Wafer basket for feeding and discharging of manipulator
By designing a simple wafer basket structure, using special polymer materials and optimizing the groove design, the problem of excessively high costs in small-batch wafer testing and verification was solved, achieving low-cost, high-efficiency wafer transfer and positioning accuracy, thereby improving production efficiency and product quality.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-05-20
- Publication Date
- 2026-04-03
AI Technical Summary
Existing dedicated wafer transfer boxes and wafer loaders are too expensive for small-batch wafer testing and verification scenarios, and cannot meet the loading and unloading needs of robotic arms.
Design a wafer basket consisting of a base plate, columns, guide columns, and a top plate. It is made of polyetherimide or polyimide material, has a simple structure, and features grooves and chamfers to facilitate robotic arm operation. Weight-reducing holes reduce weight, bushings ensure accurate positioning, and threaded connections facilitate maintenance.
It reduces manufacturing costs, improves the automation and production efficiency of wafer transfer, ensures wafer stability and security, enhances portability and ease of operation, and guarantees process consistency and product quality.
Smart Images
Figure CN224084019U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of semiconductor component manufacturing technology, specifically to a wafer basket for loading and unloading by a robotic arm. Background Technology
[0002] In the semiconductor component manufacturing industry, wafers, as the basic material for semiconductor processing, need to be transferred between different workstations during the wafer processing to perform various different processes. A suitable carrier is needed to hold the wafers during the wafer transfer process between workstations.
[0003] Currently, the common approach is to use dedicated wafer transfer boxes to transport wafers, along with wafer loaders to open and close the wafer hopper doors. However, dedicated wafer transfer boxes and wafer loaders are typically expensive, making this approach more suitable for high-volume wafer production. In actual production, there are also small-batch wafer testing and verification needs. For these small-batch production scenarios, the cost of using dedicated wafer transfer boxes and wafer loaders is too high and unsuitable. Therefore, there is a need to develop a lower-cost wafer basket suitable for small-batch wafer testing and verification, and capable of meeting the loading and unloading requirements of robotic arms. Utility Model Content
[0004] To address the aforementioned issues, this invention provides a wafer loader for robotic arm loading and unloading. This wafer loader is composed of simple components such as a base plate, uprights, guide posts, and a top plate. Compared to dedicated wafer transfer boxes and wafer loaders, its structure is simpler, thereby reducing manufacturing costs. It is suitable for small-batch wafer testing and verification scenarios and effectively solves the problem of excessively high costs in existing solutions.
[0005] The technical solution of this utility model is as follows:
[0006] A wafer loader for loading and unloading robotic arms includes a base plate, uprights, guide posts, and a top plate. The base plate has an upright on each side of its top, at the tail and middle sections, and a guide post on each side of its top, at the head section, with the uprights and guide posts at the same height. The top plate is fixed to the top of the uprights and guide posts, and has two handles on its top. The uprights and guide posts have several vertically distributed grooves with three open sides for mounting wafers; the unopened side of the groove on the tail upright is on the tail side, and the unopened side of the grooves on the middle upright and head guide posts is on the outer side.
[0007] The groove on the guide post has a chamfered edge for guidance on the side near the head of the basket.
[0008] Several weight-reduction holes are provided on the bottom plate and the top plate.
[0009] The base plate is equipped with two bushings for positioning with the workstation positioning point.
[0010] The top and bottom of the uprights and guide columns are respectively provided with threaded holes. Steel wire threaded sleeves that mate with the threaded holes are installed on the base plate and top plate respectively. The base plate and top plate are fixedly connected to the uprights or guide columns with bolts.
[0011] The columns and guide columns are made of polyetherimide or polyimide.
[0012] The beneficial effects of this utility model are as follows:
[0013] 1. This utility model discloses a wafer loader for loading and unloading robotic arms. The wafer loader has a simple structure and low cost: the wafer loader is composed of simple components such as a base plate, uprights, guide posts and a top plate. Compared with dedicated wafer transfer boxes and wafer loaders, the structure is simpler, thereby reducing manufacturing costs. It is suitable for small-batch wafer testing and verification scenarios and effectively solves the problem of excessive cost of existing solutions.
[0014] 2. This utility model discloses a wafer basket for loading and unloading by a robotic arm. The wafer basket is adapted to the loading and unloading of a robotic arm: a handle is provided on the top of the basket for easy handling; several grooves with three openings are evenly distributed in the vertical direction of the uprights and guide pillars for installing wafers. The groove design facilitates the robotic arm to pick up and put down wafers, meets the loading and unloading needs of the robotic arm, and improves the automation level and production efficiency of wafer circulation.
[0015] 3. The present invention discloses a wafer basket for loading and unloading by a robotic arm. The wafer basket for loading and unloading by a robotic arm provides accurate and stable wafer positioning: the unopened side of the groove of the tail column is on the tail side, and the unopened side of the grooves of the middle column and the head guide column is on the outside. This design ensures the stable positioning of the wafer in the basket, avoids the wafer from shaking or colliding during the transfer process, and ensures the safety and integrity of the wafer.
[0016] 4. The present invention discloses a wafer basket for loading and unloading by a robotic arm. The wafer basket for loading and unloading by a robotic arm has a guiding function that enhances the ease of operation: the groove on the guide post has a chamfer on the side near the head of the basket. When the robotic arm performs wafer loading and unloading operations, the chamfer can guide the wafer to smoothly enter or leave the groove, reducing the difficulty of operation and the error rate, and improving the accuracy and convenience of operation.
[0017] 5. The present invention discloses a wafer basket for loading and unloading by a robotic arm. The wafer basket for loading and unloading by a robotic arm reduces weight and improves portability: several weight-reducing holes are provided on the bottom plate and the top plate. While ensuring the structural strength of the basket, the overall weight of the basket is effectively reduced, making it easier for operators or robotic arms to handle and operate, and improving the portability and flexibility of the basket.
[0018] 6. The present invention discloses a wafer basket for loading and unloading by a robotic arm. The wafer basket for loading and unloading by a robotic arm is precisely positioned to ensure process consistency: two bushings are set on the base plate for positioning with the workstation positioning points to ensure that the basket can be accurately positioned when it moves between workstations, ensuring that the process flow of the wafer can be accurately connected between different workstations, thereby improving the process consistency and product quality of wafer processing.
[0019] 7. The present invention discloses a wafer basket for loading and unloading robotic arms. The wafer basket for loading and unloading robotic arms is stable and easy to maintain: threaded holes are provided at the top and bottom of the uprights and guide columns, and steel wire thread sleeves that match the threaded holes are installed on the bottom plate and top plate. The bottom plate and top plate are fixedly connected to the uprights or guide columns with bolts. This connection method is stable and reliable, and is easy to disassemble and assemble, which is beneficial to the maintenance and upkeep of the basket.
[0020] 8. The present invention discloses a wafer basket for loading and unloading by a robotic arm. The wafer basket for loading and unloading by a robotic arm is made of materials that meet the process requirements: the uprights and guide pillars are made of special polymer materials such as polyetherimide or polyimide. These two materials have good mechanical properties, heat resistance and chemical stability, and low density, which can meet the various process requirements in the wafer processing process and ensure that the basket maintains stable performance during long-term use. Attached Figure Description
[0021] The advantages and solutions of this application will become clear to those skilled in the art upon reading the following detailed description of preferred embodiments. The accompanying drawings are for illustrative purposes only and are not intended to limit the scope of this invention.
[0022] In the attached diagram:
[0023] Figure 1 This is a three-dimensional schematic diagram of a wafer basket for loading and unloading by a robotic arm according to the present invention.
[0024] Figure 2 This is a schematic diagram of the column of a wafer basket for loading and unloading by a robotic arm according to the present invention;
[0025] Figure 3 This is a schematic diagram of a wafer basket for loading and unloading by a robotic arm according to the present invention, after loading wafers.
[0026] The components represented by the various reference numerals in the diagram are:
[0027] This utility model comprises: 1. base plate, 2. column, 3. guide column a, 4. bushing, 5. top plate, 6. handle, 7. wafer, and 8. guide column b. Detailed Implementation
[0028] like Figure 1 , 2 As shown in Figure 3, the wafer basket used for loading and unloading by the robotic arm includes a base plate 1, a column 2, a guide column a3, a top plate 5, a handle 6, and a guide column b8.
[0029] The base plate 1 is made of high-strength aluminum alloy or stainless steel and is formed by precision machining. The surface is anodized or sandblasted to improve corrosion resistance and wear resistance. Multiple square weight-reducing holes are evenly distributed on the base plate 1. The size of the weight-reducing holes is designed according to the strength requirements of the base plate to effectively reduce weight while ensuring structural strength. Large rounded corners with a radius of 5-10mm are machined at the four corners of the base plate 1 to avoid scratching people or equipment during handling.
[0030] Two cylindrical bushings 4 are provided in the middle of the base plate 1. The bushings 4 are made of high-precision steel or ceramic material and are fixed to the base plate 1 by interference fit or threaded connection. They are used to accurately position the basket with the workstation positioning point to ensure the stability of the basket during the circulation process.
[0031] The pillar 2, guide pillar a3 and guide pillar b8 are made of special polymer materials such as polyetherimide (PEI) or polyimide (PI). These two materials have excellent mechanical strength, heat resistance, chemical stability and low density characteristics, making them suitable for wafer processing environments.
[0032] Column 2, guide column a3 and guide column b8 are all multi-layered structures with the same layer height, and threaded holes are provided at the top and bottom respectively.
[0033] Wire thread inserts are installed on the base plate 1 and the top plate 5 at positions corresponding to the threaded holes. The wire thread inserts are embedded in the base plate 1 or the top plate 5, which enhances the strength of the threaded connection, prevents thread wear and extends service life. At the same time, the wire thread inserts can also improve the reliability of the connection and ensure that the threaded connection remains stable during multiple disassembly and assembly processes.
[0034] The side of the pillar 2, guide pillar a3 and guide pillar b8 has multiple grooves with three openings. The size and spacing of the grooves are designed according to the diameter and thickness of the wafer 7 to ensure that the wafer 7 can be placed stably. The unopened side of the groove of the tail pillar 2 is on the tail side, and the unopened side of the groove of the middle pillar 2 and the head guide pillar a3 and guide pillar b8 is on the outer side to ensure the positioning accuracy of the wafer 7 in the basket.
[0035] The guide posts a3 and b8 are provided with chamfers at the groove positions facing the basket opening. The chamfer angle is 30°-45° to facilitate the robot arm's picking and placing of wafer 7.
[0036] The top plate 5 is made of the same material as the bottom plate 1 and is formed by precision machining. Its surface is treated in the same way as the bottom plate 1. Multiple weight-reducing holes are also evenly distributed on the top plate 5. The design of the weight-reducing holes is similar to that of the bottom plate 1 to reduce the overall weight.
[0037] Two handles 6 are installed above the top plate 5. The handles 6 are made of high-strength plastic or aluminum alloy and are fixed to the top plate 5 by bolts or welding. The lifting direction of both hands is perpendicular to the material picking direction of the robot arm, which facilitates manual handling and robot arm operation.
[0038] Assembly and debugging process of wafer baskets used for robotic loading and unloading:
[0039] 1. Component preparation: Prepare all the processed components according to the design requirements, including base plate 1, column 2, guide column a3, guide column b8, top plate 5, handle 6, bushing 4, and wire thread sleeve, etc.
[0040] 2. Wire thread insert installation: Install the wire thread inserts in the base plate 1 and top plate 5 respectively, ensuring that the wire thread inserts are firmly installed and there is no looseness; this step is optional, or the wire thread inserts can be omitted, and through holes for installing bolts can be directly machined on the base plate 1 or top plate 5.
[0041] 3. Installation of uprights and guide columns: Connect uprights 2, guide columns a3 and b8 to base plate 1 with bolts. The bolts pass through the wire thread sleeves on base plate 1 and are screwed into the threaded holes at the bottom of uprights 2, guide columns a3 and b8. Tighten the bolts to ensure a firm connection.
[0042] 4. Top plate installation: Place the top plate 5 on top of the column 2, guide column a3 and guide column b8, and connect the top plate 5 to the column 2, guide column a3 and guide column b8 with bolts. The bolts pass through the wire thread sleeve (or through hole) on the top plate 5 and are screwed into the threaded holes at the top of the column 2, guide column a3 and guide column b8. Tighten the bolts.
[0043] 5. Handle installation: Install handle 6 above top plate 5, ensuring that the direction of lifting with both hands is perpendicular to the direction of material picking by the robot arm.
[0044] 6. Debugging and testing: Debug and test the assembled wafer basket, check whether the connections of each component are firm, whether wafer 7 can be stably placed in the groove, whether the robot can smoothly pick up and put in wafer 7, and whether bushing 4 can accurately match the workstation positioning point, etc.
[0045] Instructions for using the wafer hopper for loading and unloading robotic arms:
[0046] 1. Loading wafers: The wafers 7 are manually loaded one by one into the grooves formed by the pillar 2, guide pillar a3 and guide pillar b8 through the opening of the basket, ensuring that the wafers 7 are placed stably without shaking.
[0047] 2. Carrying basket: The operator holds the handle 6 above the top plate 5 with both hands and carries the wafer basket to the target workstation positioning point.
[0048] 3. Positioning and Picking: The bushing 4 at the bottom of the basket is precisely aligned with the positioning point of the workstation to ensure accurate basket positioning; when the wafer robot picks up the wafer, the robot's fingers enter the basket along the vertical opening direction and take out the wafer 7 for processing.
[0049] 4. Unloading and maintenance: After processing, place wafer 7 back into the basket and manually move the basket to the next workstation or storage area; clean and maintain the basket regularly, check whether the connections of each component are loose, whether the wire thread sleeves are worn, etc., to ensure the normal use of the basket.
[0050] This wafer basket for robotic loading and unloading can effectively solve the wafer transfer problem in small-batch wafer testing and verification scenarios, reduce production costs, and improve production efficiency.
Claims
1. A wafer basket for mechanical hand feeding and unloading, characterized in that, It includes a bottom plate (1), a stand (2), a guide column and a top plate (5); the tail of the top of the bottom plate (1) and the two sides of the middle part are respectively provided with a stand (2), the two sides of the head of the top of the bottom plate (1) are respectively provided with a guide column, and the stand (2) is in the same height with the guide column; the top plate (5) is fixed on the top of the stand (2) and the guide column, and the top of the top plate (5) is provided with two handles (6); the stand (2) and the guide column are uniformly distributed with a plurality of three-opened grooves for mounting a wafer (7) in the vertical direction, and the unopened side of the groove of the tail stand (2) is on the tail side, and the unopened side of the groove of the middle stand (2) and the head guide column is on the outer side.
2. The wafer basket for loading and unloading of a robot according to claim 1, wherein, The groove on the guide column is provided with a chamfer for guiding on the side close to the head of the basket.
3. The wafer basket for loading and unloading of a robot according to claim 1, wherein, The bottom plate (1) and the top plate (5) are provided with a plurality of lightening holes.
4. The wafer basket for loading and unloading of a robot according to claim 1, wherein, The bottom plate (1) is provided with two bushings (4) for positioning with the positioning points of the work station.
5. The wafer basket for loading and unloading of a robot according to claim 1, wherein, The top and bottom of the stand (2) and the guide column are respectively provided with threaded holes, and the bottom plate (1) and the top plate (5) are respectively provided with steel wire bushings matched with the threaded holes, and the bottom plate (1) and the top plate (5) are fixedly connected with the stand (2) or the guide column by bolts.
6. The wafer basket for loading and unloading of a robot according to claim 1, wherein, The stand (2) and the guide column are made of polyetherimide or polyimide.