Planar two-degree-of-freedom macro-micro composite positioning system and control method

A technology of compound positioning and control methods, applied in the control, instrument, measuring device and other directions using feedback, can solve the problem of not being able to achieve large stroke, high precision and high speed at the same time, few two degrees of freedom full feedback trajectory tracking, etc. , to achieve the effect of increasing the additional quality of the structure, high sampling frequency and high measurement accuracy

CN111026166BActive Publication Date: 2021-09-21SOUTH CHINA UNIV OF TECH
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Publication Date
2021-09-21

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Abstract

The invention discloses a plane two-degree-of-freedom macro-micro composite positioning system and a control method. Among them, the planar two-degree-of-freedom macro-micro composite positioning system includes a macro-motion table reference seat, an X-axis macro-motion platform, a Y-axis macro-motion platform, and a laser interferometer with an X-axis laser emitter and a Y-axis laser emitter; The micro-motion platform is installed on the Y-axis macro-motion platform through four sets of identical flexible hinges. The XY-axis micro-motion platform is equipped with piezoelectric ceramics that drive the deformation of the flexible hinges to make the XY-axis micro-motion platform move and are used to detect piezoelectric ceramics. Displacement capacitive sensor; mirror mounting frame with X-axis mirror and Y-axis mirror; motion control card, used to receive the position information of XY-axis micro-motion platform and drive the XY-axis micro-motion platform to move through piezoelectric ceramics, motion control The card controls the piezo movement through the piezo driver. The invention has the advantages of high sampling frequency and high measurement precision.
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Description

technical field

[0001] The invention relates to a two-degree-of-freedom macro-micro composite positioning system with a large-stroke nanoscale and high bandwidth, and is a plane two-degree-of-freedom macro-micro composite positioning system and a control method based on a laser interferometer. Background technique

[0002] With the continuous improvement of microelectronics technology, precision laser, micro-nano processing and other technologies, nano-level positioning technology has been widely used in many fields. Nanoscale positioning technology is an important basis for large-scale integrated circuit processing, micro-nano operation and optical positioning, micro-electromechanical system manufacturing and assembly, large-area high-precision diffraction grating manufacturing, and cell manipulation. Traditional nanoscale precision positioning platforms are usually composed of compliant mechanisms driven by piezoelectric ceramics. As research in the microscopic field turn...

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Embodiment Construction

[0024] This part will describe the specific embodiment of the present invention in detail, and the preferred embodiment of the present invention is shown in the accompanying drawings. Each technical feature and overall technical solution of the invention, but it should not be understood as a limitation on the protection scope of the present invention.

[0025] In the description of the present invention, it should be understood that the orientation descriptions, such as up, down, front, back, left, right, etc. indicated orientations or positional relationships are based on the orientations or positional relationships shown in the drawings, and are only In order to facilitate the description of the present invention and simplify the description, it does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present invention.

[0026] I...