsorption surface 311, and the first direction X intersects with the second direction Y, so that the longitudinal extension directions of the strip adsorption grooves 321 of the two adjacent adsorption regions 3110 intersect. Preferably, the first direction X is perpendicular to the second direction Y, so that the longitudinal extension directions of the strip adsorption grooves 321 of the two adjacent adsorption regions 3110 are perpendicular.

[0050] It should be noted that, in some embodiments, the strip-shaped adsorption groove 321 located at the corner of the adsorption surface 311 may include at least two sections, one of which extends longitudinally along the first direction X, and the other extends longitudinally along the second direction Y, which is beneficial to increase the adsorption force on the corner of the substrate, thereby improving the firmness of the adsorption on the substrate.

[0051] Of course, in some embodiments, the strip-shaped adsorption groove 321 located at the edge of the adsorption surface 311 may include at least two sections, one of which extends longitudinally along the first direction X, and the other extends longitudinally along the second direction Y, which is beneficial to increase the adsorption force on the edge of the substrate, thereby improving the firmness of the adsorption of the substrate.

[0052] Specifically in the embodiment, the strip-shaped adsorption grooves 321 of different adsorption areas 3110 are connected to different grooves 322 through corresponding first vents 323. In this way, each second vent 324 can be controlled to be connected to the external negative pressure source in sequence, thereby controlling each adsorption area 3110 to generate negative pressure in sequence, that is, controlling each adsorption area 3110 to adsorb the substrate in sequence.

[0053] It should be noted that, in actual use, each adsorption area 3110 can be controlled to adsorb the substrate in sequence from the middle to the two ends of the substrate or from the two ends to the middle of the substrate, so that the substrate can be adsorbed more flat. It is understandable that when some adsorption areas 3110 have air leakage, other adsorption areas 3110 can also achieve adsorption of the substrate, which does not affect the adsorption and fixation of the substrate.

[0054] Further, each adsorption region 3110 is arranged along the first direction X, and each adsorption region 3110 includes a first sub-adsorption region 3112 and a second sub-adsorption region 3114 arranged along the second direction Y. Each strip-shaped adsorption groove 321 located in the first sub-adsorption region 3112 is connected to the same groove 322 through the corresponding first vent hole 323. Each strip-shaped adsorption groove 321 located in the second sub-adsorption region 3114 is connected to another groove 322 through the corresponding first vent hole 323. In this way, the strip-shaped adsorption grooves 321 in the first sub-adsorption region 3112 and the second sub-adsorption region 3114 of the adsorption region 3110 are respectively connected to different grooves 322, so that the first sub-adsorption region 3112 and the second sub-adsorption region 3114 of the adsorption region 3110 can be individually controlled to adsorb the substrate.

[0055] Further, each first sub-adsorption region 3112 and each second sub-adsorption region 3114 correspond to each groove 322. Each strip-shaped adsorption groove 321 in each first sub-adsorption region 3112 or second sub-adsorption region 3114 is connected to the corresponding groove 322 through the first vent hole 323. In this way, the strip-shaped adsorption grooves 321 of each first sub-adsorption region 3112 and each second sub-adsorption region 3114 are respectively connected to different grooves 322, so each first sub-adsorption region 3112 and each second sub-adsorption region 3114 can be individually controlled to adsorb the substrate.

[0056] Furthermore, each strip adsorption groove 321 in any first sub-adsorption area 3112 or second sub-adsorption area 3114 is at least partially located within the range of the positive projection of the corresponding groove 322 on the adsorption surface 311, so that each first ventilation hole 323 can extend in a direction perpendicular to the adsorption surface 311 (i.e., the thickness direction of the platform body 31), that is, it can penetrate the corresponding strip adsorption groove 321 and the groove 322, which is beneficial to reduce the processing difficulty of each first ventilation hole 323, and further enhance the adsorption force at the strip adsorption groove 321, thereby enhancing the adsorption strength of the substrate.

[0057] See also Figure 3 and Figure 4As shown, in the embodiment of the present application, the platform body 31 also has a first side surface 313 and a second side surface 314 connected between the adsorption surface 311 and the mounting surface 312, and the first side surface 313 and the second side surface 314 are opposite to each other. Among them, one end of a part of the second vent holes 324 passes through the first side surface 313, and the other end passes through the corresponding groove 322. One end of another part of the second vent holes 324 passes through the second side surface 314, and the other end passes through the corresponding groove 322. In this way, the second vent holes 324 are opened by using the first side surface 313 and the second side surface 314, so as to avoid the second vent holes 324 being too long, which is conducive to reducing the difficulty of processing and the adverse effect on the rigidity of the platform body 31.

[0058] Please also see Figure 5 Specifically, in the embodiment, the first sub-adsorption region 3112 of each adsorption region 3110 is arranged close to the first side surface 313, and the second sub-adsorption region 3114 of each adsorption region 3110 is arranged close to the second side surface 314. The grooves 322 respectively connected to each first sub-adsorption region 3112 are connected to the external negative pressure source through the second vent holes 324 penetrating the first side surface 313, and the grooves 322 respectively connected to each second sub-adsorption region 3114 are connected to the external negative pressure source through the second vent holes 324 penetrating the second side surface 314.

[0059] See also Figure 7 and Figure 8 In the embodiment of the present application, the mounting surface 312 of the platform body 31 is recessed inward along the edge of each groove 322 to form a step surface 325. Each cover plate 32 is fitted with the corresponding step surface 325, thereby sealing the corresponding groove 322. The height difference between the step surface 325 and the mounting surface 312 is greater than or equal to the thickness of the cover plate 32, thereby preventing the cover plate 32 from protruding from the mounting surface 312 and affecting the installation of the platform body 31.

[0060] Furthermore, a sealant is applied in the gap between each cover plate 32 and the platform body 31 to seal the gap between each cover plate 32 and the platform body 31, so as to improve the sealing of the groove 322. In this way, when the seal is damaged, it is only necessary to apply the sealant from the outside of the cover plate 32, without disassembly, which is convenient for maintenance.

[0061] Specifically in the embodiment, the platform body 31 further has a push rod avoidance hole 331 penetrating the adsorption surface 311 and the mounting surface 312, and each push rod avoidance hole 331 is used for a push rod to pass through. The push rod passes through the push rod avoidance hole 331 and lifts the substrate on the adsorption surface 311.

[0062] In this way, when loading the substrate, first, each push rod passes through the push rod avoidance hole 331 until it extends to a certain height from the adsorption surface 311; then, the substrate is placed on each push rod; then, each push rod retracts into the push rod avoidance hole 331, so that the substrate is located on the adsorption surface 311. At this time, each strip adsorption groove 321 on the adsorption surface 311 performs negative pressure adsorption on the substrate, thereby realizing the loading of the substrate.

[0063] When unloading the substrate on the adsorption surface 311, first, each strip adsorption groove 321 on the adsorption surface 311 stops adsorbing the substrate; then, each push rod passes through the push rod avoidance hole 331 until it extends to a certain height of the adsorption surface 311 to lift the substrate to the top of the adsorption surface 311; then, the substrate lifted by each push rod is transferred to realize the unloading of the substrate.

[0064] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0065] The above-mentioned embodiments only express several implementation methods of the utility model, and the description is relatively specific and detailed, but it cannot be understood as limiting the scope of the utility model patent. It should be pointed out that for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the utility model, which all belong to the protection scope of the utility model. Therefore, the protection scope of the utility model patent shall be based on the attached claims.

Claims

1. A negative pressure adsorption platform, characterized in that: It comprises a platform body and a plurality of cover plates, wherein the platform body has an adsorption surface and a mounting surface opposite to the adsorption surface; The adsorption surface is provided with a plurality of strip-shaped adsorption grooves, the mounting surface is provided with a plurality of grooves, and each of the cover plates is arranged on a side of the platform body having the mounting surface to seal each of the grooves respectively; The platform body also has a plurality of first ventilation holes and a plurality of second ventilation holes, each of the grooves is connected to a portion of the strip-shaped adsorption grooves through the corresponding first ventilation hole, and each of the grooves is connected to an external negative pressure source through the corresponding second ventilation hole.

2. The negative pressure adsorption platform according to claim 1, characterized in that: The width of the strip-shaped adsorption grooves located in the peripheral edge area of ​​the adsorption surface is greater than the width of the strip-shaped adsorption grooves in other areas.

3. The negative pressure adsorption platform according to claim 1, characterized in that: The adsorption surface includes a plurality of adsorption areas, and the plurality of adsorption areas are arranged along a first direction parallel to the adsorption surface; The longitudinal extension direction of the strip-shaped adsorption grooves in any one of the adsorption regions intersects with the longitudinal extension direction of the strip-shaped adsorption grooves in the adjacent adsorption region.

4. The negative pressure adsorption platform according to claim 3, characterized in that: In any two adjacent adsorption areas, each of the strip-shaped adsorption grooves in one of the adsorption areas extends longitudinally along the first direction, and each of the strip-shaped adsorption grooves in the other adsorption area extends longitudinally along a second direction, and the second direction is perpendicular to the first direction.

5. The negative pressure adsorption platform according to claim 1, characterized in that: The adsorption surface includes a plurality of adsorption areas, and the strip-shaped adsorption grooves in different adsorption areas are connected to different grooves through corresponding first vent holes.

6. The negative pressure adsorption platform according to claim 5, characterized in that: Each of the adsorption regions is arranged along a first direction parallel to the adsorption surface, and each of the adsorption regions includes a first sub-adsorption region and a second sub-adsorption region arranged along a second direction parallel to the adsorption surface, and the first direction intersects with the second direction; Each of the strip-shaped adsorption grooves located in the first sub-adsorption area is connected to the same groove through the corresponding first vent hole, and each of the strip-shaped adsorption grooves located in the second sub-adsorption area is connected to another groove through the corresponding first vent hole.

7. The negative pressure adsorption platform according to claim 6, characterized in that: Each of the first sub-adsorption areas and each of the second sub-adsorption areas corresponds to each of the grooves one by one, and each of the strip-shaped adsorption grooves in each of the first sub-adsorption area or the second sub-adsorption area is connected to the corresponding groove through the first vent hole.

8. The negative pressure adsorption platform according to claim 7, characterized in that: Each of the strip-shaped adsorption grooves in any of the first sub-adsorption regions or the second sub-adsorption regions is at least partially located within the range of the orthographic projection of the corresponding groove on the adsorption surface.

9. The negative pressure adsorption platform according to any one of claims 1 to 8, characterized in that: The platform body further comprises a first side surface and a second side surface connected between the adsorption surface and the mounting surface, and the first side surface and the second side surface are opposite to each other; One end of some of the second ventilation holes passes through the first side surface, and the other end passes through the corresponding groove; one end of another part of the second ventilation holes passes through the second side surface, and the other end passes through the corresponding groove.

10. The negative pressure adsorption platform according to any one of claims 1 to 8, characterized in that: The mounting surface is recessed inwardly along the edge of each groove to form a step surface, and the cover plate is in contact with the step surface; A height difference between the step surface and the mounting surface is greater than or equal to a thickness of the cover plate.

11. A coating device, characterized in that: It comprises a coating mechanism and the negative pressure adsorption platform as described in any one of claims 1 to 10, wherein the coating mechanism is used to coat the substrate adsorbed and fixed on the adsorption surface.

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