Mask, evaporation mask assembly, evaporation equipment and method for manufacturing mask

Abstract

The present invention provides a mask, an evaporation mask assembly, an evaporation device and a method for manufacturing a mask, wherein the mask comprises a mask body, on which a shielding portion and a plurality of openings are provided; the mask body comprises two opposite surfaces, wherein a magnetic layer is provided at a predetermined area on at least one of the two opposite surfaces. The present invention can improve the defects such as color mixing and poor uniformity caused by the unevenness of the mask during evaporation, and improve the product yield.

Description

Technical Field

[0001] The present invention relates to the field of display technology, and in particular to a mask plate, an evaporation mask plate assembly, an evaporation device and a method for manufacturing the mask plate. Background Art

[0002] OLED (Organic Light Emission Display) display technology is gradually replacing LCD (Liquid Crystal Display) display due to its advantages in various aspects. The development of OLED display technology has ushered in a golden age. Major OLED display manufacturers continue to launch various disruptive products to attract people's attention.

[0003] In the OLED (Organic Light Emission Display) manufacturing technology, the mask used for vacuum evaporation is a crucial component, and the quality of the mask directly affects the production cost and product quality. The mask used in the OLED evaporation process mainly includes a fine metal mask (FMM for short), which is used to evaporate the light-emitting layer material and form a pixel pattern on the evaporation substrate; an auxiliary support mask is set below the fine metal mask, which is mainly used to support the fine metal mask FMM and define the shape of the display area on the evaporation substrate. The fine metal mask FMM and the support mask are welded on the frame on all four sides.

[0004] In the prior art, the mask plate will sag in local areas due to its own gravity and other reasons. As the PPI (number of pixels) increases, the sagging of the mask plate will cause alignment deviation or shadow increase between the FMM and the vapor deposition substrate (BP Glass), which will greatly cause product display defects such as color mixing and will affect the yield of the entire batch of products.

[0005] In order to reduce defects such as color mixing caused by evaporation, the prior art brings the evaporation substrate into direct close contact with the mask plate, and uses a magnetic field in the equipment to improve the close bonding between the mask plate and the evaporation substrate. However, it is still impossible to avoid defects such as excessive shadow, color mixing, and poor uniformity caused by the sagging of the mask plate.

[0006] In addition, with the emergence of special-shaped display screens, the special-shaped areas of the mask plate are more likely to be partially warped or partially drooped due to their asymmetric shape and uneven force compared to regular areas, which in turn causes serious evaporation color mixing and poor uniformity in that area. Summary of the invention

[0007] The object of the present invention is to provide a mask plate, an evaporation mask plate assembly, an evaporation device and a method for manufacturing a mask plate, which can improve defects such as color mixing and poor uniformity caused by the unevenness of the mask plate during evaporation and improve product yield.

[0008] The technical solution provided by the present invention is as follows:

[0009] A mask plate comprises a mask plate body, on which a shielding portion and a plurality of opening portions are arranged; the mask plate body comprises two opposite surfaces, wherein a magnetic layer is arranged at a predetermined area on at least one of the two opposite surfaces.

[0010] Furthermore, the mask body includes a middle region and an edge region located outside the middle region, wherein the predetermined region includes the middle region of the mask body, and the magnetic layer has an opening pattern corresponding to the opening portion at the middle region.

[0011] Furthermore, the magnetism of the magnetic layer at the center position of the middle region is greater than the magnetism of the magnetic layer at the edge position of the middle region.

[0012] Furthermore, the thickness of the magnetic layer gradually decreases from the center of the middle region to the edge of the middle region, so that the magnetism of the magnetic layer gradually decreases from the center of the middle region to the edge of the middle region.

[0013] Furthermore, the magnetic layer includes multiple layers of magnetic material films sequentially covering the mask body, and the coverage area of ​​each layer of the multiple layers of magnetic material films gradually decreases from the side close to the mask body to the side away from the mask body.

[0014] Furthermore, the shielding portion includes an irregular shielding portion for defining an irregular portion and a rectangular shielding portion for defining a rectangular portion, the irregular shielding portion is connected to the rectangular shielding portion and defines the shape of the opening portion, wherein the predetermined area includes at least a portion of the irregular shielding portion, or the predetermined area includes at least a portion of the rectangular shielding portion adjacent to the irregular shielding portion.

[0015] Furthermore, the mask body includes a plurality of support bars and a plurality of shielding bars, and the plurality of support bars and the plurality of shielding bars are crisscrossed to form the shielding portion and the opening portion, and the magnetic layer is arranged on the support bars and / or the shielding bars.

[0016] A vapor deposition mask assembly, comprising:

[0017] A first mask, wherein the first mask is the mask as described above;

[0018] A second mask plate stacked on the first mask plate, wherein the second mask plate is a fine metal mask plate FMM;

[0019] And, a frame, on which the four edges of the first mask plate and the second mask plate are welded.

[0020] Furthermore, the magnetic layer is disposed on one of the two opposite surfaces of the first mask plate that faces the fine metal mask plate FMM.

[0021] An evaporation device comprises the evaporation mask assembly as described above.

[0022] A method for manufacturing a mask plate, the method is used to manufacture the mask plate as described above, the method comprising: forming a magnetic layer at a predetermined area on at least one of two opposite surfaces of the mask plate body.

[0023] Furthermore, in the method, forming a magnetic layer at a predetermined area on at least one of two opposite surfaces of the mask body specifically includes:

[0024] Forming the mask plate body, the mask plate body having the shielding portion and the opening portion, and the mask plate body comprising a middle area and an edge area located outside the middle area;

[0025] A magnetic material is deposited in the middle region of the mask main body to form the magnetic layer.

[0026] Furthermore, in the method, when the magnetic material is deposited in the middle region of the mask body, the thickness of the magnetic layer gradually decreases from the center of the middle region to the edge of the middle region.

[0027] Furthermore, in the method, when depositing magnetic material in the middle area of ​​the mask body, the method specifically includes:

[0028] Multiple layers of magnetic material films are sequentially deposited in the middle region of the mask body, and the coverage area of ​​each layer of the multiple layers of magnetic material films gradually decreases from the side close to the mask body to the side away from the mask body.

[0029] Furthermore, for manufacturing the mask as described above, the step of forming a magnetic layer at a predetermined area on at least one of two opposite surfaces of the mask body specifically includes:

[0030] forming the mask main body;

[0031] A magnetic material is deposited on at least a portion of the irregular shielding portion of the mask body, or a magnetic material is deposited on at least a portion of the rectangular shielding portion adjacent to the irregular shielding portion, to form the magnetic layer.

[0032] The beneficial effects of the present invention are as follows:

[0033] In the above scheme, by setting a magnetic layer at a local area of ​​the mask, the magnetic force of the magnetic layer can be used to adjust the flatness of the mask, so as to solve the product defects caused by the unevenness of the mask. When the mask provided by the present invention is used in an evaporation device, it can be used as an auxiliary support mask, and is set below the fine metal mask FMM. A magnetic layer is set at a predetermined area of ​​the mask. Under the action of the magnetic field in the evaporation device or under the magnetic force between the magnetic layer of the mask and the fine metal mask FMM, the phenomenon of sagging or warping of the local area of ​​the mask can be improved, and the flatness of the mask can be adjusted, thereby improving the problems of inaccurate alignment, excessive shadow, color mixing, poor uniformity, etc. caused by the unevenness of the mask during the evaporation process. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Figure 1 A schematic structural diagram showing a first embodiment of a mask provided by the present invention;

[0035] Figure 2 A cross-sectional view showing a magnetic layer in a mask provided by a first embodiment of the present invention;

[0036] Figure 3 A schematic structural diagram showing a second embodiment of the mask provided by the present invention;

[0037] Figure 4 A schematic diagram showing a structure in which a special-shaped shielding portion of a mask plate is warped upward during vapor deposition of a special-shaped display screen in the prior art;

[0038] Figure 5 A schematic diagram showing the structure of the mask provided in the second embodiment of the present invention when a magnetic layer is arranged on a rectangular shielding portion adjacent to a special-shaped shielding portion;

[0039] Figure 6 A schematic diagram showing the structure of a mask provided in a second embodiment of the present invention when a magnetic layer is arranged on a special-shaped shielding portion;

[0040] Figure 7 express Figure 5 FIG. 4 is a schematic diagram showing the principle of achieving a flat effect on the mask due to the provision of a magnetic layer. DETAILED DESCRIPTION

[0041] In order to make the purpose, technical solution and advantages of the embodiment of the present invention clearer, the technical solution of the embodiment of the present invention will be clearly and completely described below in conjunction with the drawings of the embodiment of the present invention. Obviously, the described embodiment is a part of the embodiment of the present invention, not all of the embodiments. Based on the described embodiment of the present invention, all other embodiments obtained by ordinary technicians in this field belong to the scope of protection of the present invention.

[0042] like Figures 1 to 6 As shown, the mask provided by the embodiment of the present invention includes a mask body 100, on which a shielding portion 101 and a plurality of opening portions 102 are provided; the mask body 100 includes two opposite surfaces, wherein a magnetic layer 200 is provided in a predetermined area on at least one of the two opposite surfaces.

[0043] In the above solution, by providing the magnetic layer 200 in the local area of ​​the mask, the magnetic force of the magnetic layer 200 can be used to adjust the flatness of the mask, so as to solve the product defect caused by the unevenness of the mask.

[0044] Among them, in the prior art, a fine metal mask FMM is used for evaporation on a display substrate. The fine metal mask FMM has a pattern portion with the same shape as the display pixels on the display substrate. An auxiliary support mask is arranged under the fine metal mask FMM. The auxiliary support mask usually includes a plurality of support bars and a plurality of shielding bars arranged in a criss-cross pattern. The plurality of support bars and the plurality of shielding bars are criss-crossed to form a shielding portion and an opening portion. The shape of the opening portion is used to define the shape of the display area of ​​each display screen. When the auxiliary support mask partially droops or warps, it will cause problems such as inaccurate alignment, excessive shadow, color mixing, and poor uniformity.

[0045] The mask template provided by the present invention can be used as an auxiliary supporting mask template in the evaporation equipment, and is arranged below the fine metal mask template FMM 10 to limit the shape of the display area. A magnetic layer 200 is arranged at a predetermined area on one side of the mask template facing the fine metal mask template FMM. Under the action of the magnetic field in the evaporation equipment, or under the magnetic force between the magnetic layer 200 of the mask template and the fine metal mask template FMM 10, the phenomenon of sagging or warping of local areas of the mask template can be improved, and the flatness of the mask template can be adjusted, thereby improving the problems of inaccurate alignment, excessive shadow, color mixing, poor uniformity, etc. caused by the unevenness of the mask template during the evaporation process.

[0046] Of course, it is understandable that the mask provided by the embodiment of the present invention is not limited to the above-mentioned auxiliary support mask, but may also be other types of mask.

[0047] Two preferred embodiments of the mask provided by the present invention are described below.

[0048] Example 1

[0049] Figure 1 FIG. 1 is a schematic structural diagram of a first embodiment of a mask provided by the present invention.

[0050] like Figure 1 As shown, in this embodiment, the mask body 100 includes a central area and an edge area located outside the central area, wherein the predetermined area includes the central area of ​​the mask body 100, that is, a magnetic layer 200 is provided in the central area of ​​the mask body 100, and the magnetic layer 200 has an opening pattern corresponding to the opening portion 102 at the central area.

[0051] With the above scheme, in the prior art, since the four sides of the mask plate are usually welded to the frame, the mask plate will cause the middle area to sag due to its own gravity. Therefore, in this embodiment, in order to address the phenomenon that the mask plate is uneven due to its own gravity, the magnetic layer 200 is arranged in the middle area of ​​the entire mask plate body, so that the middle area of ​​the mask plate body is attracted by the fine metal mask plate FMM 10 above it under the magnetic force, thereby improving the sagging phenomenon of the middle area, thereby improving the phenomenon that the mask plate and the vapor deposition substrate are not tightly attached and the mask plate is uneven.

[0052] In this embodiment, preferably, the magnetism of the magnetic layer 200 at the center position of the middle region is greater than the magnetism of the magnetic layer 200 at the edge position of the middle region.

[0053] With the above scheme, since the sagging amount of the mask plate in the middle area is greater than that in the edge area and is in the shape of an arc surface, the magnetic layer 200 is preferably designed so that the magnetism at the center position of the middle area is greater than that at the edge position. This ensures that the magnetic field force at the center position of the middle area of ​​the mask plate is greater than the magnetic field force at the edge position, so that the mask plate is flat.

[0054] In addition, in this embodiment, it is further preferred that Figure 1 and Figure 2 As shown, the thickness of the magnetic layer 200 gradually decreases from the center of the middle region to the edge of the middle region, so that the magnetism of the magnetic layer 200 gradually decreases from the center of the middle region to the edge of the middle region.

[0055] By adopting the above scheme, the magnetic layer 200 is made of the same magnetic material, and the magnetic size is controlled by controlling the thickness of the magnetic layer 200. Since the drooping shape of the middle area of ​​the mask is an arc-shaped surface, the thickness of the magnetic layer 200 gradually decreases from the center position of the middle area to the edge position, so that the magnetism of the magnetic layer 200 gradually decreases from the center of the middle area to the edge of the middle area.

[0056] Of course, it is understandable that in the above scheme, the magnetic size is controlled by controlling the thickness of the magnetic layer 200, and the process is relatively simple to implement. In practical applications, the magnetic size of the magnetic layer 200 can also be achieved by other means. For example, the center position of the middle area of ​​the magnetic layer 200 uses a first magnetic material with a larger magnetism, and the edge position uses a second magnetic material with a smaller magnetism. For example, the first magnetic material can be nickel, and the second magnetic material can be iron. The magnetic permeability of the first magnetic material is greater than the magnetic permeability of the second magnetic material.

[0057] In addition, in this embodiment, if Figure 1 and Figure 2 As shown, the magnetic layer 200 includes multiple layers of magnetic material films 201 sequentially covered on the mask body 100, and the coverage area of ​​each layer of the magnetic material film 201 gradually decreases from the side close to the mask body 100 to the side away from the mask body 100.

[0058] By adopting the above solution, the thickness of the magnetic layer 200 is controlled by depositing different numbers of magnetic material films 201 at the center and edge of the magnetic layer 200. Figure 2 As shown, a gradually thinning step-like structure is formed at the edge of the magnetic layer 200. When forming the multi-layer magnetic material film 201, a mask plate can be placed in a chamber and magnetic materials can be deposited in sequence to form the magnetic material film 201. This method is simple in manufacturing process and easy to control.

[0059] It should be understood that, in practical applications, the thickness control of the magnetic layer 200 can also be achieved through other methods, for example: first depositing a magnetic material layer in the middle area of ​​the mask, and then removing a portion of the edge of the magnetic material layer to reduce the thickness of the edge of the magnetic material layer. At this time, the edge of the magnetic layer 200 can be a gradually thinning stepped structure, or a gradually thinning inclined surface or arc-shaped curved surface structure.

[0060] In addition, it should be noted that, in the present embodiment, the mask plate may be an auxiliary support mask plate in the evaporation equipment, which is arranged below the fine metal mask plate FMM. The mask plate and the fine metal mask plate FMM are welded to the frame 300 on all sides. The mask plate may include a plurality of support bars 110 and a plurality of shielding bars 120. The plurality of support bars 110 and the plurality of shielding bars 120 are crisscrossed to form the shielding portion 101 and the opening portion 102. The magnetic layer 200 is arranged on the support bars 110 and the shielding bars 120, and the magnetic layer 200 is arranged on the surface of the mask plate facing the fine metal mask plate FMM 10.

[0061] The method for manufacturing the mask provided in this embodiment may include the following steps:

[0062] Step S1 : forming a magnetic layer 200 at a predetermined area on at least one of two opposite surfaces of the mask main body 100 .

[0063] Wherein, the step S1 specifically includes:

[0064] Step S11, forming the mask plate main body 100, wherein the mask plate main body 100 has the shielding portion 101 and the opening portion 102, and the mask plate main body 100 includes a middle area and an edge area located outside the middle area;

[0065] Step S12 : depositing a magnetic material in the middle region of the mask main body 100 to form the magnetic layer 200 .

[0066] In addition, in the step S12, when the magnetic material is deposited in the middle area of ​​the mask body 100, the thickness of the magnetic layer 200 gradually decreases from the center of the middle area to the edge of the middle area. Specifically, multiple layers of magnetic material films 201 are deposited in the middle area of ​​the mask body 100 in sequence, and the coverage area of ​​each layer of the magnetic material film 201 gradually decreases from the side close to the mask body 100 to the side away from the mask body 100.

[0067] Using the above-mentioned manufacturing method, taking the mask template as an auxiliary supporting mask template as an example, when manufacturing the mask template, first, the shielding strips 120, the supporting strips 110 and the frame 300 are welded to form the mask template body 100; then, the above-mentioned mask template body 100 is placed in the chamber to deposit a multi-layer magnetic material film 201; then, the mask template with the deposited magnetic material is taken out, and the fine metal mask template FMM 10 with a pixel evaporation pattern is welded to the frame 300.

[0068] Example 2

[0069] Figures 3 to 7 FIG. 1 is a schematic structural diagram of a second embodiment of the mask provided by the present invention.

[0070] Before describing the mask structure of this embodiment, it is first necessary to explain that:

[0071] Figure 4 The figure shows a schematic diagram of the structure of the irregular shielding portion of the mask plate tilting upward during the evaporation of the irregular display screen in the prior art. Figure 4 As shown, since there are many small holes (i.e., pixel evaporation patterns) for evaporating organic materials on the fine metal mask FMM 10, in order to realize the special-shaped display, it is necessary to shield the special-shaped part of the display area. In the prior art, the shielding of the special-shaped part is usually achieved by an auxiliary support mask 20 for supporting the fine metal mask FMM 10. The supporting fine metal mask is arranged below the fine metal mask and has a special-shaped shielding portion 21 for shielding the special-shaped part. The organic material is evaporated from below the auxiliary support mask 20. Compared with the conventional shielding portion, the special-shaped shielding portion 21 of the supporting auxiliary mask is asymmetrical in shape and uneven in force, so it is easy for the special-shaped shielding portion 21 to be partially warped or partially drooped, thereby causing serious evaporation color mixing and poor uniformity at this location.

[0072] In view of the problem that the special-shaped shielding part on the auxiliary support mask plate for evaporating the special-shaped display area in the above-mentioned prior art is asymmetrical in shape, unevenly stressed, and easily warped or drooped, in the mask plate provided in this embodiment, as Figure 3 As shown, the shielding portion 101 includes a special-shaped shielding portion 1011 for defining a special-shaped portion 1021 and a rectangular shielding portion 1012 for defining a rectangular portion 1022, wherein the special-shaped shielding portion 1011 is connected to the rectangular shielding portion 1012 and defines the shape of the opening (such as Figure 3 The shape of the opening portion 102 shown in the figure includes a rectangular portion 1022 for forming a rectangular shape and a special-shaped portion 1021 for forming a shape different from a rectangular shape, wherein the predetermined area includes at least a part of the special-shaped shielding portion 1011 ( Figure 6 As shown), or, the predetermined area includes at least a portion of the rectangular shielding portion 1012 adjacent to the irregular shielding portion 1011 ( Figure 5 shown).

[0073] With the above solution, since the fine metal mask FMM 10 is made of metal, by providing a magnetic layer 200 on the mask, the mask and the fine metal mask FMM will attract each other, wherein:

[0074] like Figure 5As shown, when the irregular shielding portion 1011 is warped upward compared to the rectangular shielding portion 1012, the magnetic layer 200 may be provided in the area of ​​the rectangular shielding portion 1012 adjacent to the irregular shielding portion 1011, as shown in FIG. Figure 7 As shown, the magnetic layer 200 is attracted by the fine metal mask FMM 10 above it and moves upward. Since the upturned special-shaped shielding portion 1011 will first contact the fine metal mask FMM 10, when the rectangular shielding portion 1012 moves upward, the upturned special-shaped shielding portion 1011 will be spread to one side, thereby improving the flatness of the special-shaped shielding portion 1011, and finally achieving the effect of the special-shaped shielding portion 1011 and the rectangular shielding portion 1012 of the mask being flat;

[0075] like Figure 6 As shown, when the irregular shielding portion 1011 droops compared to the rectangular shielding portion 1012, the magnetic layer 200 can be set on at least a part of the area of ​​the irregular shielding portion 1011, and the magnetic layer 200 is attracted by the fine metal mask template FMM 10 above it and moves upward. Since the rectangular shielding portion 1012 will first contact the fine metal mask template FMM 10, when the irregular shielding portion 1011 moves upward, the drooping irregular shielding portion 1011 will unfold to one side, and the flatness of the irregular shielding portion 1011 is thereby improved, and ultimately the effect of the irregular shielding portion 1011 and the rectangular shielding portion 1012 of the mask template being flat is achieved.

[0076] In this embodiment, the thickness and coverage area of ​​the magnetic layer 200 can be reasonably set according to the flatness of the mask.

[0077] In a specific embodiment, if Figures 3 to 6 As shown, the rectangular shielding portion 1012 includes at least four side shielding portions for defining the four sides of the rectangle, wherein the special-shaped shielding portion 1011 is protrudingly connected to at least one side shielding portion, and the magnetic layer 200 is arranged on the special-shaped shielding portion 1011, or the magnetic layer 200 is arranged on the side shielding portion where the special-shaped shielding portion 1011 is located.

[0078] In the above scheme, the display area graphic to be evaporated is a rectangular graphic with a protruding block on at least one side, so the special-shaped shielding portion 1011 will protrude from the side shielding portion. When the special-shaped shielding portion 1011 is warped, the magnetic layer 200 is set on the side shielding portion where the special-shaped shielding portion 1011 is located, and when the special-shaped shielding portion 1011 is drooped, the magnetic layer 200 is set on the special-shaped shielding portion 1011.

[0079] It should be noted that, in the mask provided by the present invention, when the shape of the opening portion 102 is an irregular shape, it is not limited to the case where the rectangular side of the shielding portion 101 has a protruding irregular shielding portion 1011. For example, when the shape of the opening portion 102 is a rounded rectangular shape with rounded corners, the irregular shielding portion 1011 is the area corresponding to the rounded corners.

[0080] In addition, it should be noted that, in this embodiment, the mask plate can be used as an auxiliary support mask plate in the evaporation equipment, and is arranged below the fine metal mask plate FMM 10. The mask plate and the fine metal mask plate FMM 10 are welded to the frame 300 on all sides. The mask plate may include a plurality of support bars 110 and a plurality of shielding bars 120. The plurality of support bars 110 and the plurality of shielding bars 120 are crisscrossed to form the shielding portion 101 and the opening portion 102. When the special-shaped shielding portion 1011 is located on the support bar 110, the magnetic layer 200 is arranged on the support bar 110 (such as Figure 3 The figure is a schematic diagram of the structure when the special-shaped shielding portion 1011 is arranged on the supporting bar 110); when the special-shaped shielding portion 1011 is located on the shielding bar 120, the magnetic layer 200 is arranged on the shielding bar 120, and the magnetic layer 200 is arranged on the side of the mask plate facing the fine metal mask plate FMM 10.

[0081] The method for manufacturing the mask provided in this embodiment may include the following steps:

[0082] Step S1 : forming a magnetic layer 200 at a predetermined area on at least one of two opposite surfaces of the mask main body 100 .

[0083] Wherein, the step S1 specifically includes:

[0084] Step S21, forming the mask main body 100;

[0085] Step S22 , depositing magnetic material on at least a portion of the irregular shielding portion 1011 of the mask body 100 , or depositing magnetic material on at least a portion of the rectangular shielding portion 1012 adjacent to the irregular shielding portion 1011 , to form the magnetic layer 200 .

[0086] Using the above-mentioned manufacturing method, taking the mask template as an auxiliary supporting mask template as an example, when manufacturing the mask template, first, the shielding strips 120, the supporting strips 110 and the frame 300 are welded to form the mask template body 100; then, the above-mentioned mask template body 100 is placed in the chamber to deposit the magnetic layer 200; then, the mask template with the deposited magnetic layer 200 is taken out, and the fine metal mask template FMM 10 with a pixel evaporation pattern is welded to the frame 300.

[0087] The above are two preferred embodiments of the mask template provided by the present invention. It should be noted that the embodiments of the mask template provided by the present invention are not limited thereto. The magnetic layer 200 can be reasonably set on a local area of ​​the mask template according to actual conditions. In addition, the mask template is not limited to the auxiliary support mask template used during evaporation, but can also be other types of mask templates. For example, the mask template can also be a mask template used in an etching process.

[0088] In addition, an embodiment of the present invention further provides an evaporation mask assembly, including:

[0089] A first mask plate, wherein the first mask plate is the mask plate provided in an embodiment of the present invention;

[0090] A second mask plate stacked on the first mask plate, wherein the second mask plate is a fine metal mask plate FMM 10;

[0091] And, a frame 300 , on which the four edges of the first mask plate and the second mask plate are welded.

[0092] Preferably, the magnetic layer 200 is disposed on one of the two opposite surfaces of the first mask plate that faces the fine metal mask plate FMM.

[0093] In addition, an embodiment of the present invention further provides an evaporation device, including the above-mentioned evaporation mask assembly.

[0094] Obviously, the evaporation mask template assembly and the evaporation equipment provided by the embodiment of the present invention, by setting a magnetic layer 200 at a predetermined area of ​​the first mask template, can improve the phenomenon of sagging or warping of a local area of ​​the first mask template under the action of the magnetic field in the evaporation equipment, or under the magnetic force between the magnetic layer 200 of the first mask template and the second mask template (fine metal mask template FMM 10), and adjust the flatness of the first mask template, thereby improving the problems of inaccurate alignment, excessive shadow, color mixing, poor uniformity, etc. caused by the unevenness of the first mask template during the evaporation process.

[0095] In addition, an embodiment of the present invention further provides a method for manufacturing a mask plate, corresponding to the mask plate provided in Embodiment 1 of the present invention, the method comprising:

[0096] Step S1 : forming a magnetic layer 200 at a predetermined area on at least one of two opposite surfaces of the mask main body 100 .

[0097] Preferably, the step S1 comprises:

[0098] Step S11, forming the mask plate main body 100, wherein the mask plate main body 100 has the shielding portion 101 and the opening portion 102, and the mask plate main body 100 includes a middle area and an edge area located outside the middle area;

[0099] Step S12 : depositing a magnetic material in the middle region of the mask main body 100 to form the magnetic layer 200 .

[0100] Preferably, in step S12, when the magnetic material is deposited in the middle region of the mask main body 100, the thickness of the magnetic layer 200 gradually decreases from the center of the middle region to the edge of the middle region.

[0101] Further preferably, step S12 specifically includes:

[0102] Multiple layers of magnetic material film 201 are sequentially deposited in the middle area of ​​the mask body 100 , and the coverage area of ​​each layer of magnetic material film 201 gradually decreases from the side close to the mask body 100 to the side away from the mask body 100 .

[0103] The embodiment of the present invention further provides a method for manufacturing a mask plate, corresponding to the mask plate provided in Embodiment 2 of the present invention, the method comprising:

[0104] Step S1 : forming a magnetic layer 200 at a predetermined area on at least one of two opposite surfaces of the mask main body 100 .

[0105] Preferably, the step S1 comprises:

[0106] Step S21, forming the mask main body 100;

[0107] Step S22 , depositing magnetic material on at least a portion of the irregular shielding portion 1011 of the mask body 100 , or depositing magnetic material on at least a portion of the rectangular shielding portion 1012 adjacent to the irregular shielding portion 1011 , to form the magnetic layer 200 .

[0108] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and substitutions can be made without departing from the technical principles of the present invention. These improvements and substitutions should also be regarded as the scope of protection of the present invention.

Claims

1. A mask plate, which is used as an auxiliary support mask plate, and is stacked under a fine metal mask plate FMM to support the fine metal mask plate FMM, and the auxiliary support mask plate is used to define the shape of a display area; the mask plate comprises a mask plate body, and the mask plate body is provided with a shielding portion and a plurality of openings; characterized in that, The mask body includes two opposite surfaces, wherein at least a magnetic layer is provided at a predetermined area on a surface of the two opposite surfaces facing the fine metal mask FMM, and the magnetic layer is configured to improve the phenomenon of sagging or warping of a local area of ​​the mask under the action of a magnetic field in an evaporation device or under the magnetic force between the fine metal mask and the mask; The mask body includes a middle region and an edge region located at the periphery of the middle region, wherein the predetermined region includes the middle region of the mask body, and the magnetic layer has an opening pattern corresponding to the opening portion at the middle region; The shielding portion includes an irregular shielding portion for defining an irregular portion and a rectangular shielding portion for defining a rectangular portion, wherein the irregular shielding portion is connected to the rectangular shielding portion and defines the shape of the opening portion, wherein the predetermined area includes at least a portion of the irregular shielding portion, or the predetermined area includes at least a portion of the rectangular shielding portion adjacent to the irregular shielding portion.

2. The mask according to claim 1, characterized in that: When the predetermined area includes a middle area of ​​the mask main body, the magnetism of the magnetic layer at a center position of the middle area is greater than the magnetism of the magnetic layer at an edge position of the middle area.

3. The mask according to claim 2, characterized in that: The thickness of the magnetic layer gradually decreases from the center of the middle region to the edge of the middle region, so that the magnetism of the magnetic layer gradually decreases from the center of the middle region to the edge of the middle region.

4. The mask according to claim 3, characterized in that: The magnetic layer includes multiple layers of magnetic material films sequentially covering the mask body, and the coverage area of ​​each layer of the multiple layers of magnetic material films gradually decreases from a side close to the mask body to a side far from the mask body.

5. The mask according to claim 1, characterized in that: The mask body includes a plurality of support bars and a plurality of shielding bars, wherein the plurality of support bars and the plurality of shielding bars are crisscrossed to form the shielding portion and the opening portion, and the magnetic layer is arranged on the support bars and / or the shielding bars.

6. A vapor deposition mask assembly, characterized in that: include: A first mask plate, wherein the first mask plate is the mask plate according to any one of claims 1 to 5; A second mask plate stacked on the first mask plate, wherein the second mask plate is a fine metal mask plate FMM; and a frame, on which the edges of the first mask plate and the second mask plate are welded, wherein: The magnetic layer is disposed on one of the two opposite surfaces of the first mask plate that faces the fine metal mask plate FMM.

7. A vapor deposition device, characterized in that: It comprises the evaporation mask assembly as claimed in claim 6.

8. A method for making a mask, characterized in that: The method is used to manufacture the mask according to any one of claims 1 to 5, and the method comprises: A magnetic layer is formed at a predetermined region on at least one of two opposite surfaces of the mask main body.

9. The method according to claim 8, characterized in that In the method, forming a magnetic layer at a predetermined area on at least one of two opposite surfaces of the mask body specifically includes: Forming the mask plate body, the mask plate body having the shielding portion and the opening portion, and the mask plate body comprising a middle area and an edge area located outside the middle area; A magnetic material is deposited in the middle region of the mask main body to form the magnetic layer.

10. The method according to claim 9, characterized in that In the method, when the magnetic material is deposited in the middle region of the mask body, the thickness of the magnetic layer gradually decreases from the center of the middle region to the edge of the middle region.

11. The method according to claim 10, characterized in that In the method, when depositing magnetic material in the middle area of ​​the mask body, the method specifically includes: Multiple layers of magnetic material films are sequentially deposited in the middle region of the mask body, and the coverage area of ​​each layer of the multiple layers of magnetic material films gradually decreases from the side close to the mask body to the side away from the mask body.

12. The method according to claim 8, characterized in that The forming of a magnetic layer at a predetermined area on at least one of the two opposite surfaces of the mask body specifically includes: forming the mask main body; A magnetic material is deposited on at least a portion of the irregular shielding portion of the mask body, or a magnetic material is deposited on at least a portion of the rectangular shielding portion adjacent to the irregular shielding portion, to form the magnetic layer.

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