Ammonia gas recovery device for storage chip production
By designing an ammonia recovery device for memory chip production, the problem of ammonia absorption saturation is solved, the sustainability and efficiency of ammonia recovery are achieved, and energy consumption is reduced.
Patent Information
- Application Number
- CN202420724899.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-10
- Publication Date
- 2025-03-14
- Estimated Expiration
- 2034-04-10
AI Technical Summary
In the existing ammonia recovery technology, ammonia absorption is prone to saturation, resulting in the inability to continue to adsorb ammonia, affecting the ammonia recovery effect.
An ammonia recovery device for the production of memory chips is designed, including an adsorption box and a recycling box. By cooperating with the tension plate and the pressure plate, the sealing plate is tightened and fixed, and the adsorption box and the recycling box are connected to the liquid circulation. The water adsorbed ammonia is precipitated by heating, then extracted through a water pump and cooled, and then flowed back into the adsorption box to achieve circulating recovery.
It effectively avoids the problem of saturation of ammonia absorption, ensures the sustainability and effectiveness of ammonia recovery, and reduces the energy consumption of the equipment.
Smart Images
Figure CN222605899U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of ammonia recovery, in particular to an ammonia recovery device for storage chip production. Background Art
[0002] In the production of memory chips, masks are often required for chip preparation. In this process, ammonia is one of the key materials responsible for etching. It can be used together with gases such as oxygen to etch the required graphics and structures, thereby achieving control over various areas of the chip. After the ammonia has completed etching, the mixed gas often needs to be processed to recover the ammonia and reduce production costs.
[0003] In the prior art, the commonly used ammonia recovery method is usually to pass ammonia into water, rely on water for adsorption, and then heat the adsorbed liquid to complete the ammonia recovery. However, during use, there is often a lot of gas that needs to be adsorbed, which makes the ammonia absorption saturated, so that the ammonia cannot continue to be adsorbed, affecting the ammonia recovery effect. For this reason, we propose an ammonia recovery device for memory chip production to solve the above problem. Utility Model Content
[0004] The purpose of the utility model is to solve the shortcomings existing in the prior art, such as: the problem of adsorption saturation and no longer absorbing ammonia in the traditional ammonia adsorption recovery process, which affects the ammonia recovery effect, and to propose an ammonia recovery device for memory chip production.
[0005] In order to achieve the above purpose, the utility model adopts the following technical solutions:
[0006] An ammonia recovery device for memory chip production comprises an adsorption box, an air inlet pipe is fixedly arranged on the side wall of the adsorption box, the air inlet pipe is arranged in an L shape, and the air inlet pipe extends to the bottom of the adsorption box, an air outlet is arranged on the adsorption box, and a water pipe is fixedly connected to the lower end of one side wall of the adsorption box, a sealing plate is fixedly sleeved on the side wall of the water pipe, one end of the water pipe is connected to a recovery box, a heating platform is fixedly arranged on the lower side of the recovery box, a connecting mechanism corresponding to the water pipe is arranged on the recovery box, an ammonia recovery pipe is fixedly connected to the recovery box, and a water delivery mechanism is also arranged on the recovery box.
[0007] Preferably, the connecting mechanism includes two tensioning plates, a socket corresponding to the water pipe is opened on the side wall of the recovery box, and telescopic grooves corresponding to the tensioning plates are opened on both sides of the socket. The two tensioning plates are respectively slidably arranged in the two telescopic grooves, and the two tensioning plates are connected to the inner wall of the telescopic groove through a first spring, and the two tensioning plates are provided with a clamping mechanism corresponding to the sealing plate.
[0008] Preferably, the clamping mechanism includes two pressure plates, and the side walls of the two tensioning plates close to the sealing plate are provided with storage grooves corresponding to the pressure plates. The two pressure plates are respectively slidably arranged in the two storage grooves, and the two pressure plates are connected to the inner walls of the storage grooves through second springs, and the two pressure plates are provided with corresponding toggle mechanisms.
[0009] Preferably, the toggle mechanism includes two toggle rods, which are respectively fixed on the side walls of the two pressure plates, and both of the toggle rods slide through the side walls of the tensioning plates, and the side walls of the two tensioning plates are provided with strip-shaped sliding openings corresponding to the toggle rods.
[0010] Preferably, the water delivery mechanism includes a water pump, which is fixedly arranged on the side wall of the recovery box, and the water suction end of the water pump is fixedly connected with a water suction pipe, and the water suction pipe passes through the side wall of the recovery box and extends to the bottom of the recovery box. A water injection pipe is fixedly connected to the drain outlet of the water pump, and a cooler corresponding to the water injection pipe is fixedly arranged on the side wall of the recovery box, and a socket corresponding to the water injection pipe is also opened on the side wall of the adsorption box.
[0011] Compared with the prior art, the beneficial effect of the utility model is that the sealing plate 19 is pressed and fixed at the socket on the recovery box 5 by the cooperation of the tensioning plate 12 and the pressing plate 15, so that the adsorption box 1 and the recovery box 5 are connected, so that the liquid in the two boxes can flow, and the water that has adsorbed ammonia enters the recovery box 5, is heated to precipitate ammonia, and then is pumped out by the water pump 6 and flows back into the adsorption box 1 after cooling, so that the circulation is realized, and continuous ammonia recovery can be carried out from the ammonia recovery pipe 9, which effectively avoids the problem of saturation of ammonia absorption and ensures the effect of ammonia recovery. BRIEF DESCRIPTION OF THE DRAWINGS
[0012] Figure 1 This is a three-dimensional structural schematic diagram of an ammonia recovery device for memory chip production proposed by the utility model;
[0013] Figure 2 This is a side structural diagram of an ammonia recovery device for memory chip production proposed by the utility model;
[0014] Figure 3 for Figure 2 Schematic diagram of the structure at A in the middle.
[0015] In the figure: 1 adsorption box, 2 air inlet pipe, 3 air outlet, 4 water injection pipe, 5 recovery box, 6 water pump, 7 water suction pipe, 8 cooler, 9 ammonia recovery pipe, 10 heating table, 11 water delivery pipe, 12 tensioning plate, 13 telescopic slot, 14 first spring, 15 pressure plate, 16 storage slot, 17 second spring, 18 lever, 19 sealing plate. DETAILED DESCRIPTION
[0016] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.
[0017] Reference Figure 1-3, an ammonia recovery device for memory chip production, comprising an adsorption box 1, an air inlet pipe 2 is fixedly arranged on the side wall of the adsorption box 1, the air inlet pipe 2 is arranged in an L shape, and the air inlet pipe 2 extends to the bottom of the adsorption box 1, an air outlet 3 is arranged on the adsorption box 1, and a water pipe 11 is fixedly connected to the lower end of one side wall of the adsorption box 1, a sealing plate 19 is fixedly sleeved on the side wall of the water pipe 11, one end of the water pipe 11 is connected to a recovery box 5, a heating platform 10 is fixedly arranged on the lower side of the recovery box 5, a connecting mechanism corresponding to the water pipe 11 is arranged on the recovery box 5, and the connecting mechanism includes two tensioning plates 12, a socket corresponding to the water pipe 11 is opened on the side wall of the recovery box 5, and telescopic grooves 1 corresponding to the tensioning plate 12 are opened on both sides of the socket 3. The two tensioning plates 12 are respectively slidably arranged in the two telescopic grooves 13, and the two tensioning plates 12 are connected to the inner wall of the telescopic groove 13 through the first spring 14. The two tensioning plates 12 are provided with a clamping mechanism corresponding to the sealing plate 19, and the clamping mechanism includes two pressing plates 15. The side walls of the two tensioning plates 12 close to the sealing plate 19 are provided with a receiving groove 16 corresponding to the pressing plate 15. The two pressing plates 15 are respectively slidably arranged in the two receiving grooves 16, and the two pressing plates 15 are connected to the inner wall of the receiving groove 16 through the second spring 17. The two pressing plates 15 are provided with a corresponding toggle mechanism, and the toggle mechanism includes two toggle rods 18, and the two toggle rods 18 are respectively fixed on the side walls of the two pressing plates 15, and the two toggle rods 18 are respectively fixed on the side walls of the two pressing plates 15. The side walls of the two tensioning plates 12 are both slidably connected to each other, and the side walls of the two tensioning plates 12 are both provided with strip-shaped sliding openings corresponding to the lever 18. The recovery box 5 is fixedly connected with an ammonia recovery pipe 9, and the recovery box 5 is also provided with a water delivery mechanism, which includes a water pump 6, which is fixedly arranged on the side wall of the recovery box 5, and the water suction end of the water pump 6 is fixedly connected with a water suction pipe 7, and the water suction pipe 7 passes through the side wall of the recovery box 5 and extends to the bottom of the recovery box 5. The drainage port of the water pump 6 is fixedly connected with a water injection pipe 4, and the side wall of the recovery box 5 is fixedly provided with a cooler 8 corresponding to the water injection pipe 4. The side wall of the adsorption box 1 is also provided with a socket corresponding to the water injection pipe 4. Through the cooperation of the tensioning plate 12 and the pressing plate 15, the sealing plate 19 is realized. The compression and fixation at the socket on the recovery box 5 realizes the connection between the adsorption box 1 and the recovery box 5, so that the liquid in the two boxes can circulate, and the water that has adsorbed ammonia enters the recovery box 5, is heated to precipitate ammonia, and is then pumped out by the water pump 6, and then flows into the adsorption box 1 again after cooling, so that the circulation is realized. Only the ammonia recovery pipe 9 is required to continuously recover ammonia, and the saturation problem of ammonia absorption is effectively avoided, and the effect of ammonia recovery is guaranteed. By setting the lever 18, the control of the pressure plate 15 is realized. The lever 18 is moved to retract the pressure plate 15 to pull out the water pipe 11, so that the recovery box 5 can be separated. When the ammonia to be recovered is less, only one side of the adsorption box 1 needs to be used to complete it, thereby reducing the energy consumption of the equipment.
[0018] In the utility model, when recovering ammonia generated by the production of memory chips, water is firstly injected into the adsorption box 1, and the mixed gas is passed into the adsorption box 1 through the air inlet pipe 2, and the heating table 10 and the water pump 6 are turned on. The water adsorbed with ammonia enters the recovery box 5 through the water pipe 11, and after being heated by the heating table 10 to precipitate ammonia, it is pumped out by the water pump 6 and cooled by the cooler 8 before flowing back into the adsorption box 1, thus realizing water circulation. Only the ammonia recovery pipe 9 is required to continuously recover ammonia, which effectively avoids the problem of saturation of ammonia absorption and ensures the effect of ammonia recovery.
[0019] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes within the technical scope disclosed by the present invention according to the technical scheme and the utility model concept of the present invention, which should be covered by the protection scope of the present invention.
Claims
1. An ammonia recovery device for memory chip production, comprising an adsorption box (1), characterized in that: An air inlet pipe (2) is fixedly arranged on the side wall of the adsorption box (1), the air inlet pipe (2) is arranged in an L shape, and the air inlet pipe (2) extends to the bottom of the adsorption box (1), the adsorption box (1) is provided with an air outlet (3), and a water pipe (11) is fixedly connected to the lower end of one side wall of the adsorption box (1), a sealing plate (19) is fixedly sleeved on the side wall of the water pipe (11), one end of the water pipe (11) is connected to a recovery box (5), a heating platform (10) is fixedly arranged on the lower side of the recovery box (5), a connection mechanism corresponding to the water pipe (11) is provided on the recovery box (5), an ammonia recovery pipe (9) is fixedly connected to the recovery box (5), and a water delivery mechanism is also provided on the recovery box (5).
2. The ammonia recovery device for memory chip production according to claim 1, characterized in that: The connection mechanism comprises two tensioning plates (12), a socket corresponding to the water pipe (11) is provided on the side wall of the recovery box (5), and telescopic grooves (13) corresponding to the tensioning plates (12) are provided on both sides of the socket, the two tensioning plates (12) are respectively slidably arranged in the two telescopic grooves (13), and the two tensioning plates (12) are connected to the inner wall of the telescopic groove (13) through a first spring (14), and the two tensioning plates (12) are provided with a clamping mechanism corresponding to the sealing plate (19).
3. The ammonia recovery device for memory chip production according to claim 2, characterized in that: The clamping mechanism comprises two pressing plates (15), and a receiving groove (16) corresponding to the pressing plate (15) is provided on the side wall of the two tensioning plates (12) close to the sealing plate (19). The two pressing plates (15) are respectively slidably arranged in the two receiving grooves (16), and the two pressing plates (15) are connected to the inner wall of the receiving groove (16) through a second spring (17), and the two pressing plates (15) are provided with a corresponding toggle mechanism.
4. The ammonia recovery device for memory chip production according to claim 3, characterized in that: The toggle mechanism comprises two toggle rods (18), the two toggle rods (18) are respectively fixedly arranged on the side walls of the two pressure plates (15), and the two toggle rods (18) are both slidably arranged to penetrate the side walls of the tensioning plates (12), and the side walls of the two tensioning plates (12) are both provided with strip-shaped sliding openings corresponding to the toggle rods (18).
5. The ammonia recovery device for memory chip production according to claim 1, characterized in that: The water delivery mechanism comprises a water pump (6), the water pump (6) is fixedly arranged on the side wall of the recovery box (5), and the water suction end of the water pump (6) is fixedly connected to a water suction pipe (7), the water suction pipe (7) penetrates the side wall of the recovery box (5) and extends to the bottom of the recovery box (5), the water discharge port of the water pump (6) is fixedly connected to a water injection pipe (4), and the side wall of the recovery box (5) is fixedly arranged with a cooling device (8) corresponding to the water injection pipe (4), and the side wall of the adsorption box (1) is also provided with a socket corresponding to the water injection pipe (4).