An electric floating clamping device for rail-type transport substrate packaging operations

By designing a push-pull solenoid valve-driven electric floating clamping device, the up and down floating of the substrate is achieved, and the problems of substrate stagnation and clamping force impact are solved, ensuring the stability and reliability of the substrate packaging process.

CN111162027BActive Publication Date: 2025-02-11陈学军 +1
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Patent Information

Application Number
CN201911372114.8
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2019-12-27
Publication Date
2025-02-11
Estimated Expiration
2039-12-27

AI Technical Summary

Technical Problem

In the semiconductor packaging industry, stagnation problems are prone to occur during rail transportation of substrates. The existing electric clamping devices may aggravate the risk of substrate rupture during clamping, and the clamping force may easily impact the surface quality of the substrate.

Method used

An electric floating clamping device is designed, and a push-pull solenoid valve is used to drive the cross-hinged upper and lower clamping jaws to rotate freely relative to the rotation shaft, driving the upper and lower clamping jaws to clamp and open the substrate to realize the up and down floating of the substrate.

Benefits of technology

Effectively eliminate substrate stagnation and reduce the impact of the claw force on the substrate, ensuring the stable and reliable operation of the substrate packaging process.

✦ Generated by Eureka AI based on patent content.

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Abstract

The present invention discloses an electric floating clamping device for rail-type transport substrate packaging operations, including an electric driving component and an upper clamping jaw pair, a lower clamping jaw pair, and an adjustment fixing seat. The upper clamping jaw pair and the lower clamping jaw pair are cross-hinged with each other and connected by a rotating shaft. The shaft heads at both ends of the rotating shaft are connected and arranged on the corresponding rotating shaft holes of the adjustment fixing seat. An opening spring is provided on the rear ends of the upper clamping jaw pair and the lower clamping jaw pair, which is used to open the upper clamping jaw pair and the lower clamping jaw pair when the electric driving component is not powered on. The product of the present invention drives the cross-hinged upper and lower clamping jaw pairs to rotate freely relative to the rotating shaft through a push-pull solenoid valve to drive the corresponding upper and lower clamping jaws to clamp and open the substrate, so that the substrate floats up and down, effectively eliminates the stuck phenomenon of the substrate, and further effectively reduces the impact of the clamping jaw force on the substrate, ensuring stable and reliable operation during the substrate packaging process.
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Description

Technical Field

[0001] The invention relates to the technical field of semiconductor substrate packaging, in particular to an electric floating clamping device for rail-type transport substrate packaging operations. Background Art

[0002] In the semiconductor packaging industry, the transportation of substrates generally adopts track transportation. However, in the track transportation of substrates, two transport tracks are used in pairs, which will cause the unevenness of the track itself, the incoordination of the bending between the two tracks, the non-parallelism of the track line of the transport drive, and other tolerances to cause the substrate transportation jam problem. Severe jamming will cause the substrate to break and the packaging equipment to fail. In the prior art, electric clamping devices are generally used to fine-tune the above-mentioned transportation jam problem by intermittent clamping adjustment. Although it can solve the problem of substrate transportation jam to a certain extent, when the substrate has fallen into a jam situation and the clamping force of the electric clamping device acts in the opposite direction, the substrate will be seriously stuck, increasing the possibility of substrate breakage. In addition, the existing electric clamping devices all directly drive the displacement of the clamping claws, with a short stroke, and the generated clamping force is easy to impact the substrate and affect the surface quality of the substrate. Summary of the invention

[0003] The technical problem to be solved by the present invention is to provide an electric floating clamping device which can effectively eliminate the substrate jamming phenomenon and reduce the impact of the clamping force in view of the above-mentioned deficiencies in the prior art.

[0004] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: an electric floating clamping device for rail-type transport substrate packaging operations, comprising an electric drive component and an upper clamping pair and a lower clamping pair, wherein the upper clamping pair and the lower clamping pair are correspondingly provided with upper clamping jaws and lower clamping jaws on the front ends, and the rear ends are respectively connected to the electric drive component, and the upper clamping jaws and the lower clamping jaws are driven and controlled by the electric drive component to open and clamp, and also include an adjustment fixing seat arranged at the lower end of the lower clamping jaw pair, wherein the upper clamping jaw pair and the lower clamping jaw pair are cross-hinged with each other and connected by a rotating shaft, and the shaft heads at both ends of the rotating shaft extend outwardly and are connected to the corresponding rotating shaft holes arranged on the adjustment fixing seat, and an opening spring is cooperated on the rear ends of the upper clamping jaw pair and the lower clamping jaw pair for opening the upper clamping jaw pair and the lower clamping jaw pair when the electric drive component is not powered on.

[0005] As a further solution of the present invention: the upper clamping jaw pair and the lower clamping jaw pair are configured as a three-stage stepped pair body, and the step directions of the upper clamping jaw pair and the lower clamping jaw pair are opposite.

[0006] As a further solution of the present invention: the width of the lower jaw pair is greater than that of the upper jaw pair, a notch slot is provided in the middle of the lower jaw pair, and the mating end of the upper jaw pair extends into the corresponding notch slot to form a hinge with the lower jaw pair.

[0007] As a further solution of the present invention: an upwardly extending pin is provided at the upper end of the adjustment fixing seat, and the pin passes through the rear end of the upper clamping jaw pair. The upper end is arranged at the lower end of the lower clamping jaw pair, and can be swung downward at the rear end of the lower clamping jaw pair to limit the lower end surface of the rear end of the lower clamping jaw pair.

[0008] As a further solution of the present invention: the electric drive component is configured as a push-pull solenoid valve, the rear end of the upper clamping jaw pair is connected to the lower end of the push-pull solenoid valve, and the rear end of the lower clamping jaw pair is connected to the upper end of the push-pull solenoid valve.

[0009] As a further solution of the present invention: an adjusting screw hole is provided on the rear end of the upper clamping jaw pair, and an adjusting top screw extending downward is provided on the adjusting screw hole, and the adjusting top screw is used to limit the opening size of the upper clamping jaw.

[0010] As a further solution of the present invention: a balancing spring and a balancing pin are provided on the front end of the lower clamping jaw pair, which are pressed downward against the adjustment fixing seat and are used to balance and buffer the electric driving force.

[0011] Compared with the prior art, the beneficial effects of the present invention are as follows: the product of the present invention drives the mutually cross-hinged upper and lower clamping jaws to freely rotate relative to the rotating shaft through a push-pull solenoid valve, driving the corresponding upper and lower clamping jaws to clamp and open the substrate, so that the substrate floats up and down, effectively eliminating the substrate jamming phenomenon, and further effectively reducing the impact of the clamping jaw force on the substrate. The designed balance spring and limit pin ensure stable and reliable operation during the substrate packaging process. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 It is a schematic diagram of the three-dimensional structure of an embodiment of the present invention.

[0013] Figure 2 It is a schematic diagram of the mounting structure of the matching substrate track according to an embodiment of the present invention.

[0014] Figure 3 It is a schematic diagram of the use status of the matching substrate track according to an embodiment of the present invention.

[0015] Figure 1-3 The markings in the figure are: push-pull solenoid valve 1, upper clamping jaw pair 2, lower clamping jaw pair 3, upper clamping jaw 4, lower clamping jaw 5, adjustment fixing seat 6, rotating shaft 7, opening spring 8, pin 9, adjustment top screw 10, balance spring 11, balance pin 12, first track 13, second track 14, base plate 15, track running groove 16. DETAILED DESCRIPTION

[0016] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0017] See also Figure 1-3 In an embodiment of the present invention, an electric floating clamping device for rail-type transport substrate packaging operation, an electric floating clamping device for rail-type transport substrate packaging operation, includes an electric drive component and an upper clamping jaw pair 2 and a lower clamping jaw pair 3, wherein the upper clamping jaw pair 2 and the lower clamping jaw pair 3 are correspondingly provided with an upper clamping jaw 4 and a lower clamping jaw 5 on the front ends thereof, and the rear ends are respectively connected to the electric drive component accordingly. In this embodiment, the electric drive component adopts a push-pull solenoid valve 1, wherein the upper clamping jaw 4 and the lower clamping jaw 5 are driven and controlled to open and clamp by the push-pull solenoid valve 1. In addition, the electric floating clamping device in this embodiment includes an adjustment fixing seat 6 arranged at the lower end of the lower clamping jaw pair. The upper clamping jaw pair 2 and the lower clamping jaw pair 3 in this embodiment are mutually It is cross-hinged and connected by a rotating shaft 7. In addition, the shaft heads at both ends of the rotating shaft 7 extend outward and are connected to the rotating shaft holes corresponding to the adjusting fixed seat 6, so that the upper jaw pair 2 and the lower jaw pair 3 can automatically rotate on the adjusting fixed seat 6 relative to the rotating shaft 7, and an opening spring 8 is provided on the rear end of the upper jaw pair 2 and the lower jaw pair 3, which is used to open the upper jaw pair 2 and the lower jaw pair 3 by spring tension when the push-pull solenoid valve is not powered, drive the opening of the upper jaw 4 and the lower jaw 5, and avoid clamping and adjusting action when the substrate is not stuck, wherein the rotation of the cross-hinged upper jaw pair 2 and the lower jaw pair 3 drives the opening and clamping of the upper jaw 4 and the lower jaw 5.

[0018] In addition, the upper jaw pair 2 and the lower jaw pair 3 in this embodiment are configured as a three-stage stepped pair body, specifically, a three-stage end portion directly forms a stepped structure with each other, and the step direction of the upper jaw pair is opposite to that of the lower jaw pair, so that the push-pull type solenoid valve 1 can be driven to rotate to form a scissor-like action. In addition, the width of the lower jaw pair in this embodiment is larger than that of the upper jaw pair, and a notch slot 31 is provided in the middle of the lower jaw pair, and the mating end of the upper jaw pair extends into the corresponding notch slot to form a hinged connection with the lower jaw pair, and is connected by a rotating shaft 7 to form a relatively stable connection structure. In addition, the upper end of the adjustment fixing seat 6 is provided with a pin 9 extending upward, the pin 9 passes through the rear end of the upper jaw pair, and the upper end is set at the lower end of the lower jaw pair, which can be swung downward at the rear end of the lower jaw pair to stop the lower end surface of the rear end of the lower jaw pair. Through the setting of the pin 9, the upper limit of the rotation of the lower jaw pair is limited, and the lower limit of the rotation of the lower jaw pair is limited by the lower surface of the track running groove. Under the action of the pin 9, the situation that the excessive force is applied to the substrate to cause it to break is avoided. In addition, the rear end of the upper jaw pair is provided with an adjustment screw hole, and the adjustment screw hole is matched with an adjustment top screw 10 extending downward. The adjustment top screw 10 is used to limit the opening size of the upper jaw to avoid the rear end of the upper jaw pair from interfering with the adjustment fixing seat. In addition, the front end of the lower jaw pair is provided with a balance spring 11 and a balance pin 12 that are downwardly pressed against the adjustment fixing seat, which are used to balance the buffering electric drive force, so that the floating is smoother and the friction between the substrate and the lower surface of the track is reduced.

[0019] The principle of the present invention is: when the substrate 15 is normally transported between the track running groove 16 between the first track 13 and the second track 14, the push-pull solenoid valve 1 is not energized, so there is no force, under the action of the opening spring 8, the upper clamping jaw 4 and the lower clamping jaw 5 are opened, wherein the opening limit of the upper clamping jaw is subject to the adjustment top screw 10, and the opening limit of the lower clamping jaw is subject to the balance pin 12, the adjustment top screw is used to adjust the opening degree of the upper clamping jaw, and the lower clamping jaw is displaced below the end of the track running groove when it is opened; and when the substrate 15 is stuck in the track running groove 16 during transportation, The controller transmits the control signal to the push-pull solenoid valve 1 to energize, and the push-pull solenoid valve 1 is energized to tighten and overcome the spring force of the opening spring 8, and the upper and lower clamps clamp the substrate, and at this time, the upper and lower clamps can rotate around the rotating shaft 7 to achieve the up and down floating of the substrate, and further adjust and alleviate the stuck condition of the substrate, wherein the upper limit of the rotation of the clamp is subject to the pin 10, and the lower limit of the rotation of the clamp is subject to the lower surface of the track running groove. The balance spring 11 plays a balancing role, making the floating smoother and reducing the friction between the substrate and the lower surface of the track. The product of the present invention drives the upper and lower clamps that are cross-hinged with each other to rotate freely relative to the rotating shaft through the push-pull solenoid valve 1 to drive the corresponding upper and lower clamps to clamp and open the substrate, so that the substrate floats up and down, effectively eliminates the stuck phenomenon of the substrate, and then effectively reduces the impact of the clamp force on the substrate. The designed balance spring and limit pin ensure stable and reliable operation during the substrate packaging process.

[0020] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. An electric floating clamping device for rail-type transport substrate packaging operation, comprising an electric drive and an upper clamping pair and a lower clamping pair, wherein the upper clamping pair and the lower clamping pair are provided with upper clamping jaws and lower clamping jaws on the front ends thereof, and the rear ends thereof are respectively connected to the electric drive, and the upper clamping jaws and the lower clamping jaws are driven and controlled to open and clamp by the electric drive, characterized in that: The cam is provided with a plurality of springs, each of which is provided with a plurality of springs, each of which is provided with a plurality of springs which are respectively provided on the upper and lower sides of the cam and the lower sides of the cam.

2. The electric floating clamping device for rail-type transport substrate packaging operation according to claim 1 is characterized in that: The upper end of the adjustment fixing seat is provided with a pin extending upward, and the pin passes through the rear end of the upper clamping jaw pair. The upper end is arranged at the lower end of the lower clamping jaw pair, and the rear end of the lower clamping jaw pair swings downward to stop the lower end surface of the rear end of the lower clamping jaw pair.

3. The electric floating clamping device for rail-type transport substrate packaging operation according to claim 1 is characterized in that: The electric drive member is configured as a push-pull solenoid valve, the rear end of the upper clamping jaw pair is connected to the lower end of the push-pull solenoid valve, and the rear end of the lower clamping jaw pair is connected to the upper end of the push-pull solenoid valve.

4. The electric floating clamping device for rail-type transport substrate packaging operation according to claim 1 is characterized in that: An adjusting screw hole is arranged on the rear end of the upper clamping jaw pair, and an adjusting top screw extending downward is arranged on the adjusting screw hole, and the adjusting top screw is used to limit the opening size of the upper clamping jaw.

5. The electric floating clamping device for rail-type transport substrate packaging operation according to claim 3 is characterized in that: A balancing spring and a balancing pin are provided on the front end of the lower clamping jaw pair, which are pressed downward against the adjustment fixing seat and are used for balancing and buffering the electric driving force.

Citation Information

Patent Citations

  • Electric floating clamping device for rail-mounted transportation substrate packaging operation

    CN210837683U