Single crystal silicon rod transfer device and single crystal silicon rod transfer method

Abstract

The present application discloses a single crystal silicon rod transfer device and a single crystal silicon rod transfer method, the single crystal silicon rod transfer device comprises: a reversing carrier; a silicon rod clamp, which is arranged in the silicon rod clamp area of ​​the reversing carrier; wherein the reversing carrier is driven to make a reversing motion, and the silicon rod clamp on the reversing carrier transfers the single crystal silicon rod from the loading station to the squaring operation station and / or transfers the single crystal silicon cube from the squaring operation station to the unloading station during the reversing motion. In this way, the workpiece can be transferred quickly and conveniently, and the transfer efficiency of the workpiece is improved. In addition, the silicon rod clamp on the reversing carrier has the dual clamping function of the single crystal silicon rod and the single crystal silicon cube, and the clamp can be omitted without increasing the complexity of the structure, thereby increasing the design space of other structures and reducing costs.

Description

Technical Field

[0001] The present application relates to the field of wire cutting technology, and in particular to a single crystal silicon rod transfer device and a single crystal silicon rod transfer method. Background Art

[0002] When manufacturing various semiconductor devices or photovoltaic devices, semiconductor workpieces containing hard and brittle materials such as silicon, sapphire, or ceramics are cut into structures of standard size. Since semiconductor workpiece cutting is an important process that restricts subsequent finished products, the requirements for its operation are becoming increasingly higher. At present, multi-wire cutting technology is widely used in the industry's semiconductor workpiece cutting production due to its high production efficiency, low operating cost, and high operating accuracy.

[0003] Multi-wire cutting technology is currently the most advanced semiconductor workpiece cutting technology in the world. Its principle is to use high-speed moving diamond wire to cut the semiconductor workpiece to form the target product.

[0004] Taking the cutting of crystalline silicon rods as an example, generally speaking, the general operation process includes: first using a cutter to cut the original long silicon rod to form multiple short silicon rods, and then using a squarer to square the cut short silicon rods to form a crystalline silicon cube, and then using a slicer to slice the crystalline silicon cube to obtain a silicon wafer. However, in general, in the relevant technology, the operations required for each process are arranged independently, and the operating equipment is scattered in different production units or production workshops or different production areas of the production workshop. The conversion of workpieces performing different process operations requires transportation and deployment. In this way, the process is complicated and inefficient, requiring more manpower or transfer equipment, and there are great safety hazards. In addition, there are many flow links between the operating equipment of each process, which increases the risk of damage to the workpiece during the transfer of the workpiece, and is prone to non-production factors. Unqualified, reduced product qualification rate and unreasonable losses caused by existing processing methods are major improvement issues faced by various companies. Summary of the invention

[0005] In view of the above-mentioned deficiencies, the purpose of the present application is to disclose a single crystal silicon rod transfer device and a single crystal silicon rod transfer method, which are used to solve the problems of low single crystal silicon rod transfer efficiency and the like existing in the related art.

[0006] To achieve the above-mentioned purpose and other purposes, the present application discloses, on the one hand, a single crystal silicon rod transfer device, which is used in a single crystal silicon rod multi-wire cutting equipment. The single crystal silicon rod multi-wire cutting equipment has a loading station, a squaring operation station, and an unloading station. The single crystal silicon rod transfer device includes: a reversing carrier; a silicon rod clamp, which is arranged in the silicon rod clamp area of ​​the reversing carrier; the reversing carrier is driven to perform a reversing movement, and the silicon rod clamp on the reversing carrier transfers the single wafer silicon rod from the loading station to the squaring operation station and / or transfers the single crystal silicon cube from the squaring operation station to the unloading station during the reversing movement.

[0007] The single crystal silicon rod transfer device disclosed in the present application includes a reversing carrier and a silicon rod clamp arranged on the reversing carrier. The silicon rod clamp can be used to clamp single-wafer silicon rods and single-crystalline silicon cubes. By driving the reversing carrier to perform reversing movement, the silicon rod clamp on the reversing carrier can be switched between a loading station and a squaring station to transfer the single-wafer silicon rod from the loading station to the squaring station and / or switched between the squaring station and the unloading station to transfer the single-crystalline silicon cube from the squaring station to the unloading station. In this way, the workpiece can be transferred quickly and conveniently, thereby improving the transfer efficiency of the workpiece. In addition, the silicon rod clamp on the reversing carrier has the dual clamping function of single-wafer silicon rods and single-crystalline silicon cubes. The clamp can be omitted without increasing the complexity of the structure, thereby increasing the design space of other structures and reducing costs.

[0008] In certain embodiments, the silicon rod clamp comprises: a silicon rod clamp mounting member disposed on the reversing carrier; and at least two silicon rod clamping members disposed along the spacing of the silicon rod clamp mounting member.

[0009] In certain embodiments, the silicon rod clamping member includes: a clamping arm mounting seat, which is provided on the clamp mounting member; two clamping arms, which are movably provided on the clamping arm mounting seat; two clamping teeth arranged opposite to each other are provided on the clamping arm; and a clamping arm driving mechanism, which is used to drive the two clamping arms to open and close; wherein, when the two clamping arms are clamped together under the drive of the clamping arm driving mechanism, the clamping teeth on the two clamping arms are clamped on the cylindrical surface of the single-crystalline silicon rod or the connecting edge surface of the single-crystalline silicon cube.

[0010] In some embodiments, the clamp arm driving mechanism includes: an opening and closing gear, which is provided on the clamp arm; a gear driving member, which has teeth meshing with the opening and closing gear on the clamp arm; and a driving source, which is connected to the gear driving member and is used to drive the gear driving member to move.

[0011] In some embodiments, the gear driving member is a rack, and the opposite sides of the rack are respectively provided with tooth patterns corresponding to the opening and closing gears on the at least two clamping arms; the driving source is a cylinder or a driving motor for driving the rack to move.

[0012] In some embodiments, the gear driving member is a driving gear structure, and the driving source is a driving motor for driving the driving gear structure to operate.

[0013] In certain embodiments, in the silicon rod clamp, at least one of the at least two silicon rod clamps is provided with a guide drive mechanism for driving it to move along the silicon rod clamp mounting member to adjust the spacing between the at least two silicon rod clamps.

[0014] In certain embodiments, the guide drive mechanism includes: a guide screw and a guide motor, wherein one end of the guide screw is connected to the silicon rod clamp, and the other end of the guide screw is connected to the guide motor.

[0015] In certain embodiments, the single crystal silicon rod transfer device further includes a height detector, which is disposed on the reversing carrier and is used to detect the height of the single crystal silicon rod.

[0016] On the other hand, the present application provides a single crystal silicon rod transfer method, which is applied to the single crystal silicon rod transfer device as described above, and the single crystal silicon rod transfer method includes: using a silicon rod clamp in the single crystal silicon rod transfer device to clamp the single crystal silicon rod located at the loading station; driving the reversing carrier to perform reversing movement, so that the silicon rod clamp with the clamped single crystal silicon rod is transferred from the loading station to the squaring operation station; releasing the silicon rod clamp, placing the clamped single crystal silicon rod at the squaring operation station, and performing squaring operation on the single crystal silicon rod at the squaring operation station to form a single crystal silicon cube; using the silicon rod clamp to clamp the single crystal silicon cube located at the squaring operation station; driving the reversing carrier to perform reversing movement, so that the silicon rod clamp with the clamped single crystal silicon cube is transferred from the squaring operation station to the unloading station; releasing the silicon rod clamp, placing the clamped single crystal silicon cube at the unloading station and unloading.

[0017] The single crystal silicon rod transfer method disclosed in the present application first uses a silicon rod clamp to clamp the single wafer silicon rod located at the loading station and transfers the single wafer silicon rod from the loading station to the squaring operation station through reversing movement. Subsequently, the silicon rod clamp is used to clamp the single crystal silicon cube located at the squaring operation station and transfers the single crystal silicon cube from the squaring operation station to the unloading station through reversing movement. Compared with the prior art, the single crystal silicon rod transfer method of the present application improves the efficiency of workpiece transfer, reduces costs and avoids workpiece damage. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a three-dimensional schematic diagram of the single crystal silicon rod transfer device of the present application in a released state.

[0019] Figure 2This is a three-dimensional schematic diagram of the single crystal silicon rod transfer device of the present application in a clamped state.

[0020] Figure 3 This is a schematic diagram of the arrangement relationship between the single crystal silicon rod transfer device and the loading station, the squaring operation station, and the unloading station in one situation.

[0021] Figure 4 This is a schematic diagram of the arrangement relationship between the single crystal silicon rod transfer device of the present application and the loading station, the squaring operation station, and the unloading station in another situation.

[0022] Figure 5 This is a schematic diagram of the arrangement relationship between the single crystal silicon rod transfer device of the present application and the loading station, the squaring operation station, and the unloading station in yet another situation.

[0023] Figure 6 This is a three-dimensional schematic diagram of the single crystal silicon rod transfer device of the present application pre-clamping a single wafer silicon rod in a loosened state.

[0024] Figure 7 for Figure 6 Top view of the .

[0025] Figure 8 This is a three-dimensional schematic diagram of the single crystal silicon rod transfer device of the present application clamping a single wafer silicon rod in a clamped state.

[0026] Fig. 9 for Figure 8 Top view of the .

[0027] Fig.10 This is a three-dimensional schematic diagram of the single crystal silicon rod transfer device of the present application pre-clamping a single crystal silicon cube in a loosened state.

[0028] Fig.11 for Fig.10 Top view of the .

[0029] Fig.12 This is a three-dimensional schematic diagram of the single crystal silicon rod transfer device of the present application clamping a single silicon cube in a clamped state.

[0030] Fig.13 for Fig.12 Top view of the .

[0031] Fig.14 This is a rear cross-sectional view of the silicon rod clamp in the single crystal silicon rod transfer device of the present application.

[0032] Fig.15 FIG. 1 is a schematic diagram of a flow chart of a single crystal silicon rod transporting method according to an embodiment of the present invention.

[0033] Fig.16This is a schematic diagram of the state of the silicon rod clamp in the single crystal silicon rod transfer device corresponding to the single wafer silicon rod on the loading and unloading station.

[0034] Fig.17 This is a schematic diagram of the state in which the silicon rod clamp in the single crystal silicon rod transfer device clamps the single wafer silicon rod located at the loading and unloading station.

[0035] Fig.18 It is a schematic diagram of the state of the silicon rod clamp with the clamped single-wafer silicon rod corresponding to the square cutting operation station after the reversing carrier makes a reversing movement.

[0036] Fig.19 This is a schematic diagram of the state where a single-wafer silicon rod is placed in a square cutting work station after the silicon rod clamp is released.

[0037] Fig. 20 It is a schematic diagram of the state of the silicon rod clamp in the single crystal silicon rod transfer device corresponding to the single crystal silicon cube on the squaring work station.

[0038] Fig.21 This is a schematic diagram of the state in which the silicon rod clamp in the single crystal silicon rod transfer device clamps the single crystal silicon cube located at the squaring work station.

[0039] Fig. 22 It is a schematic diagram of the state of the silicon rod clamp with the clamped single crystal rod cube corresponding to the loading and unloading station after the reversing carrier makes a reversing movement.

[0040] Fig.23 This is a schematic diagram of the state where a single crystal silicon cube is placed in a loading and unloading station after the silicon rod clamp is released. DETAILED DESCRIPTION

[0041] The following is an explanation of the implementation of the present application by means of specific embodiments. People familiar with the art can easily understand other advantages and effects of the present application from the contents disclosed in this specification.

[0042] See also Figures 1 to 14 . It should be noted that the structures, proportions, sizes, etc. illustrated in the drawings of this specification are only used to match the contents disclosed in the specification for people familiar with this technology to understand and read, and are not used to limit the restrictive conditions for the implementation of this application, so they have no substantial technical significance. Any modification of the structure, change in the proportional relationship, or adjustment of the size, without affecting the effects and purposes that can be achieved by this application, should still fall within the scope of the technical content disclosed in this application. At the same time, the terms such as "upper", "lower", "left", "right", "middle" and "one" quoted in this specification are only for the convenience of description, and are not used to limit the scope of the implementation of this application. Changes or adjustments in their relative relationships should also be regarded as the scope of the implementation of this application without substantially changing the technical content.

[0043] The inventor of the present application has found that in the relevant cutting operation technology for crystal silicon rods, each operation involved is arranged independently, and the operation equipment is scattered in different production units or production workshops or different production areas of production workshops. The conversion of crystal silicon rods performing different process operations requires transfer and deployment, and there are problems such as complicated processes, complex structure of transfer devices, and low transfer efficiency. In view of this, the inventor of the present application has provided a single crystal silicon rod transfer device and a single crystal silicon rod transfer method that can at least achieve fast and stable operation through equipment modification. In this way, the single crystal silicon rod transfer device can complete the transfer of crystal silicon rods of different forms while occupying a certain space, simplifying the structure of the single crystal silicon rod transfer device, reducing the transfer process, improving the efficiency of workpiece transfer, reducing costs, and avoiding workpiece damage.

[0044] See also Figure 1 to Figure 2 , is a schematic diagram of the structure of the single crystal silicon rod transport device in one embodiment of the present application, wherein: Figure 1 This is a three-dimensional schematic diagram of the single crystal silicon rod transfer device of this application in a loosened state. Figure 2 This is a three-dimensional schematic diagram of the single crystal silicon rod transfer device of the present application in a clamped state.

[0045] The single crystal silicon rod transfer device of the present application is applied to the single crystal silicon rod multi-wire cutting equipment, and is used to cut the single crystal silicon rod to form a compliant structure. In this embodiment, the single crystal silicon multi-wire cutting equipment can be, for example, a single crystal silicon rod squaring equipment, which is used to square the single crystal silicon rod, that is, to square the cylindrical single crystal silicon rod to form a single crystal silicon cube with a rectangular cross section. Further, the single crystal silicon rod multi-wire cutting equipment has at least a loading station, a squaring operation station, and a unloading station. The loading station is used to load the single crystal silicon rod, the squaring operation station is used to at least square the single crystal silicon rod to form a single crystal silicon cube, and the unloading station is used to unload the single crystal silicon cube. The single crystal silicon rod transfer device is used to transfer the single crystal silicon rod between the loading station and the squaring operation station and / or transfer the single crystal silicon cube between the squaring operation station and the unloading station.

[0046] like Figure 1 and Figure 2 As shown, the single crystal silicon rod transfer device disclosed in the present application includes: a reversing carrier 11 and a silicon rod clamp 13, wherein the silicon rod clamp 13 is configured on the reversing carrier 11, and by driving the reversing carrier 11 to perform reversing movement, the configured silicon rod clamp 13 can be switched between the loading station and the squaring operation station to transfer the clamped single wafer silicon rod and / or switched between the squaring operation station and the unloading station to transfer the clamped single crystal silicon cube.

[0047] The reversing carrier 11 is a main device for setting up other various components in the single crystal silicon rod transport device. The other various components may mainly include the silicon rod clamp 13, but are not limited thereto. Other components may also be, for example, mechanical structures, electrical control systems, and numerical control equipment. In this embodiment, the reversing carrier 11 may include a base 111, a top frame 113 opposite to the base 111, and a support structure provided between the base 111 and the top frame 113. In addition, another important function of the reversing carrier 11 is to support the reversing conversion of the silicon rod clamp 13 through reversing movement. The reversing carrier 11 may, for example, perform reversing movement through a reversing mechanism. In a specific implementation, the reversing mechanism that enables the reversing carrier 11 to achieve reversing motion may include a rotating shaft and a rotating motor (not shown). The reversing carrier 11 is connected to the mounting base below it through the rotating shaft (the mounting base may be, for example, the base of a multi-wire cutting device or the working platform of a multi-wire cutting device). The connecting end of the rotating shaft for connecting with the reversing carrier 11 may be provided with an outwardly expanded mounting edge, on which mounting holes are evenly arranged. Correspondingly, a mounting hole is also provided at the central position of the base 111 in the reversing carrier 11. During installation, the base 111 in the reversing carrier 11 is docked with the rotating shaft, and the mounting holes on the base 111 are aligned with the mounting holes on the rotating shaft. Afterwards, locking elements such as bolts penetrate the aligned mounting holes and are locked to complete the assembly of the reversing carrier 11. When implementing the steering motion, the rotating motor is started to drive the rotating shaft to rotate so as to drive the reversing carrier 11 to rotate to achieve the reversing motion. The aforementioned driving shaft rotation can be designed as unidirectional rotation or bidirectional rotation. The unidirectional rotation can be, for example, clockwise rotation or counterclockwise rotation, and the bidirectional rotation can be, for example, clockwise rotation and counterclockwise rotation. In addition, the angle of rotation of the driving shaft can be set according to the actual structure of the single crystal silicon rod transfer device (for example: according to the structure of the reversing carrier 11, the positional relationship between the silicon rod clamp 13 disposed on the reversing carrier 11 and the loading station or unloading station, etc.). Furthermore, the base 111 in the reversing carrier 11 can adopt a disc structure, a square disc or an elliptical disc, and its central position is connected to the rotating shaft, but the shape of the base 111 is not limited thereto. In other embodiments, the base 111 can also adopt other shapes.

[0048] At least one silicon rod clamp 13 is arranged on the reversing carrier 11 for clamping the corresponding workpiece. In the present embodiment, it is assumed that the silicon rod clamp 13 is arranged in the silicon rod clamp area of ​​the reversing carrier 11, which can be used to clamp the single-wafer silicon rod and the single-crystalline silicon cube. In this way, by driving the reversing carrier 11 to perform reversing motion, the silicon rod clamp 13 on the reversing carrier 11 is switched between the loading station and the squaring operation station to transport the single-wafer silicon rod and is switched between the squaring operation station and the unloading station to transport the single-crystalline silicon cube. In practical applications, the rotation angle of the reversing carrier 11 for reversing motion is determined according to the positional relationship between the loading station, the squaring operation station, and the unloading station. For example: In one case, the loading station, the squaring operation station, and the unloading station are arranged in sequence and they are distributed at 120° between each other (see Figure 3 , which is a schematic diagram of the setting relationship between the single crystal silicon rod transfer device and the loading station, the squaring operation station, and the unloading station in one situation), assuming that the silicon rod clamp 13 on the reversing carrier 11 corresponds to the loading station 200 in the initial state, the silicon rod clamp 13 can be transferred from the loading station 200 to the squaring operation station 300 by driving the reversing carrier 11 to rotate forward by 120°, and the silicon rod clamp 13 can be transferred from the squaring operation station 300 to the unloading operation station 400 by driving the reversing carrier 11 to rotate forward by 120° again, and the silicon rod clamp 13 can be transferred from the unloading operation station 400 to the loading station 200 by driving the reversing carrier 11 to rotate forward by 120° again. In another case, the loading station, the square cutting station, and the unloading station are arranged in sequence and the loading station is 180° away from the square cutting station and the square cutting station is 90° away from the unloading station (see Figure 4 , which is a schematic diagram of the setting relationship between the single crystal silicon rod transfer device and the loading station, the squaring operation station, and the unloading station in another situation), assuming that the silicon rod clamp 13 on the reversing carrier 11 corresponds to the loading station 200 in the initial state, the silicon rod clamp 13 can be transferred from the loading station 200 to the squaring operation station 300 by driving the reversing carrier 11 to rotate 180° forward, and the silicon rod clamp 13 can be transferred from the squaring operation station 300 to the unloading operation station 400 by driving the reversing carrier 11 to rotate 90° forward, and the silicon rod clamp 13 can be transferred from the unloading operation station 400 to the loading station 200 by driving the reversing carrier 11 to rotate 90° forward. In another case, the loading station and the unloading station are located at the same place and can be called the loading and unloading station, which can be used for both loading and unloading. The loading and unloading station 200 (400) is arranged opposite to the square opening operation station 300, and the difference between the two can be 180 degrees (see Figure 5, which is a schematic diagram of the setting relationship between the single crystal silicon rod transfer device and the loading station, the squaring operation station, and the unloading station in another situation), assuming that the silicon rod clamp 13 on the reversing carrier 11 corresponds to the loading and unloading station 200 (400) in the initial state, the silicon rod clamp 13 can be transferred from the loading and unloading station 200 (400) to the squaring operation station 300 by driving the reversing carrier 11 to rotate 180° in the forward direction, and the silicon rod clamp 13 can be transferred from the squaring operation station 300 to the loading and unloading operation station 200 (400) by driving the reversing carrier 11 to rotate 180° in the forward direction. In each of the above situations, the forward rotation specifically refers to the rotation direction according to the setting order of the loading station, the squaring operation station, and the unloading station, and the rotation opposite to the forward rotation is called reverse rotation. Specifically, if the loading station, the squaring station, and the unloading station are arranged in a clockwise order, then the forward rotation is clockwise rotation, and the counterclockwise rotation is reverse rotation; if the loading station, the squaring station, and the unloading station are arranged in a counterclockwise order, then the forward rotation is counterclockwise rotation, and the clockwise rotation is reverse rotation. However, in any case, there is no specific restriction on the setting relationship between the loading station, the squaring station, and the unloading station, and their setting order and the setting angles between them can still be changed in other ways, as long as it is ensured that no unnecessary interference will occur between the stations. In this way, the rotation direction and rotation angle of the silicon rod clamp 13 on the reversing carrier 11 will also be adaptively adjusted.

[0049] As mentioned above, the single crystal silicon rod transfer device of the present application is applied to the single crystal silicon rod multi-wire cutting equipment, and the cutting operation of the single crystal silicon rod by the single crystal silicon rod multi-wire cutting equipment on the single crystal silicon rod at least includes the squaring operation of the single crystal silicon rod, and through the squaring operation, the cylindrical single crystal silicon rod can be formed into a single crystal silicon cube with a rectangular cross section after the squaring operation. Therefore, the silicon rod clamp 13 in the present application can be realized to clamp both the single crystal silicon rod and the single crystal silicon cube.

[0050] The silicon rod fixture 13 is described in detail below.

[0051] The silicon rod clamp 13 further includes a silicon rod clamp mounting member 131 and at least two silicon rod clamping members 132, wherein the at least two silicon rod clamping members 132 are spaced apart relative to the silicon rod clamp mounting member 131. In one embodiment, the clamped single-wafer silicon rod is placed vertically whether it is at the loading station or the squaring station or the clamped single-crystal silicon cube is placed vertically whether it is at the development station or the unloading station, therefore, the at least two silicon rod clamping members 132 are spaced apart in the vertical direction relative to the silicon rod clamp mounting member 131, that is, the at least two silicon rod clamping members 132 are arranged up and down.

[0052] In a specific implementation, any silicon rod clamp 132 further includes: a clamp arm mounting seat 133 and at least two clamp arms 134, wherein the clamp arm mounting seat 133 is arranged on the silicon rod clamp mounting member 131, and at least two clamp arms 134 are movably arranged on the clamp arm mounting seat 133. In an optional embodiment, there are two clamp arms 134 constituting the silicon rod clamp 132, and the two clamp arms 134 are arranged symmetrically on the left and right, and a single clamp arm 134 is provided with two clamp teeth 130 arranged front and back, so that the clamp teeth 130 (a total of four) on the two clamp arms 134 can form a clamping space for clamping a single-wafer silicon rod or a single-crystal silicon cube. In particular, for the single-crystal silicon cube 102, the four clamp teeth 130 in the two clamp arms 134 are clamped on the four connecting edges of the single-crystal silicon cube 102 respectively. Preferably, a first connecting line formed by the two clamping teeth 130 on the first clamping arm 134 and a second connecting line formed by the two clamping teeth 130 on the second clamping arm 134 are parallel to each other, and a third connecting line formed by the inner clamping teeth 130 on the first clamping arm 134 (the clamping teeth 130 are close to the reversing carrier 11) and the inner clamping teeth 130 on the second clamping arm 134 (the clamping teeth 130 are close to the reversing carrier 11) and a fourth connecting line formed by the outer clamping teeth 130 on the first clamping arm 134 (the clamping teeth 130 are far away from the reversing carrier 11) and the outer clamping teeth 130 on the second clamping arm 134 (the clamping teeth 130 are far away from the reversing carrier 11) are parallel to each other. Furthermore, in order to clamp the single-wafer silicon rod and the single-crystal silicon cube, when the two clamping arms 134 are in the clamping state of clamping the single-wafer silicon rod or the single-crystal silicon cube, the fifth connecting line formed by the inner clamping teeth 130 on the first clamping arm 134 (the clamping teeth 130 are close to the reversing carrier 11) and the outer clamping teeth 130 on the second clamping arm 134 (the clamping teeth 130 are far away from the reversing carrier 11) and the sixth connecting line formed by the outer clamping teeth 130 on the first clamping arm 134 (the clamping teeth 130 are far away from the reversing carrier 11) and the inner clamping teeth 130 on the second clamping arm 134 (the clamping teeth 130 are close to the reversing carrier 11) are orthogonal to each other. In addition, the silicon rod clamping member 132 can also have the function of centering adjustment. In general, when the clamping arms 134 in the silicon rod clamping member 132 are in the clamped state, the center of the clamping space formed by the two clamping arms 134 coincides with the center of the single-wafer silicon rod or the center of the single-crystal silicon cube. Therefore, when the silicon rod clamping member 132 is used to clamp the vertically placed single-wafer silicon rod 101 or the single-crystal silicon cube 102, the two clamping arms 134 in the silicon rod clamping member 132 are contracted, and the clamping teeth 130 in the clamping arms 134 are pressed against the single-wafer silicon rod 101 or the single-crystal silicon cube 102.In the process of the clamping arms 134 contracting and clamping the single-wafer silicon rod 101 or the single-crystal silicon cube 102, the single-wafer silicon rod 101 or the single-crystal silicon cube 102 is pushed by the two clamping arms 134 on both sides and moves toward the central area of ​​the clamping space until the single-wafer silicon rod 101 or the single-crystal silicon cube 102 is clamped by the two clamping arms 134 in the silicon rod clamp 132. At this time, the center of the single-wafer silicon rod 101 or the single-crystal silicon cube 102 can be located at the center of the clamping space of the silicon rod clamp 132. Of course, additional buffer components can be added to the clamping teeth 130 in the clamping arms 134 to avoid damage to the surface of the single-wafer silicon rod 101 or the single-crystal silicon cube 102 during the process of clamping, thereby protecting the single-wafer silicon rod 101 or the single-crystal silicon cube 102. For the single-wafer silicon rod 101, please refer to. Figures 6 to 9 ,in, Figure 6 This is a three-dimensional schematic diagram of the single crystal silicon rod transfer device of the present application pre-clamping a single wafer silicon rod in a loose state. Figure 7 for Figure 6 A top view of Figure 8 This is a three-dimensional schematic diagram of the single crystal silicon rod transfer device of the present application clamping a single wafer silicon rod in a clamped state. Fig. 9 for Figure 8 For the single-wafer silicon rod 102, please refer to Figures 10 to 13 ,in, Fig.10 This is a three-dimensional schematic diagram of the single crystal silicon rod transfer device of the present application pre-clamping a single crystal silicon cube in a loose state. Fig.11 for Fig.10 A top view of Fig.12 This is a three-dimensional schematic diagram of the single crystal silicon rod transfer device of the present application clamping a single silicon cube in a clamped state. Fig.13 for Fig.12 Top view of the .

[0053] In order to enable at least two clamping arms 134 in the silicon rod clamp 132 to smoothly and firmly clamp single-wafer silicon rods 101 or single-crystal silicon cubes 102 of different sizes, the silicon rod clamp 132 also includes a clamping arm driving mechanism for driving at least two clamping arms 134 to open and close.

[0054] See also Fig.14 , which is a rear cross-sectional view of the silicon rod fixture 13. In a specific implementation, Fig.14As shown, the clamp arm driving mechanism further includes: an opening and closing gear 135, a gear driving member 136, and a driving source 137. The opening and closing gear 135 is arranged on the corresponding clamp arm 134. The gear driving member 136 has a tooth pattern that meshes with the opening and closing gear 135 on the clamp arm 134. The driving source is connected to the gear driving member 136 and is used to drive the gear driving member 136 to move. In one implementation, the gear driving member 136 is a rack, and the rack 136 is located in the middle of the two clamp arms 134. The two outer surfaces of the rack 136 facing the clamp arms 134 on both sides are respectively provided with tooth patterns corresponding to the opening and closing gears 135 on the two clamp arms 134. The driving source 137 can be, for example, a driving motor or a cylinder. In this way, according to the above implementation method, in actual application, when the clamping arm 134 needs to be clamped, the rack 136 as the gear driving member is driven upward by the driving motor or cylinder as the driving source, and the rack 136 drives the opening and closing gears 135 meshing on both sides to rotate outward. During the outward rotation, the opening and closing gear 135 drives the clamping arm 134 (the opening and closing gear 135 and the clamping arm 134 can be connected by a rotating shaft) to lower the clamping arm 134 to change from a loose state to a clamping state; conversely, when the clamping arm 134 needs to be loosened, the rack 136 as the gear driving member is driven downward by the driving motor (or cylinder) as the driving source, and the rack 136 drives the opening and closing gears 135 meshing on both sides to rotate inward. During the inward rotation, the opening and closing gear 135 drives the clamping arm 134 (the opening and closing gear 135 and the clamping arm 134 can be connected by a rotating shaft) to rise to change from a clamping state to a loose state. Of course, the above is only one embodiment and is not used to limit the working state of the silicon rod clamp 132. In fact, the aforementioned "upward", "outward rotation", "lowering", "downward", "inward rotation", "upward", as well as "loosening" and "clamping" state changes can be subject to other changes according to the structure and operation mode of the clamping arm 134 and the structure of the clamping arm driving mechanism.

[0055] As known to those skilled in the art, single-crystalline silicon rods are formed by cutting the original long silicon rods, which will inevitably lead to significant size differences between the single-crystalline silicon rods. Since the silicon rod clamp 13 is used to clamp the single-crystalline silicon rod 101 in an upright state, the impact of the aforementioned size difference on the silicon rod clamp 13 is mainly reflected in the length difference of the single-crystalline silicon rod and the concern about whether the silicon rod clamp 132 in the silicon rod clamp 13 can clamp the single-crystalline silicon rod.

[0056] In order to reduce or even eliminate the risk that the silicon rod clamping member 132 may fail to clamp the single-wafer silicon rod, the silicon rod clamp 13 may have different design solutions.

[0057] In one implementation, the silicon rod clamp 13 uses a fixed clamp, that is, as many silicon rod clamps as possible are fixedly arranged vertically on the reversing carrier 11, and the distance between two adjacent silicon rod clamps 132 among these silicon rod clamps 132 is as small as possible, so that these silicon rod clamps 132 can cover single-wafer silicon rods of various specifications and lengths. For example, if the length of the single-wafer silicon rod is longer, more silicon rod clamps 132 on the reversing carrier 11 are used to participate in the clamping; if the length of the single-wafer silicon rod is shorter, fewer silicon rod clamps 132 on the reversing carrier 11 are used to participate in the clamping, for example, several silicon rod clamps 132 located at the bottom participate in the clamping, while those silicon rod clamps 132 located at the top and higher than the single-wafer silicon rod do not participate.

[0058] In other implementations, the silicon rod clamp 13 uses a movable clamp, that is, a silicon rod clamp 132 is movably arranged vertically on the mounting surface of the reversing carrier 11. Since the silicon rod clamp 132 is a movable design, the number of silicon rod clamps 132 can be greatly reduced, and generally two or three are sufficient. In this way, the use of movable clamps can cover single-wafer silicon rods of various specifications and lengths. For example, if the length of the single-wafer silicon rod is longer, the movably arranged silicon rod clamp 132 is moved to extend the clamping distance between the two silicon rod clamps 132; if the length of the single-wafer silicon rod is shorter, the movably arranged silicon rod clamp 132 is moved to shorten the clamping distance between the two silicon rod clamps 132. In the implementation method of the silicon rod clamp 13 using a movable clamp, in order to facilitate the smooth and stable up and down movement of the movable clamp to adjust the position, the silicon rod clamp mounting member 131 in the silicon rod clamp 13 can be used to guide the movable silicon rod clamp 132. In one achievable method, the silicon rod clamp mounting member 131 can adopt a guide column structure, and the clamp arm mounting seat 133 adopts a movable block structure sleeved on the guide column structure. Specifically, the guide column structure as the silicon rod clamp mounting member 131 includes two guide columns arranged vertically and in parallel, and the movable block structure as the clamp arm mounting seat 133 is provided with two through holes or two clips corresponding to the two guide columns in the guide column structure. If a through hole is used, the movable block is sleeved on the guide column and can slide along the guide column. If a clip is used, the movable block is clipped on the guide column and can slide along the guide column, wherein, in practical applications, the clip can be clipped on at least half of the guide column.

[0059] There are also different variations of the silicon rod clamp 13 with movable silicon rod clamps. Taking two silicon rod clamps 132 as an example, in an optional embodiment, one of the two silicon rod clamps 132 is a movable design and the other silicon rod clamp 132 is a fixed design. In this way, in actual applications, the clamping distance between the silicon rod clamp 132 with a movable design and the silicon rod clamp 132 with a fixed design is adjusted by moving the movable silicon rod clamp 132. As can be seen from the above, the single-wafer silicon rod 101 is placed vertically. Therefore, regardless of the specification length of the single-wafer silicon rod, the bottom of the single-wafer silicon rod 101 can always be relatively easy to determine. Therefore, preferably, the upper silicon rod clamp 132 of the two silicon rod clamps 132 can be designed to be movable. In this way, only the position of the upper silicon rod clamp 132 needs to be adjusted.

[0060] In order to realize the movement of the silicon rod clamp 132, the movable silicon rod clamp 132 may be provided with a guide drive mechanism. The movable silicon rod clamp 132 may be driven to move up and down along the silicon rod clamp mounting member 131 by the guide drive mechanism. In one implementation, the guide drive mechanism may, for example, include: a guide screw 138 and a guide motor 139, wherein the guide screw 138 is vertically arranged, one end of the guide screw 138 is connected to the clamp arm mounting seat 133, and the other end of the guide screw 138 is connected to the guide motor 139, and the guide motor 139 may be arranged at the top of the reversing carrier 11, but it is not limited thereto, and the guide motor 139 may also be arranged at the bottom of the reversing carrier 11. The guide screw 138 has the characteristics of high precision, reversibility and high efficiency. Thus, when the position of the upper silicon rod clamp 132 needs to be adjusted, the guide motor 139 drives the guide screw 138 to rotate, and the guide screw 138 drives the upper silicon rod clamp 132 to move up and down along the silicon rod clamp mounting member 131 during the rotation process. For example: the guide motor 139 drives the guide screw 138 to rotate clockwise, which drives the upper silicon rod clamp 132 to move upward along the silicon rod clamp mounting member 131 to move away from the lower silicon rod clamp 132, thereby increasing the clamping distance between the two silicon rod clamps 132; the guide motor 139 drives the guide screw 138 to rotate counterclockwise, which drives the upper silicon rod clamp 132 to move downward along the silicon rod clamp mounting member 131 to move closer to the lower silicon rod clamp 132, thereby reducing the clamping distance between the two silicon rod clamps 132. In this way, by controlling the movable silicon rod clamping member 132 , the clamping distance between the two silicon rod clamping members 132 can be adjusted, thereby effectively clamping the single-wafer silicon rods 101 of different specifications and lengths.

[0061] In another optional embodiment, both silicon rod clamps 132 are of movable design, so that in actual application, the clamping distance between them can be adjusted by moving the two silicon rod clamps 132 of movable design. Since the silicon rod clamps 132 are of movable design, at least one of the two silicon rod clamps 132 needs to be provided with a guide drive mechanism for driving the two silicon rod clamps 132 to move along the silicon rod clamp mounting member 131. Compared with the previous optional embodiment, in this optional embodiment, since both silicon rod clamps 132 in the silicon rod clamp 13 are of movable design, there will be a situation where a guide drive mechanism is provided on one of the two silicon rod clamps 132 or a guide drive mechanism is provided on both silicon rod clamps 132.

[0062] Now, for example, the guide drive mechanism is provided in the upper silicon rod clamp 132 of the two silicon rod clamps 132. In this case, on the one hand, the clamp arm mounting seat 133 in the two silicon rod clamps 132 is movably connected to the silicon rod clamp mounting member 131, that is, the clamp arm mounting seat 133 and the clamp arm 134 thereon in any silicon rod clamp 132 move up and down along the silicon rod clamp mounting member 131. In addition, the guide drive mechanism includes a guide screw 138 and a guide motor 139, wherein one end of the guide screw 138 is connected to the clamp arm mounting seat 133 in the upper silicon rod clamp 132, and the other end of the guide screw 138 is connected to the guide motor. The guide motor 139 can be arranged on the top of the reversing carrier 11. In this way, when the position of the upper silicon rod clamp 132 needs to be adjusted, the guide motor 139 drives the guide screw 138 to rotate, and the guide screw 138 drives the silicon rod clamp 132 to move up and down along the silicon rod clamp mounting part 131 during the rotation process. For example: the guide motor 139 drives the guide screw 138 to rotate clockwise, which drives the upper silicon rod clamp 132 to move upward along the silicon rod clamp mounting part 131 to move away from the lower silicon rod clamp 132, thereby increasing the clamping distance between the two silicon rod clamps 132; the guide motor 139 drives the guide screw 138 to rotate in the opposite direction, which drives the upper silicon rod clamp 132 to move downward along the silicon rod clamp mounting part 131 to move closer to the lower silicon rod clamp 132, thereby reducing the clamping distance between the two silicon rod clamps 132. In this way, by controlling the movable silicon rod clamping member 132 , the clamping distance between the two silicon rod clamping members 132 can be adjusted, thereby effectively clamping the single-wafer silicon rods 101 of different specifications and lengths.

[0063] In fact, when both silicon rod clamps 132 are of movable design, the guide drive mechanism can not only adjust the clamping distance between the two silicon rod clamps 132 to effectively clamp single-wafer silicon rods 101 of different specifications and lengths, but also achieve the purpose of lifting and lowering the clamped single-wafer silicon rod 101. After the two silicon rod clamps 132 effectively clamp the single-wafer silicon rod 101, the single-wafer silicon rod 101 is lifted and lowered by driving the silicon rod clamps 132 to move up and down. Specifically, still taking the upper silicon rod clamping piece 132 provided with a guide driving mechanism as an example, first, the upper silicon rod clamping piece 132 is moved up and down along the silicon rod clamp mounting piece 131 by the guide driving mechanism to adjust the clamping distance between the upper silicon rod clamping piece 132 and the lower silicon rod clamping piece 132; then, the clamping arm driving mechanism in each silicon rod clamping piece 132 is used to drive the corresponding two clamping arms 134 to perform a clamping action to clamp the single-wafer silicon rod 101 smoothly and firmly; then, the upper silicon rod clamping piece 132 is driven by the guide driving mechanism to Move upward along the silicon rod clamp mounting part 131. At this time, due to the friction force, the clamped single-wafer silicon rod 101 and the silicon rod clamp 132 below move upward together. The upward movement of the clamped single-wafer silicon rod 101 utilizes the friction force between the upper silicon rod clamp 132 and the single-wafer silicon rod 101, and the upward movement of the silicon rod clamp 132 utilizes the friction force between the single-wafer silicon rod 101 and the lower silicon rod clamp 132, thereby achieving the effect of lifting the single-wafer silicon rod 101. The upper silicon rod clamp 132 drives the single-wafer silicon rod 101 and the lower silicon rod clamp 132 to move downward under the drive of the guide drive mechanism, which is also the same process, thereby achieving the effect of dropping the single-wafer silicon rod 101, which will not be repeated here.

[0064] It should be noted that in other variations, for example, a guide drive mechanism is provided on the lower silicon rod clamp 132 of the two silicon rod clamps 132, and the structure, setting mode and driving working mode of the guide drive mechanism are similar to the guide drive mechanism of the upper silicon rod clamp 132, for example, the lower silicon rod clamp 132 is driven by the guide drive mechanism to move up and down along the silicon rod clamp mounting member 131 to adjust the clamping distance between the lower silicon rod clamp 132 and the upper silicon rod clamp 132, and the lower silicon rod clamp 132 is driven by the guide drive mechanism to drive the single-wafer silicon rod 101 and the upper silicon rod clamp 132 to move up and down along the silicon rod clamp mounting member 131. For another example, if both silicon rod clamps 132 are provided with guide drive mechanisms, the setting mode and driving working mode of the guide drive mechanism and the movement mode of the two silicon rod clamps 132 are self-evident and will not be repeated here.

[0065] In the case where the movable silicon rod clamp 132 moves up and down along the silicon rod clamp mounting member 131 to adapt to the single-wafer silicon rods of different specifications and lengths for clamping, in addition to the silicon rod clamp 132 adopting a movable structural design and the silicon rod clamp 132 needing to be provided with a guide drive mechanism, it is necessary to know the specification length of the single-wafer silicon rod that needs to be clamped. In view of this, the single-crystal silicon rod transport device in the present application may also include a height detector (not shown in the figure) for the height of the vertically placed single-wafer silicon rod, so as to serve as a basis for the subsequent upward or downward movement and movement distance of the movable silicon rod clamp 132 along the silicon rod clamp mounting member 131.

[0066] Accordingly, in the present embodiment, the single-crystalline silicon rod 101 is formed into a single-crystalline silicon cube 102 after the squaring operation and other related operations. In the process of forming the single-crystalline silicon rod 101 into the single-crystalline silicon cube 102, generally, the length is unchanged. Therefore, when the silicon rod clamp 13 is used to clamp the single-crystalline silicon cube 102 located at the squaring operation station, the movably arranged silicon rod clamp 132 on the silicon rod clamp 13 does not need to be adjusted.

[0067] The single crystal silicon rod transfer device disclosed in the present application includes a reversing carrier and a silicon rod clamp arranged on the reversing carrier. The silicon rod clamp can be used to clamp single-wafer silicon rods and single-crystalline silicon cubes. By driving the reversing carrier to perform reversing movement, the silicon rod clamp on the reversing carrier can be switched between a loading station and a squaring station to transfer the single-wafer silicon rod from the loading station to the squaring station and / or switched between the squaring station and the unloading station to transfer the single-crystalline silicon cube from the squaring station to the unloading station. In this way, the workpiece can be transferred quickly and conveniently, thereby improving the transfer efficiency of the workpiece. In addition, the silicon rod clamp on the reversing carrier has the dual clamping function of single-wafer silicon rods and single-crystalline silicon cubes. The clamp can be omitted without increasing the complexity of the structure, thereby increasing the design space of other structures and reducing costs.

[0068] The present application further discloses a single crystal silicon rod transfer method for transferring a single crystal silicon rod to be operated. In one embodiment, the single crystal silicon rod transfer method is applied to a single crystal silicon rod transfer device, and the single crystal silicon rod transfer device includes a reversing carrier and a silicon rod clamp.

[0069] See also Fig.15 , is a schematic diagram of the flow chart of the single crystal silicon rod transport method in one embodiment of the present application. Fig.15 As shown, the single crystal silicon rod transport method of the present application includes the following steps:

[0070] Step S101, use the silicon rod clamp in the single crystal silicon rod transfer device to clamp the single crystal silicon rod located at the loading station. In step S101, first, the single crystal silicon rod is placed upright on the loading station, and at the same time, it is ensured that the silicon rod clamp in the single crystal silicon rod transfer device corresponds to the loading station, wherein the single crystal silicon rod can be placed upright at the loading station by manual handling or mechanical grasping by a robot, and the silicon rod clamp in the single crystal silicon rod transfer device can be adjusted by driving the reversing carrier to rotate to correspond to the loading station. Then, if necessary, according to the height of the single crystal silicon rod in the upright placement state, the corresponding silicon rod clamp in the silicon rod clamp is driven to move up and down on the reversing carrier to adjust the clamping spacing formed by each silicon rod clamp. Next, the clamping arms of each silicon rod clamping member involved in clamping in the silicon rod clamp are driven to perform a clamping action so that these silicon rod clamping members can clamp the single-wafer silicon rod on the loading station, wherein the clamping teeth on the clamping arms of the silicon rod clamping members clamp the cylindrical surface of the single-wafer silicon rod.

[0071] Step S103, driving the reversing carrier to make a reversing motion, so that the silicon rod clamp with the single-wafer silicon rod clamped is transferred from the loading station to the square-opening operation station. In step S103, first, before driving the reversing carrier to make a reversing motion, preferably, the single-wafer silicon rod clamped by the silicon rod clamp needs to be separated from the loading station, and the separation can be achieved by any of the following methods or a combination thereof: First, while ensuring that the silicon rod clamp 13 clamps the single-wafer silicon rod, the silicon rod clamp is used to move upward along the reversing carrier to lift the single-wafer silicon rod; second, driving the reversing carrier to move upward relative to the installation base to lift the single-wafer silicon rod; third, driving the loading station or the carrier for carrying the single-wafer silicon rod on the loading station to move downward, from the original carrying position to the disengaged position. Next, the reversing carrier is driven to rotate relative to the installation base, so that the carrier on the reversing carrier corresponds to the square-opening operation station through the reversing motion.

[0072] Step S105, release the silicon rod clamp, and place the clamped single-wafer silicon rod at the square-opening operation station. In step S105, while ensuring that the silicon rod clamp in the single-wafer silicon rod transfer device corresponds to the square-opening operation station, it also includes an operation step of placing the single-wafer silicon rod at the square-opening operation station, which is opposite to the step S103 in which the single-wafer silicon rod is separated from the loading station. Specifically, the method of achieving the placement can be any of the following or a combination thereof: First, while ensuring that the silicon rod clamp holds the single-wafer silicon rod, use the silicon rod clamp to move downward along the reversing carrier to land the single-wafer silicon rod; second, drive the reversing carrier to move downward relative to the installation base to land the single-wafer silicon rod; third, drive the square-opening operation station or the carrier used to carry the single-wafer silicon rod on the square-opening operation station to move upward, from the original detached position to the carrying position. Next, the clamping arms in the silicon rod clamps involved in clamping are driven to release, so that the silicon rod clamps release the single-wafer silicon rod, and the released single-wafer silicon rod falls on the squaring operation station.

[0073] Subsequently, the single crystal silicon rod multi-wire cutting equipment performs processing operations including at least squaring operations on the single wafer silicon rod at the squaring operation station, so that the single wafer silicon rod is formed into a single crystal silicon cube after these processing operations.

[0074] Step S107, use the silicon rod clamp to clamp the single crystal silicon cube located at the square cutting work station. In step S107, first, the single crystal silicon cube is placed upright on the square cutting work station, and at the same time, it is ensured that the silicon rod clamp in the single crystal silicon rod transfer device corresponds to the square cutting work station. Then, if necessary, according to the height of the single crystal silicon cube in the upright placement state, the corresponding silicon rod clamp in the silicon rod clamp is driven to move up and down on the reversing carrier to adjust the clamping spacing formed by each silicon rod clamp. Then, the clamping arms in each silicon rod clamp involved in clamping in the silicon rod clamp are driven to perform a clamping action, so that these silicon rod clamps can clamp the single crystal silicon cube on the square cutting work station, wherein the clamping teeth on the clamping arms in the silicon rod clamp are clamped on the connecting edge faces of the single crystal silicon cube.

[0075] Step S109, driving the reversing carrier to perform reversing motion, so that the silicon rod clamp with the clamped single crystal silicon cube is transferred from the squaring operation station to the unloading station. In step S109, first, before driving the reversing carrier to perform reversing motion, preferably, the single crystal silicon cube clamped by the silicon rod clamp needs to be separated from the squaring operation station, and the separation can be achieved by any of the following methods or a combination thereof: First, while ensuring that the single crystal silicon cube is clamped, the silicon rod clamp is moved upward along the reversing carrier to lift the single crystal silicon cube; second, the reversing carrier is driven to move upward relative to the installation base to lift the single crystal silicon cube; third, the squaring operation station or the supporting platform for carrying the single crystal silicon cube on the squaring operation station is driven to move downward, from the original carrying position to the detached position. Next, the reversing carrier is driven to rotate relative to the installation base, so that the silicon rod clamp on the reversing carrier corresponds to the unloading station through reversing motion.

[0076] Step S111, release the silicon rod clamp, place the clamped single crystal silicon cube in the unloading station and unload. In step S111, under the condition that the silicon rod clamp in the single crystal silicon rod transfer device corresponds to the unloading station, it also includes an operation step of placing the single crystal silicon cube in the unloading station, which is opposite to the step S109 in which the single crystal silicon cube is separated from the square opening operation station. Specifically, the method of achieving the placement can be any of the following or a combination thereof: First, under the condition that the single crystal silicon cube is clamped, the silicon rod clamp is used to move downward along the reversing carrier to drop the single crystal silicon cube; second, the reversing carrier is driven to move downward relative to the installation base to drop the single crystal silicon cube; third, the unloading station or the carrying platform on the unloading station used to carry the single crystal silicon cube is driven to move upward, from the original detached position to the carrying position. Next, the clamping arms in the silicon rod clamps involved in clamping are driven to release, so that the silicon rod clamps release the single crystal silicon cubes, and the released single crystal silicon cubes fall on the unloading station.

[0077] The single crystal silicon rod transfer method disclosed in the present application first uses a silicon rod clamp to clamp the single wafer silicon rod located at the loading station and transfers the single wafer silicon rod from the loading station to the squaring operation station through reversing movement. Subsequently, the silicon rod clamp is used to clamp the single crystal silicon cube located at the squaring operation station and transfers the single crystal silicon cube from the squaring operation station to the unloading station through reversing movement. Compared with the prior art, the single crystal silicon rod transfer method of the present application improves the efficiency of workpiece transfer, reduces costs and avoids workpiece damage.

[0078] The following combination Figures 16 to 23, the single crystal silicon rod transfer device of the present application performs single crystal silicon rod transfer in certain examples in detail. In the following examples, the following settings are first made: the single crystal silicon rod transfer device is applied to the single crystal silicon rod multi-wire cutting equipment, the single crystal silicon rod multi-wire cutting equipment can perform squaring and other operations (such as rounding and grinding, etc.) on the single crystal silicon rod, the single crystal silicon rod multi-wire cutting equipment has a loading station, a squaring operation station, and an unloading station, the single crystal silicon rod transfer device includes a reversing carrier and a silicon rod clamp provided on the reversing carrier, and the silicon rod clamp includes at least two silicon rod clamps, at least two silicon rod clamps are of movable design, and the silicon rod clamp located at the top is further configured with a guide drive mechanism. To simplify the description, in this example, the loading and unloading station is located in the same place (combined into one) and can be called the loading and unloading station. In this way, the single crystal silicon rod multi-wire cutting equipment has a loading and unloading station and a square cutting operation station, and the loading and unloading station is 180° apart from the square cutting operation station.

[0079] Step 1, the silicon rod clamp in the single crystal silicon rod transfer device corresponds to the single wafer silicon rod on the loading and unloading station. In this step 1, the silicon rod clamp in the single crystal silicon rod transfer device can be adjusted by driving the reversing carrier 11 to rotate to achieve the corresponding loading and unloading station. At this time, the clamping arms 134 in the two silicon rod clamps 132 in the silicon rod clamp are in a loose state, and the single wafer silicon rod 101 is placed upright on the loading and unloading station. The specific state of the single crystal silicon rod transfer device after the above operation can be seen in Fig.16 , Fig.16 This is a schematic diagram of the state of the silicon rod clamp in the single crystal silicon rod transfer device corresponding to the single wafer silicon rod on the loading and unloading station.

[0080] Step 2, use the silicon rod clamp in the single crystal silicon rod transfer device to clamp the single wafer silicon rod located at the loading and unloading station. In this step 2, if necessary, use a height detector to detect the height of the single wafer silicon rod 101 located at the loading and unloading station, and according to the measured height information, drive the silicon rod clamp 132 located above in the silicon rod clamp to move upward or downward relative to the reversing carrier 11 to adjust the clamping distance between the two silicon rod clamps 132. Next, drive the clamping arms 134 in the two silicon rod clamps 132 in the silicon rod clamp to perform a clamping action to clamp the single wafer silicon rod 101 on the loading and unloading station, wherein the clamping teeth on the clamping arms in the silicon rod clamp are clamped on the cylindrical surface of the single wafer silicon rod. The state of the single crystal silicon rod transfer device after the above operation is implemented can be specifically referred to. Fig.17 , Fig.17 This is a schematic diagram of the state in which the silicon rod clamp in the single crystal silicon rod transfer device clamps the single wafer silicon rod located at the loading and unloading station.

[0081] Step 3, drive the reversing carrier to make a reversing motion, so that the silicon rod clamp with the clamped single-wafer silicon rod is transferred from the loading and unloading station to the squaring operation station. In step 3, first, before driving the reversing carrier 11 to make a reversing motion, preferably, the single-wafer silicon rod 101 clamped by the silicon rod clamp 132 in the silicon rod clamp needs to be separated from the loading and unloading station. Then, drive the reversing carrier 11 to rotate 180°, so that the single-wafer silicon rod 101 clamped by the carrier on the reversing carrier 11 corresponds to the squaring operation station through the reversing motion. The specific state of the single crystal silicon rod transfer device after the above operation is implemented can be found in Fig.18 , Fig.18 It is a schematic diagram of the state of the silicon rod clamp with the clamped single-wafer silicon rod corresponding to the square cutting operation station after the reversing carrier makes a reversing movement.

[0082] Step 4, release the silicon rod clamp and place the clamped single-wafer silicon rod on the square-cutting work station. In step 4, after ensuring that the silicon rod clamp in the single-crystal silicon rod transfer device corresponds to the square-cutting work station, first place the clamped single-crystal silicon rod on the square-cutting work station. Next, drive the clamping arms 134 in the two silicon rod clamps 132 in the silicon rod clamp to loosen, so that the loosened single-crystal silicon rod 101 is placed upright on the square-cutting work station. The specific status of the single-crystal silicon rod transfer device after the above operation can be found in Fig.19 , Fig.19 This is a schematic diagram of the state where a single-wafer silicon rod is placed in a square cutting work station after the silicon rod clamp is released.

[0083] Subsequently, the single-crystalline silicon rod multi-wire cutting equipment performs at least various processing operations including squaring operations on the single-crystalline silicon rod at the squaring operation station, so that the single-crystalline silicon rod forms a single-crystalline silicon cube after these processing operations. Among them, for the squaring operation of the single-crystalline silicon rod, the specific implementation method of the squaring operation can refer to patent disclosure documents such as CN105818285A, which will not be repeated here. In addition, in addition to the squaring operation, other processing operations such as rough grinding, rounding, fine grinding, or polishing may also be included.

[0084] In step 5, the single crystal silicon cube 102 located at the squaring work station is clamped by a silicon rod clamp. In step 6, if necessary, a height detector is used to detect the height of the single crystal silicon cube 102 located at the squaring work station, and according to the measured height information, the silicon rod clamp 132 located at the top in the silicon rod clamp is driven to move upward or downward relative to the reversing carrier 11 to adjust the clamping distance between the two silicon rod clamps 132. Next, the clamping arms 134 in the two silicon rod clamps 132 in the silicon rod clamp are driven to perform a clamping action to clamp the single crystal silicon cube 102 on the squaring work station, wherein the clamping teeth 130 on the clamping arms 134 in the silicon rod clamp 132 are clamped on the connecting edges of the single crystal silicon cube 102. The state of the single crystal silicon rod transfer device after the above operations is implemented can be specifically referred to. Fig. 20 and Fig.21 , Fig. 20 This is a schematic diagram of the state of the silicon rod fixture in the single crystal silicon rod transfer device corresponding to the single crystal silicon cube on the squaring work station. Fig.21 This is a schematic diagram of the state in which the silicon rod clamp in the single crystal silicon rod transfer device clamps the single crystal silicon cube located at the squaring work station.

[0085] Step 6, drive the reversing carrier to make a reversing motion, so that the silicon rod clamp with the single crystal rod cube clamped is transferred from the squaring work station to the loading and unloading work station. In step 6, first, before driving the reversing carrier 11 to make a reversing motion, preferably, the single crystal silicon cube 102 clamped by the silicon rod clamp 132 in the silicon rod clamp needs to be separated from the squaring work station. Then, drive the reversing carrier 11 to rotate 180°, so that the single crystal silicon cube 102 clamped by the silicon rod clamp on the reversing carrier 11 corresponds to the loading and unloading work station through the reversing motion. The specific state of the single crystal silicon rod transfer device after the above operation is implemented can be found in Fig. 22 , Fig. 22 It is a schematic diagram of the state of the silicon rod clamp with the clamped single crystal rod cube corresponding to the loading and unloading station after the reversing carrier makes a reversing movement.

[0086] Step 7, release the silicon rod clamp, place the clamped single crystal silicon cube on the loading and unloading station and unload. In step 7, after ensuring that the silicon rod clamp in the single crystal silicon rod transfer device corresponds to the loading and unloading station, first place the single crystal silicon cube 102 clamped by the silicon rod clamp on the loading and unloading station. Next, drive the clamping arms 134 in the two silicon rod clamps 132 in the silicon rod clamp to loosen, so that the loosened single crystal silicon cube 102 is placed upright on the loading and unloading station. The specific state of the single crystal silicon rod transfer device after the above operation can be found in Fig.23 , Fig.23 This is a schematic diagram of the state where a single crystal silicon cube is placed in a loading and unloading station after the silicon rod clamp is released.

[0087] The above embodiments are merely illustrative of the principles and effects of the present application and are not intended to limit the present application. Anyone familiar with the technology may modify or change the above embodiments without violating the spirit and scope of the present application. Therefore, all equivalent modifications or changes made by a person of ordinary skill in the art without departing from the spirit and technical ideas disclosed in the present application shall still be covered by the claims of the present application.

Claims

1. A single crystal silicon rod transfer device, applied to a single crystal silicon rod multi-wire cutting device, wherein the single crystal silicon rod multi-wire cutting device has a loading station, a squaring station, and a unloading station, characterized in that: The single crystal silicon rod transport device comprises: A reversing carrier, wherein the reversing carrier realizes reversing motion through a reversing mechanism, wherein the reversing mechanism comprises a rotating shaft and a reversing motor; A silicon rod clamp is provided in the silicon rod clamp area of ​​the reversing carrier, and is used to clamp a single-wafer silicon rod or a single-crystal silicon cube placed vertically; the silicon rod clamp comprises: a silicon rod clamp mounting part, which is provided on the reversing carrier; at least two silicon rod clamps are arranged at intervals in the vertical direction along the silicon rod clamp mounting part; wherein, in the silicon rod clamp, at least one of the at least two silicon rod clamps is provided with a guide drive mechanism, which is used to drive it to move along the silicon rod clamp mounting part, so as to adjust the interval between the at least two silicon rod clamps; The silicon rod clamping member comprises: a clamping arm mounting seat, which is arranged on the clamp mounting member; two clamping arms, which are movably arranged on the clamping arm mounting seat; two clamping teeth arranged opposite to each other are arranged on the clamping arm; and a clamping arm driving mechanism, which is used to drive the two clamping arms to open and close; wherein, when the two clamping arms are clamped together under the drive of the clamping arm driving mechanism, the clamping teeth on the two clamping arms clamp the cylindrical surface of the single-wafer silicon rod or the connecting edge surface of the single-crystalline silicon cube; Among them, the reversing carrier is driven to perform reversing movement, and the silicon rod clamp on the reversing carrier transfers the single wafer silicon rod in an upright state from the loading station to the squaring operation station and / or transfers the single crystal silicon cube in an upright state from the squaring operation station to the unloading station during the reversing movement.

2. The single crystal silicon rod transport device according to claim 1, characterized in that: The clamp arm driving mechanism comprises: An opening and closing gear, arranged on the clamping arm; a gear driving member having teeth meshing with the opening and closing gear on the clamping arm; and A driving source is connected to the gear driving member and is used to drive the gear driving member to move.

3. The single crystal silicon rod transport device according to claim 2, characterized in that: The gear driving member is a rack, and two opposite sides of the rack are respectively provided with tooth patterns corresponding to the meshing of the opening and closing gears on the at least two clamping arms; and The driving source is a cylinder or a driving motor for driving the rack to move.

4. The single crystal silicon rod transport device according to claim 2, characterized in that: The gear driving member is a driving gear structure; and The driving source is a driving motor for driving the driving gear structure to operate.

5. The single crystal silicon rod transporting device according to claim 1, characterized in that: The guide drive mechanism comprises: a guide screw and a guide motor, wherein one end of the guide screw is connected to the silicon rod clamp, and the other end of the guide screw is connected to the guide motor.

6. The single crystal silicon rod transporting device according to claim 1, characterized in that: It also includes a height detector, which is arranged on the reversing carrier and is used to detect the height of the single-wafer silicon rod.

7. A method for transporting a single crystal silicon rod, applied to a single crystal silicon rod transporting device as claimed in any one of claims 1 to 6, characterized in that: The single crystal silicon rod transport method comprises: The single-crystalline silicon rod at the loading station is clamped by the silicon rod clamp in the single-crystalline silicon rod transfer device; The reversing motor and the rotating shaft in the reversing mechanism are used to drive the reversing carrier to perform reversing movement, so that the silicon rod clamp with the clamped single-wafer silicon rod is transferred from the loading station to the squaring operation station in an upright state; releasing the silicon rod clamp, placing the clamped single-wafer silicon rod on a squaring operation station, and performing a squaring operation on the single-wafer silicon rod on the squaring operation station to form a single-crystal silicon cube; Clamping the single crystal silicon cube located at the squaring operation station using the silicon rod clamp; The reversing motor and the rotating shaft in the reversing mechanism are used to drive the reversing carrier to perform reversing movement, so that the silicon rod clamp with the clamped single crystal silicon cube is transferred from the squaring operation station to the unloading station in an upright state; and The silicon rod clamp is released, and the clamped single crystal silicon cube is placed in a material unloading station for unloading.

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