Microscope rotating tray device

Abstract

The utility model discloses a microscope rotating tray device, which relates to the technical field of wafer detection and comprises an objective table, a base and an air guide column. A vacuum cavity is formed in the objective table; a plurality of adsorption holes communicated with the vacuum cavity are formed in the top surface of the objective table; the air guide column is perpendicular to the objective table, and the top of the air guide column is rotationally connected with the bottom of the objective table through a rotary joint; an air guide channel in the air guide column is connected and communicated with the vacuum cavity through a rotary joint; the air guide column is rotationally connected with the base, and the rotating center line of the air guide column is perpendicular to the rotating center line of the objective table. The objective table can realize transverse rotation adjustment and vertical rotation adjustment so as to adjust the inclined state; adjustment is simple, convenient and flexible, inspection time can be saved, and inspection efficiency is improved.

Description

Technical Field

[0001] This application relates to the technical field of wafer inspection, and particularly to a microscope rotating tray device. Background Art

[0002] After the wafer is ground, the processing conditions of the wafer edge are usually inspected. The traditional inspection method is direct inspection by the human eye, and many defects cannot be effectively inspected by this method. To ensure the inspection accuracy, a microscope device is usually used for inspection at present. The wafer to be inspected is fixed on a tray. However, the existing trays are mostly adjusted horizontally, so that the microscope can only observe a certain area of the wafer horizontally or vertically. When rotation observation is required, it is difficult to achieve, which is time-consuming and laborious, resulting in some defects that cannot be well inspected and the applicability is poor. Summary of the Utility Model

[0003] In view of this, the purpose of this application is to provide a microscope rotating tray device to solve the technical problems that the existing tray has a single adjustable method, cannot be flexibly adjusted, resulting in time-consuming and laborious inspection in some scenarios and poor applicability.

[0004] To achieve the above technical purpose, this application provides a microscope rotating tray device, including a stage, a base and a gas guide column;

[0005] A vacuum chamber is provided inside the stage;

[0006] A number of adsorption holes communicating with the vacuum chamber are provided on the top surface of the stage;

[0007] The gas guide column is perpendicular to the stage, and its top is rotatably connected to the bottom of the stage through a rotary joint;

[0008] The gas guide channel in the gas guide column is connected and communicated with the vacuum chamber through the rotary joint;

[0009] The gas guide column is rotatably connected to the base, and its rotation center line is perpendicular to the rotation center line of the stage.

[0010] Further, a vertical column is vertically installed on the base;

[0011] The gas guide column is rotatably connected to the vertical column.

[0012] Further, a through groove in a shape similar to a U shape that penetrates the vertical column is provided on the outer peripheral surface of the vertical column;

[0013] The top end of the through groove penetrates the top end of the vertical column;

[0014] At least one side wall surface of the through groove is provided with a through hole that penetrates the vertical column;

[0015] A connecting rod member is installed in the through hole;

[0016] On the side surface of the column section of the air guide column extending into the through groove, there is a connection groove for the corresponding insertion of the connecting rod member, so that the air guide column rotates around the connecting rod member.

[0017] Further, through holes penetrating through the column are provided on both side wall surfaces of the through groove.

[0018] Further, the through hole is a threaded hole;

[0019] The connecting rod member is a threaded rod member, and one end of it extending into the connection groove can contact and abut against the end wall of the connection groove.

[0020] Further, the connecting rod member is a bolt, and its threaded rod section extends into the through groove movably.

[0021] Further, it further includes an identification platform;

[0022] The loading platform is fixed at the central position on the top of the identification platform;

[0023] An avoidance hole for avoiding the rotary joint is provided on the identification platform;

[0024] An identification line is provided on the part of the identification platform outside the loading platform.

[0025] Further, the identification line is a closed line arranged circumferentially around the loading platform;

[0026] There are multiple identification lines, and they are arranged in an annular array along the outer edge of the loading platform towards the outer edge of the identification platform.

[0027] Further, it further includes an adjusting member;

[0028] The adjusting member is connected to the loading platform and is used to drive the loading platform to rotate.

[0029] Further, the adjusting member is a ring sleeve structure;

[0030] The adjusting member is sleeved on the part of the rotary joint connected to the loading platform.

[0031] It can be seen from the above technical solutions that the microscope rotary tray device designed in this application has the following beneficial effects:

[0032] The loading platform is connected to the air guide column through the rotary joint, and can realize horizontal rotation adjustment; at the same time, through the rotational cooperation between the air guide column and the base, vertical rotation adjustment can be realized to adjust the inclination state; the adjustment is simple, convenient and flexible, which can save inspection time and improve inspection efficiency. Description of the Drawings

[0033] To more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the accompanying drawings required for the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other accompanying drawings can also be obtained based on these drawings.

[0034] Figure 1 It is the first three-dimensional view of the microscope rotating tray device provided in the present application;

[0035] Figure 2 It is the second three-dimensional view of the microscope rotating tray device provided in the present application;

[0036] In the figure: 1, stage; 11, adsorption hole; 2, air guide column; 21, air guide channel; 22, rotary joint; 3, base; 4, column; 41, through groove; 5, identification table; 51, identification line; 52, avoidance hole; 6, connecting rod member; 7, adjusting member. Detailed implementation manners

[0037] The following will clearly and completely describe the technical solutions of the embodiments of the present application in conjunction with the accompanying drawings. Obviously, the described embodiments are some embodiments of the embodiments of the present application, rather than all embodiments. Based on the embodiments in the embodiments of the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts belong to the scope protected by the embodiments of the present application.

[0038] In the description of the embodiments of the present application, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the accompanying drawings. It is only for the convenience of describing the embodiments of the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation to the embodiments of the present application. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0039] In the description of the embodiments of the present application, it should be noted that unless otherwise clearly specified and limited, the terms "installation", "connection", "connection" should be understood in a broad sense. For example, it can be a fixed connection, a replaceable connection, or an integral connection. It can be a mechanical connection or an electrical connection. It can be directly connected or indirectly connected through an intermediate medium. It can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the embodiments of the present application can be understood according to specific situations.

[0040] The embodiment of the present application discloses a microscope rotating tray device.

[0041] Please refer to Figure 1 and Figure 2 , an embodiment of the microscope rotating tray device provided in the embodiment of the present application includes:

[0042] A stage 1, a base 3, and a gas guide column 2.

[0043] The stage 1 has an existing vacuum plate structure with a vacuum chamber inside. There are several adsorption holes 11 on the top surface of the stage 1 that communicate with the vacuum chamber, and the wafer is fixed by means of vacuum adsorption.

[0044] The gas guide column 2 is perpendicular to the stage 1, and its top is rotationally connected to the bottom of the stage 1 through a rotary joint 22; the gas guide channel 21 inside the gas guide column 2 is connected and conducted with the vacuum chamber through the rotary joint 22; one end of the gas guide channel 21 extends to the top surface of the gas guide column 2 to form an air inlet, and the other end can extend out of the gas guide column 2 to facilitate the connection of a vacuum pumping device; the rotary joint 22 in the present application can be an existing single-channel starting rotary joint 22, ensuring rotational connection with each other without affecting gas conduction.

[0045] The gas guide column 2 is rotationally connected to the base 3, and its rotation center line is perpendicular to the rotation center line of the stage 1, so that the gas guide column 2 can rotate vertically to adjust the tilt angle of the stage 1. In the present application, the stage 1 is configured to be able to rotate horizontally 360° relative to the gas guide column 2, and the gas guide column 2 is configured to be able to rotate vertically 180° relative to the base 3. Those skilled in the art can design the change of the rotation angle range according to actual needs without limitation.

[0046] The stage 1 is connected to the gas guide column 2 through the rotary joint 22, and can realize horizontal rotation adjustment; at the same time, through the rotational cooperation between the gas guide column 2 and the base 3, vertical rotation adjustment can be realized to adjust the tilt state; the adjustment is simple, convenient and flexible, which can save inspection time and improve inspection efficiency.

[0047] The above is Embodiment 1 of the microscope rotating tray device provided in the embodiment of the present application. The following is Embodiment 2 of the microscope rotating tray device provided in the embodiment of the present application. Please specifically refer to Figures 1 to 2 .

[0048] Based on the solution of the above Embodiment 1:

[0049] Furthermore, a column 4 is vertically installed on the base 3, and the gas guide column 2 is rotationally connected to the column 4. By providing the column 4 to be connected to the gas guide column 2, it is more convenient to connect and cooperate with the gas guide column 2 to realize the vertical rotation adjustment of the gas guide column 2, and further adjust the tilt angle of the stage 1.

[0050] Furthermore, a through groove 41 that penetrates the column 4 and is U-shaped is provided on the outer peripheral surface of the column 4, and the top end of the through groove 41 penetrates the top end of the column 4.

[0051] At least one side wall surface of the through groove 41 is provided with a through hole (not shown in the figure) that penetrates the column 4, and a connecting rod member 6 is installed in the through hole.

[0052] A connecting groove (not shown in the figure) for the corresponding insertion of the connecting rod member 6 is provided on the side surface of the column section of the air guide column 2 extending into the through groove 41, so that the air guide column 2 can rotate around the connecting rod member 6.

[0053] Furthermore, for a more stable rotation connection setting, through holes that penetrate the column 4 are provided on both side wall surfaces of the through groove 41, two connecting rod members 6 are correspondingly provided, and two connecting grooves for one end of the connecting rod member 6 to extend into are provided on the air guide column 2 in one-to-one correspondence.

[0054] Furthermore, the through hole can be designed as a threaded hole. Taking this as an example, the connecting rod member 6 is designed as a threaded rod member, and one end of it extending into the connecting groove can be in contact with and abutted against the end wall of the connecting groove. By rotating the connecting rod member 6, the contact force between one end of it and the connecting groove can be adjusted, thereby controlling the rotational connection damping between the air guide column 2 and the column 4, so as to adapt to different rotational adjustment requirements, and the air guide column 2 after rotational adjustment can also be locked, and thus there is no need for manual dragging, making it more convenient to use; of course, a rotating motor can also be added to achieve electric rotation control, and those skilled in the art can make variations according to needs without limitation.

[0055] Furthermore, the connecting rod member 6 can specifically be a bolt, and its threaded rod section extends into the through groove 41 movably.

[0056] Furthermore, a marking table 5 is also included.

[0057] The carrier table 1 is fixed at the central position on the top of the marking table 5. The marking table 5 is provided with an avoidance hole 52 for avoiding the rotary joint 22. A marking line 51 is provided on the part of the marking table 5 outside the carrier table 1 for observing the placement position of the object to be marked, and its designed and adapted size can be 1 to 8 inches. By providing the marking table 5 with the marking line 51, the wafer can be placed accurately, improving the efficiency.

[0058] Furthermore, the marking table 5 can be sleeved outside the carrier table 1 and is in damping connection with the carrier table 1. When subjected to an external force, it can move along the rotation center line direction of the carrier table 1, that is, it can move up and down relative to the carrier table 1; when used for marking alignment, it rises to the required height for better observing the object alignment; after the marking alignment is completed, it moves down a certain height to reset.

[0059] Further, the identification line 51 is a closed line arranged around the circumference of the stage 1; there are multiple identification lines 51, and they are arranged in a circular array along the outer edge of the stage 1 towards the outer edge of the identification table 5. Each closed line corresponds to a wafer of a specific size. In this application, the stage 1 can be circular, and the identification table 5 can be annular. The closed line is circular, and it can be adaptively designed according to the shape of the object to be inspected without limitation.

[0060] Further, it further includes an adjusting member 7. The adjusting member 7 is connected to the stage 1 and is used to drive the stage 1 to rotate.

[0061] Further, the adjusting member 7 can specifically be a ring sleeve structure. The adjusting member 7 is sleeved and fixed on the part of the rotary joint 22 connected to the stage 1. By rotating the adjusting member 7, the stage 1 can be driven to rotate, improving the convenience of use.

[0062] Usage process:

[0063] (1) Place the entire device on the microscope observation table;

[0064] (2) Connect the air guide channel 21 to the vacuum device and keep the vacuum device in the closed state;

[0065] (3) Place the wafer to be observed on the circular stage 1 and place it according to the marked identification line 51;

[0066] (4) After placing, turn on the vacuum device so that the stage 1 adsorbs the wafer and lower the identification table 5;

[0067] (5) Adjust the tilt state of the stage + identification table to facilitate the observation of the wafer on the stage;

[0068] (6) Adjust the microscope observation position, and then rotate the stage to perform a 360° edge inspection.

[0069] The above has introduced the microscope rotating tray device provided by this application in detail. For those of ordinary skill in the art, according to the idea of the embodiments of this application, there will be changes in the specific implementation manners and application scopes. In summary, the content of this specification should not be construed as a limitation to this application.

Claims

1. A microscope rotating tray device, characterized in that: It comprises a loading platform (1), a base (3) and an air guide column (2); The object carrier (1) is provided with a vacuum chamber; The top surface of the object carrier (1) is provided with a plurality of adsorption holes (11) connected to the vacuum chamber; The air guide column (2) is perpendicular to the object carrier (1), and the top of the air guide column is rotatably connected to the bottom of the object carrier (1) via a rotating joint (22); The air guide channel (21) in the air guide column (2) is connected to the vacuum chamber via the rotary joint (22); The air guide column (2) is rotatably connected to the base (3), and its rotation center line is perpendicular to the rotation center line of the object carrier (1).

2. The microscope rotating tray device according to claim 1, characterized in that: A column (4) is vertically mounted on the base (3); The air guide column (2) is rotatably connected to the upright column (4).

3. The microscope rotating tray device according to claim 2, characterized in that: A U-shaped through groove (41) penetrating the column (4) is provided on the outer peripheral surface of the column (4); The top end of the through slot (41) passes through the top end of the upright column (4); At least one side wall surface of the through groove (41) is provided with a through hole penetrating the column (4); A connecting rod (6) is installed in the through hole; A connecting groove for corresponding insertion of the connecting rod (6) is provided on the side surface of the column section of the air guide column (2) extending into the through groove (41), so that the air guide column (2) can rotate around the connecting rod (6).

4. The microscope rotating tray device according to claim 3, characterized in that: Both side wall surfaces of the through groove (41) are provided with through holes penetrating the upright column (4).

5. The microscope rotating tray device according to claim 3, characterized in that: The through hole is a threaded hole; The connecting rod (6) is a threaded rod, and one end of the connecting rod extending into the connecting groove can contact and abut against the end wall of the connecting groove.

6. The microscope rotating tray device according to claim 4, characterized in that: The connecting rod (6) is a bolt, and its threaded rod section movably extends into the through groove (41).

7. The microscope rotating tray device according to claim 1, characterized in that: Also includes a marking platform (5); The object carrier (1) is fixed at the top center of the marking platform (5); The marking platform (5) is provided with an avoidance hole (52) for avoiding the rotating joint (22); A portion of the marking platform (5) located outside the object carrier (1) is provided with a marking line (51).

8. The microscope rotating tray device according to claim 7, characterized in that: The identification line (51) is a closed line arranged around the circumference of the object carrier (1); There are a plurality of identification lines (51), which are arranged in a circular array along the outer edge of the object carrier (1) towards the outer edge of the identification platform (5).

9. The microscope rotating tray device according to claim 1, characterized in that: Also includes an adjustment member (7); The adjusting member (7) is connected to the object carrier (1) and is used to drive the object carrier (1) to rotate.

10. The microscope rotating tray device according to claim 9, characterized in that: The adjusting member (7) is a ring structure; The adjusting member (7) is sleeved and fixed on the portion of the rotary joint (22) connected to the loading platform (1).

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