A fluid control device and fluid supply equipment for post-cleaning of substrate

Abstract

The present invention discloses a fluid control device and fluid supply equipment for post-substrate cleaning. The device includes a fluid storage container, an actuator for controlling the opening and closing of the fluid storage container's pipeline, and a fluid control device connected to the actuator. The device includes a first control component controlled by a main control module and a second control component controlled by a safety control module. The first and second control components are connected in series to the actuator for controlling the opening and closing of the fluid storage container's pipeline. If the main control module malfunctions, the safety control module controls the second control component to activate the actuator to disconnect the fluid storage container's pipeline.

Description

Technical Field

[0001] The present invention relates to the field of chemical mechanical polishing, and in particular to a fluid control device and a fluid supply equipment for post-cleaning of a substrate. Background Art

[0002] Chemical Mechanical Planarization (CMP) is an ultra-precision surface finishing process used in integrated circuit manufacturing to achieve global planarization. Because the chemicals and abrasives used extensively in CMP can contaminate the substrate surface, a post-processing step is required to remove contaminants. This step typically involves cleaning and drying to provide a smooth and clean substrate surface.

[0003] The purpose of post-polishing cleaning is to remove particles and various chemicals on the substrate surface, and to avoid corrosion and damage to the surface and internal structure during the cleaning process. Post-polishing cleaning can be divided into wet and dry methods. Wet cleaning is cleaning in a solution environment, such as detergent immersion, mechanical scrubbing, wet chemical cleaning, etc.

[0004] After cleaning a substrate, a large amount of water or cleaning fluid residue remains on the substrate surface. Because this water or cleaning fluid residue contains impurities, if left to evaporate and dry, these impurities will reattach to the substrate surface, causing contamination and even damaging the wafer structure. Therefore, the substrate surface must be dried to remove this residual liquid.

[0005] For example, patent CN104956467B discloses a substrate cleaning device for chemical mechanical planarization, in which the cleaning part includes several parallel cleaning modules and drying modules to allow the substrate to pass through in sequence. The substrate is vertically placed in the chamber of the cleaning module for scrubbing, and then sent to the drying module for drying after scrubbing.

[0006] Substrate drying, as the final step in post-processing, plays a crucial role in ensuring substrate surface quality and processing yield. Isopropyl alcohol (IPA) vapor drying is a commonly used drying technology in the industry. This technology utilizes the surface tension gradient created by IPA vapor on water, inducing a strong Marangoni effect and promoting the removal of water films adsorbed on the substrate surface.

[0007] When using IPA equipment, isopropyl alcohol (IPA) must be added to the IPA storage tank from a supply source. However, due to its high volatility and tendency to vaporize, its storage state is unstable, and the pressure inside the tank can fluctuate dramatically, posing safety risks and potentially causing explosions. Therefore, the safe and efficient use and storage of isopropyl alcohol has become a pressing issue. Summary of the Invention

[0008] Embodiments of the present invention provide a fluid control device and a fluid supply apparatus for post-cleaning of a substrate, aiming to solve at least one of the problems existing in the prior art.

[0009] A first aspect of an embodiment of the present invention provides a fluid control device for post-cleaning of a substrate, comprising a first control component controlled by a main control module and a second control component controlled by a safety control module; the first control component and the second control component are connected in series to an execution component for controlling the on-off of a pipeline of a fluid storage container; when the main control module operates abnormally, the safety control module controls the second control component to operate so that the execution component disconnects the pipeline of the fluid storage container.

[0010] A second aspect of an embodiment of the present invention provides a fluid supply device for post-substrate cleaning, comprising a fluid storage container and an actuator for controlling the on-off of a pipeline of the fluid storage container, and the fluid control device as described above connected to the actuator.

[0011] Compared with the prior art, the embodiments of the present invention have the following advantages: when the main control module malfunctions, the safety control module can take control and safely and reliably disconnect the pipeline of the fluid storage container. This control process does not rely on the software in the main control module, and realizes redundant control of the execution components, thereby achieving safe utilization and storage of the fluid. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0013] Figure 1 A schematic diagram of the module structure of a fluid control device provided in one embodiment of the present invention;

[0014] Figure 2 A schematic diagram of the piping structure of a fluid control device provided in one embodiment of the present invention. DETAILED DESCRIPTION

[0015] To help those skilled in the art better understand this solution, the following will clearly describe the technical solutions in the embodiments of this solution in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of this solution, not all of it. Based on the embodiments of this solution, all other embodiments obtained by those skilled in the art without creative work should fall within the scope of protection of this solution.

[0016] In the specification and claims of this solution, as well as in the accompanying drawings, the term "including" and any variations thereof mean "including but not limited to," and is intended to cover non-exclusive inclusions. Furthermore, the terms "first" and "second," etc., are used to distinguish between different objects, not to describe a specific order.

[0017] The following describes the implementation of the present invention in detail with reference to the accompanying drawings:

[0018] like Figure 1 As shown, an embodiment of the present invention provides a fluid control device for post-cleaning of a substrate, comprising a first control component 110 controlled by a main control module 100 and a second control component 210 controlled by a safety control module 200; the first control component 110 and the second control component 210 are connected in series to an execution component 310 for controlling the on-off of a pipeline of a fluid storage container 300; when the main control module 100 operates abnormally, the safety control module 200 controls the second control component 210 to operate so that the execution component 310 disconnects the pipeline of the fluid storage container 300.

[0019] The main control module 100 is in communication with the safety control module 200 . When the safety control module 200 receives an abnormality signal from the main control module 100 , it determines that the main control module 100 is operating abnormally, and the safety control module 200 starts to operate.

[0020] The second control component 210 is connected to the first control component 110 and the actuator 310, respectively. The first and second control components 110 and 210 can be solenoid valves, and the actuator 310 can be a pneumatic valve. Furthermore, the second control component 210 can be an intrinsically safe solenoid valve, which prevents sparks and improves safety.

[0021] The safety control module 200 refers to a control module with a certain safety performance level, and has the characteristics of explosion-proof and flame-proof, and can ensure reliable disconnection of pipelines in extreme environments such as combustion and explosion.

[0022] The main control module 100 is used to control the action of the first control component 110 so as to make the execution component 310 disconnect or connect the pipeline of the fluid storage container 300 through the second control component 210. The main control module 100 may include an industrial computer, a host computer, etc.

[0023] The fluid storage container 300 may be a gas storage container or a liquid storage container. In a post-substrate cleaning application, the fluid storage container 300 contains a gas for drying the substrate, such as IPA vapor.

[0024] This embodiment achieves safe real-time control of the flammable and weakly toxic fluid used in the substrate cleaning process, ensuring safe production.

[0025] In one embodiment of the present invention, the on / off state of the first control component 110 is controlled by the main control module 100 , and the on / off state of the second control component 210 is controlled by the safety control module 200 .

[0026] The on / off state of a control component is controlled by the control module. Specifically, the control module controls the on / off state of the corresponding control component's power supply circuit. This can be achieved by the control module supplying power to the control component or by controlling a controllable switch connected to the control component's power supply circuit. In this way, the control module can control the corresponding control component to perform a corresponding action based on set conditions.

[0027] In this embodiment, the on / off states of the first control component 110 and the second control component 210 jointly act on the actuator 310. When both the first control component 110 and the second control component 210 are on, the actuator 310 connects the pipeline of the connected fluid storage container 300. When at least one of the first control component 110 and the second control component 210 is off, the actuator 310 disconnects the pipeline of the connected fluid storage container 300.

[0028] In one embodiment, in order to improve the response speed, the safety control module 200, the second control component 210, the executive component 310 and the fluid storage container 300 are all arranged at the on-site end of the equipment. In the post-substrate cleaning application, a fluid cabinet is provided in the cleaning box, and the executive component 310, the fluid storage container 300 and the safety control module 200 are all installed in the fluid cabinet, and the second control component 210 is installed on the fluid cabinet. In addition, the first control component 110 is installed in an external air circuit box. In actual use, the industrial computer, the air circuit box and the fluid cabinet are generally installed in different positions. Shortening the pipeline transmission path between the second control component 210 and the executive component 310 can improve the output response speed and shorten the response time, thereby quickly cutting off the pipeline of the fluid storage container 300 when an abnormality occurs.

[0029] like Figure 2 As shown, in one embodiment of the present invention, the safety control module 200 and the main control module 100 are connected through a distributed I / O module. The distributed I / O module includes a first bus coupler connected to the main control module 100 and a second bus coupler connected to the safety control module 200. The first bus coupler is connected to the second bus coupler.

[0030] The first bus coupler is installed in the gas box, and the second bus coupler is installed in the fluid cabinet.

[0031] like Figure 2As shown, in one embodiment of the present invention, the safety control module 200 includes a safety control unit and a sensor unit.

[0032] The safety control unit is connected to the sensor unit and the second control component 210 respectively.

[0033] When the safety control unit detects that the state of the fluid storage container 300 is abnormal through the sensor unit, it controls the second control component 210 to operate so that the execution component 310 disconnects the pipeline of the fluid storage container 300.

[0034] The safety control unit includes a safety PLC (Programmable Logic Controller). A safety PLC is a programmable system that can respond accurately and promptly shut down outputs when a failure occurs within the system or in peripheral components or actuators. The safety PLC's response speed is faster than that of an industrial computer, ensuring reliable disconnection of pipelines in the event of an abnormality.

[0035] The sensor unit is installed in the fluid cabinet and is used to detect the working status of the fluid storage container 300 .

[0036] like Figure 2 As shown, in one embodiment of the present invention, the safety control unit includes an interlock control subunit, a safety input and output subunit, and a detection subunit.

[0037] The interlock control subunit is connected to the safety input and output subunit and the detection subunit respectively. The safety input and output subunit is connected to the second control component 210, and the detection subunit is connected to the sensor unit.

[0038] The detection subunit obtains the signal collected by the sensor unit and sends it to the interlock control subunit. The interlock control subunit outputs a switch signal to the safety input and output subunit according to the preset interlock rules. The safety input and output subunit controls the corresponding action of the second control component 210 according to the switch signal.

[0039] In this embodiment, the safety control module 200 effectively controls the second control component 210 according to the preset interlocking rules.

[0040] In one embodiment of the present invention, the sensor unit includes a pressure sensor for detecting the pipeline pressure of the fluid storage container 300, a gas sensor for detecting the gas concentration in the fluid cabinet containing the fluid storage container 300, and / or a door lock detector for detecting the switch status of the cabinet door of the fluid cabinet.

[0041] In one embodiment, the safety control unit determines that the state of the fluid storage container 300 is abnormal including: the pressure sensor detects that the pipeline pressure exceeds the preset pressure range, or the gas sensor detects that the gas concentration exceeds the preset concentration range, or the door lock detector detects that the door lock is in the open state.

[0042] like Figure 2 As shown, in one embodiment, the first control component 110 includes a first solenoid valve EV1 , the second control component 210 includes a second solenoid valve EV2 , and the actuator component 310 includes a first pneumatic valve PV1 .

[0043] The second electromagnetic valve EV2 is connected to the first electromagnetic valve EV1 and the first pneumatic valve PV1 via a connecting pipeline.

[0044] like Figure 2 As shown, the first air source is connected to the input end of the first solenoid valve EV1, the power end of the first solenoid valve EV1 is connected to the main control module 100, the output end of the first solenoid valve EV1 is connected to the input end of the second solenoid valve EV2, the power end of the second solenoid valve EV2 is connected to the safety control module 200, the output end of the second solenoid valve EV2 is connected to the control end of the first pneumatic valve PV1, and the input end and output end of the first pneumatic valve PV1 are respectively connected to the pipeline of the fluid storage container 300.

[0045] The first gas source is used to provide CDA gas (Clean Dry Air).

[0046] In one embodiment, the first solenoid valve EV1 is a normally-off solenoid valve, and the second solenoid valve EV2 is a normally-on solenoid valve.

[0047] When the main control module 100 works normally, the second solenoid valve EV2 remains in a normally open state so that the main control module 100 controls the first pneumatic valve PV1 through the first solenoid valve EV1 to open or close the pipeline of the fluid storage container 300 .

[0048] Under normal circumstances, the main control module 100 controls the first electromagnetic valve EV1 to be turned on or off, thereby actuating the first pneumatic valve PV1 to be turned on or off. Under abnormal circumstances, the safety control module 200 energizes and turns off the second electromagnetic valve EV2, thereby actuating the first pneumatic valve PV1 to disconnect the pipeline.

[0049] like Figure 2 As shown, in one embodiment, the first control component 110 includes a first solenoid valve EV1, a third solenoid valve EV3 and a fifth solenoid valve EV5, the second control component 210 includes a second solenoid valve EV2, a fourth solenoid valve EV4 and a sixth solenoid valve EV6, and the actuator component 310 includes a first pneumatic valve PV1, a second pneumatic valve PV2 and a third pneumatic valve PV3.

[0050] The first pneumatic valve PV1 is connected to the pressurized pipeline of the fluid storage container 300 , the second pneumatic valve PV2 is connected to the input pipeline of the fluid storage container 300 , and the third pneumatic valve PV3 is connected to the output pipeline of the fluid storage container 300 .

[0051] The second solenoid valve EV2 is connected to the first pneumatic valve PV1 and the first solenoid valve EV1 through a first connecting pipe, the fourth solenoid valve EV4 is connected to the second pneumatic valve PV2 and the third solenoid valve EV3 through a second connecting pipe, and the sixth solenoid valve EV6 is connected to the third pneumatic valve PV3 and the fifth solenoid valve EV5 through a third connecting pipe.

[0052] In one embodiment, the first solenoid valve EV1 , the third solenoid valve EV3 and the fifth solenoid valve EV5 are all normally-off solenoid valves, and the second solenoid valve EV2 , the fourth solenoid valve EV4 and the sixth solenoid valve EV6 are all normally-on solenoid valves and are intrinsically safe solenoid valves.

[0053] Taking a specific application scenario as an example, IPA liquid is stored in the fluid storage container 300, the first solenoid valve EV1, the third solenoid valve EV3 and the fifth solenoid valve EV5 are respectively connected to the first gas source, the first pneumatic valve PV1 is connected to the second gas source (for example, nitrogen), and the second pneumatic valve PV2 is connected to the IPA source.

[0054] Under normal circumstances, when IPA vapor is needed during the substrate cleaning process, the main control module 100 controls the first solenoid valve EV1 to be energized, the third solenoid valve EV3 to be de-energized, and the fifth solenoid valve EV5 to be energized. This allows the first pneumatic valve PV1 to be energized, the second pneumatic valve PV2 to be de-energized, and the third pneumatic valve PV3 to be energized. A second gas source then delivers nitrogen through the pressurized pipeline to pressurize the fluid storage container 300. Under the high pressure, the IPA liquid is converted into IPA vapor and discharged from the output pipeline. To stop the output of IPA vapor, the main control module 100 controls the first, third, and fifth solenoid valves EV1, EV3, and EV5 to be de-energized. To replenish IPA raw material in the fluid storage container 300, the main control module 100 controls the third solenoid valve EV3 to be energized, and the first and fifth solenoid valves EV1 and EV5 to be de-energized, allowing the second pneumatic valve PV2 to be energized.

[0055] During this process, the safety control module 200 controls the interlocked solenoid valves to not operate simultaneously according to a preset interlocking rule. For example, the preset interlocking rule includes that the first pneumatic valve PV1 cannot be turned on when the third pneumatic valve PV3 is turned off.

[0056] In an abnormal situation, the safety control module 200 controls the second electromagnetic valve EV2, the fourth electromagnetic valve EV4 and the sixth electromagnetic valve EV6 to be disconnected, so that the first pneumatic valve PV1, the second pneumatic valve PV2 and the third pneumatic valve PV3 are all disconnected, so that the fluid storage container 300 is closed.

[0057] In one embodiment, in addition to the above-described embodiments, the first control component 110 may also include any number of solenoid valves, the second control component 210 may also include any number of solenoid valves, and the actuator 310 may include any number of pneumatic valves. Dual control of the actuator 310 by both the first control component 110 and the second control component 210 is sufficient. If either control component fails, the other control component can reliably shut down the actuator.

[0058] In this embodiment, the fluid storage container 300's pipelines include a pressurized pipeline, an input pipeline, and an output pipeline. Each pipeline is connected to a pneumatic valve, controlled by a dual-solenoid valve in series. The safety control module 200 implements redundant control, ensuring reliable control of the IPA source even in the event of an IPC software crash or program error. Furthermore, during IPC maintenance and overhaul, the pipelines can be quickly disconnected to prevent gas leaks and potential safety incidents.

[0059] An embodiment of the present invention further provides a fluid supply device for post-substrate cleaning, comprising a fluid storage container 300 and an actuator 310 for controlling the on / off of a pipeline of the fluid storage container 300 , and the fluid control device described above connected to the actuator 310 .

[0060] As described above, the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit the same. Although the present invention has been described in detail with reference to the above embodiments, those skilled in the art should understand that the technical solutions described in the above embodiments can still be modified, or some of the technical features thereof can be replaced by equivalents. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A fluid control device for post-cleaning of a substrate, comprising a first control component controlled by a main control module and a second control component controlled by a safety control module; the first control component and the second control component are connected in series to an executive component for controlling the on-off of a pipeline of a fluid storage container; when the main control module operates abnormally, the safety control module controls the second control component to operate so that the executive component disconnects the pipeline of the fluid storage container.

2. The fluid control device according to claim 1, wherein: The on / off state of the first control component is controlled by the main control module, and the on / off state of the second control component is controlled by the safety control module.

3. The fluid control device according to claim 1, wherein: The first control component includes a first solenoid valve, the second control component includes a second solenoid valve, and the actuator component includes a first pneumatic valve; The second solenoid valve is connected to the first solenoid valve and the first pneumatic valve via a connecting pipeline.

4. The fluid control device according to claim 3, wherein: The first solenoid valve is a normally-off solenoid valve, and the second solenoid valve is a normally-on solenoid valve; When the main control module works normally, the second solenoid valve remains in a normally open state so that the main control module controls the first pneumatic valve through the first solenoid valve to open or close the pipeline of the fluid storage container.

5. The fluid control device according to claim 1, wherein: The safety control module includes a safety control unit and a sensor unit; The safety control unit is connected to the sensor unit and the second control component respectively; When the safety control unit detects that the state of the fluid storage container is abnormal through the sensor unit, it controls the second control component to operate so that the execution component disconnects the pipeline of the fluid storage container.

6. The fluid control device according to claim 5, wherein: The sensor unit includes a pressure sensor for detecting the pipeline pressure of the fluid storage container, a gas sensor for detecting the gas concentration in the fluid cabinet containing the fluid storage container, and / or a door lock detector for detecting the cabinet door open / close status of the fluid cabinet.

7. The fluid control device according to claim 5, wherein: The safety control unit includes an interlock control subunit, a safety input and output subunit and a detection subunit; The interlock control subunit is connected to the safety input and output subunit and the detection subunit respectively, the safety input and output subunit is connected to the second control component, and the detection subunit is connected to the sensor unit; The detection subunit obtains the signal collected by the sensor unit and sends it to the interlock control subunit. The interlock control subunit outputs a switch signal to the safety input and output subunit according to the preset interlocking rules. The safety input and output subunit controls the corresponding action of the second control component according to the switch signal.

8. The fluid control device according to claim 1, wherein: The safety control module and the main control module are connected via a distributed I / O module. The distributed I / O module includes a first bus coupler connected to the main control module and a second bus coupler connected to the safety control module. The first bus coupler is connected to the second bus coupler.

9. The fluid control device according to claim 1, wherein: The first control component includes a first solenoid valve, a third solenoid valve and a fifth solenoid valve, the second control component includes a second solenoid valve, a fourth solenoid valve and a sixth solenoid valve, and the execution component includes a first pneumatic valve, a second pneumatic valve and a third pneumatic valve; The first pneumatic valve is connected to the pressurized pipeline of the fluid storage container, the second pneumatic valve is connected to the input pipeline of the fluid storage container, and the third pneumatic valve is connected to the output pipeline of the fluid storage container; The second solenoid valve is connected to the first pneumatic valve and the first solenoid valve through a first connecting pipe, the fourth solenoid valve is connected to the second pneumatic valve and the third solenoid valve through a second connecting pipe, and the sixth solenoid valve is connected to the third pneumatic valve and the fifth solenoid valve through a third connecting pipe.

10. A fluid supply device for post-cleaning of a substrate, characterized in that: It comprises a fluid storage container and an actuator for controlling the on-off of a pipeline of the fluid storage container, and a fluid control device according to any one of claims 1 to 9 connected to the actuator.

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