Diffusion furnace device

Abstract

The utility model relates to a diffusion furnace device. The diffusion furnace device comprises an inner pipe body; the inner pipe body is sleeved with the outer pipe body; the flange piece is connected to the outer pipe body and the inner pipe body; the nozzle is inserted into the flange piece, one end of the nozzle is located outside the outer pipe body, and the other end of the nozzle is located in an inner cavity of the inner pipe body; the supporting assembly is connected to the flange piece and located at the bottom of the nozzle so as to support the nozzle. According to the diffusion furnace device, the supporting assembly is connected to the bottom of the nozzle so as to support the nozzle, the situation that the nozzle shakes in the operation process can be greatly reduced, and then the situation that friction is generated between the nozzle and the inner wall of the inner pipe body or the outer wall of the wafer boat is reduced; and the influence of particles generated by friction on the wafer processing effect is further greatly reduced.

Description

Technical Field

[0001] The present application relates to the field of semiconductor processing technology, and in particular to a diffusion furnace device. Background Art

[0002] In the field of semiconductor processing technology, the diffusion furnace is one of the more important equipment. The diffusion furnace is mainly used to dope semiconductor wafers under high temperature conditions, change and control the type, concentration and distribution of impurities in the semiconductor, and establish different electrical characteristic areas.

[0003] The nozzle of a diffusion furnace is used to deliver specialized gases into its interior. Currently, the nozzle is secured to the outside of the furnace with a latch. However, due to the nozzle's extended reach into the furnace cavity and the lack of other securing components, the nozzle is prone to movement during operation. This can cause friction with the furnace's interior walls or wafer boats, generating particles that can affect semiconductor processing. Utility Model Content

[0004] In view of this, embodiments of the present application provide a diffusion furnace device to solve at least one problem existing in the background technology.

[0005] In a first aspect, an embodiment of the present application provides a diffusion furnace device, comprising:

[0006] inner tube body;

[0007] An outer tube body, which is mounted on the inner tube body;

[0008] a flange connected to the outer tube and the inner tube;

[0009] a nozzle, inserted through the flange, with one end located outside the outer tube body and the other end located in the inner cavity of the inner tube body;

[0010] The supporting assembly is connected to the flange and is located at the bottom of the nozzle to support the nozzle.

[0011] In conjunction with the first aspect of the present application, in an optional embodiment, the support assembly includes:

[0012] a first support member, one end of which is connected to the bottom of the nozzle and the other end of which is connected to the flange member;

[0013] The first fastener is inserted into the first support member and the flange member so that the first support member is connected to the flange member.

[0014] In conjunction with the first aspect of the present application, in an optional embodiment, the support assembly further includes:

[0015] a second support member, one end of which is connected to the flange member and the other end of which is located below the bottom of the nozzle;

[0016] a second fastener, inserted into the second support member and the flange member, so that the second support member is connected to the flange member;

[0017] The adjusting member is inserted into the other end of the second supporting member and is used for adjusting the distance between the nozzle and the second supporting member.

[0018] In conjunction with the first aspect of the present application, in an optional embodiment, the adjusting member includes:

[0019] an adjusting rod, inserted into the second supporting member, with one end thereof abutting against the bottom of the nozzle;

[0020] An adjusting sleeve matches the adjusting rod and is located at the other end of the adjusting rod. The adjusting sleeve is rotated to adjust the distance between the nozzle and the second supporting member.

[0021] In conjunction with the first aspect of the present application, in an optional embodiment, the adjusting member further includes:

[0022] The third support member is in contact with the bottom of the nozzle and is connected between the adjustment rod and the nozzle. The shape of the third support member matches the outer shape of the nozzle.

[0023] In combination with the first aspect of the present application, in an optional embodiment, the nozzle has a connecting section and a deepening section, the connecting section is connected to the deepening section, the deepening section is located in the inner cavity of the inner tube body, the end of the connecting section is located outside the outer tube body, the connecting section and the deepening section form a first angle, and the contact position between the support assembly and the nozzle is located in the extension line direction of the deepening section.

[0024] In combination with the first aspect of the present application, in an optional embodiment, the first angle is a right angle.

[0025] In conjunction with the first aspect of the present application, in an optional embodiment, the diffusion furnace device further includes:

[0026] A limiting member is connected to the inner wall of the inner tube body and is used to limit the position of the nozzle relative to the inner tube body.

[0027] In combination with the first aspect of the present application, in an optional embodiment, the limiting member is provided with an arc-shaped structure that matches the shape of the inner wall of the inner tube, and is provided with a groove for clamping the nozzle.

[0028] In combination with the first aspect of the present application, in an optional embodiment, the limiting member is connected to the nozzle near its end position.

[0029] The diffusion furnace device provided in the embodiment of the present application uses a support assembly connected to the bottom of the nozzle to support the nozzle, which can greatly reduce the shaking of the nozzle during operation, thereby reducing the friction between the nozzle and the inner wall of the inner tube or the outer wall of the wafer boat, and further greatly reducing the impact of particles generated by friction on the wafer processing effect.

[0030] Additional aspects and advantages of the present application will be given in part in the description below, and in part will become apparent from the description below, or will be learned through practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] The drawings described herein are used to provide a further understanding of the present application and constitute a part of the present application. The illustrative embodiments of the present application and their descriptions are used to explain the present application and do not constitute an improper limitation on the present application. In the drawings:

[0032] Figure 1 A schematic cross-sectional view of the structure of a diffusion furnace device in the related art provided in an embodiment of the present application;

[0033] Figure 2 A cross-sectional schematic diagram of a diffusion furnace device provided in one embodiment of the present application;

[0034] Figure 3 A cross-sectional schematic diagram of a diffusion furnace device provided in another embodiment of the present application;

[0035] Figure 4 for Figure 2 Enlarged view of point A in the middle;

[0036] Figure 5 for Figure 3 Enlarged view of point B in the middle;

[0037] Figure 6 A top view of the structure of the inner tube, the limiter, and the nozzle in the diffusion furnace device provided in an embodiment of the present application;

[0038] Figure 7 for Figure 6 A partial enlarged view of point C in the middle.

[0039] Reference numerals:

[0040] 10. Inner tube body;

[0041] 20. Outer tube body;

[0042] 30. Flange;

[0043] 40, nozzle; 410, penetration section; 420, connection section;

[0044] 50. Support assembly; 510. First support member; 520. First fastener; 530. Second support member; 540. Second fastener; 550. Adjustment member; 551. Adjustment rod; 552. Adjustment sleeve; 553. Third support member;

[0045] 60. Limiting member; 610. Card slot;

[0046] 70. Lock. DETAILED DESCRIPTION

[0047] To make the technical solutions and beneficial effects of the present invention more clearly understood, the following detailed description is given by way of specific embodiments. The accompanying drawings are not necessarily drawn to scale, and local features may be enlarged or reduced to more clearly illustrate the details of the local features. Unless otherwise defined, the technical and scientific terms used herein have the same meanings as those in the technical field to which this application belongs.

[0048] In the description of the present invention, the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "height", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and so on, indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings and are only for the convenience of simplifying the description of the present invention, and do not indicate that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and should not be understood as a limitation to the present invention.

[0049] In this utility model, the terms "first" and "second" are used solely for descriptive purposes and should not be construed as indicating the relative importance of the features indicated or the number of technical features indicated. Therefore, a feature specified as "first" or "second" may explicitly include at least one such feature. In the description of this utility model, "plurality" means at least two, such as two or three, and "several" means at least one, such as one, two, or three, unless otherwise expressly specified.

[0050] In this utility model, unless otherwise expressly defined, the terms "install," "connect," "connect," "fix," "dispose," etc. should be understood broadly. For example, "connect" can mean fixed, removable, or integrated; it can mean mechanical or electrical; it can mean direct or indirect connection through an intermediary; it can also mean internal communication between two components or interaction between two components. Those skilled in the art will understand the specific meanings of these terms in this utility model based on the specific circumstances.

[0051] In the present invention, unless otherwise clearly defined, when a first feature is “on,” “above,” “above,” “above,” “below,” “below,” or “below” a second feature, the first feature and the second feature may be in direct contact, or the first feature and the second feature may be in indirect contact via an intermediate medium. Moreover, when a first feature is “on,” “above,” or “above” a second feature, it may mean that the first feature is directly above or obliquely above the second feature, or simply means that the horizontal height of the first feature is higher than the horizontal height of the second feature. When a first feature is “below,” “below,” or “below” a second feature, it may mean that the first feature is directly below or obliquely below the second feature, or simply means that the horizontal height of the first feature is lower than the horizontal height of the second feature.

[0052] Figure 1 Schematic cross-sectional view of the diffusion furnace provided in an embodiment of the present application is shown in FIG. Figure 1 The outer tube 20 is fitted over the inner tube 10, which is connected to the outer tube 20 via a flange 30. A nozzle 40 is inserted through the flange 30. One end of the nozzle 40 is located outside the outer tube 20, and the other end is inserted into the inner cavity of the inner tube 10. The inner cavity of the inner tube 10 can accommodate a wafer boat (not shown in the figure), which is used to carry and transport wafers.

[0053] Figure 1 The figure shows the end of the nozzle 40 outside the outer tube 20 connected to the gas delivery pipe via a lock 70. No other fixing devices are used to secure the nozzle 40. Because the nozzle 40 extends a long distance into the inner tube 10, it is prone to shaking during operation of the diffusion furnace, causing friction with the inner wall of the inner tube 10 or the outer wall of the wafer boat, thereby generating particles and affecting wafer processing results.

[0054] In response to the above technical problems, the diffusion furnace device provided in the embodiment of the present application uses a support assembly 50 connected to the bottom of the nozzle 40 to support the nozzle 40, which can reduce the shaking of the nozzle 40 during the operation of the diffusion furnace, thereby reducing the friction with the inner wall of the inner tube body 10 or the outer wall of the wafer boat. Of course, it also greatly reduces the particles generated by friction, which can greatly reduce the impact on the wafer processing effect.

[0055] Specifically, please refer to Figure 2 and Figure 3 The support assembly 50 is connected to the flange 30 and is located at the bottom of the nozzle 40 to support the nozzle 40. The support assembly 50 supports the nozzle 40 from the bottom, which can improve the stability of the nozzle 40 during operation of the diffusion furnace and greatly reduce the possibility of the nozzle 40 shaking, thereby ensuring the processing effect of the wafer.

[0056] Please refer to Figure 2 and Figure 4In an optional embodiment, the support assembly 50 includes a first support member 510 and a first fastener 520. One end of the first support member 510 is connected to the bottom of the nozzle 40, and the other end is connected to the flange 30. The first fastener 520 is inserted into the first support member 510 and the flange 30 to connect the first support member 510 to the flange 30. By way of example, the first fastener 520 is a bolt, but is not limited thereto.

[0057] Since the outer wall of the nozzle 40 is an arc-shaped structure, the shape of the first support member 510 in contact with the outer shape of the nozzle 40 is set to an arc-shaped structure matching the outer shape of the nozzle 40 to improve the support stability of the first support member 510 on the nozzle 40.

[0058] Please refer to Figure 3 and Figure 5 In another optional embodiment, the support assembly 50 includes a second support member 530, a second fastener 540, and an adjustment member 550. One end of the second support member 530 is connected to the flange member 30, and the other end is located below the bottom of the nozzle 40. The second fastener 540 is inserted between the second support member 530 and the flange member 30 to connect the second support member 530 to the flange member 30. As an example, the second fastener 540 is a bolt, but is not limited to this. The adjustment member 550 is inserted into the other end of the second support member 530 and is used to adjust the distance between the bottom of the nozzle 40 and the second support member 530.

[0059] The embodiment of the present application utilizes the adjustment member 550 to adjust the distance between the nozzle 40 and the second support member 530, and further adjusts the positional relationship between the nozzle 40 and the inner tube body 10, so that the position and posture of the nozzle 40 can be adjusted by the adjustment member 550, thereby improving the stability of the nozzle 40 during the operation of the diffusion furnace and greatly reducing the shaking of the nozzle 40.

[0060] In an alternative embodiment, the adjustment member 550 includes an adjustment rod 551 and an adjustment sleeve 552. The adjustment rod 551 is inserted into the second support member 530, and one end of the adjustment rod 551 abuts the bottom of the nozzle 40. The adjustment sleeve 552 matches the adjustment rod 551 and is located at the other end of the adjustment rod 551. Rotating the adjustment sleeve 552 can adjust the distance between the nozzle 40 and the second support member 530.

[0061] As an example, the adjusting rod 551 is a top screw, and the adjusting sleeve 552 is a nut. By rotating the nut, the distance between the nozzle 40 and the second support member 530 is adjusted, thereby adjusting the position and posture of the nozzle 40 relative to the inner tube body 10.

[0062] In an optional embodiment, the adjusting member 550 further includes a third support member 553 , which abuts against the bottom of the nozzle 40 and is connected between the adjusting rod 551 and the nozzle 40 , and the shape of the third support member 553 matches the shape of the nozzle 40 .

[0063] The top screw is generally a standard component with a flat end surface, while the nozzle 40 has an arc-shaped shape. By setting the shape of the third support member 553 to match the shape of the nozzle 40 and connecting it between the top screw and the nozzle 40, the structural stability and thus the support stability can be improved.

[0064] Please refer to Figure 2 and Figure 3 The nozzle 40 has a connecting section 420 and a deep section 410. The connecting section 420 is connected to the deep section 410. The deep section 410 is located in the inner cavity of the inner tube 10. The end of the connecting section 420 is located outside the outer tube 20 and is used to connect to the gas delivery device. The connecting section 420 and the deep section 410 form a first angle, that is, Figure 4 and Figure 5 At the angle a shown in FIG, the contact position between the support assembly 50 and the nozzle 40 is located in the extension direction of the deep section 410. The support assembly 50 abuts in the extension direction of the deep section 410, which can improve the force balance stability of the diffusion furnace.

[0065] Preferably, the connecting section 420 and the extending section 410 are integrally formed and bent through a bending process to ensure the structural strength of the nozzle 40. Of course, the connecting section 420 and the extending section 410 can also be two separate components and connected through a later connection process.

[0066] Preferably, the first angle is a right angle, and the connecting section 420 is perpendicular to the extending section 410, which can improve the structural stability of the nozzle 40, thereby greatly reducing the shaking of the nozzle 40 during operation. Of course, the first angle can also be other angles, such as 60°, 70°, 120°, and 150°, and is not specifically limited in this embodiment of the present application.

[0067] In an optional embodiment, the nozzle 40 located in the inner cavity of the inner tube body 10 contacts the inner wall of the inner tube body 10, so that the inner tube body 10 can support the nozzle 40, further improving the stability of the nozzle 40 during operation.

[0068] In the embodiment of the present application, an anti-slip structure may be further provided on the inner wall of the inner tube body 10 to increase the connection strength between the nozzle 40 and the inner wall of the inner tube body 10. The anti-slip structure is not specifically limited in the embodiment of the present application. For example, a raised structure may be provided on the inner wall of the inner tube body 10 at a position corresponding to the nozzle 40.

[0069] Alternatively, there is a distance between the nozzle 40 and the inner wall of the inner tube 10 , which will increase the possibility of the nozzle 40 shaking.

[0070] Based on this, the diffusion furnace apparatus provided in the embodiment of the present application further includes a limiter 60, which is connected to the interior of the inner tube 10 and is used to limit the position of the nozzle 40 relative to the inner tube 10. The support assembly 50 is used to support the nozzle 40 from the bottom to limit the nozzle 40 in the vertical direction, and the limiter 60 is used to limit the nozzle 40 in the horizontal direction, greatly increasing the stability of the nozzle 40 during operation.

[0071] Please refer to Figure 2 、 Figure 6 and Figure 7 , Figure 6 , a top view of the connection relationship among the stopper 60, the nozzle 40 and the inner tube body 10 is shown. Figure 7 Shown in Figure 6 FIG. 4 is an enlarged view of point C in FIG. 4 , but the nozzle 40 is not shown in the enlarged view.

[0072] Specifically, the stopper 60 has an arc-shaped structure that matches the shape of the inner wall of the inner tube 10 to ensure a secure connection between the stopper 60 and the inner tube 10. The stopper 60 also has a slot 610 for engaging the nozzle 40. The slot 610 has an arc-shaped structure that matches the shape of the nozzle 40 to improve the engagement between the stopper 60 and the nozzle 40, thereby improving the position-limiting effect of the nozzle 40.

[0073] In an alternative embodiment, if Figure 2 As shown, the stopper 60 is connected to the nozzle 40 near its end. Since the deep section 410 of the nozzle 40 is long, the stopper 60 is connected to the nozzle 40 near its end to improve the effect of the stopper 60 on the nozzle 40.

[0074] It can be understood that the supporting assembly 50 and the limiting member 60 are used to limit the longer nozzle 40 at both ends respectively, thereby ensuring the supporting and limiting effect of the nozzle 40.

[0075] It should be understood that the above embodiments are exemplary and are not intended to encompass all possible implementations of the claims. Various modifications and variations may be made to the above embodiments without departing from the scope of the present disclosure. Similarly, the various technical features of the above embodiments may be arbitrarily combined to form additional embodiments of the present application that may not be explicitly described. Therefore, the above embodiments merely illustrate several implementations of the present application and do not limit the scope of protection of the patent application.

Claims

1. A diffusion furnace device, characterized in that: include: Inner tube body (10); An outer tube body (20) is mounted on the inner tube body (10); A flange (30) connected to the outer tube (20) and the inner tube (10); a nozzle (40) inserted into the flange (30), with one end located outside the outer tube (20) and the other end located in the inner cavity of the inner tube (10); a support assembly (50) connected to the flange (30) and located at the bottom of the nozzle (40) to support the nozzle (40); Wherein, the support assembly (50) comprises: a first support member (510), one end of which is connected to the bottom of the nozzle (40) and the other end of which is connected to the flange member (30); A first fastener (520) is inserted into the first support member (510) and the flange member (30), so that the first support member (510) is connected to the flange member (30).

2. The diffusion furnace device according to claim 1, characterized in that The support assembly (50) further comprises: a second support member (530), one end of which is connected to the flange member (30) and the other end of which is located below the bottom of the nozzle (40); a second fastener (540) inserted into the second support member (530) and the flange member (30) so that the second support member (530) is connected to the flange member (30); An adjusting member (550) is inserted into the other end of the second supporting member (530) and is used to adjust the distance between the nozzle (40) and the second supporting member (530).

3. The diffusion furnace device according to claim 2, characterized in that: The regulating member (550) comprises: An adjusting rod (551) is inserted into the second supporting member (530), with one end thereof abutting against the bottom of the nozzle (40); An adjusting sleeve (552) matches the adjusting rod (551) and is located at the other end of the adjusting rod (551). The adjusting sleeve (552) is rotated to adjust the distance between the nozzle (40) and the second support member (530).

4. The diffusion furnace device according to claim 3, characterized in that: The regulating member (550) further includes: The third support member (553) abuts against the bottom of the nozzle (40) and is connected between the adjustment rod (551) and the nozzle (40). The shape of the third support member (553) matches the outer shape of the nozzle (40).

5. The diffusion furnace device according to any one of claims 1 to 4, characterized in that: The nozzle (40) comprises a connecting section (420) and a deep-penetrating section (410), wherein the connecting section (420) is connected to the deep-penetrating section (410), the deep-penetrating section (410) is located in the inner cavity of the inner tube body (10), the end of the connecting section (420) is located outside the outer tube body (20), the connecting section (420) and the deep-penetrating section (410) form a first angle, and the contact position between the support assembly (50) and the nozzle (40) is located in the direction of the extension line of the deep-penetrating section (410).

6. The diffusion furnace device according to claim 5, characterized in that: The first angle is a right angle.

7. The diffusion furnace device according to claim 1, characterized in that Also includes: A limiting member (60) is connected to the inner wall of the inner tube body (10) and is used to limit the position of the nozzle (40) relative to the inner tube body (10).

8. The diffusion furnace device according to claim 7, characterized in that: The limiting member (60) is provided with an arc-shaped structure matching the shape of the inner wall of the inner tube body (10), and is provided with a clamping groove (610) for clamping the nozzle (40).

9. The diffusion furnace device according to claim 7, characterized in that: The limiting member (60) is connected to the nozzle (40) at a position close to its end.

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