Electromagnetic shutter device for photolithography machine

Abstract

The present invention discloses a light electromagnetic shutter device for a photolithography machine, including a blade and a yaw drive mechanism, the yaw drive mechanism including an electromagnetic seat and a transmission shaft, the electromagnetic seat including a magnetic outer cylinder, a coil and fixed iron cores at both ends, the exposed surface of one of the iron cores is provided with a scroll torsion spring seat, one end of the transmission shaft is matched with the scroll torsion spring seat, and the other end passes through the electromagnetic seat and is connected to the blade, a moving iron core is sleeved on the transmission shaft, the moving iron core and the transmission shaft are circumferentially locked and axially slidably matched, the axial ends of the moving iron core are respectively provided with inclined surfaces, and any fixed iron core is provided with a driving surface. The present invention adopts an electromagnetic transmission structure to realize the yaw drive of the blade, which has the characteristics of fast response speed, accurate positioning and long service life compared with the traditional motor drive. The moving iron core with a specific propeller structure has a spiral fan surface, which can achieve low power and high torque in a confined space, and the electromagnetic suction force is stable and reliable to meet the yaw stroke requirements of the fan blade.

Description

Technical Field

[0001] The present invention relates to an electromagnetic light shutter device for the light rays of a lithography machine, belonging to the technical field of lithography light shielding. Background Art

[0002] A lithography machine is one of the core devices for chip manufacturing. The lithography technology is to make the circuits and functional areas required for chip manufacturing. The light emitted by the light emitter of the lithography machine passes through a photomask with patterns and exposes the silicon wafer coated with photoresist. The photoresist will change its properties when exposed to light, so that the patterns on the photomask are copied onto the silicon wafer. Then, by chemical or physical methods, the surface of the silicon wafer or the dielectric layer that is not masked by the photoresist is removed, so that a pattern exactly the same as the photomask is obtained on the surface of the silicon wafer or the dielectric layer, so that the silicon wafer has the function of an electronic circuit diagram.

[0003] The functional layers of an integrated circuit are three-dimensionally overlapped, so the lithography process is always repeated many times. A large-scale integrated circuit needs to go through about 10 lithography processes to complete the full transfer of each layer of patterns. Therefore, when exposure is not required, it is necessary to prevent the light beam from irradiating the silicon wafer. If the motor technology is used to open and close the light shutter for light shielding, there are disadvantages such as slow response speed and low production efficiency, and it is not suitable for application in the field of high-end lithography machines. Summary of the Invention

[0004] The purpose of the present invention is to solve the above-mentioned deficiencies of the prior art, and provide an electromagnetic light shutter device for the light rays of a lithography machine, so as to achieve the technical purpose of high response speed and high production efficiency for opening and closing the light shutter for light shielding of the lithography machine without affecting the exposure quality of the lithography machine.

[0005] In order to achieve the above purpose, the technical solution adopted by the present invention is as follows:

[0006] An electromagnetic light shutter device for the light rays of a lithography machine,

[0007] including a blade and a yaw drive mechanism for driving the blade to reciprocally yaw,

[0008] The yaw drive mechanism includes an electromagnetic seat and a transmission shaft,

[0009] wherein, the electromagnetic seat includes a magnetic conductive outer cylinder with a hollow chamber, a coil for electromagnetic conversion is arranged in the hollow chamber, fixed iron cores are respectively arranged at both ends of the hollow chamber, bearings are arranged on any of the fixed iron cores, and a scroll torsion spring seat is arranged on the exposed surface of one of the fixed iron cores,

[0010] One end of the transmission shaft is matingly connected with the scroll torsion spring seat, and the other end passes through the electromagnetic seat and is connected with the blade. The transmission shaft is rotatably and movably connected with any of the bearings,

[0011] A moving iron core located in the hollow chamber is sleeved on the transmission shaft. The moving iron core is circumferentially locked and axially slidably mated with the transmission shaft.

[0012] At both axial ends of the moving iron core, inclined surfaces are respectively provided. Any of the fixed iron cores is provided with a driving surface facing the moving iron core for driving the moving iron core to rotate, and the rotational driving directions of the two fixed iron cores are the same.

[0013] Preferably, the moving iron core has a propeller structure, and the axial end face of any blade of the moving iron core is a spiral fan surface.

[0014] The beneficial effects of the present invention are mainly reflected in:

[0015] 1. An electromagnetic drive structure is adopted to realize the yaw drive of the blade. Compared with the traditional motor drive, it has the characteristics of fast response speed, accurate position and long service life.

[0016] 2. The moving iron core with a specific propeller structure has a spiral fan surface, which can achieve low power and high torque in a limited space, and the electromagnetic suction force is stable and reliable, meeting the yaw stroke requirements of the wind blade.

[0017] 3. The overall design is simple, the manufacturing cost is effectively controlled, and it is suitable for the yaw drive of the blade. Description of the Drawings

[0018] Figure 1 is an exploded structural schematic diagram of a light electromagnetic shutter device of a lithography machine according to the present invention.

[0019] Figure 2 is a schematic diagram of the use state of a light electromagnetic shutter device of a lithography machine according to the present invention. Detailed Embodiments

[0020] The present invention provides a light electromagnetic shutter device of a lithography machine. The technical solution of the present invention will be described in detail below with reference to the drawings to make it easier to understand and master.

[0021] A light electromagnetic shutter device of a lithography machine, as Figure 1 and Figure 2 shown, includes a blade 1 and a yaw drive mechanism for driving the blade 1 to reciprocate yaw, that is, the blocking or releasing of the light source 16 is realized by controlling the yaw turning motion stroke of the blade 1.

[0022] In this case, as Figure 2 shown, the yaw drive mechanism includes an electromagnetic base 2 and a transmission shaft 3.

[0023] Among them, the electromagnetic seat 2 includes a magnetic-conducting outer cylinder 5 with a hollow chamber 4. A coil 6 for electromagnetic conversion is arranged in the hollow chamber 4. Fixed iron cores 7 are respectively arranged at both ends of the hollow chamber 4. A bearing 8 is arranged on any fixed iron core 7. And an exposed surface of one of the fixed iron cores 7 is provided with a scroll torsion spring seat 9.

[0024] One end of the transmission shaft 3 is matingly connected with the scroll torsion spring seat 9, and the other end passes through the electromagnetic seat 2 and is connected with the vane 1. The transmission shaft 3 is rotatably and movably matingly connected with any bearing 8.

[0025] A moving iron core 10 located in the hollow chamber 4 is sleeved on the transmission shaft 3. The moving iron core 10 is circumferentially locked and axially slidably mated with the transmission shaft 3.

[0026] Inclined surfaces 11 are respectively arranged at both axial ends of the moving iron core 10. Any fixed iron core 7 is provided with a driving surface 12 facing the moving iron core 10 for driving the moving iron core 10 to rotate. And the rotational driving directions of the two fixed iron cores 7 are opposite.

[0027] Specific implementation process and principle description:

[0028] After the coil 6 of the electromagnetic seat 2 is powered on, both the fixed iron core 7 and the moving iron core 10 are magnetized. The magnetic poles of the two fixed iron cores 7 are opposite. One of the fixed iron cores 7 generates magnetic adsorption on the moving iron core 10, and the other fixed iron core 7 generates magnetic repulsion on the moving iron core 10, thereby generating a double electromagnetic adsorption displacement effect.

[0029] After the moving iron core 10 is displaced towards the fixed iron core 7, through the axial relative displacement of the inclined surface 11 and the driving surface 12, a rotational drive for the moving iron core 10 is generated. At this time, the transmission shaft 3 rotates to drive the vane 1 to flip, and the scroll torsion spring seat 9 generates elastic deformation under the rotational torque.

[0030] When the electromagnetic seat 2 is in a power-off state, after the adsorption force of the moving iron core 10 is released, the scroll torsion spring seat 9 elastically resets, thereby driving the moving iron core 10 to rotate and reset. At this time, its axial sliding displacement disengages from the driving surface 12.

[0031] It should be noted that the magnetization of the moving iron core 10 changes according to its position degree. With the design of the two-side fixed iron cores 7, no matter which side its initial position degree biases towards, it has a displacement that can be adsorbed and fitted with the fixed iron core 7.

[0032] In a specific embodiment, the moving iron core 10 has a propeller structure. The axial end surface of any blade 13 of the moving iron core 10 is a spiral fan surface 14. It should be noted that the driving surface 12 of the fixed iron core 7 is provided with a limit groove 15 for any blade 13, which can realize precise rotational limit of the moving iron core 10.

[0033] By designing a structure with a relative angular spiral fan surface on the mating surface between the fixed iron core 7 and the moving iron core 10, the design of the spiral fan surface can form the largest attracting area. When electrified, the spiral fan surfaces of the fixed iron core and the moving iron core attract and fit with each other, causing an angular rotation and outputting a torque without axial displacement. It has the advantages of large torque, accurate rotation angle, reliable operation, and quick suction.

[0034] In a preferred embodiment, the power of the electromagnetic element is related to the duty cycle. The duty cycle refers to the ratio of the energized time to the de-energized time. The larger the duty cycle, the smaller the power and the torque. Conversely, the smaller the duty cycle, the larger the power and the torque. Because within the effective volume of the electromagnetic element, only a certain amount of power can be achieved. To increase the power, the electromagnetic element operates under overload, which will cause it to burn out after heating to a high temperature. And the duty cycle is also related to the heating problem of the electromagnetic element. When the electromagnetic element is energized for a long time, the heating is relatively serious, so the power still needs to be relatively small.

[0035] To achieve an electromagnetic element with low power and high torque within a certain volume, through finite element analysis, the above-mentioned propeller structure is designed into four pairs of spirals to optimize the electromagnetic suction during energization to the greatest extent and improve the torque of the electromagnetic optical shutter device.

[0036] In a specific embodiment, the initial angle between the fixed iron core 7 and the moving iron core 10 is very important. Therefore, a positioning structure is provided between the fixed iron core 7 and the spool of the coil 6, and this positioning structure is the cooperation of a convex point and a concave point. The illustration of this is omitted in the drawings.

[0037] In a specific embodiment, the structures of the fixed iron core 7 and the moving iron core 10 are difficult to form, and the CNC machining process is used, with high machining difficulty and machining cost. In this case, by designing the materials and processes of the fixed iron core and the moving iron core to be formed by powder metallurgy in one step and controlling the key dimensions with the mold in place, no post-processing is required, greatly reducing the cost of the electromagnetic optical shutter device.

[0038] Finally, the electromagnetic optical shutter device itself uses direct current voltage. If alternating current needs to be used, a rectifier can be added to the product. When the actual rotation angle used by the electromagnetic optical shutter device needs to be less than the specified rotation angle, an external stopper can be installed on the side where the rotation is completed to meet the rotation limit requirement.

[0039] The electromagnetic light shutter device generates a high-intensity magnetic field after the coil is energized through the above optimization design. The magnetic field drives the double-fixed iron core to attract the moving iron core, and the four pairs of spiral fan surfaces of the moving iron core generate a greater electromagnetic suction force, driving the light shutter on the rotating shaft to quickly swing by a certain angle to block the light of the lithography machine. The actual measured energization response action time is 17 - 23 ms. When the light of the lithography machine needs to work again, the coil is de-energized. The application of the above new material and magnetic heat treatment make the demagnetization performance of the electromagnetic light shutter device better. Under the action of the scroll spring, the light shutter quickly swings to the release position, and the light of the lithography machine passes through the photomask for exposure work. The actual measured de-energization return time is 25 - 31 ms.

[0040] It can be found from the above description that the electromagnetic light shutter device for the light of a lithography machine in the present invention adopts an electromagnetic drive structure to realize the yaw drive of the vane. Compared with the traditional motor drive, it has the characteristics of fast response speed, accurate position degree and long service life. The moving iron core with a specific propeller structure has spiral fan surfaces, which can achieve low power and high torque in a limited space, and the electromagnetic suction force is stable and reliable, meeting the yaw stroke requirement of the vane. The overall design is simple, and the manufacturing cost is effectively controlled, which is suitable for the yaw drive of the vane.

[0041] The technical solution of the present invention has been fully described above. It should be noted that the specific implementation manner of the present invention is not limited by the above description. All technical solutions formed by equivalent transformation or equivalent transformation in terms of structure, method or function, etc. by those of ordinary skill in the art according to the spirit essence of the present invention fall within the protection scope of the present invention.

Claims

1. An electromagnetic shutter device for a photolithography machine, characterized in that: It comprises a blade and a deflection driving mechanism for driving the blade to deflect back and forth. The yaw drive mechanism includes an electromagnetic seat and a transmission shaft. The electromagnetic seat comprises a magnetic outer cylinder with a hollow chamber, a coil for electromagnetic conversion is arranged in the hollow chamber, fixed iron cores are arranged at both ends of the hollow chamber, any of the fixed iron cores is provided with a bearing, and a scroll torsion spring seat is arranged on the exposed surface of one of the fixed iron cores, One end of the transmission shaft is connected to the scroll torsion spring seat, and the other end passes through the electromagnetic seat and is connected to the blade. The transmission shaft is rotatably connected to any of the bearings. The transmission shaft is sleeved with a moving iron core located in the hollow chamber, and the moving iron core and the transmission shaft are circumferentially locked and axially slidably matched. The two axial ends of the moving iron core are respectively provided with inclined surfaces, and any of the fixed iron cores is provided with a driving surface facing the moving iron core for driving the moving iron core to rotate, and the rotation driving directions of the two fixed iron cores are in the same direction; There is an alignment structure between the fixed iron core and the bobbin of the coil, and the alignment structure is the cooperation of convex points and concave points.

2. According to claim 1, a light electromagnetic shutter device for a lithography machine, characterized in that: The moving iron core is in a propeller structure, and the axial end surface of any blade of the moving iron core is in a spiral sector.

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