Grinding wheel protection outer cover device and mechanical grinding equipment

Abstract

The utility model provides a grinding wheel protection outer cover device and mechanical grinding equipment. The grinding wheel protection outer cover device comprises a grinding wheel protection outer cover arranged in a grinding cavity and a grinding wheel protection outer cover arranged in the grinding cavity, the cleaning pipe is arranged around the periphery of the grinding wheel protection outer cover in the circumferential direction, a gap is kept between the cleaning pipe and the outer surface of the grinding wheel protection outer cover, and liquid outlet holes facing the grinding wheel protection outer cover are distributed in the cleaning pipe in the circumferential direction of the grinding wheel protection outer cover; the liquid supply pipeline is communicated to the liquid inlet of the cleaning pipe, and a control valve used for controlling the liquid supply state is arranged on the liquid supply pipeline; and the connecting assembly is arranged on the cleaning pipe, and the connecting assembly is used for being connected to the grinding cavity so as to fix the cleaning pipe. According to the grinding wheel protection outer cover device and the mechanical grinding equipment, the grinding wheel protection outer cover can be effectively cleaned in time, the quality of machined products is improved, the service life of the equipment is prolonged, and the production efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor manufacturing, in particular to a grinding wheel protective cover device and mechanical grinding equipment. Background Art

[0002] In the field of semiconductor silicon wafer manufacturing, the use of mechanical grinding equipment is very common. In the use of mechanical grinding equipment, equipment contamination caused by the grinding waste liquid generated during the grinding process has always been a troubling problem. For the processing platform of the double-sided fine grinding and polishing equipment, when dirt exists on the surface of the processing platform, the silicon wafers that are subsequently processed and ground may have abnormal dimples on the surface of the silicon wafers, resulting in the subsequent downtime of the cleaning equipment, resulting in waste of production capacity and manpower, and will cause the scrapping of abnormal products, causing great damage. The downtime caused by abnormal dimples on the surface of the silicon wafer requires a long maintenance time, affecting production efficiency.

[0003] During the silicon wafer grinding process, the grinding wheel teeth grind the silicon wafer surface, and a large amount of grinding waste liquid is generated in the presence of cooling water and grinding water. The high-speed rotation and grinding of the grinding wheel and the processing carrier causes the presence of grinding waste liquid droplets suspended in the air inside the grinding chamber. During the long-term operation of the equipment, the waste liquid droplets in the air are easy to adhere to the grinding wheel protective cover. Long-term deposition will produce solid dirt, which is easy to fall off to the processing carrier during the operation of the equipment, affecting the subsequent processing quality of the equipment. Utility Model Content

[0004] The disclosed embodiments provide a grinding wheel protective cover device and a mechanical grinding device, which can promptly and effectively clean the grinding wheel protective cover, improve the quality of processed products, extend the life of the equipment, and improve production efficiency.

[0005] The technical solutions provided by the embodiments of the present disclosure are as follows:

[0006] A grinding wheel protective cover device is used to be arranged in a grinding chamber of a mechanical grinding device; the grinding wheel protective cover device comprises:

[0007] A grinding wheel protective cover disposed in the grinding chamber;

[0008] a cleaning pipe, which is arranged circumferentially around the outer periphery of the grinding wheel protective cover and maintains a gap with the outer surface of the grinding wheel protective cover, and the cleaning pipe is provided with liquid outlet holes distributed along the circumference of the grinding wheel protective cover and facing the grinding wheel protective cover;

[0009] A liquid supply pipeline connected to the liquid inlet of the cleaning pipe, and the liquid supply pipeline is provided with a control valve for controlling the liquid supply state; and

[0010] A connecting component is arranged on the cleaning pipe, and the connecting component is used to be connected to the grinding chamber to fix the cleaning pipe.

[0011] Exemplarily, the grinding wheel protection cover has a top and a bottom opposite to each other in a vertical direction, and the cleaning pipe is arranged at a position close to the top in the circumferential direction of the grinding wheel protection cover.

[0012] Exemplarily, the cleaning pipe includes a first pipe body and a second pipe body, both of which are arc-shaped pipe bodies, and both of which have two ends opposite to each other along the axial direction of the pipeline, and the two ends of the first pipe body and the second pipe body are butted against each other to circumferentially surround the grinding wheel protection cover.

[0013] Exemplarily, both ends of the first tube body and the second tube body are constructed such that one end is a closed end and the other end is a liquid inlet end provided with the liquid inlet, and the liquid outlet holes are distributed along the axial direction.

[0014] Exemplarily, the closed ends of the first tube body and the second tube body are butted against each other, and the liquid inlet ends are butted against each other.

[0015] Exemplarily, the connection component includes:

[0016] A connecting pipe, the connecting pipe is constructed in a semi-enclosed shape, and an opening is provided on the side wall thereof, which passes through both ends of the pipe axially, and both ends of the first pipe body and the second pipe body are embedded in the connecting pipe from the opening, so that the connecting pipe semi-encloses the first pipe body and the second pipe body in a circumferential direction;

[0017] The hoop comprises a fastening ring circumferentially sleeved on the connecting pipe and a connecting plate connected to the fastening ring. The connecting plate is provided with a connecting hole and is connected to the grinding chamber by inserting a fastener in the connecting hole.

[0018] Exemplarily, the cross section of the connecting pipe is in the shape of a three-quarter arc.

[0019] Exemplarily, the radius of the connecting pipe is equal to the radius of the first pipe body and the second pipe body.

[0020] Exemplarily, the first tube body and the second tube body are both semicircular arc-shaped tube bodies.

[0021] A mechanical grinding device, comprising:

[0022] grinding chamber;

[0023] A processing platform and a grinding wheel assembly disposed in the grinding chamber;

[0024] The grinding wheel protection cover device as described above is arranged in the grinding chamber, wherein the grinding wheel protection cover is arranged outside the grinding wheel assembly, and the cleaning pipe is connected to the grinding chamber through the connecting assembly.

[0025] The beneficial effects brought by the embodiments of the present disclosure are as follows:

[0026] In the above scheme, a cleaning pipe is arranged on the circumferential periphery of the grinding wheel protective cover, and the cleaning pipe is fixed on the grinding chamber through a connecting assembly, while a gap is maintained between the cleaning pipe and the surface of the grinding wheel protective cover. Liquid outlets facing the grinding wheel protective cover are distributed on the cleaning pipe, and cleaning liquid is supplied to the cleaning pipe through a liquid supply pipeline. The cleaning liquid flushes the outer surface of the grinding wheel protective cover through the liquid outlet holes, so that there can be a continuous flow of water on the outer surface of the grinding wheel protective cover, thereby preventing the deposition of dirt caused by the long-term residence of the grinding waste liquid in the grinding wheel protective cover, and achieving the purpose of keeping the surface of the grinding wheel protective cover clean, thereby reducing the impact on the quality of processed products, extending the life of equipment, and improving production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 A partial structural schematic diagram showing a mechanical grinding device provided by an embodiment of the present disclosure;

[0028] Figure 2 A schematic diagram showing the structure of a grinding wheel protection cover device provided in an embodiment of the present disclosure;

[0029] Figure 3 A schematic diagram showing the structure of a cleaning pipe in a grinding wheel protection cover device provided in an embodiment of the present disclosure;

[0030] Figure 4 A schematic diagram showing the structure of the connecting components in the grinding wheel protection cover device provided in an embodiment of the present disclosure. DETAILED DESCRIPTION

[0031] In order to make the purpose, technical solution and advantages of the embodiments of the present disclosure clearer, the technical solution of the embodiments of the present disclosure will be clearly and completely described below in conjunction with the drawings of the embodiments of the present disclosure. Obviously, the described embodiments are part of the embodiments of the present disclosure, not all of the embodiments. Based on the described embodiments of the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.

[0032] Unless otherwise defined, the technical terms or scientific terms used in the present disclosure should be understood by people with ordinary skills in the field to which the present disclosure belongs. The "first", "second" and similar words used in the present disclosure do not indicate any order, quantity or importance, but are only used to distinguish different components. Similarly, similar words such as "one", "one" or "the" do not indicate quantity restrictions, but indicate that there is at least one. Similar words such as "include" or "comprise" mean that the elements or objects appearing before the word cover the elements or objects listed after the word and their equivalents, without excluding other elements or objects. Similar words such as "connect" or "connected" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0033] The figure is a partial structural schematic diagram of a mechanical grinding device. As shown in the figure, the mechanical grinding device includes a grinding chamber and a main shaft 10, a grinding wheel and a grinding wheel protection cover device 20 arranged in the grinding chamber.

[0034] As shown in the figure, the grinding wheel protection cover device 20 provided in the embodiment of the present disclosure includes: a grinding wheel protection cover 21, a cleaning pipe 22, a liquid supply pipeline 23 and a connecting component 24, wherein the grinding wheel protection cover 21 is arranged outside the grinding wheel and is located in the grinding chamber; the cleaning pipe 22 is arranged circumferentially around the outer periphery of the grinding wheel protection cover 21 and maintains a gap with the outer surface of the grinding wheel protection cover 21, and the cleaning pipe 22 is circumferentially distributed with a plurality of liquid outlets 221 facing the grinding wheel protection cover 21 along the grinding wheel protection cover 21; the liquid supply pipeline 23 is connected to the liquid inlet 222 of the cleaning pipe 22, and a control valve 231 for controlling the liquid supply state is provided on the liquid supply pipeline 23; the connecting component 24 is arranged on the cleaning pipe 22, and the connecting component 24 is used to be connected to the grinding chamber to fix the cleaning pipe 22.

[0035] In the above scheme, the cleaning pipe 22 is arranged on the circumferential periphery of the grinding wheel protective cover 21, and the cleaning pipe 22 is fixed to the grinding chamber through the connecting assembly 24, while maintaining a gap and not contacting the surface of the grinding wheel protective cover 21. The cleaning pipe 22 is provided with a plurality of liquid outlets 221 facing the grinding wheel protective cover 21, and the cleaning liquid is supplied to the cleaning pipe 22 through the liquid supply pipeline 23. The cleaning liquid flushes the outer surface of the grinding wheel protective cover 21 through the liquid outlets 221, so that there can be flowing water on the outer surface of the grinding wheel protective cover, thereby preventing the deposition of dirt caused by the long-term residence of the grinding waste liquid in the grinding wheel protective cover 21, so as to achieve the purpose of keeping the surface of the grinding wheel protective cover 21 clean, thereby reducing the impact on the quality of the processed products, extending the life of the equipment, and improving the production efficiency.

[0036] It should be noted that, in the above scheme, the cleaning pipe 22 is arranged inside the grinding chamber and outside the grinding wheel protection cover, and is fixed in the grinding chamber, and has no contact with the grinding wheel protection outer cover 21, so it does not affect the normal opening and closing of the grinding wheel protection outer cover 21, and does not affect the operating stability of the equipment.

[0037] In some exemplary embodiments of the present disclosure, the control valve 231 can control the flow rate and flow velocity of the cleaning liquid, and can control the start and stop time as needed according to the equipment operation status and the cleaning cycle. The control valve 231 can use any suitable valve structure such as a solenoid valve. The use of a solenoid valve can achieve automatic control. During the grinding process, it can ensure that the cleaning liquid on the surface of the grinding wheel protective cover 21 is continuously flushed, so that the atomized grinding waste liquid generated by high-speed grinding during the grinding process inside the grinding chamber will not stay on the grinding wheel protective cover for a long time, ensuring that there is no dirt deposition on the surface of the grinding wheel protective cover 21 during the grinding process.

[0038] In some exemplary embodiments of the present disclosure, as shown in the figures, the grinding wheel protection cover 21 has a top and a bottom opposite to each other in the vertical direction, and the cleaning pipe 22 is arranged at a position close to the top in the circumferential direction of the grinding wheel protection cover 21 .

[0039] By adopting the above solution, the cleaning liquid can flow from top to bottom to flush the outer surface of the grinding wheel protection cover 21, so as to reduce the cleaning blind area.

[0040] It can be understood that the above is only an example and is not limited to this. In other embodiments, the cleaning pipe can also be one cleaning pipe arranged near the top of the grinding wheel protection cover 21 on the circumference, and the other cleaning pipe can be arranged near the bottom or middle of the grinding wheel protection cover 21 on the circumference.

[0041] Furthermore, in some exemplary embodiments, Figure 3 As shown, the cleaning pipe 22 includes a first tube body 223 and a second tube body 224, both of which are arc-shaped tube bodies, and both of which have two ends opposite to each other along the axial direction of the pipeline, and the two ends of the first tube body 223 and the second tube body 224 are butted against each other to circumferentially surround the grinding wheel protection cover 21.

[0042] By adopting the above scheme, the cleaning tube 22 is designed to be formed by splicing the first tube body 223 and the second tube body 224 together. There is a partition between the first tube body 223 and the second tube body 224. The two tube bodies can be disassembled from each other at the docking position. The two tube bodies can be arranged corresponding to the left and right opening and closing baffles of the grinding chamber. Therefore, when it is necessary to open and close the grinding wheel protection cover 21 and the grinding chamber, the corresponding one of the first tube body 223 and the second tube body 224 can be removed, which is convenient for the operator to replace the grinding wheel after only removing one tube body on one side, thereby improving work efficiency.

[0043] Furthermore, in some exemplary embodiments, Figure 3 As shown, both ends of the first tube body 223 and the second tube body 224 are constructed such that one end is a closed end S1 and the other end is a liquid inlet end S2 provided with the liquid inlet 222 , and the liquid outlet holes 221 are distributed along the axial direction.

[0044] By adopting the above scheme, the first tube body 223 and the second tube body 224 are not interconnected and are independent of each other, so that one of the tube bodies can be easily disassembled and replaced, and the flow rate of the cleaning liquid in the two tube bodies can be independently controlled according to actual production conditions.

[0045] In addition, in some exemplary embodiments, as shown in the figure, the closed ends S1 of the first tube body 223 and the second tube body 224 are butted against each other, and the liquid inlet ends S2 are butted against each other. In this way, it is easy to connect to the liquid supply pipeline 23, the pipeline layout space is small, and the layout of the connecting assembly 24 is also more convenient. It is understandable that in other embodiments, the liquid inlet end S2 and the closed end S1 of the first tube body 223 and the second tube body 224 can also be butted against each other.

[0046] In addition, in some exemplary embodiments, as shown in the figure, the connecting assembly 24 includes a connecting pipe 241 and a hoop member 242, the connecting pipe 241 is constructed to be semi-enclosed, and its side wall is provided with an opening 2410 that passes through both ends along the axial direction of the pipeline, and the first tube body 223 and the second tube body 224 are embedded into the connecting pipe 241 from the opening 2410 at both ends, so that the connecting pipe 241 circumferentially semi-encloses the first tube body 223 and the second tube body 224; the hoop member 242 includes a fastening ring 2421 circumferentially sleeved on the connecting pipe 241 and a connecting piece 2422 connected to the fastening ring 2421, the connecting piece 2422 is provided with a connecting hole 2423, and is connected to the grinding chamber by inserting a fastener in the connecting hole 2423.

[0047] By adopting the above solution, at the docking position of the first tube body 223 and the second tube body 224, the first tube body 223 and the second tube body 224 can be nested in the connecting tube 241, and the connecting tube 241 plays the role of connecting the first tube body 223 and the second tube body 224. The hoop 242 disposed on the outer surface of the connecting tube 241 can fasten the connecting tube 241 to the outside of the first tube body 223 and the second tube body 224, and connect it to the grinding chamber, specifically, it can be connected to the baffle of the grinding chamber. The connecting assembly 24 adopts the above structure, which is simple in structure and easy to disassemble and assemble.

[0048] In some exemplary embodiments, as shown in the figure, the cross section of the connecting tube 241 is in the shape of a three-quarter arc, so as to wrap the first tube body 223 and the second tube body 224 as much as possible to improve the connection stability.

[0049] In addition, in some exemplary embodiments, as shown in the figure, the radius of the connecting tube 241 is equal to the radius of the first tube body 223 and the second tube body 224 to improve the tightness between the connecting tube 241 and the first tube body 223 and the second tube body 224.

[0050] In addition, in some exemplary embodiments, as shown in the figure, the first tube body 223 and the second tube body 224 are both semicircular arc tube bodies. The first tube body 223 and the second tube body 224 can be components with the same structure, which are more versatile and easy to replace. In other embodiments not shown, the first tube body 223 and the second tube body 224 may not be semicircular arc tube bodies. For example, the first tube body 223 can be an inferior arc shape, and the second tube body 224 can be a superior arc shape, as long as the first tube body 223 and the second tube body 224 can enclose the grinding wheel protection cover 21, and the first tube body 223 and the second tube body 224 correspond to the left and right opening and closing baffles of the grinding chamber.

[0051] In addition, it should be noted that the cleaning pipe 22 is not limited to the above-mentioned embodiment. In other embodiments, the cleaning pipe 22 can also be constructed as a whole circular pipe, or can be constructed as a spiral pipe, etc.

[0052] In addition, the present disclosure also provides a mechanical grinding device, which includes:

[0053] grinding chamber;

[0054] A processing platform and a grinding wheel assembly disposed in the grinding chamber; and

[0055] The grinding wheel protection cover device 20 provided in the embodiment of the present disclosure is arranged in the grinding chamber, wherein the grinding wheel protection cover 21 is arranged outside the grinding wheel assembly, and the cleaning pipe 22 is connected to the grinding chamber through the connecting assembly 24.

[0056] Obviously, the mechanical grinding equipment provided in the embodiment of the present disclosure also has the beneficial effects brought by the grinding wheel protection cover device 20 provided in the embodiment of the present disclosure, which will not be elaborated here.

[0057] There are a few points to note:

[0058] (1) The drawings of the embodiments of the present disclosure only relate to the structures related to the embodiments of the present disclosure, and other structures may refer to the general design.

[0059] (2) For the sake of clarity, in the drawings used to describe the embodiments of the present disclosure, the thickness of layers or regions is exaggerated or reduced, that is, these drawings are not drawn according to the actual scale. It is understood that when an element such as a layer, film, region or substrate is referred to as being "on" or "under" another element, the element may be "directly" "on" or "under" the other element or there may be intermediate elements.

[0060] (3) In the absence of conflict, the embodiments of the present disclosure and the features therein may be combined with each other to obtain new embodiments.

[0061] The above are only specific implementations of the present disclosure, but the protection scope of the present disclosure is not limited thereto, and the protection scope of the present disclosure shall be based on the protection scope of the claims.

Claims

1. A grinding wheel protective cover device, used to be arranged in a grinding chamber of a mechanical grinding device; characterized in that: include: A grinding wheel protective cover disposed in the grinding chamber; a cleaning pipe, which is arranged circumferentially around the outer periphery of the grinding wheel protective cover and maintains a gap with the outer surface of the grinding wheel protective cover, and the cleaning pipe is provided with liquid outlet holes distributed along the circumference of the grinding wheel protective cover and facing the grinding wheel protective cover; A liquid supply pipeline connected to the liquid inlet of the cleaning pipe, and the liquid supply pipeline is provided with a control valve for controlling the liquid supply state; and A connecting component is arranged on the cleaning pipe, and the connecting component is used to be connected to the grinding chamber to fix the cleaning pipe.

2. The grinding wheel protective cover device according to claim 1, characterized in that: The grinding wheel protection cover has a top and a bottom opposite to each other in a vertical direction, and the cleaning pipe is arranged at a position close to the top in the circumferential direction of the grinding wheel protection cover.

3. The grinding wheel protection cover device according to claim 1, characterized in that: The cleaning pipe includes a first pipe body and a second pipe body, both of which are arc-shaped pipe bodies. Both of the first pipe body and the second pipe body have two ends opposite to each other along the axial direction of the pipeline, and the two ends of the first pipe body and the second pipe body are butted against each other to circumferentially surround the grinding wheel protective cover.

4. The grinding wheel protective cover device according to claim 3, characterized in that: Both ends of the first tube body and the second tube body are constructed such that one end is a closed end and the other end is a liquid inlet end provided with the liquid inlet, and the liquid outlet holes are distributed along the axial direction.

5. The grinding wheel protection cover device according to claim 4, characterized in that: The closed ends of the first tube body and the second tube body are butted against each other, and the liquid inlet ends are butted against each other.

6. The grinding wheel protective cover device according to claim 3, characterized in that: The connection component comprises: A connecting pipe, the connecting pipe is constructed in a semi-enclosed shape, and an opening is provided on the side wall thereof, which passes through both ends of the pipe axially, and both ends of the first pipe body and the second pipe body are embedded in the connecting pipe from the opening, so that the connecting pipe semi-encloses the first pipe body and the second pipe body in a circumferential direction; The hoop comprises a fastening ring circumferentially sleeved on the connecting pipe and a connecting plate connected to the fastening ring. The connecting plate is provided with a connecting hole and is connected to the grinding chamber by inserting a fastener in the connecting hole.

7. The grinding wheel protective cover device according to claim 6, characterized in that: The cross section of the connecting pipe is in the shape of a three-quarter arc.

8. The grinding wheel protective cover device according to claim 6, characterized in that: The radius of the connecting pipe is equal to the radius of the first pipe body and the second pipe body.

9. The grinding wheel protective cover device according to claim 3, characterized in that: The first tube body and the second tube body are both semicircular arc tube bodies.

10. A mechanical grinding device, characterized in that: include: grinding chamber; A processing platform and a grinding wheel assembly disposed in the grinding chamber; A grinding wheel protection cover device as claimed in any one of claims 1 to 9 arranged in the grinding chamber, wherein the grinding wheel protection cover is arranged outside the grinding wheel assembly, and the cleaning pipe is connected to the grinding chamber through the connecting assembly.

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