Substrate and sensor for three-dimensional solid force sensor and calibration method thereof

Abstract

The present invention discloses a substrate and sensor for a three-dimensional solid force sensor and a calibration method thereof, belonging to the field of sensors. The substrate for the three-dimensional solid force sensor is an integrated and "paper clip" type substrate, comprising a first conductive block at the top and a second conductive block at the bottom, with a gap between the first conductive block and the second conductive block, and the first conductive block and the second conductive block are connected by sequentially connected sensing beams in the X direction, sensing beams in the Y direction, and sensing beams in the Z direction, each of which is provided with a first through hole, and the axial direction of the first through hole is respectively perpendicular to the corresponding X direction, Y direction, and Z direction. The three-dimensional solid force sensor based on the optical fiber sensor comprises the above-mentioned substrate for the three-dimensional solid force sensor, and the sensing beam is provided with an optical fiber sensor, and the three optical fiber sensors are respectively parallel to the corresponding X direction, Y direction, and Z direction, and the optical fiber sensor is connected to a processing unit, and the processing unit is used to calculate the three-dimensional force according to the output value of the optical fiber sensor.

Description

Technical Field

[0001] The present invention relates to the technical field of sensors, and in particular to a substrate and a sensor for a three-dimensional solid force sensor and a calibration method thereof. Background Art

[0002] At present, solid force sensors mostly use traditional electrical sensors, which results in poor anti-electromagnetic interference capability of the solid force sensors. Summary of the invention

[0003] In view of the above-mentioned deficiencies in the prior art, the present invention aims to provide a substrate and a sensor for a three-dimensional solid force sensor and a calibration method thereof. The anti-interference ability of the three-dimensional solid force sensor based on the optical fiber sensor is better than the anti-interference ability of the traditional solid force sensor using an electrical sensor.

[0004] In order to achieve the purpose of the above invention, the technical solution adopted by the present invention is:

[0005] A substrate for a three-dimensional solid force sensor based on an optical fiber sensor is provided. The substrate is integral and in a "paper clip" shape. The substrate comprises a first conductive block located at the top and a second conductive block located at the bottom. There is a gap between the first conductive block and the second conductive block. The first conductive block and the second conductive block are connected via a sequentially connected sensing beam in the X direction, a sensing beam in the Y direction, and a sensing beam in the Z direction. A first through hole is provided on each of the sensing beams. The axial directions of the first through holes are respectively perpendicular to the corresponding X direction, Y direction, and Z direction.

[0006] Furthermore, the cross section of the first through hole is in an "8" shape.

[0007] Further, the first conductive block and the second conductive block have the same size.

[0008] Furthermore, the first conductive block and the second conductive block are in a cube or rectangular shape.

[0009] Furthermore, the second conducting block is provided with a threaded hole.

[0010] Furthermore, any outer surface of the three sensing beams is located on an outer surface of a cuboid or a cube.

[0011] In a second aspect, a three-dimensional solid force sensor based on an optical fiber sensor is provided, which includes a substrate for the three-dimensional solid force sensor provided in this scheme, optical fiber sensors are installed on the sensing beam, the directions of the three optical fiber sensors are parallel to the corresponding X-direction, Y-direction and Z-direction, respectively, the optical fiber sensors are connected to a processing unit, and the processing unit is used to calculate the three-dimensional force according to the output value of the optical fiber sensor.

[0012] Furthermore, the calculation formula for calculating the three-dimensional force is:

[0013]

[0014] Among them, F X 、F Y and F Z They represent the force in the X direction, the force in the Y direction, and the force in the Z direction, respectively. X , Δλ Y and Δλ Z Respectively represent the output values ​​of the optical fiber sensor parallel to the X, Y and Z directions; K ij The coefficient that represents the relationship between the force in the i direction and the output wavelength of the optical fiber sensor parallel to the j direction, i is X, Y or Z, j is X, Y or Z.

[0015] Furthermore, the optical fiber sensor is bonded to the sensing beam.

[0016] In a third aspect, a calibration method of a three-dimensional solid force sensor based on an optical fiber sensor provided by the present solution is provided, comprising:

[0017] Apply a set number of times and a set magnitude of corresponding X-direction, Y-direction or Z-direction force to different optical fiber sensors, and record the output values ​​of all optical fiber sensors after each loading;

[0018] Determine the relationship between the single corresponding loading force and the wavelength according to the magnitude of the corresponding X-direction, Y-direction or Z-direction force and the output value of the optical fiber sensor:

[0019]

[0020] Among them, i is X, Y or Z, j is X, Y or Z, F i Indicates the magnitude of the i-axis force, Δλ ij K represents the output value of the optical fiber sensor parallel to the j direction when the corresponding i-direction force is loaded. ij The coefficient representing the relationship between the force in the i direction and the output wavelength of the optical fiber sensor parallel to the j direction;

[0021] According to the corresponding K ij Calculate the corresponding K ij The average value of .

[0022] The beneficial effects of the present invention are:

[0023] When used, the second conductive block is used to fix the substrate at the position to be collected, wherein the side of the first conductive block away from the second conductive block is the force-bearing surface of the force to be collected. The first conductive block transmits the received force to each sensing beam, causing the sensing beam to deform. The optical fiber sensor on the sensing beam is subjected to corresponding strain, resulting in wavelength drift, which is then reflected in the output value of the optical fiber sensor. The processing unit demodulates the output value to obtain the three-dimensional force on the force-bearing surface. The present invention not only realizes the collection of three-dimensional solid force, but also effectively improves the accuracy of the three-dimensional solid force sensor based on the optical fiber sensor. Combined with the setting of the first through hole on the sensing beam, the unit deformation of the sensing beam is increased, thereby greatly improving the accuracy of the optical fiber sensor.

[0024] The present invention collects three-dimensional solid force based on an optical fiber sensor, and utilizes the strong anti-electromagnetic interference capability of the optical fiber sensor to enhance the anti-electromagnetic interference capability of the three-dimensional solid force sensor based on the optical fiber sensor. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 A top view of a substrate for a three-dimensional solid force sensor in a specific embodiment;

[0026] Figure 2 for Figure 1 A schematic diagram of the structure from the first perspective;

[0027] Figure 3 for Figure 2 Display the structural diagram under the hidden line;

[0028] Figure 4 for Figure 1 A schematic diagram of the structure from the second perspective;

[0029] Figure 5 for Figure 4 Display the structural diagram under the hidden line;

[0030] Figure 6 for Figure 1 Right view of;

[0031] Figure 7 for Figure 1 Left view of;

[0032] Figure 8 for Figure 1 Bottom view of

[0033] Fig. 9 for Figure 1 A top view of

[0034] Fig.10 for Figure 1 Front view after installing the fiber optic sensor;

[0035] Fig.11for Fig.10 Left view of;

[0036] Fig.12 for Fig.10 Bottom view of .

[0037] Among them, 1. the first conduction block; 2. the sensing beam in the X direction; 3. the sensing beam in the Y direction; 4. the first through hole; 5. the sensing beam in the Z direction; 6. the second conduction block; 7. the threaded hole. DETAILED DESCRIPTION

[0038] The specific implementation of the present invention is described in detail below in conjunction with the accompanying drawings so that those skilled in the art can understand the present invention. However, it should be clear that the embodiments described below are only part of the embodiments of the present invention, not all of the embodiments. Without departing from the spirit and scope of the present invention defined and determined by the attached claims, all other embodiments obtained by those skilled in the art without any creative work belong to the protection scope of the present invention.

[0039] like Figures 1 to 5 As shown, the substrate for the three-dimensional solid force sensor based on the optical fiber sensor includes an integrated substrate in the shape of a "paper clip", the substrate includes a first conductive block 1 located at the top and a second conductive block 6 located at the bottom, there is a gap between the first conductive block 1 and the second conductive block 6, the first conductive block 1 and the second conductive block 6 are connected by a sequentially connected X-direction sensing beam 2, a Y-direction sensing beam 3 and a Z-direction sensing beam 5, each of which is provided with a first through hole 4, the axial direction of the first through hole 4 is perpendicular to the corresponding X-direction, Y-direction and Z-direction. Wherein, the direction of the coordinate system is as follows Figure 2 shown.

[0040] The "paper clip"-shaped integrated base enables the structure to drive sensing beams in three directions through a central block, thus achieving force testing in three directions through the paper clip structure.

[0041] During implementation, the preferred matrix material of this solution is nickel-cobalt alloy, Hastelloy alloy or stainless steel and aluminum alloy with good strain characteristics. The cross section of the first through hole 4 is in an "8" shape to increase the rigidity of the sensing beam. Pasting the optical fiber sensor at the thinnest part of the sensing beam can increase the structural strain and cause the optical fiber sensor to have a greater strain.

[0042] like Figure 2 and Figure 4 As shown, the first conductive block 1 and the second conductive block 6 have the same size and are in the shape of a cube or a rectangular block, so as to facilitate the fixation of the substrate for the three-dimensional solid force sensor and the measuring position and facilitate the force acting on the substrate for the three-dimensional solid force sensor and effectively drive each sensing beam, wherein the top surface of the first conductive block 1 is parallel to the top surfaces of the three sensing beams.

[0043] like Figure 4 As shown, the second conducting block 6 is provided with threaded holes 7, the number of which is 4, and the 4 threaded holes 7 are distributed in a rectangular shape, so that the base can be installed at the position to be collected by using the threaded holes 7. Among them, the object to be collected at the position to be collected is provided with a second through hole, and the base is installed by using a bolt or a screw to penetrate the second through hole and cooperate with the threaded hole 7.

[0044] like Figures 6 to 9 As shown, any outer surface of the three sensing beams is located on an outer surface of a cuboid or a cube, so as to facilitate the location determination, pasting and curing, as well as damage and replacement of the optical fiber sensor.

[0045] In a second aspect, a three-dimensional solid force sensor based on an optical fiber sensor is provided, which includes a substrate for a three-dimensional solid force sensor provided in the present solution, an optical fiber sensor is mounted on a sensing beam, and the directions of the three optical fiber sensors are parallel to the corresponding X direction, Y direction and Z direction respectively. The direction of the coordinate system is as follows: Figure 2 shown.

[0046] like Fig.10 As shown, the optical fiber sensor parallel to the X direction is installed on the top surface of the sensing beam 2 in the X direction and close to the corresponding through hole; Fig.11 and Fig.12 As shown, the optical fiber sensors parallel to the Y direction and the Z direction are respectively installed on the other side of the Y-direction sensing beam 3 and the Z-direction sensing beam 5 close to the first conductive block, and close to the corresponding through holes. The optical fiber sensor is connected to the processing unit (the optical fiber sensor generally communicates with the processing unit through optical fiber), and the processing unit is used to calculate the three-dimensional force according to the output value of the optical fiber sensor, wherein the calculation formula for calculating the three-dimensional force is:

[0047]

[0048] Among them, F X 、F Y and F Z They represent the force in the X direction, the force in the Y direction, and the force in the Z direction, respectively. X , Δλ Y and Δλ Z Respectively represent the output values ​​of the optical fiber sensor parallel to the X, Y and Z directions; K ij The coefficient that represents the relationship between the force in the i direction and the output wavelength of the optical fiber sensor parallel to the j direction, i is X, Y or Z, j is X, Y or Z.

[0049] In implementation, the solution preferably bonds the optical fiber sensor to the sensing beam, specifically, by means of strain adhesive. The types of optical fiber sensors include optical fiber Fabry-Perot sensors, optical fiber Bragg grating sensors, and optical fiber sensors with enhanced strain gauges.

[0050] In a third aspect, the present solution also provides a calibration method for the above-mentioned three-dimensional solid force sensor based on optical fiber sensor, which comprises:

[0051] The corresponding X-direction, Y-direction or Z-direction forces of a set number of times and a set magnitude are applied to different optical fiber sensors respectively, and the output values ​​of all optical fiber sensors after each loading are recorded.

[0052] Determine the relationship between the single corresponding loading force and the wavelength according to the magnitude of the corresponding X-direction, Y-direction or Z-direction force and the output value of the optical fiber sensor:

[0053]

[0054] Among them, i is X, Y or Z, j is X, Y or Z, F i Indicates the magnitude of the i-axis force, Δλ ij K represents the output value of the optical fiber sensor parallel to the j direction when the corresponding i-direction force is loaded. ij The coefficient representing the relationship between the force in the i direction and the output wavelength of the optical fiber sensor parallel to the j direction;

[0055] According to the corresponding K ij Calculate the corresponding K ij The average value of .

[0056] During implementation, the magnitude of the force at different times when loading in the same direction is generally different, and generally takes an arithmetic progression.

[0057] In another embodiment, the magnitude of the force at different times when loaded in the same direction is used as the restorative data, thereby improving the calibration accuracy, which is explained below with an example.

[0058] Table 1: Data under X-direction force loading

[0059]

[0060]

[0061] Table 2: Data under Y-direction force loading

[0062] Loading force / N X-axis fiber optic sensor Y-axis fiber optic sensor Z-axis fiber optic sensor 0 1545.412 1545.408 1545.539 20 1545.412 1545.39 1545.537 40 1545.413 1545.373 1545.535 60 1545.414 1545.355 1545.533 80 1545.414 1545.334 1545.531 100 1545.416 1545.316 1545.529 80 1545.414 1545.334 1545.531 60 1545.414 1545.354 1545.533 40 1545.413 1545.372 1545.535 20 1545.412 1545.39 1545.536 0 1545.412 1545.408 1545.538

[0063] Table 3: Data under Z-direction force

[0064] Loading force / N X-axis fiber optic sensor Y-axis fiber optic sensor Z-axis fiber optic sensor 0 1545.421 1545.361 1545.428 20 1545.424 1545.363 1545.371 40 1545.426 1545.364 1545.312 60 1545.429 1545.365 1545.253 80 1545.432 1545.366 1545.195 100 1545.436 1545.368 1545.132 80 1545.433 1545.367 1545.195 60 1545.429 1545.366 1545.253 40 1545.426 1545.366 1545.312 20 1545.424 1545.364 1545.371 0 1545.422 1545.362 1545.429

[0065] The unit of the output values ​​of the optical fiber sensor in Tables 1 to 3 is nm. The relationship coefficient between the i-direction force and the output wavelength of the optical fiber sensor parallel to the j-direction calculated by the calibration method provided by the present invention based on Tables 1 to 3 is shown in Table 4 below.

[0066] Table 4

[0067] X direction Y direction Z direction X-axis fiber optic sensor -0.00058 -2.1E-08 -7.9E-08 Y-axis fiber optic sensor 1.88E-07 -0.00092 -5.5E-08 Z-axis fiber optic sensor 8.98E-07 2.75E-07 -0.00295

Claims

1. A substrate for a three-dimensional solid force sensor based on an optical fiber sensor, characterized in that: The base is integral and in a "paper clip" shape, and comprises a first conductive block (1) located at the top and a second conductive block (6) located at the bottom, a gap being provided between the first conductive block (1) and the second conductive block (6), and the first conductive block (1) and the second conductive block (6) being connected in sequence. X The sensing beam (2) Y The sensing beam (3) and Z The sensing beams (5) are connected in the same direction, each of the sensing beams is provided with a first through hole (4), and the axial direction of the first through hole (4) is perpendicular to the corresponding X Towards, Y Xianghe Z The first through hole (4) has a cross-section in the shape of an "8"; the first conductive block (1) and the second conductive block (6) are in the shape of a cube or a rectangular parallelepiped; any outer surface of the three sensing beams is located on an outer surface of a rectangular parallelepiped or a cube; the first conductive block (1) and the second conductive block (6) have the same size.

2. The three-dimensional solid force sensor substrate according to claim 1, characterized in that: The second conducting block (6) is provided with a threaded hole (7).

3. A three-dimensional solid force sensor based on an optical fiber sensor, characterized in that: The sensor comprises a substrate for a three-dimensional solid force sensor as claimed in any one of claims 1 or 2, wherein optical fiber sensors are mounted on the sensing beam, and the directions of the three optical fiber sensors are respectively parallel to the corresponding X Towards, Y Xianghe Z The optical fiber sensor is connected to a processing unit, and the processing unit is used to calculate the three-dimensional force according to the output value of the optical fiber sensor; The formula for calculating the three-dimensional force is: in, F X , F Y and F Z Respectively X Directional force, Y Direction of force and Z Directional force, , and Respectively represent parallel to X Towards, Y Xianghe Z Output value of the optical fiber sensor in the direction; K ij express i Force and parallel to j The relationship between the output wavelength of the optical fiber sensor to the i Pick X , Y or Z , j Pick X , Y or Z .

4. The three-dimensional solid force sensor based on optical fiber sensor according to claim 3, characterized in that: The optical fiber sensor is bonded on the sensing beam.

5. A calibration method for a three-dimensional solid force sensor based on an optical fiber sensor according to claim 3 or 4, characterized in that: include: The optical fiber sensors are loaded with a set number of times and the corresponding sizes are set. X Towards, Y To or Z The axial force is measured and the output values ​​of all optical fiber sensors are recorded after each loading. According to the corresponding X Towards, Y To or Z The magnitude of the axial force and the output value of the optical fiber sensor determine the relationship coefficient between the single corresponding loading force and the wavelength: in, i Pick X , Y or Z , j Pick X , Y or Z , F i Indicates loaded i The magnitude of the force, Indicates loading the corresponding i When the force is parallel to j The output value of the optical fiber sensor in the direction, K ij express i Force and parallel to j The relationship coefficient between the output wavelength of the optical fiber sensor to the direction; According to the corresponding K ij Calculate the corresponding K ij The average value of .

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