Surface scanning probe system and spectrometer

Abstract

The present disclosure relates to a surface scanning probe system and a spectrometer. The surface scanning probe system includes: a first housing provided with a light guiding hole for an excitation light beam to enter the first housing, the excitation light beam coming from a light passing hole of a Raman detection system of the spectrometer; a surface scanning optical module mounted on the first housing and including a reflection element; a MEMS module fixed to the first housing and including a MEMS driver and a MEMS mirror, the MEMS driver driving the MEMS mirror to move; and an objective lens module fixed to the first housing and including a collimating lens. The excitation light beam entering from the light guiding hole is reflected by the reflection element and then irradiated toward the MEMS mirror, and then is reflected by the MEMS mirror into a plurality of parallel light beams with different angles of irradiation toward the image side of the collimating lens. Through the above technical solution, the surface scanning probe system provided by the present disclosure can achieve multi-point detection and scanning, which is beneficial to improving the operation safety and detection accuracy of the spectrometer.

Description

Technical Field

[0001] The present disclosure relates to the technical field of spectrometers, and in particular, to an area scan probe system and a spectrometer. Background Art

[0002] A spectrometer is a scientific instrument that can decompose light with complex components into spectral lines. Using a spectrometer, the light reflected by a substance to be detected can be measured. The light signal is converted into an electrical signal by a photosensitive element in the spectrometer and transmitted to a processor. The processor analyzes and compares the electrical signal with the reference data in the spectrometer to identify the substance to be detected.

[0003] During the process of identifying a substance, a laser emitter in the spectrometer emits an excitation beam. After the excitation beam is focused into a point by an optical element and irradiated onto the substance to be detected, different Raman spectra will be scattered. The Raman spectra propagate along the optical path defined by the optical element to the photosensitive element, and the photosensitive element converts the light signal into an electrical signal and transmits it to the processor. By analyzing the Raman spectra, different substances can be identified.

[0004] However, due to the concentrated energy of the excitation beam, flammable and explosive substances may be ignited. Therefore, the existing spectrometers have low safety when detecting flammable and explosive substances; and due to the analysis of a single detection point, the detection accuracy of the spectrometer for mixed substances is low. Summary of the Invention

[0005] The purpose of the present disclosure is to provide an area scan probe system and a spectrometer. The area scan probe system can achieve multi-point detection and scanning, which is beneficial to improving the operation safety and detection accuracy of the spectrometer.

[0006] To achieve the above object, the present disclosure provides an area scan probe system, which includes: a first housing provided with a light guiding hole for an excitation beam to enter the first housing, the excitation beam coming from a light passing hole of a Raman detection system of a spectrometer; an area scan optical module mounted on the first housing and including a reflection element; a MEMS module fixed to the first housing and including a MEMS driver and a MEMS mirror, the microelectromechanical system driver driving the MEMS mirror to move; and an objective lens module fixed to the first housing and including a collimating lens having an object side and an image side, the object side being a plane or a concave surface, and the image side being a convex surface. Among them, the excitation beam entering from the light guiding hole is reflected by the reflection element and then irradiated onto the MEMS mirror, and then is reflected by the MEMS mirror into a plurality of parallel beams with different angles irradiated onto the image side of the collimating lens.

[0007] Optionally, the MEMS module has a reference plane defined by perpendicular X and Y axes, and the MEMS driver drives the MEMS mirror to vibrate about the X axis and the Y axis.

[0008] Optionally, the surface scanning probe system includes a connection module, the connection module includes a connecting rod, the connecting rod is configured with a central axis hole and has a first end and a second end opposite to each other, one of the first end and the second end is used for detachably connecting to the Raman detection system, the other of the first end and the second end is detachably connected to the first housing, and the through-light hole, the light guiding hole and the central axis hole are coaxially arranged and communicated, so that the excitation light beam enters the light guiding hole from the through-light hole through the central axis hole.

[0009] Optionally, the first housing is provided with a positioning portion, and this positioning portion is used for engaging with the positioning cooperation portion of the second housing of the Raman detection system to limit the posture of the surface scanning probe system relative to the Raman detection system.

[0010] Optionally, the positioning portion is configured as a positioning post extending outward from the first housing, the positioning post has a special-shaped cross section, and the positioning cooperation portion is configured as a special-shaped hole for inserting the positioning post.

[0011] Optionally, an assembly hole for inserting a filter is formed on the second housing of the Raman detection system, and this assembly hole serves as the special-shaped hole.

[0012] Optionally, the connection module includes a locking sleeve, the connecting rod includes a main body section between the first end and the second end, the locking sleeve has a central counterbore, the central counterbore has a large-diameter hole section and a small-diameter hole section, the first end is configured with a radial flange portion, the radial flange portion is in clearance fit with the large-diameter hole section, a part of the main body section is in clearance fit with the small-diameter hole section, the outer periphery of the locking sleeve is configured with a first external thread, the first housing or the second housing is configured with a connection hole, the connection hole is configured with a first internal thread capable of cooperating with the first external thread, the connection hole and the light guiding hole or the through-light hole together form a counterbore structure, and the aperture of the connection hole is larger than the aperture of the light guiding hole or the through-light hole, the radial flange has an abutting surface, this abutting surface is used for abutting against the step surface between the large-diameter hole section and the small-diameter hole section, and the axial distance between the abutting surface and the end surface of the first end is not less than the axial dimension of the large-diameter hole section, so that the end surface of the first end abuts against the bottom wall of the connection hole.

[0013] Optionally, the second end portion is configured with a second external thread, and a second internal thread is configured in the light passing hole or the light guiding hole. The second external thread and the second internal thread can cooperate with each other so that the connecting rod is connected to the corresponding Raman detection system or the surface scanning probe system.

[0014] Optionally, the connection module includes a limiting gasket sleeved on the connecting rod, and a relief groove is provided between the second end portion and the main body section. The limiting gasket is partially received in the relief groove.

[0015] Optionally, the central axis hole is configured as an internal hexagonal wrench mating portion at the first end portion.

[0016] Optionally, the objective lens module includes an objective lens barrel having an installation end and a free end opposite to each other. The objective lens barrel is detachably connected to the first housing or the Raman detection system through the installation end. The collimating lens is fixed to the installation end. The objective lens barrel is configured with a detection window at the free end, and the distance between the optical axis center of the collimating lens and the end face of the free end is equal to the focal length of the collimating lens.

[0017] Optionally, the objective lens barrel includes a detection cap and a fixing bracket. The detection window is formed at one end of the detection cap. The other end of the detection cap is detachably connected to the fixing bracket. The collimating lens is fixed to the fixing bracket. The fixing bracket is detachably connected to the first housing or the Raman detection system.

[0018] Optionally, the surface scanning optical module includes a holding bracket and a mounting bracket. The reflecting element is fixed on the holding bracket and has a reflecting surface. The holding bracket is supported on the mounting bracket and can rotate around a first rotation axis. The mounting bracket is mounted on the first housing and can rotate around a second rotation axis. The first rotation axis is parallel to the reflecting surface. The second rotation axis is perpendicular to the first rotation axis and perpendicular to the axis of the light guiding hole.

[0019] Optionally, the first rotation axis coincides with the reflecting surface. The first rotation axis, the second rotation axis, and the central axis of the light guiding hole intersect at a point, and this point is located on the reflecting surface.

[0020] Optionally, the holding bracket is configured as a cylindrical structure. The first rotation axis is collinear with the central axis of the cylindrical structure. The mounting bracket is configured with a holding shaft hole and an opening for exposing a part of the holding bracket to expose the reflecting element. The holding bracket has an exposed operating end, and the end face of this operating end is configured with a first adjustment groove perpendicular to the first rotation axis.

[0021] Optionally, the surface scanning optical module includes a locking member for limiting the position and posture of the retaining bracket relative to the mounting bracket.

[0022] Optionally, the locking member is configured as a top screw, which is threadably engaged with the mounting bracket and extends into the retaining shaft hole.

[0023] Optionally, the mounting bracket has a columnar supporting body and a fixing portion, the supporting body is inserted into the second shell and has an exposed outer end surface, a second adjustment groove is constructed on the outer end surface, the central axis of the supporting body is colinear with the second rotation axis, the fixing portion is connected to the second shell through a fastener, and is constructed to allow the supporting body to rotate when the fastener is loosened and to limit the rotation of the supporting body when the fastener is tightened.

[0024] Optionally, the fixing portion includes a plurality of connecting ears extending radially outward from the outer end portion of the support body, and the plurality of connecting ears are spaced apart in the circumferential direction about the central axis of the support body, each of the connecting ears is constructed with an arc-shaped through hole, and the center of each arc-shaped through hole coincides and is located on the central axis of the support body, and each arc-shaped through hole is correspondingly provided with a fastener for connecting the mounting bracket to the first shell, the depth direction of the second adjustment groove and the axial direction of the arc-shaped through hole are parallel to the second rotation axis, and the center of the circle is located in the second adjustment groove and on the second rotation axis.

[0025] Based on the above technical solution, the present disclosure also provides a spectrometer, including a Raman detection system, and the spectrometer also includes the above-mentioned surface scanning probe system, the surface scanning probe system and the Raman detection system are connected so that the light guide hole and the light through hole are coaxially arranged and connected to each other.

[0026] Through the above technical solution, the surface scanning probe system provided by the present disclosure enables the excitation light beam from the Raman detection system to irradiate the collimating lens at different angles through the MEMS mirror in the MEMS module. Then, the excitation light beam is focused on the substance to be measured by the collimating lens. Here, the parallel excitation light beams at different angles are focused on different points after passing through the collimating lens, achieving the effect of dispersing the energy of the excitation light beam. Therefore, it can effectively avoid the concentration of the energy of the excitation light beam from igniting flammable and explosive substances, thereby improving the operation safety of the spectrometer. After that, the Raman spectral signal excited by the substance under the irradiation of the excitation light beam is refracted by the collimating lens into a parallel signal, and after being reflected by the MEMS mirror and the reflecting element, it is incident towards the light passing hole, and then is processed and analyzed by the Raman detection system of the spectrometer. Among them, under the drive of the MEMS driver in the MEMS module, the change in the attitude angle of the MEMS mirror (which can also be understood as the reflection angle of the MEMS mirror) causes the reflection angle of the excitation light beam to change accordingly. Therefore, the focal points of the same parallel excitation light beam after being refracted by the collimating lens are different at different times. The continuously changing focal points make the excited Raman spectral signals come from different sampling points, which is more comprehensive for sampling of mixed substances and can effectively improve the detection accuracy of the spectrometer. Here, the focal point can be changed to vary according to a certain regular pattern, such as a Lissajous curve, or it can be scanned point by point in a 4×4 rectangular dot matrix. The present disclosure does not make specific limitations on this.

[0027] Other features and advantages of the present disclosure will be described in detail in the subsequent specific implementation section. Brief Description of the Drawings

[0028] The drawings are used to provide a further understanding of the present disclosure and constitute a part of the specification. Together with the following specific implementation, they are used to explain the present disclosure, but do not constitute a limitation to the present disclosure. In the drawings:

[0029] Figure 1 is a three-dimensional structural schematic diagram of the surface scanning probe system provided by an embodiment of the present disclosure;

[0030] Figure 2 is a partial structural schematic diagram of the surface scanning probe system provided by an embodiment of the present disclosure, in which the reflecting element, the MEMS module, and the collimating lens are shown;

[0031] Figure 3 is a partial structural schematic diagram of the surface scanning probe system provided by an embodiment of the present disclosure, in which the working principle of the surface scanning probe system is shown;

[0032] Figure 4 is a three-dimensional structural schematic diagram of the spectrometer provided by an embodiment of the present disclosure;

[0033] Figure 5It is a schematic three-dimensional structure diagram of a Raman detection system in a spectrometer provided by an embodiment of the present disclosure;

[0034] Figure 6 It is a schematic cross-sectional view of a spectrometer provided by an embodiment of the present disclosure;

[0035] Figure 7 is Figure 6 A partially enlarged schematic view of the spectrometer shown.

[0036] Description of reference numerals

[0037] 1 - Surface scanning probe system, 10 - First housing, 101 - Positioning post, 102 - Connecting hole, 11 - Reflective element, 12 - Collimating lens, 13 - MEMS module, 131 - MEMS mirror, 14 - Detection cap, 15 - Fixed bracket, 16 - Holding bracket, 161 - First adjustment groove, 17 - Mounting bracket, 171 - Outer end face, 172 - Second adjustment groove, 173 - Connecting ear, 174 - Fastener, 18 - Light guiding hole, 19 - Locking member;

[0038] 2 - Raman detection system, 20 - Second housing, 21 - Special-shaped hole, 22 - Light passing hole, 23 - Laser emitter, 241 - Filter, 242 - Dichroic sheet, 243 - Collimating element, 244 - Slit, 245 - First collimating lens, 246 - Dispersion element, 247 - Second collimating lens, 25 - Light sensing element;

[0039] 3 - Connection module, 31 - Connecting rod, 310 - Main body section, 311 - First end, 312 - Second end, 313 - Central axis hole, 314 - Contact surface, 315 - Relief groove, 316 - Inner hexagon wrench mating part, 32 - Locking sleeve, 321 - Step surface, 33 - Limit gasket. Detailed implementation manners

[0040] The following will describe in detail the specific implementation manners of the present disclosure with reference to the accompanying drawings. It should be understood that the specific implementation manners described herein are only for explaining and illustrating the present disclosure, and are not used to limit the present disclosure.

[0041] In the present disclosure, unless otherwise stated, the "inner and outer" used refers to the "inner and outer" relative to the contour of the corresponding component itself. In addition, the terms "first, second" etc. used in the present disclosure are used to distinguish one element from another, and do not have sequence and importance. In addition, in the following description, when referring to the accompanying drawings, unless otherwise explained, the same reference numerals in different drawings represent the same or similar elements. The above definitions are only for explaining and illustrating the present disclosure, and should not be construed as a limitation to the present disclosure.

[0042] According to the specific implementation manners of the present disclosure, with reference toFigures 1 to 7 As shown, a surface scanning probe system 1 is provided. The surface scanning probe system 1 includes: a first housing 10, the first housing 10 is provided with a light guiding hole 18 for an excitation light beam to enter the first housing 10, and the excitation light beam comes from the light passing hole 22 of the Raman detection system 2 of the spectrometer; a surface scanning optical module, the surface scanning optical module is installed on the first housing 10 and includes a reflection element 11; a MEMS module 13 (MEMS, Micro-Electro-Mechanical System), the MEMS module 13 is fixed to the first housing 10 and includes a MEMS driver and a MEMS mirror 131, and the MEMS driver drives the MEMS mirror 131 to move; and an objective lens module, the objective lens module is fixed to the first housing 10 and includes a collimating lens 12, the collimating lens 12 has an object side and an image side, the object side is a plane or a concave surface, and the image side is a convex surface. Therefore, the collimating lens 12 can focus the parallel excitation light beam on the substance to be measured, and can collimate the Raman spectrum signal excited by the substance to be measured when irradiated by the excitation light beam into a parallel light beam. Among them, the excitation light beam entering from the light guiding hole 18 is reflected by the reflection element 11 and then irradiated toward the MEMS mirror 131, and then is reflected by the MEMS mirror 131 into a plurality of parallel light beams with different angles of irradiation toward the image side of the collimating lens 12.

[0043] Through the above technical solution, the surface scanning probe system 1 provided by the present disclosure can make the excitation beam from the Raman detection system irradiate the collimating lens 12 at different angles through the MEMS mirror 131 in the MEMS module 13. Then, the excitation beam is focused on the substance to be measured by the collimating lens 12. Here, the parallel excitation beams at different angles are focused on different points after passing through the collimating lens 12, achieving the effect of dispersing the energy of the excitation beam. Therefore, it can effectively avoid the concentration of the energy of the excitation beam from igniting flammable and explosive substances, thereby improving the operation safety of the spectrometer. Then, the Raman spectral signal excited by the substance to be measured under the irradiation of the excitation beam is refracted by the collimating lens 12 into a parallel signal, reflected by the MEMS mirror 131 and the reflecting element 11, and then incident on the through-hole 22, and then processed and analyzed by the Raman detection system 2 of the spectrometer. Among them, under the drive of the MEMS driver, the change in the attitude angle (which can also be understood as the reflection angle of the MEMS mirror 131) of the MEMS mirror 131 causes the reflection angle of the excitation beam to change accordingly. Therefore, the focal points of the same parallel excitation beam at different times after being refracted by the collimating lens 12 are different. The continuously changing focal points make the excited Raman spectral signals come from different sampling points, which is more comprehensive for sampling of mixed substances and can effectively improve the detection accuracy of the spectrometer. Here, the focal point can be changed in a pattern according to a certain rule by changing the attitude angle of the MEMS mirror 131, such as a Lissajous curve, or it can be scanned point by point in a 4×4 rectangular dot matrix. The present disclosure does not make specific limitations on this.

[0044] Here, it needs to be explained that the excitation beam is a kind of light used to excite the Raman spectral signal, which can be, for example, a laser beam, etc. The present disclosure does not make specific limitations on this. Among them, the Raman spectrum is a fingerprint spectrum that can reflect information about the rotation and vibration of molecules. When the beam passes through substances with different molecular structures, different Raman spectra will be scattered. Therefore, by analyzing the Raman spectrum, the purpose of identifying different substances can be achieved.

[0045] In the specific embodiment provided by the present disclosure, the attitude angle or reflection angle of the MEMS mirror 131 can be changed in a suitable manner. Optionally, the MEMS module 13 has a reference plane defined by the mutually perpendicular X-axis (as shown in Figure 2 shown) and Y-axis (as shown in Figure 2 shown). The MEMS driver drives the MEMS mirror 131 to rotate around the X-axis and Y-axis to change the attitude angle of the MEMS mirror 131, so that the excitation beam reflected by the MEMS mirror 131 irradiates the collimating lens 12 at different angles. Refer to Figure 2It can be seen that parallel light beams with the same reflection angle reflected by the reflection element 11 become multiple parallel light beams that are irradiated towards the collimating lens 12 at different angles after being reflected by the MEMS mirror 131. In addition, it can be seen in Figure 3 that the same parallel light beam has different focal points at different times, that is, the excitation light beam has a first focal point at time T1 and a second focal point at time T2.

[0046] Among them, the intersection of the X-axis and the Y-axis is located at the center of the MEMS mirror 131, so as to accurately control the rotation angles of the MEMS mirror 131 around the X-axis and the Y-axis.

[0047] In the specific embodiment provided by the present disclosure, the surface scanning probe system 1 includes a connection module 3. The connection module 3 includes a connecting rod 31. The connecting rod 31 is configured with a central axis hole 313 and has a first end 311 and a second end 312 that are opposite to each other. One of the first end 311 and the second end 312 is used for detachably connecting to the Raman detection system 2, and the other of the first end 311 and the second end 312 is detachably connected to the first housing 10, and the light passing hole 22 and the light guiding hole 18 are coaxially arranged and communicated with the central axis hole 313, so that the excitation light beam enters the light guiding hole 18 from the light passing hole 22 through the central axis hole 313. The detachable connection between the surface scanning probe system 1 and the Raman detection system 2 can use other probe systems, such as a common objective lens, to replace the surface scanning probe system, so that the spectrometer can be switched between, for example, a common Raman detector and a MEMS surface scanning Raman detector, so as to expand the use range of the spectrometer and avoid the single application scenario of the spectrometer. If it is necessary to switch the spectrometer from, for example, a common Raman detector to a MEMS surface scanning Raman detector, after removing the objective lens module of the common Raman detector, the surface scanning probe system 1 can be connected to the Raman detection system 2 through the connecting rod 31 and then used, so that the spectrometer has a surface scanning function. On the contrary, if it is necessary to switch the spectrometer from a MEMS surface scanning Raman detector to, for example, a common Raman detector, the connecting rod 31 is removed from the Raman detection system 2, and the above-mentioned common objective lens is installed on the Raman detection system 2, and it can be switched to a common Raman detector.

[0048] Among them, in order to ensure the accuracy of the relative position between the surface scanning probe system 1 and the Raman detection system 2, the first housing 10 is provided with a positioning portion, which is used to engage with the positioning and mating portion of the second housing 20 of the Raman detection system 2 to limit the posture of the surface scanning probe system 1 relative to the Raman detection system 2.

[0049] Among them, in the specific embodiments provided by the present disclosure, the positioning part and the positioning and mating part can be constructed in any suitable manner. Optionally, the positioning part is constructed as a positioning post 101 extending outward from the first housing 10, and the positioning post 101 has a special-shaped cross-section. The positioning and mating part is constructed as a special-shaped hole 21 for inserting the positioning post 101. In some other embodiments, the positioning and mating part can be constructed as a positioning post 101 extending outward from the first housing 10, and the positioning part can be constructed as a special-shaped hole 21 for inserting the positioning post 101. In this regard, the present disclosure does not make specific limitations.

[0050] Among them, referring to Figure 3 As shown in, an assembly hole for inserting the filter 241 is formed on the second housing 20 of the Raman detection system 2, and this assembly hole serves as the special-shaped hole 21. It should be noted here that when the positioning post 101 is inserted into the above-mentioned assembly hole, the surface scanning probe system 1 is restricted from moving relative to the Raman detection system 2 in the lateral direction and the longitudinal direction, and the part of the positioning post 101 inserted into the assembly hole does not affect the use of the filter 241.

[0051] Among them, in the specific embodiments provided by the present disclosure, the connection module 3 includes a locking sleeve 32. The connecting rod 31 includes a main body section 310 located between the first end 311 and the second end 312. Referring to Figure 6 and Figure 7 As shown in, the locking sleeve 32 has a central counterbore, and the central counterbore has a large-diameter hole section and a small-diameter hole section. The first end 311 is constructed with a radial flange portion, and the radial flange portion is in clearance fit with the large-diameter hole section. A part of the main body section 310 is in clearance fit with the small-diameter hole section. Among them, the outer periphery of the locking sleeve 32 is constructed with a first external thread, and the first housing 10 or the second housing 20 is constructed with a connection hole 102, and the connection hole 102 is constructed with a first internal thread capable of cooperating with the first external thread. Among them, the connection hole 102 and the light guide hole 18 or the light passing hole 22 are constructed together as a counterbore structure, and the aperture of the connection hole 102 is larger than the aperture of the light guide hole 18 or the light passing hole 22. The radial flange has an abutting surface 314, and the abutting surface 314 is used to abut against the step surface 321 between the large-diameter hole section and the small-diameter hole section. The axial distance between the abutting surface 314 and the end surface of the first end 311 is not less than the axial dimension of the large-diameter hole section, so that the end surface of the first end 311 abuts against the bottom wall of the connection hole 102.

[0052] As Figure 4 、 Figure 6 and Figure 7In the illustrated embodiment, the first housing 10 is configured with a connection hole 102, and the connection hole 102 is configured with a first internal thread that can cooperate with a first external thread on the outer periphery of the locking sleeve 32. The connection hole 102 and the light guide hole 18 are configured together as a counterbore structure, and the aperture of the connection hole 102 is larger than the aperture of the light guide hole 18. The radial flange has an abutting surface 314, and the abutting surface 314 is used to abut against a step surface 321 between the large-diameter hole section and the small-diameter hole section. The axial distance between the abutting surface 314 and the end surface of the first end 311 is not less than the axial dimension of the large-diameter hole section, so that the end surface of the first end 311 abuts against the bottom wall of the connection hole 102, thereby firmly connecting the first end 311 of the connecting rod 31 to the first housing 10.

[0053] Wherein, the second end 312 can be configured with a second external thread, and a second internal thread is configured in the light passing hole 22 or the light guide hole 18. The second external thread and the second internal thread can cooperate with each other to connect the connecting rod 31 to the corresponding Raman detection system 2 or the surface scanning probe system 1.

[0054] As Figure 4 、 Figure 6 and Figure 7 In the illustrated embodiment, a second internal thread is configured in the light passing hole 22, and the second internal thread cooperates with the second external thread of the second end 312 to connect the second end 312 of the connecting rod 31 to the Raman detection system 2.

[0055] Wherein, the connection module 3 includes a limiting gasket 33 sleeved on the connecting rod 31, and a relief groove 315 is provided between the second end 312 and the main body section 310. The limiting gasket 33 is partially received in the relief groove 315 to prevent the length of the part of the second end 312 of the connecting rod 31 connected to the Raman detection system 2 from being too long and affecting the use of the internal components of the Raman detection system 2, thereby playing a role in limiting the size.

[0056] Wherein, the central axis hole 313 is configured as an internal hexagonal wrench mating portion 316 at the first end 311, and the internal hexagonal wrench mating portion 316 cooperates with an internal hexagonal wrench to connect the second end 312 of the connecting rod 31 to the Raman detection system 2.

[0057] In the specific embodiments provided by the present disclosure, the objective lens module includes an objective lens barrel, which has a mounting end and a free end opposite to each other. The collimating lens 12 is fixed to the mounting end. The objective lens barrel is configured with a detection window at the free end, and the distance between the optical axis center of the collimating lens 12 and the end face of the free end is equal to the focal length of the collimating lens 12. Therefore, when detecting the composition of the substance to be measured, it is only necessary to make the end face of the free end flush with the substance to be measured (i.e., in contact and fitting with each other), so that the substance to be measured can be located within the focal plane of the collimating lens 12, thereby achieving focusing. Among them, the objective lens barrel can be detachably connected to the first housing 10 or the Raman detection system 2 through the mounting end, that is, the objective lens barrel can be designed to be suitable for connecting to the first housing 10 and the Raman detection system 2. Then, it is possible that for the surface scanning probe system 1, different specifications of objective lens modules can be conveniently replaced to meet different detection requirements. For the Raman detection system 2, the objective lens module can be used as a spare objective lens. In some scenarios, it can be used as a normal objective lens and then assembled onto the Raman detection system 2. Thus, the MEMS surface scanning Raman detector can be modified into a normal Raman detector through simple operations, which can meet various detection requirements of users. Of course, it is also possible that in order to reduce the operation steps when switching between a normal Raman detector and a MEMS surface scanning Raman detector, different objective lens modules can be designed according to actual needs to be respectively used for the surface scanning probe system 1 and the Raman detection system 2.

[0058] Among them, as shown in Figure 4 , the objective lens barrel includes a detection cap 14 and a fixing bracket 15. The detection window is formed at one end of the detection cap 14. The other end of the detection cap 14 is detachably connected to the fixing bracket 15. The collimating lens 12 is fixed to the fixing bracket 15, and the fixing bracket 15 is detachably connected to the first housing 10 or the Raman detection system 2.

[0059] In the specific embodiments provided by the present disclosure, as shown in Figure 1 , Figure 4 and Figure 6As shown in the figure, the surface scanning optical module includes a holding bracket 16 and a mounting bracket 17. The reflecting element 11 is fixed on the holding bracket 16 and has a reflecting surface, and the reflecting surface defines a first rotation axis and a second rotation axis perpendicular to each other. The holding bracket 16 is supported on the mounting bracket 17 and can rotate around the first rotation axis. The mounting bracket 17 is mounted on the first housing 10 and can rotate around the second rotation axis. The first rotation axis is parallel to the reflecting surface, and the second rotation axis is perpendicular to the first rotation axis and perpendicular to the axis of the light guiding hole 18. By rotating the holding bracket 16 around the first rotation axis, the pitching angle of the reflecting element 11 is adjusted; by rotating the mounting bracket 17 around the second rotation axis and driving the holding bracket 16 to rotate, the deflection angle of the reflecting element 11 is adjusted, so as to adjust the relative position between the reflecting element 11 and the MEMS mirror 131, and thus a more accurate and precise detection effect can be obtained.

[0060] Wherein, the first rotation axis can coincide with the reflecting surface, and the first rotation axis, the second rotation axis and the central axis of the light guiding hole 18 intersect at a point, and this point is located on the reflecting surface, so as to accurately adjust the posture of the reflecting element 11 relative to the MEMS mirror 131.

[0061] In some embodiments provided by the present disclosure, in order to facilitate the setting of the reflecting element 11, the holding bracket 16 can be configured as a cylindrical structure, the first rotation axis is collinear with the central axis of the cylindrical structure, and the mounting bracket 17 is configured with a holding shaft hole and an opening for exposing a part of the holding bracket 16 to expose the reflecting element 11. In some embodiments, the holding bracket 16 can achieve stepless rotation and stay at the required position when rotated to the required position.

[0062] For example, in order to be able to rotate the holding bracket 16, the holding bracket 16 has an operating end exposed outside the first housing 10, and the end surface of this operating end is configured with a first adjusting groove 161, and the first adjusting groove 161 is perpendicular to the first rotation axis. By inserting an operating tool into the first adjusting groove 161, for example, the holding bracket 16 can be operated to rotate around the first rotation axis to adjust the posture of the reflecting element 11 relative to the MEMS mirror 131. Here, the first adjusting groove 161 can be configured in any suitable manner, and the corresponding operating tool can be configured accordingly. For example, the first adjusting groove 161 can be configured as a straight shape. Thus, common items in life can be used as operating tools, such as coins, etc. This can avoid the need for special tools, thus saving costs, and can also improve the convenience of operation and avoid the inconvenience caused by the loss of operating tools.

[0063] Among them, the surface scanning optical module may include a locking member 19 for restricting the position and attitude of the holding bracket 16 relative to the mounting bracket 17. When the locking member 19 is loosened, the holding bracket 16 is allowed to move relative to the mounting bracket 17 along the central axis of the cylindrical structure for mounting the holding bracket 16 on the mounting bracket 17 or removing it from the mounting bracket 17; when the locking member 19 is tightened, the holding bracket 16 is restricted from moving along the central axis of the cylindrical structure and radially swaying relative to the mounting bracket 17 to fix the holding bracket 16 on the mounting bracket 17.

[0064] Among them, the locking member 19 can be constructed in any suitable manner. Optionally, the locking member 19 is constructed as a setscrew that is threadedly engaged with the mounting bracket 17 and extends into the holding shaft hole. Of course, in other embodiments of the present disclosure, there may be other construction methods to achieve stepless rotation adjustment and position holding of the holding bracket 16. In this regard, the present disclosure does not make specific limitations.

[0065] In some specific embodiments provided by the present disclosure, referring to Figure 1 as shown in, the mounting bracket 17 can be constructed to have a columnar support body and a fixing portion. The support body is inserted into the second housing 20 and has an exposed outer end face 171 on which a second adjustment groove 172 is formed. The central axis of the support body is collinear with the second rotation axis. The fixing portion is connected to the second housing 20 by a fastener 174 and is constructed to allow the support body to rotate when the fastener 174 is loosened and restrict the rotation of the support body when the fastener 174 is tightened. When the fastener 174 is loosened, by operating the second adjustment groove 172, the mounting bracket 17 can be rotated around the second rotation axis and drive the holding bracket 16 to rotate to adjust the attitude of the reflecting element 11 relative to the MEMS mirror 131. In some embodiments, the mounting bracket 17 can achieve stepless rotation and stay at the required position when rotated to that position. Here, the second adjustment groove 172 can be constructed in any suitable manner, and the corresponding operating tool can be configured accordingly. For example, the second adjustment groove 172 can be constructed as a slotted shape. Thus, common items in life, such as coins, can be used as operating tools, which can eliminate the need for special tools, save costs, improve the convenience of operation, and avoid the inconvenience caused by the loss of operating tools.

[0066] For example, to achieve the rotation of the mounting bracket 17, the fixing portion includes a plurality of connecting ears 173 radially extending outward from the outer end portion of the support body. The plurality of connecting ears 173 are circumferentially spaced about the central axis of the support body. Each connecting ear 173 is configured with an arc-shaped through hole, and the centers of each arc-shaped through hole coincide and are located on the central axis of the support body. Each arc-shaped through hole is correspondingly provided with a fastener 174 for connecting the mounting bracket 17 to the first housing 10. The depth direction of the second adjustment groove 172 and the axial direction of the arc-shaped through hole are parallel to the second rotation axis, and the center is located in the second adjustment groove 172 and on the second rotation axis. When it is necessary to rotate the mounting bracket 17, the fastener can be loosened (but it is not necessary to remove the fastener) until the mounting bracket 17 can move relative to the first housing 10. When it is necessary to lock the mounting bracket 17, the fastener is tightened until the mounting bracket 17 is fastened to the first housing 10. Here, the arc-shaped extension direction of the above arc-shaped through hole is perpendicular to its own axial direction, and the mutual cooperation of the arc shape and the fastener is used to constrain and guide the movement of the mounting bracket 17. Of course, in other embodiments of the present disclosure, there may be other structural ways to achieve the stepless rotation adjustment and position holding of the mounting bracket 17, and the present disclosure does not make specific limitations in this regard.

[0067] Based on the above technical solutions, the present disclosure also provides a spectrometer, which includes a Raman detection system 2 and the above-mentioned area scanning probe system 1. The area scanning probe system 1 and the Raman detection system 2 are connected and arranged such that the light guiding hole 18 and the light passing hole 22 are coaxially arranged and communicate with each other. Since the spectrometer includes the above-mentioned area scanning probe system 1, it also has the above characteristics. To avoid repetition, it will not be described in detail here.

[0068] Among them, the Raman detection system 2 includes an excitation module, an optical module, and a detection module. The excitation module includes a laser emitter 23. The optical module defines an optical path. The optical module includes a dichroic filter 242, a slit 244, and a dispersion element 246 arranged in sequence along the optical path from front to back. The detection module includes a light-sensitive element 25 located behind the first collimating lens 245. Among them, the optical module further includes: a filter 241 located between the laser emitter 23 and the dichroic filter 242, a collimating element 243 between the dichroic filter 242 and the slit 244, a first collimating lens 245 between the slit 244 and the dispersion element 246, and a second collimating lens 247 between the dispersion element 246 and the light-sensitive element 25.

[0069] Here, in an embodiment of the spectrometer provided by the present disclosure, the first housing of the surface scanning probe system 1 and the second housing of the Raman detection system 2 can be integrated into a single integral component. Therefore, the detection mode of the spectrometer constructed in this way is specific and determined by the surface scanning probe system 1. In another embodiment of the spectrometer provided by the present disclosure, the first housing 10 of the surface scanning probe system 1 and the second housing 20 of the Raman detection system 2 are independent components from each other. In this way, the surface scanning probe system 1 and the Raman detection system 2 can be assembled independently of each other. Such a split housing enables the surface scanning probe system 1 and the Raman detection system 2 to have no influence on each other during their respective assembly processes. When manufacturing the spectrometer, it is only necessary to assemble the two together, which can effectively reduce the assembly time and at the same time reduce the assembly difficulty. In addition, during the processing of the two split housings, the required processes, fixtures, and processing time are significantly less than those of the integral housing, and the production cost of the split housing is also significantly less than that of the integral housing.

[0070] During the working process of the spectrometer, after the excitation beam emitted by the laser emitter 23 is filtered by the filter 241 to filter out the light of redundant wavelengths emitted by the laser emitter 23, the excitation beam is reflected by the dichroic mirror 242 and then propagates along the optical path towards the through hole 22, passes through the central axis hole 313 of the connecting rod 31, and is incident into the surface scanning probe system 1 through the light guiding hole 18. After being reflected by the reflecting element 11, the excitation beam is irradiated towards the MEMS mirror 131. By means of the MEMS mirror 131, the excitation beam can be irradiated towards the collimating lens 12 at different angles. Then, the excitation beam is focused on the substance to be measured by the collimating lens 12. After that, the Raman spectral signal excited by the substance to be measured being irradiated by the excitation beam is collimated into a parallel signal by the collimating lens 12, and after being reflected by the MEMS mirror 131 and the reflecting element 11, it passes through the light guiding hole 18, the central axis hole 313 of the connecting rod 31, and the through hole 22 and then is incident into the Raman detection system 2. This parallel signal passes through the dichroic mirror 242, passes through the collimating element 243, and then is incident into the slit 244 and is converted into divergent light. This divergent light is collimated into parallel light by the first collimating lens 245 and reaches the dispersive element 246. After being diffracted by the dispersive element 246, lights of different wavelengths are diffracted in different directions. The diffracted lights of all wavelengths pass through the second collimating lens 247 and propagate to the light sensing element 25 (such as a CCD light sensing element), and the light sensing element 25 converts the optical signal into an electrical signal, thereby forming spectral data output to identify the substance to be measured.

[0071] The preferred embodiments of the present disclosure have been described in detail above in conjunction with the accompanying drawings. However, the present disclosure is not limited to the specific details in the above embodiments. Within the scope of the technical concept of the present disclosure, various simple modifications can be made to the technical solutions of the present disclosure, and these simple modifications all fall within the protection scope of the present disclosure.

[0072] In addition, it should be noted that, for the various specific technical features described in the above specific embodiments, they can be combined in any suitable manner without conflict. To avoid unnecessary repetition, the present disclosure will not separately describe various possible combination manners.

[0073] In addition, any combination can be made between various different embodiments of the present disclosure, as long as it does not violate the idea of the present disclosure, and it should also be regarded as the content disclosed by the present disclosure.

Claims

1. A face-scanning probe system, characterized in that, The surface scanning probe system (1) includes: A first housing (10), the first housing (10) being provided with a light guiding hole (18) for an excitation light beam to enter the first housing (10), the excitation light beam coming from a light passing hole (22) of a Raman detection system (2) of a spectrometer; A surface scanning optical module, the surface scanning optical module being mounted on the first housing (10) and including a reflection element (11); A MEMS module (13), the MEMS module (13) being fixed to the first housing (10) and including a MEMS driver and a MEMS mirror (131), the MEMS driver driving the MEMS mirror (131) to move; and, An objective lens module, the objective lens module being fixed to the first housing (10) and including a collimating lens (12), the collimating lens (12) having an object side and an image side, the object side being a plane or a concave surface, and the image side being a convex surface, wherein the excitation light beam entering from the light guiding hole (18) is reflected by the reflection element (11) and then irradiated toward the MEMS mirror (131), and then is reflected by the MEMS mirror (131) into a plurality of parallel light beams with different angles of irradiation toward the image side of the collimating lens (12), The MEMS module (13) has a reference plane defined by a mutually perpendicular X-axis and Y-axis, and the MEMS driver drives the MEMS mirror (131) to rotate around the X-axis and the Y-axis, The surface scanning probe system (1) further includes a connection module (3), the connection module (3) including a connecting rod (31), the connecting rod (31) being configured with a central axis hole (313) and having a first end (311) and a second end (312) opposite to each other, one of the first end (311) and the second end (312) being used for detachably connecting to the Raman detection system (2), and the other of the first end (311) and the second end (312) being detachably connected to the first housing (10), and enabling the light passing hole (22), the light guiding hole (18) and the central axis hole (313) to be coaxially arranged and communicated, so that the excitation light beam enters the light guiding hole (18) from the light passing hole (22) through the central axis hole (313).

2. The surface scanning probe system according to claim 1, wherein The first housing (10) is provided with a positioning portion for engaging with a positioning mating portion of a second housing (20) of the Raman detection system (2) to limit the posture of the surface scanning probe system (1) relative to the Raman detection system (2).

3. The surface scanning probe system according to claim 2, wherein The positioning portion is configured as a positioning post (101) extending outward from the first housing (10), the positioning post (101) having a special-shaped cross section, and the positioning mating portion is configured as a special-shaped hole (21) for inserting the positioning post (101).

4. The surface scanning probe system according to claim 3, wherein An assembly hole for inserting a filter (241) is formed on the second housing (20) of the Raman detection system (2), and this assembly hole serves as the special-shaped hole (21).

5. The surface scanning probe system according to claim 1, wherein The connecting module (3) includes a locking sleeve (32), and the connecting rod (31) includes a main body section (310) located between the first end (311) and the second end (312). The locking sleeve (32) has a central counterbore, which has a large-diameter hole section and a small-diameter hole section. The first end (311) is configured with a radial flange portion, and the radial flange portion is in clearance fit with the large-diameter hole section. A part of the main body section (310) is in clearance fit with the small-diameter hole section. The outer circumference of the locking sleeve (32) is configured with a first external thread, and the first housing (10) or the second housing (20) is configured with a connection hole (102), and the connection hole (102) is configured with a first internal thread that can cooperate with the first external thread. The connection hole (102) and the light guide hole (18) or the light passing hole (22) are together configured as a counterbore structure, and the aperture of the connection hole (102) is larger than the aperture of the light guide hole (18) or the light passing hole (22). The radial flange has an abutting surface (314), and this abutting surface (314) is used to abut against the step surface (321) between the large-diameter hole section and the small-diameter hole section. The axial distance between the abutting surface (314) and the end surface of the first end (311) is not less than the axial dimension of the large-diameter hole section, so that the end surface of the first end (311) abuts against the bottom wall of the connection hole (102).

6. The face scanning probe system according to claim 5, characterized in that, The second end (312) is configured with a second external thread, and a second internal thread is configured in the light passing hole (22) or the light guide hole (18). The second external thread and the second internal thread can cooperate with each other so that the connecting rod (31) is connected to the corresponding Raman detection system (2) or the surface scanning probe system (1).

7. The surface scanning probe system according to claim 6, wherein The connecting module (3) includes a limit gasket (33) sleeved on the connecting rod (31), and a relief groove (315) is provided between the second end (312) and the main body section (310), and the limit gasket (33) is partially received in the relief groove (315).

8. The surface scanning probe system according to claim 6, wherein The central shaft hole (313) is configured as an internal hexagonal wrench mating portion (316) at the first end (311).

9. The surface scanning probe system according to claim 1, wherein The objective lens module includes an objective lens barrel, which has an installation end and a free end opposite to each other. The objective lens barrel is detachably connected to the first housing (10) or the Raman detection system (2) through the installation end. The collimating lens (12) is fixed to the installation end. The objective lens barrel is configured with a detection window at the free end, and the distance between the optical axis center of the collimating lens (12) and the end surface of the free end is equal to the focal length of the collimating lens (12).

10. The surface scanning probe system according to claim 9, wherein, The objective lens barrel includes a detection cap (14) and a fixing bracket (15). The detection window is formed at one end of the detection cap (14). The other end of the detection cap (14) is detachably connected to the fixing bracket (15). The collimating lens (12) is fixed to the fixing bracket (15), and the fixing bracket (15) is detachably connected to the first housing (10) or the Raman detection system (2).

11. The surface scanning probe system according to claim 1, wherein The surface scanning optical module includes a holding bracket (16) and a mounting bracket (17). The reflecting element (11) is fixed on the holding bracket (16) and has a reflecting surface. The holding bracket (16) is supported on the mounting bracket (17) and can rotate about a first rotation axis. The mounting bracket (17) is mounted on the first housing (10) and can rotate about a second rotation axis. The first rotation axis is parallel to the reflecting surface, and the second rotation axis is perpendicular to the first rotation axis and perpendicular to the axis of the light guiding hole (18).

12. The surface scanning probe system according to claim 11, wherein, The first rotation axis coincides with the reflecting surface. The first rotation axis, the second rotation axis, and the central axis of the light guiding hole (18) intersect at a point, and this point is located on the reflecting surface.

13. The surface scanning probe system according to claim 11, characterized in that, The holding bracket (16) is configured as a cylindrical structure, and the first rotation axis is collinear with the central axis of the cylindrical structure. The mounting bracket (17) is configured with a holding shaft hole and an opening for exposing a part of the holding bracket (16) to expose the reflecting element (11). The holding bracket (16) has an operating end exposed outside the first housing (10). The end face of this operating end is configured with a first adjustment groove (161), and the first adjustment groove (161) is perpendicular to the first rotation axis.

14. The surface scanning probe system according to claim 13, wherein, The surface scanning optical module includes a locking member (19) for restricting the position and posture of the holding bracket (16) relative to the mounting bracket (17).

15. The surface scanning probe system according to claim 14, wherein The locking member (19) is configured as a setscrew, and this setscrew is in threaded engagement with the mounting bracket (17) and extends into the holding shaft hole.

16. The surface scanning probe system according to claim 11, wherein The mounting bracket (17) has a columnar support body and a fixing portion. The support body is inserted into the second housing (20) and has an exposed outer end face (171). A second adjustment groove (172) is configured on this outer end face (171). The central axis of the support body is collinear with the second rotation axis. The fixing portion is connected to the second housing (20) by a fastener (174) and is configured to allow the support body to rotate when the fastener (174) is loosened and to restrict the rotation of the support body when the fastener (174) is tightened.

17. The surface scanning probe system according to claim 16, wherein The fixed part includes a plurality of connecting lugs (173) radially extending outward from the outer end portion of the support body. The plurality of connecting lugs (173) are circumferentially spaced with respect to the central axis of the support body. Each connecting lug (173) is configured with an arc-shaped through hole, and the centers of each arc-shaped through hole coincide and are located on the central axis of the support body. A fastener (174) is correspondingly provided for each arc-shaped through hole to connect the mounting bracket (17) to the first housing (10). The depth direction of the second adjustment groove (172) and the axis direction of the arc-shaped through hole are parallel to the second rotation axis, and the center is located in the second adjustment groove (172) and on the second rotation axis.

18. A spectrometer, comprising a Raman detection system (2), characterized in that, The spectrometer further includes a surface scanning probe system (1) according to any one of claims 1-17. The surface scanning probe system (1) is connected to the Raman detection system (2) such that the light guiding hole (18) and the light passing hole (22) are coaxially arranged and communicate with each other.

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