Device transfer apparatus and device for transferring devices

Abstract

The present invention relates to a device for transferring and removing components, wherein the transfer device comprises a three-dimensional movable bracket, a single-claw clamping mechanism for TO components, a multi-claw clamping mechanism for TO components and a suction nozzle; the three-dimensional movable bracket can respectively control the single-claw clamping mechanism for TO components to move in at least one direction, the multi-claw clamping mechanism for TO components to move in at least one direction and the suction nozzle to move in at least one direction. When the number of TO components is small and the qualified rate is low, the single-claw clamping mechanism is selected for use alone, which improves the accuracy of the transfer and reduces the energy demand; when the number of TO components is large and the qualified rate is high, the multi-claw clamping mechanism and the suction nozzle are selected for simultaneous use, which can simultaneously clamp multiple TO components for transfer, and also improve the efficiency and accuracy of sorting and removing components of TO components.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor device production equipment, and in particular to a device transfer apparatus and a device for transferring a device. Background Art

[0002] The TO packaging system is a common and widely used device in the semiconductor field. After the TO device is prepared, it needs to be placed on a test board for quality testing. After the test, qualified and unqualified products need to be sorted out. Once a selection error occurs, unqualified TO devices will be mixed with qualified products, which will affect a series of functions of subsequent TO devices. Therefore, the sorting and selecting work is very important. The current sorting and selecting work is mainly done manually after the test is completed. This is not only inefficient, but also has poor consistency in manual operation, and often causes damage or potential damage to TO devices.

[0003] Therefore, it is necessary to provide a device transfer apparatus and a device for shifting a device to solve the deficiencies of the prior art. Summary of the invention

[0004] In order to solve the problems in the prior art, the present invention provides a device for transferring a component and a device for transferring a component.

[0005] A device transfer apparatus, comprising a three-dimensional movable bracket, a TO device single-claw clamping mechanism, a TO device multi-claw clamping mechanism and a suction nozzle respectively connected to the three-dimensional movable bracket;

[0006] The three-dimensional movable bracket can respectively control the TO device single-claw clamping mechanism to move in at least one direction, the TO device multi-claw clamping mechanism to move in at least one direction, and the suction nozzle to move in at least one direction.

[0007] Further, the three-dimensional movable bracket includes a first guide rail in the X direction, a second guide rail in the X direction, a third guide rail in the Y direction slidably connected to the first guide rail and the second guide rail, a fourth guide rail in the Y direction slidably connected to the first guide rail and the second guide rail, a fifth guide rail in the Z direction slidably connected to the third guide rail, a sixth guide rail in the Z direction slidably connected to the third guide rail, and a seventh guide rail in the Z direction slidably connected to the fourth guide rail;

[0008] The TO device single-claw clamping mechanism is slidably connected to the fifth guide rail, the TO device multi-claw clamping mechanism is slidably connected to the sixth guide rail, and the suction nozzle is slidably connected to the seventh guide rail;

[0009] The X direction, the Y direction and the Z direction are perpendicular to each other.

[0010] Further, the TO device single-claw clamping mechanism includes a fixed arm, a finger cylinder and two fixed blocks;

[0011] The finger cylinder comprises a cylinder body and two clamping claws, the cylinder body is connected to one end of the fixed arm, and the two clamping claws are connected to the two fixed blocks in a one-to-one correspondence;

[0012] A limit cavity that matches the TO device and can be opened and closed is formed between the two fixing blocks.

[0013] Further, the fixed arm includes a main arm and an L arm, the L arm includes a first plate and a second plate which are perpendicular and connected to each other, the first plate is perpendicularly connected to one end of the main arm, the length of the second plate is less than the length of the main arm, and the second plate and the main arm are on the same side of the first plate;

[0014] The finger cylinder is connected to a side of the second plate away from the main arm, and the clamping claw of the finger cylinder can translate in a direction close to or away from the second plate.

[0015] Further, the TO device multi-claw clamping mechanism includes a fixed plate, a plurality of fixed arms, a plurality of finger cylinders and a plurality of fixed blocks;

[0016] The plurality of fixing arms are respectively parallel and respectively connected to the fixing plate;

[0017] The plurality of finger cylinders are connected to the plurality of fixed arms in a one-to-one correspondence;

[0018] Each of the finger cylinders comprises a cylinder body and two clamping jaws, wherein the cylinder body is connected to the fixed arm, and each of the two clamping jaws is connected to a fixed block, and a limit cavity which matches the TO device and can be opened and closed is formed between the two fixed blocks.

[0019] Further, the fixed arm includes a main arm and an L arm, the L arm includes a first plate and a second plate which are perpendicular and connected to each other, the first plate is perpendicularly connected to one end of the main arm, the length of the second plate is less than the length of the main arm, and the second plate and the main arm are on the same side of the first plate;

[0020] The finger cylinder is connected to a side of the second plate away from the main arm, and the clamping claw of the finger cylinder can translate in a direction close to or away from the second plate.

[0021] Furthermore, a first sliding block is provided on a side of the main arm away from the L arm, and a first sliding rail perpendicular to the main arm is provided on the fixed plate;

[0022] The plurality of fixed arms are respectively slidably connected through the cooperation of the first sliding block and the first sliding rail.

[0023] Furthermore, it also includes a distance-adjusting plate and a lifting member, wherein the fixed end of the lifting member is connected to the fixed plate, and the lifting end of the lifting member is connected to the distance-adjusting plate;

[0024] The distance adjusting plate is parallel to the fixed plate, and the distance adjusting plate is provided with a plurality of second slide rails, and the distances between the plurality of second slide rails gradually increase or decrease along the extension direction of the main arm;

[0025] A second sliding block is provided on one side of the main arm away from the fixed plate, and the plurality of main arms are slidably connected to the plurality of second sliding rails in a one-to-one correspondence via the second sliding blocks.

[0026] Furthermore, the L-arm is connected to a monitoring board, and a distance sensor is provided on the monitoring board. The distance sensor is used to detect the distance between the monitoring board and the fixed block.

[0027] Furthermore, an opening for allowing the legs of the TO device to pass through is provided at one end of the limiting cavity away from the finger cylinder.

[0028] Furthermore, one end of the opening close to the limiting cavity extends around it to form an annular clamping groove, and the size and shape of the clamping groove match the TO device.

[0029] Furthermore, a plurality of leg holes are provided at the edge of the opening, and the leg holes are formed by extending from the edge of the opening into the fixing block, and the plurality of leg holes match the plurality of legs of the TO device.

[0030] Furthermore, each of the fixing blocks is provided with a semi-limiting cavity on a side opposite to another fixing block;

[0031] When the two fixing blocks are tightly fitted, the two semi-limiting cavities form the limiting cavity.

[0032] Furthermore, an end of each of the fixing blocks away from the finger cylinder is provided with an inclined chamfer, and the inclined chamfers of the two fixing blocks form an avoidance groove recessed toward the limiting cavity.

[0033] Based on the same inventive concept, the present invention also provides a device for transferring a device, including the device transferring apparatus.

[0034] Furthermore, it also includes a first conveying mechanism, a second conveying mechanism and a third conveying mechanism, and the conveying directions of the first conveying mechanism, the second conveying mechanism and the third conveying mechanism are all X directions;

[0035] The first conveying mechanism and the third conveying mechanism are respectively arranged on both sides of the second conveying mechanism; the first conveying mechanism is used to convey the test carrier with multiple TO devices, the second conveying mechanism is used to convey the packaging carrier, and the third conveying mechanism is used to convey the supplementary carrier.

[0036] Furthermore, it also includes a bad area, and the bad area is arranged between the first conveying mechanism and the second conveying mechanism.

[0037] The technical solution of the present invention has the following advantages compared with the closest prior art:

[0038] The device transfer device provided by the technical solution provided by the present invention can control the movement of the single-claw clamping mechanism of the TO device, the multi-claw clamping mechanism of the TO device and the suction nozzle in at least one direction respectively through the three-dimensional mobile bracket, that is, the above two clamping mechanisms and the suction nozzle can transfer positions in three-dimensional space, and the above two clamping mechanisms and the suction nozzle both have the functions of clamping and grabbing the TO device, so that the transfer of the TO device can be automatically completed under the continuous operation of clamping, transferring position and placing, replacing the direct contact of the TO device by manual labor, avoiding damage or potential damage to the TO device. In addition, different transfer modes can be selected according to the total number and qualified rate of TO devices. For example, when the number of TO devices is small and the qualified rate is low, the single-claw clamping mechanism can be selected for single use, which not only improves the accuracy of the transfer, but also reduces the energy demand; when the number of TO devices is large and the qualified rate is high, the multi-claw clamping mechanism and the suction nozzle are selected for simultaneous use, which can clamp multiple TO devices at the same time for transfer, and also improve the efficiency and accuracy of sorting and transferring TO devices. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] Figure 1 It is a structural schematic diagram of a device for shifting a component provided by the present invention;

[0040] Figure 2 It is a front view of the multi-claw clamping mechanism for a TO device provided by the present invention (the fixing plate is not shown);

[0041] Figure 3 It is a side view of the multi-claw clamping mechanism for TO devices provided by the present invention (the fixing plate is not shown);

[0042] Figure 4 It is a structural schematic diagram of the single-claw clamping mechanism for a TO device provided by the present invention;

[0043] Figure 5 yes Figure 4 A partial enlarged view of part A;

[0044] Figure 6 It is a side view of the single-claw clamping mechanism for a TO device provided by the present invention.

[0045] Among them, 1-main arm; 2-L arm; 3-monitoring board; 4-distance sensor; 5-finger cylinder; 6-fixed block; 7-first slider; 8-second slider; 9-limiting cavity; 10-opening; 11-support foot hole; 12-support foot; 13-tilted chamfer; 14-TO device; 15-first guide rail; 16-second guide rail; 17-third guide rail; 18-fourth guide rail; 19-first conveying mechanism; 20-second conveying mechanism; 21-test carrier; 22-packaging carrier; 23-TO device multi-claw clamping mechanism; 24-support column; 25-sixth guide rail; 26-seventh guide rail; 27-suction nozzle; 28-feeding carrier; 29-lifting piece; 30-distance adjusting plate; 31-second slide rail; 32-first slide rail; 33-third conveying mechanism; 34-fifth guide rail; 35-TO device single-claw clamping mechanism. DETAILED DESCRIPTION

[0046] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention. Figure 1-6 The present application is described in detail with reference to embodiments.

[0047] The present invention provides a device transfer apparatus, specifically a TO device transfer apparatus, which includes a three-dimensional movable bracket, a TO device single-claw clamping mechanism 35, a TO device multi-claw clamping mechanism 23 and a suction nozzle 27 respectively connected to the three-dimensional movable bracket; the three-dimensional movable bracket can respectively control the TO device single-claw clamping mechanism 35 to move in at least one direction, the TO device multi-claw clamping mechanism 23 to move in at least one direction and the suction nozzle 27 to move in at least one direction.

[0048] The three-dimensional mobile bracket can control the movement of the TO device single-claw clamping mechanism 35, the TO device multi-claw clamping mechanism 23 and the suction nozzle 27 in at least one direction, that is, the above two clamping mechanisms and the suction nozzle 27 can be transferred in three-dimensional space, and the above two clamping mechanisms and the suction nozzle 27 also have the function of clamping and grabbing the TO device 14, so the transfer of the TO device 14 can be automatically completed under the continuous operation of clamping, transferring position and placing, replacing the direct contact of the TO device 14 by manual labor, avoiding damage or potential damage to the TO device 14. In addition, different transfer modes can be selected according to the total number and qualified rate of the TO device 14. For example, when the number of TO devices 14 is small and the qualified rate is low, the single-claw clamping mechanism can be selected for use alone, which not only improves the accuracy of the transfer, but also reduces the energy demand; when the number of TO devices 14 is large and the qualified rate is high, the multi-claw clamping mechanism and the suction nozzle 27 are selected for simultaneous use, and multiple TO devices 14 can be clamped and transferred at the same time, which also improves the efficiency and accuracy of sorting and transferring the TO devices 14.

[0049] In some embodiments of the present invention, the three-dimensional movable bracket includes a first guide rail 15 in the X direction, a second guide rail 16 in the X direction, a third guide rail 17 in the Y direction slidably connected to the first guide rail 15 and the second guide rail 16 respectively, a fourth guide rail 18 in the Y direction slidably connected to the first guide rail 15 and the second guide rail 16 respectively, a fifth guide rail 34 in the Z direction slidably connected to the third guide rail 17, a sixth guide rail 25 in the Z direction slidably connected to the third guide rail 17, and a seventh guide rail 26 in the Z direction slidably connected to the fourth guide rail 18; the TO device single-claw clamping mechanism 35 is slidably connected to the fifth guide rail 34, the TO device multi-claw clamping mechanism 23 is slidably connected to the sixth guide rail 25, and the suction nozzle 27 is slidably connected to the seventh guide rail 26; the X direction, the Y direction and the Z direction are perpendicular to each other.

[0050] The X direction in the three-dimensional mobile bracket can be horizontal, the Y direction can be horizontal, and the Z direction can be vertical. The first guide rail 15 and the second guide rail 16 are both horizontal guide rails, and both ends of the guide rails are supported to a certain height by the support column 24. The third guide rail 17 and the fourth guide rail 18 are both horizontal guide rails, and are both mounted on the two horizontal guide rails. Both can slide on the first guide rail 15 and the second guide rail 16 along the horizontal transverse direction. The fifth guide rail 34 is a vertical guide rail, and it itself is arranged on the third guide rail 17 and can slide along the horizontal longitudinal direction. Then the TO device single-claw clamping mechanism 35 is set on the fifth guide rail 34 and can slide along the vertical direction; the sixth guide rail 25 is a vertical guide rail, and it itself is set on the third guide rail 17 and can slide along the horizontal longitudinal direction, and then the TO device multi-claw clamping mechanism 23 is set on the sixth guide rail 25 and can slide along the vertical direction; the seventh guide rail 26 is a vertical guide rail, and it itself is set on the fourth guide rail 18 and can slide along the horizontal longitudinal direction, and then the suction nozzle 27 is set on the seventh guide rail 26 and can slide along the vertical direction. Therefore, with the sliding of the third guide rail 17, the sliding of the fourth guide rail 18, the sliding of the fifth guide rail 34, the sliding of the sixth guide rail 25, the sliding of the seventh guide rail 26, the sliding of the single-claw clamping mechanism, the sliding of the multi-claw clamping mechanism and the sliding of the suction nozzle 27, the positions of the TO device single-claw clamping mechanism 35, the TO device multi-claw clamping mechanism 23 and the suction nozzle 27 in three dimensions can be flexibly adjusted and transferred. Combined with the clamping and placing functions of the two clamping mechanisms and the function of the suction nozzle 27, it can be applied to the sorting and selecting process of the TO device 14 to avoid damage or potential damage to the TO device 14, and at the same time, the efficiency and accuracy of sorting and selecting the TO device 14 are also improved.

[0051] In some embodiments of the present invention, the single-claw clamping mechanism 35 of the TO device includes a fixed arm, a finger cylinder 5 and two fixed blocks 6; the finger cylinder 5 includes a cylinder body and two clamping jaws, the cylinder body is connected to one end of the fixed arm, and the two clamping jaws are connected to the two fixed blocks 6 one by one; a limiting cavity 9 that matches the TO device 14 and can be opened and closed is formed between the two fixed blocks 6. Through the relative movement between the two clamping claws of the finger cylinder 5, the two fixed blocks 6 connected thereto can be driven to move relatively closer or farther away. In the process of approaching, the limiting cavity 9 formed between the two fixed blocks 6 is gradually closed, and in the process of moving away, the limiting cavity 9 formed between the two fixed blocks 6 is gradually opened; and the limiting cavity 9 is matched with the TO device 14. By opening and closing the limiting cavity 9, the TO device 14 can enter the limiting cavity 9 to complete the clamping operation of the TO device 14; the fixed arm connected to the cylinder body of the finger cylinder 5 can drive the position of the entire clamping mechanism to move. After the clamping operation and position movement are completed successively, the limiting cavity 9 is opened again to place the TO device 14 at a new position. In this way, the clamping mechanism can replace manual direct contact with the TO device 14, avoiding damage or potential damage to the TO device 14, and also improving the efficiency and accuracy of sorting and selecting the TO device 14.

[0052] In some embodiments of the present invention, the fixed arm includes a main arm 1 and an L arm 2, the L arm 2 includes a first plate and a second plate which are perpendicular and connected to each other, the first plate is perpendicularly connected to one end of the main arm 1, the length of the second plate is less than the length of the main arm 1, and the second plate and the main arm 1 are on the same side of the first plate; the finger cylinder 5 is connected to the side of the second plate away from the main arm 1, and the clamp of the finger cylinder 5 can translate in the direction of approaching or moving away from the second plate. The L arm 2 and the main arm 1 form a U-shaped fixed arm, but due to the different functions of different positions of the fixed arm, the lengths of the two vertical sides of the U-shaped fixed arm are quite different, the length of the main arm 1 is longer, and the length of the second plate is shorter, so the outer side of the main arm 1 is connected to the mother device, and the outer side of the second plate is connected to the finger cylinder 5, and the clamp of the finger cylinder 5 is a parallel clamp, and its translation direction is in the direction of approaching and moving away from the second plate.

[0053] In some embodiments of the present invention, the multi-claw clamping mechanism 23 of the TO device includes a fixed plate, multiple fixed arms, multiple finger cylinders 5 and multiple fixed blocks 6; the multiple fixed arms are respectively parallel and respectively connected to the fixed plate; the multiple finger cylinders 5 are connected to the multiple fixed arms one by one; each finger cylinder 5 includes a cylinder body and two clamping claws, the cylinder body is connected to the fixed arm, the two clamping claws are each connected to a fixed block 6, and a limiting cavity 9 that matches the TO device 14 and can be opened and closed is formed between the two fixed blocks 6 connected to the same finger cylinder 5. Through the relative movement between the two clamping claws of the finger cylinder 5, the two fixed blocks 6 connected thereto can be driven to move relatively close or away from each other. In the process of approaching, the limiting cavity 9 formed between the two fixed blocks 6 is gradually closed, and in the process of moving away, the limiting cavity 9 formed between the two fixed blocks 6 is gradually opened; the limiting cavity 9 is matched with the TO device 14, and the TO device 14 can enter the limiting cavity 9 through the opening and closing of the limiting cavity 9 to complete the clamping operation of the TO device 14; and a plurality of fixed arms are connected to the fixed plate, each of which is connected to the finger cylinder 5, so the fixed plate can drive the position of the entire clamping mechanism to move, that is, it can drive the movement of the plurality of finger cylinders 5 and the fixed blocks 6 connected thereto; after the clamping operation and position movement are completed successively, the limiting cavity 9 is opened again, and the TO device 14 is placed at a new position, so that the clamping mechanism can replace the direct contact of the manual operation with the TO device 14, avoiding damage or potential damage to the TO device 14, and can clamp a plurality of TO devices 14 for transfer at the same time, and also improve the efficiency and accuracy of sorting and transferring the TO device 14.

[0054] In some embodiments of the present invention, the fixed arm includes a main arm 1 and an L arm 2, the L arm 2 includes a first plate and a second plate which are perpendicular and connected to each other, the first plate is perpendicularly connected to one end of the main arm 1, the length of the second plate is less than the length of the main arm 1, and the second plate and the main arm 1 are on the same side of the first plate; the finger cylinder 5 is connected to the side of the second plate away from the main arm 1, and the clamp of the finger cylinder 5 can translate in the direction of approaching or moving away from the second plate. The L arm 2 and the main arm 1 form a U-shaped fixed arm, but due to the different functions of different positions of the fixed arm, the lengths of the two vertical sides of the U-shaped fixed arm are quite different, the length of the main arm 1 is longer, and the length of the second plate is shorter, so the outer side of the main arm 1 is connected to the mother device, and the outer side of the second plate is connected to the finger cylinder 5, and the clamp of the finger cylinder 5 is a parallel clamp, and its translation direction is in the direction of approaching and moving away from the second plate.

[0055] In some embodiments of the present invention, a first slider 7 is provided on the side of the main arm 1 away from the L arm 2, and a first slide rail 32 perpendicular to the main arm 1 is provided on the fixed plate; multiple fixed arms are respectively connected by the cooperation and sliding of the first slider 7 and the first slide rail 32. Multiple fixed arms are respectively connected to the first slide rail 32 on the fixed plate, so the position of each fixed arm can be adjusted by sliding in the first slide rail 32, and the first slide rail 32 is selected to be set in the horizontal direction, while the main arm 1 of the fixed arm is in a vertical state, the first plate is in a horizontal direction, the second plate is in a vertical state, and the clamping claw of the finger cylinder 5 is in a vertical state and is located below the cylinder body; by sliding each main arm 1 to adjust the position of its corresponding limit cavity 9, the position of multiple pairs of fixed blocks 6 is adjusted. When multiple pairs of fixed blocks 6 are used at the same time to clamp multiple TO devices 14 at the same time, each grasping unit (that is, a unit consisting of a main arm 1, a finger cylinder 5 and two fixed blocks 6 that can clamp a TO device 14) and the corresponding TO device 14 are easily aligned and matched through the sliding between the first slide rail 32 and the main arm 1, which is convenient for simultaneous clamping and transfer.

[0056] In some embodiments of the present invention, a distance-adjusting plate 30 and a lifting member 29 are further included, wherein the fixed end of the lifting member 29 is connected to the fixed plate, and the lifting end of the lifting member 29 is connected to the distance-adjusting plate 30; the distance-adjusting plate 30 is parallel to the fixed plate, and the distance-adjusting plate 30 is provided with a plurality of second slide rails 31, and the distance between the plurality of second slide rails 31 gradually increases or decreases along the extension direction of the main arm 1; a second sliding block 8 is provided on the side of the main arm 1 away from the fixed plate, and the plurality of main arms 1 are slidingly connected with the plurality of second slide rails 31 one by one through their second sliding blocks 8. The distance-adjusting plate 30 can be raised and lowered along with the lifting member 29. During the lifting process, the distance-adjusting plate 30 can only slide in the horizontal direction because the position of the main arm 1 in the vertical direction is fixed. Moreover, as the distance-adjusting plate 30 is raised and lowered, the positions of its second slide rail 31 and the second slider 8 at the same height also change, and either the mutual distance between the multiple main arms 1 increases or the mutual distance between the multiple main arms 1 decreases. Therefore, the lifting and lowering of the distance-adjusting plate 30 can control the multiple main arms 1 to slide in the second slide rail 31 respectively, thereby adjusting the distance between the main arms 1, realizing the automatic control of the positions and mutual distances of multiple grasping units (i.e., a unit consisting of a main arm 1, a finger cylinder 5 and two fixed blocks 6 that can clamp a TO device 14), thereby improving the adjustment rate and adjustment accuracy.

[0057] In some embodiments of the present invention, the L arm 2 is connected to a monitoring board 3, and a distance sensor 4 is provided on the monitoring board 3, and the distance sensor 4 is used to detect the distance between the monitoring board 3 and the fixed block 6. The monitoring board 3 can be arranged below the first board, at a position opposite to the second board, and the distance sensor 4 is arranged on the monitoring board 3, and its detection direction is toward the fixed block 6. It can determine the distance between the two fixed blocks 6 by detecting the distance between the fixed block 6 and the distance sensor 4, that is, it can determine the opening and closing of the limit cavity 9.

[0058] In some embodiments of the present invention, an end of the limiting cavity 9 away from the finger cylinder 5 is provided with an opening 10 for the legs 12 of the TO device 14 to pass through. The TO device 14 generally includes a main body and radial legs 12 arranged below the main body. When the TO device 14 is centrally placed on the test board, the legs 12 are inserted into specific holding holes for positioning and limiting. The limiting cavity 9 is mainly used to limit and accommodate the main body of the TO device 14, and the legs 12 of the TO device 14 can extend out of the limiting cavity 9 through the preset opening 10, which greatly reduces the volume of the limiting cavity 9 and makes the position of the TO device 14 in the limiting cavity 9 more stable and less likely to move, thereby enhancing the clamping effect.

[0059] In some embodiments of the present invention, one end of the opening 10 close to the limiting cavity 9 extends around it to form an annular clamping groove, and the size and shape of the clamping groove match the TO device 14. The opening 10 is used to allow the legs 12 of the TO device 14 to extend and to limit the body of the TO device 14 in the limiting cavity 9. At this time, the TO device 14 is in a suspended state, that is, the position of the TO device 14 in the vertical direction is limited by gravity, and the position in the horizontal direction is not accurately limited. Moreover, even in the vertical direction, when the entire clamping mechanism is shaken or flipped, etc., the stability of its vertical position cannot be guaranteed. The clamping groove forms a step at the upper end of the opening 10, and the outer peripheral edge of the clamping groove matches the shape and size of the main body of the TO device 14, so that the main body of the TO device 14 can be embedded in the clamping groove. The clamping operation requires the two fixing blocks 6 to move from far away to close, and gradually close the limiting cavity 9 to limit the main body of the TO device 14 in the limiting cavity 9. The entire TO device 14 is suspended in the limiting cavity 9. Then, the finger cylinder 5 controls the two fixing blocks 6 to move away until the main body of the TO device 14 falls into the clamping groove, and then quickly approach, so that the TO device 14 is clamped in the clamping groove, completing the vertical and horizontal limitation of the TO device 14. No matter how violent the clamping mechanism is in the subsequent operation, the position of the TO device 14 is quite stable.

[0060] In some embodiments of the present invention, a plurality of leg holes 11 are provided at the edge of the opening 10, and the plurality of leg holes 11 match the plurality of legs 12 of the TO device 14. It has been described above that the legs 12 of the TO device 14 gradually move away from each other in the direction away from the main body thereof, thereby forming radial legs 12, and the setting of the buckle can facilitate the passage of the legs 12, and the setting of the leg holes 11 is more in line with the position and shape of the legs 12, and its position corresponds one-to-one with the legs 12, so that in the process of the fixing blocks 6 approaching each other and closing the limiting cavity 9, the legs 12 of the TO device 14 can be avoided more accurately to prevent damage thereto, and it is convenient for the clamping and positioning thereof.

[0061] In some embodiments of the present invention, each fixing block 6 is provided with a half-limiting cavity 9 on the side opposite to the other fixing block 6; when the two fixing blocks 6 are tightly fitted, the two half-limiting cavities 9 form a limiting cavity 9. The two limiting half-cavities are the halves of the limiting cavity 9, that is, the depressions formed by the inward extension of the fixing block 6, and the two depressions together form the limiting cavity 9. The limiting cavity 9 can pass through the entire fixing block 6 in a direction perpendicular to the movement direction of the fixing block 6, and in the direction of movement of the fixing block 6, it is in the form of a depression. Therefore, in the process of clamping the TO device 14, the two fixing blocks 6 can be observed through both sides of the limiting cavity 9, which improves the convenience of operation and increases the accuracy of clamping.

[0062] In some embodiments of the present invention, each fixed block 6 is provided with an inclined chamfer 13 at one end away from the finger cylinder 5, and the inclined chamfers 13 of the two fixed blocks 6 form an avoidance groove recessed into the limit cavity 9. It has been described above that when the TO device 14 is set on the test board, it is inserted into the corresponding hole of the test board through the support legs 12, and the installation position corresponding to each TO device 14 on the test board is a conical or truncated cone protrusion, and then a socket is provided on the side wall of the protrusion. When the TO device 14 is placed on the test board, the support legs 12 are inserted into the socket on the side wall, and the main body is placed above the protrusion; when the two fixed blocks 6 clamp the TO device 14 from both sides, the two inclined chamfers 13 can avoid the protrusion on the installation position, so that the matching degree between the clamping mechanism and the test board is further improved.

[0063] Based on the same inventive concept, the present invention also provides a device for transferring a device, including a device transferring apparatus.

[0064] In some embodiments of the present invention, a first conveying mechanism 19, a second conveying mechanism 20 and a third conveying mechanism 33 are further included, and the conveying directions of the first conveying mechanism 19, the second conveying mechanism 20 and the third conveying mechanism 33 are all in the X direction;

[0065] The first conveying mechanism 19 and the third conveying mechanism 33 are respectively arranged on both sides of the second conveying mechanism 20; the first conveying mechanism 19 is used to convey the test carrier 21 equipped with a plurality of TO devices 14,

[0066] The second conveying mechanism 20 is used to convey the packaging carrier 22 , and the third conveying mechanism 33 is used to convey the supplement carrier 28 .

[0067] In some embodiments of the present invention, a bad area is further included, and the bad area is arranged between the first conveying mechanism 19 and the second conveying mechanism 20 .

[0068] The device for selecting the TO device 14 needs to sort the TO devices 14 on the test board, distinguish qualified products from defective areas, and sort them to different positions, that is, transfer the defective products to the defective area, and transfer the qualified products to the packaging carrier 22. After the packaging carrier 22 is full, it is packaged and packed, and the qualified products can be packaged continuously. The packaging of the products is completed at the same time during the sorting and selecting process. The transfer device and the device for selecting the TO device 14 provided by the present application are used for selecting and packaging, which not only improves the sorting and selecting efficiency and the packaging efficiency of the TO device 14, but also improves the accuracy of sorting and selecting, and also avoids damage and potential damage to the TO device 14 that is very easy to occur during manual operation. Specifically, the first conveying mechanism 19, the second conveying mechanism 20 and the third conveying mechanism 33 are arranged between the first guide rail 15 and the second guide rail 16 of the three-dimensional mobile bracket, and are arranged at a lower position relative to the three-dimensional mobile bracket, for example, they can be arranged at the same height as or lower than the bottom end of the support column 24 supporting the first guide rail 15 and the second guide rail 16. Then the first conveying mechanism 19 continuously conveys the test carrier 21, and the test carrier 21 is covered with TO devices 14. In addition, a mechanism or component capable of obtaining information of the TO devices 14 on the test carrier 21 is arranged at the starting point of the first conveying mechanism 19, that is, after the TO devices 14 start to be conveyed on the first conveying mechanism 19, the number of TO devices 14 thereon and the pass or fail information of each TO device 14 will be obtained, and at the same time, the second conveying mechanism 19 The mechanism 20 continuously conveys the packaging carrier 22, and the third conveying mechanism 33 continuously conveys the replenishing carrier 28, and the first conveying mechanism 19, the second conveying mechanism 20 and the third conveying mechanism 33 all have mechanisms or components that can pause and position the test carrier 21, the packaging carrier 22 and the replenishing carrier 28 thereon at predetermined positions; and the second conveying mechanism 20 also has two such mechanisms or components, which can respectively position the packaging carrier 22 at two different positions, and the position where the first conveying mechanism 19 positions the test carrier 21, the first position where the second conveying mechanism 20 positions the packaging carrier 22 and the defective area are on the same straight line, and the second position where the second conveying mechanism 20 positions the packaging carrier 22 and the position where the third conveying mechanism 33 positions the replenishing carrier 28 are on the same straight line, and the above two straight lines are both horizontal and longitudinal straight lines. Therefore, when the device is in operation, it is necessary to first select different transfer modes according to the total number and pass rate of the TO devices 14. For example, when the number of TO devices 14 is small and the pass rate is low, a single-claw clamping mechanism can be selected for use alone, which not only improves the accuracy of the transfer, but also reduces the energy demand; when the number of TO devices 14 is large and the pass rate is high, a multi-claw clamping mechanism and a suction nozzle 27 are selected for simultaneous use, which can clamp multiple TO devices 14 at the same time for transfer, and also improves the efficiency and accuracy of sorting and transferring the TO devices 14.

[0069] When the single-claw clamping mechanism is used alone, the process is as follows:

[0070] First, the first conveying mechanism 19 obtains the information of the TO device 14 on the test carrier 21 and positions it at a predetermined position, and at the same time, the second conveying mechanism 20 conveys the packaging carrier 22 and positions it at a predetermined position; at this time, the third guide rail 17 slides to above the straight line where the defective area is located, and then the fourth guide rail 18 slides to above the test board, and the clamping mechanism slides on the third guide rail 17 to move up and down, and begins to clamp and pull up the TO devices 14 on the test board one by one; every time a TO device 14 is clamped, if the TO device 14 is a qualified product, the fourth guide rail 18 slides on the third guide rail 17 to above the packaging carrier 22, and then the clamping mechanism descends along the fourth guide rail 18 and places the TO device 14 at the corresponding position of the packaging carrier 22. If the TO device 14 is a defective product, or If there is a defective product, the fourth guide rail 18 slides on the third guide rail 17 to above the defective area, and then the clamping mechanism descends along the fourth guide rail 18 and places the TO device 14 in the defective area; in the above-mentioned shifting process, every time the TO devices 14 on the test carrier 21 are all taken away, the position restriction of the test carrier 21 is released, and then it is gradually removed from the first conveying mechanism 19, and then a new test carrier 21 is placed on the first conveying mechanism 19, and the information and positioning are successively obtained by the first transmission mechanism; in the above-mentioned shifting process, every time the position on the packaging carrier 22 is filled with TO devices 14, the position restriction of the packaging carrier 22 is released, and then it is gradually removed from the second conveying mechanism 20, and then a new packaging carrier 22 is placed on the second conveying mechanism 20 and positioned at a predetermined position.

[0071] When the multi-claw clamping mechanism and the suction nozzle 27 are used simultaneously, the process is as follows:

[0072] First, the first conveying mechanism 19 obtains the information of the TO device 14 on the test carrier 21 and positions it at a predetermined position. At the same time, the second conveying mechanism 20 conveys the packaging carrier 22 and positions it at the first predetermined position, that is, in a straight line with the position where the test carrier 21 is positioned. The third conveying mechanism 33 conveys the feeding carrier 28 and positions it at a predetermined position. At this time, the third guide rail 17 slides to the top of the straight line where the defective area is located, and then the fifth guide rail 34 slides to the top of the test board. The multi-claw clamping mechanism slides on the fifth guide rail 34 to move up and down, and starts Multiple TO devices 14 on the test board are clamped and pulled up simultaneously. After clamping multiple TO devices 14, if multiple TO devices 14 include defective products, the fifth guide rail 34 slides on the third guide rail 17 to the top of the defective area, and then the multi-claw clamping mechanism descends along the fifth guide rail 34, and opens the grasping unit clamping the defective products (i.e., a unit consisting of a main arm 1, a finger cylinder 5 and two fixed blocks 6 that can clamp a TO device 14), and places the defective products in the defective area, and then the fifth guide rail 34 slides to the top of the feed carrier 28, and then the multi-claw clamping mechanism The mechanism descends and places the remaining multiple TO devices 14 in the replenishing carrier 28 until the replenishing carrier 28 is full (or not full, but basically full, just lacking a few defective products); after the replenishing carrier 28 is full, the next time the multi-claw clamping mechanism grabs multiple TO devices 14 and places the defective ones in the defective area (if all are qualified products, there is no need to place the defective products in the defective area), the remaining multiple qualified TO devices 14 need to be placed in the packaging carrier 22, and this is placed several times until the packaging carrier 22 is basically full or full (such as If defective products appear during the placement process, causing the position of the defective products to be vacant, it is basically full; if no defective products appear during the placement process, it is fully placed). After that, the second conveying mechanism 20 conveys the packaging carrier 22 to the second predetermined positioning position, that is, it is on the same straight line as the position of the replenishment carrier 28, and then the sixth guide rail 25 slides to the top of the replenishment carrier 28, the suction nozzle 27 descends and sucks up the TO device 14 in the replenishment carrier 28 and transfers it to the vacant position of the packaging carrier 22. If there are multiple vacancies, the suction nozzle 27 needs to perform multiple transfers.In the above-mentioned shifting process, whenever all the TO devices 14 on the test carrier 21 are taken away, the position restriction on the test carrier 21 is released, and then it gradually leaves the first conveying mechanism 19, and then a new test carrier 21 is placed on the first conveying mechanism 19, and the first transmission mechanism successively obtains information and positions it; in the above-mentioned shifting process, whenever the position on the packaging carrier 22 is filled with TO devices 14, the position restriction on the packaging carrier 22 is released, and then it gradually leaves the second conveying mechanism 20, and then a new packaging carrier 22 is placed on the second conveying mechanism 20 and positioned at the predetermined position; of course, the defective products in the defective area must also be cleaned up in time so that it can receive defective products at any time.

[0073] It should be noted that, in this document, relational terms such as “first” and “second” are merely used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations.

[0074] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A device for removing a component, characterized in that: It comprises a device transfer apparatus, the device transfer apparatus comprising a three-dimensional movable bracket, a TO device single-claw clamping mechanism (35), a TO device multi-claw clamping mechanism (23) and a suction nozzle (27) respectively connected to the three-dimensional movable bracket; The three-dimensional movable bracket can respectively control the TO device single-claw clamping mechanism (35) to move in at least one direction, the TO device multi-claw clamping mechanism (23) to move in at least one direction, and the suction nozzle (27) to move in at least one direction; The three-dimensional movable bracket comprises a first guide rail (15) in the X direction, a second guide rail (16) in the X direction, a third guide rail (17) in the Y direction slidably connected to the first guide rail (15) and the second guide rail (16), a fourth guide rail (18) in the Y direction slidably connected to the first guide rail (15) and the second guide rail (16), a fifth guide rail (34) in the Z direction slidably connected to the third guide rail (17), a sixth guide rail (25) in the Z direction slidably connected to the third guide rail (17), and a seventh guide rail (26) in the Z direction slidably connected to the fourth guide rail (18); The TO device single-claw clamping mechanism (35) is slidably connected to the fifth guide rail (34), the TO device multi-claw clamping mechanism (23) is slidably connected to the sixth guide rail (25), and the suction nozzle (27) is slidably connected to the seventh guide rail (26); The X direction, the Y direction and the Z direction are perpendicular to each other; It also includes a first conveying mechanism (19), a second conveying mechanism (20) and a third conveying mechanism (33), wherein the conveying directions of the first conveying mechanism (19), the second conveying mechanism (20) and the third conveying mechanism (33) are all in the X direction; The first conveying mechanism (19) and the third conveying mechanism (33) are respectively arranged on both sides of the second conveying mechanism (20); the first conveying mechanism (19) is used to convey a test carrier (21) equipped with a plurality of TO devices (14), the second conveying mechanism (20) is used to convey a packaging carrier (22), and the third conveying mechanism (33) is used to convey a supplementary carrier (28); It also includes a bad area, wherein the bad area is arranged between the first conveying mechanism (19) and the second conveying mechanism (20); Wherein, a mechanism capable of acquiring information of the TO devices (14) on the test carrier (21) is provided at the starting point of the first conveying mechanism (19) to acquire the number of the TO devices (14) thereon and the pass / fail information of each TO device (14); When the device transfer device is running, different transfer modes are selected according to the acquired TO device information.

2. A device for removing a component according to claim 1, characterized in that: The TO device single-claw clamping mechanism (35) comprises a fixed arm, a finger cylinder (5) and two fixed blocks (6); The finger cylinder (5) comprises a cylinder body and two clamping claws, the cylinder body is connected to one end of the fixed arm, and the two clamping claws are connected to the two fixed blocks (6) in a one-to-one correspondence; A limiting cavity (9) that matches the TO device (14) and can be opened and closed is formed between the two fixing blocks (6).

3. The device for removing a component according to claim 2, characterized in that: The fixed arm comprises a main arm (1) and an L arm (2), the L arm (2) comprises a first plate and a second plate which are perpendicular to and connected to each other, the first plate is perpendicularly connected to one end of the main arm (1), the length of the second plate is shorter than the length of the main arm (1), and the second plate and the main arm (1) are on the same side of the first plate; The finger cylinder (5) is connected to a side of the second plate away from the main arm (1), and the clamping claw of the finger cylinder (5) can translate in a direction approaching or away from the second plate.

4. The device for removing a component according to claim 1, characterized in that: The TO device multi-claw clamping mechanism (23) comprises a fixing plate, a plurality of fixing arms, a plurality of finger cylinders (5) and a plurality of fixing blocks (6); The plurality of fixing arms are respectively parallel and respectively connected to the fixing plate; The plurality of finger cylinders (5) are connected to the plurality of fixed arms in a one-to-one correspondence; Each of the finger cylinders (5) comprises a cylinder body and two clamping jaws, wherein the cylinder body is connected to the fixed arm, and each of the two clamping jaws is connected to a fixed block (6), and a limit cavity (9) that matches the TO device (14) and can be opened and closed is formed between the two fixed blocks (6).

5. The device for removing a component according to claim 4, characterized in that: The fixed arm comprises a main arm (1) and an L arm (2), the L arm (2) comprises a first plate and a second plate which are perpendicular to and connected to each other, the first plate is perpendicularly connected to one end of the main arm (1), the length of the second plate is shorter than the length of the main arm (1), and the second plate and the main arm (1) are on the same side of the first plate; The finger cylinder (5) is connected to a side of the second plate away from the main arm (1), and the clamping claw of the finger cylinder (5) can translate in a direction approaching or away from the second plate.

6. The device for removing a component according to claim 5, characterized in that: A first sliding block (7) is provided on a side of the main arm (1) away from the L arm (2), and a first sliding rail (32) perpendicular to the main arm (1) is provided on the fixed plate; The plurality of fixed arms are respectively connected in sliding cooperation with the first sliding block (7) and the first sliding rail (32).

7. The device for removing a component according to claim 6, characterized in that: It also includes a distance-adjusting plate (30) and a lifting member (29), wherein the fixed end of the lifting member (29) is connected to the fixed plate, and the lifting end of the lifting member (29) is connected to the distance-adjusting plate (30); The distance adjusting plate (30) is parallel to the fixed plate, and the distance adjusting plate (30) is provided with a plurality of second slide rails (31), and the distance between the plurality of second slide rails (31) gradually increases or decreases along the extension direction of the main arm (1); A second sliding block (8) is provided on a side of the main arm (1) away from the fixed plate, and a plurality of the main arms (1) are slidably connected to a plurality of the second sliding rails (31) in a one-to-one correspondence via their second sliding blocks (8).

8. The device for removing a component according to claim 3 or 5, characterized in that: The L-arm (2) is connected to a monitoring board (3), and a distance sensor (4) is provided on the monitoring board (3). The distance sensor (4) is used to detect the distance between the monitoring board (3) and the fixed block (6).

9. The device for removing a component according to claim 3 or 5, characterized in that: An opening (10) for allowing a support leg (12) of the TO device (14) to pass through is provided at one end of the limiting cavity (9) away from the finger cylinder (5).

10. The device for removing a component according to claim 9, characterized in that: One end of the opening (10) close to the limiting cavity (9) extends around it to form an annular clamping groove, and the size and shape of the clamping groove match the TO device (14).

11. The device for removing a component according to claim 9, characterized in that: The edge of the opening (10) is provided with a plurality of leg holes (11), and the plurality of leg holes (11) match the plurality of legs (12) of the TO device (14).

12. The device for removing a component according to claim 3 or 5, characterized in that: A semi-limiting cavity (9) is provided on a side of each fixing block (6) opposite to another fixing block (6); When the two fixing blocks (6) are tightly fitted together, the two semi-limiting cavities (9) form the limiting cavity (9).

13. The device for removing a component according to claim 12, characterized in that: An end of each of the fixing blocks (6) away from the finger cylinder (5) is provided with an inclined chamfer (13), and the inclined chamfers (13) of the two fixing blocks (6) form an avoidance groove recessed toward the limiting cavity (9).

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