A quick opening door for a vacuum chamber of a PLD device

Abstract

The utility model relates to a kind of quick-acting door for PLD equipment vacuum chamber, including, CF fixed flange, big pin shaft and quick-acting door flange, the CF fixed flange side is provided with first lug, the quick-acting door flange side is provided with second lug, the first lug is provided with circular slot from side, the first lug top is provided with first threaded hole and the circular slot is communicated, the first lug end is provided with second threaded hole and the circular slot is communicated;Second lug is provided with first circular hole from side, big pin shaft is set through circular slot and first circular hole, adjusting bolt is set in first threaded hole and second threaded hole and fixes big pin shaft;The utility model switch door operation is fast and convenient, and equipment efficiency is significantly improved.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor thin film manufacturing technology, specifically a quick-opening door for the vacuum chamber of a PLD device. Background Technology

[0002] In advanced vacuum deposition processes such as physical vapor deposition (PVD), chemical vapor deposition (CVD), magnetron sputtering, and evaporation, the vacuum chamber, as a core component, is the key environmental carrier for achieving thin film material deposition. To meet process requirements, the chamber needs to maintain a high vacuum level and ensure the precision of the internal process environment, which places extremely high demands on the chamber's sealing performance.

[0003] In the coating production process, the chamber doors require frequent opening and closing operations, primarily for two core stages: first, loading and unloading the substrate (including wafers, glass, cutting tools, decorative parts, etc.), a necessary step in batch or semi-continuous production; second, performing regular cleaning and maintenance of the chamber interior to remove deposited byproducts and ensure film quality and process stability. These high-frequency opening and closing operations make the chamber door opening and closing efficiency a key factor affecting the overall production cycle time. Utility Model Content

[0004] The purpose of this section is to outline some aspects of embodiments of the present invention and to briefly describe some preferred embodiments. Simplifications or omissions may be made in this section, as well as in the abstract and title of this application, to avoid obscuring the purpose of these documents; however, such simplifications or omissions should not be construed as limiting the scope of the present invention.

[0005] Given the following technical problems in the existing technology: In the existing technology, the chamber doors mostly adopt a manual bolt fastening type or a simple clamping type structure, which has a complicated operation procedure and takes a long time (a single door opening and closing usually takes several minutes to more than ten minutes), resulting in a significant increase in the non-productive waiting time of the equipment, which has become a bottleneck restricting the utilization rate of the equipment and the overall production efficiency of the factory.

[0006] To solve the above-mentioned technical problems, this utility model provides the following technical solution: a quick-opening door for the vacuum chamber of a PLD device, comprising,

[0007] The CF fixed flange, large pin shaft, and quick-opening flange are provided. The CF fixed flange has a first lug on one side and a second lug on one side. The first lug has a circular slot through it from the side. The top of the first lug has a first threaded hole communicating with the circular slot. The end of the first lug has a second threaded hole communicating with the circular slot.

[0008] The second ear has a first round hole through it from the side. The large pin is set through the round groove and the first round hole. Adjusting bolts are set in the first threaded hole and the second threaded hole to fix the large pin.

[0009] As a preferred technical solution for a quick-opening door for a vacuum chamber in a PLD device, the CF fixed flange is provided with a first O-ring sealing groove, and a quick-opening door sealing ring is provided in the first O-ring sealing groove.

[0010] As a preferred technical solution for a quick-opening door for a vacuum chamber in a PLD device, the quick-opening door flange is provided with a placement groove, the bottom of the placement groove is provided with a second O-ring sealing groove, the second O-ring sealing groove is provided with a glass lower sealing ring, and the placement groove is provided with quartz glass.

[0011] As a preferred technical solution for a quick-opening door for a vacuum chamber in a PLD device, a glass cover flange is provided above the quick-opening door flange, a third O-ring sealing groove is provided below the glass cover flange, an upper glass sealing ring is provided in the third O-ring sealing groove, and the glass cover flange is connected to the quick-opening door flange by fixing screws.

[0012] As a preferred technical solution for a quick-opening door for a vacuum chamber of a PLD device, the other end of the CF fixed flange is provided with a third lug, the third lug is provided with a square groove in the middle, the third lug is provided with a shaft hole from the side, and a small pin is provided in the shaft hole.

[0013] As a preferred technical solution for a quick-opening door for a vacuum chamber in a PLD device, it also includes a retaining shaft, the bottom of which is provided with a block, and the block is provided with a second circular hole from the side, and the small pin is provided through the second circular hole.

[0014] As a preferred technical solution for a quick-opening door for a vacuum chamber in a PLD device, it also includes a set nut, wherein the end of the set shaft is provided with an external thread, the set nut is connected to the set shaft, and the end of the set nut is also provided with a copper washer.

[0015] As a preferred technical solution for a quick-opening door for a vacuum chamber in a PLD device, the other end of the quick-opening door flange is provided with a fourth lug, the fourth lug is provided with a slot in the middle, and the locking shaft is provided in the slot.

[0016] As a preferred technical solution for a quick-opening door for a vacuum chamber in a PLD device, the end of the small pin is provided with a pin retaining ring.

[0017] The beneficial effects of this utility model are: 1. High sealing reliability and good vacuum maintenance.

[0018] By employing a structural design that separates the fixed flange and the quick-opening flange, and by incorporating dedicated O-ring grooves and high-performance O-ring seals on their mating surfaces, uniform compression deformation of the O-ring can be achieved under the axial pressure of the quick-opening locking mechanism. This design effectively avoids the uneven clamping force problem that may occur with traditional multi-bolt tightening methods, significantly improving the uniformity and consistency of the sealing interface, thereby ensuring sealing performance under high vacuum (e.g., 10⁻⁶ rpm). -3 Pa to 10 -6 It exhibits excellent sealing reliability and long-term stability under high-temperature process environments, greatly reducing the risk of vacuum leakage.

[0019] 2. Integrated observation window for convenient and efficient process monitoring:

[0020] A high-transmittance, high-temperature-resistant quartz glass observation window is directly integrated into the quick-opening door flange, forming a single unit with the door assembly (quick-opening flange + door body). This design allows operators to clearly observe the internal conditions of the vacuum chamber (such as substrate position, coating uniformity, plasma glow state, etc.) at any stage of equipment operation (including door opening and closing and process execution) without any additional intervention. This greatly facilitates real-time process monitoring, fault diagnosis, and equipment debugging, improving operational convenience and process controllability.

[0021] 3. The door opening and closing operation is quick and convenient, significantly improving equipment efficiency:

[0022] Thanks to the application of a highly efficient quick-opening and locking mechanism, the traditional cumbersome bolt tightening / loosening operations have been replaced. Operators can reliably lock and seal the door or unlock and open it within seconds with just a simple action. This significantly reduces the door opening and closing time required for loading, unloading, and maintenance of the equipment, effectively reduces non-productive downtime, and significantly improves the overall efficiency (OEE) and capacity utilization of the vacuum coating equipment.

[0023] 4. Simple structure and convenient maintenance:

[0024] The separate design of the fixed flange and quick-opening flange, along with the integration of the observation window and the quick-opening flange, results in a simpler overall structure. The quick-opening flange (along with its observation window and door) is a movable module, facilitating disassembly and maintenance. O-rings, as the primary sealing element, are standard wear parts; their replacement only requires operation on the end face of the quick-opening flange, without disassembling the entire door or complex components. This significantly simplifies daily maintenance and the replacement of critical sealing elements, reducing maintenance costs and downtime. Attached Figure Description

[0025] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort. Among them:

[0026] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0027] Figure 2 This is a schematic diagram of the overall cross-sectional structure of this utility model;

[0028] Figure 3 This is a schematic diagram of the overall exploded structure of this utility model;

[0029] Figure 4 This is a schematic diagram of the structure of this utility model.

[0030] Reference numerals: 11. First lug; 12. Round groove; 31. Second lug; 2. Large pin; 32. First round hole; 13. First threaded hole; 14. Second threaded hole; 4. Adjusting bolt; 15. First O-ring sealing groove; 16. Quick-opening door sealing ring; 5. Lower glass sealing ring; 33. Placement groove; 6. Quartz glass; 7. Upper glass sealing ring; 8. Glass cover flange; 9. Fixing screw; 1. CF fixing flange; 171. Square groove; 17. Third lug; 172. Shaft hole; 181. Square; 182. Second round hole; 10. Set nut; 183. Copper washer; 3. Quick-opening door flange; 34. Fourth lug; 18. Set shaft; 341. Slot; 173. Small pin; 184. Pin retaining ring. Detailed Implementation

[0031] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings.

[0032] Many specific details are set forth in the following description in order to provide a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Those skilled in the art can make similar extensions without departing from the spirit of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0033] Secondly, the term "an embodiment" or "embodiment" as used herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The phrase "in one embodiment" appearing in different places in this specification does not necessarily refer to the same embodiment, nor is it a single or selective embodiment that excludes other embodiments.

[0034] Secondly, this utility model is described in detail with reference to the schematic diagrams. When describing the embodiments of this utility model, for ease of explanation, the cross-sectional views illustrating the device structure may be partially enlarged, not adhering to the usual scale. Furthermore, the schematic diagrams are merely examples and should not limit the scope of protection of this utility model. In addition, actual manufacturing should include the three-dimensional spatial dimensions of length, width, and depth.

[0035] Example 1

[0036] Reference Figures 1-4 This embodiment provides a quick-opening door for a vacuum chamber of a PLD device, including a CF fixed flange 1, a large pin 2, and a quick-opening door flange 3. A first lug 11 is provided on one side of the CF fixed flange 1, and a second lug 31 is provided on one side of the quick-opening door flange 3. A circular groove 12 is provided through the first lug 11 from the side. A first threaded hole 13 is provided at the top of the first lug 11 and communicates with the circular groove 12. A second threaded hole 14 is provided at the end of the first lug 11 and communicates with the circular groove 12.

[0037] The second ear 31 has a first round hole 32 through it from the side. The large pin 2 is set through the round groove 12 and the first round hole 32. The first threaded hole 13 and the second threaded hole 14 are provided with adjusting bolts 4 to fix the large pin 2.

[0038] The second lug 31 is L-shaped, extending downwards to make the first circular hole 32 and the large pin 2 coaxial; it should be noted that the length of the circular groove 12 is larger than the diameter of the large pin 2, so the large pin 2 can move a certain distance in the circular groove 12, as shown in the reference. Figure 2 The second threaded hole 14 is positioned slightly below the center of the circular groove. The bolt in the second threaded hole 14 serves as a bottom support and limit for the large pin 2, while the bolt in the first threaded hole 13 presses and fixes the large pin 2.

[0039] It should be noted that pin retaining rings are provided at both ends of the large pin 2 for limiting.

[0040] The CF fixed flange 1 is provided with a first O-ring sealing groove 15, and a quick-opening door sealing ring 16 is provided in the first O-ring sealing groove 15.

[0041] The quick-opening flange 3 is provided with a placement groove 33, the bottom of the placement groove 33 is provided with a second O-ring sealing groove, the second O-ring sealing groove is provided with a glass lower sealing ring 5, and the placement groove 33 is provided with quartz glass 6.

[0042] A glass cover flange 8 is provided above the quick-opening flange 3, and a third O-ring sealing groove is provided below the glass cover flange 8. A glass upper sealing ring 7 is provided in the third O-ring sealing groove. The glass cover flange 8 is connected to the quick-opening flange 3 by fixing screws 9.

[0043] It should be noted that a placement groove is also provided below the glass cap flange 8 for the upper part of the quartz glass 6 to be placed inside, and the upper sealing ring 7 and the lower sealing ring 5 are fixed above and below the quartz glass 6, respectively.

[0044] The other end of the CF fixed flange 1 is provided with a third lug 17, the third lug 17 is provided with a square groove 171 in the middle, the third lug 17 is provided with a shaft hole 172 from the side, and a small pin 173 is provided in the shaft hole 172.

[0045] It also includes a retaining shaft 18, with a block 181 at the bottom of the retaining shaft 18. The block 181 has a second round hole 182 on the side, and a small pin 173 is inserted through the second round hole 182.

[0046] It also includes a set nut 10, the end of the set shaft 18 is provided with an external thread, the set nut 10 is connected to the set shaft 18, and the end of the set nut 10 is also provided with a copper washer 183.

[0047] The other end of the quick-opening flange 3 is provided with a fourth lug 34, and a slot 341 is provided in the middle of the fourth lug 34, and the fixed shaft 18 is provided in the slot 341.

[0048] A pin retaining ring 184 is provided at the end of the small pin 173.

[0049] The quick-opening door structure of the vacuum coating equipment of this utility model will be described in detail below with reference to the accompanying drawings.

[0050] like Figure 2 and Figure 3 As shown, the quick-opening door structure of this utility model mainly includes: CF fixed flange 1, large pin 2, quick-opening door flange 3, adjusting screw 4, glass lower sealing ring 5, quartz glass 6, glass upper sealing ring 7, glass cover flange 8, fixing screw 9, set nut 10, copper washer 183, pin retaining ring 184, set shaft 18, small pin 14, and quick-opening door sealing ring 16.

[0051] The CF fixed flange 1 is sealed to the flange end face of the vacuum coating equipment chamber with an oxygen-free copper sealing ring. The flange end face facing the outside of the chamber is a precision-machined sealing surface and is provided with a first O-ring sealing groove for the quick-opening flange. On one side of the CF fixed flange, there is a first quick-opening hinge lug 11, and on the other side, there is a third quick-locking mechanism lug 17.

[0052] The large pivot pin 2 is an important component of the hinge in the quick-opening door structure, serving as the hinge's central axis. It connects the CF fixing flange 1 and the quick-opening door flange 3 via lugs.

[0053] The quick-opening flange 3 is independent of the CF fixed flange 1, and its dimensions match those of the CF fixed flange. Like the CF fixed flange, the quick-opening flange 3 also has a hinge lug (second lug 31) on one side and a quick-locking mechanism lug (fourth lug 34) on the other side. Additionally, the quick-opening flange 3 has a second O-ring sealing groove inside the quartz glass 6 for accommodating the lower glass sealing ring 5, and its sealing surface is a precision-machined surface.

[0054] The adjusting screw 4 is used to adjust the gap between the large pin 2 and the bottom of the circular groove 12, thereby adjusting the uniformity of the quick-opening door seal.

[0055] The glass cap flange 8 has a sealing groove on the surface that seals with the quartz glass 6, where a third O-ring is installed for the glass sealing ring 7. It is fixed to the quick-opening door flange 3 by fixing screws 9 and seals the quartz glass 6. At this time, the glass cap flange 8, the quartz glass 6, and the quick-opening door flange 3 form a whole observation window that can be moved by hinges, that is, the whole quick-opening door.

[0056] The set nut 10, together with the copper washer 183, the pin retaining ring 184, the set shaft 18, the small pin 14, the fourth lug 34 on the other side of the quick-opening flange 3, and the third lug 17 on the other side of the CF fixed flange 1, form a set quick-locking mechanism.

[0057] The quick-opening door sealing ring 16 is installed in the sealing groove on the outside of the CF fixed flange 1. The entire quick-opening door is sealed by the aforementioned quick-locking mechanism.

[0058] When the quick-opening door is closed and locked, the quick-opening door flange 3 is pressed tightly against the fixed flange 1 under the action of the locking force, so that the quick-opening door sealing ring 16 undergoes uniform elastic compression deformation in the first O-ring sealing groove, thereby forming a reliable vacuum sealing interface between the fixed flange 1 and the quick-opening door flange 3.

[0059] A piece of high-transmittance, high-temperature resistant, and low-outgas quartz glass 6 is integrated onto the quick-opening flange 3, forming a single integral component. Therefore, when the door opens or closes, the observation window moves along with the quick-opening flange 3, allowing operators to observe the internal conditions of the chamber, such as substrate position, coating status, and glow discharge, without the need for additional opening or operation of the observation port, greatly facilitating process monitoring and equipment debugging.

[0060] The quick-locking mechanism is designed to allow for rapid manual tightening of the set nut. In the closed position, operating the set nut 10 quickly generates and applies sufficient axial locking force F, driving the quick-opening flange 3 to press tightly against the fixed flange 1, ensuring that the O-ring seal 15 reaches the set compression amount and achieves a reliable vacuum seal. In the open position, operating the set nut 10 quickly releases the locking force, allowing the door assembly—quick-opening flange 3 + glass cap flange 8 + quartz glass 6—to be moved as a whole.

[0061] Brief description of the work process:

[0062] When closing, align and fit the quick-opening flange 3, glass cap flange 8, and quartz glass 6 of the door assembly with the fixed flange 1; operate the set nut 10 by rotating the set shaft 18 to press the set nut 10 against the fourth lug 34, quickly generating a locking force, and evenly pull or push the quick-opening flange 3 towards the fixed flange 1, compressing the O-ring seal 15 to form a seal. When opening, operate the set nut 10 in the opposite direction to release the locking force (rotate the set shaft 18 in the opposite direction), and the door assembly can be moved open as a whole; the observation window of the quartz glass 6 integrated on the quick-opening flange provides a view throughout the process.

[0063] Furthermore, the clamping force of the set nut 10 can be adjusted by rotating the set nut 10.

[0064] The beneficial effects of this utility model are:

[0065] 1. High sealing reliability and good vacuum maintenance:

[0066] By employing a structural design that separates the fixed flange and the quick-opening flange, and by incorporating dedicated O-ring grooves and high-performance O-ring seals on their mating surfaces, uniform compression deformation of the O-ring can be achieved under the axial pressure of the quick-opening locking mechanism. This design effectively avoids the uneven clamping force problem that may occur with traditional multi-bolt tightening methods, significantly improving the uniformity and consistency of the sealing interface, thereby ensuring sealing performance under high vacuum (e.g., 10⁻⁶ rpm). -3 Pa to 10 -6 It exhibits excellent sealing reliability and long-term stability under high-temperature process environments, greatly reducing the risk of vacuum leakage.

[0067] 2. Integrated observation window for convenient and efficient process monitoring:

[0068] A high-transmittance, high-temperature-resistant quartz glass observation window is directly integrated into the quick-opening door flange, forming a single unit with the door assembly (quick-opening flange + door body). This design allows operators to clearly observe the internal conditions of the vacuum chamber (such as substrate position, coating uniformity, plasma glow state, etc.) at any stage of equipment operation (including door opening and closing and process execution) without any additional intervention. This greatly facilitates real-time process monitoring, fault diagnosis, and equipment debugging, improving operational convenience and process controllability.

[0069] 3. The door opening and closing operation is quick and convenient, significantly improving equipment efficiency:

[0070] Thanks to the application of a highly efficient quick-opening and locking mechanism, the traditional cumbersome bolt tightening / loosening operations have been replaced. Operators can reliably lock and seal the door or unlock and open it within seconds with just a simple action. This significantly reduces the door opening and closing time required for loading, unloading, and maintenance of the equipment, effectively reduces non-productive downtime, and significantly improves the overall efficiency (OEE) and capacity utilization of the vacuum coating equipment.

[0071] 4. Simple structure and convenient maintenance: The separate design of the fixed flange and quick-opening flange, as well as the integration of the observation window and quick-opening flange, makes the overall structure simpler. The quick-opening flange (along with its observation window and door) is a movable module, which is easy to disassemble and maintain. The O-ring, as the main sealing element, is a standard wear part. Its replacement only requires operation on the end face of the quick-opening flange, without disassembling the entire door or complex components. This greatly simplifies the daily maintenance and replacement process of key sealing elements, reducing maintenance costs and downtime.

[0072] It should be understood that numerous specific implementation decisions can be made during the development of any practical implementation, such as in any engineering or design project. Such development efforts may be complex and time-consuming, but for those skilled in the art who benefit from this disclosure, the development effort will be a routine work of design, manufacturing, and production without requiring much experimentation.

[0073] It should be noted that the above embodiments are only used to illustrate the technical solution of this utility model and are not intended to limit it. Although this utility model has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solution of this utility model without departing from the spirit and scope of the technical solution of this utility model, and all such modifications or substitutions should be covered within the scope of the claims of this utility model.

Claims

1. A quick-opening door for a vacuum chamber of a PLD device, characterized in that: include, The CF fixed flange (1), large pin (2) and quick-opening flange (3) are provided. The CF fixed flange (1) is provided with a first lug (11) on one side and a second lug (31) on one side. The first lug (11) is provided with a circular slot (12) through the side. The top of the first lug (11) is provided with a first threaded hole (13) communicating with the circular slot (12). The end of the first lug (11) is provided with a second threaded hole (14) communicating with the circular slot (12). The second ear (31) has a first round hole (32) through it from the side. The large pin (2) is set through the round groove (12) and the first round hole (32). The first threaded hole (13) and the second threaded hole (14) are provided with adjusting bolts (4) to fix the large pin (2).

2. The quick-opening door for the vacuum chamber of the PLD equipment according to claim 1, characterized in that: The CF fixed flange (1) is provided with a first O-ring sealing groove (15), and a quick-opening door sealing ring (16) is provided in the first O-ring sealing groove (15).

3. The quick-opening door for the vacuum chamber of the PLD equipment according to claim 1 or 2, characterized in that: The quick-opening flange (3) is provided with a placement groove (33), the bottom of the placement groove (33) is provided with a second O-ring sealing groove, the second O-ring sealing groove is provided with a glass lower sealing ring (5), and the placement groove (33) is provided with quartz glass (6).

4. The quick-opening door for the vacuum chamber of the PLD equipment according to claim 3, characterized in that: A glass cap flange (8) is provided above the quick-opening flange (3), and a third O-ring sealing groove is provided below the glass cap flange (8). A glass upper sealing ring (7) is provided in the third O-ring sealing groove. The glass cap flange (8) is connected to the quick-opening flange (3) by fixing screws (9).

5. The quick-opening door for the vacuum chamber of the PLD equipment according to claim 4, characterized in that: The other end of the CF fixed flange (1) is provided with a third lug (17), the third lug (17) is provided with a square groove (171) in the middle, the third lug (17) is provided with a shaft hole (172) from the side, and a small pin (173) is provided in the shaft hole (172).

6. The quick-opening door for the vacuum chamber of the PLD equipment according to claim 5, characterized in that: It also includes a retaining shaft (18), the bottom of which is provided with a block (181), and the block (181) is provided with a second round hole (182) from the side, and the small pin (173) is provided through the second round hole (182).

7. The quick-opening door for the vacuum chamber of the PLD equipment according to claim 6, characterized in that: It also includes a set nut (10), the end of the set shaft (18) is provided with an external thread, the set nut (10) is connected to the set shaft (18), and the end of the set nut (10) is also provided with a copper washer (183).

8. The quick-opening door for the vacuum chamber of the PLD equipment according to claim 7, characterized in that: The other end of the quick-opening flange (3) is provided with a fourth lug (34), and the fourth lug (34) is provided with a slot (341) in the middle, and the retaining shaft (18) is provided in the slot (341).

9. The quick-opening door for the vacuum chamber of the PLD equipment according to claim 8, characterized in that: The small pin (173) is provided with a pin retaining ring (184) at its end.

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