Optical system structure for laser processing
Through the introduction of small mirrors driven by mobile mobilization components and drivers in the laser processing optical system, the rapid adjustment and accurate control of light spots in the direction of the XYZ axis solve the cumbersome problems of the positioning of the light spots in the existing technology. Improve processing efficiency and reduce costs.
Patent Information
- Application Number
- CN202010464564.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2020-05-28
- Publication Date
- 2025-01-24
- Estimated Expiration
- Not applicable · inactive patent
AI Technical Summary
When processing PCB boards, existing laser processing technology requires frequent adjustment of the spot position, resulting in the need to drive the tooling to move, increasing the processing cost and the workload of staff.
The optical system structure for laser processing is designed, including a fixed -end reflection component and a mobile activity end reflection component. By adjusting the component and the telescopic rod, the beam path is adjusted, so that the light spots move Small mirrors rotate and adjust the position of the light spots in the direction of the XY shaft.
The rapid adjustment and accurate control of the location of the light spots, reducing the dependence on drivers and staff, reducing processing costs and improving production efficiency.
Smart Images

Figure CN111545899B_ABST
Abstract
Description
Technical Field
[0001] The invention relates to the field of optical equipment, and in particular to an optical system structure for laser processing. Background Art
[0002] When processing PCB boards, the current common method of die stamping is to use stamping equipment and molds to cut the entire PCB board into the required shape. However, this method has many disadvantages:
[0003] 1. Waste of raw materials. Due to the mechanical structural elements of the mold, the corners of the PCB substrate cannot be punched, resulting in a high material waste rate;
[0004] 2. The mold cost is high. Different molds are required to stamp different PCB boards, which are not universal. In addition, the mold is a consumable part and needs to be replaced regularly, which is costly.
[0005] 3. Mold processing takes a long time and has low production efficiency. It takes a long time to make samples and small and medium batches;
[0006] 4. Conventional process is prone to delamination and burrs, and will generate a lot of dust, which is harmful to the environment;
[0007] 5. The conventional process is hard contact processing, which will generate stress when processing the PCB board and damage the substrate.
[0008] In order to address the shortcomings of conventional processing methods, technical improvements have been made to use ultraviolet laser cold processing, which has less thermal impact and smooth processed edges, will not damage the substrate, and will not generate dust. At the same time, no mold is required, and the processing cost is low.
[0009] A Chinese patent with announcement number CN103128450B discloses an ultraviolet laser processing device, including an ultraviolet laser, a galvanometer assembly system, and a focusing lens. A beam splitter is also provided on the optical path between the ultraviolet laser and the galvanometer assembly X, and a coaxial vision system is also provided above the beam splitter. The coaxial light source is provided on one side of the workpiece to be processed; the ultraviolet laser beam emitted by the ultraviolet laser is horizontally incident on the beam splitter, and the ultraviolet laser beam is converged onto the workpiece to be processed through transmission of the beam splitter, total reflection of the galvanometer assembly system, and refraction of the focusing lens; the light emitted by the light source is projected onto the workpiece to be processed, and the workpiece is refracted by the focusing lens and totally reflected by the galvanometer assembly system in turn to become parallel light and then incident on the beam splitter, and then captured by the coaxial vision system after total reflection of the beam splitter, and the industrial control computer adjusts the deflection angles of the galvanometer assembly X and the galvanometer assembly Y in the galvanometer assembly system according to the imaging data.
[0010] The above-mentioned technical solution has the following defects: during the processing, since the position of the light spot leaving the galvanometer assembly is fixed, different positions on the PCB board need to be processed according to the processing requirements, and the PCB board needs to be moved in the XYZ axis direction, that is, a driving device is required to drive the installation tooling to move along the XYZ axis, which not only requires the use of a driving component, increasing the processing cost, but also requires the programming of the driving component according to the processing requirements, increasing the workload of the staff. Summary of the invention
[0011] In view of the shortcomings of the prior art, the object of the present invention is to provide an optical system structure for laser processing that can quickly adjust the position of a light spot so that the light spot can move along the XYZ axes.
[0012] The above object of the present invention is achieved through the following technical solutions:
[0013] An optical system structure for laser processing comprises a frame, on which a laser, a beam expander assembly connected to the output end of the laser, a turning assembly connected to the output end of the beam expander assembly, a reflection mechanism connected to the output end of the turning assembly, and a galvanometer assembly connected to the output end of the reflection mechanism are mounted, the laser and the beam expander assembly, the beam expander assembly and the turning assembly are all connected via a hollow light shielding rod, the reflection mechanism comprises a fixed-end reflection assembly and a movable-end reflection assembly connected below the fixed-end reflection assembly, the fixed-end reflection assembly is mounted on the frame, the movable-end reflection assembly is connected to a mounting plate, a waist-shaped groove is provided on the mounting plate, the waist-shaped groove is arranged in a vertical direction, a locking bolt is passed through the waist-shaped groove, the locking bolt passes through the waist-shaped groove and is threadedly connected to the frame, and the fixed-end reflection assembly and the movable-end reflection assembly are connected via a light shielding rod. The telescopic rod is connected through a hollow, the telescopic rod includes a fixed cylinder fixedly connected to the fixed-end reflection assembly and a sliding cylinder fixedly connected to the movable-end reflection assembly, the sliding cylinder is slidably connected in the fixed cylinder, the turning assembly is connected to the fixed-end reflection assembly, the galvanometer assembly is connected to the movable-end turning assembly, the movable-end reflection assembly can move relative to the fixed-end reflection assembly, an adjustment assembly is connected between the movable-end reflection assembly and the fixed-end reflection assembly, the adjustment assembly is installed on the telescopic rod, the adjustment assembly is used to adjust the movable-end reflection assembly to move towards or away from the fixed-end reflection assembly, a base is provided under the galvanometer assembly, a lifting assembly is provided between the galvanometer assembly and the base, the galvanometer assembly includes two small mirrors, a driving member for driving the small mirror to deflect is provided on the galvanometer assembly, and two driving members are provided in cooperation with the small mirror.
[0014] By adopting the above technical solution, the laser is emitted from the laser, and after the laser line is expanded by the beam expander, it enters the turning component, changes the beam angle, and then enters the reflection mechanism for reflection, and finally enters the galvanometer component to form a light spot to process the PCB board. The light shielding rod shields the light beam flying in the air to prevent the laser beam from contacting the external light source;
[0015] During this process, in order to change the height position of the light beam on the Z axis, when passing through the reflection mechanism, the light beam first passes through the fixed-end reflection component, then passes through the movable-end reflection component, and then enters the galvanometer component. The adjustment component is used to adjust the movable-end reflection component to move toward or away from the fixed-end reflection component. When the movable-end reflection component approaches the fixed-end reflection component, the light spot will move up. During the movement of the movable-end reflection component, the locking bolt moves in the waist-shaped groove. After the movable-end reflection component moves to a suitable position, the locking bolt is locked on the rack. When the movable-end reflection component moves away from the fixed-end reflection component, the light spot will move down. The telescopic rod plays a guiding role in adjusting the position of the movable-end reflection component and the fixed-end reflection component. At the same time, the light beam will pass between the telescopic rods of the central control, which plays a guiding role for the light beam.
[0016] The lifting assembly on the base is used to provide synchronous support for the galvanometer assembly as the movable end reflector assembly moves;
[0017] The driving member drives the two small mirrors to rotate, and the deflection angles of the two small mirrors can be adjusted, thereby adjusting the position of the light beam incident into the galvanometer assembly, and further changing the position of the light spot leaving the galvanometer assembly on the XY axis.
[0018] In a preferred example, the present invention can be further configured as follows: the adjustment component includes a connecting ring fixedly connected to the inner wall of the end of the fixed cylinder, an adjustment ring sleeved on the outer wall of the sliding cylinder, a spring 1 connected between the connecting ring and the adjustment ring, a cut corner 1 opened on the inner ring of the connecting ring close to the adjusting ring, and a cut corner 2 opened on the inner ring of the adjusting ring close to the connecting ring, the cut corner 1 and the cut corner 2 are spliced into a V-shaped groove, the adjustment component also includes a plurality of extrusion balls located in the V-shaped groove and a retaining frame located in the V-shaped groove, a plurality of the extrusion balls are evenly arranged along the circumferential direction of the V-shaped groove, the extrusion balls are in contact with the side wall of the sliding cylinder, the retaining frame is provided with a through groove with a diameter smaller than the diameter of the extrusion balls, and the extrusion balls are embedded in the through groove.
[0019] By adopting the above technical solution, the part of the extruded ball located on the outside of the through groove abuts against the side wall of the sliding cylinder, thereby increasing the sliding friction between the sliding cylinder and the fixed cylinder. When the sliding cylinder and the fixed cylinder need to slide, the adjusting ring is pulled to the side away from the connecting ring. At this time, the spring is in a stretched state, and the extruded ball is away from the sliding cylinder, which facilitates the relative sliding of the sliding cylinder and the fixed cylinder.
[0020] In a preferred example, the present invention can be further configured as follows: a ring groove 1 is provided on the outer ring of the connecting ring close to the side of the adjusting ring, and the ring groove 1 is connected to the outer side wall of the connecting ring; a ring groove 2 is provided on the outer ring of the adjusting ring close to the side of the connecting ring, and the ring groove 2 is connected to the outer side wall of the adjusting ring; a spring 1 is connected between the ring groove 1 and the ring groove 2, and one end of the spring 1 is fixedly connected to one side wall of the ring groove, and the other end of the spring 1 is fixedly connected to the side wall of the ring groove 2.
[0021] By adopting the above technical solution, spring one is arranged in ring groove one and ring groove two. Under the pulling force of spring one, the adjusting ring is pulled to move toward the side close to the connecting ring and abuts against the side wall of the connecting ring, so that the extrusion ball between the adjusting ring and the connecting ring is squeezed by the cutting angle one and the cutting angle two, moves toward the side close to the sliding cylinder, and abuts against the side wall of the sliding cylinder.
[0022] In a preferred example, the present invention can be further configured as follows: a second spring is connected between the fixed-end reflection component and the movable-end reflection component, and both ends of the second spring are fixedly connected to the fixed-end reflection component and the movable-end reflection component respectively.
[0023] By adopting the above technical solution, the second spring plays a supporting and connecting role between the movable reflection component and the fixed reflection component.
[0024] In a preferred example, the present invention can be further configured as follows: the lifting assembly includes a support tube connected to the base, a support rod slidably connected in the support tube and a limit ring threadedly connected to the support rod, the limit ring is rotatably connected to the top side wall of the support tube, the top of the support rod is detachably connected to the galvanometer assembly, and the limit ring abuts against the top of the support tube.
[0025] By adopting the above technical solution, when the movable end reflection assembly moves, since a flying light path needs to pass between the movable end reflection assembly and the galvanometer assembly, it is necessary to control the galvanometer to move in the vertical direction through the lifting assembly. The limit ring is threadedly connected to the support rod. When the support rod is rotated, the support rod can be adjusted to move along the length direction of the support tube, thereby adjusting the distance between the galvanometer assembly and the base, and further enabling the galvanometer to move synchronously with the movable end reflection assembly.
[0026] In a preferred example, the present invention can be further configured as follows: the driving member includes a servo motor, the output end of the servo motor is fixedly connected to a mounting frame, and the small mirror is detachably mounted on the mounting frame.
[0027] By adopting the above technical solution, the servo motor drives the mounting frame to rotate. When the mounting frame rotates, the small mirror rotates accordingly. After the positions of the two small mirrors are deflected, the positions of the light beams passing through the two small mirrors will be changed, thereby adjusting the positions of the light spots leaving the galvanometer on the X-axis and Y-axis, further facilitating the processing of the PCB board.
[0028] In a preferred example, the present invention can be further configured as follows: the collimator assembly includes a box body, a partition fixedly connected to the box body, a collimator body detachably installed in the box body on one side of the partition, and a reflector installed in the box body on the other side of the partition, and the collimator body is located on the side of the partition close to the laser.
[0029] By adopting the above technical solution, after the laser emits the laser, it first enters the beam expander body, and after the beam is expanded by the beam expander body, a light path with a smaller diameter is obtained. Then the light path passes through the partition and enters the reflector 1. After the reflection of the reflector 1, the path is changed, so that the light path enters the turning component.
[0030] In a preferred example, the present invention can be further configured as follows: the turning assembly includes a second box and a second reflector detachably connected to the second box, and the second box is detachably connected to the frame by bolts.
[0031] By adopting the above technical solution, the second reflector in the turning component is used to change the path of the light beam again.
[0032] In a preferred example, the present invention can be further configured as follows: the fixed-end reflection assembly includes a box body three and a reflector three detachably connected to the box body three, and the box body three is detachably connected to the frame by bolts.
[0033] By adopting the above technical solution, the reflector three in the fixed-end reflective assembly is used to change the light beam path again so that the light path is oriented toward the direction of gravity.
[0034] In a preferred example, the present invention can be further configured as follows: the movable end reflection assembly includes a box body four and a reflector four detachably connected to the box body four, and the box body four is detachably connected to the frame by bolts.
[0035] By adopting the above technical solution, the reflector four changes the flight path of the light beam again, converting the light beam in the direction of gravity into a light beam in the horizontal direction and injecting it into the galvanometer assembly.
[0036] In summary, the present invention includes at least one of the following beneficial technical effects:
[0037] 1. Through the arrangement of a fixed-end reflective component and a movable-end reflective component that moves relative to the fixed-end reflective component, when the movable-end reflective component moves relative to the fixed-end reflective component, the path of the light beam will be changed. When the movable-end reflective component is away from the fixed-end reflective component, the light beam will move downward along the Z-axis direction. When the movable-end reflective component is close to the fixed-end reflective component, the light beam will move upward along the Z-axis direction, thereby making the position of the light spot in the Z-axis direction controllable, and further making the position of the light spot in the Z-axis direction quickly adjustable;
[0038] 2. Through the arrangement of two small mirrors connected to the driving member, the small mirrors can rotate under the drive of the driving member, thereby adjusting the position of the light spot in the XY direction, and further enabling the position of the light spot in the XY axis direction to be quickly adjusted;
[0039] 3. By setting the second spring, the relative movement between the fixed end reflection component and the movable end reflection component can be buffered and connected. BRIEF DESCRIPTION OF THE DRAWINGS
[0040] Figure 1 It is a schematic diagram of the overall structure of the optical system for laser processing;
[0041] Figure 2 It is a schematic diagram of the structure of the optical system for laser processing;
[0042] Figure 3 yes Figure 2 The enlarged view of point A in the middle;
[0043] Figure 4 is a cross-sectional schematic diagram of the reflection mechanism and the galvanometer assembly;
[0044] Figure 5 yes Figure 4 A magnified schematic diagram of point B in the middle.
[0045] In the figure, 1, frame; 2, laser; 3, beam expander assembly; 31, box body 1; 32, partition; 33, beam expander body; 34, reflector 1; 4, turning assembly; 41, box body 2; 42, reflector 2; 5, reflection mechanism; 51, fixed end reflection assembly; 511, box body 3; 512, reflector 3; 52, movable end reflection assembly; 521, box body 4; 522, reflector 4; 53, mounting plate; 531, waist-shaped groove; 532, locking bolt; 54, telescopic rod; 541, fixed cylinder; 542, sliding cylinder; 543, Resistance block; 55, spring two; 6, galvanometer assembly; 61, base; 62, lifting assembly; 621, support tube; 622, support rod; 623, limit ring; 63, small mirror; 64, driving member; 641, mounting frame; 642, fixing frame; 643, connecting frame; 65, box five; 7, sunshade rod; 8, adjustment assembly; 81, connecting ring; 82, adjustment ring; 84, cut corner one; 85, cut corner two; 811, ring groove one; 821, ring groove two; 822, spring one; 87, extrusion ball; 88, retaining frame; 881, through groove. DETAILED DESCRIPTION
[0046] The present invention is further described in detail below in conjunction with the accompanying drawings.
[0047] Example:
[0048] An optical system structure for laser processing, referring to Figure 1 and Figure 2 , including a frame 1, on which a laser 2, a beam expander assembly 3 connected to the output end of the laser 2, a turning assembly 4 connected to the output end of the beam expander assembly 3, a reflection mechanism 5 connected to the output end of the turning assembly 4 and a galvanometer assembly 6 connected to the output end of the reflection mechanism 5 are detachably mounted by bolts; the laser 2 and the beam expander assembly 3, the beam expander assembly and the turning assembly 4 are all connected by a hollow light-shielding rod 7.
[0049] Reference Figure 1 and Figure 2 The laser is generated by the laser 2, emitted from the output end of the laser 2, and enters the beam expander assembly 3 after passing through the light shielding rod 7. The beam expander assembly 3 includes a box body 31 detachably connected to the frame 1 by bolts, a partition 32 fixedly connected to the box body 31, a beam expander body 33 detachably installed in the box body 31 on one side of the partition 32 by bolts, and a reflector 34 detachably installed in the box body 31 on the other side of the partition 32 by bolts. The partition 32 is provided with a circular groove for the laser to pass through.
[0050] Reference Figure 1 and Figure 2The laser line enters the box 31, and after being expanded by the beam expander, the incident small light beam is magnified by the beam expander. Then the light beam enters the reflector 34 and is reflected, and the beam path is changed. Then the light beam is emitted and enters the turning component 4 after passing through the shading rod 7.
[0051] Reference Figure 1 and Figure 2 The turning assembly 4 includes a box body 41 detachably mounted on the frame 1 by bolts and a reflector 42 detachably connected to the box body 41 . The light beam enters the box body 41 , is reflected by the reflector 42 , and then flies for a while before entering the reflection mechanism 5 .
[0052] Reference Figure 2 and Figure 4 The reflection mechanism 5 includes a fixed-end reflection component 51 and a movable-end reflection component 52 connected below the fixed-end reflection component 51. The fixed-end reflection component 51 includes a box body 511 detachably connected to the frame 1 by bolts and a reflector 3 512 detachably connected to the box body 511 by bolts. After the light leaves the turning component 4, it enters the box body 511 and forms a light beam in the direction of gravity after being reflected by the reflector 3 512.
[0053] Reference Figure 2 and Figure 4 The movable end reflection assembly 52 includes a box body 521 detachably connected to the frame 1 by bolts and a reflector 522 detachably connected in the box body 521 by bolts. A telescopic rod 54 is detachably connected between the box body 3 511 and the box body 4 521. The telescopic rod 54 is hollow and includes a fixed tube 541 and a sliding tube 542. The sliding tube 542 is slidably connected in the fixed tube 541. The fixed tube 541 is connected to the box body 3 511 by bolts, and the sliding tube 542 is connected to the box body 4 521 by bolts.
[0054] Reference Figure 2 and Figure 4 After the light beam in the direction of gravity passes through the telescopic rod 54, it enters the box body four 521, and the reflector four 522 changes the light beam in the direction of gravity into a horizontal direction. Then, after the light beam flies, it enters the galvanometer assembly 6.
[0055] Reference Figure 4 and Figure 5An adjustment component 8 is connected between the movable end reflection component 52 and the fixed end reflection component 51, and the adjustment component 8 is used to adjust the relative position between the movable end reflection component 52 and the fixed end reflection component 51. The adjustment component 8 includes a connecting ring 81 fixedly connected to the inner wall of the end of the fixed cylinder 541, an adjustment ring 82 sleeved on the outer wall of the sliding cylinder 542, a spring 822 connected between the connecting ring 81 and the adjusting ring 82, a cutting angle 84 provided on the inner ring of the connecting ring 81 close to the adjusting ring 82, a cutting angle 85 provided on the inner ring of the adjusting ring 82 close to the connecting ring 81, an extrusion ball 87 located between the connecting ring 81 and the adjusting ring 82, and a retaining frame 88 located between the connecting ring 81 and the adjusting ring 82.
[0056] Reference Figure 4 and Figure 5 A resisting block 543 is fixedly connected to the top of the sliding cylinder 542 . The resisting block 543 is located at the top of the connecting ring 81 . When the resisting block 543 moves downward, it resists against the top side wall of the connecting ring 81 .
[0057] Reference Figure 4 and Figure 5 The cut corner 1 84 and the cut corner 2 85 are spliced into a V-shaped groove, the extrusion ball 87 is located in the V-shaped groove, and a plurality of through grooves 881 are opened on the retaining frame 88. The extrusion ball 87 is embedded in the through grooves 881 and is matched with the through grooves 881. The diameter of the through grooves 881 is smaller than the diameter of the extrusion ball 87.
[0058] Reference Figure 4 and Figure 5 A ring groove 811 is provided on the outer ring of the connecting ring 81 near the side of the adjusting ring 82, and the ring groove 811 is communicated with the outer side wall of the connecting ring 81. A ring groove 2 821 is provided on the outer ring of the adjusting ring 82 near the side of the connecting ring 81, and the ring groove 2 821 is communicated with the outer side wall of the adjusting ring 82. A spring 822 is connected between the ring groove 811 and the ring groove 2 821, one end of the spring 822 is fixedly connected to the side wall of the ring groove 811, and the other end of the spring 822 is fixedly connected to the side wall of the ring groove 2 821, and a plurality of springs 822 are evenly arranged along the circumferential direction of the connecting ring 81.
[0059] Reference Figure 4 and Figure 5 Under the pulling force of spring 1 822 , the adjusting ring 82 moves toward the connecting ring 81 , and the cut corners 1 84 and 2 85 squeeze the extrusion ball 87 , causing the extrusion ball 87 to contact the side wall of the sliding cylinder 542 , thereby increasing the friction between the sliding cylinder 542 and the fixed cylinder 541 .
[0060] Reference Figure 2 and Figure 4A spring 2 55 is connected between the fixed end reflection component 51 and the movable end. Both ends of the spring 2 55 are fixedly connected to the side walls of the box body 3 511 and the box body 4 521 respectively, playing a connecting and supporting role between the box body 3 511 and the box body 4 521.
[0061] Reference Figure 2 A mounting plate 53 is fixedly connected to the side wall of the box body 521, and a waist-shaped groove 531 is opened on the mounting plate 53. The waist-shaped groove 531 is arranged in the vertical direction. A locking bolt 532 is passed through the waist-shaped groove 531. The locking bolt 532 passes through the waist-shaped groove 531 and is threadedly connected to the frame 1. When the sliding cylinder 542 and the fixing cylinder 541 are in position, the locking bolt 532 slides in the waist-shaped groove 531. When the position is adjusted, the mounting plate 53 and the box body 521 are installed on the frame 1 through the locking bolt 532.
[0062] Reference Figure 2 and Figure 3 The galvanometer assembly 6 includes a box body 65 detachably mounted on the frame 1 by bolts and two small mirrors 63 detachably mounted in the box body 65. Two driving members 64 are also mounted in the box body 65 by bolts. The driving members 64 are servo motors. The output ends of the two servo motors are fixedly connected to a mounting frame 641. The mounting frame 641 includes a fixing frame 642 and a connecting frame 643 mounted on the fixing frame 642 by bolts. The fixing frame 642 and the connecting frame 643 are spliced in a ring shape. The small mirrors 63 are detachably mounted between the fixing frame 642 and the connecting frame 643.
[0063] Reference Figure 3 and Figure 4 A connecting plate is connected to the box body 5 65, and a waist-shaped through groove 881 is opened on the connecting plate. The bolt passes through the waist-shaped through groove 881. A flying optical path needs to pass between the box body 5 65 and the box body 4 521. When the position of the box body 4 521 moves, the box body 5 65 moves accordingly and is then fixed to the frame 1 by bolts.
[0064] Reference Figure 2 and Figure 4 A base 61 is also fixedly connected to the frame 1, and a lifting assembly 62 is connected between the base 61 and the box body 5 65. The lifting assembly 62 includes a support tube 621 detachably connected to the base 61 by bolts, a support rod 622 slidably connected in the support tube 621, and a limit ring 623 threadedly connected to the support rod 622. The limit ring 623 is rotatably connected to the top side wall of the support tube 621, and the support rod 622 is connected to the box body 5 65 by bolts.
[0065] Reference Figure 2 and Figure 4, screw the limiting ring 623, adjust the position of the limiting ring 623 on the support rod 622, thereby adjusting the distance between the box body 5 65 and the base 61, so that the box body 5 65 and the box body 4 521 can move synchronously.
[0066] The implementation principle of this embodiment is as follows: the laser is emitted from the laser 2, first expanded by the beam expander body 33, then reflected by the reflector 1 34, then reflected by the reflector 2 42, the reflector 3 512 and the reflector 4 522, and then enters the galvanometer, and after being reflected by the two small mirrors 63, a light spot is formed to process the PCB board;
[0067] When the light spot needs to move along the Z-axis direction, the distance between the box body 3 511 and the box body 4 521 is adjusted, thereby adjusting the distance between the reflector 3 512 and the reflector 4 522, so that the light spot emitted from the galvanometer moves along the Z-axis direction;
[0068] When the light spot needs to move along the X-axis and Y-axis directions, the two small mirrors 63 are adjusted to rotate so that the light spot moves along the X-axis or the Y-axis.
[0069] The embodiments of this specific implementation method are all preferred embodiments of the present invention, and are not intended to limit the protection scope of the present invention. Therefore, any equivalent changes made based on the structure, shape, and principle of the present invention should be included in the protection scope of the present invention.
Claims
1. An optical system structure for laser processing, comprising a frame (1), characterized in that: The frame (1) is provided with a laser (2), a beam expander assembly (3) connected to the output end of the laser (2), a turning assembly (4) connected to the output end of the beam expander assembly (3), a reflection mechanism (5) connected to the output end of the turning assembly (4), and a galvanometer assembly (6) connected to the output end of the reflection mechanism (5). The laser (2) and the beam expander assembly (3), and the beam expander assembly (3) and the turning assembly (4) are connected via a hollow light shielding rod (7). The reflection mechanism (5) comprises a fixed end reflection assembly (51) and a movable end reflection assembly (52) connected below the fixed end reflection assembly (51). The fixed end reflection assembly (51) is installed on the frame (1). The movable end reflection assembly (5 2) is connected to a mounting plate (53), the mounting plate (53) is provided with a waist-shaped groove (531), the waist-shaped groove (531) is arranged in a vertical direction, a locking bolt (532) is passed through the waist-shaped groove (531), the locking bolt (532) passes through the waist-shaped groove (531) and is threadedly connected to the frame (1), the fixed end reflection component (51) and the movable end reflection component (52) are connected through a hollow telescopic rod (54), the telescopic rod (54) includes a fixed cylinder (541) fixedly connected to the fixed end reflection component (51) and a sliding cylinder (542) fixedly connected to the movable end reflection component (52), the sliding cylinder (542) is slidably connected in the fixed cylinder (541), the turning The component (4) is connected to the fixed end reflection component (51), the galvanometer component (6) is connected to the movable end turning component (4), the movable end reflection component (52) can move relative to the fixed end reflection component (51), an adjustment component (8) is connected between the movable end reflection component (52) and the fixed end reflection component (51), the adjustment component (8) is installed on the telescopic rod (54), and the adjustment component (8) is used to adjust the movable end reflection component (52) to move towards or away from the fixed end reflection component (51), a base (61) is provided below the galvanometer component (6), a lifting component (62) is provided between the galvanometer component (6) and the base (61), and the galvanometer component (6) includes two The small mirror (63) is provided on the galvanometer mirror assembly (6) with a driving member (64) for driving the small mirror (63) to deflect, and the driving member (64) is provided in pairs with the small mirror (63). The adjustment assembly (8) comprises a connecting ring (81) fixedly connected to the inner side wall of the end of the fixed cylinder (541), an adjustment ring (82) sleeved on the outer side wall of the sliding cylinder (542), a spring (822) connected between the connecting ring (81) and the adjustment ring (82), a cutting angle (84) provided on the inner ring of the connecting ring (81) close to the adjustment ring (82) and a cutting angle (85) provided on the inner ring of the adjustment ring (82) close to the connecting ring (81), and the cutting angle (84) and the cutting angle (85) are spliced into a V-shaped groove.The adjustment component (8) further comprises a plurality of extrusion balls (87) located in the V-shaped groove and a retaining frame (88) located in the V-shaped groove. The extrusion balls (87) are evenly arranged along the circumferential direction of the V-shaped groove. The extrusion balls (87) abut against the side wall of the sliding cylinder (542). The retaining frame (88) is provided with a through groove (881) having a diameter smaller than that of the extrusion balls (87). The extrusion balls (87) are embedded in the through groove (881). A second spring (55) is connected between the fixed end reflection component (51) and the movable end reflection component (52). The two ends of the second spring (55) are respectively fixedly connected to the fixed end reflection component (51) and the movable end reflection component (52).
2. The optical system structure for laser processing according to claim 1, characterized in that: The outer ring of the connecting ring (81) is provided with an annular groove 1 (811) on the side close to the adjusting ring (82), and the annular groove 1 (811) is communicated with the outer side wall of the connecting ring (81). The outer ring of the adjusting ring (82) is provided with an annular groove 2 (821) on the side close to the connecting ring (81), and the annular groove 2 (821) is communicated with the outer side wall of the adjusting ring (82). A spring 1 (822) is connected between the annular groove 1 (811) and the annular groove 2 (821), and one end of the spring 1 (822) is fixedly connected to the side wall of the annular groove 1 (811), and the other end of the spring 1 (822) is fixedly connected to the side wall of the annular groove 2 (821).
3. The optical system structure for laser processing according to claim 1, characterized in that: The lifting assembly (62) comprises a support tube (621) connected to the base (61), a support rod (622) slidably connected in the support tube (621), and a limit ring (623) threadedly connected to the support rod (622); the limit ring (623) is rotatably connected to the top side wall of the support tube (621); the top of the support rod (622) is detachably connected to the galvanometer assembly (6); and the limit ring (623) abuts against the top of the support tube (621).
4. The optical system structure for laser processing according to claim 1, characterized in that: The driving member (64) comprises a servo motor, an output end of the servo motor is fixedly connected to a mounting frame (641), and the small mirror (63) is detachably mounted on the mounting frame (641).
5. The optical system structure for laser processing according to claim 1, characterized in that: The beam expander assembly (3) comprises a box body (31), a partition (32) fixedly connected to the box body (31), a beam expander body (33) detachably mounted in the box body (31) and located on one side of the partition (32), and a reflector (34) mounted in the box body (31) and located on the other side of the partition (32), wherein the beam expander body (33) is located on a side of the partition (32) close to the laser (2).
6. The optical system structure for laser processing according to claim 1, characterized in that: The turning assembly (4) comprises a second box body (41) and a second reflector (42) detachably connected to the second box body (41); the second box body (41) is detachably connected to the frame (1) by bolts.
7. The optical system structure for laser processing according to claim 1, characterized in that: The fixed-end reflection assembly (51) comprises a box body three (511) and a reflection mirror three (512) detachably connected inside the box body three (511); the box body three (511) is detachably connected to the frame (1) by bolts.
8. The optical system structure for laser processing according to claim 1, characterized in that: The movable end reflection assembly (52) comprises a box body (521) and a reflection mirror (522) detachably connected to the box body (521); the box body (521) is detachably connected to the frame (1) by bolts.
Citation Information
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An ultraviolet laser processing device
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