Spectrometer and method for analyzing an optical sample by means of a spectrometer

By using multiple spatial modulation elements composed of individually manipulated pixels in the spectrometer, rapid and accurate changes in the width and shape of the inlet slits are achieved, solving the speed and complexity problems of existing spectrometers in this regard, and improving the measurement characteristics.

CN110987180BActive Publication Date: 2025-06-24KROHNE MESSTECHNICK GMBH & CO KG
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Patent Information

Application Number
CN201910949685.7
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Priority Date
2018-10-02
Filing Date
2019-10-08
Publication Date
2025-06-24
Estimated Expiration
2039-10-08

AI Technical Summary

Technical Problem

Existing spectrometers have low speed and high mechanical complexity when changing the inlet slit width, making it difficult to quickly and accurately match the slit width of the micron scale.

Method used

By using a first spatial modulation element composed of a plurality of individually manipulated pixels, each pixel is independently oriented by a control and evaluation unit to realize a variable entry slit.

Benefits of technology

The width and shape of the inlet slit are achieved quickly and accurately set and change, improving the measurement characteristics of the spectrometer, especially optimization in resolution and light output.

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Abstract

A spectrometer (1) is described and shown, which comprises at least one light-coupling element (3), a variable entrance slit (4), a dispersive element (6), a detector element (7) and a control and evaluation unit (8). This task presents a spectrometer with improved measurement characteristics, and this task is solved in such a way that the variable entrance slit (4) is implemented by a first spatial modulation element comprising a plurality of pixels, wherein the individual pixels can be oriented independently of one another by the control and evaluation unit, and wherein the individual pixels are oriented in operation in such a way as to form the entrance slit so that at least a part of the light incident from the light-coupling element (3) is conducted to the dispersive element (6).
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Description

Field of the Invention

[0001] The present invention relates to a spectrometer which includes at least one light coupling-in element, a variable entrance slit, a dispersive element, a detector element, and a control and evaluation unit. Furthermore, the present invention relates to a method for analyzing an optical sample by means of a spectrometer, wherein the spectrometer includes at least one light coupling-in element, a variable entrance slit, a dispersive element, a detector element, and a control and evaluation unit. Background Art

[0002] According to the prior art, it is known to draw conclusions about the spectral composition of an optical sample from an analyte emitting the optical sample. For this purpose, the light of the optical sample is decomposed into its spectral components in a spectrometer by a dispersive element, for example by a grating. Subsequently, the individual spectral components are detected by a detector, so that the spectrum of the optical sample can be subsequently displayed and analyzed. In order to ensure the coherence of the optical sample to be studied, the light to be analyzed first strikes an entrance slit, which is imaged onto the detector element by an optical path.

[0003] Basically, the spectral resolution of a spectrometer is determined by the width of the entrance slit. The establishment of the slit width is an optimization task in which frame conditions, such as the size of the detector element or, in the case of a line detector, the size of an individual detector element, the size of the entire structure, and the light output are taken into account. If the sizes of the detector and the optical system are given, the resolution can be increased by reducing the slit width, but the smaller the slit width, the less light enters the spectrometer. Conversely, in applications with particularly weak light, the light output can be increased at the expense of resolution.

[0004] In the prior art, various solutions for matching the slit width are known: the slit width of the entrance slit can be changed by manually replacing a disk cut by the slit, or by manually moving one or two limiting disks of the slit by means of a micrometer screw or by (semi-)automatically mechanically setting it by means of an electric micrometer screw.

[0005] The disadvantages of the devices mentioned are the low speed at which the slit width can be changed and the high mechanical complexity, which is based on the fact that the slit width has to be set precisely on the micrometer scale and the two boundaries have to be kept parallel.

[0006] From the document DE 199 32 807 A1, a spectrometer is known in which an entrance slit composed of a movable diaphragm and a fixed diaphragm is periodically modulated in order to be able to use a highly sensitive and drift-free amplifier in signal processing.

[0007] Furthermore, document US 2004 / 0125361 A1 discloses a method for measuring the beam characteristics of a laser beam, in which the laser beam is split by means of a micromirror array based on the razier knife method (Rasierklingenmethode). SUMMARY OF THE INVENTION

[0008] The object of the present invention is to provide a spectrometer with improved measurement characteristics. Furthermore, the present invention is based on the task of providing a corresponding method for analyzing an optical sample.

[0009] According to a first teaching of the present invention, this object is achieved by the spectrometer mentioned at the beginning, that is, a variable entrance slit is realized by a first spatial modulation element comprising a plurality of pixels, wherein each pixel can be oriented independently of one another by a control and evaluation unit, and wherein in operation each pixel is oriented in such a way to realize the entrance slit that at least a part of the light incident from the light coupling element is conducted to the dispersion element.

[0010] According to the present invention, it has been recognized that the entrance slit of a spectrometer can be realized by a first reflective or transmissive spatial modulation element comprising a plurality of individually controllable pixels, wherein the entrance slit can be changed particularly easily and flexibly by the individual controllability of each pixel.

[0011] The orientation of each pixel is carried out by a control and evaluation unit.

[0012] According to the present invention, the image of the light to be analyzed incident on the first spatial modulation element is spatially shaped by the setting or deflection of each pixel, wherein the share of the image to be analyzed is not attenuated in terms of its intensity and / or deflected away from the dispersion element in its propagation direction.

[0013] Basically, in this context within the scope of the present invention, a distinction is made between a first position or orientation of the pixel in which the light to be analyzed is conducted to the dispersion element and a second position or orientation of the pixel in which the light is not conducted into the spectrometer and thus not available for analysis (disconnected position). In this way, the image of the light coupling element can be cut particularly precisely by the orientation of each pixel.

[0014] According to a particularly preferred design, the pixels of the first spatial modulation element are arranged in a matrix form.

[0015] According to a design, the first spatial modulation element is configured as a first micromirror array, wherein a plurality of pixels are realized by a plurality of micromirrors.

[0016] According to one design, the micromirrors are manipulated numerically such that each micromirror can be adjusted between two positions.

[0017] According to another design, the micromirrors can be tilted at any angle by means of an analog signal.

[0018] One design of the micromirror array comprises a matrix of 607×638 mirrors with a side length between 5 and 10 μm.

[0019] Alternatively, according to another design, the first spatial modulation element is designed as a liquid crystal display, wherein a plurality of pixels are implemented by a plurality of liquid crystals. With the aid of a control and evaluation unit, the transparency of each pixel for the light incident from the optical coupling element can be set individually by the orientation of the liquid crystals.

[0020] According to one design, an entrance slit is produced with a simple transparency by means of a liquid crystal display. Alternatively, the liquid crystal display is provided (hinterlegen) with mirrors such that the light conducted into the spectrometer passes through the liquid crystal display twice.

[0021] It is also conceivable that the first spatial modulation element is configured as a switchable grid. According to this design, each pixel consists of an individual switchable grid comprising a plurality of metal strips, which can be oriented respectively towards an on position and an off position.

[0022] In addition to the above design, the first spatial modulation element can also be implemented by other components not mentioned here, which conduct the incident light pixel by pixel. According to one design, during operation, the pixels of the first spatial modulation element are oriented such that the slit of the first spatial modulation element conducts the light of the incident light sample in the direction of the dispersion element, and the remaining pixels (towards the off position) are oriented such that the remaining part of the light sample incident on the first spatial modulation element is not conducted into the spectrometer.

[0023] Here, the slit width of the entrance slit is determined by the number of pixels that conduct the light in each row in the direction of the dispersion element. According to a preferred design, the slit width is constant with respect to the longitudinal direction of the slit.

[0024] In addition, it is also conceivable that the slit width varies along the longitudinal direction of the slit, i.e., row by row. For example, the slit can be locally widened. According to this design, although the slit shape is diluted (verwässern) at the expense of the resolution of the spectrometer, the light output is increased by the local widening of the slit.

[0025] The slit width and / or the slit shape can be matched to the measurement situation before each measurement, in particular to the image of the light sample to be measured.

[0026] In addition, the spectrometer is designed such that during the measurement of the light sample, i.e., during the detection of the spectrum, the slit width and / or the slit shape can also be changed and matched. In this regard, the spectrometer can also be optimized during operation, in particular, with respect to the light output available for analysis and the resolution for the detection of each spectral component.

[0027] According to one design, all pixels of the first spatial modulation element are oriented during operation such that the image of the light sample to be analyzed incident on the modulation element is completely conducted into the spectrometer. In this case, particularly a large amount of light enters the spectrometer.

[0028] In any case, the advantage of the components according to the invention is that the slit width and / or the slit shape can be set and changed quickly and accurately. In this way, the spectrometer can be optimized particularly quickly before or during the measurement with respect to the resolution and the available light output according to the measurement situation, whereby the spectrometer generally has improved measurement characteristics.

[0029] The control and evaluation unit can be designed as a single component or, alternatively, can comprise separate components.

[0030] According to one design, at least one light-coupling element is designed as an optical waveguide or an optical waveguide bundle. Particularly preferably, the optical waveguide is designed as a glass fiber, or the optical waveguide bundle is particularly preferably configured as a glass fiber bundle.

[0031] According to one design, if the diameter of each glass fiber is typically about 100 µm and the side length of each mirror of the micromirror array is about 5 µm, then the image of one or more glass fibers incident on the first micromirror array can be cut particularly precisely.

[0032] It is also particularly preferred if the scattering element is designed as a grating, for example, as a reflection grating.

[0033] The detector element is designed as, for example, a line detector. This design is particularly advantageous, especially when the spectral components behind the dispersion element are directly incident on the detector. According to this design, spectrally distinguishable spectral components can be detected simultaneously.

[0034] According to an alternative design, the detector element is designed as a single detector (Einzelndetektor). According to this design, preferably, the spectrum of the light sample is sampled sequentially during operation.

[0035] According to another particularly preferred design, the first spatial modulation element is arranged on the optical path before the dispersion element and furthermore between the dispersion element and the detector element, wherein, in operation, in a first partial region of the first spatial modulation element, the pixels are oriented such that the light incident from the optical coupling-in element is conducted at least partially onto the dispersion element, and in a second partial region of the first spatial modulation element the pixels are oriented such that, in operation, the spectral components of the light sample to be investigated are preferably sequentially deflected onto the detector element.

[0036] For example, the upper half of the first spatial modulation element is oriented as an entrance slit, and the lower half of the first spatial modulation element is oriented as an element that conducts the spectral components of the light to be analyzed in front of the detector element. Alternatively, the right half of the first spatial modulation element is oriented as an entrance slit, and the left half of the first spatial modulation element is oriented as an element that conducts the spectral components of the light to be analyzed in front of the detector element. Additionally, any other suitable division of the first spatial modulation element into at least two or more partial regions that perform correspondingly different functions in operation can be envisioned.

[0037] According to another preferred design of the spectrometer, there is a second spatial modulation element comprising a plurality of pixels, wherein each pixel can be individually oriented by a control and evaluation unit, wherein the second spatial modulation element is arranged on the optical path between the dispersion element and the detector element, and wherein the control and evaluation unit deflects the plurality of pixels of the second spatial modulation element in operation such that the spectral components of the light sample to be investigated are preferably sequentially deflected onto the detector element.

[0038] The advantage of the design for sequentially detecting the individual spectral fractions of the light sample to be investigated in time is that the overlap of diffraction patterns (Beugungsmuster) of different wavelengths can be avoided.

[0039] Furthermore, this design also enables the slit width and / or the slit shape of the entrance slit and / or the orientation of the pixels of the first spatial modulation element to be matched during the measurement of the light sample according to the currently detected spectral components. This is particularly advantageous if, in one part of the spectrum, the spectral lines of two analytes of interest are closely adjacent and thus place high demands on the resolution of the spectrometer, while in another part of the spectrum, the multiple lines of a single analyte are located separately and it is sufficient to integrate over all lines for their evaluation, so that the light output can be optimized at the expense of the resolution. In this regard, this design also enables the spectrometer to be optimally set during the measurement with respect to resolution and light output according to the individual spectral components.

[0040] According to a design, the second spatial modulation element is designed as a micro-mirror array or a liquid crystal display or a switchable grid or an equivalent component.

[0041] According to a second teaching of the invention, the task mentioned at the beginning is thus achieved by the method for analyzing an optical sample described at the beginning, that is, by means of a first spatial modulation element comprising a plurality of pixels to implement an adjustable entrance slit, wherein each pixel can be oriented independently of one another by a control and evaluation unit, and wherein each pixel is oriented during operation in such a way to implement the entrance slit that at least a part of the light incident from the light coupling-in element is conducted to the dispersion element.

[0042] Therein, the width of the entrance slit is changed by deflecting each pixel according to the measurement situation before and / or during the measurement.

[0043] The optical sample to be analyzed is decomposed into its spectral components by the dispersion element.

[0044] The spectral components of the optical sample are imaged onto a detector element, and the control and evaluation unit determines the spectrum of the optical sample.

[0045] According to a design of the method, the orientation of each pixel of the first spatial modulation element is matched, so that at least before the spectrometer is put into use, all pixels are first oriented towards the off position. Subsequently, an image of the light coupling-in element is sampled, so that each pixel is sequentially oriented towards the on position, wherein at the same time the intensity conducted through the correspondingly oriented pixel is detected on the detector element.

[0046] According to a design, all pixels of the first spatial modulation element are sequentially oriented row by row towards the on position.

[0047] According to another design, the orientation of each pixel occurs only in the column (Spalt) in which the maximum light intensity was determined in the previously measured rows starting from the second row of the first spatial modulation element, and additionally in the 5 columns before and after. For example, if it is found that in the first row, the pixel in the 20th column has conducted the highest light intensity when oriented towards the on position, then only the pixels in the 15th to 25th columns of the second row will be sequentially oriented towards the on position, and the correspondingly conducted intensity will be detected. The advantage of this design is that not all pixels have to be oriented to match the orientation of the first spatial modulation element.

[0048] In addition to the above, other algorithms can also be conceived, according to which a favorable sampling of the image of the light coupling-in element can be achieved by the sequential orientation of each pixel.

[0049] Corresponding sampling is performed at least before the spectrometer is put into use. In addition, the above-mentioned sampling can also be performed when the optical coupling element is replaced. It is also conceivable to perform sampling before each measurement to match the orientation of the pixels.

[0050] According to a preferred design, the spectrometer is designed according to one of the previously described designs.

[0051] Furthermore, preferably, during operation, the slit width and / or the slit shape of the entrance slit vary according to the spectral components of the light sample to be studied that fall on the detector element.

[0052] According to another design, the slit shape of the entrance slit varies according to the measurement situation before and / or during the measurement, whereby the slit width of the entrance slit is set row by row.

[0053] In addition, if the optical coupling element is designed as an optical waveguide bundle composed of linearly arranged optical waveguides, it is advantageous that the pixels of the first spatial modulation element are deflected row by row in such a way as to correct the deviation of each optical waveguide from the linear arrangement.

[0054] For example, the image of the optical waveguide bundle can be slit-shaped (spaltenförmig) cut by orienting the individual pixels of the first spatial modulation element for correction.

[0055] This means that the pixels of the modulation element are oriented in such a way that the slit of the image of the optical waveguide bundle is conducted into the spectrometer. Here, the slit composed of the individual pixels is arranged in such a way that, despite a defect in the arrangement of at least one optical waveguide, all the pixels oriented towards the switched-on position are substantially completely illuminated by the image of the optical waveguide. The slit width can vary according to the application and / or be matched before or during each measurement.

[0056] Furthermore, it is further advantageous that the shape of all the pixels of the first spatial modulation element that conduct light into the spectrometer is matched to the shape of the image of the optical waveguide bundle for correction. For this purpose, for example, in at least one row, the pixels oriented towards the switched-on position are arranged offset with respect to the remaining pixels oriented towards the switched-on position. Also according to this design, the slit width and / or the slit shape can vary according to the measurement situation and / or be matched before or during each measurement.

[0057] The aforementioned correction of the irregular shape of the image of the optical coupling element can be set, for example, by sampling the image when the spectrometer is put into use. Description of the Drawings

[0058] Specifically, there are now a large number of feasible solutions for designing and improving the spectrometer according to the present invention and the method according to the present invention. In addition, reference is made not only to the patent claims following the independent patent claims, but also to the following description of the preferred embodiments in conjunction with the drawings. The drawings show:

[0059] Figure 1 showing a first embodiment of a spectrometer according to the present invention,

[0060] Figure 2 showing a second embodiment of a spectrometer according to the present invention,

[0061] Figure 3 showing a third embodiment of a spectrometer according to the present invention,

[0062] Figure 4 showing an embodiment of an image of an optical waveguide bundle on a first micromirror array,

[0063] Figure 5 showing another embodiment of an image of an optical waveguide bundle on a first micromirror array,

[0064] Figure 6 showing another embodiment of a spectrometer according to the present invention,

[0065] Figure 7 showing another embodiment of an image on a first micromirror array, and

[0066] Figure 8 showing a first embodiment of a method according to the present invention. Detailed Description

[0067] Figure 1 showing a first embodiment of spectrometer 1, which has: an optical coupling-in element 3 in the form of a glass fiber; a variable entrance slit 4, which is constructed by a first spatial modulation element in the form of a first micromirror array 5; and a dispersion element 6 designed as a reflective diffraction grating; a detector element 7 and a control and evaluation unit 8. By applying a voltage via the control and evaluation unit 8, the individual micromirrors of the micromirror array 5 can be individually oriented. In operation, the individual mirrors are deflected such that at least a part of the light incident via the glass fiber is imaged via the optical path onto the detector element 7. In addition to the elements mentioned, the optical path also has an optical lens 9 for beam shaping and focusing of the light sample to be investigated.

[0068] Figure 2 showing a second embodiment of spectrometer 1, wherein, compared with Figure 1In contrast to the spectrometer 1 shown, a second spatial modulation element in the form of a second mirror array 10 is arranged between the dispersive element 6 and the detector 7, and this second spatial modulation element can also be controlled by the control and evaluation unit 8. During operation, the control and evaluation unit 8 deflects a plurality of mirrors of the second mirror array 10 such that the spectral components of the light sample to be investigated, separated by the diffraction grating, are sequentially directed onto the detector element 7. In the illustrated embodiment, the detector element 7 is designed as a single detector. The advantage of the arrangement shown is that when individual spectral components are detected, no overlap of diffraction maxima of different wavelengths occurs or is detected, so that the accuracy of the spectrometer is particularly high. In addition, an advantage of this design is that during the measurement, the slit width of the entrance slit 4 can also be matched to the spectral component of the light sample to be investigated that is currently incident on the detector element 7.

[0069] In Figure 3 In the embodiment of the spectrometer 1 shown, the light coupling-in element 3 is designed as an optical fiber bundle, where the individual optical fibers are arranged linearly relative to one another. The image of this optical fiber bundle is guided onto the first mirror array 5 by imaging optics. A part of the mirror array 5 and the mirrors is shown. The individual mirrors of the mirror array 5 are oriented such that the slit-shaped part of the image of the optical fiber bundle is conducted into the spectrometer. The slit-shaped part of the mirror is oriented towards the switched-on position 14. The remaining part of the mirror reflects the incident light away from the dispersive element 6 in the switched-off position 15. Here, the slit width is selected such that all the mirrors oriented towards the switched-on position are substantially fully illuminated, and the spectrometer 1 is overall optimized in terms of light output and resolution.

[0070] Figure 4 An embodiment of the image of the optical waveguide bundle on the first mirror array 5 is shown. In the illustrated embodiment, the optical waveguides are arranged deviating from a linear arrangement relative to the other optical waveguides. By arranging the light-conducting slits, i.e., the mirrors oriented towards the switched-on position 14, in such a way that despite the offset arrangement, all the mirrors are substantially fully illuminated, this defective arrangement can be corrected during operation. In this way, the entire image of the optical fiber bundle can be cut such that the deviation of the individual optical waveguides from the linear arrangement is corrected with respect to conduction into the spectrometer. The slit width in the illustrated embodiment corresponds to the width of the mirror. In addition, the slit width can of course also include a plurality of mirrors and is particularly matched to the measurement situation during operation.

[0071] Figure 5 Another embodiment of the image of the optical waveguide bundle on the first mirror array 5 is shown, where the optical waveguides are also arranged deviating from a linear arrangement relative to the other optical waveguides. In contrast to Figure 4Contrary to the illustration shown, this defective arrangement is corrected in such a way that the micromirrors oriented towards the switched-on position 14 are also arranged offset in the image region of the offset optical waveguide, relative to the remaining micromirrors oriented towards the switched-on position 14. As a result, the shape of the micromirrors oriented towards the switched-on position 14, in this respect, matches the shape of the image of the optical waveguide bundle.

[0072] Figure 6 Another embodiment of the spectrometer 1 is shown. Here, the first micromirror array 5 is arranged such that it is arranged in front of the dispersive element 6 in the beam path on the one hand, and furthermore between the dispersive element 6 and the detection element 7. In the present case, the direction of the beam path is indicated by the arrows on the beam shown.

[0073] Specifically, the first partial region 17 of the micromirror array 5 implements the function of the entrance slit 4, and the second partial region 18 implements the function of conducting the individual spectral components onto the detection element 7. For this purpose, the light to be analyzed is focused onto the second partial region 18 of the micromirror array 5 by means of a confocal mirror 16.

[0074] Figure 7 Shows according to Figure 6 the image of the light to be analyzed arranged on the micromirror array 5 as shown. This illustration shows the first partial region 17 and the second partial region 18, where the first partial region implements the function of the entrance slit 4 and the second partial region deflects the spectral components onto the detection element 7.

[0075] As Figures 1 to 7 shown, an alternative embodiment has a liquid crystal display or a switchable grid as the first and / or second spatial modulation element in the case of an otherwise identical construction of the spectrometer.

[0076] Figure 8 An embodiment of a method 2 for analyzing a light sample is shown, where the spectrometer 1 is designed according to Figure 2 the embodiment shown. First, when the spectrometer is put into use, an image of the light coupling-in element is sampled in order to determine the orientation of the micromirrors of the first micromirror array 5. Depending on the sampled image and the measurement situation, the micromirrors are oriented towards the switched-on position 14 or the switched-off position 15.

[0077] In the first step 11 of method 2, the light sample to be investigated is now coupled into the spectrometer 1 via the light coupling-in element 3. Via the first mirror array 5, the incident light is conducted to the dispersive element 6 in the form of a slit with a defined slit width and is decomposed into its spectral components by the dispersive element 6. Additionally, the individual spectral components are sequentially imaged 12 by deflecting the individual mirrors of the second mirror array 10 onto the detector element. Here, the slit width of the entrance slit 4 is matched 13 to the spectral component currently incident on the detector element 7 by the control and evaluation unit 8. Finally, the control and evaluation unit 8 determines 14 the spectrum of the light sample to be investigated.

[0078] The method 2 shown has the advantage that the resolution and light output of the spectrometer 1, that is to say the amount of light conducted into the spectrometer 1, can be optimized particularly precisely even during the measurement.

[0079] List of reference numerals

[0080] 1 Spectrometer

[0081] 2 Method for analyzing a light sample

[0082] 3 Light coupling-in element

[0083] 4 Entrance slit

[0084] 5 First mirror array

[0085] 6 Dispersive element

[0086] 7 Detector element

[0087] 8 Control and evaluation unit

[0088] 9 Optical lens

[0089] 10 Second mirror array

[0090] 11 Coupling the light sample into the spectrometer

[0091] 12 Sequentially imaging the individual spectral components onto the detector element

[0092] 13 Matching the slit width to the spectral component

[0093] 14 On position

[0094] 15 Off position

[0095] 16 Focusing mirror

[0096] 17 First partial region

[0097] 18 Second partial region.

Claims

1. A method (2) for analyzing an optical sample by means of a spectrometer (1), wherein the spectrometer (1) has at least one optical coupling-in element (3), a variable entrance slit (4), a dispersive element (6), a detector element (7) and a control and evaluation unit (8), characterized in that, the optical coupling-in element (3) is designed as an optical waveguide bundle composed of linearly arranged optical waveguides, the variable entrance slit (4) is implemented by a first spatial modulation element comprising a plurality of pixels, wherein each pixel can be oriented independently of one another by the control and evaluation unit, and wherein each pixel is oriented during operation in such a way as to implement the entrance slit that at least a part of the light incident from the optical coupling-in element (3) is conducted onto the dispersive element (6), the width of the entrance slit varies according to the measurement situation before and / or during the measurement, the pixels of the first spatial modulator are oriented in such a way as to correct the deviation of each optical waveguide from the linear arrangement, the optical sample to be analyzed is decomposed into its spectral components by the dispersive element (6), the spectral components of the optical sample are imaged onto the detector element (7), and the control and evaluation unit (8) determines the spectrum of the optical sample.

2. The method (2) according to claim 1, characterized in that, At least before the spectrometer is put into use, an image of the optical coupling-in element is sampled by successively moving the individual pixels of the first spatial modulation element into an on-position, wherein the on-position represents the position in which the pixel conducts the light to be analyzed onto the dispersive element, and wherein, simultaneously, the intensity of the light conducted through the respective pixel is detected on the detector element.

3. The method (2) according to claim 1 or 2, characterized in that The slit shape of the entrance slit is changed according to the measurement situation before and / or during the measurement such that the slit width is set individually row by row.

4. The method (2) according to claim 1 or 2, characterized in that, The slit width and / or the slit shape of the entrance slit are changed during operation according to the spectral components of the optical sample to be investigated that impinge on the detector element (7).

5. The method (2) according to claim 1 or 2, characterized in that, The optical coupling-in element (3) is designed as an optical waveguide bundle composed of linearly arranged optical waveguides, and the pixels of the first spatial modulator are oriented row by row in such a way as to correct the deviation of each optical waveguide from the linear arrangement.

6. The method (2) according to claim 5, characterized in that The image of the optical waveguide bundle is slit-shapedly cut for correction by the orientation of the pixels.

7. The method (2) according to claim 5, characterized in that The shape of all pixels of the first spatial modulator that conduct light into the spectrometer (1) is matched to the shape of the image of the optical waveguide bundle for correction.

8. A spectrometer (1) comprising at least one optical coupling-in element (3), a variable entrance slit (4), a dispersive element (6), a detector element (7) and a control and evaluation unit (8), characterized in that, Among them, the variable entrance slit (4) is implemented by a first spatial modulation element comprising a plurality of pixels, wherein each pixel can be oriented independently of one another by the control and evaluation unit, and wherein each pixel is oriented during operation in such a way as to implement the entrance slit that at least a part of the light incident from the optical coupling-in element (3) is conducted onto the dispersive element (6), and The at least one optical coupling-in element (3) is designed as an optical waveguide bundle, and The spectrometer is configured to perform the method according to any one of claims 1 to 7.

9. The spectrometer (1) according to claim 8, characterized in that, The first spatial modulation element is configured as a first micromirror array (5), wherein the plurality of pixels are implemented by a plurality of micromirrors.

10. The spectrometer (1) according to claim 8 or 9, characterized in that, The first spatial modulation element is arranged on the optical path in front of the dispersive element (6) and furthermore between the dispersive element (6) and the detector element (7). In operation, in a first partial region of the first spatial modulation element, the pixels are oriented such that light incident from the optical coupling-in element (3) is conducted at least partially onto the dispersive element (6), and in a second partial region of the first spatial modulation element, the pixels are oriented such that spectral components of the light sample to be investigated in operation are deflected onto the detector element (7).

11. The spectrometer (1) according to claim 10, characterized in that, In the second partial region of the first spatial modulation element, the pixels are oriented such that spectral components of the light sample to be investigated in operation are sequentially deflected onto the detector element (7).

12. The spectrometer (1) according to claim 8 or 9, characterized in that, There is a second spatial modulation element comprising a plurality of pixels, wherein each pixel can be individually oriented by the control and evaluation unit (8), wherein the second spatial modulation element is arranged on the optical path between the dispersive element (6) and the detector element (7), and wherein the control and evaluation unit (8) deflects the plurality of pixels of the second spatial modulation element in operation such that spectral components of the light sample to be investigated are deflected onto the detector element (7).

13. The spectrometer (1) according to claim 12, characterized in that, The control and evaluation unit (8) deflects the plurality of pixels of the second spatial modulation element in operation such that spectral components of the light sample to be investigated are sequentially deflected onto the detector element (7).

14. The spectrometer (1) according to claim 8 or 9, characterized in that, The detector element (7) is designed as a single detector.

Citation Information

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