Electrode structure, electrode butt joint device and coating equipment

Abstract

The utility model provides an electrode structure, an electrode butt joint device and coating equipment, the electrode structure comprises a mounting seat, a cavity is formed in the mounting seat, a first opening communicated with the cavity is formed in one side of the mounting seat, and a second opening communicated with the cavity is formed in the other side of the mounting seat; the first electrode rod comprises a first connecting end and a first free end, the first connecting end is connected with an external power supply, and the first free end can movably penetrate through the first opening in the axis direction of the first electrode rod and extends into the cavity; the second electrode rod comprises a second connecting end and a second free end, the second connecting end is electrically connected with the electrode holder, the second free end can movably penetrate through the second opening in the axis direction of the second electrode rod and extends into the cavity, and a gap is formed between the first free end and the second free end; the conductive assembly is electrically connected with the first free end and the second free end. According to the electrode structure provided by the invention, the high-frequency phenomenon generated during film coating can be effectively reduced, and the film coating quality is improved.

Description

Technical Field

[0001] The present application belongs to the field of photovoltaic coating technology, and more specifically, relates to an electrode structure, an electrode docking device and a coating equipment. Background Art

[0002] PECVD (Plasma-Enhanced Chemical Vapor Deposition) equipment is a type of coating equipment commonly used in solar photovoltaic coating processes.

[0003] At present, PECVD equipment usually introduces RF power into the furnace tube through an electrode docking device. In the related art, the electrode docking device generally includes an electrode rod and an electrode seat, one end of the electrode rod is connected to an external RF power supply, and the other end is electrically connected to the electrode seat. When the graphite boat loaded with silicon wafers to be coated is placed in the furnace tube, the boat feet of the graphite boat are just placed on the electrode seat, and after the ambient temperature and vacuum reach the set values, RF discharge is performed to complete the coating. However, this method requires high position accuracy of the graphite boat and the electrode seat. In actual production, since the electrode rod will expand and elongate due to heat in the high temperature environment of the furnace, the position of the electrode seat will change, which will lead to abnormal discharge during coating and produce high-frequency phenomena, affecting the coating quality.

[0004] In order to solve this problem, in the related technology, a steel wire rope is added to the electrode rod to prevent the electrode rod from expanding and stretching due to heat. However, when the steel wire rope touches the furnace tube or photovoltaic debris, it will cause abnormal discharge and generate high frequency, thus affecting the coating quality. Utility Model Content

[0005] The embodiment of the present application provides an electrode structure that can effectively reduce the high-frequency phenomenon generated during coating and improve the coating quality.

[0006] The technical solution adopted in the embodiment of the present application is: to provide an electrode structure, including:

[0007] A mounting seat, wherein a cavity is formed in the mounting seat, a first opening communicating with the cavity is formed on one side of the mounting seat, and a second opening communicating with the cavity is formed on the other side of the mounting seat;

[0008] A first electrode rod, comprising a first connection end and a first free end, wherein the first connection end is connected to an external power source, and the first free end can be movably passed through the first opening along the axis direction of the first electrode rod and extend into the cavity;

[0009] a second electrode rod, comprising a second connection end and a second free end, the second connection end being electrically connected to the electrode holder, the second free end being movable along the axial direction of the second electrode rod through the second opening and extending into the cavity, a gap being provided between the first free end and the second free end, and the axial direction of the first electrode rod being the same as the axial direction of the second electrode rod; and

[0010] A conductive component is electrically connected to the first free end and the second free end respectively.

[0011] Furthermore, the conductive component includes a first conductive member and a second conductive member, the first conductive member is electrically connected to the first free end, the second conductive member is electrically connected to the second free end, and the first conductive member is electrically connected to the second conductive member.

[0012] Furthermore, the mounting seat is a conductive mounting seat, the first conductive member is in electrical contact with the conductive mounting seat, and the second conductive member is in electrical contact with the conductive mounting seat.

[0013] Furthermore, a first installation cavity is provided in the first conductive member, the first installation cavity is communicated with the cavity body, the first free end passes through the first installation cavity and extends into the cavity body, and the cavity wall of the first installation cavity is in electrical contact with the first free end;

[0014] A second installation cavity is defined in the second conductive member, the second installation cavity is communicated with the cavity body, the second free end passes through the second installation cavity and extends into the cavity body, and a cavity wall of the second installation cavity is in electrical contact with the second free end.

[0015] Furthermore, the first conductive member and / or the second conductive member includes:

[0016] A first conductive plate, wherein a first half groove is formed on the first conductive plate; and

[0017] A second conductive plate connected to the first conductive plate, wherein a second half groove is formed on the second conductive plate;

[0018] The first half groove of the first conductive member is connected to the second half groove to form the first installation cavity, and the first half groove of the second conductive member is connected to the second half groove to form the second installation cavity.

[0019] Furthermore, the first conductive member and / or the second conductive member is a graphite conductive member.

[0020] Furthermore, the mounting base includes a first base body and a second base body connected to the first base body.

[0021] The first seat body is provided with a first semi-concave cavity, the second seat body is provided with a second semi-concave cavity, and the first semi-concave cavity and the second semi-concave cavity are connected to form the cavity.

[0022] Furthermore, the outer cover of the mounting seat is provided with a first insulating cover, the outer cover of the first electrode rod is provided with a second insulating cover, and the outer cover of the second electrode rod is provided with a third insulating cover.

[0023] One end of the first insulating sleeve is connected to the second insulating sleeve via a fourth insulating sleeve, one end of the fourth insulating sleeve is plugged into one end of the first insulating sleeve, and the other end of the fourth insulating sleeve is plugged into the second insulating sleeve;

[0024] The other end of the first insulating sleeve is connected to the third insulating sleeve via a fifth insulating sleeve. One end of the fifth insulating sleeve is plugged into the other end of the first insulating sleeve, and the other end of the fifth insulating sleeve is plugged into the third insulating sleeve.

[0025] An embodiment of the present application further provides an electrode docking device, comprising a support rod, an electrode seat, and the electrode structure as described above, wherein the electrode seat is disposed on the support rod, and the electrode structure is electrically connected to the electrode seat.

[0026] Furthermore, the electrode holders include two, the electrode structures include two,

[0027] Any one of the two electrode structures is connected to the positive electrode of the external power supply, and the other is connected to the negative electrode of the external power supply,

[0028] One of the two electrode seats is electrically connected to one of the electrode structures, and the other is electrically connected to the other electrode structure.

[0029] An embodiment of the present application further provides a coating device, comprising a furnace tube and the electrode docking device as described above, wherein the electrode docking device is arranged in the furnace tube.

[0030] The electrode structure provided by the embodiment of the present application has the beneficial effect that: by setting a first electrode rod and a second electrode rod, the first electrode rod includes a first connecting end and a first free end, the second electrode rod includes a second connecting end and a second free end, and a gap is provided between the first free end and the second free end, and a conductive component is used to electrically connect the first free end and the second free end respectively, thereby realizing the electrical connection between the first electrode rod and the second electrode rod, and a mounting seat is provided, a cavity is provided in the mounting seat, a first opening connected to the cavity is provided on one side of the mounting seat, and a second opening connected to the cavity is provided on the other side of the mounting seat, the first free end can move through the first opening along the axial direction of the first electrode rod and extend into the cavity, and the second free end can move through the first opening along the axial direction of the second electrode rod. A second opening is provided and extends into the cavity. When the first electrode rod and the second electrode rod expand due to heat, the first electrode rod will extend in the cavity along the axial direction of the first electrode rod at the first free end, and the second electrode rod will extend in the cavity along the axial direction of the second electrode rod at the second free end, while the positions of the first connecting end and the second connecting end remain unchanged, thereby ensuring that the position of the electrode seat does not change. Moreover, since there is a gap between the first free end and the second free end, the first free end and the second free end will not collide when they are heated and extended, and there is no need to add a steel wire rope, thereby avoiding the high-frequency phenomenon caused by the steel wire rope touching the furnace tube or photovoltaic fragments in the related technology, improving the coating quality, reducing the rework or shutdown problems caused by the high-frequency phenomenon in production, and thus improving work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0032] Figure 1 A schematic diagram of the three-dimensional structure of the electrode structure provided in an embodiment of the present application;

[0033] Figure 2 A longitudinal cross-sectional structural diagram of an electrode structure provided in an embodiment of the present application;

[0034] Figure 3 A schematic diagram of an exploded structure of an electrode structure provided in an embodiment of the present application;

[0035] Figure 4 A schematic diagram of the three-dimensional structure of the electrode docking device provided in an embodiment of the present application;

[0036] Figure 5 It is a schematic diagram of the assembly structure of the electrode docking device and the carrying boat of the embodiment of the present application;

[0037] Figure 6 A schematic diagram of the three-dimensional structure of the coating equipment provided in an embodiment of the present application.

[0038] Among them, the reference numerals in the figure are:

[0039] 100. electrode structure; 10. mounting seat; 101. cavity; 102. first opening; 103. second opening; 11. first seat body; 12. second seat body; 121. second semi-concave cavity; 13. first insulating sleeve; 20. first electrode rod; 21. first connecting end; 22. first free end; 23. second insulating sleeve; 30. second electrode rod; 31. second connecting end; 32. second free end; 33. third insulating sleeve; 40. conductive component; 41. first conductive member; 42. second conductive member; 43. first conductive plate; 44. second conductive plate; 441. second semi-concave groove; 50. fourth insulating sleeve; 60. fifth insulating sleeve; 200. electrode seat; 300. carrying boat; 400. support rod; 500. furnace tube. DETAILED DESCRIPTION

[0040] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present application more clearly understood, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0041] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0042] It should be understood that the orientation or position relationship indicated by terms such as "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside" and "outside" are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0043] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0044] See also Figure 1 and Figure 2 The electrode structure 100 provided in the embodiment of the present application is now described. The electrode structure 100 provided in the embodiment of the present application is used to realize the electrical connection between the electrode holder 200 and an external power source (not shown in the figure), and the power source can be a radio frequency power source. Figure 5 The boat feet of the carrying boat 300 are electrically connected. The carrying boat 300 is used to carry the workpiece to be coated.

[0045] like Figures 2 to 3 As shown, the electrode structure 100 provided in the embodiment of the present application includes a mounting seat 10, a first electrode rod 20, a second electrode rod 30 and a conductive component 40. A cavity 101 is provided in the mounting seat 10, a first opening 102 communicating with the cavity 101 is provided on one side of the mounting seat 10, and a second opening 103 communicating with the cavity 101 is provided on the other side of the mounting seat 10.

[0046] The first electrode rod 20 includes a first connection end 21 and a first free end 22. The first connection end 21 is connected to an external power source, and the first free end 22 can movably pass through the first opening 102 along the axis direction of the first electrode rod 20 and extend into the cavity 101. When the first electrode rod 20 expands due to heat, the first free end 22 will extend in the cavity 101 along the axis direction of the first electrode rod 20.

[0047] The second electrode rod 30 includes a second connection end 31 and a second free end 32. The second connection end 31 is used to be electrically connected to the electrode holder 200. The second free end 32 can movably pass through the second opening 103 along the axial direction of the second electrode rod 30 and extend into the cavity 101. When the second electrode rod 30 expands due to heat, the second free end 32 will extend in the cavity 101 along the axial direction of the second electrode rod 30. The axial direction of the first electrode rod 20 is the same as the axial direction of the second electrode rod 30.

[0048] There is a gap between the first free end 22 and the second free end 32 . Since there is a gap between the first free end 22 and the second free end 32 , no collision occurs when the first free end 22 and the second free end 32 are extended.

[0049] The conductive component 40 is electrically connected to the first free end 22 and the second free end 32 respectively. The conductive component 40 realizes the electrical connection between the first free end 22 and the second free end 32.

[0050] The electrode structure 100 provided in the embodiment of the present application is provided with a first electrode rod 20 and a second electrode rod 30, wherein the first electrode rod 20 includes a first connecting end 21 and a first free end 22, and the second electrode rod 30 includes a second connecting end 31 and a second free end 32, and there is a gap between the first free end 22 and the second free end 32, and a conductive component 40 is used to electrically connect the first free end 22 and the second free end 32 respectively, thereby realizing the electrical connection between the first electrode rod 20 and the second electrode rod 30, and a mounting seat 10 is provided, wherein a cavity 101 is provided in the mounting seat 10, a first opening 102 communicating with the cavity 101 is provided on one side of the mounting seat 10, and a second opening 103 communicating with the cavity 101 is provided on the other side of the mounting seat 10, the first free end 22 can movably pass through the first opening 102 along the axial direction of the first electrode rod 20 and extend into the cavity 101, and the second free end 32 can move along the axial direction of the second electrode rod 3 0 is movably provided with a second opening 103 in the axial direction of the first electrode rod 20 and extends into the cavity 101. When the first electrode rod 20 and the second electrode rod 30 expand due to heat, the first electrode rod 20 will extend in the cavity 101 along the axial direction of the first electrode rod 20 at the first free end 22, and the second electrode rod 30 will extend in the cavity 101 along the axial direction of the second electrode rod 30 at the second free end 32, while the positions of the first connecting end 21 and the second connecting end 31 remain unchanged, thereby ensuring that the position of the electrode holder 200 does not change. Moreover, since there is a gap between the first free end 22 and the second free end 32, the first free end 22 and the second free end 32 will not collide when they are heated and extended, and there is no need to add a steel wire rope, thereby avoiding the high-frequency phenomenon caused by the steel wire rope touching the furnace tube 500 or the photovoltaic fragments in the related art, improving the coating quality, reducing the rework or shutdown problems caused by the high-frequency phenomenon in production, and thus improving the work efficiency.

[0051] See also Figures 2 to 3 The conductive component 40 may include a first conductive member 41 and a second conductive member 42. The first conductive member 41 is electrically connected to the first free end 22, the second conductive member 42 is electrically connected to the second free end 32, and the first conductive member 41 is electrically connected to the second conductive member 42. By setting the first conductive member 41 and the second conductive member 42, the first conductive member 41 is electrically connected to the first free end 22, the second conductive member 42 is electrically connected to the second free end 32, and then the first conductive member 41 is electrically connected to the second conductive member 42, the electrical connection between the first free end 22 and the second free end 32 can be achieved.

[0052] See also Figure 2, the mounting seat 10 can be a conductive mounting seat 10, the first conductive member 41 is in electrical contact with the conductive mounting seat 10, and the second conductive member 42 is in electrical contact with the conductive mounting seat 10. By setting the mounting seat 10 as a conductive mounting seat 10, and then electrically contacting the first conductive member 41 and the second conductive member 42 through the conductive mounting seat 10, the electrical connection between the first conductive member 41 and the second conductive member 42 is achieved, and the intermediate member can be saved, the structure is simplified, and the cost is reduced. Of course, it can be understood that the mounting seat 10 may not have a conductive function, and the first conductive member 41 and the second conductive member 42 can be electrically connected through an intermediate connector, that is, an additional intermediate connector is provided, or the first conductive member 41 and the second conductive member 42 can be directly contacted for electrical connection.

[0053] See also Figure 2 , a first installation cavity (not shown in the figure) may be provided in the first conductive member 41, the first installation cavity is connected with the cavity 101, the first free end 22 passes through the first installation cavity and extends into the cavity 101, and the cavity wall of the first installation cavity is in electrical contact with the first free end 22. By setting the first installation cavity, the first free end 22 can pass through and extend into the cavity 101, and achieve electrical contact with the first free end 22, and the structure is simple. A second installation cavity (not shown in the figure) is provided in the second conductive member 42, the second installation cavity is connected with the cavity 101, the second free end 32 passes through the second installation cavity and extends into the cavity 101, and the cavity wall of the second installation cavity is in electrical contact with the second free end 32. By setting the second installation cavity, the second free end 32 can pass through and extend into the cavity 101, and achieve electrical contact with the second free end 32.

[0054] See also Figure 3 , the first conductive member 41 and / or the second conductive member 42 may include a first conductive plate 43 and a second conductive plate 44. A first half groove (not shown) is provided on the first conductive plate 43, the second conductive plate 44 is connected to the first conductive plate 43, and a second half groove 441 is provided on the second conductive plate 44. The first half groove of the first conductive member 41 is connected to the second half groove 441 to form a first installation cavity. The first half groove of the second conductive member 42 is connected to the second half groove 441 to form a second installation cavity. During installation, it is only necessary to place the first free end 22 into the first installation cavity, the second free end 32 into the second installation cavity, and then connect and fix the first conductive plate 43 and the second conductive plate 44, which can reduce the difficulty of assembly.

[0055] See also Figure 2The first conductive member 41 and / or the second conductive member 42 may be a graphite conductive member. Since graphite has good conductivity and a certain lubricating effect, when the first electrode rod 20 and the second electrode rod 30 expand and elongate due to heat, the first conductive member 41 and the second conductive member 42 will not affect the telescopic activity of the first electrode rod 20 and the second electrode rod 30, thereby ensuring the stability of the structure.

[0056] See also Figure 3 The mounting base 10 may include a first base body 11 and a second base body 12, and the second base body 12 is connected to the first base body 11. A first semi-concave cavity (not shown) is provided on the first base body 11, and a second semi-concave cavity 121 is provided on the second base body 12. The first semi-concave cavity and the second semi-concave cavity 121 are connected to form a cavity 101. By dividing the mounting base 10 into the first base body 11 and the second base body 12, disassembly and assembly are facilitated.

[0057] See also Figure 1 to Figure 2 , the mounting seat 10 may be provided with a first insulating sleeve 13. The first electrode rod 20 is provided with a second insulating sleeve 23, and the second electrode rod 30 is provided with a third insulating sleeve 33. One end of the first insulating sleeve 13 is connected to the second insulating sleeve 23 via a fourth insulating sleeve 50, one end of the fourth insulating sleeve 50 is mutually plugged with one end of the first insulating sleeve 13, and the other end is mutually plugged with the second insulating sleeve 23. The other end of the first insulating sleeve 13 is connected to the third insulating sleeve 33 via a fifth insulating sleeve 60, one end of the fifth insulating sleeve 60 is mutually plugged with the other end of the first insulating sleeve 13, and the other end is mutually plugged with the third insulating sleeve 33.

[0058] Since the workpiece to be coated will form fragments after heating, if there is a gap between the first insulating sleeve 13 and the second insulating sleeve 23 or between the first insulating sleeve 13 and the third insulating sleeve 33, the fragments will contact and conduct electricity with the first electrode rod 20 or the second electrode rod 30, resulting in a high-frequency phenomenon. In the embodiment of the present application, the fourth insulating sleeve 50 is connected to the first insulating sleeve 13 and the second insulating sleeve 23 by plugging each other, and the fifth insulating sleeve 60 is connected to the first insulating sleeve 13 and the third insulating sleeve 33 by plugging each other, which can effectively avoid the existence of gaps at the connection position.

[0059] See also Figures 4 to 5 The present application also provides an electrode docking device, comprising a support rod 400, an electrode holder 200, and an electrode structure 100 in any of the above embodiments. The electrode holder 200 is disposed on the support rod 400. The electrode structure 100 is electrically connected to the electrode holder 200. The electrode holder 200 is used to electrically connect to the boat foot of the carrying boat 300.

[0060] Since the electrode docking device of the embodiment of the present application includes the electrode structure 100 in any of the above embodiments, it has the beneficial effects brought by the electrode structure 100 in any of the above embodiments, which will not be described in detail here.

[0061] See also Figure 4 , the electrode holder 200 may include two, and the electrode structure 100 may include two. Any one of the two electrode structures 100 is connected to the positive electrode of the external power supply, and the other is connected to the negative electrode of the external power supply. One of the two electrode holders 200 is electrically connected to one of the electrode structures 100, and the other is electrically connected to the other electrode structure 100. When in use, the two boat feet of the carrier boat 300 are electrically connected to the two electrode holders 200 respectively, so as to form a loop, and then the workpiece to be coated on the carrier boat 300 can be coated.

[0062] See also Figure 6 The embodiment of the present application also provides a coating device, including a furnace tube 500 and an electrode docking device in any of the above embodiments, and the electrode docking device is arranged in the furnace tube 500.

[0063] Since the coating equipment of the embodiment of the present application includes the electrode docking device in any of the above embodiments, it has the beneficial effects brought by the electrode docking device in any of the above embodiments, which will not be described in detail here.

[0064] The above are only preferred embodiments of the present application and are not intended to limit the present application. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims

1. An electrode structure, characterized in that: include: A mounting seat, wherein a cavity is formed in the mounting seat, a first opening communicating with the cavity is formed on one side of the mounting seat, and a second opening communicating with the cavity is formed on the other side of the mounting seat; A first electrode rod, comprising a first connection end and a first free end, wherein the first connection end is connected to an external power source, and the first free end can be movably passed through the first opening along the axis direction of the first electrode rod and extend into the cavity; a second electrode rod, comprising a second connection end and a second free end, the second connection end being electrically connected to the electrode holder, the second free end being movable along the axial direction of the second electrode rod through the second opening and extending into the cavity, a gap being provided between the first free end and the second free end, and the axial direction of the first electrode rod being the same as the axial direction of the second electrode rod; and A conductive component is electrically connected to the first free end and the second free end respectively.

2. The electrode structure according to claim 1, characterized in that: The conductive component includes a first conductive member and a second conductive member, the first conductive member is electrically connected to the first free end, the second conductive member is electrically connected to the second free end, and the first conductive member is electrically connected to the second conductive member.

3. The electrode structure according to claim 2, characterized in that: The mounting seat is a conductive mounting seat, the first conductive member is in electrical contact with the conductive mounting seat, and the second conductive member is in electrical contact with the conductive mounting seat.

4. The electrode structure according to claim 2, characterized in that: A first installation cavity is defined in the first conductive member, the first installation cavity is communicated with the cavity body, the first free end passes through the first installation cavity and extends into the cavity body, and a cavity wall of the first installation cavity is in electrical contact with the first free end; A second installation cavity is defined in the second conductive member, the second installation cavity is communicated with the cavity body, the second free end passes through the second installation cavity and extends into the cavity body, and a cavity wall of the second installation cavity is in electrical contact with the second free end.

5. The electrode structure according to claim 4, characterized in that: The first conductive member and / or the second conductive member comprises: A first conductive plate, wherein a first half groove is formed on the first conductive plate; and A second conductive plate, connected to the first conductive plate, wherein a second half groove is formed on the second conductive plate; The first half groove of the first conductive member is connected to the second half groove to form the first installation cavity, and the first half groove of the second conductive member is connected to the second half groove to form the second installation cavity.

6. The electrode structure according to claim 2, characterized in that: The first conductive member and / or the second conductive member is a graphite conductive member.

7. The electrode structure according to any one of claims 1 to 6, characterized in that: The mounting base includes a first base body and a second base body connected to the first base body. The first seat body is provided with a first semi-concave cavity, the second seat body is provided with a second semi-concave cavity, and the first semi-concave cavity and the second semi-concave cavity are connected to form the cavity.

8. The electrode structure according to any one of claims 1 to 6, characterized in that: The outer cover of the mounting seat is provided with a first insulating cover, the outer cover of the first electrode rod is provided with a second insulating cover, and the outer cover of the second electrode rod is provided with a third insulating cover. One end of the first insulating sleeve is connected to the second insulating sleeve via a fourth insulating sleeve, one end of the fourth insulating sleeve is plugged into one end of the first insulating sleeve, and the other end of the fourth insulating sleeve is plugged into the second insulating sleeve; The other end of the first insulating sleeve is connected to the third insulating sleeve via a fifth insulating sleeve. One end of the fifth insulating sleeve is plugged into the other end of the first insulating sleeve, and the other end of the fifth insulating sleeve is plugged into the third insulating sleeve.

9. An electrode docking device, characterized in that: It comprises a support rod, an electrode seat and the electrode structure according to any one of claims 1 to 8, wherein the electrode seat is arranged on the support rod, and the electrode structure is electrically connected to the electrode seat.

10. The electrode docking device according to claim 9, characterized in that: The electrode holders include two, the electrode structures include two, Any one of the two electrode structures is connected to the positive electrode of the external power supply, and the other is connected to the negative electrode of the external power supply, One of the two electrode seats is electrically connected to one of the electrode structures, and the other is electrically connected to the other electrode structure.

11. A coating device, characterized in that: It comprises a furnace tube and the electrode docking device according to any one of claims 9 to 10, wherein the electrode docking device is arranged in the furnace tube.

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