A cathode-free plasma generator
Through the dual power supply system without cathode plasma generator and high temperature resistant material design, the surface ablation problem caused by high voltage of traditional plasma generators is solved, significantly extending the service life of the equipment and improving the working strength.
Patent Information
- Application Number
- CN201910355090.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2019-04-29
- Publication Date
- 2025-01-07
- Estimated Expiration
- 2039-04-29
AI Technical Summary
Traditional plasma generators have ablated cathode or anode surface due to high voltage, which shortens service life.
Designed with cathode-free plasma generator, using a dual power supply system, where the RF power supply and the barrier medium form a micro-dot halo, and the working power supply and the barrier medium form a plasma arc, reducing the ablation of the cathode during arcing, and through high-temperature resistant inorganic materials and Cooling waterways improve equipment life.
Significantly improve the service life of the cathode and anode, extend the overall life of the plasma generator, reduce anode ablation, reduce operating power supply voltage, and reduce oxidation through reasonable control of temperature and dielectric gas selection, extending the service life of the equipment .
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Figure CN110072324B_ABST
Abstract
Description
Technical Field
[0001] The present invention belongs to the fields of 3D printing additive manufacturing, metal surface treatment, welding, metal surface repair, and the like, and specifically relates to a cathode-free plasma generator. Background Art
[0002] Traditional plasma generators use cathodes to discharge directly with anodes. Due to the high voltage and extremely high plasma discharge temperature, it is easy to cause surface ablation of the cathode or anode, greatly reducing the service life of the cathode and anode.
[0003] For example, the patent number is CN200620013110.2, the name is a plasma generator, and the abstract is a plasma generator, which consists of a cathode, an anode, a front cavity air intake ring, a rear cavity air intake ring, an electric pressure regulating valve, a support sleeve, a cover, a base, a front cavity air inlet, a rear cavity air inlet, a water inlet, a water outlet, an arc striking device, and a switching power supply, and is used to directly ignite coal powder in the ignition, stable combustion, and combustion-supporting of a coal-fired boiler. The structure of the plasma generator is a fixed-pole-distance coaxial double-chamber air compression type, and the power can reach 350KW or even greater; the distance between the cathode and the cathode of the plasma generator is a fixed value, and the arc striking method is a high-frequency arc striking or a separate circuit small current stylus arc striking mechanism; the cathode of the plasma generator is designed as a precious metal alloy composite hollow water-cooled structure, and the electron emitting surface is a cylindrical surface; the plasma generator is designed with an air pressure fluctuation device so that the position of the cathode emitting electrons can be adjusted; the plasma compression is designed as air compression, and the compressed air rotates from the front and rear cavity intake rings into the plasma generator to compress the plasma toward the center, and the compressed air rotates from the rear cavity intake ring into the plasma generator, and the plasma compressed toward the center is pushed out of the anode, contacts with the coal powder, and ignites the coal powder. Summary of the invention
[0004] In view of the above-mentioned conventional plasma generators in the prior art that use a cathode to discharge directly with an anode, due to the high voltage and extremely high plasma discharge temperature, it is easy to cause surface ablation of the cathode or anode, greatly reducing the service life of the cathode and the anode, the present invention provides a cathode-free plasma generator.
[0005] A cathodeless plasma generator, characterized in that it comprises: a gas dividing ring, a cathode guide column, a blocking medium, a working power anode, a working power cathode, a gas channel, an arc starting stage, an outer shell, an inner shell, a radio frequency power supply, a radio frequency power anode, an insulating pad, a sealing ring, a cathode support and an anode insulating pad. The plasma generator device is provided with an outer shell around the outside, an inner shell around the inside of the outer shell, the cathode support is provided in the middle of the inner shell and contacts the inner shell, a gas dividing ring is provided at the bottom of the cathode support, the cathode guide column is provided below the cathode support, an arc starting stage is provided below the cathode guide column, a sealing ring is provided above the arc starting stage, an insulating pad is provided inside the sealing ring, a radio frequency power anode is provided outside the arc starting stage, an anode insulating pad is provided below the radio frequency power anode, a working power anode is provided below the anode insulating pad, a gas channel is provided below the working power anode, and a plasma arc nozzle is provided below the gas channel.
[0006] A circle of arc-starting stages is arranged below the cathode guide column, and the bottom end of the cathode guide column is located inside the arc-starting stage.
[0007] The cathode guide column is connected to the cathode of the working power supply.
[0008] The radio frequency power source is connected to the arc starting stage.
[0009] A water channel for cooling the plasma generator is arranged inside the inner shell.
[0010] The interior of the gas channel is filled with medium gas.
[0011] The cathode guide column and the cathode support are connected by threads or directly welded together.
[0012] The blocking medium is made of a high temperature resistant inorganic material, and the high temperature resistant inorganic material includes: a quartz tube, a glass tube, or a carbon tube.
[0013] The medium gas is hydrogen, argon, nitrogen or air.
[0014] The medium gas is a mixed gas of hydrogen, argon, nitrogen and air.
[0015] Working principle:
[0016] The medium gas is passed from the cathode support into the gap between the blocking medium and the arc striking stage, and then ejected from the anode nozzle. The medium gas may be hydrogen, argon, nitrogen, air or a mixture of these gases.
[0017] During operation, the anode RF power supply and the barrier medium discharge to form a corona on the surface of the barrier medium. A plasma arc is formed between the corona and the working power supply anode. The plasma arc is blown out from the anode nozzle through the dielectric gas to form a plasma arc. As a heat source, the temperature can reach 20,000 degrees.
[0018] Beneficial effects of the present invention:
[0019] 1. The present invention utilizes a dual power supply system, one RF power supply is used to start the arc, and the other is the working power supply. When working, the RF power supply first forms a micro-point halo with the blocking medium, and then a plasma arc is formed between the working power supply and the blocking medium, which greatly reduces the ablation of the cathode during arc starting, and the blocking medium and the cathode are tightly connected.
[0020] 2. The anode plasma arc of the cathodeless plasma generator involved in the present invention is not directly generated with the cathode, and the cathode is basically not ablated, which greatly improves the cathode life and the service life of the plasma generator to 5 to 10 times, and can reduce the working power supply voltage, reduce anode ablation, and increase the anode life.
[0021] 3. The inner shell of the present invention is provided with a water channel for cooling the plasma generator. This design enables the working temperature of the plasma generator to be reasonably controlled, thereby increasing the working intensity of the plasma generator.
[0022] 4. The blocking medium provided in the present invention is a high temperature resistant inorganic material, and the high temperature resistant inorganic material includes: a quartz tube, a glass tube, or a carbon tube. The advantage of such a setting is that the service life of the plasma generator is increased.
[0023] 5. The medium gas used in the present invention during operation is: hydrogen, argon, nitrogen or air or a mixed gas of hydrogen, argon, nitrogen and air, which reduces oxidation inside the plasma generator and increases the service life of the plasma generator.
[0024] Reference numerals
[0025] 1. Gas dividing ring, 2. Cathode guide column, 3. Barrier medium, 4. Working power anode, 5. Gas channel, 6. Arc starting level, 7. Outer shell, 8. Inner shell, 9. RF power anode, 10. Insulation pad, 11. Sealing ring, 12. Cathode support, 13. Anode insulation pad. BRIEF DESCRIPTION OF THE DRAWINGS
[0026] Figure 1 It is a structural diagram of the present invention; DETAILED DESCRIPTION
[0027] Embodiment 1:
[0028] A cathodeless plasma generator, characterized in that it comprises: a gas dividing ring 1, a cathode guide column 2, a blocking medium 3, a working power anode 4, a working power cathode, a gas channel 5, an arc starting stage 6, an outer shell 7, an inner shell 8, a radio frequency power supply, a radio frequency power anode 9, an insulating pad 10, a sealing ring 11, a cathode support 12 and an anode insulating pad 13, wherein the plasma generator device is provided with a circle of outer shell 7 outside, a circle of inner shell 8 inside the outer shell 7, the cathode support 12 is provided in the middle of the inner shell 8, and contacts with the inner shell 8, and the bottom of the cathode support 12 A gas dividing ring 1 is provided, the cathode guide column 2 is provided below the cathode support 12, an arc striking stage 6 is provided below the cathode guide column 2, a sealing ring 11 is provided above the arc striking stage 6, an insulating pad 10 is provided inside the sealing ring 11, a radio frequency power anode 9 is provided on the outside of the arc striking stage 6, an anode insulating pad 13 is provided below the radio frequency power anode 9, a working power anode 4 is provided below the anode insulating pad 13, a gas channel 5 is provided below the working power anode 4, and a plasma arc nozzle is provided below the gas channel 5.
[0029] A circle of arc-starting stages 6 is arranged below the cathode guide column 2 , and the bottom end of the cathode guide column 2 is located inside the arc-starting stage 6 .
[0030] The cathode guide column 2 is connected to the cathode of the working power supply.
[0031] The radio frequency power source is connected to the arc starting stage 6 .
[0032] This plasma generator adopts a dual power supply system, one RF power supply is used to start the arc, and the other is the working power supply. When working, the RF power supply first forms a micro-point halo with the blocking medium, and then the working power supply forms a plasma arc with the blocking medium. This greatly reduces the ablation of the cathode during arc starting, and the blocking medium and the cathode are tightly connected.
[0033] The anode plasma arc in the plasma generator is not directly generated with the cathode, and the cathode is basically not ablated, which greatly improves the cathode life and the service life of the plasma generator by 5 to 10 times. It can also reduce the working power supply voltage, reduce anode ablation, and increase the anode life.
[0034] Working principle:
[0035] The medium gas is passed from the cathode support into the gap between the blocking medium and the arc striking stage, and then ejected from the anode nozzle. The medium gas may be hydrogen, argon, nitrogen, air or a mixture of these gases.
[0036] During operation, the anode RF power supply and the barrier medium discharge to form a corona on the surface of the barrier medium. A plasma arc is formed between the corona and the working power supply anode. The plasma arc is blown out from the anode nozzle through the dielectric gas to form a plasma arc. As a heat source, the temperature can reach 20,000 degrees.
[0037] Embodiment 2:
[0038] A cathodeless plasma generator, characterized in that it comprises: a gas dividing ring 1, a cathode guide column 2, a blocking medium 3, a working power anode 4, a working power cathode, a gas channel 5, an arc starting stage 6, an outer shell 7, an inner shell 8, a radio frequency power supply, a radio frequency power anode 9, an insulating pad 10, a sealing ring 11, a cathode support 12 and an anode insulating pad 13, wherein the plasma generator device is provided with a circle of outer shell 7 outside, a circle of inner shell 8 inside the outer shell 7, the cathode support 12 is provided in the middle of the inner shell 8, and contacts with the inner shell 8, and the bottom of the cathode support 12 A gas dividing ring 1 is provided, the cathode guide column 2 is provided below the cathode support 12, an arc striking stage 6 is provided below the cathode guide column 2, a sealing ring 11 is provided above the arc striking stage 6, an insulating pad 10 is provided inside the sealing ring 11, a radio frequency power anode 9 is provided on the outside of the arc striking stage 6, an anode insulating pad 13 is provided below the radio frequency power anode 9, a working power anode 4 is provided below the anode insulating pad 13, a gas channel 5 is provided below the working power anode 4, and a plasma arc nozzle is provided below the gas channel 5.
[0039] A circle of arc-starting stages 6 is arranged below the cathode guide column 2 , and the bottom end of the cathode guide column 2 is located inside the arc-starting stage 6 .
[0040] The cathode guide column 2 is connected to the cathode of the working power supply.
[0041] The radio frequency power source is connected to the arc starting stage 6 .
[0042] The gas channel 5 contains medium gas.
[0043] The cathode guide column 2 and the cathode support 12 are connected by threads or directly welded together.
[0044] This plasma generator adopts a dual power supply system, one RF power supply is used to start the arc, and the other is the working power supply. When working, the RF power supply first forms a micro-point halo with the blocking medium, and then the working power supply forms a plasma arc with the blocking medium. This greatly reduces the ablation of the cathode during arc starting, and the blocking medium and the cathode are tightly connected.
[0045] The anode plasma arc in the plasma generator is not directly generated with the cathode, and the cathode is basically not ablated, which greatly improves the cathode life and the service life of the plasma generator by 5 to 10 times. It can also reduce the working power supply voltage, reduce anode ablation, and increase the anode life.
[0046] The plasma generator is provided with a water channel for cooling the plasma generator. Such a design enables the working temperature of the plasma generator to be reasonably controlled, thereby increasing the working intensity of the plasma generator.
[0047] Working principle:
[0048] The medium gas is passed from the cathode support into the gap between the blocking medium and the arc striking stage, and then ejected from the anode nozzle. The medium gas may be hydrogen, argon, nitrogen, air or a mixture of these gases.
[0049] During operation, the anode RF power supply and the barrier medium discharge to form a corona on the surface of the barrier medium. A plasma arc is formed between the corona and the working power supply anode. The plasma arc is blown out from the anode nozzle through the dielectric gas to form a plasma arc. As a heat source, the temperature can reach 20,000 degrees.
[0050] Embodiment 3:
[0051] A cathodeless plasma generator, characterized in that it comprises: a gas dividing ring 1, a cathode guide column 2, a blocking medium 3, a working power anode 4, a working power cathode, a gas channel 5, an arc starting stage 6, an outer shell 7, an inner shell 8, a radio frequency power supply, a radio frequency power anode 9, an insulating pad 10, a sealing ring 11, a cathode support 12 and an anode insulating pad 13, wherein the plasma generator device is provided with a circle of outer shell 7 outside, a circle of inner shell 8 inside the outer shell 7, the cathode support 12 is provided in the middle of the inner shell 8, and contacts with the inner shell 8, and the bottom of the cathode support 12 A gas dividing ring 1 is provided, the cathode guide column 2 is provided below the cathode support 12, an arc striking stage 6 is provided below the cathode guide column 2, a sealing ring 11 is provided above the arc striking stage 6, an insulating pad 10 is provided inside the sealing ring 11, a radio frequency power anode 9 is provided on the outside of the arc striking stage 6, an anode insulating pad 13 is provided below the radio frequency power anode 9, a working power anode 4 is provided below the anode insulating pad 13, a gas channel 5 is provided below the working power anode 4, and a plasma arc nozzle is provided below the gas channel 5.
[0052] A circle of arc-starting stages 6 is arranged below the cathode guide column 2 , and the bottom end of the cathode guide column 2 is located inside the arc-starting stage 6 .
[0053] The cathode guide column 2 is connected to the cathode of the working power supply.
[0054] The radio frequency power source is connected to the arc starting stage 6 .
[0055] The inner shell 8 is provided with a water channel for cooling the plasma generator.
[0056] The gas channel 5 contains medium gas.
[0057] The cathode guide column 2 and the cathode support 12 are connected by threads or directly welded together.
[0058] This plasma generator adopts a dual power supply system, one RF power supply is used to start the arc, and the other is the working power supply. When working, the RF power supply first forms a micro-point halo with the blocking medium, and then the working power supply forms a plasma arc with the blocking medium. This greatly reduces the ablation of the cathode during arc starting, and the blocking medium and the cathode are tightly connected.
[0059] The anode plasma arc in the plasma generator is not directly generated with the cathode, and the cathode is basically not ablated, which greatly improves the cathode life and the service life of the plasma generator by 5 to 10 times. It can also reduce the working power supply voltage, reduce anode ablation, and increase the anode life.
[0060] The plasma generator is provided with a water channel for cooling the plasma generator. Such a design enables the working temperature of the plasma generator to be reasonably controlled, thereby increasing the working intensity of the plasma generator.
[0061] Working principle:
[0062] The medium gas is passed from the cathode support into the gap between the blocking medium and the arc striking stage, and then ejected from the anode nozzle. The medium gas may be hydrogen, argon, nitrogen, air or a mixture of these gases.
[0063] During operation, the anode RF power supply and the barrier medium discharge to form a corona on the surface of the barrier medium. A plasma arc is formed between the corona and the working power supply anode. The plasma arc is blown out from the anode nozzle through the dielectric gas to form a plasma arc. As a heat source, the temperature can reach 20,000 degrees.
[0064] Embodiment 4:
[0065] A cathodeless plasma generator, characterized in that it comprises: a gas dividing ring 1, a cathode guide column 2, a blocking medium 3, a working power anode 4, a working power cathode, a gas channel 5, an arc starting stage 6, an outer shell 7, an inner shell 8, a radio frequency power supply, a radio frequency power anode 9, an insulating pad 10, a sealing ring 11, a cathode support 12 and an anode insulating pad 13, wherein the plasma generator device is provided with a circle of outer shell 7 outside, a circle of inner shell 8 inside the outer shell 7, the cathode support 12 is provided in the middle of the inner shell 8, and contacts with the inner shell 8, and the bottom of the cathode support 12 A gas dividing ring 1 is provided, the cathode guide column 2 is provided below the cathode support 12, an arc striking stage 6 is provided below the cathode guide column 2, a sealing ring 11 is provided above the arc striking stage 6, an insulating pad 10 is provided inside the sealing ring 11, a radio frequency power anode 9 is provided on the outside of the arc striking stage 6, an anode insulating pad 13 is provided below the radio frequency power anode 9, a working power anode 4 is provided below the anode insulating pad 13, a gas channel 5 is provided below the working power anode 4, and a plasma arc nozzle is provided below the gas channel 5.
[0066] A circle of arc-starting stages 6 is arranged below the cathode guide column 2 , and the bottom end of the cathode guide column 2 is located inside the arc-starting stage 6 .
[0067] The cathode guide column 2 is connected to the cathode of the working power supply.
[0068] The radio frequency power source is connected to the arc starting stage 6 .
[0069] The inner shell 8 is provided with a water channel for cooling the plasma generator.
[0070] The gas channel 5 contains medium gas.
[0071] The cathode guide column 2 and the cathode support 12 are connected by threads or directly welded together.
[0072] The blocking medium 3 is made of a high temperature resistant inorganic material, and the high temperature resistant inorganic material includes: a quartz tube, a glass tube, or a carbon tube.
[0073] This plasma generator adopts a dual power supply system, one RF power supply is used to start the arc, and the other is the working power supply. When working, the RF power supply first forms a micro-point halo with the blocking medium, and then the working power supply forms a plasma arc with the blocking medium. This greatly reduces the ablation of the cathode during arc starting, and the blocking medium and the cathode are tightly connected.
[0074] The anode plasma arc in the plasma generator is not directly generated with the cathode, and the cathode is basically not ablated, which greatly improves the cathode life and the service life of the plasma generator by 5 to 10 times. It can also reduce the working power supply voltage, reduce anode ablation, and increase the anode life.
[0075] The plasma generator is provided with a water channel for cooling the plasma generator. Such a design enables the working temperature of the plasma generator to be reasonably controlled, thereby increasing the working intensity of the plasma generator.
[0076] The blocking medium of the plasma generator is a high temperature resistant inorganic material, and the high temperature resistant inorganic material includes: a quartz tube, a glass tube, or a carbon tube. The advantage of such a setting is that the service life of the plasma generator is increased.
[0077] Working principle:
[0078] The medium gas is passed from the cathode support into the gap between the blocking medium and the arc striking stage, and then ejected from the anode nozzle. The medium gas may be hydrogen, argon, nitrogen, air or a mixture of these gases.
[0079] During operation, the anode RF power supply and the barrier medium discharge to form a corona on the surface of the barrier medium. A plasma arc is formed between the corona and the working power supply anode. The plasma arc is blown out from the anode nozzle through the dielectric gas to form a plasma arc. As a heat source, the temperature can reach 20,000 degrees.
[0080] Embodiment 5:
[0081] A cathodeless plasma generator, characterized in that it comprises: a gas dividing ring 1, a cathode guide column 2, a blocking medium 3, a working power anode 4, a working power cathode, a gas channel 5, an arc starting stage 6, an outer shell 7, an inner shell 8, a radio frequency power supply, a radio frequency power anode 9, an insulating pad 10, a sealing ring 11, a cathode support 12 and an anode insulating pad 13, wherein the plasma generator device is provided with a circle of outer shell 7 outside, a circle of inner shell 8 inside the outer shell 7, the cathode support 12 is provided in the middle of the inner shell 8, and contacts with the inner shell 8, and the bottom of the cathode support 12 A gas dividing ring 1 is provided, the cathode guide column 2 is provided below the cathode support 12, an arc striking stage 6 is provided below the cathode guide column 2, a sealing ring 11 is provided above the arc striking stage 6, an insulating pad 10 is provided inside the sealing ring 11, a radio frequency power anode 9 is provided on the outside of the arc striking stage 6, an anode insulating pad 13 is provided below the radio frequency power anode 9, a working power anode 4 is provided below the anode insulating pad 13, a gas channel 5 is provided below the working power anode 4, and a plasma arc nozzle is provided below the gas channel 5.
[0082] A circle of arc-starting stages 6 is arranged below the cathode guide column 2 , and the bottom end of the cathode guide column 2 is located inside the arc-starting stage 6 .
[0083] The cathode guide column 2 is connected to the cathode of the working power supply.
[0084] The radio frequency power source is connected to the arc starting stage 6 .
[0085] The inner shell 8 is provided with a water channel for cooling the plasma generator.
[0086] The gas channel 5 contains medium gas.
[0087] The cathode guide column 2 and the cathode support 12 are connected by threads or directly welded together.
[0088] The blocking medium 3 is made of a high temperature resistant inorganic material, and the high temperature resistant inorganic material includes: a quartz tube, a glass tube, or a carbon tube.
[0089] The medium gas is hydrogen, argon, nitrogen or air.
[0090] The medium gas is a mixed gas of hydrogen, argon, nitrogen and air.
[0091] This plasma generator adopts a dual power supply system, one RF power supply is used to start the arc, and the other is the working power supply. When working, the RF power supply first forms a micro-point halo with the blocking medium, and then the working power supply forms a plasma arc with the blocking medium. This greatly reduces the ablation of the cathode during arc starting, and the blocking medium and the cathode are tightly connected.
[0092] The anode plasma arc in the plasma generator is not directly generated with the cathode, and the cathode is basically not ablated, which greatly improves the cathode life and the service life of the plasma generator by 5 to 10 times. It can also reduce the working power supply voltage, reduce anode ablation, and increase the anode life.
[0093] The plasma generator is provided with a water channel for cooling the plasma generator. Such a design enables the working temperature of the plasma generator to be reasonably controlled, thereby increasing the working intensity of the plasma generator.
[0094] The blocking medium of the plasma generator is a high temperature resistant inorganic material, and the high temperature resistant inorganic material includes: a quartz tube, a glass tube, or a carbon tube. The advantage of such a setting is that the service life of the plasma generator is increased.
[0095] The medium gas used in the plasma generator when it is working is: hydrogen, argon, nitrogen or air or a mixed gas of hydrogen, argon, nitrogen and air, which reduces oxidation inside the plasma generator and increases the service life of the plasma generator.
[0096] Working principle:
[0097] The medium gas is passed from the cathode support into the gap between the blocking medium and the arc striking stage, and then ejected from the anode nozzle. The medium gas may be hydrogen, argon, nitrogen, air or a mixture of these gases.
[0098] During operation, the anode RF power supply and the barrier medium discharge to form a corona on the surface of the barrier medium. A plasma arc is formed between the corona and the working power supply anode. The plasma arc is blown out from the anode nozzle through the dielectric gas to form a plasma arc. As a heat source, the temperature can reach 20,000 degrees.
Claims
1. A cathodeless plasma generator, characterized in that include: A gas distribution ring (1), a cathode guide column (2), a blocking medium (3), a working power supply anode (4), a working power supply cathode, a gas channel (5), an arc starting stage (6), an outer shell (7), an inner shell (8), a radio frequency power supply, a radio frequency power supply anode (9), an insulating pad (10), a sealing ring (11), a cathode support (12) and an anode insulating pad (13); the plasma generator device is provided with an outer shell (7) on the outside, an inner shell (8) on the inside of the outer shell (7), the cathode support (12) is provided in the middle of the inner shell (8) and in contact with the inner shell (8), and the bottom of the cathode support (12) is provided with a gas distribution ring. (1), the cathode guide column (2) is arranged below the cathode support (12), an arc starting stage (6) is arranged below the cathode guide column (2), a sealing ring (11) is arranged above the arc starting stage (6), an insulating pad (10) is arranged inside the sealing ring (11), a radio frequency power anode (9) is arranged outside the arc starting stage (6), an anode insulating pad (13) is arranged below the radio frequency power anode (9), a working power anode (4) is arranged below the anode insulating pad (13), a gas channel (5) is arranged below the working power anode (4), and a plasma arc nozzle is arranged below the gas channel (5); A circle of arc-starting stages (6) is arranged below the cathode guide column (2), and the bottom end of the cathode guide column (2) is located inside the arc-starting stage (6); the cathode guide column (2) is connected to the cathode of the working power supply.
2. A cathodeless plasma generator according to claim 1, characterized in that: The radio frequency power source is connected to the arc starting stage (6).
3. The cathodeless plasma generator according to claim 1, characterized in that: A water channel for cooling the plasma generator is arranged inside the inner shell (8).
4. The cathodeless plasma generator according to claim 1, characterized in that: The interior of the gas channel (5) is filled with medium gas.
5. The cathodeless plasma generator according to claim 1, characterized in that: The cathode guide column (2) and the cathode support (12) are connected by threads or directly welded together.
6. The cathodeless plasma generator according to claim 1, characterized in that: The blocking medium (3) is made of a high temperature resistant inorganic material, and the high temperature resistant inorganic material includes: a quartz tube, a glass tube, or a carbon tube.
7. A cathodeless plasma generator according to claim 4, characterized in that The medium gas is hydrogen, argon, nitrogen or air.
8. A cathodeless plasma generator according to claim 4, characterized in that The medium gas is a mixed gas of hydrogen, argon, nitrogen and air.
Citation Information
Patent Citations
Plasma generator
CN200947700Y
Cathode-free plasma generator
CN210274654U