Electric uncovering protection circuit and electric uncovering system

Abstract

The utility model discloses an electric uncovering protection circuit and an electric uncovering system, and relates to the technical field of power electronics. In the electric cover opening protection circuit, an internal contact of a vacuum gauge and a normally open contact of a switch module are arranged in an input loop of a safety relay and are used for jointly controlling the on state of the input loop of the safety relay; the vacuum gauge is used for detecting the cavity air pressure in the equipment to be uncovered and closing or opening an internal contact of the vacuum gauge according to the cavity air pressure; the switch module is used for closing a normally open contact of the switch module in response to a cover opening control instruction of external personnel; and the safety relay is used for closing or opening the output contact of the safety relay according to the on state of the input loop so as to adjust the power supply state of the external power supply to the electric cover opening controller. According to the embodiment of the invention, the safety risk generated in the use process of the electric uncovering device can be avoided, so that the reliability and safety of uncovering work of the electric uncovering device are guaranteed.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the electric power electronics technical field especially relates to a kind of electric uncap protection circuit and electric uncap system. BACKGROUND

[0002] With the development of science and technology, the semiconductor industry plays an increasingly important role in the world economy. Semiconductors are not only widely used in computers, communications, consumer electronics and other fields, but also are key materials to support the development of strategic industries such as national defense and aerospace. In order to produce high-quality semiconductor products, it is essential to ensure the normal and reliable operation of production equipment. This requires regular maintenance of production equipment.

[0003] For similar electron beam measurement equipment, the process cavity has a heavy upper cover, and the upper cover needs to be opened during maintenance. The traditional uncap method is to pull up the upper cover by 2-3 manual hoists, which requires multiple people to operate to ensure that the upper cover does not tip over. In view of the above manual uncap method, in order to facilitate uncap, the prior art further proposes an electric uncap device, but it also introduces safety risks. For example, if the cavity is vacuum, pressing the uncap button incorrectly may cause irreversible damage to the equipment and may also cause personal injury.

[0004] In view of the above, in order to avoid similar situations, how to effectively avoid the safety risks generated during the use of the electric uncap device is a problem that needs to be solved in the industry at present. INVENTION CONTENTS

[0005] The electric uncap protection circuit and the electric uncap system provided by the embodiments of the present application can avoid safety risks generated during the use of the electric uncap device, thereby effectively ensuring the reliability and safety of the electric uncap device uncap operation.

[0006] In a first aspect, the embodiments of the present application provide an electric uncap protection circuit applied to an electric uncap device, which includes a vacuum gauge, a switch module, a safety relay and an electric uncap controller.

[0007] The internal contact of the vacuum gauge and the normally open contact of the switch module are both arranged in the input loop of the safety relay, for jointly controlling the on state of the input loop of the safety relay.

[0008] The vacuum gauge is used to detect the cavity pressure inside the device to be uncapped, and to close or open the internal contact of the vacuum gauge according to the cavity pressure.

[0009] The switch module is used to close the normally open contact of the switch module in response to the uncap control instruction of external personnel.

[0010] The safety relay is used to close or open the output contact of the safety relay according to the on-off state of the input circuit, so as to adjust the power supply state of the external power supply to the electric unloading controller; wherein the electric unloading controller is used to control the electric unloading device to open / close the device to be opened in the case that the external power supply supplies power to it.

[0011] In some possible embodiments, the electric unloading protection circuit further comprises a contactor, and the contactor comprises:

[0012] A contactor coil, which is electrically connected with the output contact of the safety relay, and is used to be powered in the case that the output contact of the safety relay is closed;

[0013] A contactor contact, which is arranged between the external power supply and the electric unloading controller, and is a normally open contact;

[0014] The contactor contact is used to be closed in the case that the contactor coil is powered, so as to make the external power supply supply power to the electric unloading controller.

[0015] In some possible embodiments, the contactor contact comprises a first contactor contact and a second contactor contact, and both the first contactor contact and the second contactor contact are normally open contacts;

[0016] A first connecting end of the first contactor contact is electrically connected with a live wire end of the external power supply, and a second connecting end of the first contactor contact is electrically connected with a first power input end of the electric unloading controller;

[0017] A first connecting end of the second contactor contact is electrically connected with a zero line end of the external power supply, and a second connecting end of the second contactor contact is electrically connected with a second power input end of the electric unloading controller;

[0018] The first contactor contact and the second contactor contact are used to be synchronously closed in the case that the contactor coil is powered.

[0019] In some possible embodiments, the electric unloading protection circuit further comprises a fuse;

[0020] A first connecting end of the fuse is electrically connected with the live wire end of the external power supply, and a second connecting end of the fuse is electrically connected with the first connecting end of the first contactor contact;

[0021] Alternatively, the first connecting end of the fuse is electrically connected with the second connecting end of the first contactor contact, and the second connecting end of the fuse is electrically connected with the first power input end of the electric unloading controller.

[0022] In some possible embodiments, the electric unloading protection circuit further comprises a buzzer;

[0023] The first connecting terminal of the buzzer is electrically connected with the first power input terminal of the electric unloading controller, and the second connecting terminal of the buzzer is electrically connected with the second power input terminal of the electric unloading controller.

[0024] In some possible implementations, the electric unloading protection circuit further comprises an emergency stop switch module, and a normally closed contact of the emergency stop switch module is arranged in an input loop of the safety relay;

[0025] The emergency stop switch module is configured to disconnect the normally closed contact of the emergency stop switch module in response to an emergency stop control instruction of an external person.

[0026] The input loop of the safety relay is turned on when the internal contact of the vacuum gauge, the normally open contact of the switch module and the normally closed contact of the emergency stop switch module are all closed.

[0027] In some possible implementations, the internal contact of the vacuum gauge comprises a first internal contact and a second internal contact, the normally open contact of the switch module comprises a first normally open contact and a second normally open contact, and the input loop of the safety relay comprises a first input channel and a second input channel.

[0028] The first internal contact and the first normally open contact are arranged in the first input channel, and the first input channel is turned on when the first internal contact and the first normally open contact are both closed.

[0029] The second internal contact and the second normally open contact are arranged in the second input channel, and the second input channel is turned on when the second internal contact and the second normally open contact are both closed.

[0030] The safety relay is configured to close an output contact of the safety relay when both the first input channel and the second input channel are connected, and disconnect the output contact of the safety relay when any one of the first input channel and the second input channel is not connected.

[0031] In some possible implementations, the electric unloading protection circuit further comprises an emergency stop switch module.

[0032] The emergency stop switch module comprises a first normally closed contact and a second normally closed contact.

[0033] The first normally closed contact is arranged in the first input channel, and the first input channel is turned on when the first internal contact, the first normally open contact and the first normally closed contact are all closed.

[0034] The second normally closed contact is arranged in the second input channel, and the second input channel is turned on when the second internal contact, the second normally open contact and the second normally closed contact are all closed.

[0035] In some possible implementation manners, a first terminal of the output contact of the safety relay is electrically connected with a first pole of the first power supply, a second terminal of the output contact of the safety relay is electrically connected with a first terminal of the contactor coil, and a second terminal of the contactor coil is electrically connected with a second pole of the first power supply.

[0036] The first power supply is configured to supply power to the contactor coil when the output contact of the safety relay is closed.

[0037] A first power terminal of the safety relay is electrically connected with a first pole of the second power supply, and a second power terminal of the safety relay is electrically connected with a second pole of the second power supply.

[0038] The second power supply is configured to supply power to the safety relay.

[0039] In a second aspect, an electric uncap system is provided, which includes the electric uncap protection circuit and the electric uncap device provided in any of the embodiments of the present application.

[0040] The electric uncap protection circuit and the electric uncap system provided in the embodiments of the present application include a vacuum gauge, a switch module, a safety relay, and an electric uncap controller. The vacuum gauge is configured to detect the cavity pressure inside the device to be uncapped, and close or open the internal contact according to the cavity pressure. The switch module is configured to close the normally open contact of the switch module in response to the uncap control instruction of an external person. The safety relay is turned on when the internal contact of the vacuum gauge and the normally open contact of the switch module in the input circuit are both closed, and the output contact of the safety relay is closed, so that the main power source powers on the electric uncap controller. After the electric uncap controller is powered on, the electric uncap device can be controlled to be in the uncapping / capping operation.

[0041] Compared with the prior art, the electric uncap protection circuit and the electric uncap system provided in the embodiments of the present application improve the reliability of the uncap control protection by using the safety relay. In addition, the vacuum gauge is arranged in the input circuit of the safety relay to take the vacuum state of the cavity as the judgment condition for whether to allow uncap, so as to avoid the illegal electric uncap operation in the vacuum state of the cavity. Furthermore, the switch module controlled by the external manager is arranged in the input circuit of the safety relay to perform the uncapping / capping operation, which is conducive to effectively realizing the authority management of the uncap operation. Therefore, the electric uncap protection circuit and the electric uncap system provided in the embodiments of the present application can avoid the safety risk generated in the use process of the electric uncap device, thereby effectively guaranteeing the reliability and safety of the uncapping / capping operation of the electric uncap device. BRIEF DESCRIPTION OF DRAWINGS

[0042] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings needed to be used in the embodiments of the present application will be briefly introduced. Those drawings can help the ordinary skilled in the art to obtain other drawings without creative effort.

[0043] Figure 1 is a structural schematic diagram of an electric cover opening protection circuit provided by an embodiment of the present application;

[0044] Figure 2 is a structural schematic diagram of an electric cover opening protection circuit provided by another embodiment of the present application;

[0045] Figure 3 is a structural schematic diagram of an electric cover opening protection circuit provided by yet another embodiment of the present application;

[0046] Figure 4 is a structural schematic diagram of an electric cover opening protection circuit provided by yet another embodiment of the present application;

[0047] Figure 5 is a structural schematic diagram of an electric cover opening protection circuit provided by yet another embodiment of the present application;

[0048] Figure 6 is a structural schematic diagram of an electric cover opening protection circuit provided by yet another embodiment of the present application;

[0049] Figure 7 is a structural schematic diagram of an electric cover opening system provided by an embodiment of the present application;

[0050] Figure 8 is a schematic diagram of the positional relationship between an electric switch device and a device to be opened by an embodiment of the present application. DETAILED DESCRIPTION

[0051] The features and exemplary embodiments of various aspects of the present application will be described in detail below, in order to make the purposes, technical solutions and advantages of the present application more clear and apparent, the present application will be further described in detail below in combination with the drawings and specific embodiments. It should be understood that the specific embodiments described herein are only intended to explain the present application, but not to limit the present application. The present application can be implemented without some of the specific details by those skilled in the art. The following description of the embodiments is only to provide a better understanding of the present application by showing examples of the present application.

[0052] It should be noted that the relative terms, such as first and second, and the like are used herein only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between such entities or operations. Moreover, the terms "comprises", "comprising", or any other variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but can include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without more limitations, an element defined by an "includes" statement does not exclude the existence of additional identical elements in the process, method, article, or apparatus that includes the element.

[0053] It should be noted that the embodiments in the present application and the features in the embodiments can be combined with each other without conflict. The embodiments will be described in detail below with reference to the accompanying drawings.

[0054] As described in the background section, the existing electric cover opening device in the prior art has certain safety risks, and sometimes may also cause personal injury. In view of the above problems, the current common method is to improve the safety awareness of the operator and formulate safety operation procedures, so that the operator strictly operates according to the safety operation procedures, and the operator's familiarity with the electric cover opening equipment is enhanced, thereby reducing the probability of accidents caused by operation errors. However, the above solution has great subjective dependence on the operator, and the essence of the insecurity of the electric cover opening operation has not changed.

[0055] In view of the above, in order to solve the problems in the prior art, the present application provides an electric cover opening protection circuit and an electric cover opening system to effectively avoid the safety risks generated in the use process of the electric cover opening device. It should be noted that the embodiments provided by the present application are not intended to limit the scope of the present application.

[0056] First, the electric cover opening protection circuit provided by the embodiments of the present application will be introduced. Figure 1 is a structural schematic diagram of the electric cover opening protection circuit provided by an embodiment of the present application. As shown in Figure 1 The electric cover opening protection circuit 100 provided by the embodiments of the present application is applied to an electric cover opening device, and the electric cover opening protection circuit 100 includes a vacuum gauge 10, a switch module 20, a safety relay 30 and an electric cover opening controller 40. The internal contact K1 in the vacuum gauge 10 and the normally open contact K2 of the switch module 20 are both arranged in the input loop (S1, S2) of the safety relay 30, and can be used to jointly control the on-off state of the input loop of the safety relay 30.

[0057] The vacuum gauge 10 is used to detect the cavity pressure inside the equipment to be opened, and close or open the internal contact K1 of the vacuum gauge 10 according to the cavity pressure.

[0058] The switch module 20 is used to close the normally open contact K2 of the switch module 20 in response to the opening control instruction of the external personnel.

[0059] The safety relay 30 is used to close or open the output contact K3 of the safety relay 30 according to the on state of the input circuit, so as to adjust the power supply state of the external power supply to the electric opening controller 40. The electric opening controller 40 is used to control the electric opening device to open / close the equipment to be opened when the external power supply supplies power to the electric opening controller 40.

[0060] Specifically, the equipment to be opened, such as an electron beam measurement device, is not strictly limited herein. The vacuum gauge 10 can be a Bourdon gauge, a thin film capacitance gauge, or a vacuum gauge 10 using charged particle effect, such as a hot cathode ionization gauge and a cold cathode ionization gauge, which utilizes mechanical properties. The specific type of the vacuum gauge 10 is not strictly limited herein.

[0061] In actual operation of the vacuum gauge 10, considering the equipment damage and personal safety risk caused by opening the cover under the vacuum cavity, the vacuum gauge 10 can be used to close the internal contact K1 of the vacuum gauge 10 when the cavity pressure is greater than the preset pressure threshold. And open the internal contact K1 of the vacuum gauge 10 when the cavity pressure is less than or equal to the preset pressure threshold. In this way, it can be fully avoided to perform illegal electric opening / closing operation under the vacuum state of the cavity, thereby effectively ensuring the reliability and safety of the electric opening device.

[0062] The switch module 20 is used to close the normally open contact K2 of the switch module 20 in response to the opening control instruction of the external personnel. The external personnel can be set as a professional manager who has the right to open / close the cover, so as to improve the safety and controllability of the opening operation. The opening control instruction can be an electrical signal or an action instruction of the external personnel, which is not strictly limited herein.

[0063] Optionally, in order to improve the higher level of safety protection, the switch module 20 can be a key switch operated mechanically. On the one hand, by using a key switch operated in a physical way, the manager with the right to open the cover inserts and rotates the key switch to control the on or off of the normally open contact K2 in the input circuit of the safety relay 30.

[0064] In another aspect, in the case of no cover opening operation, the key switch is pulled out by the administrator and taken away for storage, so as to effectively prevent unauthorized operation or ensure the safety of the cover opening device in unattended occasions. In this way, the cover opening operation control is performed by adopting the switch module 20 controlled by the external administrator in the input circuit of the safety relay 30, and the authority management of the cover opening operation is effectively realized.

[0065] In this embodiment, the safety relay 30 is used to improve the reliability of the cover opening control protection. As shown in Figure 1 The internal contact K1 in the vacuum gauge 10 and the normally open contact K2 of the switch module 20 can be connected in series in the input circuit of the safety relay 30. In this way, only when the internal contact K1 in the vacuum gauge 10 and the normally open contact K2 of the switch module 20 are both closed, the input circuit of the safety relay 30 will be in the on state, which means that the safety relay 30 is connected only when the cavity inside the cover opening device is not in vacuum and the external personnel need to open / close the cover.

[0066] When the input circuit of the safety relay 30 is connected, the output contact K3 of the safety relay 30 is closed, which can directly or indirectly cause the external power supply to be connected with the electric cover opening controller 40, and the external power supply can supply power to the electric cover opening controller 40. The external power supply can be, for example, a 220V power supply.

[0067] After the electric cover opening controller 40 is powered on, the electric cover opening controller 40 controls the electric cover opening device to open / close the cover of the cover opening device. The electric cover opening controller 40 can be realized by a microcontroller, a driving chip, etc. The electric cover opening device can mainly consist of an electric cylinder, a piston rod, etc., and the electric cover opening device can be used to realize the opening and closing actions of the cover of the cover opening device in the working state.

[0068] It should be noted that Figure 1 The situation that the external power supply and the electric cover opening controller 40 are directly connected through the output contact K3 of the safety relay 30 is shown, and when the working properties and the device withstand voltage of the safety relay 30 are sufficient to meet the requirements, the output contact K3 of the safety relay 30 is used to connect the external power supply and the electric cover opening controller 40, which can realize low-cost cover opening control and more quickly and efficiently start the electric cover opening controller 40.

[0069] In more embodiments of the present application, considering the weak electric working characteristics of the existing safety relay 30, the safety relay 30 can also be combined with a contactor or a semiconductor switching device to indirectly realize the reliable control of the safety relay 30 on the communication or disconnection between the external power supply and the electric unloading controller 40. The indirect control mode will be described in detail later and will not be repeated here.

[0070] The electric unloading protection circuit 100 provided by the embodiments of the present application is provided with a vacuum gauge 10, a switch module 20, a safety relay 30, and an electric unloading controller 40. The vacuum gauge 10 is used to detect the cavity air pressure inside the unloading device and close or open the internal contact K1 according to the cavity air pressure. The switch module 20 is used to close the normally open contact K2 of the switch module 20 in response to the unloading control instruction of an external person. The safety relay 30 is turned on when the internal contact K1 of the vacuum gauge 10 and the normally open contact K2 of the switch module 20 in the input circuit are both closed. The output contact K3 of the safety relay 30 is closed, so that the main power supply is powered on to the electric unloading controller 40. After the electric unloading controller 40 is powered on, the electric unloading device can be controlled to be in the opening and closing work.

[0071] Compared with the prior art, the electric unloading protection circuit 100 provided by the embodiments of the present application improves the reliability of the unloading control protection by using the safety relay 30. In addition, the embodiments of the present application set the vacuum gauge 10 in the input circuit of the safety relay 30 to take the vacuum of the cavity as the judgment condition for whether to allow unloading, so as to avoid the illegal electric opening and closing operation in the vacuum state of the cavity. Furthermore, the switch module 20 controlled by the external management personnel is set in the input circuit of the safety relay 30 to perform the opening and closing operation, which is beneficial to effectively realize the authority management of the opening and closing operation. Therefore, the electric unloading protection circuit 100 provided by the embodiments of the present application can avoid the safety risk generated in the use process of the electric unloading device, thereby effectively guaranteeing the reliability and safety of the opening and closing work of the electric unloading device.

[0072] Please see the following Figure 2 , Figure 2 is a structural schematic diagram of the electric unloading protection circuit 100 provided by another embodiment of the present application. Based on the structure shown in the foregoing Figure 1 , in order to provide higher level safety protection, the output contact K3 of the safety relay 30 can include a first output contact K31 and a second output contact K32.

[0073] As shown in Figure 2As shown, the first output contact K31 and the second output contact K32 are used to realize the double-channel control of the connection or disconnection between the external power supply and the electric uncap controller 40 in this embodiment. In this structure, the connection loop is formed only when the first output contact K31 and the second output contact K32 are closed at the same time, avoiding the situation that the safety relay 30 triggers the connection of one output contact, thereby effectively improving the safety of the uncap operation and reducing the potential danger in the circuit operation.

[0074] Please refer to Figure 3 , Figure 3 is a structural schematic diagram of the electric uncap protection circuit 100 provided in another embodiment of the present application. As shown in Figure 3 , in view of the weak electric working characteristics of the existing safety relay 30, in order to more stably and reliably realize the on-off control of the loop between the external power supply and the electric uncap controller 40, in some more specific embodiments of the present application, the above-mentioned electric uncap protection circuit 100 further comprises a contactor. The contactor comprises:

[0075] a contactor coil KM0, which is electrically connected with the output contact K3 of the safety relay 30 and used to be powered in the case that the output contact K3 of the safety relay 30 is closed;

[0076] a contactor contact, which is arranged between the external power supply and the electric uncap controller 40 and is a normally open contact.

[0077] The contactor contact is used to be closed in the case that the contactor coil KM0 is powered, so as to enable the external power supply to supply power to the electric uncap controller 40.

[0078] The contactor contact can be a single contact or a plurality of contacts, and only needs to be arranged between the external power supply and the electric uncap controller 40, which is not strictly limited here.

[0079] In this embodiment, the safety relay 30 is used to directly control the working state of the contactor, thereby realizing the indirect on-off control of the loop between the external power supply and the electric uncap controller 40. By using the above-mentioned contactor which is more suitable for controlling a large-current circuit, and by the cooperation of the coil and the contact of the contactor to realize the on-off control of the loop, the reliability of the electric uncap control can be more guaranteed.

[0080] Optionally, more specifically, in Figure 3 , the above-mentioned contactor contact can specifically comprise a first contactor contact KM1 and a second contactor contact KM2, both of which are normally open contacts.

[0081] The first terminal of the first contactor contact KM1 is electrically connected with the live wire end L of the external power supply, and the second terminal of the first contactor contact KM1 is electrically connected with the first power input end of the electric uncap controller 40.

[0082] The first terminal of the second contactor contact KM2 is electrically connected with the zero wire end N of the external power supply, and the second terminal of the second contactor contact KM2 is electrically connected with the second power input end of the electric uncap controller 40.

[0083] The first contactor contact KM1 and the second contactor contact KM2 described above can be used to be closed synchronously in the case that the contactor coil KM0 is powered.

[0084] In the embodiment, considering that the current and voltage in the loop are large when the external power supply is 220V, the contactor coil KM0, the first contactor contact KM1 and the second contactor contact KM2 with better voltage resistance are used to realize the loop on-off control in the power loop of the 220V power supply.

[0085] And, when specifically connected, the first contactor contact KM1 is arranged between the live wire end L of the external power supply and the first power input end of the electric uncap controller 40, and the second contactor contact KM2 is arranged between the zero wire end N of the external power supply and the second power input end of the electric uncap controller 40, so as to form the double-loop control of the electric uncap controller 40.

[0086] Under the double-loop design, only when the first contactor contact KM1 and the second contactor contact KM2 are closed at the same time, the external power supply can normally supply power to the electric uncap controller 40, so as to avoid the risk of false triggering under the single-contact control, and it is beneficial to further improve the reliability and safety of the uncap operation.

[0087] In addition, considering that the contacts in the contactor usually include two types of main contacts and auxiliary contacts, the main contacts are more suitable for the loop control of larger current. Therefore, the first contactor contact KM1 and the second contactor contact KM2 described above can be main contacts, so as to connect and disconnect the power loop in which the external power supply and the electric uncap controller 40 are located.

[0088] Please continue to see Figure 3 Optionally, in some more specific embodiments of the present application, the first terminal of the output contact K3 of the safety relay 30 is electrically connected with the first pole IN1+ of the first power supply, the second terminal of the output contact K3 of the safety relay 30 is electrically connected with the first terminal of the contactor coil KM0, and the second terminal of the contactor coil KM0 is electrically connected with the second pole IN1- of the first power supply.

[0089] The first power supply is used to supply power to the contactor coil KM0 when the output contact K3 of the safety relay 30 is closed.

[0090] The first power terminal A1 of the safety relay 30 is electrically connected with the first pole IN2+ of the second power supply, and the second power terminal A2 of the safety relay 30 is electrically connected with the second pole IN2- of the second power supply.

[0091] The second power supply is used to supply power to the safety relay 30.

[0092] In the embodiment, the first power supply and the second power supply can be, for example, 24V DC power supply. The first pole IN1+ of the first power supply has a potential of 24V, and the second pole IN1- of the first power supply has a potential of 0V. The first pole IN2+ of the second power supply has a potential of 24V, and the second pole IN2- of the second power supply has a potential of 0V.

[0093] The first power supply can supply power to the contactor coil KM0 through the closed output contact K3 when the input loop of the safety relay 30 is connected, so that the contactor coil KM0 generates a magnetic field after being powered on, and drives the first contact KM1 and the second contact KM2 to be closed to allow current to pass through.

[0094] The second power supply is electrically connected with the first power terminal A1 and the second power terminal A2 of the safety relay 30. A1 is a positive power terminal, which can be used to access the positive voltage, such as 24V+, provided by the first pole IN2+ of the second power supply; and A2 is a negative power terminal, which is used to access 0V or ground provided by the second pole IN2- of the second power supply. This connection ensures that the safety relay 30 can receive power and work normally, so that the output contact K3 of the safety relay 30 can be closed when the input loop of the safety relay 30 is connected.

[0095] In addition, in order to increase safety, as shown in Figure 3 the ground terminal PE of the external power supply is directly electrically connected with the ground terminal of the electric uncap controller 40. In this way, by electrically connecting the ground terminal PE of the external power supply with the ground terminal of the electric uncap controller 40, an additional safety path is provided for the circuit to prevent the shell from being electrified due to insulation damage of the electrical equipment or device.

[0096] Please refer to Figure 4 , Figure 4 is a structural schematic diagram of the electric uncap protection circuit 100 provided by another embodiment of the present application. As shown in Figure 4 , optionally, in some more specific embodiments of the present application, considering that personnel need to pay attention to the on-site equipment in the actual uncap scenario, the electric uncap protection circuit 100 further includes a buzzer 50.

[0097] The first connecting terminal of the buzzer 50 is electrically connected to the first power input terminal of the electric unloading controller 40, and the second connecting terminal of the buzzer 50 is electrically connected to the second power input terminal of the electric unloading controller 40.

[0098] In the embodiment, the buzzer 50 is arranged in the circuit of the external power supply and the electric unloading controller 40. When the external personnel needs to perform the unloading operation, the first power input terminal and the second power input terminal of the electric unloading controller 40 are connected to the external power supply to form a closed circuit. In this case, the two terminals of the buzzer 50 are also connected to the external power supply to perform the alarm prompting work, so that the reliability and concentration of the personnel in the unloading operation can be effectively improved.

[0099] It should be noted that, in combination with Figure 4 Although the above buzzer 50 is introduced by taking the example of the circuit of the first contactor contact KM1 and the second contactor contact KM2 arranged between the electric unloading controller 40 and the external power supply in the embodiment, in other embodiments, the buzzer 50 can also be arranged in the circuit between the electric unloading controller 40 and the external power supply in other connection structures, as long as the buzzer 50 is arranged at the two terminals of the electric unloading controller 40.

[0100] Please continue to refer to Figure 4 Optionally, in some more specific embodiments of the present application, in order to fully guarantee the safety of the above electric unloading controller 40 and the contactor and other related devices, so as to avoid the phenomenon of circuit burning and even fire, the above electric unloading protection circuit 100 can further include a fuse 60.

[0101] The first connecting terminal of the fuse 60 is electrically connected to the live terminal of the external power supply, and the second connecting terminal of the fuse 60 is electrically connected to the first connecting terminal of the first contactor contact KM1.

[0102] Alternatively, the first connecting terminal of the fuse 60 is electrically connected to the second connecting terminal of the first contactor contact KM1, and the second connecting terminal of the fuse 60 is electrically connected to the first power input terminal of the electric unloading controller 40.

[0103] In the embodiment, the fuse 60 is connected to the power circuit of the external power supply and the electric unloading controller 40 to protect the circuit, so as to fully improve the safety performance of the circuit. When the circuit in which the fuse 60 is arranged is overloaded or short-circuited, the fuse can automatically disconnect the circuit to protect the circuit and the equipment from being damaged.

[0104] The above fuse can be a glass tube fuse, a ceramic tube fuse, a closed fuse, a self-recovery fuse, etc., and the specific selection can be determined according to the rated current, voltage level, and application environment of the circuit, etc., which is not strictly limited here.

[0105] It should be noted that, in this embodiment, the live wire L of the external power supply is a live conductor responsible for transmitting power from the external power supply to the electric lid opening controller 40. Therefore, in order to quickly and effectively cut off the circuit, the fuse 60 is disposed in the circuit between the live wire of the external power supply and the electric lid opening controller 40. However, in other embodiments, disposing the fuse 60 between the neutral wire N of the external power supply and the electric lid opening controller 40 is also feasible, and this is not a strict limitation.

[0106] See below Figure 5 , Figure 5 FIG. 1 is a structural diagram of an electric cover opening protection circuit 100 provided in another embodiment of the present application. Figure 5 As shown, in some more specific embodiments of the present application, if an abnormal situation occurs during the lid opening process, it is necessary to quickly cut off the power circuit of the electric lid opening controller 40 to ensure that various unexpected events can be properly handled. Based on this, the above-mentioned electric lid opening protection circuit 100 may also include an emergency stop switch module 70. The normally closed contact K4 of the emergency stop switch module 70 is provided in the input circuit of the safety relay 30.

[0107] The emergency stop switch module 70 is used to disconnect the normally closed contact K4 of the emergency stop switch module 70 in response to an emergency stop control command from an external person.

[0108] The input circuit of the safety relay 30 is connected when the internal contact K1 of the vacuum gauge 10, the normally open contact K2 of the switch module 20, and the normally closed contact K4 of the emergency stop switch module 70 are all closed.

[0109] In this embodiment, the emergency stop switch module 70 is provided in the input circuit of the safety relay 30. Thus, if a mechanical injury accident occurs or is likely to occur during the cover opening process when the input circuit is connected, the normally closed contact K4 of the emergency stop switch module 70 can be quickly opened to quickly stop the movement of the machine, thereby effectively avoiding or reducing danger to people or damage to the machine.

[0110] It should be added that the emergency stop switch module 70 in the present application can be implemented as an emergency stop button. In this way, if an emergency occurs during the opening process, an outsider can simply tap the emergency stop button to quickly cut off the circuit, thereby quickly and effectively protecting the safety of personnel and equipment.

[0111] Furthermore, the design of the emergency stop button ensures that outsiders do not need to consider the consequences when triggering the emergency stop, and the triggering of the emergency stop device should not create additional dangers or increase risks. Furthermore, the emergency stop button requires less professional expertise from the operator, increasing the timeliness and reliability of emergency stop operations when an accident occurs or is about to occur.

[0112] Please refer to the following Figure 6 , Figure 6 is a structural schematic diagram of the electric cover opening protection circuit 100 provided by another embodiment of the present application. Optionally, in some more specific embodiments of the present application, in order to provide a higher level of safety guarantee for the electric cover opening operation, the input circuit of the safety relay 30 in the present embodiment can adopt a double-channel input circuit design.

[0113] As shown in Figure 6 , the internal contact K1 of the vacuum gauge 10 includes a first internal contact K11 and a second internal contact K12, the normally open contact K2 of the switch module 20 includes a first normally open contact K21 and a second normally open contact K22, and the input circuit of the safety relay 30 includes a first input channel and a second input channel.

[0114] The first internal contact K11 and the first normally open contact K21 are arranged in the first input channel, and the first input channel is connected when both the first internal contact K11 and the first normally open contact K21 are closed.

[0115] The second internal contact K12 and the second normally open contact K22 are arranged in the second input channel, and the second input channel is connected when both the second internal contact K12 and the second normally open contact K22 are closed.

[0116] The safety relay 30 is configured to close the output contact K3 of the safety relay 30 when both the first input channel and the second input channel are connected, and to open the output contact K3 of the safety relay 30 when either of the first input channel and the second input channel is not connected.

[0117] wherein, Figure 6 S11 and S12 in the above formula are access contacts in the first input channel of the safety relay 30, and S21 and S22 are access contacts in the second input channel of the safety relay 30. The specific model of the safety relay 30 can be, for example, a PNOZ V safety relay, which is only used as an example.

[0118] In the present embodiment, the input circuit of the safety relay 30 adopts a double-channel input circuit design, and accordingly, the internal contact K1 of the vacuum gauge 10 and the normally open contact K2 of the switch module 20 both adopt a double-contact form to be arranged in the first input channel and the second input channel of the safety relay 30, respectively.

[0119] In this way, during the operation, as long as the signal of any one of the channels is disconnected, the safety relay will stop outputting. This design improves the safety and ensures that the power supply can be quickly cut off in an emergency, protecting the safety of personnel and equipment.

[0120] And in the non-working state, if any of the first internal contact K11 and the second internal contact K12 of the vacuum gauge or the first normally open contact K21 and the second normally open contact K22 of the switch module 20 is misdirected on, the dual-channel input circuit design of the safety relay 30 can also ensure that the output contact K3 of the safety relay 30 will not be mis-triggered to close, so that the electric cover opening controller 40 is in the cover opening control working state by mistake.

[0121] That is, only when the signals of both channels of the safety relay 30 are normal, the output contact K3 of the safety relay 30 can be normally closed. This design is to improve safety and ensure that the safety relay 30 can stop output when one of the channels fails, thereby avoiding potential danger.

[0122] Therefore, the dual-channel input circuit design of the safety relay 30 is adopted in the present application, combined with the dual-contact circuit design between the external power supply and the electric cover opening controller 40 in the foregoing embodiment, so that the electric cover opening protection circuit 100 can be safely and reliably operated, thereby providing higher level of safety protection.

[0123] Please continue to see Figure 6 Optionally, in combination with the dual-input channel design of the safety relay 30 in the foregoing embodiment, in some more specific embodiments of the present application, the electric cover opening protection circuit 100 further comprises an emergency stop switch module 70. The emergency stop switch module 70 can include a first normally closed contact K41 and a second normally closed contact K42.

[0124] The first normally closed contact K41 is arranged in the first input channel, and the first input channel is connected when the first internal contact K11, the first normally open contact K21 and the first normally closed contact K41 are all closed.

[0125] The second normally closed contact K42 is arranged in the second input channel, and the second input channel is connected when the second internal contact K12, the second normally open contact K22 and the second normally closed contact K42 are all closed.

[0126] Similar to the dual contacts of the vacuum gauge 10 in the foregoing embodiment, the emergency stop switch module 70 in the present embodiment also includes a first normally closed contact K41 and a second normally closed contact K42. In this way, the first normally closed contact K41 and the second normally closed contact K42 can be connected to the first input channel and the second input channel of the safety relay 30 respectively to realize dual-input channel control of the safety relay 30.

[0127] In this way, during the actual cover opening process, when an emergency shutdown circuit is needed due to an unexpected event, as long as the normally closed contact of the emergency stop switch module 70 in any input channel is disconnected, it is enough to make the safety relay 30 stop outputting to disconnect the output contact K3, so that the external power supply can no longer effectively supply power to the electric cover controller 40, which helps to improve the emergency stop reliability and immediate response.

[0128] It should be noted that the position sequence of each contact in the first input channel or the second input channel of the safety relay 30 is not strictly limited in this application, as long as the first internal contact K11 of the vacuum gauge 10, the first normally open contact K21 of the switch module 20 and the first normally closed contact K41 of the emergency stop switch module 70 are in series in the first input channel. The contact position setting in the second input channel is similar to that in the first input channel, and thus is not described here.

[0129] In combination Figure 6 As shown in the circuit, in order to better understand the electric cover protection circuit 100 provided by the embodiment of the application, the complete working process of the electric cover protection circuit 100 is described in detail below.

[0130] In specific work, the vacuum gauge 10 detects the internal vacuum degree of the cavity of the equipment to be opened. When the vacuum gauge 10 detects that the cavity is at atmospheric pressure, the first internal contact K11 and the second internal contact K12 of the vacuum gauge 10 are both closed. In this case, the external personnel turn the switch module 20 (for example, as a key switch) to the contact closed state, so that the first normally open contact K21 and the second normally open contact K22 in the switch module 20 are both closed. The first normally closed contact K41 and the second normally closed contact K42 of the emergency stop switch module 70 are in the closed state, so that the first input circuit and the second input circuit of the safety relay 30 are both connected, and the output contact K3 of the safety relay 30 is closed.

[0131] In the case that the output contact K3 of the safety relay 30 is closed, the power supply positive voltage (for example, +24V) provided by the first power supply IN1+ is transmitted to the contactor coil KM0, and the contactor coil KM0 is powered, thereby driving the corresponding first contactor contact KM1 and the second contactor contact KM2 to be attracted. Thus, when the first contactor contact KM1 and the second contactor contact KM2 are both closed, the external power supply supplies power to the electric unloading controller 40, and the electric unloading controller 40 can normally control the electric unloading device to perform the unloading / closing operation on the equipment to be unloaded. At the same time, the buzzer 50 is turned on to buzz, thereby playing a reminding role. The fuse 60 protects the circuit from overload or short circuit during the process that the external power supply supplies power to the electric unloading controller 40. In addition, if an unexpected emergency occurs during the unloading process, an external person can cut off the circuit at any time through the emergency stop switch module 70 to ensure safety.

[0132] Next, after the equipment to be unloaded is unloaded, an external person can rotate the switch module 20 (still taking the key switch as an example) to a contact open state, and the first input channel and the second input channel of the safety relay 30 are disconnected, thereby causing the output contact K3 of the safety relay 30 to be disconnected, the contactor coil KM0 to lose power, the first contactor contact KM1 and the second contactor contact KM2 to be disconnected, the electric unloading controller 40 to lose power, and the buzzer 50 to stop buzzing. Finally, the external person can remove the switch module 20 as the key switch and properly store it, so as to prevent other persons without unloading operation permission from performing dangerous operations. Thus, the safety of the entire electric unloading process is ensured through the self-setting of the circuit.

[0133] It can be understood that the above are all examples and do not substantially limit the electric unloading protection circuit 100 protected by the present application.

[0134] Based on the electric unloading protection circuit provided in the above embodiments, correspondingly, an embodiment of the present application provides an electric unloading system. Figure 7 is a structural schematic diagram of an electric unloading system provided by an embodiment of the present application. As shown in the figure, the electric unloading system includes the electric unloading protection circuit 100 provided by any one of the above embodiments of the present application and the electric unloading device 200. Figure 7

[0135] Specifically, the electric unloading system can be provided with more than one electric unloading protection circuit 100 provided by the above embodiments. The electric unloading system 1000 provided by an embodiment of the present application has the beneficial effects of the electric unloading protection circuit 100 provided by an embodiment of the present application, and specific descriptions can be referred to the specific descriptions of the electric unloading protection circuit 100 in the above embodiments, which will not be described herein again.

[0136] In addition, in combination with the actual unloading work scene,​Figure 8 FIG. 1 shows a schematic diagram of the positional relationship between the electric opening and closing device 200 and the equipment to be opened 300. In Figure 8 In FIG. 1, the equipment to be opened 300 mainly includes an equipment upper cover 301 and an equipment cavity 302, and the main components of the electric opening and closing device 200 can include an electric cylinder and a mechanical structure connected to the equipment upper cover 301. The electric opening and closing device 200 can be used to adjust the jacking working state under the action of the aforementioned electric opening and closing protection circuit 100.

[0137] In particular, when the equipment to be opened 300 needs to be opened, the electric opening and closing controller 40 in the electric opening and closing protection circuit 100 is powered on. The electric opening and closing controller 40 can send a control instruction (which can include the moving direction, speed and position of the electric cylinder) to the electric opening and closing device 200, so that the internal motor of the electric cylinder in the electric opening and closing device 200 starts to rotate, and through the mechanical conversion device (such as a ball screw) inside the electric cylinder, the rotary motion is converted into linear motion.

[0138] In this way, the piston rod of the electric cylinder pushes or pulls the mechanical structure (such as a connecting rod or a hinge) connected to the equipment upper cover 301, so that the equipment upper cover 301 performs jacking motion to realize the opening operation. Correspondingly, the closing operation process of the electric opening and closing device 200 is similar to the opening operation process, which will not be described here.

[0139] It can be understood that the above Figure 8 The positional relationship between the electric opening and closing device 200 and the equipment to be opened 300 shown in FIG. 1 can also be regarded as an example, and does not substantially limit the electric opening and closing system 100 protected by the present application.

[0140] In addition, the opening steps of the electric opening and closing device 200 can also vary according to different application scenarios and system designs. Specifically, it can be determined according to the design and selection of the electric opening and closing controller, the model and configuration of the electric cylinder, or the mechanical structure connected to the equipment upper cover 301, and the present application does not make strict limitations.

[0141] The functional blocks shown in the structural block diagrams described above can be implemented as hardware, software, firmware, or a combination thereof. When implemented in hardware, they can be, for example, electronic circuits, application specific integrated circuits (ASICs), appropriate firmware, plug-ins, functional cards, and the like. When implemented in software, the elements of the present application are program or code segments that are used to perform the required tasks. The program or code segments can be stored in a machine-readable medium, or transmitted through a data signal carried in a carrier wave over a transmission medium or communication link. A "machine-readable medium" includes any medium that can store or transport information. Examples of machine-readable media include electronic circuits, semiconductor memory devices, ROM, flash memory, erasable ROM (EROM), floppy disks, CD-ROMs, optical disks, hard disks, fiber optic media, radio frequency (RF) links, and the like. The code segments can be downloaded via computer networks such as the Internet, intranets, and the like.

[0142] It should be noted that the terms "comprising", "including", or any other variant thereof are intended to cover a non-exclusive inclusion, such that processes, methods, articles, or apparatuses that comprise a list of elements do not include only those elements recited, but can also include other elements not expressly listed or inherent to such processes, methods, articles, or apparatuses.

[0143] It should be noted that each of the above-described embodiments of the present application can be implemented in the form of a progressive manner, and the same or similar parts among the embodiments can be referred to each other. Each of the embodiments focuses on the difference from other embodiments. The embodiments described above do not describe all the details and limit the application to the specific embodiments described. It is obvious that many modifications and changes can be made based on the above description. The embodiments are selected and described in order to better explain the principles and practical applications of the present application, so that those skilled in the art can well utilize the present application and make modifications based on the present application. The present application is limited by the claims and their full scope and equivalents.

[0144] The principles and implementations of the present application are described by using specific examples. The above description of the examples is only to help understand the method and core idea of the present application. The above is only the preferred embodiment of the present application. It should be noted that due to the limitation of language expression, there are infinite specific structures, and those skilled in the art can make some improvements, refinements or changes without departing from the principles of the present application. The above technical features can be combined in an appropriate manner; these improvements, refinements, changes or combinations, or the direct application of the concepts and technical solutions of the present application to other fields without improvement, shall be regarded as the protection scope of the present application.

Claims

1. An electric cover opening protection circuit, characterized in that: Applied to an electric cover opening device, the electric cover opening protection circuit includes a vacuum gauge, a switch module, a safety relay and an electric cover opening controller; The internal contacts of the vacuum gauge and the normally open contacts of the switch module are both provided in the input circuit of the safety relay, and are used to jointly control the connection state of the input circuit of the safety relay; The vacuum gauge is used to detect the air pressure in the cavity of the device to be opened, and close or open the internal contacts of the vacuum gauge according to the air pressure in the cavity; The switch module is used to close the normally open contact of the switch module in response to an external person's cover opening control instruction; The safety relay is used to close or open the output contacts of the safety relay according to the connection state of the input circuit to adjust the power supply state of the external power supply to the electric cover opening controller; wherein, the electric cover opening controller is used to control the electric cover opening device to open / close the cover of the device to be opened when the external power supply supplies power to it.

2. The electric cover opening protection circuit according to claim 1, characterized in that: The electric cover opening protection circuit further includes a contactor, which includes: a contactor coil, the contactor coil being electrically connected to the output contacts of the safety relay and being configured to be energized when the output contacts of the safety relay are closed; A contactor contact, wherein the contactor contact is provided between the external power supply and the electric cover opening controller, and the contactor contact is a normally open contact; The contactor contacts are used to close when the contactor coil is energized, so that the external power supply supplies power to the electric cover opening controller.

3. The electric cover opening protection circuit according to claim 2, characterized in that: The contactor contacts include a first contactor contact and a second contactor contact, and the first contactor contact and the second contactor contact are both normally open contacts; The first terminal of the first contactor contact is electrically connected to the live wire terminal of the external power supply, and the second terminal of the first contactor contact is electrically connected to the first power input terminal of the electric cover opening controller; The first terminal of the second contactor contact is electrically connected to the neutral terminal of the external power supply, and the second terminal of the second contactor contact is electrically connected to the second power input terminal of the electric cover opening controller; The first contactor contact and the second contactor contact are configured to be synchronously closed when the contactor coil is energized.

4. The electric cover opening protection circuit according to claim 3, characterized in that: The electric cover opening protection circuit also includes a fuse; The first terminal of the fuse is electrically connected to the live wire of the external power supply, and the second terminal of the fuse is electrically connected to the first terminal of the first contactor contact; Alternatively, the first terminal of the fuse is electrically connected to the second terminal of the first contactor contact, and the second terminal of the fuse is electrically connected to the first power input terminal of the electric cover opening controller.

5. The electric cover opening protection circuit according to claim 1, characterized in that: The electric cover opening protection circuit also includes a buzzer; The first connection terminal of the buzzer is electrically connected to the first power input terminal of the electric cover opening controller, and the second connection terminal of the buzzer is electrically connected to the second power input terminal of the electric cover opening controller.

6. The electric cover opening protection circuit according to claim 1, characterized in that: The circuit further comprises an emergency stop switch module, wherein the normally closed contact of the emergency stop switch module is arranged in the input circuit of the safety relay; The emergency stop switch module is used to disconnect the normally closed contact of the emergency stop switch module in response to the emergency stop control command of the external personnel; The input circuit of the safety relay is connected when the internal contacts of the vacuum gauge, the normally open contacts of the switch module, and the normally closed contacts of the emergency stop switch module are all closed.

7. The electric cover opening protection circuit according to claim 1, characterized in that: The internal contacts of the vacuum gauge include a first internal contact and a second internal contact, the normally open contacts of the switch module include a first normally open contact and a second normally open contact, and the input circuit of the safety relay includes a first input channel and a second input channel; The first internal contact and the first normally open contact are provided in the first input channel, and the first input channel is connected when the first internal contact and the first normally open contact are both closed; The second internal contact and the second normally open contact are provided in the second input channel, and the second input channel is connected when the second internal contact and the second normally open contact are both closed; The safety relay is configured to close an output contact of the safety relay when both the first input channel and the second input channel are connected; and to open an output contact of the safety relay when either the first input channel or the second input channel is not connected.

8. The electric cover opening protection circuit according to claim 7, characterized in that: The circuit also includes an emergency stop switch module; The emergency stop switch module includes a first normally closed contact and a second normally closed contact; The first normally closed contact is provided in the first input channel, and the first input channel is connected when the first internal contact, the first normally open contact, and the first normally closed contact are all closed; The second normally closed contact is provided in the second input channel, and the second input channel is connected when the second internal contact, the second normally open contact, and the second normally closed contact are all closed.

9. The electric cover opening protection circuit according to claim 2, characterized in that: A first terminal of the output contact of the safety relay is electrically connected to a first pole of a first power supply, a second terminal of the output contact of the safety relay is electrically connected to a first terminal of the contactor coil, and a second terminal of the contactor coil is electrically connected to a second pole of the first power supply; The first power supply is used to supply power to the contactor coil when the output contact of the safety relay is closed; The first power supply terminal of the safety relay is electrically connected to the first pole of the second power supply, and the second power supply terminal of the safety relay is electrically connected to the second pole of the second power supply; The second power supply is used to supply power to the safety relay.

10. An electric lid opening system, characterized in that: The electric cover opening system includes the electric cover opening protection circuit and the electric cover opening device according to any one of claims 1 to 9.

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