Spectral confocal measurement device

Abstract

The utility model belongs to the field of spectrum confocal measurement, and particularly discloses a spectrum confocal measurement device which comprises an area array illumination assembly, a light splitting element, a dispersion objective lens assembly and a multi-CCD area array imaging assembly. The light splitting element transmits the surface incident light output by the area array illumination assembly to the dispersion objective lens assembly; the dispersion objective lens assembly disperses and unfolds light with different wavelengths in a plurality of wavebands in transmitted incident light, so that the light with different wavelengths is focused at different heights of an object to be measured at the same time, and reflected light with at least one waveband reflected by the surface of the object to be measured is received and emitted to the light splitting element; the light splitting element reflects the reflected light to the multi-CCD area array imaging assembly; the multi-CCD area array imaging assembly comprises a plurality of light splitting assemblies and a plurality of imaging assemblies, the plurality of light splitting assemblies divide reflected light into multiple paths of wave band light in different wavelength ranges, and the plurality of imaging assemblies receive the multiple paths of wave band light and carry out imaging. According to the utility model, wide-range, high-efficiency and high-precision detection can be realized.

Description

Technical Field

[0001] The utility model belongs to the field of three-dimensional spectral confocal measurement, and more specifically relates to a spectral confocal measurement device. Background Art

[0002] In the field of semiconductor device manufacturing technology, as semiconductor devices develop towards larger sizes and thinner thicknesses, the requirements for measurement accuracy and speed are becoming increasingly higher. In traditional contact measurement methods, the probe needs to contact the surface of the object being measured. This method may cause damage to the surface being measured in actual operation, affecting product quality. Therefore, non-contact measurement technology has become an effective alternative. In the field of optical measurement technology, confocal measurement technology is an important non-contact measurement technology that has three-dimensional tomography capabilities and can obtain detailed information on the surface of the object being measured. However, traditional single-point confocal measurement technology has problems with low detection efficiency and slow detection speed during axial scanning.

[0003] Based on the confocal measurement technology, the confocal line scanning technology came into being. The confocal line scanning technology is an extension of the confocal point scanning technology. It can simultaneously obtain information on a row or a column of the surface of the measured object, thereby greatly improving the detection efficiency. With the rapid development of machine vision technology, industrial users have increasingly stringent requirements for product quality inspection. Although the line confocal measurement technology has been improved compared to the point confocal measurement technology, it still has problems such as insufficient detection efficiency, limited detection range, and inconvenience in changing the detection range, which limits its application scope and cannot meet current detection needs. Utility Model Content

[0004] In view of the defects of the prior art, the purpose of the present utility model is to provide a spectral confocal measurement device, aiming to solve the problems of insufficient detection efficiency, limited detection range and inconvenient operation when adjusting the measurement range of the existing spectral confocal measurement device.

[0005] To achieve the above object, the utility model provides a spectral confocal measurement device, characterized in that it includes: a planar array illumination component, a beam splitter, a dispersion objective lens component, and a multi-photosensitive coupling component (Charge-coupled Device, CCD) planar array imaging component;

[0006] The area array illumination assembly, the beam splitting element and the dispersion objective lens assembly are coaxially arranged in sequence;

[0007] The beam splitter element is used to transmit the surface incident light output by the area array illumination assembly to the dispersion objective lens assembly;

[0008] The dispersion objective lens assembly is used to disperse light of different wavelengths in multiple bands in the transmitted incident light, so that the light of different wavelengths is simultaneously focused at different heights on the surface of the object to be measured; and is also used to receive a reflected light beam of at least one band reflected by the surface of the object to be measured, and emit the reflected light beam to the beam splitter element;

[0009] The beam splitter element is used to reflect the received reflected light beams of multiple wavelength bands to the multi-CCD area array imaging component;

[0010] The multi-CCD area array imaging component is arranged on the reflected light path of the splitter element, and includes multiple splitter components and multiple imaging components. The multiple splitter components are used to split the reflected light into multiple band lights of different wavelength ranges. The multiple imaging components are respectively arranged on the optical paths of the multiple band lights, and are used to receive the multiple band lights and perform imaging.

[0011] It should be noted that the utility model adopts a multi-CCD area array imaging component, which realizes spectral confocal measurement of surface incidence and surface reception through surface incidence and surface reception, further improving the detection efficiency of the object under test; and in combination with the multi-CCD area array imaging component, it can achieve wide-range and high-efficiency detection, so that the spectral confocal detection device has a wide application range and has a better application prospect.

[0012] Specifically, the multi-CCD area array imaging component can receive and detect target wavelengths of multiple bands separately, realize parallel detection of multiple bands of the object under test, and greatly improve the detection efficiency; each band can detect different height information of the object under test, so the use of a multi-array imaging component can broaden the detection range. When multiple bands can detect a certain height range, the detection accuracy of the height range is also improved.

[0013] Furthermore, the multi-CCD area array imaging component provided by the utility model has a structure that only includes multiple splitting components and multiple CCDs; it can be assembled arbitrarily, so the measurement range of the spectral confocal measurement device can be adjusted by flexibly replacing the filter components and the corresponding CCDs. It has good flexibility and adaptability, and can easily change the measurement range without complex adjustments, thereby meeting the measurement needs of objects of different sizes and shapes, thereby expanding its application range.

[0014] In some embodiments, the multiple spectroscopic components are three spectroscopic components, the first spectroscopic component allows light with a first wavelength range to be transmitted to the first imaging component, and the remaining light is reflected to the second spectroscopic component, the second spectroscopic component allows light with a second wavelength range to be transmitted to the second imaging component, and the remaining light is reflected to the third spectroscopic component, and the third spectroscopic component allows light with a third wavelength range to pass through.

[0015] In some embodiments, the plurality of spectroscopic components are at least four spectroscopic components, and the at least four spectroscopic components are used to split the reflected light into at least four bands of light in different wavelength ranges, and allow the bands of light in different wavelength ranges to be emitted into corresponding imaging components for imaging.

[0016] In some embodiments, the CCD area array imaging component is a grayscale sensor.

[0017] It is understandable that the multi-CCD area array imaging component includes multiple CCD area array imaging components; the imaging component used in each CCD area array imaging component is a CCD. The above description of the CCD area array imaging component as a grayscale sensor means that the CCD used in the multi-CCD area array imaging component is a grayscale sensor.

[0018] In some embodiments, the spectral confocal measurement device further includes: a pinhole mask array plate;

[0019] The pinhole mask array plate is provided with a plurality of rows and columns of pinholes arranged at intervals, which are arranged one-to-one corresponding to the different heights. The outgoing light of each wavelength reflected by the height is focused to the corresponding pinhole of the pinhole mask array plate and emitted from the corresponding pinhole.

[0020] In some embodiments, the pinhole mask array plate is disposed between the spectroscopic element and the dispersive objective lens assembly; or the pinhole mask array plate includes two, the first pinhole mask array plate is disposed between the area array illumination assembly and the spectroscopic element, and the second pinhole mask array plate is disposed between the spectroscopic element and the imaging assembly.

[0021] In general, the above technical solution conceived by the utility model has the following beneficial effects compared with the prior art:

[0022] The utility model provides a spectral confocal measuring device, which adopts a multi-CCD area array imaging component, can realize surface reception detection of a measured object, and realizes spectral confocal measurement of a surface incidence-surface reception mode through surface incidence and surface reception, thereby further improving the detection efficiency of the measured object; the multi-CCD area array imaging component can respectively receive and detect target wavelengths of three bands, thereby realizing parallel detection of multiple bands of the measured object; compared with the point-type spectral confocal measuring device of the prior art, only a height corresponding to the light intensity currently measured can be obtained at a certain moment, thereby greatly improving the detection efficiency; by controlling the spectroscopic imaging component of the multi-CCD, the waveband allowed to be received by each CCD can be adjusted, thereby easily changing the measurement range, meeting the measurement requirements of measured objects of different sizes and shapes, and having good flexibility and adaptability.

[0023] The utility model provides a spectral confocal measurement device, which adopts a multi-CCD array imaging component to broaden the detection range. When multiple bands can detect a certain height range, since the corresponding height information corresponds to the intensity of multiple target wavelengths, the detection accuracy of the height range is also improved. Therefore, the utility model can achieve wide range, high efficiency and high precision detection, so that the spectral confocal detection device has a wide application range and better application prospects.

[0024] The utility model provides a spectral confocal measuring device, whose multi-CCD area array imaging component structure only includes multiple lenses, multiple filter components and multiple CCDs; the multi-CCD area array imaging components can be assembled arbitrarily, so the filter components and the corresponding CCDs can be flexibly replaced, and the measuring range of the spectral confocal measuring device can be adjusted, which has good flexibility and adaptability; the measuring range can be easily replaced without complicated adjustment, so as to meet the measurement requirements of objects under test of different sizes and shapes, and expand its application range. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a structural diagram of a spectral confocal measurement device provided by an embodiment of the utility model;

[0026] Figure 2 This is a structural diagram of a multi-CCD area array imaging component provided by an embodiment of the utility model;

[0027] Figure 3 It is a schematic diagram of the relationship between the height of the object under test and the intensity of reflected light measured by the spectral confocal measurement device provided in an embodiment of the utility model;

[0028] In all the drawings, the same figure marks are used to represent the same elements or structures, wherein: 11 represents an illumination assembly; 12 represents a dispersion objective lens assembly; 13 represents a filtering assembly; 131 represents a spectroscopic element; 132 represents a pinhole mask array plate; 14 represents a multi-CCD array imaging assembly; 141 represents a first spectroscopic assembly, 142 represents a first imaging assembly, 143 represents a second spectroscopic assembly, 144 represents a second imaging assembly, 145 represents a third spectroscopic assembly, and 146 represents a third imaging assembly. DETAILED DESCRIPTION

[0029] In order to make the purpose, technical solution and advantages of the present application more clearly understood, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0030] Figure 1 is a structural diagram of a spectral confocal measurement device provided by an embodiment of the utility model; Figure 1As shown, it includes: a planar array illumination component 11, a dispersive objective lens component 12, a beam splitter element 131 and a multi-CCD planar array imaging component 14.

[0031] The beam splitter element 131 may be coaxially disposed between the area array illumination assembly 11 and the dispersion objective lens assembly 12. Specifically, the area array illumination assembly 11, the beam splitter element 131 and the dispersion objective lens assembly 12 are coaxially disposed in sequence.

[0032] The area array lighting assembly 11 is arranged above the object to be measured and can provide surface incident light to the object to be measured.

[0033] The beam splitter element 131 is used to transmit the incident light output by the area array illumination assembly 11 to the dispersion objective lens assembly 12. For example, the beam splitter element 131 is arranged obliquely relative to the incident light.

[0034] The dispersive objective lens assembly 12 is used to disperse light of different wavelengths in multiple bands in the transmitted incident light so that light of different wavelengths can be simultaneously focused at different heights on the surface of the object to be measured; it is also used to receive a reflected light beam of at least one band reflected by the surface of the object to be measured, and emit the reflected light beam to the spectroscopic element 131.

[0035] The beam splitter element 131 is used to reflect the received reflected light beams of multiple wavelength bands to the multi-CCD area array imaging component 14 .

[0036] The multi-CCD area array imaging component 14 is arranged on the reflected light path of the splitter element 131, and includes multiple splitter components and multiple imaging components. The multiple splitter components are used to split the reflected light into multiple band lights of different wavelength ranges. The multiple imaging components are respectively arranged on the optical paths of the multiple band lights, and are used to receive the multiple band lights and perform imaging.

[0037] For example, the multi-CCD area array imaging component can be a 3CCD area array imaging component, and the multiple spectroscopic components are three spectroscopic components. The first spectroscopic component allows light with a first wavelength range to be transmitted to the first imaging component, for example, the light in the first wavelength range is red light, and the remaining light is reflected to the second spectroscopic component. The second spectroscopic component allows light with a second wavelength range to be transmitted to the second imaging component, for example, the light in the second wavelength range is green light, and light with a third wavelength range is reflected and transmitted through the third spectroscopic component to the third imaging component, for example, the light in the third wavelength range is blue light. Preferably, the spectroscopic component is a prism coated with a film so that only light in a specific wavelength range is allowed to pass. In this way, through the 3CCD area array imaging component, multiple reflected lights with different wavelength bands can be received at the same time.

[0038] For example, the plurality of spectroscopic components may be at least four spectroscopic components, and the at least four spectroscopic components are used to split the reflected light into at least four wavelength band lights of different wavelength ranges, and allow the wavelength band lights of different wavelength ranges to be incident on corresponding imaging components for imaging.

[0039] In fact, through multiple spectroscopic components, the wavelengths within the measurement range can be divided into multiple different bands, and the width range of each band can be set as needed, so that the corresponding CCD is only allowed to receive light within the corresponding wavelength range. There is no limitation on the design of multiple CCDs here, as long as the band light of different wavelength ranges can be injected into the corresponding imaging component for imaging.

[0040] In another example, the CCD area array imaging component may be a grayscale sensor, thereby improving the resolution of imaging.

[0041] Optionally, the spectral confocal measurement device provided by the embodiment of the utility model may further include: a pinhole mask array 132; in one embodiment, the pinhole mask array 132 is arranged between the spectroscopic element 131 and the dispersive objective lens assembly 12, and a plurality of light-transmitting pinholes arranged at intervals are arranged on the pinhole mask array 132, and the incident light sequentially passes through the spectroscopic element 131 and the pinhole mask array 132 and then reaches the dispersive objective lens assembly 12.

[0042] Further optionally, a plurality of rows and columns of spaced-apart small holes are provided on the pinhole mask array plate 132, which correspond one-to-one to the different measurement points respectively, and the outgoing light of the target wavelength reflected by each measurement point is focused to the corresponding small hole of the pinhole mask array plate 132 and emitted from the corresponding small hole.

[0043] In some embodiments, when there are two pinhole mask array plates 132, the two pinhole mask array plates 132 can be respectively arranged between the lighting component 11 and the spectroscopic element 131 and between the spectroscopic element 131 and the spectroscopic imaging component 14. The incident light passes through the first pinhole mask array plate 132 and the spectroscopic element 131 in sequence and then reaches the dispersion objective lens component 12. The outgoing light passes through the dispersion objective lens component 12 and is reflected by the spectroscopic element 131 to the second pinhole mask array plate 132. The pinholes on the two pinhole mask array plates 132 correspond to each other one by one. The outgoing light of different wavelengths passes through the second pinhole mask array plate 132 and reaches the multi-CCD array imaging component 14.

[0044] In one embodiment, the spectroscopic element 131 can transmit the surface incident light output by the area array illumination component 11 to the dispersive objective lens component 12; the dispersive objective lens component 12 can disperse the light of different wavelengths in the surface incident light, focus the light of three bands of target wavelengths in the light of different wavelengths on the corresponding measurement points of the object to be measured, and receive the outgoing light of three bands of target wavelengths reflected by different measurement points; further, the spectroscopic element 131 can also reflect the outgoing light of three bands of target wavelengths received and output by the dispersive objective lens component 12 to the multi-CCD area array imaging component 14.

[0045] For example, the dispersive objective lens assembly 12 is coaxially arranged with the illumination assembly 11, and the incident light is parallel to the optical path of the outgoing light before being reflected by the beam splitter 131. In order to accurately receive the light reflected by each object point on the object to be measured, the blind area of ​​the visual field caused by the oblique input and output optical path solution is avoided.

[0046] For example, the multi-CCD area array imaging component 14 is arranged on the propagation path of the outgoing light rays containing three bands of target wavelengths reflected from the object to be measured, and can obtain the spectral confocal image of the three bands of target wavelengths of the object to be measured.

[0047] It can be understood that the present application realizes spectral confocal measurement of surface incidence and surface reception through surface incidence and surface reception, thereby further improving the detection efficiency of the object under test; and in conjunction with a multi-CCD area array imaging component, it can achieve wide-range and high-efficiency detection, making the spectral confocal detection device have a wide range of applications and better application prospects.

[0048] In a more specific embodiment, Figure 2 is a structural diagram of a multi-CCD array imaging assembly provided by an embodiment of the utility model, Figure 2 Take the 3CCD array imaging component as an example; Figure 2 As shown, it may include: a first light splitting component 141 , a first imaging component 142 , a second light splitting component 143 , a second imaging component 144 , a third light splitting component 145 and a third imaging component 146 .

[0049] The first imaging component 142, the second imaging component 144 and the third imaging component 146 are all implemented by CCD, which may be a grayscale sensor.

[0050] The outgoing light containing multiple bands of target wavelengths reflected from the object to be measured by the spectral confocal measurement device is incident from the first spectroscopic component 141. The first spectroscopic component 141 allows light with a first wavelength range to be transmitted to the first imaging component 142, and the first spectroscopic component 141 reflects the remaining light to the second spectroscopic component 143; the second spectroscopic component 143 allows light with a second wavelength range to be transmitted to the second imaging component 144, and the second optical component 143 reflects light with a third wavelength range and transmits it through the third spectroscopic component 145 to the third imaging component 146.

[0051] like Figure 2 As shown, the beam splitter can be implemented by coating a prism, adding a filter to the prism, or by other methods, so that each beam splitter only allows light within a specific wavelength range to pass through.

[0052] The multi-CCD array imaging component in this application can image target wavelengths of multiple bands separately. The emission directions of target wavelengths of multiple bands can be found in Figure 2 Indicated by the direction of the arrow.

[0053] Specifically, see Figure 2 Based on the principle of the present invention, the multi-CCD area array imaging component provided in the present application may also include more or fewer CCDs so as to be able to image reflected light of multiple bands at the same time.

[0054] It should be noted that those skilled in the art can design the specific structure of the multi-CCD array imaging component according to the actual emission band requirements, and can also adjust the position and design of some or all of the prisms, filter components and CCDs according to actual needs, and appropriately adjust the corresponding detection range to achieve and meet the spectral confocal measurement requirements. Therefore, the utility model does not impose any restrictions on the specific structure and parameters of the multi-CCD array imaging component.

[0055] It should be noted that, at a certain moment, the incident light of the target wavelength is focused on measurement points at different heights of the object under test through axial dispersion, and at different moments during the measurement of the object under test, the outgoing light passing through the same small hole is focused on the image plane coordinates corresponding to the target wavelength on the imaging plane through radial dispersion. Since the target wavelength corresponds to the height of the measurement point on the object under test, the height information of the measurement point can be obtained through the image plane coordinates and the imaging light intensity information.

[0056] Furthermore, the above-mentioned multi-CCD area array imaging component can respectively receive and detect target wavelengths of multiple bands, thereby realizing parallel detection of multiple bands of the object to be measured, and greatly improving the detection efficiency; each band can detect different height information of the object to be measured, so the use of a multi-CCD area array imaging component can broaden the detection range. When multiple bands can detect a certain height range, since the corresponding height information corresponds to the intensities of multiple target wavelengths, the detection accuracy of the height range is also improved accordingly.

[0057] It should be noted that the dispersive objective lens assembly 12 is used to disperse the incident light, and the light of the target wavelength among the light of different wavelengths after dispersion is focused on the corresponding measurement point of the object to be measured, and the outgoing light of the target wavelength formed by reflection from the measurement point is received. In one example, the dispersive objective lens assembly 12 includes a plurality of lens combinations, and by controlling parameters such as the thickness of each lens and the distance between the lenses, it can expand the incident light of different wavelengths in the axial direction to obtain light of target wavelengths λ1, λ2 and λ3, and focus on the measurement points of the height h1, height h2 and height h3 of the small ball of the object to be measured, respectively, and form the outgoing light of the target wavelength after reflection from the small ball of the object to be measured and return to the dispersive objective lens assembly 12.

[0058] It can be understood that the outgoing light with wavelengths of λ1, λ2 and λ3 carries the position information of the object to be measured, and the outgoing light passes through the dispersion objective lens assembly 12 and is focused to the plane where the pinhole mask array plate 132 is located. Further, the outgoing light with different wavelengths can only be converged to a sufficiently small size in the corresponding pinholes on the pinhole mask array plate 132. For example, the outgoing light with wavelength λ1 is focused on the pinhole x1ˋ, and the outgoing light with wavelengths λ2 and λ3 is focused on the pinholes x2ˋ and x3ˋ, respectively. For different pinholes, the light with non-target wavelengths will become more and more divergent as the wavelength deviates from the target wavelength, and therefore will be blocked and filtered out by the pinhole mask array plate 132. In this way, the design of the pinhole mask array plate 132 and the dispersion objective lens assembly 13 can filter out non-target color light at the same point and only pass the desired wavelength, thereby greatly improving the longitudinal signal-to-noise ratio. At the same time, due to the spacing of the pinholes, the detection information between adjacent object points will not interfere with each other, thereby improving the lateral signal-to-noise ratio and improving the accuracy of the system measurement.

[0059] The outgoing light passing through the pinhole mask array plate 132 is reflected to the multi-CCD area array imaging component 14 via the beam splitter element 131 .

[0060] Optionally, the shapes of the holes on the hole mask array plate 131 may include: circle, triangle and parallelogram, and the arrangement thereof may be regular uniform spacing or irregular arrangement, such as gradually increasing or decreasing spacing.

[0061] Those skilled in the art will appreciate that, in other embodiments of the present invention, the small holes on the small hole mask array plate 131 may also be of other shapes and arrangements, and by controlling parameters such as the spacing and diameter between the small holes, it can be used to filter the light of the target wavelength reflected by the target object point, and the present invention is not limited to this.

[0062] In a specific embodiment, the incident light that can be provided by the above-mentioned area array lighting assembly 11 includes: multi-band light source combination light, white light or monochromatic light of a preset band.

[0063] It can be understood by those skilled in the art that, since the multi-CCD area array imaging component 14 is used in the present invention to image the outgoing light and obtain the height information of the surface of the object to be measured, and the multi-CCD area array imaging component receives the outgoing light in a surface receiving manner. The multi-CCD area array imaging component is used in the present invention to reflect the reflected light of three bands to different directions to converge the reflected light of multiple bands for imaging, so as to realize the parallel detection of multiple bands of the object to be measured. Since the information of the surface of the object to be measured that a single band can carry is limited, the present invention can greatly improve the detection efficiency of the object to be measured through the multi-CCD area array imaging component; further, when the height detection ranges of multiple bands overlap, the corresponding height value can be determined in combination with the height information detected by multiple bands, so as to further improve the detection accuracy of the spectral confocal detection device.

[0064] In addition, the area array lighting component 11 projects the measuring light onto the surface of the object to be measured by means of surface incidence, and can simultaneously obtain information about the surface of the object to be measured. Then, the reflected light from the surface of the object to be measured is received and imaged by the multi-CCD area array imaging component 14, thereby further improving the detection efficiency of the object to be measured.

[0065] Figure 3 Schematic diagram of the relationship between the height of the object under test and the intensity of the reflected light measured by the spectral confocal measurement device provided in the embodiment of the utility model; taking the 3CCD area array imaging component as an example, Figure 3 As shown in the figure, the three curves are three light intensity and height curves obtained by measuring each CCD in the 3CCD array imaging component. Taking CCD1 as an example, CCD1 receives light with a wavelength range of λ1. When the light with a wavelength range of λ1 is focused on the surface of the object to be measured, the light will enter CCD1 for imaging after being reflected by the surface of the object to be measured and the spectroscopic element 13. When the light with a wavelength range of λ1 is focused at different heights on the surface of the object to be measured, the light intensity obtained is different. In this way, the light intensity and height curve of CCD1 can be fitted. Similarly, the light intensity and height curves of CCD2 and CCD3 can be fitted.

[0066] It can be understood that the measurement range of the spectral confocal measurement device can be adjusted by changing the spectroscopic component of the multi-CCD area array imaging component, for example, by adjusting the coating to adjust the wavelength band of light allowed to be received by the CCD, thereby adjusting the measurement range to meet the measurement requirements of objects of different sizes and shapes, and has good flexibility and adaptability.

[0067] When using the spectral confocal detection device provided by the utility model for detection, the relationship curves between the light intensity and the height of the three bands can be calibrated first. The calibration process can be: using the detection device provided by the utility model to detect the object to be measured with a known surface height, and determining the relationship curve between the light intensity and the height of each band. The above calibration process is simple and easy, without the need for complex calculations and adjustments, which greatly simplifies the measurement process and improves work efficiency.

[0068] Furthermore, a calibration table containing the light intensity and height information of the reflected light of the three bands is obtained through calibration. Later, during actual detection, the light intensity information obtained by the multi-CCD array imaging component is used to obtain the height information of each point on the surface of the object being measured through a table lookup method. Specifically, for the height range that can be repeatedly detected by multiple bands, the final average height value can be determined by comparing the height information determined by multiple bands, thereby improving the detection accuracy, avoiding excessive detection errors of a single band, and improving the detection accuracy.

[0069] It should be understood that expressions such as "include" and "may include" that can be used in the present invention indicate the existence of the disclosed functions, operations or constituent elements, and do not limit one or more additional functions, operations and constituent elements. In the present invention, terms such as "include" and / or "have" can be interpreted as indicating specific characteristics, numbers, operations, constituent elements, components or combinations thereof, but cannot be interpreted as excluding the existence or possibility of adding one or more other characteristics, numbers, operations, constituent elements, components or combinations thereof.

[0070] In addition, in the present invention, the expression "and / or" includes any and all combinations of the associated listed words. For example, the expression "A and / or B" may include A, may include B, or may include both A and B.

[0071] In the description of the embodiments of the present utility model, it should be noted that, unless otherwise clearly specified and limited, the term "connection" should be understood in a broad sense. For example, "connection" can be a detachable connection or a non-detachable connection; it can be a direct connection or an indirect connection through an intermediate medium. Among them, "fixed connection" means that the relative position relationship after connection remains unchanged. "Rotational connection" means that the connection is made to each other and can rotate relative to each other after connection. "Sliding connection" means that the connection is made to each other and can slide relative to each other after connection. The orientation terms mentioned in the embodiments of the present utility model, such as "top", "bottom", "inside", "outside", "left", "right", etc., are only reference to the directions of the accompanying drawings. Therefore, the orientation terms used are for better and clearer explanation and understanding of the embodiments of the present utility model, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the embodiments of the present utility model.

[0072] In addition, in the embodiments of the present utility model, the mathematical concepts mentioned are symmetry, equality, parallelism, verticality, etc. These limitations are all for the current technological level, rather than an absolutely strict definition in the mathematical sense, and a small amount of deviation is allowed, and approximate symmetry, approximate equality, approximate parallelism, approximate verticality, etc. are all acceptable. For example, A and B are parallel, which means that A and B are parallel or approximately parallel, and the angle between A and B can be between 0 degrees and 10 degrees. A and B are perpendicular, which means that A and B are perpendicular or approximately perpendicular, and the angle between A and B can be between 80 degrees and 100 degrees.

[0073] The above is only a specific implementation of the utility model, but the protection scope of the utility model is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed by the utility model, which should be included in the protection scope of the utility model. Therefore, the protection scope of the utility model should be based on the protection scope of the claims.

Claims

1. A spectral confocal measurement device, characterized in that: include: Area array illumination components, beam splitting elements, dispersion objective lens components, and multi-CCD area array imaging components; The area array illumination assembly, the beam splitting element and the dispersion objective lens assembly are coaxially arranged in sequence; The beam splitter element is used to transmit the surface incident light output by the area array illumination assembly to the dispersion objective lens assembly; The dispersion objective lens assembly is used to disperse light of different wavelengths in multiple bands in the transmitted incident light, so that the light of different wavelengths is simultaneously focused at different heights on the surface of the object to be measured; and is also used to receive a reflected light beam of at least one band reflected by the surface of the object to be measured, and emit the reflected light beam to the beam splitter element; The beam splitter element is used to reflect the received reflected light beams of multiple wavelength bands to the multi-CCD area array imaging component; The multi-CCD area array imaging component is arranged on the reflected light path of the splitter element, and includes multiple splitter components and multiple imaging components. The multiple splitter components are used to split the reflected light into multiple band lights of different wavelength ranges. The multiple imaging components are respectively arranged on the optical paths of the multiple band lights, and are used to receive the multiple band lights and perform imaging.

2. The device according to claim 1, characterized in that The multiple spectroscopic components are three spectroscopic components. The first spectroscopic component allows light with a first wavelength range to be transmitted to the first imaging component, and the remaining light is reflected to the second spectroscopic component. The second spectroscopic component allows light with a second wavelength range to be transmitted to the second imaging component, and the remaining light is reflected to the third spectroscopic component. The third spectroscopic component allows light with a third wavelength range to pass through.

3. The device according to claim 1, characterized in that The multiple spectroscopic components are at least four spectroscopic components, and the at least four spectroscopic components are used to split the reflected light into at least four bands of light in different wavelength ranges, and allow the bands of light in different wavelength ranges to be emitted to the corresponding imaging components for imaging.

4. The device according to claim 1, characterized in that The CCD area array imaging component is a grayscale sensor.

5. The device according to any one of claims 1 to 4, characterized in that: Also includes: A pinhole mask array plate; The pinhole mask array plate is provided with a plurality of rows and columns of pinholes arranged at intervals, which are arranged one-to-one corresponding to the different heights. The outgoing light of each wavelength reflected by the height is focused to the corresponding pinhole of the pinhole mask array plate and emitted from the corresponding pinhole.

6. The device according to claim 5, characterized in that The pinhole mask array plate is arranged between the spectroscopic element and the dispersive objective lens assembly; or the pinhole mask array plate includes two, the first pinhole mask array plate is arranged between the area array illumination assembly and the spectroscopic element, and the second pinhole mask array plate is arranged between the spectroscopic element and the imaging assembly.

Images