A three-tube excimer lamp

Abstract

The present invention discloses a three-tube excimer lamp, which is characterized in that: it includes a lamp box, a sliding groove is provided below the lamp box, a common electrode tube is provided in the middle of the sliding groove, light-emitting tubes are respectively provided on both sides of the common electrode tube, a common outer tube is provided outside the common electrode tube, a metal coating is provided on the inner wall of the common electrode outer tube, a light-emitting outer tube is provided outside the light-emitting tube, a semi-circular coating is provided on one side of the inner wall of the light-emitting outer tube, an inflation space is provided in the light-emitting lamp outer tube, and a light-emitting gas is filled in the inflation space. The semi-circular coating is semi-circular, and the common electrode outer tube and the light-emitting lamp outer tube are respectively made of transparent quartz materials. The sliding groove enables the distance between the common electrode tube and the light-emitting tubes to be adjusted arbitrarily, solving the problem that the discharge spacing of the existing excimer discharge lamp is fixed during the manufacturing process and cannot be changed after leaving the factory, making it possible to make artificial adjustments to the discharge spacing and discharge intensity of the lamp tube as needed after leaving the factory.

Description

Technical Field

[0001] The present invention relates to the technical field of excimer discharge lamps, and in particular to a three-tube excimer lamp. Background Art

[0002] Excimers, also known as excited dimers, are molecules that are formed but transiently disappear when inert gases, halogen gases, or two-component mixtures thereof are excited by external energy. Excimer light typically refers to the ultraviolet light emitted by gaseous dimers excited by an electric field, resulting from electronic transitions when they return from an excited state to a ground state.

[0003] By using different excimer gas ratios, excimer ultraviolet light with different monochromatic wavelengths (172nm, 193nm, 207nm, 222nm, 248nm or 308nm, etc.) can be obtained.

[0004] Excimer lamps are a new light source technology that began to develop in the 1970s and 1980s. They are internationally hailed as a milestone in the field of ultraviolet light generation technology and have been widely and uniquely applied in fields such as microelectronics / semiconductors, medicine, materials science, printing, and environmental protection.

[0005] Existing excimer discharge lamps are all single-tube, integrated structures. The lamp tube consists of a transparent container with a double-layer structure of inner and outer layers. The mixed gas is filled in the interlayer formed by the inner and outer layers. The discharge spacing of the discharge lamp is fixed during the manufacturing process and cannot be changed after leaving the factory. As a result, the discharge spacing and discharge intensity of the lamp tube cannot be manually adjusted as needed after leaving the factory. Secondly, the outer electrodes of the lamp tube of existing excimer discharge lamps are exposed, and there is a risk of damage and scrapping due to long-term use under corrosive gas conditions. Summary of the Invention

[0006] (1) Technical issues to be resolved

[0007] To overcome the shortcomings of the existing technology, a three-tube excimer lamp is proposed to address the following shortcomings of existing excimer discharge lamps: their structural form is a single-tube integrated structure, the discharge spacing of the discharge lamp is fixed during the manufacturing process and cannot be changed after leaving the factory, making it impossible to manually adjust the discharge spacing and discharge intensity of the lamp tube as needed after leaving the factory; secondly, the outer electrodes of the existing excimer discharge lamp tube are at risk of damage and scrapping due to long-term use under corrosive gas conditions.

[0008] (2) Technical solution

[0009] The present invention is achieved through the following technical solutions: The present invention provides a three-tube excimer lamp, which is characterized in that it includes a lamp box. A sliding groove is provided below the lamp box. A common electrode tube is provided in the middle of the sliding groove. On both sides of the common electrode tube, there are respectively a light-emitting tube. An outer tube of the common electrode is provided outside the common electrode tube. A metal coating is provided on the inner wall of the outer tube of the common electrode. An outer tube of the light-emitting tube is provided outside the light-emitting tube. A semi-circular coating is provided on one side of the inner wall of the outer tube of the light-emitting tube. An inflation space is provided inside the outer tube of the light-emitting tube, and a light-emitting gas is filled in the inflation space.

[0010] Further, the semi-circular coating is semi-circular.

[0011] Further, the common electrode tube and the outer tube of the light-emitting tube are respectively made of transparent quartz materials.

[0012] (III) Beneficial effects

[0013] Compared with the prior art, the present invention has the following beneficial effects:

[0014] 1. To solve the problem that in existing excimer discharge lamps, their structural forms are all single-tube integrated, the discharge distance of the discharge lamp is fixed during the manufacturing process and cannot be changed after leaving the factory, making it impossible to artificially adjust the discharge distance and discharge intensity of the lamp tube as needed after leaving the factory. The present invention solves this problem by providing a sliding groove, enabling the distance between the common electrode tube and the light-emitting tube to be adjusted arbitrarily, making it possible to artificially adjust the discharge distance and discharge intensity of the lamp tube as needed after leaving the factory;

[0015] 2. To solve the problem that the lamp tubes of existing excimer discharge lamps are at risk of damage and scrapping during long-term use under corrosive gas conditions. The present invention solves this problem by arranging the electrodes on the inner wall of the container without external electrodes. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 is a schematic structural diagram of a three-tube excimer lamp described in the present invention;

[0017] Figure 2 is a schematic diagram of the relationship between the common electrode tube and the light-emitting tube in a three-tube excimer discharge lamp with a new structural form described in the present invention.

[0018] The reference numerals are explained as follows:

[0019] 1. Lamp box; 2. Sliding groove; 3. Common electrode tube; 4. Light-emitting tube; 5. Outer tube of the common electrode; 6. Metal coating; 7. Outer tube of the light-emitting tube; 8. Semi-circular coating; 9. Inflation space; 10. Light-emitting gas. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0020] In order to make the objectives, technical solutions and advantages of the present invention more clear and understandable, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0021] As Figure 1 - Figure 2 shown, a three-tube excimer lamp in this embodiment is characterized in that it includes a lamp box 1, a sliding groove 2 is provided below the lamp box 1, a common electrode tube 3 is provided in the middle of the sliding groove 2, and a light-emitting tube 4 is provided on each side of the common electrode tube 3. An outer tube 5 of the common electrode is provided outside the common electrode tube 3, a metal coating 6 is provided on the inner wall of the outer tube 5 of the common electrode, an outer tube 7 of the light emission is provided outside the light-emitting tube 4, a semi-circular coating 8 is provided on one side of the inner wall of the outer tube 7 of the light emission, and an inflation space 9 is provided inside the outer tube 7 of the light emission. A light-emitting gas 10 is filled in the inflation space 9.

[0022] Further, the semi-circular coating 8 is semi-circular.

[0023] Further, the outer tube 5 of the common electrode and the outer tube 7 of the light emission are each made of transparent quartz material.

[0024] The specific implementation process of this embodiment is as follows: Slide the common electrode tube 3 and the light-emitting tube 4 to adjust the distance. After power-on, the metal coating 6 serves as the common electrode, and the semi-circular coatings 8 on both sides serve as the inner electrodes. The metal coating 6 and the semi-circular coatings 8 on both sides start to form a high-frequency high-voltage alternating electric field. Under the action of the high-frequency high-voltage alternating electric field, the light-emitting gas 10 in their respective containers is excited to emit excimer ultraviolet light, which solves the problem that the discharge distance of the existing excimer discharge lamp is fixed during the manufacturing process and cannot be changed after leaving the factory, making it possible to artificially adjust the discharge distance and discharge intensity of the lamp tube as needed after leaving the factory. In addition, the metal coating 6 and the semi-circular coating 8 are provided inside the tube and there is no external electrode, which solves the problem of the long-term use of the lamp tube under corrosive gas conditions.

[0025] The above-described embodiments are only descriptions of the preferred embodiments of the present invention, and do not limit the concept and scope of the present invention. Without departing from the design concept of the present invention, various variations and improvements made by those of ordinary skill in the art to the technical solutions of the present invention should fall within the protection scope of the present invention. The technical content claimed by the present invention has been fully recorded in the claims.

Claims

1. A three-tube excimer lamp, characterized in that: The invention comprises a lamp box (1), wherein a sliding groove (2) is provided at the bottom of the lamp box (1), a common electrode tube (3) is provided in the middle of the sliding groove (2), a light-emitting lamp (4) is provided on both sides of the common electrode tube (3), a common electrode outer tube (5) is provided on the outside of the common electrode tube (3), a metal coating (6) is provided on the inner wall of the common electrode outer tube (5), a light-emitting outer tube (7) is provided on the outside of the light-emitting lamp (4), a semicircular coating (8) is provided on one side of the inner wall of the light-emitting outer tube (7), an air-filled space (9) is provided in the light-emitting outer tube (7), and the air-filled space (9) is filled with light-emitting gas (10); the semicircular coatings (8) in the two light-emitting outer tubes (7) are both located on the side close to the common electrode tube (3); and the common electrode tube (3) and the light-emitting lamp (4) can be adjusted in distance by sliding. The semicircular coating (8) is semicircular; the common electrode outer tube (5) and the light-emitting outer tube (7) are each made of transparent quartz material; wherein the metal coating (6) serves as the common electrode, and the semicircular coatings (8) on both sides serve as inner electrodes, and the metal coating (6) and the semicircular coatings (8) on both sides can form a high-frequency and high-voltage alternating electric field.

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