A mask process machine chuck

Abstract

The invention discloses a chuck of a mask process machine, comprising a base frame, which is arranged in a circular ring shape, and two groups of trays are fixedly installed on the upper end surface of the base frame, the two groups of trays are symmetrically distributed about the center of the base frame, the two groups of trays have the same specifications, chucks are arranged on both sides of the base frame, one end of the two chucks are arranged in a V shape, the two chucks have the same specifications and are symmetrically distributed about the center of the base frame, the two chucks and the two groups of trays are arranged in a cross shape, a cross fixing piece is fixedly installed on the inner ring wall of the base frame, the upper and lower end surfaces of the two opposite ends of the cross fixing piece are each provided with three button grooves, the three button grooves are equidistantly distributed, and four of the plurality of button grooves are provided with buttons. The chuck of the mask process machine of the invention overcomes the shortcomings of the existing chucks, overcomes the trouble that the chuck is easy to fall off during high-speed rotation, ensures that the mask plate will not be scrapped due to flying out and falling, has a wide range of adaptability, and is safe and reliable.

Description

Technical Field

[0001] The invention relates to a chuck, in particular to a mask process machine chuck, and belongs to the technical field of chucks. Background Art

[0002] In the manufacturing process of electronic products such as semiconductors, integrated circuits, and photovoltaic products, it is necessary to perform photolithography on various substrates represented by semiconductor wafers and photomasks. These substrates also include glass substrates for liquid crystal displays and plasma displays, magnetic disks, optical magnetic disk motherboards, etc., collectively referred to as masks below. During processing, photoresist materials (photoresists) are required to form layout patterns of integrated circuits and semiconductor devices or other circuit patterns and data patterns on the substrates. The substrates need to complete processing processes such as exposure, development, etching, degumming, and detection. Traditional pull-up disks are prone to chip peeling during high-speed rotation. Therefore, it is necessary to design a mask process machine chuck with a firm support. Summary of the invention

[0003] The technical problem to be solved by the present invention is to overcome the defects of the prior art and provide a mask process machine chuck to solve the problems mentioned in the above background technology.

[0004] In order to solve the above technical problems, the present invention provides the following technical solutions:

[0005] The mask process machine chuck of the present invention comprises a base frame, which is arranged in a circular ring shape, and two groups of trays are fixedly installed on the upper end surface of the base frame, and the two groups of trays are symmetrically distributed about the center of the base frame, and the specifications of the two groups of trays are consistent. Clamps are arranged on both sides of the base frame, and one end of the two chucks is arranged in a V shape, and the two chucks have the same specifications and are symmetrically distributed about the center of the base frame. The two chucks and the two groups of trays are distributed in a cross shape, and a cross fixing piece is fixedly installed on the inner ring wall of the base frame. The upper and lower end surfaces of the two opposite ends of the cross fixing piece are provided with three button grooves, and the three button grooves are equidistantly distributed, and four of the several button grooves are provided with buttons, and hollow grooves are provided inside the two chucks, and a fixing block is fixedly installed in the middle of the two hollow grooves.

[0006] As a preferred technical solution of the present invention, the two buttons are respectively inserted into the hollow grooves, and the ends of the four buttons are fixedly connected to the fixing block via a first spring.

[0007] As a preferred technical solution of the present invention, button holes are opened at the two notches of the two hollow grooves, and the four button holes are respectively designed to match the four buttons.

[0008] As a preferred technical solution of the present invention, a movable groove is opened in the middle of the cross fixing piece, and a spacer is fixedly installed in the middle of the cross fixing piece, and the height of the spacer is equal to the groove width of the movable groove.

[0009] As a preferred technical solution of the present invention, both side edges of the spacer block are fixedly connected to the two chucks via two second springs.

[0010] The beneficial effects of the present invention are as follows: the mask processing machine chuck of the present invention, in specific use, compared with the traditional mask processing machine chuck, overcomes the shortcomings of the existing chucks and overcomes the trouble of the chuck easily falling off during high-speed rotation. It ensures that the mask plate will not be scrapped due to flying out and falling, and has a wide range of applications and is safe and reliable. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention and do not constitute a limitation of the present invention. In the accompanying drawings:

[0012] Figure 1 It is a schematic diagram of the top view of the structure of the present invention;

[0013] Figure 2 It is a schematic diagram of the cross-sectional structure of the cross fixing member of the present invention.

[0014] In the figure: 1, base frame; 2, tray; 3, chuck; 4, cross fixing piece; 5, button slot; 6, button; 7, hollow slot; 8, fixing block; 9, first spring; 10, button hole; 11, spacer; 12, second spring; 13, movable slot. DETAILED DESCRIPTION

[0015] The preferred embodiments of the present invention are described below in conjunction with the accompanying drawings. It should be understood that the preferred embodiments described herein are only used to illustrate and explain the present invention, and are not used to limit the present invention.

[0016] Example

[0017] like Figure 1-2As shown, the mask process machine chuck of the present invention includes a base frame 1, which is arranged in a circular ring shape, and two groups of trays 2 are fixedly installed on the upper end surface of the base frame 1, and the two groups of trays 2 are symmetrically distributed about the center of the ring of the base frame 1, and the two groups of trays 2 have the same specifications. Clamps 3 are provided on both sides of the base frame 1, and one end of the two clamps 3 is arranged in a V shape, and the two clamps 3 have the same specifications and are symmetrically distributed about the center of the ring of the base frame 1. The two clamps 3 and the two groups of trays 2 are distributed in a cross shape, and a cross fixing member 4 is fixedly installed on the inner ring wall of the base frame 1, and three button grooves 5 are provided on the upper and lower end surfaces of the two opposite ends of the cross fixing member 4, and the three button grooves 5 are equidistantly distributed, and four of the button grooves 5 are provided with buttons 6, and hollow grooves 7 are provided inside the two clamps 3, and a fixing block 8 is fixedly installed in the middle of the two hollow grooves 7.

[0018] The two buttons 6 are respectively inserted into the hollow grooves 7 , and the ends of the four buttons 6 are fixedly connected to the fixing block 8 via the first spring 9 .

[0019] The two notches of the two hollow grooves 7 are provided with button holes 10 , and the four button holes 10 are respectively designed to match the four buttons 6 .

[0020] A movable groove 13 is formed in the middle of the cross fixing member 4 , and a spacer block 11 is fixedly installed in the middle of the cross fixing member 4 . The height of the spacer block 11 is equal to the groove width of the movable groove 13 .

[0021] Wherein, both side edges of the spacer 11 are fixedly connected to the two chucks 3 via two second springs 12 .

[0022] Specifically, when the present invention is used, the chassis is placed on the base frame 1 and supported first by two trays 2. Then, according to the actual specifications of the chassis, the button 6 is extended from the corresponding button slot 5. At this time, the extension length of the chuck 3 is fixed by the four button slots 5 to reinforce the chassis. At the same time, different button slots 5 are selected. The operation steps only require pressing the button 6, which is pressed into the button slot 5. The two chucks 3 are pushed outward respectively through the natural elastic recovery of the four second springs 12. When the button 6 is pushed to the next button slot 5, the two buttons 6 are pushed out respectively through the natural elastic recovery of the first spring 9, thereby realizing the positioning of the chuck 3 again.

[0023] Finally, it should be noted that the above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A mask process machine chuck, comprising a base frame (1), characterized in that: The base frame (1) is arranged in a circular ring shape, and two groups of trays (2) are fixedly mounted on the upper end surface of the base frame (1), and the two groups of trays (2) are symmetrically distributed about the center of the base frame (1), and the two groups of trays (2) have the same specifications. Clamping plates (3) are arranged on both sides of the base frame (1), and one end of the two clamping plates (3) is arranged in a V shape, and the two clamping plates (3) have the same specifications and are symmetrically distributed about the center of the base frame (1). The two clamping plates (3) and the two groups of trays ( 2) The four are arranged in a cross shape, the inner ring wall of the base frame (1) is fixedly mounted with a cross fixing member (4), the upper and lower end surfaces of the two opposite ends of the cross fixing member (4) are each provided with three button grooves (5), the three button grooves (5) are equidistantly distributed, four of the button grooves (5) are each provided with a button (6), the two chucks (3) are each provided with a hollow groove (7), and a fixing block (8) is fixedly mounted in the middle of the two hollow grooves (7); A movable groove (13) is provided in the middle of the cross fixing member (4), a spacer (11) is fixedly installed in the middle of the cross fixing member (4), and the height of the spacer (11) is equal to the groove width of the movable groove (13); The two side edges of the spacer (11) are fixedly connected to the two clamping plates (3) via two second springs (12).

2. The mask process machine chuck according to claim 1, characterized in that: The two buttons (6) are respectively inserted into the hollow grooves (7), and the ends of the four buttons (6) are fixedly connected to the fixing block (8) via a first spring (9).

3. The mask process machine chuck according to claim 1, characterized in that: Button holes (10) are provided at the two notches of the two hollow grooves (7), and the four button holes (10) are respectively designed to match the four buttons (6).

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