High-resolution wide-angle NANO lidar scanner system with multi-active mirror array

The multi-active mirror array nano lidar scanner addresses the limitations of existing LiDAR technologies by offering a simple, cost-effective solution for high-speed, wide-angle scanning with enhanced resolution, suitable for autonomous vehicles and medical precision applications.

WO2025192765A1PCT designated stage Publication Date: 2025-09-18PARK YONG DAE
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Patent Information

Application Number
PCT/KR2024/003189
Authority / Receiving Office
WO · WO
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-03-11
Filing Date
2024-03-12
Publication Date
2025-09-18

AI Technical Summary

Technical Problem

Existing LiDAR technologies face challenges with complex configurations, high production costs, low resolution, slow scan speeds, limited scanning range, and vulnerability to mechanical stress, making them unsuitable for applications in autonomous vehicles and medical precision scanning.

Method used

A high-resolution wide-angle nano lidar scanner system with a multi-active mirror array utilizing atomic force microscope scanning technology and hybrid optical technology, incorporating a multi-active mirror array to achieve fast, wide-angle scanning with low power consumption and improved resolution.

Benefits of technology

The system provides a simple configuration with low production time and cost, enabling high-speed, high-resolution scanning over a wide angle, suitable for autonomous vehicles and medical applications like reconstructive surgery, while minimizing physical deformation and ensuring reliability.

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Abstract

The present invention relates to a high-resolution wide-angle nano-LiDAR scanner system with a multi-active mirror array, comprising: a LiDAR central control unit, which is connected to each function unit included in a LiDAR, outputs respective corresponding control signals according to parameters and embedded, installed and operated programs, and monitors and records an operating state; a laser pulse output unit for outputting a laser pulse signal of a specified frequency at a specified level according to the corresponding control signal of the LIDAR central control unit; an atomic nano-scan unit which receives the laser pulse signal applied from the laser pulse output unit according to the corresponding control signal of the LIDAR central control unit, and which outputs the laser pulse signal by adjusting the scanning range of the laser pulse signal by means of a vertical vibration mirror means that actively and vertically vibrates and a rotary polygonal mirror means that actively rotates; and a first laser filter unit which receives the laser pulse signal having a scanning range adjusted from the atomic nano-scan unit, and which outputs a laser pulse signal by blocking noisy laser pulse signal. Therefore, the present invention has a simple LiDAR configuration, relatively low production time and costs, excellent resolution, high scanning speed, and a wide scanning range.
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Description

Multi-active mirror array high-resolution wide-angle nano lidar scanner system

[0001] The present invention relates to a high-resolution, wide-angle nano-lidar scanner with a multi-active mirror array. More specifically, the present invention relates to a high-resolution, wide-angle nano-lidar scanner with a multi-active mirror array that utilizes scanning technology used in atomic force microscopes to scan a target quickly and with high resolution over a small scan range with low power consumption, while simultaneously scanning a wide area by applying a multi-active mirror array. In addition, the present invention relates to a high-resolution, wide-angle nano-lidar scanner with a multi-active mirror array that minimizes physical deformation by applying a multi-active mirror array, thereby reducing structural stress, and applies a structure that is relatively resistant to impact, thereby ensuring high quality and reliability. In addition, the present invention relates to a high-resolution, wide-angle nano-lidar scanner with a multi-active mirror array that is increasingly preferred in various environments due to its excellent productivity and easy maintenance through the modularization of a single active mirror.

[0002] In addition, the present invention relates to a multi-active mirror array high-resolution wide-angle nano lidar scanner system, which is applied to autonomous vehicles, flying cars, etc., with high-speed and high-resolution and relatively wide-angle scanning for scanning an object, and to a medical and precision reverse engineering field including reconstructive plastic surgery with relatively low-speed and precise scanning.

[0003] LiDAR (Light Detection And Ranging) is a device that uses laser light to measure (survey) the presence, location, and movement of water vapor, dust, smoke, aerosols, and cloud particles in the atmosphere. It is also called laser radar.

[0004] When measuring distance using LiDAR, it is a technology that projects a light signal, a beam, onto a target object, inputs the reflected and received signal, and calculates the time of flight (TOF) in the corresponding calculation unit to output a relative distance value. It includes a function unit that generates, steers, and receives the beam.

[0005] That is, LiDAR fires (transmits) laser light such as visible light or infrared into the atmosphere and analyzes the signals received by being reflected from a target or object made of a reflector or scatterer to measure (analyze, detect) distance or atmospheric phenomena, etc., and is applied in various fields such as Doppler radar that measures the speed of a target moving at a small speed and low speed by utilizing the characteristic that the Doppler effect is greater in laser light than in microwaves, and Raman radar that simultaneously performs component analysis of a target object by utilizing the Raman shift phenomenon.

[0006] Optical Phased Array (OPA) technology is a technology that uses optical signals of a specific frequency band and scans them by outputting them in a predetermined radiation pattern, but it has the problem of limited scanning range and relatively low resolution.

[0007] Silicon optical phased arrays (OPAs) are optical integrated devices that steer beams by utilizing the interference effect between radiated optical signals. They are durable because they have no mechanical drive units, and are manufactured using semiconductor chips, enabling the creation of ultra-small, reliable, and mass-producible solid-state LiDARs.

[0008] However, silicon optical integrated devices including these silicon optical phase arrays have problems such as low transmission optical power, low resolution, and relatively high cost due to waveguide loss and coupling loss within the device and optical loss due to external optical connections.

[0009] Recently, LiDAR has been used as a sensor or scanner to detect obstacles in the fields of intelligent automobiles (vehicles) and smart cars, and LiDAR generally has multiple light transmitters, light steering units, and light receivers to irradiate laser light to a target point.

[0010] Research on Advanced Driver Assistance Systems (ADAS) has been relatively active recently to improve the driving convenience of vehicles (automobiles), and in particular, in the field of autonomous vehicles, there is a growing need for technology development related to steering systems for safe driving (operation) to the destination.

[0011] A prior art technology that partially resolves these needs and problems is 'OPA for optical steering and LiDAR system equipped with the OPA', registered in the Republic of Korea as a patent No. 10-2559580 (July 20, 2023).

[0012] Figure 1 is a functional configuration diagram of a lidar system equipped with a light steering device according to an embodiment of the prior art.

[0013] Hereinafter, with reference to the attached drawings, the prior art will be described in detail. The optical steering device (100, Optical Phased Array) is configured to include a splitter (110, splitter), a first phase shifter (120, Phased Shifter: PS), a second PS (130), and a phased optical transmission unit (160).

[0014] The splitter (110) equally divides the input optical signal and outputs it, the first phase shifter (120) and the second phase shifter (130) each adjust the phase change of the input light to one selected from heat, current, voltage, etc., and the phase optical transmission unit (160) is configured to output or transmit optical signals having different phases by a plurality of combinations of the splitter (110), the first phase shifter (120), and the second phase shifter (130).

[0015] The prior art has the advantage of outputting and steering a specific phase-controlled optical signal, but the configuration is complex, so it takes a lot of time to manufacture, and the productivity is low due to the complex configuration, so maintenance is difficult, it is vulnerable to shock, and management costs are relatively high. In particular, the circuit configuration for controlling current, voltage, and heat for phase control is relatively very complex, which causes an increase in price, and maintenance is difficult, and the influence of electromagnetic waves is severe, making precise control difficult, and the resolution is low, and the scan speed and range are low, and other problems have not yet been solved.

[0016] Therefore, there is a need to develop a lidar technology that has a relatively simple configuration for vehicle driver assistance systems, requires relatively little production time and cost, has excellent resolution, has a relatively fast scan speed, has a wide scan range, and consumes low power.

[0017] In addition, there is a need to develop technology that can scan objects at high speed, high resolution, and with a relatively wide angle, and can be applied to autonomous vehicles and flying cars.

[0018] [Prior Art Literature]

[0019] [Patent Document]

[0020] (Patent Document 1) Republic of Korea Patent Registration No. 10-2559580 (July 20, 2023) 'OPA for optical steering and LiDAR system equipped with the OPA'

[0021] (Patent Document 2) Republic of Korea Patent Registration No. 10-1877388 (July 5, 2018) 'Vehicle LiDAR Device'

[0022] The purpose of the present invention, which was developed to solve the problems and needs of the above-mentioned prior art, is to provide a high-resolution wide-angle nano lidar scanner system with a multi-active mirror array that has a relatively simple lidar configuration, requires relatively little production time and cost, has excellent resolution, has a relatively fast scan speed, and has a wide scan range.

[0023] In addition, the purpose of the present invention is to provide a high-resolution wide-angle nano lidar scanner system with a multi-active mirror array that scans a target at high speed with low power and high resolution, and reliably secures a wide range of angle scan range with excellent resolution at a relatively low cost by using an atomic force microscope scanning technology, an existing reliable motor control technology, and a new concept hybrid optical technology.

[0024] Meanwhile, the present invention provides a multi-active mirror array high-resolution wide-angle nano lidar scanner system that is applied to autonomous vehicles and flying cars for high-speed and high-resolution scanning of objects and to medical and precision reverse processing fields including cosmetic surgery and reconstructive surgery for relatively low-speed and highly precise scanning.

[0025] In order to achieve the above-described purpose, the multi-active mirror array high-resolution wide-angle nano lidar scanner system of the present invention may include a lidar central control unit (1000) that connects to each functional unit configured in the lidar, outputs corresponding control signals according to built-in programs and parameters that are operated, and monitors and records the operating status; a laser pulse output unit (2000) that outputs a laser pulse signal of a specific frequency at a specific level according to the corresponding control signal of the lidar central control unit (1000); an atomic nanoscan unit (3000) that inputs a laser pulse signal applied from the laser pulse output unit (2000) according to the corresponding control signal of the lidar central control unit (1000) and adjusts and outputs a range scanned by the laser pulse signal by means of a vertically vibrating mirror means that actively vibrates vertically and a rotating polygonal mirror means that actively rotates; and a first laser filter unit (4000) that inputs a laser pulse signal whose scan range of the atomic nanoscan unit (3000) is adjusted and blocks and outputs a noisy laser pulse signal.

[0026] A second laser filter unit (5000) that inputs a laser pulse signal that is reflected by a target object (950) from a laser pulse signal output from the first laser filter unit (4000) and returns, but inputs the laser pulse signal while blocking a noisy laser pulse signal; a laser focusing unit (6000) that receives the laser pulse signal input from the second laser filter unit (5000) and focuses it by a lens combination; an optical-electrical signal conversion unit (7000) that converts the laser pulse signal output from the laser pulse output unit (2000) into a first voltage signal (t1) and converts the laser pulse signal output from the laser focusing unit (6000) into a second voltage signal (t2) and outputs them respectively by a corresponding control signal of the lidar central control unit (1000); It may include a laser flight time measurement unit (8000) that inputs a first voltage signal (t1) and a second voltage signal (t2) from the photoelectric signal conversion unit (7000), calculates the input time difference value, and outputs it.

[0027] The above-mentioned photoelectric signal conversion unit (7000) equally divides the optical output of the laser pulse signal output from the laser pulse output unit (2000) into three parts, and applies 2 / 3 of the optical output laser pulse signal to the atomic nanoscan unit (3000) and outputs 1 / 3 of the optical output laser pulse signal to the divided optical path; a laser light distribution unit (7100) that receives the laser pulse signal applied via the divided optical path from the laser light distribution unit (7100) and converts it into a current signal and outputs it; a second laser light signal detection unit (7300) that receives the laser pulse signal applied from the laser focusing unit (6000) and converts it into a current signal and outputs it; It may include a first current-voltage conversion unit (7400) that converts a current signal applied from the first laser light signal detection unit (7200) into a voltage signal at a level recognized by the laser flight time measurement unit (8000) and applies the same to a T1 terminal of the laser flight time measurement unit (8000); and a second current-voltage conversion unit (7500) that converts a current signal applied from the second laser light signal detection unit (7300) into a voltage signal at a level recognized by the laser flight time measurement unit (8000) and applies the same to a T2 terminal of the laser flight time measurement unit (8000).

[0028] The above-described atomic nano-scanning unit (3000) comprises: a nano-scanning housing frame unit (3010) in which each functional unit constituting the atomic nano-scanning unit (3000) is installed; an incident light reflecting mirror (3020) whose side is fixedly installed on a specifically designated portion of the nano-scanning housing frame unit (3010) and receives a laser pulse signal output from the laser pulse output unit (2000) and applied via the laser light distribution unit (7100) and reflects the laser pulse signal at an angle corresponding to the incident angle; a flat fixed mirror (3030) whose side is fixedly installed on a specifically designated portion of the nano-scanning housing frame unit (3010) and receives a laser pulse signal applied from the incident light reflecting mirror (3020) and reflects the laser pulse signal at an angle corresponding to the incident angle and has a length longer than the length of the incident light reflecting mirror (3020); A first piezo scanner unit (3040) that vibrates in the longitudinal direction and has a vibration magnitude and frequency controlled by a corresponding control signal of the lidar central control unit (1000); a piezo fixing frame (3050) that is fixedly installed at a specifically designated portion of the nanoscan housing frame unit (3010) and has one longitudinal end of the first piezo scanner unit (3040) fixedly installed at the specifically designated portion; a first piezo plane mirror (3060) that is fixedly installed at the other longitudinal end of the first piezo scanner unit (3040) and receives a laser pulse signal applied from the incident light reflection mirror (3020) and reflects it at an angle corresponding to the incident angle; A second piezo scanner unit (3070) that vibrates in the longitudinal direction and has one end fixedly installed on a specifically designated part of the piezo fixed frame (3050) while the vibration magnitude and frequency are controlled by the corresponding control signal of the above-mentioned lidar central control unit (1000); A second piezo plane mirror (3080) that is fixedly installed on the other end in the longitudinal direction of the second piezo scanner unit (3070) and receives a laser pulse signal reflected from the first piezo plane mirror (3060) by being reflected by the plane fixed mirror (3030) and reflects the laser pulse signal at an angle corresponding to the incident angle;It may include a multi-faceted rotating motor unit (3090) that is fixedly installed on a specifically designated portion of the nano-scan housing frame unit (3010) and rotates the rotating shaft at a designated speed by a corresponding control signal of the lidar central control unit (1000); and a rotating multi-faceted rotating motor unit (3100) that has a central axis fixedly installed on the rotating shaft of the multi-faceted rotating motor unit (3090) and has a plurality of flat mirrors of uniform size uniformly installed at a uniform angle on the outer surface of the polygonal cylinder shape.

[0029] The first piezo scanner unit (3040) and the second piezo scanner unit (3070) can vibrate at a frequency in the range of 5 to 10 kilohertz by the corresponding control signal of the lidar central control unit (1000).

[0030] The above multi-faceted rotation motor unit (3090) may include a step motor that rotates at a rotation speed of 5 to 15 rotations per second and has a rotation angle adjusted in 0.1 degree units by a corresponding control signal of the lidar central control unit (1000).

[0031] The above-mentioned rotary polygonal section (3100) may have a 3-angle, 4-angle, 6-angle or 8-angle cylinder shape.

[0032] The above laser pulse output unit (2000) can output a near-infrared laser pulse signal with a wavelength of 900 to 910 nanometers at a power level of 25 to 100 watts by a corresponding control signal of the lidar central control unit (1000).

[0033] The first laser filter unit (4000) and the second laser filter unit (5000) may include a polarizing filter that prevents transmission of a near-infrared laser pulse signal exceeding a wavelength of 910 nanometers.

[0034] The above laser focusing unit (6000) can focus a laser pulse signal reflected from a target object (950) by sequentially arranging a convex lens (6010) and a concave lens (6020) each having a focal length of 35 to 50 millimeters for a 905 nanometer wavelength laser signal.

[0035] The first laser filter unit (4000) and the second laser filter unit (5000) are spray-coated with a filter protection coating solution that blocks the penetration of dust and moisture and inhibits the attachment of foreign substances and bacteria on one side facing the object (950), and the filter protection coating solution may include, for 100 parts by weight of transparent PET, 15 parts by weight of dodecyldimethylbenzylammonium chloride, 15 parts by weight of sulfobetaine chitosan, 10 parts by weight of pyromellitic anhydride, 10 parts by weight of polytetrafluoroethylene, 5 parts by weight of polyphosphate salts, 5 parts by weight of vanadium oxide (V2O5), and 5 parts by weight of titanium dioxide having an average diameter of 100 micrometers.

[0036] The above nano-scan housing frame part (3010) is spray-coated with a housing surface coating agent for waterproofing, contamination prevention, and durability, and the housing surface coating agent may include 5 parts by weight of mica powder, 10 parts by weight of methylsulfonic methane, 3.5 parts by weight of sodium borohydride, 15 parts by weight of polytetrafluoroethylene, 10 parts by weight of urea, 10 parts by weight of phosphite, 5 parts by weight of gluconate, and 10 parts by weight of sodium bicarbonate, for 100 parts by weight of transparent polypropylene resin.

[0037] The above nano-scan housing frame part (3010) may further include one or more shock-blocking support parts (3120) on the lower surface to cushion and protect from external vibration and shock, and the shock-blocking support parts (3120) may include a fitting guide (3122) having an inverted trapezoidal shape fixed to the lower surface of the nano-scan housing frame part (3010) and having both lower ends protruding, a fixed plate body (3124) that is fitted laterally to be caught on the lower protrusion of the fitting guide (3122) and has a space therein and is supported on the bottom surface, and a spring (3126) that is interposed in the internal space of the fixed plate body (3124) and has one end caught on the lower surface of the fitting guide (3122) and the other end caught on the upper surface of the fixed plate body (3124).

[0038] A high-resolution wide-angle nano lidar scanner system having a multi-active mirror array, characterized in that the angle value scanned by the above-described multi-active mirror array high-resolution wide-angle nano lidar scanner system is equal to the beta value of the angle value scanned by each of the equipped piezo plane mirrors or active mirrors, and when there are n piezo plane mirrors, the total scan angle value is calculated by the following formula.

[0039] Total scan angle value = 2(beta 1 + beta 2 + … beta n)

[0040] The present invention, having the above configuration, has the advantages of having a relatively simple lidar configuration, requiring relatively little production time and cost, having excellent resolution, having a relatively fast scanning speed, and having a wide scanning range.

[0041] In addition, the present invention has the advantage of reliably securing a wide range of angle scan range with excellent resolution at a relatively low cost and high speed scanning of a target with low power consumption and high resolution through a hybrid optical technology that applies atomic force microscope scanning technology and existing reliable motor control technology.

[0042] Meanwhile, the present invention has the advantage of being applied to autonomous vehicles and flying cars to enhance the operational stability and reliability of autonomous vehicles by scanning an object located in front at high speed and high resolution and with a relatively wide angle, and being applied to medical applications including cosmetic or reconstructive plastic surgery by relatively low speed and very precise scanning, thereby contributing to medical welfare, and being applied to precision processing such as reverse engineering, thereby greatly contributing to industrial development.

[0043] Figure 1 is a functional configuration diagram of a lidar system equipped with a light steering device according to an embodiment of the prior art.

[0044] FIG. 2 is a diagram illustrating the overall functional configuration of a high-resolution wide-angle nano lidar scanner system with a multi-active mirror array according to one embodiment of the present invention.

[0045] FIG. 3 is a functional configuration diagram of a high-resolution wide-angle nano lidar scanner system with a multi-active mirror array according to one embodiment of the present invention.

[0046] Figure 4 is a detailed configuration diagram of an atomic nanoscan unit according to one embodiment of the present invention.

[0047] Figure 5 is a functional shape arrangement configuration diagram of an atomic nanoscan unit according to one embodiment of the present invention.

[0048] Fig. 6 is a diagram illustrating the principle of wide-area scanning by a multi-mirror structure of an atomic nano-scan unit according to one embodiment of the present invention.

[0049] FIG. 7 is an explanatory diagram of a method for calculating a wide-angle area scan angle using a multi-mirror structure of an atomic nanoscan unit according to one embodiment of the present invention.

[0050] Fig. 8 is a cross-sectional view illustrating the configuration of a shock-blocking support according to one embodiment of the present invention.

[0051] The present invention is susceptible to various modifications and embodiments. Specific embodiments are illustrated in the drawings and described in detail in the detailed description. However, this is not intended to limit the present invention to specific embodiments, but rather to encompass all modifications, equivalents, and alternatives falling within the spirit and technical scope of the present invention. In describing the present invention, detailed descriptions of related known technologies will be omitted if they are deemed to obscure the gist of the present invention.

[0052] FIG. 2 is a connection diagram showing the overall function configuration of a high-resolution wide-angle nano lidar scanner system having a multiple active mirror array according to an embodiment of the present invention, FIG. 3 is a functional shape arrangement configuration diagram of a high-resolution wide-angle nano lidar scanner system having a multiple active mirror array according to an embodiment of the present invention, FIG. 4 is a detailed configuration diagram of an atomic nano scanning unit according to an embodiment of the present invention, FIG. 5 is a functional shape arrangement configuration diagram of an atomic nano scanning unit according to an embodiment of the present invention, FIG. 6 is a diagram explaining the principle of wide-area scanning by a multiple mirror structure of an atomic nano scanning unit according to an embodiment of the present invention, FIG. 7 is a diagram explaining a method of calculating a wide-angle area scan angle by a multiple mirror structure of an atomic nano scanning unit according to an embodiment of the present invention, and FIG. 8 is a cross-sectional view explaining the configuration of a shock-blocking support unit according to an embodiment of the present invention.

[0053] Hereinafter, referring to all attached drawings, a multi-active mirror array high-resolution wide-angle nano lidar scanner system (900) according to one embodiment of the present invention may include a lidar central control unit (1000), a laser pulse output unit (2000), an atomic nano scan unit (3000), a first laser filter unit (4000), a second laser filter unit (5000), a laser focusing unit (6000), an optical-to-electrical signal conversion unit (7000), and a laser time-of-flight measurement unit (8000).

[0054] The lidar central control unit (1000) can connect to each functional unit configured in the lidar, output the corresponding control signal according to the built-in installed and operated program and parameters, and monitor and record the operating status.

[0055] The built-in, installed and operated program may include an artificial intelligence (AI) program that records, manages, and compares all external pattern information identified from various perspectives of a specific object through machine learning to increase recognition speed.

[0056] The laser pulse output unit (2000) can output a laser pulse signal of a specific frequency at a specific level by a corresponding control signal of the lidar central control unit (1000).

[0057] The laser pulse output unit (2000) can output a laser pulse signal corresponding to near-infrared rays with a wavelength of 900 to 910 nanometers at a power of 25 to 100 watts according to a corresponding control signal of the lidar central control unit (1000). Watt (W) is a value obtained by multiplying voltage (V) and current (I), and when a voltage of 5 volts is supplied, a 1 watt laser pulse signal can consume a current of 0.2 amperes (A: ampere), and a 2 watt laser pulse signal can consume a current of 0.4 amperes (A). Therefore, when a voltage of 5 volts is supplied, a 25 watt laser pulse signal consumes a current of 5 amperes (A: ampere), and a 100 watt laser pulse signal consumes a current of 20 amperes (A).

[0058] If the output power exceeds 100 watts, it may affect the vision of nearby users or objects, and if it is less than 25 watts, the resolution may be reduced. Therefore, adjusting the output power to between 25 and 100 watts has the advantage of extending the lifespan, improving performance, and reducing operating costs. Since the visual impairment caused by the laser pulse signal is inversely proportional to the square of the distance, if the output cannot be reduced, it is necessary to stay far away.

[0059] A laser pulse signal is output with a cycle based on a frequency unit of 50 to 100 gigahertz (GHz). Frequencies higher than 100 GHz have excellent straightness, but it is difficult to transmit the laser pulse signal with a relatively large output, and there is a problem that the resolution (clarity) is lowered because the signal is scattered by fine particles in the air. On the other hand, frequencies lower than 50 gigahertz can be transmitted with a relatively large output, but there is a problem that the resolution is lowered because objects smaller than the wavelength width cannot be identified. Therefore, controlling the output of a laser pulse signal with a cycle based on a frequency unit of 50 to 100 gigahertz (GHz) has the advantage of increasing the object identification ability and improving the resolution by consuming less energy.

[0060] The atomic nano-scan unit (3000) inputs a laser pulse signal applied from the laser pulse output unit (2000) by a corresponding control signal of the lidar central control unit (1000), and can output the laser pulse signal by controlling the range scanned by the laser pulse signal by means of a vertical vibration mirror means that actively vibrates vertically and a rotating polygonal mirror means that actively rotates.

[0061] The atomic nanoscan unit (3000) may include a nanoscan housing frame unit (3010), a light-incident reflection mirror (3020), a flat fixed mirror (3030), a first piezo scanner unit (3040), a piezo fixed frame (3050), a first piezo plane mirror (3060), a second piezo scanner unit (3070), a second piezo plane mirror (3080), a polyhedral rotation motor unit (3090), and a rotating polyhedral mirror unit (3100).

[0062] Each functional unit constituting the atomic nanoscan unit (3000) can be installed in the nanoscan housing frame unit (3010). The nanoscan housing frame unit (3010) can have an overall box shape.

[0063] The nano-scan housing frame (3010) may further include one or more shock-absorbing support members (3120) on the lower surface to cushion and protect against external vibration and shock.

[0064] The shock-blocking support member (3120) may include a fitting guide (3122) having a trapezoidal shape fixed to the lower surface of the nano-scan housing frame member (3010) and having protruding lower sides, a fixed plate body (3124) that is fitted laterally to be caught by the lower protrusion of the fitting guide (3122) and has a space inside and is supported on the bottom surface, and a spring (3126) that is interposed in the internal space of the fixed plate body (3124) and has one end caught by the lower surface of the fitting guide (3122) and the other end caught by the upper surface of the fixed plate body (3124).

[0065] The nano-scan housing frame (3010) is spray-coated with a housing surface coating agent for waterproofing, contamination prevention, and durability. The housing surface coating agent may include 5 parts by weight of mica powder, 10 parts by weight of methylsulfonic methane, 3.5 parts by weight of sodium borohydride, 15 parts by weight of polytetrafluoroethylene, 10 parts by weight of urea, 10 parts by weight of phosphite, 5 parts by weight of gluconate, and 10 parts by weight of sodium bicarbonate, based on 100 parts by weight of transparent polypropylene resin.

[0066] Polypropylene resin is a hydrocarbon chemically composed of only carbon and hydrogen, so it has a slippery feel similar to candles or soap visually and to the touch, has a specific gravity of 0.91, is lighter than water, and floats on water. It has excellent strength and chemical resistance, so it is widely used for industrial purposes, and has the characteristics of being strong, light, and not absorbing moisture at all.

[0067] Sodium bicarbonate has the advantage of enhancing durability, stain resistance, and waterproofing while increasing molding freedom due to the high crosslinking density of polypropylene resin.

[0068] Phosphites contribute to suppressing deformation by improving strength, hardness, and wear resistance while enhancing chemical resistance and heat insulation, and gluconate has the advantage of preventing interfacial separation, improving fixing power, and suppressing slippage.

[0069] Urea has the advantage of enhancing moisture resistance by securing heat resistance through the formation of a eutectic point, and polytetrafluoroethylene has the advantage of enhancing heat insulation properties by securing chemical resistance, electrical insulation properties, non-adhesion, anti-fouling, heat resistance, and friction properties, thereby strengthening the ability to suppress heat conduction.

[0070] Sodium borohydride has the advantage of increasing bonding strength, securing heat resistance, and enhancing water repellency, moisture resistance, waterproofing, and stain resistance. Methyl sulfonic methane is added to suppress cracking and splitting while maintaining flexibility, and mica powder is well known as a representative heat-insulating agent.

[0071] The incident light reflection mirror (3020) is fixedly installed on a side of a specifically designated portion of the nano-scan housing frame (3010), receives a laser pulse signal output from the laser pulse output unit (2000) and applied via the laser light distribution unit (7100), and can reflect the laser pulse signal at an angle corresponding to the incident angle.

[0072] The flat fixed mirror (3030) is fixedly installed on a side of a specifically designated portion of the nano-scan housing frame (3010), receives a laser pulse signal applied from the incident light reflecting mirror (3020), reflects it at an angle corresponding to the incident angle, and the length (L1) of the flat fixed mirror (3030) may be longer than the length (L2) of the incident light reflecting mirror (3020). Meanwhile, it is preferable that the length (L2) of the incident light reflecting mirror (3020) be multiplied by a value corresponding to the value obtained by adding 1 to the value obtained by multiplying the number N of actively driven scanner mirrors by 2.5, and set as the length (L1) of the flat fixed mirror (3030). Therefore, it is calculated as 'L1 = ((N * 2.5) + 1) * L2'. The longer the length (L1) of the flat fixed mirror (3030), the wider the scanning range becomes.

[0073] The first piezo scanner unit (3040) can vibrate in the longitudinal direction, with the vibration size and frequency controlled by the corresponding control signal of the lidar central control unit (1000).

[0074] A piezo is a crystal that is well known as an element that outputs a charge corresponding to the applied external force when an external force is applied in a specific direction, or contracts or expands in the corresponding direction when a voltage is applied in a specific direction.

[0075] The piezoelectric fixing frame (3050) is fixedly installed to a specifically designated portion of the nanoscan housing frame (3010), and one longitudinal end of the first piezoelectric scanner (3040) can be fixedly installed to a specifically designated portion.

[0076] The first piezo plane mirror (3060) is fixedly installed at the other longitudinal end of the first piezo scanner unit (3040) and can receive a laser pulse signal applied from the incident light reflection mirror (3020) and reflect it at an angle corresponding to the incident angle.

[0077] The second piezo scanner unit (3070) has a vibration size and frequency controlled by a corresponding control signal from the lidar central control unit (1000), vibrates in the longitudinal direction, and one end can be fixedly installed on a specifically designated part of the piezo fixed frame (3050).

[0078] The resolution of the first piezo scanner unit (3040) and the second piezo scanner unit (3070) increases as the vibration amplitude value increases.

[0079] The first piezo scanner unit (3040) and the second piezo scanner unit (3070) can vibrate at a frequency in the range of 5 to 10 kilohertz by the corresponding control signal of the lidar central control unit (1000). If the frequency value is less than 5 kilohertz, the amplitude value is large, so the scan range can be enlarged, but there is a problem that cracks, etc. may occur in the piezo element, resulting in deterioration of characteristics and shortened lifespan. In addition, if the frequency value exceeds 10 kilohertz, the amplitude value is small, so the scan range is reduced, resulting in a problem of reduced practicality. Therefore, it is preferable to use an amplitude value by a frequency in the range of 5 to 10 kilohertz.

[0080] The second piezo plane mirror (3080) is fixedly installed at the other longitudinal end of the second piezo scanner unit (3070) and can receive a laser pulse signal reflected from the first piezo plane mirror (3060) by being reflected by the plane fixed mirror (3030) and reflect it at an angle corresponding to the incident angle.

[0081] Meanwhile, referring to the attached FIG. 6, a laser pulse signal is incident on the first piezo plane mirror (3060), and the incident laser pulse signal is dispersed by a beta angle and reflected by the operation of the first piezo scanner unit (3040), and is dispersed by 2 beta angles and applied to the plane fixed mirror (3030), and is reflected by the plane fixed mirror (3030) without any angle change, and when incident on the second piezo plane mirror (3080), it is dispersed again by 4 beta angles and can be output by the operation of the second piezo scanner unit (3070). That is, the laser light signal incident on the first piezo plane mirror (3060) and the second piezo plane mirror (3080), which are actively rotating mirrors, can be output with a width that is 4 times larger. Therefore, the greater the number of active rotating mirrors, the more light is output, and a wider scan range can be formed.

[0082] And referring to the attached drawing 7, the plane fixed mirror (3030) is one and is formed in a straight line on the same plane, the angle scanned by the first piezo plane mirror (3060) is beta 1, the angle scanned by the second piezo plane mirror (3080) is beta 2, and the scanning continues in succession, and when up to n piezo plane mirrors are additionally installed, the scanning is performed with a wide-angle value formed by adding up all the angle values ​​scanned by each piezo plane mirror, and can be calculated as the value below. Here, the value scanned by each piezo plane mirror (active mirror, movable mirror) is the beta value and scans with the same angle value.

[0083] Total scan angle = 2(beta 1 + beta 2 + … beta n)

[0084] That is, if n piezoelectric flat mirrors are installed, a wide angle can be scanned by a multiple of two of the sum of all angle values ​​scanned by each piezoelectric flat mirror.

[0085] The multi-faceted rotating motor unit (3090) is fixedly installed in a specifically designated portion of the nano-scan housing frame unit (3010) and can rotate the rotation axis at a designated speed by a corresponding control signal from the lidar central control unit (1000). The technology for controlling the rotation speed of the multi-faceted rotating motor unit (3090) to be constant is well known and is widely used in printers, etc.

[0086] The multi-rotation motor unit (3090) may include a step motor that rotates at a rotation speed of 10 to 15 Hz per second and has a rotation angle adjusted in 0.1 degree units by a corresponding control signal of the lidar central control unit (1000).

[0087] The rotary polyhedron (3100) has its central axis fixedly installed on the rotation axis of the rotary polyhedron motor (3090), and multiple flat mirrors of uniform size can be installed evenly at uniform angles on the outer surface of the polyhedron shape. The rotary polyhedron (3100) has a 3-angle, 4-angle, 6-angle, or 8-angle cylindrical shape, and a mirror can be formed on each surface.

[0088] The first laser filter unit (4000) can input a laser pulse signal with an adjusted scan range of the atomic nanoscan unit (3000) and output it by blocking a noisy laser pulse signal.

[0089] The second laser filter unit (5000) can input a laser pulse signal that is reflected from the target object (950) and returned by the laser pulse signal output from the first laser filter unit (4000), but can input the laser pulse signal in a state where the noisy laser pulse signal is blocked.

[0090] The first laser filter unit (4000) and the second laser filter unit (5000) are made of polarizing filters that prevent near-infrared laser pulse signals exceeding a wavelength of 910 nanometers from passing through, and are preferably made of glass material, but since they are heavy, they are preferably made of transparent PET material or industrial transparent plastic.

[0091] The first laser filter unit (4000) and the second laser filter unit (5000) are spray-coated with a filter protection coating solution that blocks the penetration of dust and moisture and inhibits the attachment of foreign substances and bacteria on one side facing the target object (950).

[0092] The filter protection coating solution may contain, for 100 parts by weight of transparent PET, 15 parts by weight of dodecyldimethylbenzylammonium chloride, 15 parts by weight of sulfobetaine chitosan, 10 parts by weight of pyromellitic anhydride, 10 parts by weight of polytetrafluoroethylene, 5 parts by weight of polyphosphate salts, 5 parts by weight of vanadium oxide (V2O5), and 5 parts by weight of titanium dioxide having an average diameter of 100 micrometers. It is preferable that the coating thickness be formed to be 50 to 100 micrometers on average for maintaining properties and extending the lifespan.

[0093] PET (polyethylene terephthalate) has the advantages of high transparency, lightness, softness, high insulation, and excellent heat resistance.

[0094] Dodecyldimethylbenzylammonium chloride has the advantage of improving slipperiness by inducing surface uniformity, thereby preventing surface contamination such as dust from sticking to the surface.

[0095] Sulfobetaine chitosan has the advantage of increasing fixation and adhesion through polymer affinity and strengthening mechanical properties, and enhancing erosion resistance and deformation resistance.

[0096] Pyromellitic dianhydride is a substance with CAS number 89-32-7. It has the advantage of enhancing slip properties, increasing antifouling properties, and improving antistatic properties, thereby suppressing dust adhesion.

[0097] Polytetrafluoroethylene is polyfron PTFE-D (Dispersion) with the structural formula (-CF2-CF2-)n, and has the advantage of improving heat resistance and lubricity, thereby improving mold release properties, and enhancing waterproofing and moisture resistance.

[0098] Polyphosphate salts enhance durability by increasing the surface's tear strength and tensile strength, and have the advantage of enhancing corrosion resistance and water pressure resistance, while vanadium oxide (V2O5) enhances the effects of preventing discoloration due to ultraviolet ray blocking, suppressing warping, and suppressing deformation.

[0099] Titanium dioxide is well known for its self-purification properties, as it decomposes air pollutants including NOx and SOx through its photocatalytic effect and eliminates them while inhibiting the growth of pathogens.

[0100] Sulfur dioxide (SOx) is a chemical produced by the combustion of coal, oil, and fossil fuels. These chemicals exist in the atmosphere and, in the form of fine particles, impact marine ecosystems. They form acid rain, which lowers the pH of the water and significantly impacts the adaptation of marine life. Crustaceans such as shrimp are particularly vulnerable to acidic environments, which can lead to a decline in biodiversity.

[0101] NOx stands for nitrogen oxides, produced by the natural nitrogen cycle and combustion processes in the atmosphere. These pollutants significantly contribute to air pollution and climate change, increase hydrogen ion concentration, and are toxic to marine life. They also affect ozone formation in the atmosphere, impact marine ecosystems, and inhibit photosynthesis and photocatalytic activity.

[0102] The laser focusing unit (6000) receives the laser pulse signal input from the second laser filter unit (5000) and focuses it using a lens combination, thereby increasing the level of the received laser pulse signal.

[0103] The laser focusing unit (6000) can focus a laser pulse signal reflected from a target object (950) by sequentially arranging a convex lens (6010) and a concave lens (6020) each having a focal length of 35 to 50 millimeters for a 905 nanometer wavelength laser signal.

[0104] The photoelectric signal conversion unit (7000) can convert the laser pulse signal output from the laser pulse output unit (2000) into a first voltage signal (t1) and convert the laser pulse signal output from the laser focusing unit (6000) into a second voltage signal (t2) and output them, respectively, according to the corresponding control signal of the lidar central control unit (1000).

[0105] The photoelectric signal conversion unit (7000) may include a laser light distribution unit (7100), a first laser light signal detection unit (7200), a second laser light signal detection unit (7300), a first current-voltage conversion unit (7400), and a second current-voltage conversion unit (7500).

[0106] The laser light distribution unit (7100) can equally divide the optical output of the laser pulse signal output from the laser pulse output unit (2000) into three parts, apply 2 / 3 of the optical output laser pulse signal to the atomic nanoscan unit (3000), and output 1 / 3 of the optical output laser pulse signal to the divided optical path.

[0107] The first laser light signal detection unit (7200) can receive a laser pulse signal applied through a divided optical path from the laser light distribution unit (7100), convert it into a current signal, and output it.

[0108] The second laser light signal detection unit (7300) can receive a laser pulse signal applied from the laser focusing unit (6000), convert it into a current signal, and output it.

[0109] The first laser light signal detection unit (7200) and the second laser light signal detection unit (7300) have the same configuration and include a known APD (avalanche photo diode), and the circuit can be configured so that when an optical signal is input, a current (I, current) corresponding to the intensity of the input optical signal is output (flowed).

[0110] The first current-voltage conversion unit (7400) can convert the current signal applied from the first laser light signal detection unit (7200) into a voltage signal of a level recognized by the laser flight time measurement unit (8000) and apply the voltage signal to the T1 terminal of the laser flight time measurement unit (8000).

[0111] The second current-voltage conversion unit (7500) can convert the current signal applied from the second laser light signal detection unit (7300) into a voltage signal of a level recognized by the laser flight time measurement unit (8000) and apply the voltage signal to the T2 terminal of the laser flight time measurement unit (8000).

[0112] The level of the voltage signal recognized by the T1 terminal and T2 terminal of the laser flight time measuring unit (8000) must be 4.7 volts (V) or higher, so the first current-voltage conversion unit (7400) and the second current-voltage conversion unit (7500) can output the signal by amplifying it to an average voltage of 5 volts, but limiting the voltage level so that it does not exceed 5 volts.

[0113] The laser flight time measuring unit (8000) inputs a first voltage signal (t1) and a second voltage signal (t2) from the photoelectric signal conversion unit (7000), calculates the input time difference value, and extracts and outputs the time value for the flight and return of the laser pulse signal.

[0114] The present invention has the advantage of having a relatively simple lidar configuration, requiring relatively little production time and cost, having excellent resolution, a relatively fast scanning speed, a wide scanning range, applying high-speed, high-resolution atomic microscope scanning technology and existing reliable motor control technology, and using a hybrid optical technology that uses an active mirror to scan a target at high speed with low power consumption and high resolution, and reliably securing a wide range of angle scanning range with excellent resolution at a relatively low cost.

[0115] Although the present invention has been described in detail with respect to the described specific examples, it will be apparent to those skilled in the art that various modifications and variations are possible within the technical scope of the present invention, and it is natural that such modifications and variations fall within the scope of the appended patent claims.

[0116] [Explanation of symbols]

[0117] 900: High-resolution, wide-angle nano-lidar scanner system with multiple active mirror arrays

[0118] 1000: Lidar central control unit 2000: Laser pulse output unit

[0119] 3000: Atomic Nano Scan Section 3010: Nano Scan Housing Frame Section

[0120] 3020: Light-reflecting mirror 3030: Flat fixed mirror

[0121] 3040: 1st piezo scanner section 3050: Piezo fixed frame

[0122] 3060: 1st piezo plane mirror 3070: 2nd piezo scanner unit

[0123] 3080: Second piezo plane mirror 3090: Multi-mirror rotation motor unit

[0124] 3100: Rotating multi-faceted mirror 4000: First laser filter section

[0125] 5000: Second laser filter section 6000: Laser focusing section

[0126] 7000: Photoelectric signal conversion unit 7100: Laser light distribution unit

[0127] 7200: First laser light signal detection unit 7300: Second laser light signal detection unit

[0128] 7400: First current-voltage conversion unit 7500: Second current-voltage conversion unit

[0129] 8000: Laser flight time measurement unit

Claims

1. As a multi-active mirror array high-resolution wide-angle nano lidar scanner system, A lidar central control unit (1000) that connects to each functional unit configured in the lidar, outputs the corresponding control signal according to the built-in installed program and parameters, and monitors and records the operating status; A laser pulse output unit (2000) that outputs a laser pulse signal of a specific frequency at a specific level by a corresponding control signal of the above lidar central control unit (1000); An atomic nanoscan unit (3000) that inputs a laser pulse signal applied from the laser pulse output unit (2000) by a corresponding control signal of the above-mentioned lidar central control unit (1000) and outputs the laser pulse signal by controlling the range scanned by the laser pulse signal by means of a vertical vibration mirror means that actively vibrates vertically and a rotating polygonal mirror means that actively rotates; A first laser filter unit (4000) that inputs a laser pulse signal with an adjusted scan range of the above-mentioned atomic nanoscan unit (3000) and blocks and outputs a noisy laser pulse signal; Multi-active mirror array high-resolution wide-angle nano-lidar scanner system.

2. In paragraph 1, A second laser filter unit (5000) that inputs a laser pulse signal that is reflected from a target object (950) and returns from the first laser filter unit (4000), but inputs the laser pulse signal in a state where the noisy laser pulse signal is blocked; A laser focusing unit (6000) that receives a laser pulse signal input from the second laser filter unit (5000) and focuses it using a lens combination; An optoelectronic signal conversion unit (7000) that converts the laser pulse signal output from the laser pulse output unit (2000) into a first voltage signal (t1) and converts the laser pulse signal output from the laser focusing unit (6000) into a second voltage signal (t2) and outputs them respectively by the corresponding control signal of the lidar central control unit (1000); Further comprising a laser flight time measurement unit (8000) that inputs a first voltage signal (t1) and a second voltage signal (t2) from the photoelectric signal conversion unit (7000), calculates the input time difference value, and outputs it; Multi-active mirror array high-resolution wide-angle nano-lidar scanner system.

3. In paragraph 2, The above photoelectric signal conversion unit (7000) is: A laser light distribution unit (7100) that equally divides the optical output of the laser pulse signal output from the laser pulse output unit (2000) into three parts, applies 2 / 3 of the optical output laser pulse signal to the atomic nanoscan unit (3000), and outputs 1 / 3 of the optical output laser pulse signal to the divided optical path; A first laser light signal detection unit (7200) that receives a laser pulse signal applied through a divided optical path from the above laser light distribution unit (7100), converts it into a current signal, and outputs it; A second laser light signal detection unit (7300) that receives a laser pulse signal applied from the laser focusing unit (6000), converts it into a current signal, and outputs it; A first current-voltage conversion unit (7400) that converts a current signal applied from the first laser light signal detection unit (7200) into a voltage signal of a level recognized by the laser flight time measurement unit (8000) and applies the voltage signal to the T1 terminal of the laser flight time measurement unit (8000); A second current-voltage conversion unit (7500) that converts a current signal applied from the second laser light signal detection unit (7300) into a voltage signal of a level recognized by the laser flight time measurement unit (8000) and applies the voltage signal to the T2 terminal of the laser flight time measurement unit (8000); Multi-active mirror array high-resolution wide-angle nano-lidar scanner system.

4. In paragraph 3, The above atomic nanoscan unit (3000) is: A nano-scan housing frame (3010) in which each functional unit constituting the above-mentioned atomic nano-scan unit (3000) is installed; A light-incident reflection mirror (3020) that is fixedly installed on a side of a specifically designated portion of the above nano-scan housing frame (3010), receives a laser pulse signal output from the laser pulse output unit (2000) and applied via the laser light distribution unit (7100), and reflects the laser pulse signal at an angle corresponding to the incident angle; A flat fixed mirror (3030) having a side fixed to a specifically designated portion of the above nano-scan housing frame (3010), receiving a laser pulse signal applied from the above light-incident reflection mirror (3020), reflecting the signal at an angle corresponding to the incident angle, and having a length longer than the length of the above light-incident reflection mirror (3020); A first piezo scanner unit (3040) that vibrates in the longitudinal direction and whose vibration size and frequency are controlled by the corresponding control signal of the above lidar central control unit (1000); A piezoelectric fixing frame (3050) that is fixedly installed to a specifically designated portion of the above nanoscan housing frame (3010) and has one longitudinal end of the first piezoelectric scanner (3040) fixedly installed to a specifically designated portion; A first piezo plane mirror (3060) fixedly installed at the longitudinal end of the first piezo scanner unit (3040) and receiving a laser pulse signal applied from the light-incident reflecting mirror (3020) and reflecting it at an angle corresponding to the incident angle; A second piezo scanner unit (3070) that vibrates in the longitudinal direction and has one end fixedly installed on a specifically designated part of the piezo fixed frame (3050) while the vibration size and frequency are controlled by the corresponding control signal of the above lidar central control unit (1000); A second piezo plane mirror (3080) fixedly installed at the other longitudinal end of the second piezo scanner unit (3070) and receiving a laser pulse signal reflected from the first piezo plane mirror (3060) by being reflected by the flat fixed mirror (3030) and reflecting it at an angle corresponding to the angle of incidence; A multi-faceted rotating motor unit (3090) that is fixedly installed in a specifically designated part of the above nano-scan housing frame unit (3010) and rotates the rotation axis at a designated speed by a corresponding control signal of the above lidar central control unit (1000); A rotating polyhedral mirror unit (3100) having a central axis fixedly installed on the rotation axis of the above-mentioned polyhedral mirror rotating motor unit (3090) and having a plurality of flat mirrors of uniform size uniformly installed at uniform angles on the outer surface of the polyhedral cylinder shape; Multi-active mirror array high-resolution wide-angle nano-lidar scanner system.

5. In paragraph 4, The first piezo scanner unit (3040) and the second piezo scanner unit (3070) vibrate at a frequency in the range of 5 to 10 kilohertz by the corresponding control signal of the lidar central control unit (1000). Multi-active mirror array high-resolution wide-angle nano-lidar scanner system.

6. In paragraph 5, The above multi-faceted rotation motor unit (3090) includes a step motor that rotates at a speed of 10 to 15 rotations per second and has a rotation angle adjusted in 0.1 degree units by the corresponding control signal of the lidar central control unit (1000). Multi-active mirror array high-resolution wide-angle nano-lidar scanner system.

7. In paragraph 6, The above rotary polygonal section (3100) is a 3-angle, 4-angle, 6-angle or 8-angle cylinder shape. Multi-active mirror array high-resolution wide-angle nano-lidar scanner system.

8. In paragraph 7, The above laser pulse output unit (2000) outputs a near-infrared laser pulse signal with a wavelength of 900 to 910 nanometers at a power level of 25 to 100 watts according to the corresponding control signal of the lidar central control unit (1000). Multi-active mirror array high-resolution wide-angle nano-lidar scanner system.

9. In paragraph 8, The first laser filter unit (4000) and the second laser filter unit (5000) include a polarizing filter that prevents transmission of a near-infrared laser pulse signal exceeding a wavelength of 910 nanometers. Multi-active mirror array high-resolution wide-angle nano-lidar scanner system.

10. In paragraph 9, The above laser focusing unit (6000) is configured such that a convex lens (6010) and a concave lens (6020) having a focal length of 35 to 50 millimeters for a 905 nanometer wavelength laser signal are sequentially arranged to focus a laser pulse signal reflected from an object (950). Multi-active mirror array high-resolution wide-angle nano-lidar scanner system.

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