Rapid cleaning equipment for pier crucible material of single crystal furnace

Abstract

The utility model relates to the technical field of monocrystalline silicon manufacturing, in particular to rapid cleaning equipment for a single crystal furnace pier crucible material, which comprises a bottom plate, four I-shaped steels are fixedly connected onto the bottom plate, the tops of the I-shaped steels are fixedly connected with a fixed frame, a movable plate is arranged in a groove between two adjacent I-shaped steels in a sliding manner, and the movable plate is fixedly connected with the fixed frame. Two driving machines are mounted on the movable plate, a clamping part is arranged between the output ends of the two driving machines, the clamping part is used for clamping a crucible edge with a hole in the bottom, a pushing part is arranged on the fixed frame, and when the clamping part clamps the crucible edge, the driving machines can drive the crucible edge to rotate. According to the utility model, through the matching of the related structures, the crucible bottom material in the crucible edge can be slowly pushed out, so that the phenomena that the crucible edge needs to be cooled during manual knockout, the high-temperature crucible edge scalds a knocker and the crucible bottom material is likely to splash to hurt a worker in the knockout process are avoided, and the knockout efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal silicon manufacturing, in particular to a rapid cleaning device for single crystal furnace crucible materials. Background Art

[0002] After a single crystal furnace has been running for a long time, it is necessary to remove or knock out the crucible material (cruciform bottom material) in the crucible to ensure a stable thermal environment. The crucible with holes at the bottom (containing the crucible) is easy to clean manually by knocking the silicon material from the bottom holes. The cleaning method for this crucible is usually manual operation, such as using a tungsten-cobalt alloy hammer to knock it out manually. However, manual knocking has the following problems:

[0003] 1. The high-temperature crucible bottom material creates a bad working environment, which is prone to high-temperature burns on employees' arms. Therefore, employees need to wait for the crucible bottom material to cool to a certain temperature before knocking it out, which leads to a long waiting time and low efficiency.

[0004] 2. The high-hardness crucible bottom material is not easy to knock off, which increases the workload of employees;

[0005] 3. The knocking process is relatively violent, which causes great damage to the Brabon and is not conducive to the long-term use of the Brabon;

[0006] 4. During the knocking process, the silicon material splashes and easily causes harm to the operator.

[0007] Therefore, in order to quickly clean the crucible with holes at the bottom, we proposed a rapid cleaning device for single crystal furnace pier crucibles, which can effectively solve the problems existing in manual knocking out. Utility Model Content

[0008] In view of this, the purpose of the utility model is to propose a rapid cleaning device for single crystal furnace pier crucible material to solve the problem that the existing cleaning of the crucible bottom material in the crucible is usually manual knocking, the manual knocking efficiency is low, and the high temperature crucible bottom material is also easy to burn the arm of the knocker.

[0009] Based on the above purpose, the utility model provides a rapid cleaning device for single crystal furnace pier crucible, including a bottom plate, four I-beams are fixedly connected to the bottom plate, a fixing frame is fixedly connected to the top of the I-beam, a moving plate is slidably arranged in the groove between two adjacent I-beams, a driving machine is installed on the moving plate, and a clamping part is arranged between the output ends of the two driving machines, and the clamping part is used to clamp the crucible with holes at the bottom;

[0010] The fixed frame is provided with a pushing part. When the clamping part clamps the crucible, the driving machine can drive the crucible to rotate so that the hole on the bottom of the crucible is located directly below the pushing part. Then, under the push of the pushing part, the crucible material in the crucible can be pushed out.

[0011] Preferably, a carrier vehicle is further included, which is movably arranged on the bottom plate, the opening of the crucible is integrally formed with a skirt, and an annular groove is provided on the skirt, and a channel matching the inner diameter of the annular groove is provided on the carrier vehicle.

[0012] Preferably, a hydraulic cylinder 1 is fixedly connected between the fixed frame and the movable plate, and the hydraulic cylinder 1 can drive the movable plate to move up and down along the I-beam.

[0013] Preferably, the clamping portion includes a rotating plate fixedly connected to the output end of the driving machine, both ends of the rotating plate are hinged with arc plates through pins, and the two adjacent arc plates are detachably connected by bolts and nuts. When the crucible needs to be clamped, the two adjacent arc plates are fixed by bolts and nuts so that the crucible can be clamped in the arc plates.

[0014] Preferably, a plurality of anti-skid grooves are provided on the inner side of the arc-shaped plate, and the anti-skid grooves increase the roughness of the inner side of the arc-shaped plate.

[0015] Preferably, the pushing part comprises a second hydraulic cylinder fixedly connected to a fixed frame, an output end of the second hydraulic cylinder is fixedly connected to a pushing plate, and a radius of the pushing plate is smaller than an inner diameter of the hole at the bottom of the crucible.

[0016] The beneficial effects of the utility model: the utility model provides a rapid cleaning device for single crystal furnace pier crucible material, which clamps and fixes the crucible by a clamping part, and then the movable plate drives the fixed crucible to move to an appropriate height, and the driving machine drives the crucible to rotate, so that the hole on the bottom of the crucible is located directly below the pushing part, and finally, under the push of the pushing part, the pier crucible material in the crucible can be slowly pushed out, avoiding the need to wait for the crucible to cool down during manual knocking out, so as to avoid scalding the knocker by the high temperature of the crucible, and the possibility of splashing of the crucible bottom material during the knocking process to easily injure the staff, thereby improving the knocking out efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0018] Figure 1 It is a schematic diagram of the structure of an embodiment of the utility model;

[0019] Figure 2 It is a schematic diagram of the structure after the clamping part clamps the crucible in the embodiment of the utility model;

[0020] Figure 3 This is a schematic diagram of the structure of the driving machine and the clamping part of the embodiment of the utility model;

[0021] Figure 4 It is a schematic structural diagram of a carrier vehicle and a Canbang according to an embodiment of the utility model.

[0022] In the figure: 1. bottom plate; 2. I-beam; 3. fixed frame; 4. movable plate; 5. driving machine; 6. hydraulic cylinder 1; 7. clamping part; 71. rotating plate; 72. arc plate; 73. anti-skid groove; 8. crucible; 9. pushing part; 91. hydraulic cylinder 2; 92. pushing plate; 10. carrier vehicle; 11. skirt. DETAILED DESCRIPTION

[0023] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0024] It should be noted that, unless otherwise defined, the technical terms or scientific terms used in the embodiments of the present invention should be understood by people with ordinary skills in the field to which the present invention belongs. The "first", "second" and similar words used in the present invention do not indicate any order, quantity or importance, but are only used to distinguish different components. "Include" or "comprise" and similar words mean that the elements or objects appearing before the word cover the elements or objects listed after the word and their equivalents, without excluding other elements or objects. "Connect" or "connected" and similar words are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0025] like Figure 1 , Figure 2 , Figure 3 , Figure 4As shown, a rapid cleaning device for crucible material in a single crystal furnace pier can quickly clean a crucible 8 with holes at the bottom, the crucible 8 contains a crucible, and the crucible contains silicon material. The technical solution designed in the present application can quickly push the crucible bottom material (crucible and silicon material) in the crucible 8 out of the crucible 8, including a bottom plate 1, four I-beams 2 are fixedly connected to the bottom plate 1, a fixing frame 3 is fixedly connected to the top of the I-beam 2, a movable plate 4 is slidably arranged in the groove between two adjacent I-beams 2, a driving machine 5 is installed on the movable plate 4, the driving machine 5 is an integrated structure of an electric motor and a reducer, and the reduction gear is arranged to avoid the motor from rotating too fast when starting, and a clamping portion 7 is arranged between the output ends of the two driving machines 5, and the clamping portion 7 is used to clamp the crucible 8 with holes at the bottom.

[0026] A pushing portion 9 is provided on the fixed frame 3. When the clamping portion 7 clamps the crucible 8, the driving machine 5 can drive the crucible 8 to rotate so that the hole on the bottom of the crucible 8 is located directly below the pushing portion 9. Then, under the push of the pushing portion 9, the crucible material in the crucible 8 can be pushed out.

[0027] When it is necessary to clean the crucible material, that is, to clean the crucible bottom material in the crucible bond 8, the disassembled crucible bond 8 can be transported to the bottom plate 1 by an external transport trolley, and then the crucible bond 8 is clamped by the clamping part 7. Subsequently, the movable plate 4 drives the clamped crucible bond 8 to move upward, and then the external transport trolley is removed, and the driving machine 5 drives the crucible bond 8 to rotate, so that the hole at the bottom of the crucible bond 8 can be located directly below the pushing part 9. Under the slow push of the pushing part 9, the crucible bottom material adhered to the crucible bond 8 can be pushed out, avoiding manual knocking out and improving the cleaning efficiency.

[0028] In a preferred embodiment of the utility model, it also includes a carrier 10, which has a braking function. The carrier 10 is movably arranged on the base plate 1, and a skirt 11 is integrally formed at the opening of the crucible 8, and an annular groove is provided on the skirt 11, and a channel adapted to the inner diameter of the annular groove is provided on the carrier 10.

[0029] Since the skirt 11 of the opening of the crucible bond 8 is adapted to the hole on the carrier 10, after the crucible bond 8 is clamped and rotated, the carrier 10 can be moved to the bottom of the crucible bond 8, and then the crucible bond 8 is driven downward by the movable plate 4, so that the skirt 11 can be stuck in the hole on the carrier 10, so that when the pushing part 9 slowly pushes the crucible bottom material in the crucible bond 8, the carrier 10 supports the crucible bond 8, and at the same time, the crucible bottom material in the crucible bond 8 can be pushed down through the hole.

[0030] In another preferred embodiment of the utility model, a hydraulic cylinder 6 is fixedly connected between the fixed frame 3 and the movable plate 4, and the output end of the hydraulic cylinder 6 is connected to the fixed frame 3. The hydraulic cylinder 6 can drive the movable plate 4 to move up and down along the I-beam 2.

[0031] Starting the hydraulic cylinder 6 can push the movable plate 4 to move up and down, thereby pushing the crucible 8 clamped and fixed by the clamping part 7 to move up and down.

[0032] In another preferred embodiment of the utility model, the clamping portion 7 includes a rotating plate 71 fixedly connected to the output end of the driving machine 5, both ends of the rotating plate 71 are hinged with arc plates 72 through pins, and two adjacent arc plates 72 are detachably connected by bolts and nuts.

[0033] It should be noted that a plurality of anti-skid grooves 73 are provided on the inner side of the arc-shaped plate 72 , and the anti-skid grooves 73 increase the roughness of the inner side of the arc-shaped plate 72 .

[0034] The external transport trolley transports the crucible 8 that needs to be cleaned to the bottom plate 1, and then the hydraulic cylinder 6 pushes the moving plate 4 to move, so as to adjust the height position of the curved plate 72, and then the curved plate 72 is bent so that the inner wall of the curved plate 72 is close to the crucible 8, and then the two adjacent curved plates 72 are fixed by bolts and nuts, so that the crucible 8 can be fixed in the curved plate 72, and the anti-slip groove 73 opened in the curved plate 72 increases the friction between the curved plate 72 and the surface of the crucible 8, so that the clamping and fixing effect of the crucible 8 is better. After the crucible 8 is fixed, the hydraulic cylinder 6 drives the crucible 8 to move up, so as to facilitate the removal of the external transport trolley, and then the carrier 10 is placed directly under the crucible 8, and then the hydraulic cylinder 6 places the crucible 8 on the carrier 10, and the skirt 11 can be stuck in the channel on the carrier 10, so that the carrier 10 can support the crucible 8.

[0035] It should be noted that the pushing part 9 includes a hydraulic cylinder 91 fixedly connected to the fixed frame 3, and the output end of the hydraulic cylinder 91 is fixedly connected to a pushing plate 92. The bottom of the pushing plate 92 can be provided with a high-temperature resistant and flame-retardant cushion layer. When the pushing plate 92 slowly pushes the bottom material of the crucible, the cushion layer can play a buffering role. The cushion layer can be a PEEK plate made of a high-temperature resistant and non-flammable plastic material, and the radius of the pushing plate 92 is smaller than the inner diameter of the bottom hole of the crucible 8.

[0036] When the hole on the bottom of the crucible 8 is located directly below the pushing plate 92, the hydraulic cylinder 91 drives the pushing plate 92 to move downward slowly. During the slow downward movement of the pushing plate 92, the bottom material in the crucible 8 can be slowly pushed out, thereby improving the cleaning speed of the crucible 8 and avoiding manual cleaning, which also requires waiting for the crucible 8 to cool down.

[0037] A person skilled in the art should understand that the discussion of any of the above embodiments is merely illustrative and is not intended to imply that the scope of the present invention is limited to these examples. Under the concept of the present invention, the technical features in the above embodiments or different embodiments may be combined, the steps may be implemented in any order, and there are many other variations of the different aspects of the present invention as described above, which are not provided in detail for the sake of simplicity.

[0038] The embodiments of the present invention are intended to cover all such substitutions, modifications and variations that fall within the broad scope of the appended claims. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A rapid cleaning device for single crystal furnace crucible material, comprising a bottom plate (1), four I-beams (2) are fixedly connected to the bottom plate (1), and a fixing frame (3) is fixedly connected to the top of the I-beam (2), characterized in that: A movable plate (4) is slidably arranged in the groove between two adjacent I-beams (2), a driving machine (5) is installed on the movable plate (4), a clamping portion (7) is arranged between the output ends of the two driving machines (5), and the clamping portion (7) is used to clamp a crucible (8) having a hole at the bottom; The fixed frame (3) is provided with a pushing portion (9). When the clamping portion (7) clamps the crucible (8), the driving machine (5) can drive the crucible (8) to rotate so that the hole on the bottom of the crucible (8) is located directly below the pushing portion (9). Then, under the push of the pushing portion (9), the crucible material in the crucible (8) can be pushed out.

2. The rapid cleaning device for single crystal furnace crucible material according to claim 1, characterized in that: It also includes a carrier vehicle (10), which is movably arranged on the bottom plate (1), and the opening of the crucible (8) is integrally formed with a skirt (11), and an annular groove is provided on the skirt (11), and a channel matching the inner diameter of the annular groove is provided on the carrier vehicle (10).

3. The rapid cleaning device for single crystal furnace crucible according to claim 1, characterized in that: A hydraulic cylinder (6) is fixedly connected between the fixed frame (3) and the movable plate (4), and the hydraulic cylinder (6) can drive the movable plate (4) to move up and down along the I-beam (2).

4. The rapid cleaning device for single crystal furnace crucible material according to claim 1, characterized in that: The clamping portion (7) comprises a rotating plate (71) fixedly connected to the output end of the driving machine (5), and both ends of the rotating plate (71) are hinged with arc plates (72) through pins, and two adjacent arc plates (72) are detachably connected through bolts and nuts. When it is necessary to clamp the crucible (8), the two adjacent arc plates (72) are fixed by bolts and nuts so that the crucible (8) can be clamped in the arc plates (72).

5. The rapid cleaning device for single crystal furnace crucible material according to claim 4, characterized in that: A plurality of anti-skid grooves (73) are provided on the inner side of the arc-shaped plate (72), and the anti-skid grooves (73) increase the roughness of the inner side of the arc-shaped plate (72).

6. The rapid cleaning device for single crystal furnace crucible according to claim 1, characterized in that: The pushing part (9) comprises a second hydraulic cylinder (91) fixedly connected to a fixed frame (3); an output end of the second hydraulic cylinder (91) is fixedly connected to a pushing plate (92), and a radius of the pushing plate (92) is smaller than an inner diameter of a hole at the bottom of the crucible (8).

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